CN111940912A - Laser differential confocal three-dimensional curved surface marking method and device - Google Patents
Laser differential confocal three-dimensional curved surface marking method and device Download PDFInfo
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- CN111940912A CN111940912A CN201910399756.0A CN201910399756A CN111940912A CN 111940912 A CN111940912 A CN 111940912A CN 201910399756 A CN201910399756 A CN 201910399756A CN 111940912 A CN111940912 A CN 111940912A
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- 238000000034 method Methods 0.000 title claims abstract description 15
- 238000001514 detection method Methods 0.000 claims abstract description 35
- 238000010330 laser marking Methods 0.000 claims abstract description 35
- 238000013519 translation Methods 0.000 claims description 13
- 230000008878 coupling Effects 0.000 claims description 4
- 238000010168 coupling process Methods 0.000 claims description 4
- 238000005859 coupling reaction Methods 0.000 claims description 4
- 230000001678 irradiating effect Effects 0.000 claims description 4
- 238000007639 printing Methods 0.000 claims description 4
- 238000012876 topography Methods 0.000 claims description 3
- 238000005516 engineering process Methods 0.000 abstract description 19
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
- B23K26/00—Working by laser beam, e.g. welding, cutting or boring
- B23K26/36—Removing material
- B23K26/362—Laser etching
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
- B23K26/00—Working by laser beam, e.g. welding, cutting or boring
- B23K26/02—Positioning or observing the workpiece, e.g. with respect to the point of impact; Aligning, aiming or focusing the laser beam
- B23K26/03—Observing, e.g. monitoring, the workpiece
- B23K26/032—Observing, e.g. monitoring, the workpiece using optical means
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
- B23K26/00—Working by laser beam, e.g. welding, cutting or boring
- B23K26/02—Positioning or observing the workpiece, e.g. with respect to the point of impact; Aligning, aiming or focusing the laser beam
- B23K26/04—Automatically aligning, aiming or focusing the laser beam, e.g. using the back-scattered light
- B23K26/046—Automatically focusing the laser beam
Abstract
The invention belongs to the field of laser marking, and relates to a high-precision three-dimensional curved surface laser marking method based on laser differential confocal focusing. The invention provides a method for measuring the three-dimensional shape of a curved surface workpiece, which combines a differential confocal object surface positioning technology and a laser marking technology, realizes high-precision measurement of the three-dimensional shape of the curved surface workpiece by using the differential confocal technology, and then prints a high-resolution pattern in a target area of the curved surface workpiece by using the laser marking technology according to the measured spatial position coordinate of the workpiece. The invention provides a laser differential confocal three-dimensional curved surface marking device, wherein a differential confocal three-dimensional shape detection light path and a pulse laser marking light path are designed in a common light path mode, a three-dimensional moving platform moving workpiece and a pulse laser light source are synchronously controlled by a computer in the whole process of marking to emit laser, automatic focusing and automatic marking are achieved, the quality of a processed product is high, and the laser differential confocal three-dimensional shape detection light path and the pulse laser marking light path can be put into production quickly.
Description
Technical Field
The invention belongs to the field of laser marking, and relates to a high-precision three-dimensional curved surface laser marking method based on laser differential confocal focusing and a laser differential confocal three-dimensional curved surface marking device.
Background
The laser marking machine is generally used for carving marks such as characters on the surfaces of different materials including metals by irradiating laser beams, and the marking effect is to expose deep-layer materials through the evaporation of surface-layer materials so as to carve exquisite patterns, trademarks and characters. Laser marking technology has become an important part of modern manufacturing processes. However, the laser marking machine products on the market at present mark on a plane, and are limited by flatness, and no products are marked on a curved surface by laser in China. Therefore, for laser marking on a three-dimensional curved surface workpiece, the key problem to be solved is to perform accurate three-dimensional positioning on the surface of the workpiece and then perform laser focusing marking according to the position coordinates of the curved surface. The precision of the three-dimensional positioning of the curved surface will directly affect the marking resolution at different positions of the surface. The confocal detection technology adopts a pinhole to filter scattered light outside a focus, and has high transverse resolution and axial positioning capability. The differential confocal technology is that on the basis of confocal microscopic measurement principle, a beam splitter prism is added in a confocal detection light path, a light intensity signal is divided into two paths, pinholes are respectively placed at the front and back symmetrical positions of an objective lens image focal plane, and the distance of an object deviated from the focal plane is reflected by detecting the difference value of the two paths of light intensity penetrating through the pinholes, namely the differential confocal response signal of the system. Compared with a confocal detection system, the differential confocal detection system utilizes zero-crossing point information with the maximum sensitivity to position on-axis position information, and positioning accuracy is remarkably improved.
Therefore, if the differential confocal detection technology with precise axial resolution can be applied to laser marking, high-resolution three-dimensional shape information of a workpiece can be obtained after the scanning measurement of the whole curved surface workpiece is completed, and the precise focusing marking on the curved surface can be realized.
Disclosure of Invention
In order to solve the problem of accurate marking on any three-dimensional curved surface workpiece, the invention provides a method which combines a differential confocal object surface positioning technology and a laser marking technology, realizes high-precision measurement of the three-dimensional appearance of the curved surface workpiece by using the differential confocal technology, and then prints a high-resolution pattern in a target area of the curved surface workpiece by using the laser marking technology according to the measured spatial position coordinate of the workpiece. The technical problem to be solved by the embodiment of the invention is to provide a laser three-dimensional curved surface marking method and device, which can perform laser marking on any curved surface workpiece.
On one hand, the invention provides a laser differential confocal three-dimensional curved surface marking method, which comprises the following steps:
(a) the pulse laser light source is used for laser marking, the continuous laser light source is used for detecting the three-dimensional shape of a workpiece, and pulse laser emitted by the pulse laser light source and continuous laser emitted by the continuous laser light source are subjected to common-path coupling; the pulse laser and the continuous laser beam are converged by an objective lens to form a confocal focusing beam and irradiate the workpiece surface;
(b) backward scattered light generated by irradiating the sample to be detected with the continuous laser beam enters a differential confocal detection system to measure a differential confocal response curve;
(d) scanning the workpiece, and determining the height information of the surface of the workpiece at the position by using the differential confocal detection system at the position of each scanning point so as to obtain the three-dimensional topography information of the surface of the workpiece;
(e) and (d) closing the continuous laser light source, selecting the area of the surface of the workpiece to be marked, moving the workpiece according to the three-dimensional shape information of the surface of the workpiece measured in the step (d), so that the pulse laser is converged by the objective lens and then is just focused on the surface of the workpiece, controlling the pulse laser light source to emit the pulse laser by combining with the pattern to be marked, and further, printing the required pattern on the surface of the workpiece point by point to realize the laser marking of the curved surface.
Further, the zero-crossing point value of the differential confocal response curve corresponds to the minimum size of a focused light spot formed on the surface of the workpiece by the focused light beam; when the curved surface workpiece is marked, the minimum marking light spot is determined through the differential confocal response curve at different positions of the workpiece, and then equal resolution curved surface laser marking is realized.
On the other hand, the invention also provides a laser differential confocal three-dimensional curved surface marking device which comprises a pulse laser source, a continuous laser source, a first spectroscope, a beam expander, a second spectroscope, an objective lens, a differential confocal detection system, a three-dimensional translation table, a signal collector and a computer.
The continuous laser source is used for detecting the position of the surface of a workpiece; the first spectroscope is used for coupling the pulse laser and the continuous laser; the beam expander, the second beam splitter and the objective lens are sequentially positioned in the emergent direction of the synthesized laser, the beam expander expands the laser beam, and the objective lens converges the synthesized beam to form a focused beam to irradiate the surface of the workpiece; backward reflected light excited from the surface of the workpiece is collected by the objective lens and then reflected by the second beam splitter; the light beam reflected from the second spectroscope enters the differential confocal detection system;
a workpiece is placed on the three-dimensional translation table, and the three-dimensional translation table is controlled by the computer to drive the workpiece to scan and translate along three spatial directions; the signal collector transmits a differential confocal response signal which is obtained by the detection of the differential confocal detection system and changes along with the position of the workpiece to the computer, and the computer analyzes the differential confocal response signal to obtain a differential confocal response curve so as to determine the three-dimensional position information of the surface of the workpiece; and the computer controls the three-dimensional translation table to move the workpiece until the surface of the workpiece coincides with the focus of the focused beam, synchronously controls the pulse laser light source to emit pulse laser, and the focused pulse laser beam is used for printing a required pattern on the surface of the workpiece point by point.
Compared with the prior art, the invention has the following innovation points:
1. the differential confocal detection technology is used for measuring the three-dimensional appearance of a curved surface workpiece, and the surface position information of the three-dimensional high-resolution workpiece can be obtained;
2. the differential confocal detection technology is combined with the laser marking technology, so that the laser marking can be carried out on any area of the surface of a workpiece with any curved surface, and the application range of the laser marking is expanded;
3. the differential confocal detection technology has very high axial positioning precision, and the laser marking based on the differential confocal detection can obtain the same marking resolution at different positions of a curved surface workpiece, so that high-precision marking is realized;
according to the laser differential confocal three-dimensional curved surface marking device, the differential confocal three-dimensional morphology detection light path and the pulse laser marking light path are designed in a common light path mode, the three-dimensional moving platform moving workpiece and the pulse laser light source are synchronously controlled to emit laser in the whole process by a computer during marking, automatic focusing and automatic marking are achieved, the quality of processed products is high, and the laser marking device can be put into production quickly.
Drawings
FIG. 1 is a schematic diagram of a laser differential confocal three-dimensional curved surface marking method according to the present invention;
FIG. 2 is a schematic diagram of the differential confocal detection system of the present invention;
FIG. 3 is a schematic diagram of an embodiment of laser differential confocal three-dimensional curved surface marking according to the present invention;
figure 4 is a schematic representation of a co-differential confocal response curve of the present invention,I 1(z)，I 2(z) The light intensity response curve of the light intensity sensor 15 after the focus and the light intensity response curve of the light intensity sensor 17 before the focus are respectively.
Wherein: 1-pulse laser light source, 2-continuous laser light source, 3-first spectroscope, 4-beam expander, 5-second spectroscope, 6-objective, 7-workpiece, 8-three-dimensional translation stage, 9-differential confocal detection system, 10-signal collector, 11-computer, 12-differential confocal convergent lens, 13-differential confocal spectroscope, 14-back-focus pinhole, 15-back-focus light intensity sensor, 16-front-focus pinhole, 17-front-focus light intensity sensor.
Detailed Description
The invention is further illustrated by the following figures and examples.
The basic idea of the invention is to combine the differential confocal object surface positioning technology with precise axial resolution and the laser marking technology; the high-precision measurement of the three-dimensional appearance of the surface of the curved surface workpiece is realized by utilizing a differential confocal technology, and then a target pattern is printed on a target area on the surface of the workpiece point by utilizing pulse laser.
Example 1
The problem to be solved by the present embodiment is to print the target pattern on the central region of the surface of a concave workpiece. Embodiments use a confocal detection system to achieve three-dimensional positioning of the workpiece surface, using pulsed laser to pattern the center region of a curved workpiece. A workpiece needing laser marking is placed on a sample table to be fixed, a differential confocal scanning system is used for three-dimensionally scanning the appearance of the workpiece according to the marking requirement, and a curved surface is obtainedxyzAnd (4) information. And according to the coordinate information, focusing the pulse laser to a set area on the surface of the workpiece to print a pattern.
Fig. 3 is a specific implementation apparatus for implementing differential confocal three-dimensional topography detection and laser marking in this embodiment, and includes a pulse laser source 1, a continuous laser source 2, a first beam splitter 3, a beam expander 4, a second beam splitter 5, an objective lens 6, a three-dimensional translation stage 8, a differential confocal detection system 9, a signal collector 10, and a computer 11. The wavelengths of the pulse laser light source 1 and the continuous laser light source 2 are 532 nm, and the pulse width of the pulse laser light source 1 is 2 ns. The laser emitted by the pulse laser source 1 and the continuous laser source 2 passes through the first beam splitter and then sequentially passes through the beam expander 4, the second beam splitter 5 and the objective 6 to irradiate on the workpiece 7. The workpiece 7 is placed on a three-dimensional translation stage 8 and scanned by the three-dimensional translation stage 8. The backward scattered light generated by the continuous laser beam irradiating the workpiece 7 is collected by the objective lens 6 and then reflected by the second beam splitter 5 to enter the differential confocal detection system 9.
In the system, the differential confocal detection system 9 comprises a differential confocal convergence lens 12, a differential confocal spectroscope 13, a back-focus pinhole 14, a back-focus light intensity sensor 15, a front-focus pinhole 16 and a front-focus light intensity sensor 17. The back-focus pinhole 14 and the front-focus pinhole 16 are symmetrical with respect to the focal plane of the differential confocal converging lens 14. The light beam reflected by the surface of the workpiece passes through a differential confocal converging lens 12, then is divided into two paths by a differential confocal beam splitter 13, one path passes through a focus rear pinhole 14 and is received by a focus rear light intensity sensor 15, and the other path passes through a focus front pinhole 16 and is received by a focus front light intensity sensor 17. Defining two orthogonal directions perpendicular to the optical axis of the probe beam asxAndyin a direction along the optical axis of the probe beamzAnd (4) direction.
The laser marking method on the surface of the curved surface workpiece comprises the following steps:
(a) a workpiece 7 needing laser marking is placed on a three-dimensional translation table 8 to be fixed, a continuous laser light source 2 is turned on, and the edge of the continuous laser light source 2 is positionedxAndydirectionally moving the workpiece 7 to the transverse scanning start position(x 1 , y 1) And then scans the workpiece 7 in the z direction at that position. Using a differential confocal detection system 9, a differential confocal response curve as shown in fig. 4 was measured as a function of the scanning positionI(z) And then accurately determining the surface position of the probe beam focused on the sample to be measured according to the zero crossing point of the differential confocal response curve, and recording the scanning position (x 1 , y 1) At a surface position of the workpiece 7 of a height ofz 1。
(b) Edge ofxAndydirectionally scanning the workpiece 7, repeating step (a), and (c) at each scanning pointx i , y i ) Determining surface information of the workpiece 7 at a position using a differential confocal detection system 9z iObtaining three-dimensional shape information of the surface of the workpiece;
(c) and (b) closing the continuous laser light source 2, opening the pulse laser light source 1, selecting an area to be marked on the surface of the workpiece 7, moving the workpiece 7 according to the three-dimensional shape information measured in the step (b), so that the light beam is converged by the objective lens 6 and then is just focused on the surface of the workpiece 7, controlling the pulse laser light source 1 to emit pulse laser by combining with the pattern to be marked, and further, marking the required pattern on the surface of the workpiece 7 point by point to realize the curved surface laser marking.
The embodiments described above can be further combined or replaced, and the embodiments are only described as preferred examples of the patent of the present invention, and do not limit the concept and scope of the patent of the present invention, and those skilled in the art can make various changes and modifications to the technical solution of the patent of the present invention without departing from the design concept of the present invention, and fall within the protection scope of the present invention.
Claims (6)
1. The laser differential confocal three-dimensional curved surface marking method is characterized by comprising the following steps of:
(a) the pulse laser light source is used for laser marking, the continuous laser light source is used for detecting the three-dimensional shape of a workpiece, and pulse laser emitted by the pulse laser light source and continuous laser emitted by the continuous laser light source are subjected to common-path coupling; the pulse laser and the continuous laser beam are converged by an objective lens to form a confocal focusing beam and irradiate the workpiece surface;
(b) backward scattered light generated by irradiating the sample to be detected with the continuous laser beam enters a differential confocal detection system to measure a differential confocal response curve;
(d) scanning the workpiece, and determining the height information of the surface of the workpiece at the position by using the differential confocal detection system at the position of each scanning point so as to obtain the three-dimensional topography information of the surface of the workpiece;
(e) and (d) closing the continuous laser light source, selecting the area of the surface of the workpiece to be marked, moving the workpiece according to the three-dimensional shape information of the surface of the workpiece measured in the step (d), so that the pulse laser is converged by the objective lens and then is just focused on the surface of the workpiece, controlling the pulse laser light source to emit the pulse laser by combining with the pattern to be marked, and further, printing the required pattern on the surface of the workpiece point by point to realize the laser marking of the curved surface.
2. The laser differential confocal three-dimensional curved surface marking method according to claim 1, characterized in that: the zero-crossing point value of the differential confocal response curve corresponds to the minimum size of a focused light spot formed on the surface of a workpiece by the focused light beam; when the curved surface workpiece is marked, the minimum marking light spot is determined through the differential confocal response curve at different positions of the workpiece, and then equal resolution curved surface laser marking is realized.
3. Laser differential confocal three-dimensional curved surface marking device, including pulse laser light source and continuous laser light source, its characterized in that: the device comprises a first spectroscope, a beam expander, a second spectroscope, an objective lens, a differential confocal detection system, a three-dimensional translation table, a signal collector and a computer;
the continuous laser source is used for detecting the position of the surface of a workpiece; the first spectroscope is used for coupling the pulse laser and the continuous laser; the beam expander, the second beam splitter and the objective lens are sequentially positioned in the emergent direction of the synthesized laser, the beam expander expands the laser beam, and the objective lens converges the synthesized beam to form a focused beam to irradiate the surface of the workpiece; backward reflected light excited from the surface of the workpiece is collected by the objective lens and then reflected by the second beam splitter; the light beam reflected from the second spectroscope enters the differential confocal detection system;
a workpiece is placed on the three-dimensional translation table, and the three-dimensional translation table is controlled by the computer to drive the workpiece to scan and translate along three spatial directions; the signal collector transmits a differential confocal response signal which is obtained by the detection of the differential confocal detection system and changes along with the position of the workpiece to a computer, and the computer analyzes the differential confocal response signal to obtain a differential confocal response curve so as to determine the three-dimensional position information of the surface of the workpiece; and the computer controls the three-dimensional translation table to move the workpiece until the surface of the workpiece coincides with the focus of the focused beam, synchronously controls the pulse laser light source to emit pulse laser, and the focused pulse laser beam is used for printing a required pattern on the surface of the workpiece point by point.
4. The laser differential confocal three-dimensional curved surface marking device as claimed in claim 3, wherein: the differential confocal detection system comprises a differential confocal convergent lens, a differential confocal spectroscope, a back-focus pinhole, a front-focus pinhole, a back-focus light intensity sensor and a front-focus light intensity sensor; the back focus pinhole is positioned behind the focus of the differential confocal convergence lens, and the front focus pinhole is positioned in front of the focus of the differential confocal convergence lens; the positions of the back-focus pinhole and the front-focus pinhole are symmetrical relative to the focal plane of the differential confocal convergent lens; after passing through the differential confocal convergence lens, the light beam is divided into two paths by the differential confocal beam splitter, wherein one path passes through the after-focus pinhole and is received by the after-focus light intensity sensor, and the other path passes through the before-focus pinhole and is received by the before-focus light intensity sensor; and measuring a light intensity response curve after the focus by the light intensity sensor after the focus, measuring a light intensity response curve before the focus by the light intensity sensor before the focus, and subtracting the light intensity response curve after the focus and the light intensity response curve before the focus to obtain a differential confocal response curve.
5. The laser differential confocal three-dimensional curved surface marking device as claimed in claim 3, wherein the differential confocal three-dimensional shape detection light path and the pulse laser marking light path are designed in a common light path, and the three-dimensional moving platform moving workpiece and the pulse laser light source are synchronously controlled by the computer in the whole process to emit laser for automatic focusing and automatic marking during marking.
6. The laser differential confocal three-dimensional curved surface marking device as claimed in claim 3, wherein: the objective lens is a zoom objective lens, and the height of the continuous laser and the pulse laser focusing light spot is adjusted by changing the focal length of the zoom objective lens.
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Citations (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN103552384A (en) * | 2013-10-26 | 2014-02-05 | 苏州图森激光有限公司 | Laser marking method for capsule |
| WO2014110900A1 (en) * | 2013-01-21 | 2014-07-24 | 北京理工大学 | Method and apparatus for laser differential confocal spectrum microscopy |
| CN204936518U (en) * | 2015-09-08 | 2016-01-06 | 深圳市荣兴精密激光技术有限公司 | A kind of 3D laser marking machine |
| CN108413867A (en) * | 2017-04-18 | 2018-08-17 | 北京理工大学 | Laser micro/nano processing light splitting pupil differential confocal on-line monitoring integral method and device |
| CN108507986A (en) * | 2018-03-17 | 2018-09-07 | 杨佳苗 | The discrete fluorescence spectrum of differential confocal and fluorescence lifetime detection method and device |
| CN108801987A (en) * | 2018-03-17 | 2018-11-13 | 杨佳苗 | Confocal discrete fluorescence spectrum and fluorescence lifetime detection method and device |
| CN210475857U (en) * | 2019-05-14 | 2020-05-08 | 苏州洛博斯特光电科技有限公司 | Laser differential confocal three-dimensional curved surface marking device |
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2019
- 2019-05-14 CN CN201910399756.0A patent/CN111940912A/en active Pending
Patent Citations (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO2014110900A1 (en) * | 2013-01-21 | 2014-07-24 | 北京理工大学 | Method and apparatus for laser differential confocal spectrum microscopy |
| CN103552384A (en) * | 2013-10-26 | 2014-02-05 | 苏州图森激光有限公司 | Laser marking method for capsule |
| CN204936518U (en) * | 2015-09-08 | 2016-01-06 | 深圳市荣兴精密激光技术有限公司 | A kind of 3D laser marking machine |
| CN108413867A (en) * | 2017-04-18 | 2018-08-17 | 北京理工大学 | Laser micro/nano processing light splitting pupil differential confocal on-line monitoring integral method and device |
| CN108507986A (en) * | 2018-03-17 | 2018-09-07 | 杨佳苗 | The discrete fluorescence spectrum of differential confocal and fluorescence lifetime detection method and device |
| CN108801987A (en) * | 2018-03-17 | 2018-11-13 | 杨佳苗 | Confocal discrete fluorescence spectrum and fluorescence lifetime detection method and device |
| CN210475857U (en) * | 2019-05-14 | 2020-05-08 | 苏州洛博斯特光电科技有限公司 | Laser differential confocal three-dimensional curved surface marking device |
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