CN111913317A - Liquid crystal box and manufacturing method thereof, spatial light modulator and spatial light modulation system - Google Patents
Liquid crystal box and manufacturing method thereof, spatial light modulator and spatial light modulation system Download PDFInfo
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- CN111913317A CN111913317A CN202010856393.1A CN202010856393A CN111913317A CN 111913317 A CN111913317 A CN 111913317A CN 202010856393 A CN202010856393 A CN 202010856393A CN 111913317 A CN111913317 A CN 111913317A
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- 239000004973 liquid crystal related substance Substances 0.000 title claims abstract description 212
- 238000004519 manufacturing process Methods 0.000 title claims abstract description 14
- 239000011521 glass Substances 0.000 claims abstract description 62
- 238000011049 filling Methods 0.000 claims abstract description 59
- 239000000758 substrate Substances 0.000 claims abstract description 58
- BQCADISMDOOEFD-UHFFFAOYSA-N Silver Chemical compound [Ag] BQCADISMDOOEFD-UHFFFAOYSA-N 0.000 claims abstract description 45
- 229910052709 silver Inorganic materials 0.000 claims abstract description 45
- 239000004332 silver Substances 0.000 claims abstract description 45
- 238000000034 method Methods 0.000 claims description 25
- 210000002858 crystal cell Anatomy 0.000 claims description 21
- 239000007788 liquid Substances 0.000 claims description 21
- 238000010438 heat treatment Methods 0.000 claims description 19
- 239000004005 microsphere Substances 0.000 claims description 15
- 239000003822 epoxy resin Substances 0.000 claims description 14
- 229920000647 polyepoxide Polymers 0.000 claims description 14
- 125000006850 spacer group Chemical group 0.000 claims description 12
- 238000004140 cleaning Methods 0.000 claims description 10
- 239000003292 glue Substances 0.000 claims description 9
- 238000004528 spin coating Methods 0.000 claims description 9
- 238000001914 filtration Methods 0.000 claims description 8
- 230000010287 polarization Effects 0.000 claims description 8
- 238000001755 magnetron sputter deposition Methods 0.000 claims description 7
- 238000007747 plating Methods 0.000 claims description 6
- 238000007789 sealing Methods 0.000 claims description 6
- 238000000576 coating method Methods 0.000 claims description 5
- 238000000992 sputter etching Methods 0.000 claims description 5
- 230000009471 action Effects 0.000 claims description 4
- 230000003287 optical effect Effects 0.000 claims description 4
- 230000008569 process Effects 0.000 claims description 4
- 230000001154 acute effect Effects 0.000 claims description 3
- 238000005530 etching Methods 0.000 claims description 3
- 229910052760 oxygen Inorganic materials 0.000 claims description 3
- 239000001301 oxygen Substances 0.000 claims description 3
- -1 oxygen ions Chemical class 0.000 claims description 3
- 238000004806 packaging method and process Methods 0.000 claims description 3
- 238000003825 pressing Methods 0.000 claims description 3
- 238000005086 pumping Methods 0.000 claims description 3
- AMGQUBHHOARCQH-UHFFFAOYSA-N indium;oxotin Chemical compound [In].[Sn]=O AMGQUBHHOARCQH-UHFFFAOYSA-N 0.000 abstract 1
- ZMXDDKWLCZADIW-UHFFFAOYSA-N N,N-Dimethylformamide Chemical compound CN(C)C=O ZMXDDKWLCZADIW-UHFFFAOYSA-N 0.000 description 6
- 230000000694 effects Effects 0.000 description 5
- 230000005540 biological transmission Effects 0.000 description 4
- 238000003384 imaging method Methods 0.000 description 4
- 239000011248 coating agent Substances 0.000 description 1
- 230000009365 direct transmission Effects 0.000 description 1
- 230000005684 electric field Effects 0.000 description 1
- 238000005286 illumination Methods 0.000 description 1
- 238000011068 loading method Methods 0.000 description 1
- 239000000463 material Substances 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 239000011148 porous material Substances 0.000 description 1
- 230000004044 response Effects 0.000 description 1
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- G—PHYSICS
- G02—OPTICS
- G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
- G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
- G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour
- G02F1/13—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour based on liquid crystals, e.g. single liquid crystal display cells
- G02F1/133—Constructional arrangements; Operation of liquid crystal cells; Circuit arrangements
- G02F1/1333—Constructional arrangements; Manufacturing methods
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- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B27/00—Optical systems or apparatus not provided for by any of the groups G02B1/00 - G02B26/00, G02B30/00
- G02B27/42—Diffraction optics, i.e. systems including a diffractive element being designed for providing a diffractive effect
- G02B27/46—Systems using spatial filters
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- G—PHYSICS
- G02—OPTICS
- G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
- G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
- G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour
- G02F1/13—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour based on liquid crystals, e.g. single liquid crystal display cells
- G02F1/133—Constructional arrangements; Operation of liquid crystal cells; Circuit arrangements
- G02F1/1333—Constructional arrangements; Manufacturing methods
- G02F1/1337—Surface-induced orientation of the liquid crystal molecules, e.g. by alignment layers
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- G—PHYSICS
- G02—OPTICS
- G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
- G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
- G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour
- G02F1/13—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour based on liquid crystals, e.g. single liquid crystal display cells
- G02F1/133—Constructional arrangements; Operation of liquid crystal cells; Circuit arrangements
- G02F1/1333—Constructional arrangements; Manufacturing methods
- G02F1/1337—Surface-induced orientation of the liquid crystal molecules, e.g. by alignment layers
- G02F1/13378—Surface-induced orientation of the liquid crystal molecules, e.g. by alignment layers by treatment of the surface, e.g. embossing, rubbing or light irradiation
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- G—PHYSICS
- G02—OPTICS
- G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
- G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
- G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour
- G02F1/13—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour based on liquid crystals, e.g. single liquid crystal display cells
- G02F1/133—Constructional arrangements; Operation of liquid crystal cells; Circuit arrangements
- G02F1/1333—Constructional arrangements; Manufacturing methods
- G02F1/1337—Surface-induced orientation of the liquid crystal molecules, e.g. by alignment layers
- G02F1/13378—Surface-induced orientation of the liquid crystal molecules, e.g. by alignment layers by treatment of the surface, e.g. embossing, rubbing or light irradiation
- G02F1/133788—Surface-induced orientation of the liquid crystal molecules, e.g. by alignment layers by treatment of the surface, e.g. embossing, rubbing or light irradiation by light irradiation, e.g. linearly polarised light photo-polymerisation
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- G—PHYSICS
- G02—OPTICS
- G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
- G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
- G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour
- G02F1/13—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour based on liquid crystals, e.g. single liquid crystal display cells
- G02F1/133—Constructional arrangements; Operation of liquid crystal cells; Circuit arrangements
- G02F1/1333—Constructional arrangements; Manufacturing methods
- G02F1/1339—Gaskets; Spacers; Sealing of cells
- G02F1/13392—Gaskets; Spacers; Sealing of cells spacers dispersed on the cell substrate, e.g. spherical particles, microfibres
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- G—PHYSICS
- G02—OPTICS
- G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
- G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
- G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour
- G02F1/13—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour based on liquid crystals, e.g. single liquid crystal display cells
- G02F1/133—Constructional arrangements; Operation of liquid crystal cells; Circuit arrangements
- G02F1/1333—Constructional arrangements; Manufacturing methods
- G02F1/1341—Filling or closing of cells
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- G—PHYSICS
- G02—OPTICS
- G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
- G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
- G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour
- G02F1/13—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour based on liquid crystals, e.g. single liquid crystal display cells
- G02F1/133—Constructional arrangements; Operation of liquid crystal cells; Circuit arrangements
- G02F1/1333—Constructional arrangements; Manufacturing methods
- G02F1/1343—Electrodes
- G02F1/134309—Electrodes characterised by their geometrical arrangement
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- Physics & Mathematics (AREA)
- Nonlinear Science (AREA)
- General Physics & Mathematics (AREA)
- Optics & Photonics (AREA)
- Mathematical Physics (AREA)
- Chemical & Material Sciences (AREA)
- Crystallography & Structural Chemistry (AREA)
- Spectroscopy & Molecular Physics (AREA)
- Geometry (AREA)
- Liquid Crystal (AREA)
Abstract
The invention discloses a liquid crystal box, which comprises a lower glass substrate and an upper glass substrate, wherein the upper surface of the lower glass substrate is plated with a silver film layer, the lower surface of the upper glass substrate is provided with an ITO (indium tin oxide) transparent electrode layer, the lower surface of the ITO transparent electrode layer is provided with a liquid crystal alignment layer, and the alignment direction of the liquid crystal alignment layer is vertical to the electrode stripe direction of the ITO transparent electrode layer; a support layer is fixed between the lower surface of the liquid crystal alignment layer and the upper surface of the silver film layer, a liquid crystal filling space is defined by the support layer, the liquid crystal alignment layer and the silver film layer together, the liquid crystal filling space is filled with a liquid crystal layer, and a signal generator is connected between the ITO transparent electrode layer and the silver film layer. The invention also discloses a manufacturing method of the liquid crystal box, a spatial light modulator and a spatial light modulation system using the liquid crystal box, wherein the spatial light modulation system filters 0-order diffracted light by combining plasma resonance with a liquid crystal grating and outputs +/-1-order diffracted light.
Description
Technical Field
The invention relates to a liquid crystal box, a manufacturing method of the liquid crystal box, a spatial light modulator and a spatial light modulation system which are manufactured by using the liquid crystal box.
Background
A Spatial Light Modulator (SLM) is also a main way to replace a conventional holographic plate to realize dynamic display of a holographic pattern because of its advantages of good optical modulation characteristics, low power consumption, fast response speed, small volume, and the like. However, because the display mode adopts the laser light which is transmitted in space for illumination, the zero-order diffraction (direct-transmission or reflected direct-current term) usually occupies a large part of energy and is mixed with the image to be displayed, so that the displayed image becomes dim and fuzzy, and the imaging quality is seriously reduced.
Disclosure of Invention
The first technical problem to be solved by the invention is as follows: the liquid crystal box filters 0-order diffraction light by combining plasma resonance and a liquid crystal grating and outputs +/-1-order diffraction light.
The second technical problem to be solved by the invention is: the manufacturing method of the liquid crystal box can manufacture the liquid crystal box, and the liquid crystal grating of the liquid crystal box is combined with the plasma resonance to filter out 0 diffraction light.
The third technical problem to be solved by the invention is: a spatial light modulator using the liquid crystal cell is provided, the spatial light modulator can generate plasma resonance after polarized light is totally reflected, then 0-order diffraction light can be filtered out through a liquid crystal grating of the liquid crystal cell, and +/-1-order diffraction light is output.
The fourth technical problem to be solved by the invention is: the spatial light modulation system can firstly perform spatial filtering on laser generated by a laser, then form polarized light meeting the spatial light modulator through a linear polarizer, and then filter 0-order diffracted light by using the spatial light modulator to output +/-1-order diffracted light.
In order to solve the first technical problem, the technical scheme of the invention is as follows: a liquid crystal box comprises a lower glass substrate and an upper glass substrate, wherein a silver film layer is plated on the upper surface of the lower glass substrate, an ITO transparent electrode layer is arranged on the lower surface of the upper glass substrate, a liquid crystal alignment layer is arranged on the lower surface of the ITO transparent electrode layer, and the alignment direction of the liquid crystal alignment layer is vertical to the electrode stripe direction of the ITO transparent electrode layer; a support layer is fixed between the lower surface of the liquid crystal alignment layer and the upper surface of the silver film layer, the support layer, the liquid crystal alignment layer and the silver film layer jointly enclose a liquid crystal filling space, the liquid crystal filling space is filled with a liquid crystal layer, and a signal generator is connected between the ITO transparent electrode layer and the silver film layer.
As a preferable scheme, the support layer includes a plurality of PS microsphere spacers disposed on the lower surface of the liquid crystal alignment layer and the upper surface of the silver film layer, and a space between the PS microsphere spacers constitutes the liquid crystal filling space.
Preferably, the thickness of the silver film layer is 100nm-120nm, the diameter of the PS microsphere spacer is 243-511nm, and the liquid crystal filled in the liquid crystal layer is E7 liquid crystal.
After the technical scheme is adopted, the invention has the effects that: the lower glass substrate of the liquid crystal box is provided with the silver film layer, so that evanescent waves are generated at the interface of the silver film layer and the lower glass substrate when light rays irradiate on the silver film layer, the evanescent waves and the SPPs are resonated, the SPPs are excited, plasma resonance is realized, then 0-order diffracted light is filtered through the grating effect of the aligned liquid crystal, and +/-1-order diffracted light is output.
In order to solve the third technical problem, the technical scheme of the invention is as follows: a plasma spatial light modulator comprises a reflection prism and a liquid crystal box, wherein the reflection prism is in an inverted isosceles trapezoid shape, a refractive index matching layer is arranged above a long edge of the reflection prism, and a lower glass substrate of the liquid crystal box is bonded above the refractive index matching layer.
Preferably, the acute angles of the reflecting prisms are 69.8 ± 1 °.
After the technical scheme is adopted, the invention has the effects that: because the isosceles trapezoid reflecting prism and the liquid crystal box are inverted in the spatial light modulator, the reflecting prism can enable polarized light to generate total reflection, and accordingly evanescent waves can be generated between the lower glass substrate and the silver film layer to generate plasma resonance. Therefore, the liquid crystal grating of the liquid crystal box is combined with the plasma resonance, so that 0-order diffracted light can be effectively filtered, +/-1-order diffracted light is output, the beam quality of the spatial light modulator is improved, and dynamically recorded reference light is provided for holographic imaging.
In order to solve the fourth technical problem, the technical scheme of the invention is as follows: a spatial light modulation system, the spatial light modulation system comprising: the laser comprises a laser, a spatial filter mirror group, a linear polarizer and the spatial modulator, wherein the spatial filter mirror group is arranged in the light emission of the laser, the linear polarizer is arranged at the downstream of the light path of the spatial filter mirror group, the laser generates laser light, incident light passing through the linear polarizer is perpendicular to one waist of the reflecting prism, and the incident angle formed by the incident light and a normal line is larger than the total reflection critical angle of the lower glass substrate.
As a preferred scheme, the spatial filter lens group comprises a focusing lens, an orifice plate and a beam expanding lens, the focusing lens, the orifice plate and the beam expanding lens are sequentially arranged according to the light path direction, and the orifice plate is provided with a light hole.
After the technical scheme is adopted, the invention has the effects that: this spatial light modulation system passes through the laser instrument and produces laser, then filter through spatial filtering mirror group earlier, rethread line polaroid changes non-linear polarization into linear polarization, then, the incident light gets into reflecting prism and forms SPPs resonance state at the surface that glass substrate and silver membranous layer contacted down, ITO transparent electrode layer and the silver membranous layer of liquid crystal cell respectively draw out an electrode and insert signal generator, give liquid crystal cell loading voltage through signal generator, thereby make the liquid crystal cell form the liquid crystal grating, this liquid crystal cell has satisfied Bragg transmission diffraction grating, when conventional spatial light modulator used, when the linear polarization incides: transmitted light has +1 and 0 order diffracted light; the incident light is left-handed circular polarized light, and the transmitted light is only +1 and 0-level light; the incident light is right-handed circularly polarized light, and the transmitted light is only-1 and 0-level light. In the scheme of the invention, the SPPs resonance can separate the display image and the zero-order transmitted light, and the transmitted light only has diffraction light of plus or minus 1 order when linearly polarized light is incident through the SPPs resonance and the liquid crystal grating; the incident light is left-handed circular polarized light, and the transmitted light is only +1 level light; the incident light is right-handed circularly polarized light, and the transmitted light is only-1 level light. This improves the quality of the light beam.
In order to solve the second technical problem, the technical solution of the present invention is: a manufacturing method of a liquid crystal box is used for forming the liquid crystal box and comprises the following steps:
s1, plating an ITO film on the lower surface of the upper glass substrate by adopting a magnetron sputtering method, and etching the ITO film into an ITO transparent electrode layer with a corresponding period by adopting an interference exposure method and an ion etching method, wherein the period is 235-915 nm;
s2, plating a silver film layer on the upper surface of the lower glass substrate by adopting a magnetron sputtering coating method;
s3, cleaning the surface of the ITO transparent electrode layer, cleaning by common wiping, and then cleaning for 18-25min by oxygen ions;
s4, spin-coating alignment liquid on the surface of the ITO transparent electrode layer to form a liquid crystal alignment layer;
s5, selecting ps microsphere spacer liquid with the diameter of 243-511nm to be sprayed on the surfaces of an ITO transparent electrode layer and a liquid crystal alignment layer, then covering a lower glass substrate plated with a silver film on the ps microsphere, arranging the silver film layer and the ITO transparent electrode layer oppositely, sealing the peripheries of an upper glass substrate and the lower glass substrate by using epoxy resin glue, reserving two symmetrical liquid crystal filling openings, slightly pressing by using fingers until no stripe is observed from the surface of the upper glass substrate, and heating and curing the epoxy resin;
s6, exposing the liquid crystal alignment layer by using an ultraviolet laser with the wavelength of 450nm, and adjusting the direction of the ITO transparent electrode to be vertical to the linear polarization direction of the ultraviolet laser;
s7, heating the culture dish filled with the E7 liquid crystal on a heating table to 114-116 ℃, immersing a reserved opening of a liquid crystal box in the liquid crystal, filling the E7 liquid crystal in a liquid crystal filling space by utilizing the liquid capillary action of the liquid crystal box, placing the liquid crystal box on the heating table to be continuously heated at 114-116 ℃ for 3-4min after the liquid crystal filling space is completely filled with the liquid crystal, then adjusting the temperature of the heating table to 85-95 ℃, keeping the liquid crystal box on the heating table for 3-4min, and sealing the filling opening by using epoxy resin glue.
Preferably, the method for spin-coating the alignment liquid in step S4 includes the following steps:
dissolving BY of 1 mass percent in DMF solution of 99 mass percent to form BY alignment liquid, then carrying out a spin coating process, wherein an upper glass substrate is placed on a rotating table, B Y alignment liquid is sprayed from the center of an ITO transparent electrode, the upper glass substrate firstly lasts for 10s at the rotating speed of 800rpm, then lasts for 40s at the rotating speed of 1500rpm, and then is pre-baked for 30 minutes at the temperature of 90 ℃ to form a liquid crystal alignment layer;
preferably, in the step S7, the method for filling the liquid crystal E7 in the liquid crystal filling space may be replaced by the following steps:
plugging one filling opening of the liquid crystal box, then placing the liquid crystal box into a vacuum cavity, wherein an air inlet pipe and an air exhaust pipe are arranged on the vacuum cavity, the air exhaust pipe is communicated with a vacuum pump, an air inlet valve is arranged on the air inlet pipe, the vacuum pump is opened for continuous vacuum pumping, so that air in a liquid crystal filling space of the liquid crystal box is exhausted, then, liquid crystal is filled into the vacuum cavity, and the other filling opening of the liquid crystal box is immersed under the liquid level of the liquid crystal; and then stopping vacuumizing, not completely opening an air inlet valve, enabling the vacuum cavity to be communicated with the external air pressure to press the liquid crystal into the liquid crystal filling space, completely opening the air inlet valve to completely fill the liquid crystal filling space after 80% of the liquid crystal is filled in the liquid crystal filling space, overturning the liquid crystal box, and packaging the two filling openings with epoxy resin glue to finish liquid crystal filling.
After the technical scheme is adopted, the invention has the effects that: the manufacturing method can manufacture a liquid crystal box meeting the required filtering requirement, and can form an ITO transparent electrode layer by a coating method, an interference exposure method and an ion etching method according to the filtering requirement, and simultaneously align the liquid crystal after forming a silver film layer, and adjust the direction of the ITO transparent electrode to be vertical to the linear polarization direction of an ultraviolet laser; after filling the liquid crystal, the long axis of the liquid crystal and the ITO transparent electrode keep the same direction. Therefore, the liquid crystal box can combine plasma resonance with the liquid crystal grating, effectively filter 0-order diffracted light, output +/-1-order diffracted light, improve the beam quality of the spatial light modulator and provide dynamically recorded reference light for holographic imaging.
Drawings
The invention is further illustrated with reference to the following figures and examples.
FIG. 1 is a schematic structural view of embodiment 1 of the present invention;
FIG. 2 is a schematic structural view of embodiment 2 of the present invention;
FIG. 3 is a schematic structural view of embodiment 3 of the present invention;
FIG. 4 is a schematic structural view of embodiment 4 of the present invention;
in the drawings: 1. a liquid crystal cell; 101. a lower glass substrate; 102. a silver film layer; 103. a scaffold layer; 104. filling a space with liquid crystal; 105. a liquid crystal alignment layer; an ITO transparent electrode layer; 107. an upper glass substrate; 108. a signal generator; 109. an epoxy resin fixing layer; 2. a reflective prism; 3. a laser; 4. a focusing mirror; 5. an orifice plate; 6. a beam expander; 7. a linear polarizer; 8. a vacuum chamber; 81. an air exhaust pipe; 82. an air inlet pipe; 83. a liquid crystal adding tube; 84. an exhaust valve; 85. an intake valve.
Detailed Description
The present invention is described in further detail below with reference to specific examples.
Example 1
As shown in fig. 1, a liquid crystal cell 1, the liquid crystal cell 1 comprises a lower glass substrate 101 and an upper glass substrate 107, wherein the glass material of the upper glass substrate 107 has a refractive index of 1.756 at a wavelength of 633nm and has good optical transparency. The refractive index of the lower glass substrate 101 is 1.8;
the upper surface of the lower glass substrate 101 is plated with a silver film layer 102, the thickness of the silver film layer 102 is 100nm-120nm, and preferably, the thickness of the silver film layer 102 is 100 nm;
an ITO transparent electrode layer 106 is arranged on the lower surface of the upper glass substrate 107, a liquid crystal alignment layer 105 is arranged on the lower surface of the ITO transparent electrode layer 106, and the alignment direction of the liquid crystal alignment layer 105 is vertical to the electrode stripe direction of the ITO transparent electrode layer 106; after the liquid crystal is filled, the liquid crystal molecules are aligned in the direction of the liquid crystal alignment layer 105, and the alignment direction is perpendicular to the linear polarization direction.
A support layer 103 is fixed between the lower surface of the liquid crystal alignment layer 105 and the upper surface of the silver film layer 102, the support layer 103, the liquid crystal alignment layer 105 and the silver film layer 102 jointly enclose a liquid crystal filling space 104, the support layer 103 comprises a plurality of PS microsphere spacers arranged on the lower surface of the liquid crystal alignment layer 105 and the upper surface of the silver film layer 102, and the space between the PS microsphere spacers forms the liquid crystal filling space 104. The diameter of the PS microsphere spacer is selected to be 243-511 nm; the gap formed by the upper layer of glass sheet and the lower layer of glass sheet can meet the requirement for better uniformity. The liquid crystal filling space 104 is filled with a liquid crystal layer, and the liquid crystal filled in the liquid crystal layer is E7 liquid crystal. The E7 liquid crystal is currently a commercially available liquid crystal model. A signal generator 108 is connected between the ITO transparent electrode layer 106 and the silver film layer 102. By applying voltage to the upper ITO electrode and the lower silver film, liquid crystal molecules are deflected under the action of an electric field, and a liquid crystal grating with the ITO transparent electrode layer 106 as a period is formed.
Example 2
As shown in fig. 2, the embodiment of the present invention discloses a plasma spatial light modulator, which includes an inverted isosceles trapezoid reflecting prism 2 and the liquid crystal cell 1, wherein an index matching layer is disposed above a long side of the reflecting prism 2, and a lower glass substrate of the liquid crystal cell 1 is bonded above the index matching layer. The reflection prism 2 is in an isosceles trapezoid shape, the prism is made of glass with a refractive index of 1.8, two acute angles are 69.8 +/-1 degrees, incident light rays vertically enter from the waist of the trapezoid, the incident light rays and a normal line form an incident angle of 69.8 degrees which is larger than the angle of a total reflection critical angle of the lower glass substrate 101, the incident light rays enter the refractive index matching layer after passing through the reflection prism 2, the refractive index matching layer performs refractive index matching, the incident light rays are made to enter the lower glass substrate 101 and the silver film layer 102 in a straight line mode, evanescent waves are generated between the silver film layer 102 and the lower glass substrate 101, the evanescent waves and the SPPs resonate, the SPPs are excited, and meanwhile the reflected light rays exit the prism at the same angle.
The liquid crystal box 1 respectively leads out an electrode from each of the ITO transparent electrode layer 106 and the silver film layer 102, and is connected to the signal generator 108, and the signal generator 108 loads voltage to the liquid crystal box 1, so that the liquid crystal box 1 forms a liquid crystal grating. Because the structure of the liquid crystal box 1 meets the Bragg transmission diffraction grating, SPPs can separate display images and zero-order transmission light, and the transmission light only has diffraction light of +/-1 order when linearly polarized light is incident through SPPs resonance and the liquid crystal grating; the incident light is left-handed circular polarized light, and the transmitted light is only +1 level light; the incident light is right-handed circularly polarized light, and the transmitted light is only-1 level light.
Example 3
As shown in fig. 3, the present invention also discloses a spatial light modulation system, which includes: the laser comprises a laser 3, a spatial filter mirror group, a linear polarizer 7 and the spatial modulator, wherein the spatial filter mirror group is arranged in the light emission of the laser 3, the linear polarizer 7 is arranged at the downstream of the optical path of the spatial filter mirror group, the laser 3 generates incident light of the laser passing through the linear polarizer 7, the incident light is perpendicular to one waist of the reflecting prism 2, and the incident angle formed by the incident light and the normal is larger than the total reflection critical angle of the lower glass substrate 101.
In this embodiment, the spatial filter lens group includes focusing lens 4, orifice plate 5 and beam expander 6, focusing lens 4, orifice plate 5 and beam expander 6 set gradually according to the light path direction, be provided with the light trap on the orifice plate 5. The laser 3 is a He-Ne laser 3 having a wavelength of 633 nm.
He-Ne laser with the wavelength of 633nm passes through a light hole of the pore plate 5 after being focused by the focusing lens 4, then passes through the beam expanding lens 6, so that filtering to a certain degree is achieved, then the light passes through the linear polarizer 7 to convert non-linear polarized light into linear polarized light, and an SPPs resonance state is formed between the lower glass substrate 101 and the silver film layer 102. The spatial light modulation system can realize filtering of the linear polarizer and filtering 0-order diffracted light, thereby improving the output +/-1-order diffracted light of the light beam, providing dynamically recorded reference light for holographic imaging and improving the light beam quality of the spatial light modulator.
Example 4
As shown in fig. 4, a method for manufacturing a liquid crystal cell 1, which is used for manufacturing the liquid crystal cell 1 in example 1, includes the following steps:
s1, plating an ITO film on the lower surface of the upper glass substrate 107 by adopting a magnetron sputtering method, and etching the ITO film into an ITO transparent electrode layer 106 with a corresponding period by adopting an interference exposure method and an ion etching method, wherein the period is 235-915 nm; wherein, the magnetron sputtering method, the interference exposure method and the ion etching method are all conventional processes at present.
S2, plating a silver film layer 102 on the upper surface of the lower glass substrate 101 by adopting a magnetron sputtering coating method;
s3, cleaning the surface of the ITO transparent electrode layer 106, firstly cleaning by common wiping, and then cleaning for 18-25min by oxygen ions; through the cleaning steps, the next step of coating the alignment liquid can be better carried out.
S4, spin-coating alignment liquid on the surface of the ITO transparent electrode layer 106 to form a liquid crystal alignment layer 105;
the method for spin-coating the alignment liquid in the step S4 includes the following steps:
dissolving 1 mass percent of BY in 99 mass percent of DMF solution to form BY alignment liquid, wherein BY is brilliant yellow and DMF is dimethylformamide, then carrying out a spin coating process, wherein an upper glass substrate 107 is placed on a rotating platform, B Y alignment liquid is sprayed from the center of an ITO transparent electrode, the upper glass substrate 107 firstly lasts for 10s at the rotating speed of 800rpm and then lasts for 40s at the rotating speed of 1500rpm, and then pre-baking is carried out for 30 minutes at the temperature of 90 ℃ to form a liquid crystal alignment layer 105;
s5, selecting ps microsphere spacer liquid with the diameter of 243-511nm to be sprayed on the surfaces of the ITO transparent electrode layer 106 and the liquid crystal alignment layer 105, then covering the ps microsphere with the lower glass substrate 101 plated with the silver film, arranging the silver film layer 102 and the ITO transparent electrode layer 106 oppositely, sealing the peripheries of the upper glass substrate 107 and the lower glass substrate 101 by using epoxy resin glue, reserving two symmetrical liquid crystal filling ports, slightly pressing by using fingers until no stripe is observed from the surface of the upper glass substrate 107, and heating and curing the epoxy resin to form the epoxy resin fixing layer 109;
s6, exposing the liquid crystal alignment layer 105 by using an ultraviolet laser 3 with the wavelength of 450nm, and adjusting the direction of the ITO transparent electrode to be vertical to the linear polarization direction of the ultraviolet laser 3; thus, after filling the liquid crystal, the long axis of the liquid crystal and the ITO transparent electrode layer 106 are maintained in the same direction.
S7, heating a culture dish filled with E7 liquid crystal on a heating table to 114-116 ℃, preferably 115 ℃, immersing a reserved port of a liquid crystal box 1 in the liquid crystal, filling the E7 liquid crystal in a liquid crystal filling space 104 by using the liquid capillary action of the liquid crystal box 1, after the liquid crystal filling space 104 is completely filled with the liquid crystal, placing the liquid crystal box 1 on the heating table, continuously heating at 114-116 ℃ for 3-4min, preferably 115 ℃, preferably for 3min, then adjusting the temperature of the heating table to 85-95 ℃, preferably for 90 ℃, keeping the liquid crystal box 1 on the heating table for 3-4min, preferably for 3min, and sealing the filling port by using epoxy resin glue.
In the step S7, the mode that the E7 liquid crystal is filled in the liquid crystal filling space 104 may be replaced by the following steps:
plugging one filling opening of the liquid crystal box 1, then placing the liquid crystal box 1 into a vacuum cavity 8, wherein an air inlet pipe 82 and an air exhaust pipe 81 are arranged on the vacuum cavity 8, the air exhaust pipe 81 is communicated with a vacuum pump, an exhaust valve 84 is arranged on the air exhaust pipe 81, an air inlet valve 85 is arranged on the air inlet pipe 82, the vacuum pump is opened for continuous vacuum pumping, so that air in a liquid crystal filling space 104 of the liquid crystal box 1 is exhausted, then filling liquid crystal into the vacuum cavity 8 from a liquid crystal adding pipe 83, and immersing the other filling opening of the liquid crystal box 1 below the liquid crystal level; and then stopping vacuumizing, not completely opening the air inlet valve 85, enabling the vacuum cavity 8 to be communicated with the external air pressure to press the liquid crystal into the liquid crystal filling space 104, completely opening the air inlet valve 85 to completely fill the liquid crystal filling space 104 after 80% of the liquid crystal is filled in the liquid crystal filling space 104, overturning the liquid crystal box 1, and packaging the two filling openings with epoxy resin glue to finish liquid crystal filling.
The scope of the invention is defined by the following claims, and various modifications and changes made to the technical solution of the present invention without departing from the spirit of the present invention are intended to fall within the scope of the present invention.
Claims (10)
1. A liquid crystal cell, comprising: the liquid crystal box comprises a lower glass substrate and an upper glass substrate, wherein a silver film layer is plated on the upper surface of the lower glass substrate, an ITO transparent electrode layer is arranged on the lower surface of the upper glass substrate, a liquid crystal alignment layer is arranged on the lower surface of the ITO transparent electrode layer, and the alignment direction of the liquid crystal alignment layer is vertical to the electrode stripe direction of the ITO transparent electrode layer; a support layer is fixed between the lower surface of the liquid crystal alignment layer and the upper surface of the silver film layer, the support layer, the liquid crystal alignment layer and the silver film layer jointly enclose a liquid crystal filling space, the liquid crystal filling space is filled with a liquid crystal layer, and a signal generator is connected between the ITO transparent electrode layer and the silver film layer.
2. A liquid crystal cell according to claim 1, wherein: the support layer comprises a plurality of PS microsphere spacers arranged on the lower surface of the liquid crystal alignment layer and the upper surface of the silver film layer, and spaces among the PS microsphere spacers form the liquid crystal filling space.
3. A liquid crystal cell according to claim 2, wherein: the thickness of the silver film layer is 100nm-120nm, the diameter of the PS microsphere spacer is 243-511nm, and the liquid crystal filled in the liquid crystal layer is E7 liquid crystal.
4. A plasmonic spatial light modulator, comprising: the spatial light modulator comprises a reflection prism with an inverted isosceles trapezoid shape and a liquid crystal cell according to claim 1, wherein an index matching layer is arranged above the long side of the reflection prism, and the lower glass substrate of the liquid crystal cell is bonded above the index matching layer.
5. The spatial light modulator of claim 4, wherein: the two acute angles of the reflecting prism are 69.8 +/-1 degrees.
6. A spatial light modulation system, characterized by: the spatial light modulation system includes: a laser, a set of spatial filter mirrors disposed in the emission of the laser, a linear polarizer disposed downstream in the optical path of the set of spatial filter mirrors, and a spatial modulator according to claim 4, wherein the laser generates a laser beam having an incident beam passing through the linear polarizer perpendicular to one of the waist portions of the reflecting prism, and the incident beam having an incident angle with the normal greater than the critical angle for total reflection of the lower glass substrate.
7. A spatial light modulation system according to claim 6 wherein: the spatial filtering mirror group comprises a focusing mirror, an orifice plate and a beam expanding mirror, the focusing mirror, the orifice plate and the beam expanding mirror are sequentially arranged according to the direction of a light path, and a light hole is formed in the orifice plate.
8. A manufacturing method of a liquid crystal box is characterized in that: the method for making a liquid crystal cell according to claim 1, comprising the steps of:
s1, plating an ITO film on the lower surface of the upper glass substrate by adopting a magnetron sputtering method, and etching the ITO film into an ITO transparent electrode layer with a corresponding period by adopting an interference exposure method and an ion etching method, wherein the period is 235-915 nm;
s2, plating a silver film layer on the upper surface of the lower glass substrate by adopting a magnetron sputtering coating method;
s3, cleaning the surface of the ITO transparent electrode layer, cleaning by common wiping, and then cleaning for 18-25min by oxygen ions;
s4, spin-coating alignment liquid on the surface of the ITO transparent electrode layer to form a liquid crystal alignment layer;
s5, selecting ps microsphere spacer liquid with the diameter of 243-511nm to be sprayed on the surfaces of an ITO transparent electrode layer and a liquid crystal alignment layer, then covering a lower glass substrate plated with a silver film on the ps microsphere, arranging the silver film layer and the ITO transparent electrode layer oppositely, sealing the peripheries of an upper glass substrate and the lower glass substrate by using epoxy resin glue, reserving two symmetrical liquid crystal filling openings, slightly pressing by using fingers until no stripe is observed from the surface of the upper glass substrate, and heating and curing the epoxy resin;
s6, exposing the liquid crystal alignment layer by using an ultraviolet laser with the wavelength of 450nm, and adjusting the direction of the ITO transparent electrode to be vertical to the linear polarization direction of the ultraviolet laser;
s7, heating the culture dish filled with the E7 liquid crystal on a heating table to 114-116 ℃, immersing a reserved opening of a liquid crystal box in the liquid crystal, filling the E7 liquid crystal in a liquid crystal filling space by utilizing the liquid capillary action of the liquid crystal box, placing the liquid crystal box on the heating table to be continuously heated at 114-116 ℃ for 3-4min after the liquid crystal filling space is completely filled with the liquid crystal, then adjusting the temperature of the heating table to 85-95 ℃, keeping the liquid crystal box on the heating table for 3-4min, and sealing the filling opening by using epoxy resin glue.
9. The method of manufacturing a liquid crystal cell according to claim 8, wherein: the method for spin-coating the alignment liquid in the step S4 includes the following steps:
dissolving BY with the mass percentage of 1% in DMF solution with the mass percentage of 99% to form BY alignment liquid, then carrying out a spin coating process, wherein an upper glass substrate is placed on a rotating table, the BY alignment liquid is sprayed from the center of an ITO transparent electrode, the upper glass substrate firstly lasts for 10s at the rotating speed of 800rpm, then lasts for 40s at the rotating speed of 1500rpm, and then is pre-baked for 30 minutes at the temperature of 90 ℃ to form a liquid crystal alignment layer.
10. The method of manufacturing a liquid crystal cell according to claim 9, wherein: the method of filling the liquid crystal filling space with the E7 liquid crystal in the step S7 may be replaced by the following steps:
plugging one filling opening of the liquid crystal box, then placing the liquid crystal box into a vacuum cavity, wherein an air inlet pipe and an air exhaust pipe are arranged on the vacuum cavity, the air exhaust pipe is communicated with a vacuum pump, an air inlet valve is arranged on the air inlet pipe, the vacuum pump is opened for continuous vacuum pumping, so that air in a liquid crystal filling space of the liquid crystal box is exhausted, then, liquid crystal is filled into the vacuum cavity, and the other filling opening of the liquid crystal box is immersed under the liquid level of the liquid crystal; and then stopping vacuumizing, and not completely opening an air inlet valve, wherein the vacuum cavity is communicated with the external air pressure to press the liquid crystal into the liquid crystal filling space, after 80% of the liquid crystal is filled in the liquid crystal filling space, completely opening the air inlet valve to completely fill the liquid crystal filling space, turning over the liquid crystal box, and packaging the two filling openings by using epoxy resin glue to finish liquid crystal filling.
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| TWI223484B (en) * | 2003-09-10 | 2004-11-01 | Univ Nat Chiao Tung | A multi-wavelength external-cavity laser with digital and mode-hop-free fine tuning mechanisms |
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