CN111856354B - Magnetic sensor with wide range and high sensitivity, and preparation method and use method thereof - Google Patents
Magnetic sensor with wide range and high sensitivity, and preparation method and use method thereof Download PDFInfo
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- CN111856354B CN111856354B CN201910343967.2A CN201910343967A CN111856354B CN 111856354 B CN111856354 B CN 111856354B CN 201910343967 A CN201910343967 A CN 201910343967A CN 111856354 B CN111856354 B CN 111856354B
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- 238000000034 method Methods 0.000 title claims abstract description 10
- 238000002360 preparation method Methods 0.000 title claims abstract description 9
- 230000035945 sensitivity Effects 0.000 title claims abstract description 9
- 239000000696 magnetic material Substances 0.000 claims abstract description 49
- 239000011159 matrix material Substances 0.000 claims abstract description 28
- 230000000694 effects Effects 0.000 claims abstract description 11
- -1 amorphous wires Substances 0.000 claims abstract description 4
- 239000013013 elastic material Substances 0.000 claims description 21
- 238000012360 testing method Methods 0.000 claims description 12
- 239000000463 material Substances 0.000 claims description 10
- 239000004642 Polyimide Substances 0.000 claims description 7
- 229920001721 polyimide Polymers 0.000 claims description 7
- 229920002379 silicone rubber Polymers 0.000 claims description 7
- 230000005415 magnetization Effects 0.000 claims description 6
- QJVKUMXDEUEQLH-UHFFFAOYSA-N [B].[Fe].[Nd] Chemical compound [B].[Fe].[Nd] QJVKUMXDEUEQLH-UHFFFAOYSA-N 0.000 claims description 5
- 229910001172 neodymium magnet Inorganic materials 0.000 claims description 5
- 239000002131 composite material Substances 0.000 claims description 4
- 239000002245 particle Substances 0.000 claims description 4
- 229910000828 alnico Inorganic materials 0.000 claims description 2
- KPLQYGBQNPPQGA-UHFFFAOYSA-N cobalt samarium Chemical compound [Co].[Sm] KPLQYGBQNPPQGA-UHFFFAOYSA-N 0.000 claims description 2
- 239000007788 liquid Substances 0.000 claims description 2
- 229910000938 samarium–cobalt magnet Inorganic materials 0.000 claims description 2
- 229910000859 α-Fe Inorganic materials 0.000 claims description 2
- 238000001514 detection method Methods 0.000 abstract description 14
- 230000008859 change Effects 0.000 abstract description 5
- 229910001338 liquidmetal Inorganic materials 0.000 description 6
- 239000004945 silicone rubber Substances 0.000 description 5
- 150000001875 compounds Chemical class 0.000 description 4
- PXAWCNYZAWMWIC-UHFFFAOYSA-N [Fe].[Nd] Chemical compound [Fe].[Nd] PXAWCNYZAWMWIC-UHFFFAOYSA-N 0.000 description 3
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 description 2
- 239000004020 conductor Substances 0.000 description 2
- 239000010949 copper Substances 0.000 description 2
- 229910052802 copper Inorganic materials 0.000 description 2
- 238000011161 development Methods 0.000 description 2
- 239000011521 glass Substances 0.000 description 2
- 230000003993 interaction Effects 0.000 description 2
- 229910052751 metal Inorganic materials 0.000 description 2
- 239000002184 metal Substances 0.000 description 2
- 239000007787 solid Substances 0.000 description 2
- 238000007792 addition Methods 0.000 description 1
- 238000013461 design Methods 0.000 description 1
- 230000006872 improvement Effects 0.000 description 1
- 238000005259 measurement Methods 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 229910052759 nickel Inorganic materials 0.000 description 1
- 238000004806 packaging method and process Methods 0.000 description 1
- 230000035699 permeability Effects 0.000 description 1
- 229920001343 polytetrafluoroethylene Polymers 0.000 description 1
- 239000004810 polytetrafluoroethylene Substances 0.000 description 1
- 238000011160 research Methods 0.000 description 1
- 229920006395 saturated elastomer Polymers 0.000 description 1
- 238000003756 stirring Methods 0.000 description 1
- 238000006467 substitution reaction Methods 0.000 description 1
- 239000000725 suspension Substances 0.000 description 1
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
- G01R33/00—Arrangements or instruments for measuring magnetic variables
- G01R33/02—Measuring direction or magnitude of magnetic fields or magnetic flux
- G01R33/06—Measuring direction or magnitude of magnetic fields or magnetic flux using galvano-magnetic devices
- G01R33/09—Magnetoresistive devices
- G01R33/093—Magnetoresistive devices using multilayer structures, e.g. giant magnetoresistance sensors
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
- G01R35/00—Testing or calibrating of apparatus covered by the other groups of this subclass
Abstract
The invention provides a magnetic sensor with wide range and high sensitivity, a preparation method and a use method thereof. The magnetic sensor comprises an elastic matrix, amorphous wires, magnetic materials and electrodes, wherein the amorphous wires and the magnetic materials are respectively arranged on the elastic matrix or embedded into the elastic matrix, the amorphous wires and the electrodes form a conductive loop in a working state, when a magnetic field is smaller, the giant magneto-impedance effect of the amorphous wires is utilized to change impedance, when the magnetic field is larger, the magnetic materials interact with the magnetic field to drive the elastic matrix to deform, so that the amorphous wires generate stress, and the giant magneto-impedance effect of the amorphous wires is utilized to change impedance. The magnetic sensor has a simple structure, can realize high-sensitivity magnetic field detection and wide-range magnetic field detection, and has good application prospect in the technical field of magnetic sensors.
Description
Technical Field
The invention relates to a magnetic field detection technology, in particular to a magnetic sensor with wide range and high sensitivity, and a preparation method and a use method thereof.
Background
The magnetic sensor is an important component in the sensor, and converts magnetic signals or other physical quantities into electric signals or other information output in a required form according to a certain rule. Through the development of the last century, magnetic field sensors have played an increasingly important role in various aspects of human social life, and billions of magnetic sensors are put into use worldwide every year. Along with the improvement of magnetic sensors, various industries put forward higher and higher requirements on the magnetic sensors, especially the detection precision is required to be higher and higher, and meanwhile the application range is required to be wider and wider, so that the application field is further widened, and the requirements of practical application are met. Therefore, having high detection accuracy and wide use range is one of the new development directions of magnetic sensors, and has also received increasing attention from researchers.
Currently, the more common types of magnetic sensors are mainly: hall (Hall) sensors, fluxgate and current-sensing magnetic sensors, magnetoresistive sensors, etc. According to the current state of research, the detection accuracy and the measurement range of the magnetic sensor at room temperature are always the same. Therefore, it is still a challenge to prepare a magnetic field sensor that satisfies both high detection accuracy and enables a wide detection range, and it is one of the directions of efforts to find a new magnetic sensor.
Disclosure of Invention
In view of the above-described state of the art, the present invention aims to provide a magnetic sensor that can achieve both a wide magnetic field detection range and a high magnetic field detection sensitivity.
In order to achieve the technical purpose, the amorphous wire is adopted, the amorphous wire has a giant magneto-impedance effect and a giant stress impedance effect, when a magnetic field is small, the giant magneto-impedance effect of the amorphous wire is utilized to enable the impedance to change greatly, so that magnetic signals can be detected with high sensitivity, when the magnetic field is large, the giant magneto-impedance effect of the amorphous wire is considered to be saturated, and the impedance change is not obvious, so that stress is applied to the amorphous wire by combining interaction of a magnetic material and the magnetic field, and the giant stress impedance effect of the amorphous wire is utilized to enable the impedance to change greatly, so that the magnetic signals can be detected with high sensitivity and wide range.
Namely, the technical scheme provided by the invention is as follows: the magnetic sensor with wide range and high sensitivity includes elastic matrix, amorphous wire, magnetic material and electrode;
the amorphous wires are positioned on the elastic matrix or embedded in the elastic matrix;
the magnetic material is positioned on the elastic matrix or embedded in the elastic matrix;
in the working state, the amorphous wire and the electrode form a conductive loop;
when a magnetic field is applied, the magnetic material interacts with the magnetic field to drive the elastic matrix to deform, so that the amorphous wire generates stress.
The amorphous wire material is not limited, and Co, fe and Ni-based amorphous materials are preferably selected from Co-based amorphous wires with high magnetic permeability.
As one implementation manner, the amorphous wires in the conductive loop have a plurality of sections, and the conductive loop further comprises a conductive connecting piece for connecting the amorphous wires of each section. The conductive connector material is not limited and may be a liquid metal or a solid metal.
The magnetic material is not limited, and comprises magnetic materials such as neodymium-iron-boron, samarium-cobalt, alnico, ferrite permanent magnetic material and the like, and preferably adopts neodymium-iron-boron materials.
The elastic matrix material is not limited and comprises elastic materials such as silicone rubber, polyimide and the like.
As one implementation manner, the magnetic sensor is in an cantilever beam structure and comprises a fixed side and a free side, preferably, the magnetic material and the conductive loop are both located on the free side, further preferably, the magnetic material is located at the end of the free side, most preferably, the magnetic material is located at two sides of the amorphous wire, and the magnetization directions are the same.
As another implementation manner, the magnetic sensor is in a bridge structure, that is, two ends are fixed, and the conductive loop is located between the two ends. Preferably, the magnetic material is located above or below the amorphous wire and is electrically insulated from the amorphous wire.
The invention also provides a method for preparing the magnetic sensor, which specifically comprises the following steps: placing an amorphous wire and a magnetic material in a mold, wherein the amorphous wire and an electrode form a conductive loop; pouring the liquid elastic matrix material into a mould and solidifying.
As an implementation, the magnetic material is a magnetic composite material composed of a magnetic material and an elastic material, wherein the magnetic material particles are dispersed in the elastic material, or the magnetic material is located on the elastic material, or the magnetic material is embedded in the elastic material. The elastic material is not limited and includes silicone rubber, polyimide, and the like.
As one implementation, a number of amorphous wires are placed in a mold and connected with an electrode using a conductive material to form a conductive loop. The conductive material is not limited and includes liquid metal, solid metal, and the like.
The use method of the magnetic sensor comprises the following steps:
(1) Introducing alternating current into a conductive loop of the magnetic sensor;
applying a fixed external magnetic field to the magnetic sensor, testing the impedance output by the magnetic sensor, and changing the magnitude of the external magnetic field to obtain a series of reference impedance values under the fixed external magnetic field;
(2) And (3) maintaining the same test conditions as those in the step (1), testing the actual impedance value by using the magnetic sensor, and comparing the actual impedance value with the reference impedance value obtained in the step (1), wherein an externally applied magnetic field corresponding to the same reference impedance value is the actually measured magnetic field value.
In summary, the invention adopts the amorphous wire, combines the amorphous wire and the magnetic material through the structural design, realizes the detection of the magnetic field by testing the impedance of the sensor by utilizing the giant magneto-impedance effect of the amorphous wire when the external magnetic field is smaller, and simultaneously deforms the elastic matrix by utilizing the interaction of the magnetic material and the magnetic field when the external magnetic field is larger, thereby driving the amorphous wire to generate stress and realizing the detection of the magnetic field by testing the impedance of the sensor by utilizing the giant stress impedance effect of the amorphous wire. Compared with the prior art, the magnetic sensor has a simple structure, can realize high-sensitivity magnetic field detection, and can realize wide-range magnetic field detection in the technical field of the magnetic sensor because the detectable external magnetic field ranges from nano Tesla (nT) to Tesla (T) orders.
Drawings
Fig. 1 is a schematic structural view of a magnetic sensor in embodiment 1 of the present invention.
Fig. 2 is a schematic structural view of a magnetic sensor in embodiment 2 of the present invention.
Detailed Description
The present invention will be described in further detail with reference to the following examples and drawings, and it should be noted that the following examples are intended to facilitate the understanding of the present invention and are not to be construed as limiting in any way.
The reference numerals in fig. 1 are: amorphous wire 1, magnetic material 2, connector 3, electrode 4, fixed side 5, elastic matrix 6, free side 7.
The reference numerals in fig. 2 are: amorphous wire 1, magnetic material 2, connector 3, electrode 4, fixed side 5, elastic matrix 6.
Example 1:
in this embodiment, the structure of the magnetic sensor is shown in fig. 1. The magnetic sensor is in an cantilever beam type structure and consists of a fixed side 5 and a free side 7.
The free side 7 comprises an elastic matrix 6, two segments of amorphous wire 1, two pieces of magnetic material 2 and an electrode 4.
Two amorphous wires 1 are embedded in an elastic matrix 6. The two sections of amorphous wires 1 are connected in a conductive way by adopting a connecting piece 3, and the connected amorphous wires and the electrodes form a conductive loop.
Two pieces of magnetic material 2 are embedded in the elastic matrix 6, both at the ends of the free side 7 and on both sides of the amorphous wire 1 respectively with the same magnetization direction.
The amorphous wire 1 is a Co-based amorphous material. The magnetic material 2 is a magnetized neodymium iron boron-elastic material compound. The connecting piece 3 is liquid metal. The electrode 4 is liquid metal or copper sheet. The elastic base 6 is made of an elastic material such as silicone rubber or polyimide.
The preparation method of the magnetic sensor comprises the following steps:
(1) Preparation of magnetized NdFeB-elastic Material composite
Pouring neodymium-iron-boron particles into elastic material solution such as silicon rubber or polyimide, wherein the mass ratio of the elastic material to the neodymium-iron-boron particles is 1:0.5 to 1:2, using ultrasonic stirring, taking suspension to spin-coat or drip onto a glass plate, solidifying, cutting into blocks, and vertically magnetizing to obtain the magnetized NdFeB-elastic material compound.
(2) Preparation of magnetic sensor
And fixing a plurality of amorphous wires in a mold of glass, polytetrafluoroethylene and the like. Connecting the amorphous wire with the electrode by using a connecting piece material to form a conductive loop, and placing magnetized NdFeB-elastic material composites on the left side and the right side of the amorphous wire, wherein the magnetization directions are leftwards or rightwards. And pouring elastic materials such as silicone rubber or polyimide into a mold, packaging and curing.
The use method of the magnetic sensor is as follows:
(1) Applying an alternating current of 100k-10MHz to the conductive loop of the magnetic sensor; and applying a fixed external magnetic field to the magnetic sensor, testing the impedance of the output of the magnetic sensor, and changing the magnitude of the external magnetic field to obtain impedance characteristic curves under different external magnetic fields.
(2) In practical application, the impedance value of the magnetic sensor is tested while maintaining the same test condition in the step (1), the obtained impedance value is compared with the impedance characteristic curve obtained in the step (1), and the external magnetic field corresponding to the same reference impedance value is the actually measured magnetic field value.
Example 2:
in this embodiment, the structure of the magnetic sensor is shown in fig. 2. The magnetic sensor is in a bridge structure, i.e., fixed on both sides.
The magnetic sensor comprises an elastic matrix 6, a plurality of amorphous wires 1, two pieces of magnetic materials 2 and an electrode 4.
The amorphous wires 1 are embedded in an elastic matrix 6. The amorphous wires 1 are connected in a conductive way by adopting a connecting piece 3, and the connected amorphous wires and the electrodes form a conductive loop. The amorphous wire 1 is located between two fixed sides 5.
Two pieces of magnetic material 2 are embedded in the elastic base 6 at the upper side or the lower side of the amorphous wire 1, and the magnetization directions of the two pieces of magnetic material are upward and downward, respectively.
The amorphous wire 1 is a Co-based amorphous material. The magnetic material 2 is a magnetized neodymium iron boron-elastic material compound. The connecting piece 3 is liquid metal. The electrode 4 is liquid metal or copper sheet. The elastic base 6 is made of an elastic material such as silicone rubber or polyimide.
The preparation method of the magnetic sensor is substantially the same as that in example 1, except that: in the step (2), a neodymium iron boron-elastic material compound is placed on the upper side or the lower side of the amorphous wire, and the magnetization directions are respectively upward and downward.
The use method of the magnetic sensor is as follows:
(1) Applying an alternating current of 100k-10MHz to the conductive loop of the magnetic sensor; and applying a fixed external magnetic field to the magnetic sensor, testing the impedance of the output of the magnetic sensor, and changing the magnitude of the external magnetic field to obtain impedance characteristic curves under different external magnetic fields.
(2) In practical application, the impedance value of the magnetic sensor is tested while maintaining the same test condition in the step (1), the obtained impedance value is compared with the impedance characteristic curve obtained in the step (1), and the external magnetic field corresponding to the same reference impedance value is the actually measured magnetic field value.
While the foregoing embodiments have been described in detail in connection with the embodiments of the invention, it should be understood that the foregoing embodiments are merely illustrative of the invention and are not intended to limit the invention, and any modifications, additions, substitutions and the like made within the principles of the invention are intended to be included within the scope of the invention.
Claims (12)
1. A magnetic sensor with wide range and high sensitivity, characterized in that: the magnetic sensor comprises an elastic matrix, amorphous wires, magnetic materials and electrodes;
the amorphous wires are positioned on the elastic matrix or embedded in the elastic matrix;
the magnetic material is positioned on the elastic matrix or embedded in the elastic matrix;
in the working state, the amorphous wire and the electrode form a conductive loop;
the preparation method of the magnetic sensor comprises the following steps: placing an amorphous wire and a magnetic material in a mold, wherein the amorphous wire and an electrode form a conductive loop; pouring a liquid elastic matrix material into a mould, and solidifying;
when a magnetic field is applied, detecting the magnetic field by utilizing the giant magneto-impedance effect of the amorphous wire when the magnetic field is smaller; when the magnetic field is larger, the magnetic material interacts with the magnetic field to drive the elastic matrix to deform, so that the amorphous wire generates stress, and the magnetic field is detected by utilizing the giant stress impedance effect of the amorphous wire.
2. A magnetic sensor as in claim 1, wherein: the amorphous wire is a Co-based amorphous material, an Fe-based amorphous material, or a Ni-based amorphous material.
3. A magnetic sensor as in claim 1, wherein: the amorphous wires are provided with a plurality of sections, and the sections of amorphous wires are connected through conductive connecting pieces.
4. A magnetic sensor as in claim 1, wherein: the magnetic material comprises neodymium-iron-boron-based magnetic material, samarium-cobalt-based magnetic material, alnico-based magnetic material and ferrite permanent magnetic material.
5. A magnetic sensor as in claim 1, wherein: the elastic matrix material comprises silicon rubber and polyimide.
6. A magnetic sensor as in claim 1, wherein: the magnetic sensor is of an cantilever beam type structure and comprises a fixed side and a free side, and the magnetic material and the conductive loop are both located on the free side.
7. A magnetic sensor as in claim 6, wherein: the magnetic material is located at the end of the free side.
8. A magnetic sensor as in claim 1, wherein: the magnetic materials are positioned on two sides of the amorphous wire, and the magnetization directions are the same.
9. A magnetic sensor as in claim 1, wherein: the magnetic sensor is in a bridge type structure, namely two ends are fixed, and the conductive loop is positioned between the two ends.
10. A magnetic sensor as in claim 9, wherein: the magnetic material is located above or below the amorphous wire and is electrically insulated from the amorphous wire.
11. A magnetic sensor as in claim 1, wherein: the magnetic material is a magnetic composite material formed by magnetic material and elastic material, wherein the magnetic material particles are dispersed in the elastic material, or the magnetic material is positioned on the elastic material, or the magnetic material is embedded in the elastic material.
12. A method of using a magnetic sensor as claimed in any one of claims 1 to 11, wherein: the method comprises the following steps:
(1) Introducing alternating current into a conductive loop of the magnetic sensor;
applying a fixed external magnetic field to the magnetic sensor, testing the impedance output by the magnetic sensor, and changing the magnitude of the external magnetic field to obtain a series of reference impedance values under a certain fixed external magnetic field;
(2) And (3) maintaining the same test conditions as those in the step (1), testing the actual impedance value by using the magnetic sensor, and comparing the actual impedance value with the reference impedance value obtained in the step (1), wherein an externally applied magnetic field corresponding to the same reference impedance value is the actually measured magnetic field value.
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| CN113834952B (en) * | 2021-09-23 | 2024-04-12 | 中国人民解放军国防科技大学 | Device and method for realizing object acceleration measurement based on amorphous wire GSI effect |
| CN115856725B (en) * | 2022-11-25 | 2023-12-12 | 南方电网数字电网研究院有限公司 | magnetic sensor |
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