CN111850479A - Vacuum evaporation coating equipment - Google Patents
Vacuum evaporation coating equipment Download PDFInfo
- Publication number
- CN111850479A CN111850479A CN202010835265.9A CN202010835265A CN111850479A CN 111850479 A CN111850479 A CN 111850479A CN 202010835265 A CN202010835265 A CN 202010835265A CN 111850479 A CN111850479 A CN 111850479A
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- Prior art keywords
- feeder
- coating
- seat
- vacuum
- feeding
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- 238000000576 coating method Methods 0.000 title claims abstract description 68
- 239000011248 coating agent Substances 0.000 title claims abstract description 65
- 238000007738 vacuum evaporation Methods 0.000 title claims abstract description 29
- 239000000463 material Substances 0.000 claims abstract description 77
- 238000001771 vacuum deposition Methods 0.000 claims abstract description 33
- 238000001704 evaporation Methods 0.000 claims description 31
- 230000008020 evaporation Effects 0.000 claims description 30
- 238000007789 sealing Methods 0.000 claims description 19
- 238000010438 heat treatment Methods 0.000 claims description 12
- 238000009434 installation Methods 0.000 claims 1
- 238000000034 method Methods 0.000 abstract description 10
- 239000007888 film coating Substances 0.000 abstract description 5
- 238000009501 film coating Methods 0.000 abstract description 5
- 239000010408 film Substances 0.000 description 18
- 238000005516 engineering process Methods 0.000 description 4
- 238000007599 discharging Methods 0.000 description 3
- 238000012986 modification Methods 0.000 description 3
- 230000004048 modification Effects 0.000 description 3
- 239000002245 particle Substances 0.000 description 3
- 238000004891 communication Methods 0.000 description 2
- 238000007747 plating Methods 0.000 description 2
- 238000000151 deposition Methods 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 238000005566 electron beam evaporation Methods 0.000 description 1
- 238000012840 feeding operation Methods 0.000 description 1
- 230000000149 penetrating effect Effects 0.000 description 1
- 238000005086 pumping Methods 0.000 description 1
- 239000010409 thin film Substances 0.000 description 1
- 238000009834 vaporization Methods 0.000 description 1
- 230000008016 vaporization Effects 0.000 description 1
- 238000003466 welding Methods 0.000 description 1
Images
Classifications
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
- C23C14/24—Vacuum evaporation
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
- C23C14/56—Apparatus specially adapted for continuous coating; Arrangements for maintaining the vacuum, e.g. vacuum locks
Landscapes
- Chemical & Material Sciences (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Engineering & Computer Science (AREA)
- Materials Engineering (AREA)
- Mechanical Engineering (AREA)
- Metallurgy (AREA)
- Organic Chemistry (AREA)
- Physical Vapour Deposition (AREA)
Abstract
The invention provides vacuum evaporation coating equipment, wherein a coating material supply mechanism comprises a feeder (41) and a feed base (31), the feed base (31) is fixed on the wall part of a vacuum coating chamber (1), the feeder (41) is arranged in the feed base (31) and is suitable for moving relative to the feed base (31), so that a discharge hole (44) of the feeder (41) is exposed out of the feed base (31) in a feeding state, and the discharge hole (44) of the feeder (41) is blocked by the feed base (31) in a coating working state. The whole feeding process only needs the feeder to move relative to the feeding seat, the feeding mechanism is simple, the feeding step is simple and convenient, and the efficiency of the film material feeding and the whole film coating process is improved.
Description
Technical Field
The invention belongs to the technical field of coating, and particularly relates to vacuum evaporation coating equipment.
Background
Vacuum evaporation coating is a film deposition method which is the earliest in development time and the widest in application field in the vacuum coating technology, and the development of the technology is more complete in recent years along with the application of a long-life resistance evaporation source, an electron beam evaporation source, a laser beam evaporation source and the like in the vacuum evaporation coating technology, and the vacuum evaporation coating still plays a very important role in the vacuum coating technology at present.
The vacuum evaporation coating equipment mainly comprises a workpiece rack, an evaporation source and a heating source in a vacuum coating chamber, wherein the workpiece rack is used for mounting a workpiece to be coated, the evaporation source is used for containing a coating material, the heating source heats the evaporation source to promote coating material particles in the evaporation source to escape and migrate in a gas phase, and finally the coating material particles reach the surface of the workpiece to be condensed to form a film. In the coating process, when the coating material in the evaporation source consumes completely, or when needs are at the different material films of same work piece surface coating by vaporization, all can face for the evaporation source supplies the coating material, among the current vacuum evaporation coating equipment, supply the coating material and need open the hatch door of vacuum coating room and go on, after waiting to supply the coating material and finish closing the hatch door, vacuum-pumping again to the vacuum coating room, the whole set of step of supplying the coating material is loaded down with trivial details, consumes man-hour, has reduced whole coating process efficiency.
Disclosure of Invention
Therefore, the present invention is directed to overcome the disadvantages of the prior art and to provide a vacuum evaporation coating apparatus capable of improving the efficiency of film material supply.
The invention aims to realize the technical proposal that the vacuum evaporation coating equipment comprises a vacuum coating chamber, a workpiece frame, an evaporation source, a heating source and a coating material supply mechanism, the workpiece rack, the evaporation source, the heating source and the feeding mechanism are arranged in the vacuum coating chamber, the workpiece rack is used for installing workpieces to be coated, the evaporation source is used for containing film materials, the heating source is used for heating the evaporation source so as to evaporate the film materials in the evaporation source, the film material supply mechanism comprises a feeder and a supply seat, the supply seat is fixed on the wall part of the vacuum coating chamber, the feeder is arranged in the supply seat and is suitable for moving relative to the supply seat, so that the discharge hole of the feeder is exposed out of the feeding seat in the feeding state, and the discharge hole of the feeder is blocked by the feeding seat in the coating working state.
The invention fixes the material-supplying base on the wall of the vacuum film-plating chamber, the material-supplying device is arranged in the material-supplying base in a relatively movable way, when the material needs to be supplied, the material-supplying device is driven to move relative to the material-supplying base to expose the discharging hole of the material-supplying device, thereby realizing the film material supply to the evaporation source; after the feeding is finished, the feeder is driven to move, so that the discharge hole of the feeder is blocked by the feeding seat again. The whole feeding process only needs the feeder to move relative to the feeding seat, the feeding mechanism is simple, the feeding step is simple and convenient, and the efficiency of the film material feeding and the whole film coating process is improved.
Further, according to the vacuum evaporation coating equipment, the feeder and/or the feeding seat are/is provided with a first sealing structure, so that a first seal is formed between the feeder and the feeding seat in the coating working state.
Further, in the vacuum evaporation coating apparatus of the present invention, a second sealing structure is disposed between the material supply seat and the wall portion, so as to be adapted to form a second seal between the material supply seat and the wall portion.
Further, in the vacuum evaporation coating apparatus of the present invention, the material supply seat is in a sleeve shape, and the material feeder is in a rod shape, is inserted into the sleeve-shaped material supply seat, and is adapted to move linearly relative to the material supply seat, so that the material outlet of the material feeder extends out of the material supply seat in the material supply state, and the material outlet of the material feeder retracts into the material supply seat in the coating operation state.
Further, according to the vacuum evaporation coating equipment, the front end of the rod-shaped feeder is provided with the end cap, the rear side of the end cap is opposite to the front end of the sleeve of the feeding seat, and the rear side of the end cap and/or the front end of the sleeve are/is provided with the first sealing ring so as to form first sealing between the feeder and the feeding seat in the coating working state.
Further, according to the vacuum evaporation coating equipment, the rear part of the sleeve-shaped material supply seat is provided with a flange, the front side of the flange is opposite to the wall part of the vacuum coating chamber, and the front side of the flange and/or the wall part of the vacuum coating chamber are/is provided with a second sealing ring so as to be suitable for forming second sealing between the material supply seat and the wall part.
Further, the feeder of the vacuum evaporation coating equipment of the invention further comprises a feed inlet and a channel for communicating the feed inlet with the discharge outlet, so that the feeder is suitable for supplying a coating material to the discharge outlet through the feed inlet.
Further, the vacuum evaporation coating equipment of the invention, the coating material supply mechanism further comprises a linear actuator, the linear actuator is fixed outside the vacuum coating chamber through a support, and the feeder is pushed by a power rod of the linear actuator to move linearly in the feeding seat.
Through the technical scheme, the invention can realize the following effects:
the whole feeding process only needs the feeder to move relative to the feeding seat, the feeding mechanism is simple, the feeding step is simple and convenient, and the efficiency of the film material feeding and the whole film coating process is improved.
Drawings
FIG. 1 is a schematic view showing a feeding state of a vacuum evaporation coating apparatus according to the present invention;
FIG. 2 is a schematic view showing the working state of the vacuum evaporation coating apparatus of the present invention.
The reference numbers in the figures denote:
1-vacuum coating chamber, 2-evaporation source, 31-feeding seat, 32-support, 33-flange plate, 41-feeder, 42-linear actuator, 43-feeding inlet, 44-discharging outlet, 45-end cap, 46-channel, 51-first sealing ring and 52-second sealing ring.
Detailed Description
The principles and spirit of the present invention will be described with reference to a number of exemplary embodiments. It is understood that these embodiments are given solely for the purpose of enabling those skilled in the art to better understand and to practice the invention, and are not intended to limit the scope of the invention in any way.
As shown in fig. 1 and 2, the vacuum evaporation coating apparatus of the present invention includes a vacuum coating chamber 1, a work rest 2, an evaporation source 2, a heating source, and a coating material supply mechanism (wherein the work rest and the heating source are not shown in the figures), the evaporation source 2 may be, for example, a crucible, the work rest is used for mounting a work to be coated, the evaporation source 2 contains a coating material, the heating source heats the evaporation source 2, and causes coating material particles in the evaporation source 2 to escape, migrate in a gas phase, and finally reach the surface of the work to be condensed to form a thin film. In the coating process, when the coating material in the evaporation source 2 is used up, or when films of different materials need to be deposited on the surface of the same workpiece, the coating material is supplied to the evaporation source.
The film material supply mechanism comprises a feeder 41 and a feed base 31, wherein the feed base 31 is fixed on the wall part of the vacuum coating chamber 1, the feeder 41 is arranged in the feed base 31 and is suitable for moving relative to the feed base 31, so that a discharge port 44 of the feeder 41 is exposed out of the feed base 31 in a feeding state, and the discharge port 44 of the feeder 41 is blocked by the feed base 31 in a coating working state. Through the film material supply mechanism, only the feeder 41 needs to move relative to the material supply seat 31 in the whole material supply process, the material supply mechanism is simple, the material supply step is simple and convenient, and the film material supply and whole film coating process efficiency is improved.
In one embodiment of the present invention, the feeder 41 is linearly movable relative to the feeder 31, so as to achieve two states, i.e., the discharge hole 44 is exposed from the feeding seat 31 or blocked by the feeding seat 31. In another embodiment, the feeder 41 can also rotate relative to the feeder 31, and the feeder 31 can have an opening, when the feeder 41 rotates a certain angle, the supply outlet 44 can expose the supply seat 31 through the opening, and when the feeder 41 rotates another angle, the supply outlet 44 is blocked by the supply seat 31 again.
As shown in fig. 1 and 2, in one embodiment, the material supply base 31 is in a sleeve shape and is inserted into an opening of a wall of the vacuum coating chamber 1, a main portion of the sleeve extends into the vacuum coating chamber 1 through the opening of the wall, a flange 33 is provided at a rear portion of the material supply base 31, the flange 33 abuts against an outer side of the wall of the vacuum coating chamber 1, and the flange 33 is fixed to the wall of the vacuum coating chamber 1 by bolts or welding, so that the material supply base 31 is fixed to the wall of the vacuum coating chamber 1. An annular groove is formed on the surface of the flange plate 33, which is abutted against the wall part, a second sealing ring 52 is arranged in the annular groove, and a second seal is formed between the flange plate 33 and the wall part of the vacuum coating chamber 1 through the second sealing ring 52.
The feeder 41 is rod-shaped and is arranged in the sleeve-shaped feeding seat 31 in a penetrating manner, the rod-shaped hollow part is formed into a channel 46, the front part of the feeder 41 is provided with a discharge hole 44, the rear part of the feeder 41 is provided with a feed hole 43, and two ends of the channel 46 are respectively communicated with the discharge hole 44 and the feed hole 43, so that the film material is conveyed to the discharge hole 44 through the feed hole 43. The front end of the feeder 41 is provided with an end cap 45, the rear side of the end cap 45 is opposite to the front end of the sleeve of the feeding seat 31, the rear side of the end cap 45 is provided with an annular groove, a first sealing ring 51 is arranged in the annular groove, and a first seal is formed between the feeder 41 and the feeding seat 31 through the first sealing ring 51.
The rod-like feeder 41 is inserted into the sleeve-like feeder base 31 and is linearly movable relative to the feeder base 31. The bracket 32 is further disposed outside the vacuum coating chamber 1, the bracket 32 is fixed to a wall portion of the vacuum coating chamber 1, and the linear actuator 42 is disposed on the bracket 32, where the linear actuator 42 in this embodiment is an air cylinder or a hydraulic cylinder, and it can be understood by those skilled in the art that the linear actuator can be a linear motor or a rack-and-pinion driving mechanism as long as the output power is linear. The power rod end of the linear actuator 42 is connected to the rod end of the feeder 41, pushing the feeder 41 out of the feeder seat 31 or pulling the feeder 41 back into the feeder seat 31.
When it is necessary to supply a film material into the evaporation source 2, as shown in fig. 1, the linear actuator 42 pushes the feeder 41 to move forward linearly relative to the material supply base 31, so that the end cap 45 is away from the sleeve end of the material supply base 31, the material outlet 44 exposes the sleeve, the material outlet 44 can move directly above the evaporation source 2 to realize material supply, and the evaporation source 2 can also move below the material outlet 44 to realize material supply. In the feeding state, the vacuum coating chamber 1 has air flow channels inside and outside, and air flows through a gap between the rod of the feeder 41 and the sleeve of the feeding base 31. When the operation of supplying the coating material into the evaporation source 2 to prepare for coating is completed, as shown in fig. 2, the linear actuator 42 pulls the feeder 41 to move linearly backward relative to the material supply base 31, so that the discharge hole 44 retracts into the sleeve of the material supply base 31, and the first sealing ring 51 of the end cap 45 abuts against the sleeve end of the material supply base 31 to form a first seal, at this time, the discharge hole 44 is blocked by the sleeve, an air communication channel between the rod part of the feeder 41 and the sleeve part of the material supply base 31 is blocked by the first seal, and an air communication channel between the feeder 31 and the wall part of the vacuum coating chamber 1 is blocked by the second seal. And in the working state of coating, the vacuum coating chamber 1 is vacuumized and subjected to vacuum coating.
The invention fixes the material-supplying base 31 on the wall of the vacuum film-plating chamber 1, and sets the feeder 41 in the material-supplying base 31 in a relatively movable way, when the material needs to be supplied, the feeder 41 is driven to move relative to the material-supplying base 31 to expose the discharging port 44 of the feeder 41, thereby realizing the film material supply to the evaporation source 2; after the feeding operation is completed, the feeder 41 is driven to move so that the discharge port 44 of the feeder 41 is blocked by the feeding base 31 again. The whole feeding process only needs the feeder 4131 to move relative to the feeding seat 31, the feeding mechanism is simple, the feeding step is simple and convenient, and the efficiency of film material feeding and the whole film coating process is improved.
The above description is only for the purpose of illustrating the preferred embodiments of the present invention and is not to be construed as limiting the invention, and any modifications, equivalents and improvements made within the spirit and principle of the present invention are intended to be included within the scope of the present invention. The above description is only a preferred embodiment of the present invention, and it should be noted that, for those skilled in the art, several modifications and variations can be made without departing from the technical principle of the present invention, and these modifications and variations should also be regarded as the protection scope of the present invention.
Claims (8)
1. The utility model provides a vacuum evaporation coating equipment, includes vacuum coating room (1), work rest, evaporation source (2), heating source and coating material supply mechanism set up in vacuum coating room (1), the work rest is used for the installation to treat the coating film work piece, evaporation source (2) are used for holding the coating material, thereby the heating source is used for right evaporation source (2) heating makes in evaporation source (2) the coating material evaporates, its characterized in that: the film material supply mechanism comprises a feeder (41) and a supply seat (31), the supply seat (31) is fixed on the wall portion of the vacuum coating chamber (1), the feeder (41) is arranged in the supply seat (31) and is suitable for moving relative to the supply seat (31), so that a discharge hole (44) of the feeder (41) is exposed out of the supply seat (31) in a supply state, and the discharge hole (44) of the feeder (41) is blocked by the supply seat (31) in a coating working state.
2. The vacuum evaporation coating apparatus according to claim 1, wherein: the feeder (41) and/or the feeding seat (31) are/is provided with a first sealing structure which is suitable for forming a first seal between the feeder (41) and the feeding seat (31) in the coating working state.
3. The vacuum evaporation coating apparatus according to claim 1, wherein: a second sealing structure is arranged between the feeding seat (31) and the wall part, so that a second seal is formed between the feeding seat (31) and the wall part.
4. The vacuum evaporation coating apparatus according to any one of claims 1 to 3, wherein: the feeding seat (31) is sleeve-shaped, the feeder (41) is rod-shaped and penetrates through the sleeve-shaped feeding seat (31) and is suitable for linear movement relative to the feeding seat (31), so that the discharge hole (44) of the feeder (41) extends out of the feeding seat (31) in the feeding state, and the discharge hole (44) of the feeder (41) retracts into the feeding seat (31) in the coating working state.
5. The vacuum evaporation coating apparatus according to claim 4, wherein: the front end of the rod-shaped feeder (41) is provided with an end cap (45), the rear side of the end cap (45) is opposite to the front end of the sleeve of the feeding seat (31), and the rear side of the end cap (45) and/or the front end of the sleeve are/is provided with a first sealing ring so as to form first sealing between the feeder (41) and the feeding seat (31) in the coating working state.
6. The vacuum evaporation coating apparatus according to claim 4, wherein: the rear part of the sleeve-shaped feeding seat (41) is provided with a flange (33), the front side of the flange (33) is opposite to the wall part of the vacuum coating chamber (1), and the front side of the flange (33) and/or the wall part of the vacuum coating chamber (1) is/are provided with a second sealing ring so as to be suitable for forming second sealing between the feeding seat (31) and the wall part.
7. The vacuum evaporation coating apparatus according to claim 4, wherein: the feeder (41) further comprises a feed port (43) and a channel (46) communicating the feed port (43) with the discharge port (44) so as to be suitable for supplying the discharge port (44) with film materials through the feed port (43).
8. The vacuum evaporation coating apparatus according to claim 4, wherein: the film material supply mechanism further comprises a linear actuator (42), the linear actuator (42) is fixed on the outer side of the vacuum coating chamber (1) through a support (32), and a power rod of the linear actuator (42) pushes the feeder (41) to move linearly in the material supply seat (31).
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202010835265.9A CN111850479B (en) | 2020-08-19 | 2020-08-19 | Vacuum evaporation coating equipment |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202010835265.9A CN111850479B (en) | 2020-08-19 | 2020-08-19 | Vacuum evaporation coating equipment |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN111850479A true CN111850479A (en) | 2020-10-30 |
| CN111850479B CN111850479B (en) | 2024-06-25 |
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Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN202010835265.9A Active CN111850479B (en) | 2020-08-19 | 2020-08-19 | Vacuum evaporation coating equipment |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN111850479B (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN115595550A (en) * | 2022-10-24 | 2023-01-13 | 广东振华科技股份有限公司（Cn） | Automatic material changing and continuous evaporation coating device and method for AF particle coating material |
Citations (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2000290770A (en) * | 1999-04-05 | 2000-10-17 | Sanyo Shinku Kogyo Kk | Method for feeding vapor depositing material and evaporating source |
| CN104131262A (en) * | 2014-07-21 | 2014-11-05 | 深圳市东丽华科技有限公司 | Production method and production equipment of coating material for vacuum coating |
| CN107663626A (en) * | 2017-10-20 | 2018-02-06 | 爱发科豪威光电薄膜科技(深圳)有限公司 | Evaporation source and sputtering coating equipment |
| CN207958483U (en) * | 2018-01-03 | 2018-10-12 | 爱发科豪威光电薄膜科技(深圳)有限公司 | Evaporation source and sputtering coating equipment |
| CN212293733U (en) * | 2020-08-19 | 2021-01-05 | 布勒莱宝光学设备（北京）有限公司 | Vacuum evaporation coating equipment |
-
2020
- 2020-08-19 CN CN202010835265.9A patent/CN111850479B/en active Active
Patent Citations (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2000290770A (en) * | 1999-04-05 | 2000-10-17 | Sanyo Shinku Kogyo Kk | Method for feeding vapor depositing material and evaporating source |
| CN104131262A (en) * | 2014-07-21 | 2014-11-05 | 深圳市东丽华科技有限公司 | Production method and production equipment of coating material for vacuum coating |
| CN107663626A (en) * | 2017-10-20 | 2018-02-06 | 爱发科豪威光电薄膜科技(深圳)有限公司 | Evaporation source and sputtering coating equipment |
| CN207958483U (en) * | 2018-01-03 | 2018-10-12 | 爱发科豪威光电薄膜科技(深圳)有限公司 | Evaporation source and sputtering coating equipment |
| CN212293733U (en) * | 2020-08-19 | 2021-01-05 | 布勒莱宝光学设备（北京）有限公司 | Vacuum evaporation coating equipment |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN115595550A (en) * | 2022-10-24 | 2023-01-13 | 广东振华科技股份有限公司（Cn） | Automatic material changing and continuous evaporation coating device and method for AF particle coating material |
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| Publication number | Publication date |
|---|---|
| CN111850479B (en) | 2024-06-25 |
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