CN100510731C - Micro channel electrode and miniflow control analysis chip thereof - Google Patents
Micro channel electrode and miniflow control analysis chip thereof Download PDFInfo
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- CN100510731C CN100510731C CNB2006101250955A CN200610125095A CN100510731C CN 100510731 C CN100510731 C CN 100510731C CN B2006101250955 A CNB2006101250955 A CN B2006101250955A CN 200610125095 A CN200610125095 A CN 200610125095A CN 100510731 C CN100510731 C CN 100510731C
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- raceway groove
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Abstract
This invention relates to micro groove electrode, which has electrode and is characterized by the following: the groove electrode is composed of conductive flow and conductive hole needle inserted into conductive part. This invention is of simple structure and easy for processing with low cost and with even electricity field more than 100KV/cm suitable for processing large area field micro flow control analysis chip.
Description
Technical field
The microfluidic analysis chip that the present invention relates to the micro channel electrode in the microfluidic analysis chip and utilize this electrode to make belongs to micro electronmechanical processing technique field; Simultaneously, the highfield that this electrode provides can be used for separating different electrically particles, and carries out cell perforation experiment etc., so can be used as the strong instrument of biochemical analysis; In addition, this electrode has homogeneous large tracts of land field intensity, can be used for material impedance analysis, electric field simulation etc.
Background technology
It is technology indispensable in the microfluidic analysis chip that electrode is made, and is to survey Separation of Proteins, cell perforation, the indispensable integrated component of technology such as impedance analysis as electric signal.Habitual method for making its electrode is for utilizing conventional lithography process plated film in substrate, and its shortcoming has: (1) is to mask accuracy requirement height, filming equipment that need be extremely huge, complicated photoetching and coating process; (2) be embedded in the raceway groove after electrode is made, need high raceway groove technique of alignment, the product rejection rate height; (3) coating film thickness is generally much smaller than channel height, and the electric field that the effective coverage that the raceway groove inner fluid often is not in electric field maybe can not provide the homogeneous field strength distribution is improving field intensity and producing DeGrain on the three-dimensional field intensity.
Microfluidic analysis chip needs high-strength, large tracts of land homogeneous electric field, and its method for making its electrode is easy again reliable.To improve existing micro channel electrode and microfluidic analysis chip thereof for this reason.
Summary of the invention
The objective of the invention is to propose a kind of micro channel electrode and microfluidic analysis chip thereof, be suitable in raceway groove, providing high-intensity homogeneous electric field, for separating, material grains provides bias voltage, also can in impedance analysis, provide highly sensitive electrode, convenient and reliable, be easy to integratedly, with low cost, technology simply is easy to popularize.
Technical scheme of the present invention is: a kind of micro channel electrode, in the raceway groove of its substrate electrode is arranged, and it is characterized in that: the electrode in the raceway groove is made of conductive fluid and conductive hole needle, and conductive hole needle is inserted in the conductive fluid.
Aforesaid micro channel electrode is characterized in that: described conductive fluid is following a kind of: liquid electrolyte, liquid metals, be mixed with the PDMS prepolymer of conductive materials.
A kind of microfluidic analysis chip has fluid channel in the chip, the fluid channel both sides is two parallel electrode raceway grooves, and it is characterized in that: the electrode in the electrode raceway groove is made of conductive fluid and conductive hole needle, and conductive hole needle is inserted in the conductive fluid.
Aforesaid microfluidic analysis chip is characterized in that: described conductive fluid is following a kind of: liquid electrolyte, liquid metals, be mixed with the PDMS prepolymer and the magnetic fluid of conductive materials.
Aforesaid microfluidic analysis chip is characterized in that: the width of fluid channel is 5～2000 microns, keeps 5～200 microns between electrode raceway groove and the fluid channel.
Micro channel electrode of the present invention and microfluidic analysis chip, simple in structure, be convenient to make, with low cost, and have high-aspect-ratio, the homogeneous highfield reaches more than the 100KV/cm, is suitable for making the microfluidic analysis chip that needs large tracts of land homogeneous electric field.In the raceway groove of substrate, feed different conducting liquids and form various precision, the electrode that is integrated in little raceway groove that response speed is different.
Description of drawings
Fig. 1 is the structural representation of the embodiment of the invention.Wherein, 1 laminar flow observation station, 2 deflection observation stations, 3 separate observation station, and 4 draw observation station, 5 oil phases inlet, 6 sodium alginates inlet, 7 dyeing oil phase inlets, 8 electrode materials inlet, the outlet of 9 laminar flows.
Fig. 2 is the laminar flow synoptic diagram at laminar flow observation station 1 place among Fig. 1.Wherein, 10 streams focus on and form the drop part.
Fig. 3 is the deflection synoptic diagram at deflection observation station 2 places among Fig. 1.
Fig. 4 is the separation synoptic diagram that separates observation station 3 places among Fig. 1.
Fig. 5 is the synoptic diagram of drawing of drawing observation station 4 places among Fig. 1.
Embodiment
Below in conjunction with specific embodiment technical scheme of the present invention is further described.
The micro channel electrode of the embodiment of the invention has electrode in the raceway groove of its substrate, it is characterized in that: the electrode in the raceway groove is made of conductive fluid and conductive hole needle, and conductive hole needle is inserted in the conductive fluid; Described conductive fluid is following a kind of: liquid electrolyte, liquid metals, be mixed with the PDMS prepolymer and the magnetic fluid of conductive materials.
Microfluidic analysis chip of the present invention has fluid channel in the chip, fluid channel is other to be two parallel electrode raceway grooves, and it is characterized in that: the electrode in the raceway groove is made of conductive fluid and conductive hole needle, and conductive hole needle is inserted in the conductive fluid; Liquid electrolyte, liquid metals, be mixed with the PDMS prepolymer and the magnetic fluid of conductive materials; The width of fluid channel is 5～2000 microns, keeps 5～200 microns between electrode raceway groove and the fluid channel.
The present invention can be integrated in little raceway groove, the three-dimensional liquid of simple and effective high-aspect-ratio, solid electrode method for making, and it can provide the homogeneous highfield to reach more than the 100KV/cm, having can be integrated, the electric field intensity height, and electric field homogeneous area is big, cost is low, and is convenient nontoxic, characteristics such as voltage breakdown height.Conducting medium difference by its feeding can be divided into electrolyte-electrode with it, metal electrode, PDMS electrode etc.
Now briefly introduce the method that micro channel electrode of the present invention and microfluidic analysis chip thereof make and adopt above-mentioned when not planting conducting liquid they performance relatively:
One, method for making.
1. two electrode raceway grooves of the other parallel design of the fluid channel of 5～2000 microns width, the electrode channel structure remains between electrode raceway groove and the fluid channel about 5～200 microns to adapt to the machining precision of photoresist or material with to design the electrode plane structure in advance identical.
2. with the mask lamina membranacea of design,, utilize common micro-processing technology or soft lithography to make micro flow chip, punching, just become the micro-fluidic chip that has the electrode raceway groove behind the bonding by photoetching technique.
3. feed conductive liquid in the electrode raceway groove, make to be full of conductive liquid in the raceway groove as far as possible, plug conductive hole needle at the one end, electrode is made and has just been finished.
Two, the performance of all kinds of conducting liquids relatively.
The conducting liquid that this electrode is suitable for can have following a few class, now following introduction is done in its some aspect:
1, full of liquid electrolyte in raceway groove, as: PBS solution, copper-bath.This method is convenient feasible, and effect is obvious, but particularly photoetching and bonding techniques are had relatively high expectations to chip manufacture.But the time that discharges and recharges is longer, and the response time is slow.
2, import little raceway groove with metal, as: liquid mercury, silver slurry.Can increase substantially every performance of electrode on this method, the while can make electrode forever solidify or be enclosed in the raceway groove.But there is the problem of the curing of electrode later stage, sealing raceway groove, increases the electrode chip making step.
3, in the PDMS prepolymer, mix conductive materials such as carbon dust, make it conduction, be filled in little raceway groove.This method can be made various modules in advance as a direction that improves chip integration, also can import little raceway groove as conductive liquid and solidify.
Three, embodiment
1. experimental principle.
(1) as shown in Figure 1, utilize stream to focus on channel design, the sodium alginate aqueous solution disperse phase of mass ratio 2% is by oily external phase pinch off, and forming diameter is the sodium alginate drop of 20 μ m～200 μ m;
(2) add one road oil phase that has dyeed in the oil-continuous phase downstream that has the sodium alginate drop, dyeing oil phase and oil phase keep rate-matched, form the dichromatism laminar flow of one tunnel equalization in the straight flute road;
(3) basic ideas of this experiment are to utilize electrode manufacturing technology of the present invention to form homogeneous, large-area electric field between two electrodes, since sodium alginate solution drop in itself have in the oil phase certain electrically, so can between two electrodes, realize deflection, finally reach the effect of separation in the laminar flow outlet.
(4) this experiment does not need to be that electric charge increases other circuit on the sodium alginate soln band, but utilize material surface itself with electric charge realize separating, experiment is simple effective, phenomenon is obvious, favorable repeatability.
2. experimental procedure.
(1), produces the micro-fluidic chip that has raceway groove shown in the accompanying drawing according to the method for making in the summary of the invention.
(2) silver slurry acetone diluted, feed the electrode material inlet, plug the metal vent needle, put into drying oven again, just can use at any time later in the electrode material porch.
(3) take out chip, at the oil phase inlet, sodium alginate inlet and dyeing oil phase inlet are plugged the syringe that has flexible pipe, and syringe is placed on the syringe pump, take the feed liquor mode that pushes away, adjust each flow parameters, start each pump work successively.
(4) wait for that stream focusing raceway groove place water-soluble drop periodically occurs and is dispersed in the oil-continuous phase, can be according to the situation of in inverted microscope, seeing, the parameter of each pump of appropriate change.
(5) form oil phase in the straight flute road in wait stream focusing raceway groove downstream and form the laminar flow of dividing raceway groove equally, can suitably adjust the flow velocity of the oil phase that dyes according to the situation of laminar flow with the oil phase that dyes.
(6) making alive on electrode, top electrode adds malleation, and following electrode adds negative pressure, and this ag paste electrode adds the purpose that 150V just can reach separation in this raceway groove, be 500 μ m between the electrode raceway groove, and electric field intensity reaches 3KV/cm.
3. experiment effect analysis.
(1) shown in accompanying drawing 1-5, select 1,2,3,4 four observation station, the every choosing carried out 4 times behind one group of voltage and taken pictures, and obtains laminar flow respectively, and deflection separates the effect of drawing.
(2) this experiment will be got well much with the more common coated electrode of high-aspect-ratio electrode separation effect, and performance is far superior to the electrode that plated film forms.
(3) existing phenomenon at 1,2,3,4 four observation station has briefly introduced stream and has focused on the movement locus of formation aqueous solution droplet in raceway groove.Synoptic diagram such as accompanying drawing 2-5 simulate laminar flow respectively, deflection, and the diagram of separating and drawing is separated fully, is quick on the draw, and is simple to operate, repeatable strong.
(4) owing to do not allow electric charge on the droplet band in the experiment specially, but electrically charged with himself institute, because self is electrically charged generally less, the 3 D stereo field intensity that more can embody this electrode is higher, and homogeneity is better.
Claims (5)
1, a kind of micro channel electrode has electrode in the raceway groove of its substrate, it is characterized in that: the electrode in the raceway groove is made of conductive fluid and conductive hole needle, and conductive hole needle is inserted in the conductive fluid.
2, micro channel electrode as claimed in claim 1 is characterized in that: described conductive fluid is following a kind of: liquid electrolyte, liquid metals, be mixed with the P D M S prepolymer and the magnetic fluid of conductive materials.
3, a kind of microfluidic analysis chip has fluid channel in the chip, the fluid channel both sides is two parallel electrode raceway grooves, and it is characterized in that: the electrode in the electrode raceway groove is made of conductive fluid and conductive hole needle, and conductive hole needle is inserted in the conductive fluid.
4, microfluidic analysis chip as claimed in claim 3 is characterized in that: described conductive fluid is following a kind of: liquid electrolyte, liquid metals, be mixed with the P D M S prepolymer of conductive materials.
5, as claim 3 or 4 described microfluidic analysis chips, it is characterized in that: the width of fluid channel is 5～2000 microns, keeps 5～200 microns between electrode raceway groove and the fluid channel.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CNB2006101250955A CN100510731C (en) | 2006-11-22 | 2006-11-22 | Micro channel electrode and miniflow control analysis chip thereof |
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| Application Number | Priority Date | Filing Date | Title |
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| CNB2006101250955A CN100510731C (en) | 2006-11-22 | 2006-11-22 | Micro channel electrode and miniflow control analysis chip thereof |
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| CN1963483A CN1963483A (en) | 2007-05-16 |
| CN100510731C true CN100510731C (en) | 2009-07-08 |
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Families Citing this family (8)
| Publication number | Priority date | Publication date | Assignee | Title |
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| WO2011124092A1 (en) * | 2010-04-09 | 2011-10-13 | The Hong Kong University Of Science And Technology | Liquid-electronic hybrid divider |
| CN103816805B (en) * | 2012-11-16 | 2015-12-02 | 中国科学院理化技术研究所 | Electric osmose Micropump device |
| CN106587286B (en) * | 2016-12-19 | 2020-09-29 | 复旦大学 | Seawater purification device based on microfluidic channel system and preparation method thereof |
| CN109100394B (en) * | 2018-07-18 | 2020-10-02 | 浙江大学 | Blood coagulation time detector and detection method thereof |
| CN109550531B (en) * | 2019-01-28 | 2021-09-07 | 武汉纺织大学 | Micro-fluidic chip with dependent magnetic size |
| CN109913352B (en) * | 2019-03-27 | 2021-07-23 | 中国科学院上海微系统与信息技术研究所 | Microfluidic device and method for controlling and capturing microparticles and cells based on non-contact dielectrophoresis force |
| CN113000078A (en) * | 2019-12-19 | 2021-06-22 | 深圳华大生命科学研究院 | Chip and preparation method thereof |
| CN115407181B (en) * | 2022-11-02 | 2022-12-23 | 季华实验室 | LED chip nondestructive testing device |
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| US4140612A (en) * | 1976-10-14 | 1979-02-20 | Shults Mikhail M | Glass electrode |
| CN2246149Y (en) * | 1996-06-07 | 1997-01-29 | 张来顺 | Device for clearing incrustant by utilizing electric field between conducting liquid and metal vessel |
| CN1236287A (en) * | 1999-05-24 | 1999-11-24 | 管蓉 | Capacitive speaker composed of plastic and conductive liquid and its producing method |
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- 2006-11-22 CN CNB2006101250955A patent/CN100510731C/en not_active Expired - Fee Related
Patent Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US4140612A (en) * | 1976-10-14 | 1979-02-20 | Shults Mikhail M | Glass electrode |
| CN2246149Y (en) * | 1996-06-07 | 1997-01-29 | 张来顺 | Device for clearing incrustant by utilizing electric field between conducting liquid and metal vessel |
| CN1236287A (en) * | 1999-05-24 | 1999-11-24 | 管蓉 | Capacitive speaker composed of plastic and conductive liquid and its producing method |
Non-Patent Citations (4)
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| 周期极化的电极结构及相关工艺缺陷的电场分析. 纪磊等.人工晶体学报，第34卷第5期. 2005 |
| 周期极化的电极结构及相关工艺缺陷的电场分析. 纪磊等.人工晶体学报，第34卷第5期. 2005 * |
| 液体电极式空气负离子发生器的研制及临床应用. 莫永良等.广西医科大学，第18卷第3期. 1994 |
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