CN111905846B - Preparation device and preparation method of paper-based micro-fluidic chip based on micro-plasma - Google Patents
Preparation device and preparation method of paper-based micro-fluidic chip based on micro-plasma Download PDFInfo
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- CN111905846B CN111905846B CN202010713911.4A CN202010713911A CN111905846B CN 111905846 B CN111905846 B CN 111905846B CN 202010713911 A CN202010713911 A CN 202010713911A CN 111905846 B CN111905846 B CN 111905846B
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01L—CHEMICAL OR PHYSICAL LABORATORY APPARATUS FOR GENERAL USE
- B01L3/00—Containers or dishes for laboratory use, e.g. laboratory glassware; Droppers
- B01L3/50—Containers for the purpose of retaining a material to be analysed, e.g. test tubes
- B01L3/502—Containers for the purpose of retaining a material to be analysed, e.g. test tubes with fluid transport, e.g. in multi-compartment structures
- B01L3/5027—Containers for the purpose of retaining a material to be analysed, e.g. test tubes with fluid transport, e.g. in multi-compartment structures by integrated microfluidic structures, i.e. dimensions of channels and chambers are such that surface tension forces are important, e.g. lab-on-a-chip
- B01L3/502707—Containers for the purpose of retaining a material to be analysed, e.g. test tubes with fluid transport, e.g. in multi-compartment structures by integrated microfluidic structures, i.e. dimensions of channels and chambers are such that surface tension forces are important, e.g. lab-on-a-chip characterised by the manufacture of the container or its components
Abstract
The invention discloses a preparation device and a preparation method of a paper-based micro-fluidic chip based on microplasma, which comprises a plasma generator main body, a high-voltage electrode plate, a grounding electrode plate, a plasma jet nozzle, a working gas source and a high-voltage power supply, wherein the high-voltage electrode plate is adhered to one side of the plasma generator main body and is connected with the high-voltage end of the high-voltage power supply; the grounding electrode plate is adhered to the other side of the plasma generator main body and is connected with the grounding end of the high-voltage power supply; the plasma jet nozzle is arranged below the plasma generator main body, and the working gas source is connected with the plasma generator main body; the invention can realize high-precision graphical processing of the microfluidic channel under the condition of no mask, and the processing parameters are adjustable in real time; therefore, hydrophilic/hydrophobic micro channels with different line widths, different patterns and different wetting characteristics can be rapidly prepared, and the preparation efficiency of the paper-based micro-fluidic chip is greatly improved.
Description
Technical Field
The invention relates to the technical field of gas discharge plasma, in particular to a preparation device and a preparation method of a paper-based micro-fluidic chip based on micro-plasma.
Background
With the increasing prominence of food safety, environmental pollution and medical and health problems, a rapid and accurate on-site instant detection method is urgently needed to meet the requirements of real-time detection and analysis of samples. The paper-based micro-fluidic chip is a new micro-fluidic analysis technology in the field of analysis and detection, and because the paper is adopted as a substrate to replace traditional materials such as silicon, glass, high polymer and the like, and the fluid can realize pump-free self-driving on the paper through capillary force, the paper-based micro-fluidic chip has the unique advantages of low cost, simple processing, convenient use and carrying and the like, and has wide application prospects in the fields of medical diagnosis, food quality detection, environmental monitoring and the like.
Aiming at the preparation of the paper-based microfluidic chip, the core of the preparation is that a hydrophilic/hydrophobic microchannel network with a specific structure and a specific pattern is processed on paper, so that fluid flows according to a set track, and a micro laboratory on the paper is constructed. At present, the preparation methods of the paper-based microfluidic chip are many and mainly divided into a physical method and a chemical method. The physical method is mainly to fill hydrophobic reagents (such as paraffin, photoresist and the like) in specific fiber gaps of paper to form hydrophilic/hydrophobic isolation channels by methods such as laser processing, wax-spraying printing, silk-screen printing, ink-jet printing, stamp stamping and the like. The processing methods have the advantages of simple preparation steps, mass production and the like, but the processed channel patterns have low resolution, are difficult to prepare complicated and fine patterns, and cannot adjust relevant characteristic parameters of the microfluidic channel in real time, such as line width, wetting characteristic and the like. The chemical method firstly bonds hydrophobic reagents (such as alkyl ketene dimer and the like) on the surface of paper fibers through chemical bonding to realize the hydrophobization of the paper, and then selectively degrades the hydrophobic reagents bonded on the surfaces of the fibers in regions under the protection of a mask through methods such as ultraviolet lithography, ultraviolet curing and the like, thereby realizing the construction of the micro flow channel. These processing methods have the advantage of high pattern resolution, but are expensive in equipment and generally require a mask to achieve patterning, and thus are complicated in process. In addition, both of the above methods basically require a hydrophobic treatment by means of a wet treatment process using various chemical solvents, and the use of these chemical solvents causes not only environmental pollution but also pollution to the paper itself, thereby affecting the detection result to some extent.
In view of the above-mentioned drawbacks, the inventors of the present invention have finally obtained the present invention through a long period of research and practice.
Disclosure of Invention
In order to solve the technical defects, the technical scheme adopted by the invention is that the preparation device of the paper-based micro-fluidic chip based on the micro-plasma comprises a plasma generator main body, a high-voltage electrode plate, a grounding electrode plate, a plasma jet nozzle, a working gas source and a high-voltage power supply, wherein the high-voltage electrode plate is adhered to one side of the plasma generator main body and is connected with a high-voltage end of the high-voltage power supply; the grounding electrode slice is adhered to the other side of the plasma generator main body and is connected with the grounding end of the high-voltage power supply; the plasma jet nozzle is arranged below the plasma generator main body, and the working gas source is connected with the plasma generator main body.
Preferably, the plasma jet nozzle based on microplasma includes a first flexible nozzle and a second flexible nozzle, the first flexible nozzle and the second flexible nozzle are symmetrically attached to each other, a first fitting groove and a second fitting groove are correspondingly formed in the attaching surfaces of the first flexible nozzle and the second flexible nozzle, notches of the first fitting groove and the second fitting groove are correspondingly formed, when the first flexible nozzle and the second flexible nozzle are attached to each other, the notches of the first fitting groove and the second fitting groove are connected in a fitting manner to form a nozzle groove, and the first flexible nozzle and the second flexible nozzle form the plasma jet nozzle.
Preferably, pressure blocks are respectively arranged on two sides of the plasma jet nozzle based on the microplasma, the pressure blocks correspond to the first flexible nozzle and the second flexible nozzle one to one, and the pressure blocks respectively apply pressure to the first flexible nozzle and the second flexible nozzle to change the size of the nozzle groove.
Preferably, the bottom of the main body of the plasma generator based on microplasma is provided with two supporting plates, the two supporting plates are arranged in parallel and symmetrically, the first flexible nozzle and the second flexible nozzle are arranged between the two supporting plates, the pressure block is arranged between the two supporting plates, and the corresponding surfaces of the two supporting plates are provided with concave adjusting grooves.
Preferably, the preparation device of the paper-based micro-fluidic chip based on the microplasma further comprises an upper computer; the working gas source is communicated with the plasma generator main body through a flow controller, and the high-voltage power supply, the pressure block and the flow controller are all connected with the upper computer.
Preferably, the preparation device of the paper-based micro-fluidic chip based on the microplasma further comprises an XY moving platform; the XY moving platform is arranged below the plasma jet nozzle and controls the movement of the hydrophobized filter paper.
Preferably, the working gas source is helium/oxygen mixed gas, and the high-voltage power supply is a sine alternating-current high-voltage power supply.
Preferably, the first flexible nozzle and the second flexible nozzle are made of flexible material polydimethylsiloxane.
Preferably, the axis of the through hole of the plasma generator main body is aligned with the axis of the nozzle groove.
Preferably, the preparation method of the paper-based micro-fluidic chip based on the microplasma adopts the preparation device of the paper-based micro-fluidic chip based on the microplasma, and comprises the following steps:
s1, depositing a parylene-C film with the thickness of 10 microns on the surface of the filter paper through a chemical vapor deposition method to obtain the hydrophobic filter paper;
s2, respectively controlling the flow controller, the high-voltage power supply and the pressure block through the upper computer to obtain preset working gas flow, working voltage and orifice size, and generating atmospheric pressure microplasma jet;
s3, placing the hydrophobized filter paper on the XY moving platform, and selectively etching the parylene-C film on the surface of the hydrophobized filter paper through the atmospheric pressure microplasma jet under the mask-free condition, so as to construct the patterned hydrophilic/hydrophobic micro channel on the paper.
Compared with the prior art, the invention has the beneficial effects that: the method is an all-dry preparation process, the preparation process is simple, the operation is convenient, the cost is low, the method is green and environment-friendly, and the whole preparation process has no pollution to the filter paper; 2, the invention can realize high-precision graphical processing of the microfluidic channel under the condition of no mask, and the processing parameters can be adjusted in real time, especially the processing line width and the wetting characteristic of the microfluidic channel can be adjusted on line by controlling the pressure exerted by the pressure block and the components of the working air source; therefore, hydrophilic/hydrophobic micro channels with different line widths, different patterns and different wetting characteristics can be rapidly prepared, and the preparation efficiency of the paper-based micro-fluidic chip is greatly improved.
Drawings
FIG. 1 is a schematic structural diagram of a preparation device of the paper-based micro-fluidic chip based on microplasma;
FIG. 2 is a structural view of the plasma generator body;
FIG. 3 is a structural view of the plasma jet nozzle;
FIG. 4 is a structural view of the pressure block;
fig. 5 is a schematic diagram of a preparation method of the paper-based microfluidic chip based on microplasma.
The figures in the drawings represent:
1-filter paper; 2-hydrophobized filter paper; 300-a plasma generator body; 301-high voltage electrode sheet; 302-a ground electrode pad; 303-a first flexible nozzle; 304-a second flexible nozzle; 305-a support plate; 306-a conditioning tank; 4-a pressure block; 41-pressing a block; 42-a pressure applying plate; 5-an upper computer; 6-atmospheric pressure microplasma jet; 7-working air source; 8-a flow controller; 9-a high voltage power supply; a 10-XY motion stage; 11-hydrophilic/hydrophobic micro-channels.
Detailed Description
The above and further features and advantages of the present invention are described in more detail below with reference to the accompanying drawings.
Example one
As shown in fig. 1 to 4, fig. 1 is a schematic structural diagram of the preparation device of the microplasma-based paper-based microfluidic chip; FIG. 2 is a structural view of the plasma generator body; FIG. 3 is a structural view of the plasma jet nozzle; fig. 4 is a structural view of the pressure block. Wherein (a) is a front view of the plasma generator body and (b) is a side view of the plasma generator body in fig. 2; (c) is a bottom view of the plasma generator body.
The preparation device of the paper-based micro-fluidic chip based on the micro-plasma comprises a plasma generator main body 300, a high-voltage electrode plate 301, a grounding electrode plate 302, a first flexible nozzle 303, a second flexible nozzle 304, a pressure block 4, an upper computer 5, a working gas source 7, a flow controller 8, a high-voltage power supply 9 and an XY moving platform 10.
The plasma generator main body 300 is provided with a supporting plate 305 at the bottom, the two supporting plates 305 are symmetrically arranged in parallel, the first flexible nozzle 303 and the second flexible nozzle 304 are arranged between the two supporting plates 305, concave adjusting grooves 306 are arranged on the corresponding surfaces of the two supporting plates 305, and the adjusting grooves 306 are used for providing deformation space for the first flexible nozzle 303 and the second flexible nozzle 304 when the first flexible nozzle 303 and the second flexible nozzle 304 are pressed. Meanwhile, the pressure block 4 is disposed between the two support plates 305 and is disposed in one-to-one correspondence with the first flexible nozzle 303 and the second flexible nozzle 304, the pressure block 4 includes a pressure applying block 41 and a pressure applying plate 42, the pressure applying plate 42 is fixedly disposed between the two support plates 305 and is disposed in contact with the two support plates 305, so that the position of the pressure applying plate 42 is fixed, uniform pressure application is performed on the first flexible nozzle 303 and the second flexible nozzle 304, the pressure applying block 41 is connected to the pressure applying plate 42, the pressure applying block 41 provides pressure to the pressure applying plate 42, and therefore the position of the pressure block 4 is conveniently fixed by the support plates 305, and pressure application of the pressure block 4 to the first flexible nozzle 303 and the second flexible nozzle 304 is achieved.
The high-voltage electrode plate 301 is adhered to one side of the plasma generator main body 300 and is connected with the high-voltage end of the high-voltage power supply 9; the grounding electrode sheet 302 is stuck to the other side of the plasma generator main body 300 and is connected with the grounding end of the high-voltage power supply 9; the high-voltage power supply 9 is connected with the upper computer 5, and the output parameters of the high-voltage power supply 9 are controlled through the upper computer 5.
The first flexible nozzle 303 and the laminating symmetry setting of second flexible nozzle 304, just first flexible nozzle 303 with it is provided with first cooperation groove and second cooperation groove to correspond on the laminating face of second flexible nozzle 304, first cooperation groove with the notch of second cooperation groove corresponds the setting, thereby first flexible nozzle 303 with when the laminating of second flexible nozzle 304 the notch cooperation of first cooperation groove with the second cooperation groove is connected thereby forms the nozzle slot, the nozzle slot corresponds the exit port setting of plasma generator main part 300, first flexible nozzle 303 with the flexible nozzle 304 of second forms plasma jet nozzle. In this embodiment, the first fitting groove and the second fitting groove are both rectangular grooves, and the nozzle groove is a rectangular hole.
The first flexible nozzle 303 and the second flexible nozzle 304 are disposed below the plasma generator main body 300; the atmospheric pressure plasma generated in the plasma generator main body 300 is emitted to the atmosphere through a nozzle formed by attaching the first flexible nozzle 303 and the second flexible nozzle 304, and forms an atmospheric pressure microplasma jet flow 6.
The pressure blocks 4 are arranged on two sides of the first flexible nozzle 303 and the second flexible nozzle 304, and the size of a nozzle groove is changed by applying pressure to the two sides of the first flexible nozzle 303 and the second flexible nozzle 304 so as to control the beam size of the atmospheric-pressure microplasma jet 6; the pressure block 4 is connected with the upper computer 5, and the pressure value of the pressure block 4 is controlled through the upper computer 5.
The working gas source 7 is connected with the upper computer 5 through the flow controller 8, working gas is introduced into the plasma generator main body 300 through the flow controller 8, the flow controller 8 is connected with the upper computer 5, and gas flow can be adjusted through the control of the upper computer 5 and the flow controller 8.
The XY moving platform 10 is connected with the upper computer 5, and the motion trail and parameters of the XY moving platform 10 are controlled through the upper computer 5.
And the hydrophobized filter paper 2 is placed on the XY moving platform 10 and is placed below the atmospheric pressure microplasma jet flow 6, and moves along with the XY moving platform 10 according to a preset track, so that the patterned etching of the atmospheric pressure microplasma jet flow 6 on the hydrophobized filter paper 2 is realized.
Preferably, the working gas source 7 is helium/oxygen mixed gas, and the high-voltage power supply 9 is a sinusoidal alternating-current high-voltage power supply.
Preferably, the high-voltage electrode plate 301 and the ground electrode plate 302 are both copper sheet electrodes.
Preferably, the first flexible nozzle 303 and the second flexible nozzle 304 are made of a flexible material, namely Polydimethylsiloxane (PDMS), and can be deformed under the action of pressure.
Preferably, the axis of the through hole of the plasma generator body 300 is aligned with the axis of the nozzle groove.
In other embodiments, hydrophilic/hydrophobic micro channels with different line widths, different patterns and different wetting characteristics can be prepared by selecting different types and flow rates of working air sources, different power sources and parameters, different pressure block setting parameters and XY moving platform motion parameters, so that specific paper-based microfluidic chips can be customized for different application occasions.
Example two
As shown in fig. 5, fig. 5 is a schematic diagram of a preparation method of the microplasma-based paper-based microfluidic chip; the preparation method of the paper-based microfluidic chip comprises the following steps:
s1, depositing a parylene-C film with the thickness of 10 microns on the surface of the filter paper 1 through a chemical vapor deposition method to realize the hydrophobization of the filter paper 1, and obtaining a hydrophobization filter paper 2;
s2, respectively controlling the flow controller 8, the high-voltage power supply 9 and the pressure block 4 through the upper computer 5 according to preset processing requirements to obtain preset working gas flow (helium: 200sccm, oxygen: 20sccm), working voltage (voltage peak-peak value: 15kV) and orifice size (100 microns), and generating atmospheric pressure microplasma jet flow 6;
s3, using the XY moving stage 10 to selectively etch the parylene-C film on the surface of the hydrophobized filter paper 2 in S1 by the atmospheric pressure microplasma jet 6 in S2 under a maskless condition to restore the hydrophilicity thereof, thereby constructing the patterned hydrophilic/hydrophobic micro channels 11 on the paper.
In the step S3, parameters such as the beam size and the active particle concentration of the atmospheric pressure microplasma jet 6 generated in the step S2 can be adjusted online in real time by the upper computer 5 according to the processing requirements, so that the line width and the etching depth of the atmospheric pressure microplasma jet 6 in the etching region of the hydrophobized filter paper 2 can be adjusted in real time to obtain the hydrophilic/hydrophobic microchannels 11 with different line widths, different patterns and different wetting characteristics.
The invention can realize high-precision graphical processing of the microfluidic channel under the condition of no mask, and the processing parameters can be adjusted in real time, especially the processing line width and the wetting characteristic of the microfluidic channel can be adjusted on line by controlling the pressure exerted by the pressure block and the components of the working air source; therefore, hydrophilic/hydrophobic micro channels with different line widths, different patterns and different wetting characteristics can be rapidly prepared, and the preparation efficiency of the paper-based micro-fluidic chip is greatly improved.
The foregoing is merely a preferred embodiment of the invention, which is intended to be illustrative and not limiting. It will be understood by those skilled in the art that various changes, modifications and equivalents may be made therein without departing from the spirit and scope of the invention as defined in the appended claims.
Claims (8)
1. A preparation device of a paper-based micro-fluidic chip based on micro-plasma is characterized by comprising a plasma generator main body, a high-voltage electrode plate, a grounding electrode plate, a plasma jet nozzle, a working gas source and a high-voltage power supply, wherein the high-voltage electrode plate is adhered to one side of the plasma generator main body and is connected with the high-voltage end of the high-voltage power supply; the grounding electrode slice is adhered to the other side of the plasma generator main body and is connected with the grounding end of the high-voltage power supply; the plasma jet nozzle is arranged below the plasma generator main body, and the working gas source is connected with the plasma generator main body;
the plasma jet nozzle comprises a first flexible nozzle and a second flexible nozzle, the first flexible nozzle and the second flexible nozzle are symmetrically attached, a first matching groove and a second matching groove are correspondingly arranged on the attaching surface of the first flexible nozzle and the attaching surface of the second flexible nozzle, notches of the first matching groove and the second matching groove are correspondingly arranged, when the first flexible nozzle is attached to the second flexible nozzle, the notches of the first matching groove and the second matching groove are connected in a matching mode to form a nozzle groove, and the first flexible nozzle and the second flexible nozzle form the plasma jet nozzle;
pressure blocks are arranged on two sides of the plasma jet nozzle respectively, the pressure blocks correspond to the first flexible nozzle and the second flexible nozzle one to one, and the pressure blocks apply pressure to the first flexible nozzle and the second flexible nozzle respectively to change the size of the nozzle groove.
2. The device for preparing the microplasma-based paper-based microfluidic chip according to claim 1, wherein a supporting plate is arranged at the bottom of the plasma generator main body, the two supporting plates are arranged in parallel and symmetrically, the first flexible nozzle and the second flexible nozzle are arranged between the two supporting plates, the pressure block is arranged between the two supporting plates, and concave adjusting grooves are arranged on the corresponding surfaces of the two supporting plates.
3. The microplasma-based paper-based microfluidic chip manufacturing apparatus of claim 1, wherein the paper-based microfluidic chip manufacturing apparatus further comprises an upper computer; the working gas source is communicated with the plasma generator main body through a flow controller, and the high-voltage power supply, the pressure block and the flow controller are all connected with the upper computer.
4. The microplasma-based paper-based microfluidic chip fabrication apparatus of claim 3, further comprising an XY moving stage; the XY moving platform is arranged below the plasma jet nozzle and controls the movement of the hydrophobized filter paper.
5. The device for preparing the microplasma-based paper-based microfluidic chip according to claim 4, wherein the working gas source is helium/oxygen mixed gas, and the high-voltage power supply is a sinusoidal alternating-current high-voltage power supply.
6. The device for preparing the microplasma-based paper-based microfluidic chip according to claim 4, wherein the first flexible nozzle and the second flexible nozzle are prepared from flexible material polydimethylsiloxane.
7. The device for preparing the microplasma-based paper-based microfluidic chip according to claim 4, wherein the axis of the through hole of the plasma generator body is aligned with the axis of the nozzle groove.
8. A preparation method of a microplasma-based paper-based microfluidic chip is characterized in that the preparation device of the microplasma-based paper-based microfluidic chip according to any one of claims 4 to 7 is adopted, and comprises the following steps:
s1, depositing a parylene-C film on the surface of the filter paper by a chemical vapor deposition method to obtain the hydrophobic filter paper;
s2, respectively controlling the flow controller, the high-voltage power supply and the pressure block through the upper computer to obtain preset working gas flow, working voltage and orifice size, and generating atmospheric pressure microplasma jet;
s3, placing the hydrophobized filter paper on the XY moving platform, and selectively etching the parylene-C film on the surface of the hydrophobized filter paper through the atmospheric pressure microplasma jet under the mask-free condition, so as to construct the patterned hydrophilic/hydrophobic micro channel on the paper.
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| CN113021885A (en) * | 2021-03-05 | 2021-06-25 | 南方科技大学 | Direct-writing spray head based on plasma surface modification, direct-writing system device comprising same and direct-writing method |
| CN114720653A (en) * | 2022-05-24 | 2022-07-08 | 武汉正元环境科技股份有限公司 | Water quality detection method and device based on micro-flow control chip |
| CN115449780B (en) * | 2022-08-17 | 2024-04-09 | 安徽工业大学 | Device and method for rapidly preparing hydrophilic and hydrophobic micro-channels by plasma jet |
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| TW466630B (en) * | 2000-12-29 | 2001-12-01 | Macronix Int Co Ltd | Flexible nozzle system of gas distribution plate |
| CN103945630A (en) * | 2014-04-21 | 2014-07-23 | 上海交通大学 | Barometric pressure air micro-plasma jet device for etching thin polymer film without mask |
| AU2016243036B2 (en) * | 2015-04-03 | 2022-02-17 | Abbott Laboratories | Devices and methods for sample analysis |
| CN108251846A (en) * | 2018-01-12 | 2018-07-06 | 大连理工大学 | A kind of method that no mask prepares patterned wettability surface |
| CN111013679A (en) * | 2019-12-27 | 2020-04-17 | 江苏集萃微纳自动化系统与装备技术研究所有限公司 | Preparation method of paper-based micro-fluidic chip and paper-based micro-fluidic chip |
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