CN212375368U - Core structure of coating machine - Google Patents

Abstract

The utility model belongs to the technical field of the vacuum coating equipment technique and specifically relates to indicate a core structure of coating machine, it includes vacuum vessel, mechanism and magnetism return bend mechanism take place for the ion, mechanism is installed in the vacuum inner chamber and is used for producing the ion takes place for the ion, magnetism return bend mechanism includes the base, the vacuum return bend spare, solenoid, fixed subassembly of target liquid cooling and striking subassembly, solenoid is around the outer wall of locating the vacuum return bend spare, the ion bombardment target that the mechanism produced takes place for the ion, produce electrified sputter atom, the removal orbit of electrified sputter atom sets up or parallel arrangement with the central axis coincidence of vacuum return bend spare, electrified sputter atom passes through vacuum return bend spare and gets into the vacuum inner chamber. The structure can utilize gas to automatically generate ions, charged sputtering atoms can sputter the surface of a workpiece of a vacuum inner cavity along a curved path, a coating is formed by deposition, rapid cooling can be realized for the target material liquid cooling fixing component, and the cooling effect is good.

Description

Core structure of coating machine

Technical Field

The utility model relates to a vacuum coating equipment technical field especially indicates a core structure of coating machine.

Background

The vacuum coating technology is widely applied to real production life as a technology for generating a specific film layer. Vacuum coating techniques come in three forms, namely evaporation coating, sputter coating and ion plating. Magnetron sputtering can be considered as one of the most prominent achievements in coating technology. "sputtering" refers to the phenomenon in which energetic particles bombard a solid surface (target) causing solid atoms or molecules to be ejected from the surface. The ejected particles are mostly in an atomic state, and are often referred to as sputtered atoms. The sputtered particles used to bombard the target can be electrons, ions or neutral particles, and because ions are readily accelerated under an electric field to achieve the required kinetic energy, ions are mostly used as the bombarding particles.

In the prior art, the sputtering path of charged sputtering atoms is difficult to control in the sputtering process, sputtering can be generally realized only along a straight path, the sputtering precision is low, and the coating effect of a workpiece is poor; in addition, in the process of bombarding the target material by positive ions, internal parts in contact with the target material are in an ultrahigh-temperature state and are easily burnt, so that the whole sputtering process fails, the coating of the workpiece fails, and the requirement of modern production cannot be met.

Disclosure of Invention

The to-be-solved technical problem of the utility model is to provide a core structure of coating machine can utilize gaseous automatic production ion, and electrified sputtering atom can follow the surface of crooked route sputtering to the work piece of vacuum inner chamber, and the deposit forms cladding material, and the precision of sputtering is high, can also realize rapid cooling to the fixed subassembly of target liquid cooling, and the cooling effect is good.

In order to solve the technical problem, the utility model discloses a following technical scheme:

a core structure of a coating machine comprises a vacuum container, an ion generating mechanism and a magnetic pipe bending mechanism, wherein the vacuum container is provided with a vacuum inner cavity, and the ion generating mechanism is arranged in the vacuum inner cavity and used for generating ions; the magnetic pipe bending mechanism comprises a base, a vacuum pipe bending piece, an electromagnetic coil, a target material liquid cooling fixing assembly and an arc striking assembly, wherein the target material liquid cooling fixing assembly and the arc striking assembly are installed on the base, the base is detachably installed on the side wall of a vacuum container, the base is installed at one end of the vacuum pipe bending piece, the vacuum pipe bending piece is communicated with a vacuum inner cavity, the electromagnetic coil is wound on the outer wall of the vacuum pipe bending piece, the target material liquid cooling fixing assembly is used for installing a target material and cooling the target material, the arc striking assembly is used for driving the target material to generate arc spots, ions generated by the ion generating mechanism bombard the target material, electrified sputtering atoms are generated, the moving track of the electrified sputtering atoms is overlapped with the central axis of.

Furthermore, the ion generation mechanism comprises an assembly base body, an anode carrier, a cathode carrier, an air cavity base part and a cooling component, wherein the assembly base body is arranged in the vacuum inner cavity, the cathode carrier is arranged at the upper part of the assembly base body, the cooling component is arranged at the lower part of the cathode carrier and is used for cooling the cathode carrier, an electric field is generated between the anode carrier and the cathode carrier, the air cavity base part is arranged between the anode carrier and the cathode carrier so as to enable the air cavity base part to be positioned in the electric field, the air cavity base part is provided with an ion generation cavity and a plurality of ion emission through holes communicated with the ion generation cavity, and ions enter the vacuum inner cavity through the ion emission through holes.

Furthermore, the cooling assembly comprises a cooling support piece, a first liquid inlet nozzle and a first liquid outlet nozzle, the cooling support piece is arranged at the lower part of the negative electrode carrying piece, the cooling support piece and the negative electrode carrying piece are surrounded to form a cooling liquid cavity, the first liquid inlet nozzle and the first liquid outlet nozzle are respectively arranged at two ends of the cooling support piece, the first liquid inlet nozzle and the first liquid outlet nozzle are communicated with the cooling liquid cavity, and a first sealing ring is arranged between the cooling support piece and the negative electrode carrying piece and used for sealing a gap between the cooling support piece and the negative electrode carrying piece; the positive pole carrier is provided with an electrode binding post for being connected to a power supply positive pole, the negative pole carrier is connected to a power supply negative pole, and an electric field is formed between the positive pole carrier and the negative pole carrier.

Further, ion generation mechanism still includes the cooling bounding wall, cooling bounding wall middle part is equipped with the mounting hole to be used for installing air cavity base member, the lower part of cooling bounding wall is equipped with annotates the liquid stick, it is equipped with first inlet channel and first liquid outlet channel to annotate the liquid stick, the upper portion of cooling bounding wall is equipped with the cooling annular, first inlet channel and first liquid outlet channel all communicate with the cooling annular, the coolant liquid flows through first inlet channel in proper order, cooling annular and first liquid outlet channel, the cooling annular is used for cooling air cavity base member, it is equipped with insulating part to annotate liquid stick outside cover, insulating part is used for the protection to annotate the liquid stick.

Furthermore, the ion generating mechanism further comprises a plurality of magnetic components, the air cavity base member is provided with a plurality of limiting holes, the limiting holes are in an annular array to form a limiting hole ring, the ion emitting through holes are in a linear array and are all located inside the limiting hole ring, and the magnetic components are respectively limited in the limiting holes.

Further, the target liquid cooling fixing assembly comprises a liquid cooling pipe fitting installed on the base, a clamping piece installed at one end of the liquid cooling pipe fitting and a connecting pipe fitting installed at the other end of the liquid cooling pipe fitting, one end, provided with the clamping piece, of the liquid cooling pipe fitting protrudes into the vacuum pipe bending fitting, one end, provided with the connecting pipe fitting, of the liquid cooling pipe fitting is exposed outside the vacuum pipe bending fitting, and the clamping piece is provided with a clamping groove used for clamping the target.

Further, the connecting pipe fitting is provided with a second liquid inlet nozzle and a second liquid outlet nozzle, the liquid cooling pipe fitting is provided with a second liquid inlet channel, a first liquid cooling cavity communicated with the second liquid inlet channel, a second liquid cooling cavity communicated with the first liquid cooling cavity and a second liquid outlet channel communicated with the second liquid cooling cavity, the second liquid inlet nozzle is communicated with the second liquid inlet channel, the second liquid outlet nozzle is communicated with the second liquid outlet channel, the second liquid inlet channel is arranged in the second liquid outlet channel, the second liquid inlet channel and the second liquid outlet channel are coaxially arranged, cooling liquid sequentially flows through the second liquid inlet nozzle, the second liquid inlet channel, the first liquid cooling cavity, the second liquid outlet channel and the second liquid outlet nozzle, and a second sealing ring is arranged between the clamping piece and the liquid cooling pipe fitting.

Further, the arc striking assembly comprises a driving piece arranged on the base, a rod piece connected with the output end of the driving piece and an arc striking component arranged at one end, far away from the driving piece, of the rod piece, the arc striking component comprises a supporting portion fixed on the rod piece and a bending portion integrally formed with the supporting portion, and the driving piece is used for driving the bending portion to abut against the target or to be far away from the target.

Further, vacuum elbow spare includes arc and two straight tubes, and two straight tubes are fixed in the both ends of arc respectively, and the base is installed in the one end that the arc was kept away from to a straight tube, and arc and two straight tubes all are equipped with the intermediate layer cavity, and the intermediate layer cavity of arc communicates each other with the intermediate layer cavity of two straight tubes respectively, and arc internally mounted has the fender to strain the part, keeps off to strain the part and is equipped with a plurality of baffles.

Further, vacuum vessel includes vessel, shutter, heating rod and gas supply pipe, and the shutter rotates to be installed in vessel, and shutter and vessel enclose to establish and form the vacuum inner chamber, and the shutter is equipped with the installation trench, and ion generation mechanism installs in the installation trench, and the quantity of heating rod is a plurality of, and a plurality of heating rods are ring array in vacuum inner chamber and provide heat, and gas supply pipe distributes in vacuum inner chamber, and gas supply pipe is used for generating mechanism's supply gas to the ion.

The utility model has the advantages that: the ion generating mechanism of this structure can utilize gaseous automatic production ion, and magnetism return bend mechanism makes electrified sputter atom can follow the surface that crooked route sputtered the work piece of vacuum cavity, and the deposit forms the cladding material, and the precision of sputtering is high, can also realize rapid cooling to the fixed subassembly of target liquid cooling, and the cooling effect is good.

Drawings

Fig. 1 is a schematic perspective view of a vacuum container according to the present invention.

Fig. 2 is a schematic perspective view of the magnetic pipe bending mechanism of the present invention.

Fig. 3 is a schematic structural view of the base, the target liquid cooling fixing assembly and the arc striking assembly of the present invention.

Fig. 4 is a sectional view of the magnetic pipe bending mechanism of the present invention.

Fig. 5 is a cross-sectional view of the target liquid cooling fixing assembly of the present invention.

Fig. 6 is a schematic perspective view of the ion generating mechanism of the present invention.

Fig. 7 is a first cross-sectional view of the ion generating mechanism of the present invention.

Fig. 8 is a second sectional view of the ion generating mechanism of the present invention.

Fig. 9 is a schematic structural view of the air cavity base member, the ion emitting through hole, the limiting hole and the limiting ring of the present invention.

Fig. 10 is a schematic perspective view of the cooling panel according to the present invention.

Detailed Description

In order to facilitate understanding of those skilled in the art, the present invention will be further described with reference to the following examples and drawings, which are not intended to limit the present invention.

As shown in fig. 1 to 10, the present invention provides a movement structure of a coating machine, which includes a vacuum container 28, an ion generating mechanism 41 and a magnetic pipe bending mechanism 42, wherein the vacuum container 28 is provided with a vacuum cavity 29, and the ion generating mechanism 41 is installed in the vacuum cavity 29 and used for generating ions; the magnetic pipe bending mechanism 42 comprises a base 1, a vacuum pipe bending part 2, an electromagnetic coil 3, a target material liquid cooling fixing component 4 and an arc striking component 5 which are all installed on the base 1, the base 1 is detachably installed on the side wall of the vacuum container 28, the base 1 is installed at one end of the vacuum pipe bending part 2, the vacuum pipe bending part 2 is communicated with the vacuum inner cavity 29, the electromagnetic coil 3 is wound on the outer wall of the vacuum pipe bending part 2, the target material liquid cooling fixing component 4 is used for installing a target material 43 and cooling the target material 43, the arc striking component 5 is used for driving the target material 43 to generate arc spots, ions generated by the ion generating mechanism 41 bombard the target material 43 to generate electrified sputtering atoms, the moving track of the electrified sputtering atoms is overlapped with or arranged in parallel to the central axis of the vacuum pipe bending part 2, and the electrified sputtering atoms enter.

The sputtering principle is as follows: firstly, inert gas (usually Ar gas) generates glow discharge phenomenon to generate charged ions, and positive ions (usually Ar +) bombard a cathode (a target made of a deposition material) in a vacuum chamber; the charged ions are accelerated by the electric field and then impact the surface of the target 43, so that target atoms are bombarded and fly out, secondary electrons are generated at the same time, and then impact gas atoms to form more charged ions; the target material atoms carry enough kinetic energy to sputter to the surface of the substrate (workpiece) for deposition to form a coating. After bombardment and collision of high-energy electrons in the plasma region, part of target atoms are ionized, the sputtered target material is not necessarily in a single ion state, usually in a cluster shape, and when passing through the ionization region, if the single atoms are ionized into positive ions, the cluster shape absorbs electrons and carries negative charges.

In practical application, the vacuum container 28 may be installed with a plurality of magnetic pipe bending mechanisms 42, the magnetic pipe bending mechanisms 42 are exposed outside the vacuum cavity 29, the side wall of the vacuum container 28 is provided with a plurality of annular installation bases 50, the base 1 of the magnetic pipe bending mechanisms 42 is detachably installed on the installation bases 50, the vacuum cavity 29 of the vacuum container 28 is vacuumized, the ion generating mechanism 41 is filled with inert gas, the ion generating mechanism 41 generates a large amount of ions by using the glow discharge principle, the large amount of ions are filled in the whole vacuum cavity 29 and the vacuum pipe bending part 2, the liquid-cooled target fixing component 4 is connected with a cathode, the arc striking component 5 is connected with an arc striking circuit, the arc striking component 5 strikes the side wall of the target 43 to generate arc spots, the electromagnetic coil 3 is wound on the outer wall of the vacuum pipe bending part 2, the moving track of the charged sputtered atoms is coincident with or parallel to the central axis of the vacuum, the central axis of the vacuum elbow is in a curved arc shape, so that charged sputtering atoms are sputtered onto the surface of a base material (workpiece) at a preset position along a specific path to form a coating through deposition, the sputtering direction and the path of the sputtering atoms are generally not controlled, and the sputtering direction and the path of the charged sputtering atoms can be controlled under the force of an electromagnetic field, so that the sputtering accuracy is improved; in-process of positive ion bombardment target 43, target liquid cooling fixed subassembly 4 and target 43 all are in the ultra-temperature state, and in order to reach the effect of cooling, to the inside leading-in mobile coolant of target liquid cooling fixed subassembly 4, can realize rapid cooling to target liquid cooling fixed subassembly 4, protect target liquid cooling fixed subassembly 4 and target 43, increase of service life.

The ion generating mechanism 41 of the structure can automatically generate ions by utilizing gas, the magnetic pipe bending mechanism 42 enables electrified sputtering atoms to sputter the surface of a workpiece of a vacuum inner cavity along a curved path, a plating layer is formed by deposition, the sputtering accuracy is high, rapid cooling can be realized for the target material liquid cooling fixing assembly, and the cooling effect is good.

In this embodiment, the ion generating mechanism includes an assembling base 31, a positive carrier 32, a negative carrier 33, an air cavity base member 34, and a cooling assembly 35, wherein the assembling base 31 is installed in the vacuum cavity 29, the negative carrier 33 is installed on the upper portion of the assembling base 31, the cooling assembly 35 is installed on the lower portion of the negative carrier 33 and is used for cooling the negative carrier 33, an electric field is generated between the positive carrier 32 and the negative carrier 33, the air cavity base member 34 is disposed between the positive carrier 32 and the negative carrier 33 so that the air cavity base member 34 is located in the electric field, the air cavity base member 34 is provided with an ion generating cavity 36 and a plurality of ion emitting through holes 37 communicated with the ion generating cavity 36, and ions enter the vacuum cavity 29 through the ion emitting through holes 37.

In practical application, the ion generating chamber 36 is filled with gas, the gas in the ion generating chamber 36 is broken down under the action of the electric field, and the physical phenomenon of gas discharge, namely glow discharge phenomenon, is presented, and the plasma formed by gas discharge is an ionized gas, which is an aggregate of ions, electrons, high-energy atoms and the like, positive ions and electrons always appear in pairs, the total number is approximately equal, the whole body is quasi-electroneutrality, and the plasma is an ionized state composed of charged particles, and is called as a fourth state-plasma state of matter. In the sputtering coating process, gas and target metal atoms are impacted and ionized by high-energy electrons into plasma consisting of conductive particles such as electrons, gas ions and metal ions. The plasma moves from the ion emitting through-hole 37 to the vacuum chamber 29 as bombarding particles for the sputter coating process. During the gas discharge process, the negative electrode carrier 33 is in a super high temperature state, and flowing cooling liquid is introduced into the cooling assembly 35 so as to effectively and rapidly cool the negative electrode carrier 33 and the air cavity base member 34.

In this embodiment, the cooling assembly 35 includes a cooling tray 38, a first liquid inlet nozzle 39 and a first liquid outlet nozzle 310, the cooling tray 38 is installed at the lower part of the negative electrode carrier 33, the cooling tray 38 and the negative electrode carrier 33 are surrounded to form a cooling liquid cavity 311, the first liquid inlet nozzle 39 and the first liquid outlet nozzle 310 are respectively installed at two ends of the cooling tray 38, the first liquid inlet nozzle 39 and the first liquid outlet nozzle 310 are communicated with the cooling liquid cavity 311, and a first sealing ring 312 is installed between the cooling tray 38 and the negative electrode carrier 33 for sealing a gap between the cooling tray 38 and the negative electrode carrier 33; the positive pole carrier 32 is provided with an electrode binding post 314 for connecting a positive pole of a power supply, the negative pole carrier 33 is connected with a negative pole of the power supply, and an electric field is formed between the positive pole carrier 32 and the negative pole carrier 33. Specifically, the cooling liquid is introduced into the cooling liquid cavity 311 from the first liquid inlet nozzle 39 and directly contacts with the negative electrode carrying piece 33, the cooling liquid in the cooling liquid cavity 311 flows out from the first liquid outlet nozzle 310, and the cooling liquid is in a real-time flowing state, so that the negative electrode carrying piece 33 can be effectively and rapidly cooled, and the service life is prolonged. Since the coolant is introduced into the coolant chamber 311, the first seal ring 312 prevents the coolant from overflowing the coolant chamber 311, further preventing the coolant from being wasted and contaminating other parts. The electrode terminal 314 is adapted to receive the positive electrode of a power source and the negative carrier 33 is adapted to receive the negative electrode of the power source for providing an electric field to the ion generating chamber 36. The negative electrode carrier 33 is provided with an inflation nozzle 313, the inflation nozzle 313 is communicated with the ion generation cavity 36, and the inflation nozzle 313 is connected with an external inflation device to supply enough gas to the ion generation cavity 36.

In this embodiment, the ion generating mechanism 41 further includes a cooling surrounding plate 315, a mounting hole 316 is disposed in the middle of the cooling surrounding plate 315 for mounting the air cavity base member 34, a liquid injection rod 317 is disposed on the lower portion of the cooling surrounding plate 315, the liquid injection rod 317 is provided with a first liquid inlet channel 318 and a first liquid outlet channel 319, a cooling ring groove 320 is disposed on the upper portion of the cooling surrounding plate 315, the first liquid inlet channel 318 and the first liquid outlet channel 319 are both communicated with the cooling ring groove 320, the cooling liquid sequentially flows through the first liquid inlet channel 318, the cooling ring groove 320 and the first liquid outlet channel 319, the cooling ring groove 320 is used for cooling the air cavity base member 34, an insulating member 321 is sleeved on the outer side of the liquid injection rod 317, and the. Specifically, the mounting holes 316 are shaped to match the shape of the air cavity base member 34, with the air cavity base member 34 being located in the middle of the cooling shroud 315. The plane of cooling ring groove 320 place sets up perpendicularly with the axial centerline who annotates liquid stick 317, cooling module 35 cools off negative pole year piece 33, because air cavity base member 34 is located negative pole year piece 33, consequently cooling module 35 can cool off the lower part of air cavity base member 34, cooling ring groove 320 is used for cooling to the edge of air cavity base member 34, cool off many places to air cavity base member 34 simultaneously, can strengthen the cooling effect, guarantee that the process of the plasma of gaseous discharge formation in the ion generation chamber 36 goes on smoothly. Because the liquid injection rod 317 is arranged between the negative electrode carrier 33 and the positive electrode carrier 32 and is easily broken down and burnt, the insulating component 321 can enable the liquid injection rod 317 to be in an insulated state, the liquid injection rod 317 is effectively protected, and the service life is prolonged.

In this embodiment, the ion generating mechanism 41 further includes a plurality of magnetic components (not shown), the air cavity base member 34 is provided with a plurality of limiting holes 323, the plurality of limiting holes 323 are in an annular array to form a limiting hole ring 325, the plurality of ion emitting through holes 37 are in a linear array, the plurality of ion emitting through holes 37 are all located inside the limiting hole ring 325, and the plurality of magnetic components are respectively limited in the plurality of limiting holes 323. Specifically, the magnetic component is used for controlling the stress of ions emitted from the ion emission through hole 37, and the movement direction and the track of the ions are changed by controlling the position relation between the magnetic component and the ion emission through hole 37, so that the ions are used as bombardment particles in the sputtering coating process, the target bombardment effect is good, and the utilization rate of the target is improved.

In this embodiment, the target liquid cooling fixing assembly 4 includes a liquid cooling pipe fitting 6 installed on the base 1, a clamping member 7 installed at one end of the liquid cooling pipe fitting 6, and a connecting pipe fitting 8 installed at the other end of the liquid cooling pipe fitting 6, wherein one end of the liquid cooling pipe fitting 6 where the clamping member 7 is installed protrudes into the vacuum pipe bending fitting 2, one end of the liquid cooling pipe fitting 6 where the connecting pipe fitting 8 is installed is exposed outside the vacuum pipe bending fitting 2, the clamping member 7 is provided with a clamping groove 9, and the clamping groove 9 is used for clamping the target 43. Specifically, connect pipe fitting 8 and be used for connecting external leading coolant liquid pipeline, the in-process of positive ion bombardment target 43, holder 7's temperature is high, and liquid cooling pipe fitting 6 is used for leading-in mobile coolant liquid to carry out effective quick cooling to holder 7, guarantees that sputter work normally goes on, improves production efficiency.

In this embodiment, the connecting pipe fitting 8 is provided with a second liquid inlet nozzle 10 and a second liquid outlet nozzle 11, the liquid cooling pipe fitting 6 is provided with a second liquid inlet channel 12, a first liquid cooling cavity 13 communicated with the second liquid inlet channel 12, a second liquid cooling cavity 14 communicated with the first liquid cooling cavity 13, and a second liquid outlet channel 15 communicated with the second liquid cooling cavity 14, the second liquid inlet nozzle 10 is communicated with the second liquid inlet channel 12, the second liquid outlet nozzle 11 is communicated 15 with the second liquid outlet channel, the second liquid inlet channel 12 is arranged inside the second liquid outlet channel 15, the second liquid inlet channel 12 and the second liquid outlet channel 15 are coaxially arranged, cooling liquid sequentially flows through the second liquid inlet nozzle 10, the second liquid inlet channel 12, the first liquid cooling cavity 13, the second liquid cooling cavity 14, the second liquid outlet channel 15 and the second liquid outlet nozzle 11, and a second sealing ring 16 is arranged between the clamping member 7 and the liquid cooling pipe fitting 6. Specifically, first liquid cooling chamber 13 and second liquid cooling chamber 14's shape is cylindrical, and thickness is less, and the bottom surface area is bigger than the thickness promptly, and the effective cooling area to holder 7 can be increaseed in first liquid cooling chamber 13 and second liquid cooling chamber 14's design for the coolant liquid stops the time extension inside liquid cooling pipe fitting 6, and it is effectual to cool down.

First liquid cooling chamber 13 is enclosed to establish by holder 7 and liquid cooling pipe fitting 6 and forms, and centre gripping recess 9 is located one side of holder 7, and first liquid cooling chamber 13 is located the opposite side of holder 7. Concretely, after the coolant liquid got into first liquid cooling chamber 13, direct and holder 7 contact, and in order to strengthen the cooling effect, the thickness design of holder 7 between centre gripping recess 9 and the first liquid cooling chamber 13 is less, first liquid cooling chamber 13 and second liquid cooling chamber 14 are through the through-hole intercommunication, the coolant liquid gets into second liquid cooling chamber 14 after getting into first liquid cooling chamber 13 and staying the moment, flow out after second liquid cooling chamber 14 stays the moment, can realize rapid cooling to fixed subassembly 4 of target liquid cooling, protect fixed subassembly 4 of target liquid cooling and target 43, and long service life.

In this embodiment, the arc striking assembly 5 includes a driving part 18 mounted on the substrate 1, a rod 19 connected to an output end of the driving part 18, and an arc striking component 20 disposed at an end of the rod 19 away from the driving part 18, where the arc striking component 20 includes a supporting part 21 fixed to the rod 19 and a bending part 22 integrally formed with the supporting part 21, and the driving part 18 is used to drive the bending part 22 to abut against the target 43 or to be away from the target 43. Preferably, the driving member 18 is selected from a pneumatic cylinder or an electric cylinder; the rod piece 19 is connected with an arc-leading power supply, the driving piece 18 is used for driving the rod piece 19 to rotate by a preset angle, the bending end 22 is abutted against the target 28 to generate arc spots, then the driving piece 18 drives the bending end 22 to return, the target 28 starts to be ablated, namely positive ions start to bombard the target 28, sputtered target atoms move to the vacuum inner cavity 29 along the central axis of the vacuum elbow piece, a workpiece is placed in the vacuum inner cavity 29, the target atoms are sputtered to the surface of the workpiece to be deposited to form a coating, the coating of the workpiece is finished, the target is further controlled to be ablated by controlling the action of the driving piece 18, and controllability is enhanced.

In this embodiment, vacuum elbow piece 2 includes curved tube 23 and two straight tubes 24, and two straight tubes 24 are fixed in the both ends of curved tube 23 respectively, and base 1 installs in the one end that curved tube 23 was kept away from to a straight tube 24, and curved tube 23 and two straight tubes 24 all are equipped with intermediate layer cavity 25, and the intermediate layer cavity 25 of curved tube 23 communicates each other with the intermediate layer cavity 25 of two straight tubes 24 respectively, and curved tube 23 internally mounted has the fender to strain part 26, keeps off to strain part 26 and is equipped with a plurality of baffles 27. Specifically, in the process that target material atoms are sputtered to the surface of the substrate, the vacuum elbow fitting 2 is in a high-temperature state, the interlayer cavity 25 is used for introducing external cooling liquid, the vacuum elbow fitting 2 is cooled, the vacuum elbow fitting 2 is prevented from being burnt by high temperature, the sputtering process inside the vacuum elbow fitting 2 is ensured to be smoothly carried out, the service life is prolonged, and the reliability and the stability are improved. The arc-shaped tube 23 is in a curved arc shape, and the movement locus of charged target material atoms can be further controlled by controlling the distribution of the electromagnetic coils so as to meet the coating requirements of various workpieces.

In this embodiment, the vacuum container 28 includes a container body 44, a door 45, heating rods 46 and a gas supply pipe 47, the door 45 is rotatably installed on the container body 44, the door 45 and the container body 44 surround to form a vacuum cavity 29, the door 45 is provided with an installation slot 48, the assembly substrate 31 of the ion generating mechanism 41 is installed in the installation slot 48, the number of the heating rods 46 is multiple, the heating rods 46 are annularly arrayed in the vacuum cavity 29 and provide heat, so that the heat distribution of the vacuum cavity 29 is uniform, the gas supply pipe 47 is distributed in the vacuum cavity 29, and the gas supply pipe 47 is used for supplying gas to the ion generating mechanism 41. The shutter 45 is used for picking and placing workpieces. The heating rods 46 are used to control the temperature of the vacuum chamber 29 to meet the coating requirements of various workpieces.

All the technical features in the embodiment can be freely combined according to actual needs.

The above-mentioned embodiment is the utility model discloses the implementation scheme of preferred, in addition, the utility model discloses can also realize by other modes, any obvious replacement is all within the protection scope of the utility model under the prerequisite that does not deviate from this technical scheme design.

Claims (10)

1. The utility model provides a core structure of coating machine, includes vacuum vessel, and vacuum vessel is equipped with vacuum cavity, its characterized in that: the ion generating mechanism is arranged in the vacuum inner cavity and is used for generating ions;

the magnetic pipe bending mechanism comprises a base, a vacuum pipe bending piece, an electromagnetic coil, a target material liquid cooling fixing assembly and an arc striking assembly, wherein the target material liquid cooling fixing assembly and the arc striking assembly are installed on the base, the base is detachably installed on the side wall of a vacuum container, the base is installed at one end of the vacuum pipe bending piece, the vacuum pipe bending piece is communicated with a vacuum inner cavity, the electromagnetic coil is wound on the outer wall of the vacuum pipe bending piece, the target material liquid cooling fixing assembly is used for installing a target material and cooling the target material, the arc striking assembly is used for driving the target material to generate arc spots, ions generated by the ion generating mechanism bombard the target material, electrified sputtering atoms are generated, the moving track of the electrified sputtering atoms is overlapped with the central axis of.

2. The movement structure of a coating machine according to claim 1, characterized in that: the ion generation mechanism comprises an assembly base body, an anode carrier, a cathode carrier, an air cavity base part and a cooling component, wherein the assembly base body is arranged in a vacuum inner cavity, the cathode carrier is arranged on the upper part of the assembly base body, the cooling component is arranged on the lower part of the cathode carrier and is used for cooling the cathode carrier, an electric field is generated between the anode carrier and the cathode carrier, the air cavity base part is arranged between the anode carrier and the cathode carrier so as to enable the air cavity base part to be positioned in the electric field, the air cavity base part is provided with an ion generation cavity and a plurality of ion emission through holes communicated with the ion generation cavity, and ions enter the vacuum inner cavity through the ion emission through holes.

3. The movement structure of a coating machine according to claim 2, characterized in that: the cooling assembly comprises a cooling support piece, a first liquid inlet nozzle and a first liquid outlet nozzle, the cooling support piece is arranged at the lower part of the negative electrode carrying piece, the cooling support piece and the negative electrode carrying piece are arranged in an enclosing mode to form a cooling liquid cavity, the first liquid inlet nozzle and the first liquid outlet nozzle are respectively arranged at two ends of the cooling support piece and are communicated with the cooling liquid cavity, and a first sealing ring is arranged between the cooling support piece and the negative electrode carrying piece and used for sealing a gap between the cooling support piece and the negative electrode carrying piece; the positive pole carrier is provided with an electrode binding post for being connected to a power supply positive pole, the negative pole carrier is connected to a power supply negative pole, and an electric field is formed between the positive pole carrier and the negative pole carrier.

4. The movement structure of a coating machine according to claim 2, characterized in that: the ion generating mechanism further comprises a cooling enclosing plate, a mounting hole is formed in the middle of the cooling enclosing plate, and is used for mounting the air cavity base member, a liquid injection rod is arranged on the lower portion of the cooling enclosing plate, the liquid injection rod is provided with a first liquid inlet channel and a first liquid outlet channel, a cooling annular groove is formed in the upper portion of the cooling enclosing plate, the first liquid inlet channel and the first liquid outlet channel are communicated with the cooling annular groove, cooling liquid sequentially flows through the first liquid inlet channel, the cooling annular groove and the first liquid outlet channel, the cooling annular groove is used for cooling the air cavity base member, an insulating part is sleeved on the outer side of the liquid injection rod.

5. The movement structure of a coating machine according to claim 2, characterized in that: the ion generation mechanism further comprises a plurality of magnetic components, the air cavity base member is provided with a plurality of limiting holes, the limiting holes are in an annular array to form a limiting hole ring, the ion emission through holes are in a linear array and are located inside the limiting hole ring, and the magnetic components are respectively limited in the limiting holes.

6. The movement structure of a coating machine according to claim 1, characterized in that: the target liquid cooling fixing assembly comprises a liquid cooling pipe fitting installed on the base, a clamping piece installed at one end of the liquid cooling pipe fitting and a connecting pipe fitting installed at the other end of the liquid cooling pipe fitting, one end, provided with the clamping piece, of the liquid cooling pipe fitting protrudes into the vacuum elbow fitting, one end, provided with the connecting pipe fitting, of the liquid cooling pipe fitting is exposed out of the vacuum elbow fitting, the clamping piece is provided with a clamping groove, and the clamping groove is used for clamping a target.

7. The movement structure of a coating machine according to claim 6, characterized in that: the connecting pipe fitting is provided with a second liquid inlet nozzle and a second liquid outlet nozzle, the liquid cooling pipe fitting is provided with a second liquid inlet channel, a first liquid cooling cavity communicated with the second liquid inlet channel, a second liquid cooling cavity communicated with the first liquid cooling cavity and a second liquid outlet channel communicated with the second liquid cooling cavity, the second liquid inlet nozzle is communicated with the second liquid inlet channel, the second liquid outlet nozzle is communicated with the second liquid outlet channel, the second liquid inlet channel is arranged in the second liquid outlet channel, the second liquid inlet channel and the second liquid outlet channel are coaxially arranged, cooling liquid sequentially flows through the second liquid inlet nozzle, the second liquid inlet channel, the first liquid cooling cavity, the second liquid outlet channel and the second liquid outlet nozzle, and a second sealing ring is arranged between the clamping piece and the pipe fitting.

8. The movement structure of a coating machine according to claim 1, characterized in that: the arc striking component comprises a driving piece arranged on the base, a rod piece connected with the output end of the driving piece and an arc striking part arranged at one end, far away from the driving piece, of the rod piece, the arc striking part comprises a supporting portion fixed on the rod piece and a bending portion integrally formed with the supporting portion, and the driving piece is used for driving the bending portion to abut against the target or to be far away from the target.

9. The movement structure of a coating machine according to claim 1, characterized in that: vacuum return bend spare includes arc and two straight tubes, and two straight tubes are fixed in the both ends of arc respectively, and the base is installed in the one end that the arc was kept away from to a straight tube, and arc and two straight tubes all are equipped with the intermediate layer cavity, and the intermediate layer cavity of arc communicates each other with the intermediate layer cavity of two straight tubes respectively, and arc internally mounted has the fender to strain the part, keeps off to strain the part and is equipped with a plurality of baffles.

10. The movement structure of a coating machine according to claim 1, characterized in that: the vacuum container comprises a container body, a stop door, heating rods and a gas supply pipe, wherein the stop door is rotatably installed on the container body, the stop door and the container body are surrounded to form a vacuum inner cavity, the stop door is provided with an installation slot position, the ion generation mechanism is installed in the installation slot position, the heating rods are in a plurality of number, the heating rods are in an annular array and provide heat in the vacuum inner cavity, the gas supply pipe is distributed in the vacuum inner cavity, and the gas supply pipe is used for supplying gas to the ion generation mechanism.

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