CN111880582A - Automatic bath solution temperature balancing system of aluminum anodic oxidation tank - Google Patents
Automatic bath solution temperature balancing system of aluminum anodic oxidation tank Download PDFInfo
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- CN111880582A CN111880582A CN202010931155.2A CN202010931155A CN111880582A CN 111880582 A CN111880582 A CN 111880582A CN 202010931155 A CN202010931155 A CN 202010931155A CN 111880582 A CN111880582 A CN 111880582A
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- G—PHYSICS
- G05—CONTROLLING; REGULATING
- G05D—SYSTEMS FOR CONTROLLING OR REGULATING NON-ELECTRIC VARIABLES
- G05D23/00—Control of temperature
- G05D23/19—Control of temperature characterised by the use of electric means
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01F—MIXING, e.g. DISSOLVING, EMULSIFYING OR DISPERSING
- B01F35/00—Accessories for mixers; Auxiliary operations or auxiliary devices; Parts or details of general application
- B01F35/20—Measuring; Control or regulation
- B01F35/21—Measuring
- B01F35/211—Measuring of the operational parameters
- B01F35/2111—Flow rate
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01F—MIXING, e.g. DISSOLVING, EMULSIFYING OR DISPERSING
- B01F35/00—Accessories for mixers; Auxiliary operations or auxiliary devices; Parts or details of general application
- B01F35/20—Measuring; Control or regulation
- B01F35/21—Measuring
- B01F35/211—Measuring of the operational parameters
- B01F35/2115—Temperature
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01F—MIXING, e.g. DISSOLVING, EMULSIFYING OR DISPERSING
- B01F35/00—Accessories for mixers; Auxiliary operations or auxiliary devices; Parts or details of general application
- B01F35/20—Measuring; Control or regulation
- B01F35/22—Control or regulation
- B01F35/2201—Control or regulation characterised by the type of control technique used
- B01F35/2206—Use of stored recipes for controlling the computer programs, e.g. for manipulation, handling, production or composition in mixing plants
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01F—MIXING, e.g. DISSOLVING, EMULSIFYING OR DISPERSING
- B01F35/00—Accessories for mixers; Auxiliary operations or auxiliary devices; Parts or details of general application
- B01F35/20—Measuring; Control or regulation
- B01F35/22—Control or regulation
- B01F35/221—Control or regulation of operational parameters, e.g. level of material in the mixer, temperature or pressure
- B01F35/2215—Temperature
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- G—PHYSICS
- G05—CONTROLLING; REGULATING
- G05B—CONTROL OR REGULATING SYSTEMS IN GENERAL; FUNCTIONAL ELEMENTS OF SUCH SYSTEMS; MONITORING OR TESTING ARRANGEMENTS FOR SUCH SYSTEMS OR ELEMENTS
- G05B19/00—Programme-control systems
- G05B19/02—Programme-control systems electric
- G05B19/04—Programme control other than numerical control, i.e. in sequence controllers or logic controllers
- G05B19/05—Programmable logic controllers, e.g. simulating logic interconnections of signals according to ladder diagrams or function charts
- G05B19/054—Input/output
Abstract
The invention discloses an automatic tank liquid temperature balancing system of an aluminum anodic oxidation tank, which comprises a PLC (programmable logic controller) and a temperature sensor, wherein the temperature sensor detects the temperature of the uppermost layer of tank liquid in the anodic oxidation tank, gas stirring systems are respectively arranged on two symmetrical sides of the anodic oxidation tank, the gas stirring system on each side respectively comprises a gas source and a total branch pipeline, the pipe end of each branch pipeline respectively extends into the lower part of the corresponding side in the anodic oxidation tank, a header pipe of each total branch pipeline is respectively communicated and provided with a pressure reducing valve, each branch pipeline is respectively communicated and provided with an electric control flow meter, the temperature sensor is connected with the signal input end of the PLC, the output end of each electric control flow meter is respectively connected with the signal input end of the PLC, and the signal output end of the PLC is respectively connected with the control end of each electric. The invention realizes the aim of uniformly distributing the temperature of the bath solution of the large-capacity anodic oxidation bath.
Description
Technical Field
The invention relates to the field of electrode oxidation tank temperature control systems for LCD processing, in particular to an automatic tank liquor temperature balancing system for an aluminum anodic oxidation tank.
Background
10.5G is the largest size production line in the current LCD industry, and the size of the upper electrode consumable used in the plasma etching process is also the largest compared with 8.5/7/6G and the like. The upper electrode is applied to TET-LCD plasma etching equipment, most of the upper electrode is aluminum products, the surface of the upper electrode needs to be subjected to anodic oxidation treatment, and the high-quality anodic oxide film endows the upper electrode with good voltage resistance, impedance and corrosion resistance.
The anodic oxidation treatment of the aluminum surface is carried out in an anodic oxidation tank, the temperature of the tank liquor of the anodic oxidation tank is an important technological parameter for anodic oxidation, when the temperature of the tank liquor rises from 10 ℃ to 20 ℃, the dissolution speed of an anodic oxidation film is increased by about 3 times, which means that the uniformity of the thickness of an anodic oxide film is difficult to meet when the temperature distribution of the tank liquor is not uniform, so the temperature of the tank liquor must be controlled, maintained in a proper temperature range, and kept in a range of +/-1 ℃. As the size of the electrodes increases, meaning that the volume of the anodizing bath increases significantly, new challenges are presented to the anodizing bath temperature control.
When the temperature of the bath solution of the anodic oxidation tank is not uniform, the uniformity of the thickness of the generated anodic oxide film is poor, and the performance of the upper electrode is influenced, because the upper electrode with poor film thickness uniformity and the area with lower surface skin film thickness are easy to generate excessive Etch in the Dry Etch process, the defects of Paticle, arc and the like are caused, and the defects are directly expressed in that the Etch is poor or even scrapped in the substrate production process, and the service life of the upper electrode is short. Therefore, in order to obtain an anodic oxide film having a uniform film thickness, the temperature uniformity of the bath solution must be controlled.
The method for maintaining the temperature stability of the tank liquor of the anodic oxidation tank at the present stage generally adopts a temperature sensor to measure the temperature of the anodic oxidation tank liquor, and according to the measurement result of the temperature sensor, if the temperature is abnormal, the gas flow is manually adjusted to control the temperature. The specific gas flow regulation adopts a single-pipe air stirring mode, namely, a single gas pipeline is introduced into the bottom of the anodic oxidation tank, two pipelines are arranged at the bottom of the anodic oxidation tank, holes with equal distances are formed in the branch pipes to introduce gas into the tank, and the tank liquor is stirred through the gas, so that the aim of temperature equalization is fulfilled. However, in actual production, due to the fact that the adjustment is not timely due to the hysteresis of temperature acquisition, the flow control is inaccurate, or the gas flow regulation operation is omitted when Job change occurs. And the mode of adjusting the gas flow by a single tube can cause the conditions that the stirring in the middle section of the anodic oxidation tank is obvious, the stirring at two ends is not obvious, and the temperature of the tank liquor at two ends of the anodic oxidation tank is obviously higher than that in the middle. The reason for this is as follows:
1. the gas flow rate is that the anodic oxidation product is suspended on the conducting rod and immersed in the anodic oxidation bath solution, which requires that the gas flow rate of air stirring cannot be too large, otherwise the product will swing, but the gas flow rate difference between the middle section of the bath and the two ends of the bath will be larger in the smaller gas flow rate in the 10.5G anodic oxidation bath, resulting in the unobvious air stirring effect.
2. Air stirring cannot be controlled in a segmented mode, and the temperature of a specific area cannot be adjusted by an existing single-pipe type air stirring system.
Disclosure of Invention
The invention aims to provide an automatic aluminum anodizing bath temperature balancing system, which aims to solve the problem in the prior art that the temperature of the bath liquid in an anodizing bath is adjusted by adopting a single-tube adjusting mode based on temperature data.
In order to achieve the purpose, the technical scheme adopted by the invention is as follows:
the utility model provides an aluminium anodic oxidation groove bath temperature automatic balancing system which characterized in that: the device comprises a PLC controller, a temperature sensor and two sets of gas stirring systems; the temperature sensor is arranged at the upper part in the anodic oxidation tank and used for detecting the temperature of the uppermost layer of the liquid in the anodic oxidation tank; the two sets of gas stirring systems are respectively arranged at two symmetrical sides of the anodic oxidation tank, the gas stirring system at each side respectively comprises a gas source, a pipeline and an electric control gas flow meter communicated and arranged on the pipeline, and the gas source in the gas stirring system at each side respectively leads gas flow for stirring to the corresponding side of the bottom in the anodic oxidation tank through the pipeline with the electric control gas flow meter; the output end of the temperature sensor is connected with the signal input end of the PLC, the output end of each electric control gas flowmeter is respectively connected with the signal input end of the PLC, and the signal output end of the PLC is also respectively connected with the control ends of the electric control gas flowmeters in the gas stirring systems at the two sides; the PLC receives the uppermost layer temperature of the tank liquid in the anodic oxidation tank collected by the temperature sensor and the airflow flow in the gas stirring system at each side collected by the electric control gas flow meter, and controls the flow of the gas passing through each electric control flow meter based on the function corresponding to the relation curve between the uppermost layer tank liquid temperature and the airflow flow in the anodic oxidation tank.
The automatic bath solution temperature balancing system of the aluminum anodic oxidation tank is characterized in that: the function corresponding to the relation curve between the bath solution temperature at the uppermost layer in the anodic oxidation bath and the airflow flow is a regression equation obtained according to a specific numerical value corresponding relation table of the production monitoring temperature and the airflow flow.
The automatic bath solution temperature balancing system of the aluminum anodic oxidation tank is characterized in that: the pipeline in the gas stirring system at each side is a general branch structure pipeline, wherein a main pipe is arranged outside the corresponding side of a notch at the top of an anodic oxidation tank respectively, the main pipe is horizontally parallel to the corresponding side of the anodic oxidation tank respectively, the main pipe is communicated with a corresponding gas source through a pressure reducing valve respectively, one end of each branch pipe at each side is communicated with the main pipe in a bypass manner, an electric control gas flowmeter is respectively communicated and installed at the position, close to the main pipe bypass, of each branch pipe, the output end of each electric control gas flowmeter at each side is connected with the signal input end of a PLC (programmable logic controller), and the signal output end of the PLC is also connected with the control end of each; the other end of each branch pipe at each side respectively turns upwards to pass through the corresponding side of a notch at the top of the anodic oxidation tank, then vertically and downwards extends to the bottom in the anodic oxidation tank in a gap between the inner wall at the corresponding side of the anodic oxidation tank and the corresponding side polar plate, and then horizontally extends to penetrate out from the lower part of the gap between the inner wall at the corresponding side of the anodic oxidation tank and the corresponding side polar plate, a plurality of branch pipe penetrating ends at the bottom in the anodic oxidation tank corresponding to each side are respectively provided with a gas diffusion pipe, the axial direction of the gas diffusion pipe is parallel to the axial direction of the header pipe, each branch pipe penetrating end at each side is respectively communicated with the gas diffusion pipe in a bypass mode, and the pipe wall of each gas diffusion pipe is respectively provided with a; in each side gas stirring system, gas flow output by a gas source enters each branch pipe through the main pipe and each electric control flowmeter, and is respectively led to the corresponding side of the bottom in the anodic oxidation tank through each branch pipe, so that tank liquor in the anodic oxidation tank is stirred.
The automatic bath solution temperature balancing system of the aluminum anodic oxidation tank is characterized in that: the vertical distance between the positions of the main pipes in the gas stirring systems on the two sides and the notch at the top of the anodic oxidation tank is the same; the number of the branch pipes communicated with the main pipes on the two sides is the same, and the positions of the branch pipes communicated with the main pipes on the two sides are in one-to-one correspondence.
The automatic bath solution temperature balancing system of the aluminum anodic oxidation tank is characterized in that: the distance that each branch pipe in the gas stirring system of both sides was worn out from the gap below level between the corresponding side inner wall of anodic oxidation groove and the corresponding side polar plate is the same.
The automatic bath solution temperature balancing system of the aluminum anodic oxidation tank is characterized in that: the hole of inflating of every gas diffusion pipe distributes respectively in the last semicircle of gas diffusion pipe, and the hole of inflating of every gas diffusion pipe divide into and is on a parallel with axial two, and every row contains a plurality of holes of inflating that the quantity is the same, and two are used the gas diffusion pipe axial to be central line mutual symmetry, and a plurality of holes of inflating position of two are crisscross one by one.
The invention monitors the temperature rise rate in real time through the temperature sensor, automatically adjusts the airflow flow output by the gas stirring system according to the measured function relation between the uppermost layer temperature of the bath solution and the gas flow, realizes the integral stirring of the bath solution and has uniform temperature distribution.
When the gas flow meter is adjusted specifically, the original integral single-tube gas supply is changed into sectional gas supply, and a gas flow meter is additionally arranged to adjust the gas flow independently. Considering that the integral single-tube gas supply can cause a large difference between the stirring action of the air at the middle section and the air at the two ends of the anodic oxidation tank, the invention adopts a sectional gas supply scheme of each side through a gas stirring system, the gas is supplied through a main pipe (with the pressure of 0.5-1 kg) provided with a pressure reducing valve, a plurality of branch pipes are led out from the main pipe, the branch pipes are provided with an electric control gas flowmeter, the gas flow can be adjusted according to the actual situation, the branch pipes are led into the lower part of the corresponding side in the anodic oxidation tank at equal intervals and are connected with an upper gas diffusion pipe, the gas stirring systems are respectively arranged at the two sides of the anodic oxidation tank, the pressure of the gas in the main pipe is kept stable through the main pipe pressure reducing valve, the gas flow of the branch pipes can be adjusted according to the actual situation.
Compared with the prior art, the invention realizes the aim of uniformly distributing the temperature of the bath solution of the large-capacity anodic oxidation bath at relatively low cost. The temperature of the bath solution can be controlled within the range of +/-1 ℃.
Drawings
Fig. 1 is a schematic top view of the present invention.
FIG. 2 is a side view of the gas agitation system and anodic oxidation tank assembly of the present invention.
FIG. 3 is a top view of the gas agitation system and anodic oxidation tank combination of the present invention.
FIG. 4 is a schematic view of a gas diffusion tube structure according to the present invention.
Detailed Description
The invention is further illustrated with reference to the following figures and examples.
As shown in figure 1, the automatic temperature balancing system for the bath solution of the aluminum anodic oxidation tank comprises a PLC (programmable logic controller) 9, a temperature sensor 10 and two sets of gas stirring systems 11; the temperature sensor 10 is arranged at the upper part in the anodic oxidation tank 1, and the temperature sensor 10 detects the temperature of the uppermost layer of the tank liquid in the anodic oxidation tank 1; the two sets of gas stirring systems 11 are respectively arranged at two symmetrical sides of the anodic oxidation tank 1, the gas stirring system 11 at each side respectively comprises a gas source 3, a pipeline and an electric control gas flowmeter 6 communicated and installed on the pipeline, and the gas source 3 in the gas stirring system 1 at each side respectively introduces gas flow for stirring to the corresponding side of the bottom in the anodic oxidation tank 1 through the pipeline with the electric control gas flowmeter 6; the output end of the temperature sensor 10 is connected with the signal input end of the PLC 9, the output end of each electric control gas flowmeter 6 is respectively connected with the signal input end of the PLC 9, and the signal output end of the PLC 9 is also respectively connected with the control ends of the electric control gas flowmeters 6 in the gas stirring systems 11 at two sides; the PLC 9 receives the uppermost layer temperature of the tank liquid in the anodic oxidation tank 1 collected by the temperature sensor 10 and the airflow flow rate in the gas stirring system 11 at each side collected by the electric control gas flow meter 6, and the PLC 9 controls the flow rate of the gas passing through each electric control flow meter 6 based on the function corresponding to the relation curve between the uppermost layer tank liquid temperature and the airflow flow rate in the anodic oxidation tank 1.
The function corresponding to the relation curve between the uppermost layer bath solution temperature and the airflow flow in the anodic oxidation tank 1 is obtained by linear regression according to the specific numerical value corresponding relation table of the production monitoring temperature and the airflow flow.
As shown in fig. 1, 2, 3 and 4, the pipelines in the gas stirring system 11 at each side are respectively a main branch structure pipeline, wherein the main pipe 2 is respectively arranged outside the corresponding side of the top notch of the anodic oxidation tank 1, the main pipe 2 is respectively horizontally parallel to the corresponding side of the anodic oxidation tank 1, the main pipe 2 is respectively communicated with the corresponding gas source 3 through a pressure reducing valve 4, one end of each branch pipe 5 at each side is communicated with the main pipe 2 by a bypass, an electrically controlled gas flowmeter 6 is respectively communicated and installed near the bypass of the main pipe 2 by each branch pipe 5, the output end of each electrically controlled gas flowmeter 6 at each side is respectively connected with the signal input end of the PLC controller 9, and the signal output end of the PLC controller 9 is also respectively connected with the control end of each electrically controlled flowmeter 6 at each side; the other end of each branch pipe 5 at each side respectively turns upwards to pass through the corresponding side of the notch at the top of the anodic oxidation tank 1, then vertically and downwards extends to the bottom of the anodic oxidation tank 1 in a gap between the inner wall of the corresponding side of the anodic oxidation tank 1 and the corresponding side polar plate 7, and then horizontally extends to penetrate out from the lower part of the gap between the inner wall of the corresponding side of the anodic oxidation tank 1 and the corresponding side polar plate 7, gas diffusion pipes 8 are respectively arranged at the positions of the penetrating ends of a plurality of branch pipes 5 at the bottom of the anodic oxidation tank 1 corresponding to each side, the axial direction of each gas diffusion pipe 8 is parallel to the axial direction of the header pipe 2, the penetrating ends of each branch pipe 5 at each side are respectively communicated to the gas diffusion pipes 8 in a bypass manner, and the pipe wall of each gas diffusion pipe 8; in each side gas stirring system 11, the gas flow output by the gas source 3 enters each branch pipe 5 through the main pipe 2 and each electric control flow meter 6, and is respectively led to the corresponding side of the bottom in the anodic oxidation tank 1 through each branch pipe 5, so that the tank liquid in the anodic oxidation tank 1 is stirred.
In the invention, the vertical distance between the position of the header pipe 2 in the gas stirring systems 11 at the two sides and the top notch of the anodic oxidation tank 1 is the same; the branch pipes 5 communicated with the header pipes 2 at the two sides are the same in number, and the positions of the branch pipes 5 communicated with the header pipes 2 at the two sides are in one-to-one correspondence.
The distance of each branch pipe 5 in the gas stirring systems 11 on the two sides horizontally penetrating out from the lower part of the gap between the inner wall of the corresponding side of the anodic oxidation tank 1 and the polar plate 7 on the corresponding side is the same.
In the invention, the inflating holes 9 of each gas diffusion pipe 8 are respectively distributed on the upper half circle of each gas diffusion pipe 8, the inflating holes 9 of each gas diffusion pipe 8 are divided into two rows parallel to the axial direction, each row comprises a plurality of inflating holes 9 with the same number, the two rows are mutually symmetrical by taking the axial direction of the gas diffusion pipe 8 as a central line, and the positions of the plurality of inflating holes 9 in the two rows are staggered one by one.
In the invention, the gas diffusion pipe 8 is one of the gas diffusers, the main parameters are the length of the diffuser, the number of the air inflation holes and the air inflation holes, the measured standard is that gas is uniformly sprayed in the length range of the diffuser, macroscopically, the measured standard is the rolling stratification degree of tank liquid and the temperature distribution of the tank liquid, through testing the following schemes, the influence of different numbers of the air inflation holes, the opening positions and the hole diameters on the temperature change and the rolling condition of the tank liquid is tested, and the optimal value is selected according to the temperature change and the rolling condition of the tank liquid. Four gas diffusion tube schemes are shown in table 1:
table 1 comparative table of four schemes of gas diffusion tube
In scheme 1, there are 4 in this region at the diffusion tube both ends and adjacent diffusion tube and beat the gas hole, lead to the groove liquid to roll acutely, and every region only has 2 hole of beating gas in the middle of the gas diffusion tube, and this regional groove liquid rolls lessly, and it is inhomogeneous that the groove liquid of horizontal direction rolls to appear to lead to horizontal direction temperature distribution inhomogeneous.
In the scheme 2, in the range of the gas diffusion tube, the bath solution rolls less, so that the temperature change of the bath solution is large, and the quality of the alumina coating is influenced.
In the scheme 3, the number of diffusion holes is increased, so that the gas flow can be increased to a certain extent, and in the range of the gas diffusion pipe, the bath solution is moderate in rolling, but the temperature change of the bath solution is still large, so that the quality of the film is influenced.
In the scheme 4, the number of the air holes is further increased, the temperature change of the air hole aperture of 7mm is minimum, but the product is shaken due to severe rolling of the bath solution, and the air hole aperture of 3mm in the selection scheme 4 is comprehensively considered.
In the invention, the relation between the temperature of the uppermost layer and the gas flow is obtained by an equation obtained by linear regression according to a specific numerical value corresponding relation table of the production monitoring temperature and the gas flow. For example, performing a 10.5G upper electrode may use the following equation: y-0.0723 x2-0.0487x+2.0455，R20.9891 where x is gas flow, y is temperature, R2The fitting degree of the trend line is an index of the fitting degree of the trend line, the numerical value of the index can reflect the fitting degree between the estimated value of the trend line and corresponding actual data, and the higher the fitting degree is, the higher the reliability of the trend line is. And the 8.5G upper electrode can be given by the following equation: -0.1527x2+0.1753x+1.8686，R2＝ 0.9902。
The embodiments of the present invention are described only for the preferred embodiments of the present invention, and not for the limitation of the concept and scope of the present invention, and various modifications and improvements made to the technical solution of the present invention by those skilled in the art without departing from the design concept of the present invention shall fall into the protection scope of the present invention, and the technical content of the present invention which is claimed is fully set forth in the claims.
Claims (6)
1. The utility model provides an aluminium anodic oxidation groove bath temperature automatic balancing system which characterized in that: the device comprises a PLC controller, a temperature sensor and two sets of gas stirring systems; the temperature sensor is arranged at the upper part in the anodic oxidation tank and used for detecting the temperature of the uppermost layer of the liquid in the anodic oxidation tank; the two sets of gas stirring systems are respectively arranged at two symmetrical sides of the anodic oxidation tank, the gas stirring system at each side respectively comprises a gas source, a pipeline and an electric control gas flow meter communicated and arranged on the pipeline, and the gas source in the gas stirring system at each side respectively leads gas flow for stirring to the corresponding side of the bottom in the anodic oxidation tank through the pipeline with the electric control gas flow meter; the output end of the temperature sensor is connected with the signal input end of the PLC, the output end of each electric control gas flowmeter is respectively connected with the signal input end of the PLC, and the signal output end of the PLC is also respectively connected with the control ends of the electric control gas flowmeters in the gas stirring systems at the two sides; the PLC receives the uppermost layer temperature of the tank liquid in the anodic oxidation tank collected by the temperature sensor and the airflow flow in the gas stirring system at each side collected by the electric control gas flow meter, and controls the flow of the gas passing through each electric control flow meter based on the function corresponding to the relation curve between the uppermost layer tank liquid temperature and the airflow flow in the anodic oxidation tank.
2. The automatic bath temperature balancing system for aluminum anodizing baths of claim 1, wherein: the function corresponding to the relation curve between the bath solution temperature at the uppermost layer in the anodic oxidation bath and the airflow flow is a regression equation obtained according to a specific numerical value corresponding relation table of the production monitoring temperature and the airflow flow.
3. The automatic bath temperature balancing system for aluminum anodizing baths of claim 1, wherein: the pipeline in the gas stirring system at each side is a general branch structure pipeline, wherein a main pipe is arranged outside the corresponding side of a notch at the top of an anodic oxidation tank respectively, the main pipe is horizontally parallel to the corresponding side of the anodic oxidation tank respectively, the main pipe is communicated with a corresponding gas source through a pressure reducing valve respectively, one end of each branch pipe at each side is communicated with the main pipe in a bypass manner, an electric control gas flowmeter is respectively communicated and installed at the position, close to the main pipe bypass, of each branch pipe, the output end of each electric control gas flowmeter at each side is connected with the signal input end of a PLC (programmable logic controller), and the signal output end of the PLC is also connected with the control end of each; the other end of each branch pipe at each side respectively turns upwards to pass through the corresponding side of a notch at the top of the anodic oxidation tank, then vertically and downwards extends to the bottom in the anodic oxidation tank in a gap between the inner wall at the corresponding side of the anodic oxidation tank and the corresponding side polar plate, and then horizontally extends to penetrate out from the lower part of the gap between the inner wall at the corresponding side of the anodic oxidation tank and the corresponding side polar plate, a plurality of branch pipe penetrating ends at the bottom in the anodic oxidation tank corresponding to each side are respectively provided with a gas diffusion pipe, the axial direction of the gas diffusion pipe is parallel to the axial direction of the header pipe, each branch pipe penetrating end at each side is respectively communicated with the gas diffusion pipe in a bypass mode, and the pipe wall of each gas diffusion pipe is respectively provided with a; in each side gas stirring system, gas flow output by a gas source enters each branch pipe through the main pipe and each electric control flowmeter, and is respectively led to the corresponding side of the bottom in the anodic oxidation tank through each branch pipe, so that tank liquor in the anodic oxidation tank is stirred.
4. The automatic bath temperature balancing system for aluminum anodizing baths of claim 3, wherein: the vertical distance between the positions of the main pipes in the gas stirring systems on the two sides and the notch at the top of the anodic oxidation tank is the same; the number of the branch pipes communicated with the main pipes on the two sides is the same, and the positions of the branch pipes communicated with the main pipes on the two sides are in one-to-one correspondence.
5. The automatic bath temperature balancing system for aluminum anodizing baths of claim 3, wherein: the distance that each branch pipe in the gas stirring system of both sides was worn out from the gap below level between the corresponding side inner wall of anodic oxidation groove and the corresponding side polar plate is the same.
6. The automatic bath temperature balancing system for aluminum anodizing baths of claim 3, wherein: the hole of inflating of every gas diffusion pipe distributes respectively in the last semicircle of gas diffusion pipe, and the hole of inflating of every gas diffusion pipe divide into and is on a parallel with axial two, and every row contains a plurality of holes of inflating that the quantity is the same, and two are used the gas diffusion pipe axial to be central line mutual symmetry, and a plurality of holes of inflating position of two are crisscross one by one.
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| CN210103924U (en) * | 2019-05-08 | 2020-02-21 | 四川万宇生物科技有限公司 | Gas-liquid mixing device of aerobic fermentation tank |
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| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN113388835A (en) * | 2021-06-30 | 2021-09-14 | 中国航发贵州黎阳航空动力有限公司 | Chemical milling device and using method thereof |
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