CN111867226A - Plasma jet generating system capable of recycling gas - Google Patents
Plasma jet generating system capable of recycling gas Download PDFInfo
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- CN111867226A CN111867226A CN202010824958.8A CN202010824958A CN111867226A CN 111867226 A CN111867226 A CN 111867226A CN 202010824958 A CN202010824958 A CN 202010824958A CN 111867226 A CN111867226 A CN 111867226A
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- gas
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- 238000004064 recycling Methods 0.000 title claims abstract description 10
- 239000000463 material Substances 0.000 claims abstract description 29
- 239000002243 precursor Substances 0.000 claims abstract description 25
- 230000001681 protective effect Effects 0.000 claims abstract description 18
- 238000004381 surface treatment Methods 0.000 claims abstract description 10
- 239000000178 monomer Substances 0.000 claims abstract description 5
- 239000007921 spray Substances 0.000 claims abstract description 4
- 238000001035 drying Methods 0.000 claims description 9
- 239000011810 insulating material Substances 0.000 claims description 6
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 claims description 3
- 239000011889 copper foil Substances 0.000 claims description 3
- 239000011796 hollow space material Substances 0.000 claims description 3
- WFKWXMTUELFFGS-UHFFFAOYSA-N tungsten Chemical compound [W] WFKWXMTUELFFGS-UHFFFAOYSA-N 0.000 claims description 3
- 229910052721 tungsten Inorganic materials 0.000 claims description 3
- 239000010937 tungsten Substances 0.000 claims description 3
- 238000007599 discharging Methods 0.000 claims description 2
- 230000000694 effects Effects 0.000 abstract description 7
- 230000007613 environmental effect Effects 0.000 abstract description 4
- 239000002699 waste material Substances 0.000 abstract description 3
- 239000012535 impurity Substances 0.000 abstract description 2
- 239000007789 gas Substances 0.000 description 99
- 238000000034 method Methods 0.000 description 6
- 239000003822 epoxy resin Substances 0.000 description 5
- 230000004048 modification Effects 0.000 description 5
- 238000012986 modification Methods 0.000 description 5
- 229920000647 polyepoxide Polymers 0.000 description 5
- 230000008569 process Effects 0.000 description 5
- FFUAGWLWBBFQJT-UHFFFAOYSA-N hexamethyldisilazane Chemical compound C[Si](C)(C)N[Si](C)(C)C FFUAGWLWBBFQJT-UHFFFAOYSA-N 0.000 description 4
- QVGXLLKOCUKJST-UHFFFAOYSA-N atomic oxygen Chemical compound [O] QVGXLLKOCUKJST-UHFFFAOYSA-N 0.000 description 3
- 239000001301 oxygen Substances 0.000 description 3
- 229910052760 oxygen Inorganic materials 0.000 description 3
- XKRFYHLGVUSROY-UHFFFAOYSA-N Argon Chemical compound [Ar] XKRFYHLGVUSROY-UHFFFAOYSA-N 0.000 description 2
- 239000004020 conductor Substances 0.000 description 2
- 230000002209 hydrophobic effect Effects 0.000 description 2
- 150000002500 ions Chemical class 0.000 description 2
- 239000002245 particle Substances 0.000 description 2
- 239000004033 plastic Substances 0.000 description 2
- 238000011084 recovery Methods 0.000 description 2
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 1
- 229910052786 argon Inorganic materials 0.000 description 1
- 230000009286 beneficial effect Effects 0.000 description 1
- 238000004140 cleaning Methods 0.000 description 1
- 230000007547 defect Effects 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 230000005611 electricity Effects 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 239000011521 glass Substances 0.000 description 1
- 238000009832 plasma treatment Methods 0.000 description 1
- 239000000126 substance Substances 0.000 description 1
- 238000006467 substitution reaction Methods 0.000 description 1
- 230000032258 transport Effects 0.000 description 1
Images
Classifications
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- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05H—PLASMA TECHNIQUE; PRODUCTION OF ACCELERATED ELECTRICALLY-CHARGED PARTICLES OR OF NEUTRONS; PRODUCTION OR ACCELERATION OF NEUTRAL MOLECULAR OR ATOMIC BEAMS
- H05H1/00—Generating plasma; Handling plasma
- H05H1/24—Generating plasma
-
- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05H—PLASMA TECHNIQUE; PRODUCTION OF ACCELERATED ELECTRICALLY-CHARGED PARTICLES OR OF NEUTRONS; PRODUCTION OR ACCELERATION OF NEUTRAL MOLECULAR OR ATOMIC BEAMS
- H05H1/00—Generating plasma; Handling plasma
- H05H1/24—Generating plasma
- H05H1/2406—Generating plasma using dielectric barrier discharges, i.e. with a dielectric interposed between the electrodes
- H05H1/2443—Generating plasma using dielectric barrier discharges, i.e. with a dielectric interposed between the electrodes the plasma fluid flowing through a dielectric tube
-
- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05H—PLASMA TECHNIQUE; PRODUCTION OF ACCELERATED ELECTRICALLY-CHARGED PARTICLES OR OF NEUTRONS; PRODUCTION OR ACCELERATION OF NEUTRAL MOLECULAR OR ATOMIC BEAMS
- H05H1/00—Generating plasma; Handling plasma
- H05H1/24—Generating plasma
- H05H1/26—Plasma torches
-
- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05H—PLASMA TECHNIQUE; PRODUCTION OF ACCELERATED ELECTRICALLY-CHARGED PARTICLES OR OF NEUTRONS; PRODUCTION OR ACCELERATION OF NEUTRAL MOLECULAR OR ATOMIC BEAMS
- H05H1/00—Generating plasma; Handling plasma
- H05H1/24—Generating plasma
- H05H1/26—Plasma torches
- H05H1/32—Plasma torches using an arc
- H05H1/34—Details, e.g. electrodes, nozzles
Landscapes
- Physics & Mathematics (AREA)
- Engineering & Computer Science (AREA)
- Plasma & Fusion (AREA)
- Spectroscopy & Molecular Physics (AREA)
- Fluid Mechanics (AREA)
- Physical Or Chemical Processes And Apparatus (AREA)
Abstract
The invention discloses a plasma jet generating system capable of recycling gas, which comprises a plasma jet component, a gas mixing cavity, a working gas supply passage and a precursor gas supply passage, wherein the working gas supply passage is connected with the gas mixing cavity and used for supplying working gas, the precursor gas supply passage is connected with the gas mixing cavity and used for supplying precursor gas carrying monomer materials, the gas mixing cavity mixes the working gas and the precursor gas and then supplies the gas to the plasma jet component, so that the plasma jet component sprays plasma jet, the plasma jet generating system also comprises a protective cover and a gas return passage, the protective cover is used for covering the surface of a material to be processed to form a closed space for isolating external air, the plasma jet can only be sprayed in the closed space, the protective cover is provided with a gas return port, and the gas return port is connected into the gas mixing cavity through the gas return passage. The invention can eliminate the interference of external impurity gas on the surface treatment of the material, enhance the plasma jet treatment effect, effectively reduce the gas waste and improve the environmental protection economy.
Description
Technical Field
The invention relates to the technical field of plasma, in particular to a plasma jet generating system capable of recycling gas.
Background
With the rapid development of plasma technology, the application of plasma in the fields of material treatment, energy chemical industry, biomedicine and the like is promoted more and more. The plasma jet transports the active particles in the discharge area to the treated area through gas flow, and the material modification is completed. However, in the discharge process, air at the pipe orifice of the jet pipe is easily ionized to form various oxygen-containing particles, which is not beneficial to hydrophobic modification of materials and greatly limits the plasma jet treatment effect. Therefore, there is a need to further optimize the plasma device to isolate the foreign gas (mainly air) from the outside, and to improve the efficiency of the plasma treatment on the surface of the material.
At present, the gas flow rate required for generating plasma jet is generally 3 liters/minute, the processing time is generally 150 seconds, and on one hand, the gas consumption of working gas in the processing process is large and the cost is high; on the other hand, the treated working gas is directly mixed into the air, which damages the air quality and greatly limits the practical application of the plasma jet to material surface treatment. Therefore, collecting and recycling the working gas ejected from the jet pipe is a problem to be solved at present.
Disclosure of Invention
In view of the above-mentioned defects of the prior art, the present invention provides a plasma jet generating system capable of recycling gas, which can eliminate the interference of the foreign gas on the surface treatment of the material, enhance the plasma jet treatment effect, simultaneously effectively reduce the gas waste, and improve the environmental protection and economy.
One of the purposes of the invention is realized by the technical scheme, the plasma jet generating system capable of recycling gas comprises a plasma jet assembly, a gas mixing cavity, a working gas supply passage and a precursor gas supply passage, wherein the working gas supply passage is connected with the gas mixing cavity and used for providing working gas, the precursor gas supply passage is connected with the gas mixing cavity and used for providing precursor gas carrying monomer materials, the gas mixing cavity mixes the working gas and the precursor gas and then supplies gas to the plasma jet assembly, so that the plasma jet assembly sprays plasma jet, the plasma jet generating system also comprises a protective cover and a gas return passage, the protective cover is used for covering the surface of a material to be treated to form a closed space for isolating outside air, the plasma jet can only be sprayed into the closed space, and the protective cover is provided with a gas return opening, the air return port is connected to the air mixing cavity through an air return passage so as to recycle the working gas in the protective cover to the air mixing cavity.
Further, the protective cover is in a shape that the inner part is provided with a hollow space and the bottom surface is opened so as to be closely contacted with the surface of the material to be treated.
Further, the shield is made of an insulating material.
Further, be equipped with drying bottle and air pump from the gas outlet in proper order on the return-air passageway, the drying bottle is arranged in carrying out dry deoxidization to the working gas in the return-air passageway, the air pump is arranged in the working gas who returns in the air passageway and discharges into the gas mixing chamber.
Further, a first flow valve is arranged on the working gas supply passage, and a second flow valve is arranged on the precursor gas supply passage.
Further, a first flowmeter is arranged on the working gas supply passage, a second flowmeter is arranged on the precursor gas supply passage, and a third flowmeter is arranged on the return passage and close to the gas mixing cavity.
The device further comprises a flow controller, wherein the flow controller is used for reading the flow data of the first flow meter, the second flow meter and the third flow meter, and controlling the power of the air pump and the opening and closing degree of the first flow valve and the second flow valve when the surface treatment is started on the material to be treated, so that the flow data of the first flow meter reaches a first target flow, the flow data of the second flow meter is maintained at a preset value, and the flow data of the third flow meter reaches a first target flow; and closing the first flow valve, the second flow valve and the air pump after keeping the preset time.
Further, the plasma jet subassembly includes high voltage power supply and an at least plasma jet pipe, the one end of plasma jet pipe stretches into and is fixed with the needle electrode, the needle electrode is connected with the high voltage power supply electricity, the other end opening of plasma jet pipe stretches into in the airtight space, the inside that the plasma jet pipe is close to the opening part is equipped with the ground electrode of ground connection, the gas mixing chamber supplies the gas for the plasma jet pipe through the one end of fixed needle electrode.
Further, the plasma jet pipe is made of high-temperature-resistant insulating materials.
Further, the needle electrode is a tungsten needle, and the ground electrode is made of a copper foil material.
Due to the adoption of the technical scheme, the invention has the following advantages:
1. the gas consumption of the working gas is saved, and the environmental protection economy is improved;
2. because the external air is isolated in the surface treatment process of the material, the gas waste is effectively reduced, and the treatment speed is accelerated;
3. the recovered gas contains effective ions with higher concentration, and the effective ions further react with the surface of the treated material when being reused, so that the modification effect of the plasma is improved.
Additional advantages, objects, and features of the invention will be set forth in part in the description which follows and in part will become apparent to those having ordinary skill in the art upon examination of the following or may be learned from practice of the invention.
Drawings
The drawings of the invention are illustrated as follows:
FIG. 1 is a schematic diagram of the connection of a recyclable gas plasma jet generating system.
Detailed Description
The invention is further illustrated by the following figures and examples.
Example, as shown in fig. 1; a plasma jet generating system capable of recycling gas comprises a plasma jet assembly 10, a gas mixing cavity 20, a working gas supply passage 30 and a precursor gas supply passage 40, wherein the working gas supply passage 30 is connected to the gas mixing cavity 20 and used for supplying working gas, the precursor gas supply passage 40 is connected to the gas mixing cavity 20 and used for supplying precursor gas carrying monomer materials, the gas mixing cavity 20 mixes the working gas and the precursor gas and supplies the gas to the plasma jet assembly 10, so that the plasma jet assembly 10 sprays plasma jet, in addition, the system also comprises a protective cover 50 and a gas return passage 60, the protective cover 50 is used for covering on the surface of a material to be processed to form a closed space for isolating outside air, the plasma jet can only be sprayed in the closed space, the protective cover 50 is provided with a gas return port 51, and the gas return port 51 is connected to the gas mixing cavity 20 through the gas return passage 60, so as to recycle the working gas in the protection cover 50 to the gas mixing chamber 20.
The gas supply to the working gas supply passage 30 may be a first gas cylinder 70 and the gas supply to the precursor gas supply passage 40 may be a second gas cylinder 80.
In this embodiment, the shield 50 has a hollow space therein and an open bottom surface, and is in close contact with the surface of the material to be treated. In this embodiment, the shape is hemispherical. In other embodiments, the protective cover 50 may have a shape of a semi-ellipsoid, a rectangular parallelepiped, or the like, which can be tightly bonded to the surface of the material to be treated. The shield 50 is typically made of an insulating material, such as plastic or rubber, with plastic being used in this embodiment.
In order to increase the working gas recovery speed, in the present embodiment, a drying bottle 61 and an air pump 62 are sequentially disposed on the air return passage 60 from the air outlet 51, the drying bottle 61 is used for drying and removing oxygen from the working gas in the air return passage 60, and the air pump 62 is used for discharging the working gas in the air return passage 60 into the air mixing chamber 20. Since the working gas can be recycled, the working gas supply passage 30 can reduce the amount of supplied gas.
In order to accurately control the gas flow rates of the respective passages, in the present embodiment, the first flow valve 31 is provided on the working gas supply passage 30, and the second flow valve 41 is provided on the precursor gas supply passage 40. The working gas supply passage 30 is further provided with a first flow meter 32, the precursor gas supply passage 40 is provided with a second flow meter 42, and the return passage 60 is provided with a third flow meter 63 at a position close to the gas mixing chamber 20. The gas flow rate can be controlled by the first flow valve 31, the second flow valve 41 and the gas pump 62, and the flow rate control effect can be fed back by the first flow meter 32, the second flow meter 42 and the third flow meter 63.
In the specific flow rate control, the system further includes a flow rate controller (not shown) for reading the flow rate data of the first flow meter 32, the second flow meter 42 and the third flow meter 63, and controlling the air pump 62 and the second flow valve 41 to be closed and the opening and closing degree of the first flow valve 31 to make the flow rate data of the first flow meter 32 reach a first target flow rate when the surface treatment of the material to be treated is started; after the preset time is maintained, controlling the opening and closing degree of the second flow meter 41 so that the flow data of the second flow meter 42 is maintained at a predetermined value, and controlling the opening and closing degree of the first flow meter 31 and the exhaust speed of the air pump 62 so that the flow data of the first flow meter 32 is reduced to half of the first target flow rate while the flow data of the third flow meter 63 is slightly lower than the flow data of the first flow meter 32; and closing the first flow valve 31, the second flow valve 41 and the air pump 62 after continuing to maintain the preset time.
The plasma jet generating system will be described in detail below by taking the surface hydrophobic treatment of the epoxy resin plate as an example. In this example, argon is used as the working gas and the precursor gas, the monomer material carried by the precursor gas is Hexamethyldisilazane (HMDSN), the preset time is 1 minute, the first target flow rate is 1.5 liters/minute, and the predetermined value is 20 milliliters/minute.
The specific working process is as follows:
1. cleaning and drying the epoxy resin plate;
2. covering the protection cover 50 on the surface of the epoxy resin plate to form a closed space;
3. the first flow valve 31 and the air pump 62 were opened and working gas was introduced (maintained at 3 liters/min) and held for 1 minute until the air in each passage in the system was evacuated;
4. starting surface treatment on the epoxy resin plate, controlling the power of the air pump 62 and the opening and closing degrees of the first flow valve 31 and the second flow valve 41 so that the flow data of the first flow meter 32 reaches 1.5 liters/minute, the flow data of the second flow meter 42 is maintained at 20 milliliters/minute, the flow data of the third flow meter 63 is also 1.5 liters/minute (namely, the recovery rate of the working gas is 1.5 liters/minute), and ensuring that the gas flow passing through the jet pipe is still about 3 liters/minute and is kept for 1 minute; .
5. After the holding time is 1 minute, the first flow valve 31, the second flow valve 41, and the air pump 62 are closed, and the surface treatment of the epoxy resin plate is completed.
The plasma jet generation system of the present embodiment is compared with the plasma jet generation system of the prior art in terms of the processing procedure, and the comparison results are shown in the following table:
as can be seen by comparison, the plasma jet generation system of the embodiment not only saves the gas consumption of the working gas, but also shortens the processing time, accelerates the processing speed, and avoids the interference of oxygen in the air in the processing process, so that the processing effect is better.
The plasma jet assembly 10, as a device for generating a plasma jet, includes a high voltage power supply 11 and at least one plasma jet tube 12. In the present embodiment, there is one plasma jet pipe 12, and if there are a plurality of plasma jet pipes 12, a jet array structure may be formed.
One end of the plasma jet pipe 12 extends into and is fixed with a needle electrode 13, the needle electrode 13 is electrically connected with the high-voltage power supply 11, the other end of the plasma jet pipe 12 is opened and extends into the closed space, a grounded ground electrode 14 is arranged inside the plasma jet pipe 12 close to the opening, and the gas mixing cavity 20 supplies gas to the plasma jet pipe 12 through one end of the fixed needle electrode 13.
The plasma jet pipe 12 is usually made of high temperature resistant insulating material, such as quartz glass pipe, and the length can be 15-20cm, and the diameter of the inner glass wall can be 0.5-0.8 mm.
The needle electrode 13 may be a tungsten needle or other needle-shaped conductor, the ground electrode 14 may be made of a conductive material such as a copper foil material, and the electrode width may be 1 cm.
In this way, the plasma jet generating system capable of recycling gas according to the embodiment of the present invention isolates the outside air through the protective cover 50, and recycles the working gas through the air return passage 60. Not only can get rid of the interference of external impurity gas to material surface treatment, strengthen plasma jet treatment effect, effectively reduce gaseous extravagant simultaneously, promote environmental protection economic nature.
The present invention is not limited to the above embodiments, and any modifications, equivalent replacements, improvements, etc. made within the spirit and principle of the present invention are included in the scope of the claims of the present invention which are filed as the application.
It should be understood that parts of the specification not set forth in detail are well within the prior art. Finally, the above embodiments are only intended to illustrate the technical solutions of the present invention and not to limit the present invention, and although the present invention has been described in detail with reference to the preferred embodiments, it will be understood by those skilled in the art that modifications or equivalent substitutions may be made on the technical solutions of the present invention without departing from the spirit and scope of the technical solutions, and all of them should be covered by the claims of the present invention.
Claims (10)
1. A plasma jet generating system capable of recycling gas comprises a plasma jet component, a gas mixing cavity, a working gas supply passage and a precursor gas supply passage, wherein the working gas supply passage is connected into the gas mixing cavity and used for providing working gas, the precursor gas supply passage is connected into the gas mixing cavity and used for providing precursor gas carrying monomer materials, the gas mixing cavity mixes the working gas and the precursor gas and then supplies the gas to the plasma jet component, so that the plasma jet component sprays plasma jet, the plasma jet generating system is characterized by further comprising a protective cover and a gas return passage, the protective cover is used for covering a closed space which is formed on the surface of a material to be processed and used for isolating external air, the plasma jet can only be sprayed into the closed space, the protective cover is provided with a gas return port, and the gas return port is connected into the gas mixing cavity through the gas return passage, so as to recycle the working gas in the protective cover to the gas mixing cavity.
2. The plasma jet generating system as claimed in claim 1, wherein the shield is formed in a shape having a hollow space inside and an open bottom surface to be in close contact with a surface of a material to be treated.
3. A plasma-jet generating system, as claimed in claim 1 or 2, characterized in that the protective cover is made of an insulating material.
4. The plasma jet generating system according to claim 1, wherein a drying bottle and a gas pump are sequentially arranged on the air return passage from the gas outlet, the drying bottle is used for drying and deoxidizing the working gas in the air return passage, and the gas pump is used for discharging the working gas in the air return passage into the gas mixing chamber.
5. The plasma jet generating system of claim 4, wherein a first flow valve is disposed on the working gas supply passage and a second flow valve is disposed on the precursor gas supply passage.
6. The plasma jet generating system of claim 5, wherein a first flow meter is arranged on the working gas supply passage, a second flow meter is arranged on the precursor gas supply passage, and a third flow meter is arranged on the return gas passage and close to the gas mixing chamber.
7. The plasma jet generating system according to claim 6, further comprising a flow controller for reading flow data of the first flow meter, the second flow meter, and the third flow meter, and controlling the power of the air pump and the opening and closing degree of the first flow valve and the second flow valve so that the flow data of the first flow meter reaches a first target flow, the flow data of the second flow meter is maintained at a predetermined value, and the flow data of the third flow meter reaches a first target flow when surface treatment of the material to be treated is started; and closing the first flow valve, the second flow valve and the air pump after keeping the preset time.
8. The plasma jet generating system according to claim 1, wherein the plasma jet assembly includes a high voltage power supply and at least one plasma jet pipe, one end of the plasma jet pipe extends into and is fixed with a needle electrode, the needle electrode is electrically connected with the high voltage power supply, the other end of the plasma jet pipe is opened and extends into the closed space, a grounded ground electrode is arranged inside the plasma jet pipe close to the opening, and the gas mixing chamber supplies gas to the plasma jet pipe through one end of the fixed needle electrode.
9. The plasma jet generating system of claim 8, wherein the plasma jet pipe is made of a high temperature resistant insulating material.
10. The plasma-jet generating system of claim 8, wherein the needle electrode is a tungsten needle and the ground electrode is made of a copper foil material.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202010824958.8A CN111867226A (en) | 2020-08-17 | 2020-08-17 | Plasma jet generating system capable of recycling gas |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202010824958.8A CN111867226A (en) | 2020-08-17 | 2020-08-17 | Plasma jet generating system capable of recycling gas |
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| CN111867226A true CN111867226A (en) | 2020-10-30 |
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| Application Number | Title | Priority Date | Filing Date |
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| CN202010824958.8A Pending CN111867226A (en) | 2020-08-17 | 2020-08-17 | Plasma jet generating system capable of recycling gas |
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Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN112235928A (en) * | 2020-11-08 | 2021-01-15 | 赣南师范大学 | Mixed gas double-gathering dielectric barrier discharge low-temperature plasma generating device |
| WO2024031118A3 (en) * | 2022-08-09 | 2024-04-11 | Thermal Processing Solutions GmbH | Device for providing a plasma |
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2020
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| WO2024031118A3 (en) * | 2022-08-09 | 2024-04-11 | Thermal Processing Solutions GmbH | Device for providing a plasma |
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Application publication date: 20201030 |