CN213013140U - Aluminum anodic oxidation tank bath liquid temperature balance adjusting system - Google Patents
Aluminum anodic oxidation tank bath liquid temperature balance adjusting system Download PDFInfo
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- CN213013140U CN213013140U CN202021931277.3U CN202021931277U CN213013140U CN 213013140 U CN213013140 U CN 213013140U CN 202021931277 U CN202021931277 U CN 202021931277U CN 213013140 U CN213013140 U CN 213013140U
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Abstract
The utility model discloses an aluminum anodic oxidation tank bath liquid temperature balance adjusting system, which comprises header pipes arranged outside two symmetrical sides of a notch at the top of an anodic oxidation tank, wherein each header pipe is respectively communicated with a corresponding gas source through a pressure reducing valve, each header pipe is respectively communicated with a plurality of branch pipes by a bypass, each branch pipe is respectively communicated with and provided with a gas flowmeter, each branch pipe at each side is respectively turned upwards after the corresponding side of the notch at the top of the anodic oxidation tank, then vertically and downwardly extending to the bottom in the anodic oxidation tank in a gap between the inner wall of the corresponding side of the anodic oxidation tank and the corresponding side polar plate, horizontally extending to penetrate out from the lower part of the gap between the inner wall of the corresponding side of the anodic oxidation tank and the corresponding side polar plate, respectively arranging a gas diffusion pipe at the positions of a plurality of branch pipe penetrating ends of the bottom in the anodic oxidation tank corresponding to each side, and respectively communicating the branch pipe penetrating ends of each side to the gas diffusion pipe in a bypass mode. The utility model discloses a tank liquid temperature evenly distributed's target in large capacity anodic oxidation inslot has the even advantage of temperature distribution.
Description
Technical Field
The utility model relates to an electrode oxidation tank field is used in LCD processing, specifically is an aluminium anodic oxidation tank bath liquid temperature balance governing system.
Background
10.5G is the largest size production line in the current LCD industry, and the size of the upper electrode consumable used in the plasma etching process is also the largest compared with 8.5/7/6G and the like. The upper electrode is applied to TET-LCD plasma etching equipment, most of the upper electrode is aluminum products, the surface of the upper electrode needs to be subjected to anodic oxidation treatment, and the high-quality anodic oxide film endows the upper electrode with good voltage resistance, impedance and corrosion resistance.
The anodic oxidation treatment of the aluminum surface is carried out in an anodic oxidation tank, the temperature of the tank liquor of the anodic oxidation tank is an important technological parameter for anodic oxidation, when the temperature of the tank liquor rises from 10 ℃ to 20 ℃, the dissolution speed of an anodic oxidation film is increased by about 3 times, which means that the uniformity of the thickness of an anodic oxide film is difficult to meet when the temperature distribution of the tank liquor is not uniform, so the temperature of the tank liquor must be controlled, maintained in a proper temperature range, and kept in a range of +/-1 ℃. As the size of the electrodes increases, meaning that the volume of the anodizing bath increases significantly, new challenges are presented to the anodizing bath temperature control.
When the temperature of the bath solution of the anodic oxidation tank is not uniform, the uniformity of the thickness of the generated anodic oxide film is poor, and the performance of the upper electrode is influenced, because the upper electrode with poor film thickness uniformity and the area with lower surface skin film thickness are easy to generate excessive Etch in the Dry Etch process, the defects of Paticle, arc and the like are caused, and the defects are directly expressed in that the Etch is poor or even scrapped in the substrate production process, and the service life of the upper electrode is short. Therefore, in order to obtain an anodic oxide film having a uniform film thickness, the temperature uniformity of the bath solution must be controlled.
The difficulty in the industry at present is mainly that the temperatures of two sides of an anodic oxidation tank are always higher than that of a central region, so that in a client SPEC range, the membranes in the central region are at a lower SPEC limit, and the membranes in the periphery are at an upper SPEC limit. The central region film thickness was low and directly reflected the high hairiness of arc and particle in the central region of the upper electrode during Etch. The reason for causing the problem is mainly that a single-pipe air stirring mode is usually adopted at present for maintaining the stable temperature of the tank liquor of the anodic oxidation tank, namely, a single gas pipeline is introduced into the bottom of the anodic oxidation tank, two pipelines are arranged at the bottom of the anodic oxidation tank, holes with equal distances are formed in the branch pipes to introduce gas into the tank, and the tank liquor is stirred through the gas, so that the aim of temperature balance is fulfilled. But in actual production, the conditions that the stirring in the middle section of the anodic oxidation tank is obvious, the stirring at two ends is not obvious, and the temperature of tank liquor at two ends of the anodic oxidation tank is obviously higher than that in the middle can occur. The reason for this is as follows:
1. the gas flow rate is that the anodic oxidation product is suspended on the conducting rod and immersed in the anodic oxidation bath solution, which requires that the gas flow rate of air stirring cannot be too large, otherwise the product will swing, but the gas flow rate difference between the middle section of the bath and the two ends of the bath will be larger in the smaller gas flow rate in the 10.5G anodic oxidation bath, resulting in the unobvious air stirring effect.
2. Air stirring cannot be controlled in a segmented mode, and the temperature of a specific area cannot be adjusted by an existing single-pipe type air stirring system.
SUMMERY OF THE UTILITY MODEL
The utility model aims at providing an aluminium anodic oxidation groove bath temperature balance governing system to solve the anodic oxidation groove that prior art is used for LCD production owing to adopt the temperature of the both sides that the single tube air stirring leads to than the regional high problem in center.
In order to achieve the above purpose, the utility model discloses the technical scheme who adopts is:
the utility model provides an aluminium anodic oxidation groove bath temperature balance governing system which characterized in that: the device comprises header pipes which are respectively arranged outside two symmetrical sides of a notch at the top of an anodic oxidation tank, the header pipes are respectively horizontally parallel to the corresponding sides of the anodic oxidation tank, each header pipe is respectively and independently provided with an air source, each header pipe is respectively communicated with the corresponding air source through a pressure reducing valve, each header pipe is respectively communicated with a plurality of branch pipes through a bypass, each branch pipe is respectively communicated with a gas flowmeter at the position close to the bypass of the header pipe, each branch pipe at each side is respectively upwards turned over the corresponding side of the notch at the top of the anodic oxidation tank, then vertically and downwards extends to the bottom of the anodic oxidation tank in a gap between the inner wall at the corresponding side of the anodic oxidation tank and a corresponding side polar plate, and then horizontally extends to penetrate through the lower part of the gap between the inner wall at the corresponding side of the anodic oxidation tank and the corresponding side polar plate, a plurality of penetrating branch pipes at the bottom of each side, the penetrating ends of the branch pipes on each side are communicated with the gas diffusion pipes in a bypass mode respectively, and the pipe wall of each gas diffusion pipe is provided with a plurality of air injection holes leading to the interior of the anodic oxidation tank respectively.
The aluminum anodic oxidation tank bath liquid temperature balance adjusting system is characterized in that: the positions of the header pipes on the two sides are the same as the vertical distance of the notch at the top of the anodic oxidation tank.
The aluminum anodic oxidation tank bath liquid temperature balance adjusting system is characterized in that: the number of the branch pipes communicated with the main pipes on the two sides is the same, and the positions of the branch pipes communicated with the main pipes on the two sides are in one-to-one correspondence.
The aluminum anodic oxidation tank bath liquid temperature balance adjusting system is characterized in that: the distance that the branch pipes on the two sides horizontally penetrate through the lower part of the gap between the inner wall of the corresponding side of the anodic oxidation tank and the polar plate of the corresponding side is the same.
The aluminum anodic oxidation tank bath liquid temperature balance adjusting system is characterized in that: the inflating holes of each gas diffusion pipe are respectively distributed on the upper semicircle of each gas diffusion pipe.
The aluminum anodic oxidation tank bath liquid temperature balance adjusting system is characterized in that: the inflating holes of each gas diffusion pipe are divided into two rows which are parallel to the axial direction, each row comprises a plurality of inflating holes with the same quantity, the two rows are symmetrical to each other by taking the axial direction of the gas diffusion pipe as a central line, and the positions of the plurality of inflating holes in the two rows are staggered one by one.
The utility model discloses change original single tube integral type air feed stirring into both sides sectional type air feed stirring, it can lead to anodic oxidation groove middle section and both ends air agitation to have very big difference to consider single tube integral type air feed stirring, the utility model discloses a sectional type air feed scheme, house steward (pressure 0.5 ~ 1kg) air feed through being equipped with the relief pressure valve, draw forth a plurality of branch pipes at the house steward, be furnished with gas flowmeter on every branch pipe respectively, can adjust gas flow according to actual conditions, introduce anodic oxidation groove lower part with a plurality of branch pipes equidistance of every side, and connect the gas diffusion tube that corresponds the side, every house steward disposes the air supply respectively to through the distribution structure design of inflating the gas pocket on the gas diffusion tube, can realize the whole obvious stirring of tank liquor when letting in gas, and make temperature evenly distributed.
The utility model discloses with relatively lower cost, realized the target of large capacity anodic oxidation inslot liquid temperature evenly distributed, make anodic oxidation inslot liquid temperature can control at 1 ℃ within range, have the even advantage of temperature distribution.
Drawings
Fig. 1 is a schematic plan view of the present invention.
Fig. 2 is a side view of the structure of the pipeline part of the present invention.
Fig. 3 is a top view of the structure of the pipeline part of the present invention.
Fig. 4 is a schematic view of the structure of the gas diffusion tube of the present invention.
Detailed Description
The present invention will be further explained with reference to the drawings and examples.
As shown in fig. 1, fig. 2 and fig. 3, the tank liquor temperature balance adjusting system for the aluminum anodic oxidation tank comprises header pipes 2 respectively arranged outside the left side and the right side of a notch at the top of the anodic oxidation tank 1, wherein the header pipes 2 are respectively horizontally parallel to the corresponding sides of the anodic oxidation tank 1, namely, the axial direction of each header pipe 2 is respectively along the front-back horizontal direction and is parallel to the corresponding sides of the anodic oxidation tank 1. The positions of the header pipes 2 on the two sides are the same as the vertical distance of the plane of the notch at the top of the anodic oxidation tank 1.
Every house steward 2 disposes air supply 3 respectively independently, and every house steward 2 communicates with 3 intercommunications of corresponding air supply through relief pressure valve 4 respectively, and every house steward 2 bypass intercommunication has three branch pipe 5 respectively, and every branch pipe 5 is close to and communicates respectively with house steward 2 bypass department and installs gas flowmeter 6, and the 5 position one-to-one of branch pipe of left and right side house steward 2 intercommunication to form the gas mixing system of left and right bilateral symmetry distribution.
A plurality of branch pipes 5 that the bottom corresponds each side in anodic oxidation groove 1 wear out the end position and are equipped with gas diffusion tube 8 respectively, and gas diffusion tube 8 axial is on a parallel with 2 axial of house steward, and the axial of gas diffusion tube 8 is along front and back horizontal direction and be on a parallel with 1 bottom of anodic oxidation groove promptly, and each branch pipe 5 break-out end on left and right side is the bypass respectively and is linked to the gas diffusion tube 8 that corresponds the side, and the pipe wall of every gas diffusion tube 8 is equipped with a plurality of holes 9 of inflating that lead to in anodic oxidation groove 1 respectively.
Specifically, the plurality of gas injection holes 9 of each gas diffusion tube 8 are divided into two rows parallel to the axial direction of the gas diffusion tube 8, the two rows are respectively located on the upper semicircle of the gas diffusion tube, each row contains a plurality of gas injection holes with the same number, the two rows are mutually symmetrical by taking the axial direction of the gas diffusion tube as a central line, and the positions of the plurality of gas injection holes 9 on the two rows are staggered one by one.
Keep the gas pressure in the main pipe stable through every house steward 2 relief pressure valve 4, and the gas flow of branch pipe 5 can be according to actual conditions through 6 subregion regulations of gas flowmeter, make gaseous even diffusion in anodic oxidation groove 1 through gas diffusion pipe 8, realize the whole stirring of tank liquor to make temperature distribution even.
The embodiments of the present invention are only descriptions of the preferred embodiments of the present invention, not right the present invention is designed and limited, without departing from the design concept of the present invention, the technical personnel in the field should fall into the protection scope of the present invention for various modifications and improvements made by the technical solution of the present invention, and the technical contents of the present invention are all recorded in the claims.
Claims (6)
1. The utility model provides an aluminium anodic oxidation groove bath temperature balance governing system which characterized in that: the device comprises header pipes which are respectively arranged outside two symmetrical sides of a notch at the top of an anodic oxidation tank, the header pipes are respectively horizontally parallel to the corresponding sides of the anodic oxidation tank, each header pipe is respectively and independently provided with an air source, each header pipe is respectively communicated with the corresponding air source through a pressure reducing valve, each header pipe is respectively communicated with a plurality of branch pipes through a bypass, each branch pipe is respectively communicated with a gas flowmeter at the position close to the bypass of the header pipe, each branch pipe at each side is respectively upwards turned over the corresponding side of the notch at the top of the anodic oxidation tank, then vertically and downwards extends to the bottom of the anodic oxidation tank in a gap between the inner wall at the corresponding side of the anodic oxidation tank and a corresponding side polar plate, and then horizontally extends to penetrate through the lower part of the gap between the inner wall at the corresponding side of the anodic oxidation tank and the corresponding side polar plate, a plurality of penetrating branch pipes at the bottom of each side, the penetrating ends of the branch pipes on each side are communicated with the gas diffusion pipes in a bypass mode respectively, and the pipe wall of each gas diffusion pipe is provided with a plurality of air injection holes leading to the interior of the anodic oxidation tank respectively.
2. The aluminum anodizing bath temperature balance adjustment system of claim 1, wherein: the positions of the header pipes on the two sides are the same as the vertical distance of the notch at the top of the anodic oxidation tank.
3. The aluminum anodizing bath temperature balance adjustment system of claim 1, wherein: the number of the branch pipes communicated with the main pipes on the two sides is the same, and the positions of the branch pipes communicated with the main pipes on the two sides are in one-to-one correspondence.
4. The aluminum anodizing bath temperature balance adjustment system of claim 1, wherein: the distance that the branch pipes on the two sides horizontally penetrate through the lower part of the gap between the inner wall of the corresponding side of the anodic oxidation tank and the polar plate of the corresponding side is the same.
5. The aluminum anodizing bath temperature balance adjustment system of claim 1, wherein: the inflating holes of each gas diffusion pipe are respectively distributed on the upper semicircle of each gas diffusion pipe.
6. The aluminum anodizing bath temperature balance adjustment system of claim 5, wherein: the inflating holes of each gas diffusion pipe are divided into two rows which are parallel to the axial direction, each row comprises a plurality of inflating holes with the same quantity, the two rows are symmetrical to each other by taking the axial direction of the gas diffusion pipe as a central line, and the positions of the plurality of inflating holes in the two rows are staggered one by one.
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| CN202021931277.3U CN213013140U (en) | 2020-09-07 | 2020-09-07 | Aluminum anodic oxidation tank bath liquid temperature balance adjusting system |
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| CN202021931277.3U CN213013140U (en) | 2020-09-07 | 2020-09-07 | Aluminum anodic oxidation tank bath liquid temperature balance adjusting system |
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Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN113388835A (en) * | 2021-06-30 | 2021-09-14 | 中国航发贵州黎阳航空动力有限公司 | Chemical milling device and using method thereof |
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2020
- 2020-09-07 CN CN202021931277.3U patent/CN213013140U/en active Active
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN113388835A (en) * | 2021-06-30 | 2021-09-14 | 中国航发贵州黎阳航空动力有限公司 | Chemical milling device and using method thereof |
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Address after: 230000 No. 1766, Jiudingshan Road, Xinzhan District, Hefei City, Anhui Province Patentee after: Hefei Weirui Technology Co.,Ltd. Address before: 230000 east of Jiudingshan road and south of Zhucheng Road, Xinzhan District, Hefei City, Anhui Province Patentee before: HEFEI WEIRUI OPTOELECTRONIC TECHNOLOGY CO.,LTD. |
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