CN111863576B - Ion beam energy control device - Google Patents
Ion beam energy control device Download PDFInfo
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- CN111863576B CN111863576B CN201910340903.7A CN201910340903A CN111863576B CN 111863576 B CN111863576 B CN 111863576B CN 201910340903 A CN201910340903 A CN 201910340903A CN 111863576 B CN111863576 B CN 111863576B
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/30—Electron-beam or ion-beam tubes for localised treatment of objects
- H01J37/317—Electron-beam or ion-beam tubes for localised treatment of objects for changing properties of the objects or for applying thin layers thereon, e.g. for ion implantation
- H01J37/3171—Electron-beam or ion-beam tubes for localised treatment of objects for changing properties of the objects or for applying thin layers thereon, e.g. for ion implantation for ion implantation
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/30—Electron-beam or ion-beam tubes for localised treatment of objects
- H01J37/304—Controlling tubes by information coming from the objects or from the beam, e.g. correction signals
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Abstract
The invention discloses an ion beam energy control device. It comprises the following steps: an inlet end into which the ion beam is emitted and an outlet end from which the ion beam is emitted; each electrode pair comprises a first electrode and a second electrode which are oppositely arranged, the first electrode and the second electrode are rod-shaped, and a space between the first electrode and the second electrode is used for an ion beam to pass through; at least one of the plurality of electrode pairs forming a first electrode group, a voltage applied to the first electrode group causing deflection of the ion beam in a first direction; at least one of the plurality of electrode pairs forms a second electrode group to which a voltage is applied to deflect the ion beam in a second direction, the second direction being opposite to the first direction. The ion beam energy control device has more advantages in the aspects of electrode shape, electrode layout, beam current adjustment and the like.
Description
Technical Field
The invention belongs to the field of semiconductor equipment, and particularly relates to an ion beam energy control device.
Background
In a "low energy high beam" ion implanter, it is desirable to achieve an ion beam with very low final energy and very high beam intensity. Since the extraction intensity and the transmission efficiency of the ion beam are significantly reduced with the reduction of energy, it is necessary to extract and transmit the ion beam with higher energy, and then to decelerate the ion beam by one or several deceleration devices, thereby realizing a low-energy large beam current. During deceleration, it is desirable to avoid loss of ion beam intensity. In addition, ions of intermediate energy, which are different from the final energy, are inevitably generated during deceleration, and adversely affect the manufactured semiconductor device, which is called energy pollution, and also need to be reduced to the maximum extent. Therefore, how to effectively decelerate the beam and reduce energy pollution is the main direction of research and development. In existing devices, a variety of electrodes are typically provided, and the electric field of the electrodes changes the direction and speed of the beam as it passes through. Currently, the following drawbacks exist in the devices visible on the market:
the shapes of the electrodes are different, which is not beneficial to the manufacturing and processing of the electrodes;
the electrode has large surface area and is easy to be hit by beam current;
the beam channel is narrower, and the restriction on beam current is larger;
the beam height is insufficient;
the large-area planar electrode is adopted to shield the influence of the cavity wall on the electric field, so that the beam edge angle cannot be effectively changed;
the intensity of the passing beam is limited, and the vertical uniformity is almost not adjustable.
Disclosure of Invention
The invention aims to overcome the defects of limited beam current and insufficient beam current height of the traditional device and provides an ion beam energy control device.
The invention solves the technical problems through the following technical scheme:
an ion beam energy control apparatus comprising:
an inlet end into which the ion beam is emitted and an outlet end from which the ion beam is emitted;
a plurality of electrode pairs arranged between the inlet end and the outlet end, wherein each electrode pair comprises a first electrode and a second electrode which are oppositely arranged, the first electrode and the second electrode are rod-shaped, and a space between the first electrode and the second electrode is used for an ion beam to pass through;
at least one of the plurality of electrode pairs forming a first electrode group, a voltage applied to the first electrode group causing the ion beam to deflect in a first direction upon passage of a beam current formed by the first electrode group;
at least one of the plurality of electrode pairs forms a second electrode group to which a voltage is applied to deflect an ion beam in a second direction upon passage of the beam through the second electrode group, the second direction being opposite to the first direction.
Preferably, the ion beam center trajectory of the ion beam is S-shaped when passing through the beam path formed by the electrode pairs.
Preferably, the ion beam energy control device further includes, in order from the entrance end to an electrode pair closest to the entrance end:
an inlet electrode pair comprising two inlet electrodes arranged opposite to each other, the inlet electrodes having the same potential as the inlet ends;
a suppression electrode pair comprising two suppression electrodes disposed opposite each other, the suppression electrodes having a more negative potential than the inlet electrode;
the ion beam energy control device further comprises a pair of electrodes disposed from the exit end to closest to the exit end:
an outlet electrode pair comprising two outlet electrodes disposed opposite each other, the outlet electrodes having a voltage equal to a ground voltage.
Preferably, the ion beam energy control device further comprises:
a first longitudinal end electrode pair including two first longitudinal end electrodes disposed between the first electrode groups and disposed opposite to each other;
a second longitudinal end electrode pair, which is arranged between the second electrode groups and is opposite to the two second longitudinal end electrodes;
the first longitudinal end electrode pair has a potential more positive than a longitudinal connecting line center potential of the first longitudinal end electrode pair;
the second pair of vertical electrodes has a potential more positive than a vertical wiring center potential of the second pair of vertical electrodes.
Preferably, the first electrode and the second electrode are arranged up and down oppositely;
the first direction is upward, and the second direction is downward; or, the first direction is downward, and the second direction is upward.
Preferably, the first electrode group and the second electrode group are:
the applied voltage makes the voltage of the electrode arranged at the upper part lower than the voltage of the electrode arranged at the opposite lower part in the electrode group for deflecting the ion beam upwards;
the applied voltage causes the ion beam to deflect downwards, and the voltage of the electrode arranged at the upper part is higher than that of the electrode arranged at the opposite lower part in the electrode group.
Preferably, the first electrode group and the second electrode group are:
when the electrode group which deflects the ion beam upwards by the applied voltage is arranged in front of the electrode group which deflects the ion beam downwards by the applied voltage along the beam advancing direction, the position of the rear first electrode is not lower than the position of the front first electrode, and the position of the rear second electrode is not lower than the position of the front second electrode;
or, when the electrode group for deflecting the ion beam upward by the applied voltage is arranged behind the electrode group for deflecting the ion beam downward by the applied voltage along the beam advancing direction, the position of the rear first electrode is not higher than the position of the front first electrode, and the position of the rear second electrode is not higher than the position of the front second electrode.
Preferably, the voltages of the first electrode and the second electrode are both non-positive.
Preferably, the heights of the first electrode and the second electrode are larger than the beam height.
Preferably, the minimum value of the heights of the first electrode and the second electrode is between 500 and 600 mm.
Preferably, the ion beam energy control device further comprises: the two ends of the cavity are respectively provided with the inlet end and the outlet end, and the lowest value of the height of the cavity is 700-1000 mm.
Preferably, the vertical cross sections of the first electrode and the second electrode are rectangular or square, and the right angle is provided with a chamfer.
On the basis of conforming to the common knowledge in the field, the above preferred conditions can be arbitrarily combined to obtain the preferred examples of the invention.
The invention has the positive progress effects that:
the ion beam energy control device of the present invention has the following advantages in terms of electrode shape: the electrodes are bar-shaped, the shape is simple, the manufacturing and the processing are convenient, and because the shapes of the electrodes are uniform, the electrodes which are damaged or can not be used can be replaced by other electrodes; the electrode surface area is small, and the probability of beam hit is reduced.
The ion beam energy control device of the present invention has the following advantages in terms of electrode layout: the electrodes are distributed regularly and do not interfere with each other; the gaps between adjacent electrodes are larger, so that the probability of the beam striking the electrodes is reduced; the beam flow channel is relatively spacious and has little restriction on the beam flow channel.
The ion beam energy control device of the invention has the following advantages in the aspect of beam current adjustment; beam with the height of 300mm can be transmitted; the number of the electrodes which can be independently controlled is extremely large, the control is finer, and the beam current requirements of various conditions can be met; the electric field of the cavity wall is not required to be shielded, the edge angle of the beam can be finely adjusted, and meanwhile, the uniformity and the angle uniformity of the vertical beam are ensured.
Drawings
Fig. 1 is a schematic diagram of an ion beam passing through an ion beam energy control device.
Fig. 2 is an internal schematic diagram of an ion beam energy control device according to an embodiment of the present invention.
Fig. 3 is a side view of fig. 2.
Fig. 4 is an internal schematic view of another ion beam energy control device according to another embodiment of the present invention.
Fig. 5 is a beam divergence curve of an ion beam energy control device according to an embodiment of the present invention.
Fig. 6 is a 1D beam current curve of an ion beam energy control device according to an embodiment of the present invention.
Fig. 7 is a 2D beam current curve of an ion beam energy control device according to an embodiment of the present invention.
Detailed Description
The invention is further illustrated by means of the following examples, which are not intended to limit the scope of the invention.
Examples
The present embodiment provides an ion beam energy control apparatus. Fig. 1 schematically illustrates the passage of an ion beam through the ion beam energy control device 100, and the energy of the outgoing ion beam may be the same or different from that of the incoming ion beam. Fig. 2-3 illustrate the internal structure of the ion beam energy control device 100. The beam energy control device includes an inlet end 101 and an outlet end 102. The inlet end 101 is used for injecting the ion beam 200, and the outlet end 102 is used for injecting the ion beam 200.
The ion beam energy control device further comprises a plurality of electrode pairs 103. The number of electrode pairs 103 is arranged between the inlet end 101 and the outlet end 102. Each electrode pair 103 includes a first electrode 1031 and a second electrode 1032, respectively, disposed opposite to each other. The first electrode 1031 and the second electrode 1032 are each rod-shaped. The space between the first electrode 1031 and the second electrode 1032 allows the ion beam 200 to pass therethrough. Wherein the shapes of the first electrode 1031 and the second electrode 1032 may be the same or different. The spaces between the first electrodes 1031 and the second electrodes 1032 of all the electrode pairs 103 are connected to each other to form a beam path from the inlet end 101 to the outlet end 102, that is, the first electrodes 1031 and the second electrodes 1032 are disposed on two sides of the beam path, respectively.
At least one electrode pair 103 of the plurality of electrode pairs 103 forms a first electrode group 131, and a voltage applied to the first electrode group 131 deflects the ion beam 200 in a first direction while passing through a beam path formed by the first electrode group 131. In this embodiment, the electrode pairs 103 forming the first electrode group 131 are preferably the electrode pairs 103 adjacently disposed among the plurality of electrode pairs 103. The voltage applied to the first electrode group 131 indicates that each electrode pair 103 in the first electrode group 131 is applied with a voltage, but it is not limited to the same value of the voltage applied to each electrode pair 103, that is, the voltages applied to each electrode pair 103 in the first electrode group 131 may be independently set, may be the same or different, but it is required to ensure that the ion beam 200 deflects in the first direction while passing through the space between the electrode pairs 103. Since the voltages applied to each electrode pair 103 in the first electrode group 131 can be set independently, and there is a determinable correspondence between the voltage differences of the electrode pairs 103 and the deflection angles, the deflection angles of the ion beam 200 in passing through the space between each electrode pair 103 in the first electrode group 131 can also be set independently, and can be the same or different.
At least one electrode pair 103 of the plurality of electrode pairs 103 forms a second electrode group 132, and a voltage applied to the second electrode group 132 deflects the ion beam 200 in a second direction while passing through a beam path formed by the second electrode group 132. The second direction is opposite to the first direction, wherein the opposite is not necessarily the exact opposite (180 ° apart) of the first and second directions, but may be substantially opposite (e.g., greater than 90 ° apart and less than 180 °). In this embodiment, the electrode pairs 103 forming the second electrode group 132 are preferably the electrode pairs 103 adjacently disposed among the plurality of electrode pairs 103. The voltage applied to the second electrode group 132 indicates that each electrode pair 103 in the second electrode group 132 is applied with a voltage, but it is not limited to the same value of the voltage applied to each electrode pair 103, that is, the voltages applied to each electrode pair 103 in the second electrode group 132 may be independently set, may be the same or different, but it is necessary to ensure that the ion beam 200 deflects in the second direction while passing through the space between the electrode pairs 103. Since the voltages applied to each electrode pair 103 in the second electrode group 132 can be set independently, and there is a determinable correspondence between the voltages and the deflection angles, the deflection angles of the ion beam 200 in passing through the space between each electrode pair 103 in the second electrode group 132 can also be set independently, and can be the same or different.
In this embodiment, the first electrode group 131 may be disposed in front of the second electrode group 132 along the beam advancing direction, and in other embodiments, the first electrode group 131 may be disposed behind the second electrode group 132, and the order of disposing the first electrode group 131 and the second electrode group 132 is not limited in the present invention.
The ion beam 200 has an S-shaped curved beam center trajectory when passing through the beam path formed by the plurality of electrode pairs 103. In this embodiment, no other electrode pair 103 is disposed between the first electrode group 131 and the second electrode group 132. Of course, the present invention is not limited thereto, and in other embodiments, other electrode pairs 103 may be disposed between the first electrode group 131 and the second electrode group 132, but the voltage of the electrode pairs 103 disposed between the first electrode group 131 and the second electrode group 132 preferably does not change the advancing direction or the general advancing direction of the ion beam 200, so as to ensure that the ion beam center track is curved in an S shape as a whole.
The arrangement direction and voltage difference of the first electrode 1031 and the second electrode 1032 are related to the deflection direction of the ion beam 200 when passing through. In the present embodiment, the first electrode 1031 and the second electrode 1032 are disposed vertically opposite to each other, specifically, the first electrode 1031 is disposed at an upper portion and the second electrode 1032 is disposed at a lower portion, but the present invention is not limited thereto, and in other embodiments, the first electrode 1031 may be disposed at a lower portion and the second electrode 1032 may be disposed at an upper portion. The ion beam 200 may deflect upward or downward as it passes through the beam path, specifically, the first direction is upward and the second direction is downward; or, the first direction is downward, and the second direction is upward.
The first electrode group 131 and the second electrode group 132:
the applied voltage causes the ion beam 200 to deflect upward in the electrode group, and the voltage of the electrode arranged at the upper part is lower than the voltage of the electrode arranged at the opposite lower part;
the applied voltage causes the ion beam 200 to deflect downward from the electrode group, and the voltage of the electrode disposed at the upper portion is higher than the voltage of the electrode disposed at the opposite lower portion.
In particular, in the present embodiment, the first electrode group 131 achieves upward deflection of the ion beam 200, and the second electrode group 132 achieves downward deflection of the ion beam 200. In the first electrode group 131, the voltage of the first electrode 1031 should be lower than the voltage of the second electrode 1032; in the second electrode group 132, the voltage of the first electrode 1031 should be higher than the voltage of the second electrode 1032.
Of the first electrode group 131 and the second electrode group 132 in this embodiment, the first electrode group 131, in which the applied voltage deflects the ion beam 200 upward, is disposed behind the second electrode group 132, in which the applied voltage deflects the ion beam 200 downward, in the beam advancing direction, that is, the ion beam 200 deflects upward and then downward while passing through the entire beam path. At this time, the position of the rear first electrode 1031 is not higher than the position of the front first electrode 1031, and the position of the rear second electrode 1032 is not higher than the position of the front second electrode 1032.
Of course, the present invention is not limited thereto, and in other embodiments, as in another ion beam energy control apparatus shown in fig. 4, the first electrode group 131 may implement downward deflection of the ion beam 200, and the second electrode group 132 may implement upward deflection of the ion beam 200. Accordingly, in the first electrode group 131, the voltage of the first electrode 1031 should be higher than the voltage of the second electrode 1032; in the second electrode group 132, the voltage of the first electrode 1031 should be lower than the voltage of the second electrode 1032. Among the first electrode group 131 and the second electrode group 132, an electrode group in which an applied voltage deflects the ion beam 200 upward in a beam advancing direction may be disposed in front of an electrode group in which an applied voltage deflects the ion beam 200 downward, that is, the ion beam 200 is deflected downward and then upward while passing through the entire beam path. At this time, the position of the rear first electrode 1031 is not lower than the position of the front first electrode 1031, and the position of the rear second electrode 1032 is not lower than the position of the front second electrode 1032. Other part of the structure of the ion beam energy control device is the same as that of the present embodiment.
For convenience of processing, the vertical cross sections of the first electrode 1031 and the second electrode 1032 of the present embodiment may be rectangular or square, and have chamfers at right angles. The voltages of the first electrode 1031 and the second electrode 1032 are not positive values.
The first electrode 1031 and the second electrode 1032 each have a height greater than the beam height (the longest beam direction is generally referred to as the height in the industry, and the same direction as the longest beam direction is also referred to as the height for consistency). For a beam having a height of about 300mm, the minimum height of the first electrode 1031 and the second electrode 1032 is 500 to 600 mm.
The ion beam energy control apparatus further includes: a cavity 109, two ends of which form the inlet end 101 and the outlet end 102, respectively. Each of the electrode pairs is disposed in the cavity 109. In order to avoid the influence of the cavity wall potential on the beam current with the height of 300mm or so, the minimum value of the height of the cavity 109 is 700-1000 mm.
In this embodiment, the ion beam energy control apparatus further includes, in order from the entrance end 101 to an electrode pair 103 closest to the entrance end 101: an inlet electrode pair 104 and a suppression electrode pair 105. The inlet electrode pair 104 includes two inlet electrodes 1041 disposed opposite to each other, and the inlet electrodes 1041 have the same potential as the inlet end 101. The inlet electrode pair 104 is connected and transitions as a whole to the upstream one. The suppression electrode pair 105 includes two suppression electrodes 1051 disposed opposite each other, the suppression electrodes 1051 having a more negative potential than the entrance electrodes. In such multi-electrode systems as described in the ion beam energy control devices, there are always some potential-correcting electrodes, which, due to the very small mass, are easily bombarded by electrons in an electric field, which may cause a voltage change or even runaway of a power supply connected to the electrodes. For an isolated multi-electrode system, there is no concern about this problem as long as no electrons are generated inside it. In practice, however, in other parts of the ion beam, a series of effects such as secondary electrons generated by ion beam bombardment due to charge exchange effects, a large number of electrons are continuously generated, and these electrons enter the multi-electrode system to cause problems. The suppression electrode pair 105 is used to prevent the electrons from entering the multi-electrode system, and it is common practice to place electrodes with lower potential than the outside at the junction of the system and the outside, and form a potential barrier for the electrons, thereby blocking the electrons.
The ion beam energy control device further includes an exit electrode pair 106 disposed from the exit end 102 to the electrode pair closest to the exit end 102. The outlet electrode pair 106 includes two outlet electrodes 1061 disposed opposite to each other, and the voltage of the outlet electrodes 1061 is equal to the ground voltage. The ground voltage is equal to the cavity voltage. The outlet electrode pair 106 is connected and transitions as a whole to a downstream one.
In this embodiment, the ion beam energy control device further includes: a first pair of vertical electrodes 107 and a second pair of vertical electrodes 108. The first vertical electrode pair 107 includes two first vertical electrodes (only one of which is shown due to the problem of the angle of illustration, and the other of which is blocked by the first vertical electrode) disposed between the first electrode groups 131 and disposed opposite to each other. The second vertical electrode pair 108 is disposed between the second electrode groups 132 and is disposed with two second vertical electrodes facing each other (only one of the second vertical electrodes is shown due to the problem of the angle of illustration, and the other second vertical electrode is blocked by the second vertical electrode). The first pair of vertical electrodes 107 has a potential more positive than the center potential of the vertical connection of the first pair of vertical electrodes 107. The second pair of vertical electrodes 108 has a potential more positive than a center potential of a vertical line of the second pair of vertical electrodes 108. The first and second pairs of vertical electrodes 107 and 108 may control angles of both sides of the beam.
Simulation was performed to achieve deceleration of a 9 mAP+ ion beam having a height of 300mm from 10keV to 3keV using the ion beam energy control apparatus shown in FIGS. 2-3 of the present embodiment, and the simulation results were as shown in FIGS. 5-7:
as shown in fig. 5, the emission is in the vertical direction at a plane 500mm (the abscissa z represents the vertical length (m), and the ordinate represents the divergence (divergence)): along the vertical direction, the beam gradually converges within 300mm (see beam in rectangular region in the figure), and the beam has almost zero divergence/convergence within 200mm (see beam in elliptical region in the figure). The two ends of the beam are tightly pressed by the first longitudinal end electrode pair and the second longitudinal end electrode pair.
As shown in fig. 6, a 1D beam current curve in the vertical direction at a plane 500mm (the abscissa z represents the vertical length (m), and the ordinate represents the relative intensity (intensity) (a.u.)): within 300mm in height, the beam deflection is 2.5% different, and the curve is sharp and stepped.
As shown in fig. 7, a 2D beam current curve at a plane of 500mm (abscissa z represents a vertical length (cm), and ordinate y represents a horizontal length (cm)): the beam is straight and uniform in the vertical direction.
The simulation results show that the ion beam energy control device of the embodiment can transmit beam current with the height of about 300mm, and the beam current has good convergence and uniformity along the vertical direction and has less energy loss.
While specific embodiments of the invention have been described above, it will be appreciated by those skilled in the art that these are by way of example only, and the scope of the invention is defined by the appended claims. Various changes and modifications to these embodiments may be made by those skilled in the art without departing from the principles and spirit of the invention, but such changes and modifications fall within the scope of the invention.
Claims (11)
1. An ion beam energy control apparatus, comprising:
an inlet end into which the ion beam is emitted and an outlet end from which the ion beam is emitted;
a plurality of electrode pairs arranged between the inlet end and the outlet end, wherein each electrode pair comprises a first electrode and a second electrode which are oppositely arranged, the first electrode and the second electrode are rod-shaped, and a space between the first electrode and the second electrode is used for an ion beam to pass through;
at least one of the plurality of electrode pairs forming a first electrode group, a voltage applied to the first electrode group causing the ion beam to deflect in a first direction upon passage of a beam current formed by the first electrode group;
at least one of the plurality of electrode pairs forming a second electrode group, a voltage applied to the second electrode group causing the ion beam to deflect in a second direction upon passage of the beam through the second electrode group, the second direction being opposite to the first direction;
the vertical sections of the first electrode and the second electrode are rectangular or square, and the right angle is provided with a chamfer.
2. The beam energy control device of claim 1 wherein the beam center trajectory of the ion beam is S-curved when passing through the beam path defined by the plurality of electrode pairs.
3. The ion beam energy control device of claim 1 or 2, further comprising, in order from the entrance end to an electrode pair nearest the entrance end:
an inlet electrode pair comprising two inlet electrodes arranged opposite to each other, the inlet electrodes having the same potential as the inlet ends;
a suppression electrode pair comprising two suppression electrodes disposed opposite each other, the suppression electrodes having a more negative potential than the inlet electrode;
the ion beam energy control device further comprises a pair of electrodes disposed from the exit end to closest to the exit end:
an outlet electrode pair comprising two outlet electrodes disposed opposite each other, the outlet electrodes having a voltage equal to a ground voltage.
4. The ion beam energy control device of claim 3, wherein the ion beam energy control device further comprises:
a first longitudinal end electrode pair including two first longitudinal end electrodes disposed between the first electrode groups and disposed opposite to each other;
a second longitudinal end electrode pair, which is arranged between the second electrode groups and is opposite to the two second longitudinal end electrodes;
the first longitudinal end electrode pair has a potential more positive than a longitudinal connecting line center potential of the first longitudinal end electrode pair;
the second pair of vertical electrodes has a potential more positive than a vertical wiring center potential of the second pair of vertical electrodes.
5. The ion beam energy control device of claim 1, wherein said first electrode and said second electrode are disposed opposite one another;
the first direction is upward, and the second direction is downward; or, the first direction is downward, and the second direction is upward.
6. The ion beam energy control device of claim 5, wherein in the first electrode group and the second electrode group:
the applied voltage makes the voltage of the electrode arranged at the upper part lower than the voltage of the electrode arranged at the opposite lower part in the electrode group for deflecting the ion beam upwards;
the applied voltage causes the ion beam to deflect downwards, and the voltage of the electrode arranged at the upper part is higher than that of the electrode arranged at the opposite lower part in the electrode group.
7. The ion beam energy control device of claim 5, wherein in the first electrode group and the second electrode group:
when the electrode group which deflects the ion beam upwards by the applied voltage is arranged in front of the electrode group which deflects the ion beam downwards by the applied voltage along the beam advancing direction, the position of the rear first electrode is not lower than the position of the front first electrode, and the position of the rear second electrode is not lower than the position of the front second electrode;
or, when the electrode group for deflecting the ion beam upward by the applied voltage is arranged behind the electrode group for deflecting the ion beam downward by the applied voltage along the beam advancing direction, the position of the rear first electrode is not higher than the position of the front first electrode, and the position of the rear second electrode is not higher than the position of the front second electrode.
8. The ion beam energy control device of claim 1, wherein the voltages of the first electrode and the second electrode are both non-positive.
9. The ion beam energy control device of claim 1, wherein the first electrode and the second electrode each have a height greater than a beam height.
10. The ion beam energy control device of claim 9, wherein a minimum value of a height of the first electrode and the second electrode is between 500 and 600 mm.
11. The ion beam energy control device of claim 10, further comprising: the two ends of the cavity are respectively provided with the inlet end and the outlet end, and the lowest value of the height of the cavity is 700-1000 mm.
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| CN106971931A (en) * | 2015-10-14 | 2017-07-21 | 汉辰科技股份有限公司 | System and technique is ion implanted |
| JP2017157403A (en) * | 2016-03-01 | 2017-09-07 | 株式会社東芝 | Electron beam generator |
| TWM546003U (en) * | 2017-04-07 | 2017-07-21 | 有成精密股份有限公司 | Decelerate module |
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