CN111809156A - Elbow filtering type coating machine - Google Patents

Abstract

The invention relates to the technical field of coating equipment, in particular to a bent pipe filtering type coating machine, which comprises a control cabinet, a vacuum pump, a vacuum container, a plurality of target ionization mechanisms and a plurality of ion generation mechanisms, wherein the control cabinet is provided with a vacuum pump; the vacuum container is provided with a vacuum inner cavity; the target ionization mechanism comprises a mounting seat, an arc striking mechanism, a driving mechanism, a target chuck mechanism, a cooling mechanism and a vacuum tube mechanism, wherein the vacuum tube mechanism comprises an arc tube assembly and a plurality of groups of straight tube assemblies; arc tube assembly and straight tube subassembly all include inner tube, outer tube, first connecting block, second connecting block and a plurality of retaining member. The target ionization mechanism of the coating machine cools the ionization target and the vacuum tube mechanism clamped by the target chuck mechanism respectively through two cooling modes, and the cooling effect of the target ionization mechanism is greatly improved. Simultaneously, target chuck mechanism is provided with one section arc pipe assembly, and the arc pipe assembly has certain radian, increases the filter effect of the coating machine of this application.

Description

Elbow filtering type coating machine

Technical Field

The invention relates to the technical field of coating equipment, in particular to a bent pipe filtering type coating machine.

Background

The vacuum coating technology is widely applied to real production life as a technology for generating a specific film layer. Vacuum coating techniques come in three forms, namely evaporation coating, sputter coating and ion plating. Among them, sputter coating can be considered as one of the most prominent achievements in coating technology. The method has the advantages of high sputtering rate, low substrate temperature rise, good film-substrate bonding force, stable device performance, convenient operation and control and the like, and becomes a preferred scheme of the coating industrial application field, in particular to the continuous coating occasions with particularly strict requirements on large-area uniformity, such as architectural coated glass, transparent conductive film glass, flexible substrate winding coating and the like.

The target ionization mechanism of coating machine can produce a large amount of heats in work, and current target ionization mechanism's cooling effect is poor, and the produced heat of target ionization mechanism can influence whole sputtering process to lead to the coating failure. In addition, the heat generated by the target ionization mechanism affects the parts inside the target ionization mechanism, so that the target ionization mechanism cannot work normally, even the target ionization mechanism is damaged, and the production cost is increased. Meanwhile, vacuum tube mechanisms of the target ionization mechanism are all straight tubes, and the filtering effect on some ionized heteroatoms or ions is poor.

Disclosure of Invention

The technical problem to be solved by the invention is to provide a bent pipe filtering type coating machine, wherein a target ionization mechanism of the coating machine respectively cools an ionization target and a vacuum pipe mechanism clamped by a target chuck mechanism through two cooling modes, so that the cooling effect of the target ionization mechanism is greatly improved, parts in the target ionization mechanism are protected, the target ionization mechanism can stably and normally work, the failure rate and the maintenance rate of the target ionization mechanism are reduced, and the production cost is further reduced. Simultaneously, target chuck mechanism is provided with one section arc pipe assembly, and the arc pipe assembly has certain radian, can be better with some heteroatom or the ion fender of being ionized to the inner tube of arc pipe assembly on, increase the filter effect of the coating machine of this application.

In order to solve the technical problems, the invention adopts the following technical scheme:

a bent pipe filtering type coating machine comprises a control cabinet, a vacuum pump, a vacuum container, a plurality of target ionization mechanisms and a plurality of ion generation mechanisms; the vacuum container is provided with a vacuum inner cavity, and the ion generating mechanisms are respectively arranged in the vacuum inner cavity and are used for generating ions to the vacuum inner cavity; the target ionization mechanisms are respectively connected to the vacuum container; the vacuum pump is connected to the vacuum container and is used for vacuumizing the vacuum container; the vacuum pump, the target ionization mechanisms and the ion generation mechanisms are all electrically connected with the control cabinet;

the target ionization mechanism comprises a mounting seat, an arc striking mechanism, a driving mechanism, a target chuck mechanism, a cooling mechanism and a vacuum tube mechanism; the vacuum tube mechanism comprises an arc tube assembly and a plurality of groups of straight tube assemblies, and two ends of the arc tube assembly are respectively connected with at least one group of straight tube assemblies; the arc-shaped pipe assembly and the straight pipe assembly respectively comprise an inner pipe, an outer pipe, a first connecting block, a second connecting block and a plurality of locking pieces;

the vacuum tube mechanism is connected to the vacuum container, and the inner tube is communicated with the vacuum inner cavity; the two ends of the inner pipe are respectively connected to the first connecting block and the second connecting block, the two ends of the outer pipe are respectively connected to the first connecting block and the second connecting block, the outer pipe is sleeved on the outer side of the inner pipe, and a first cooling liquid cavity is arranged between the outer pipe and the inner pipe;

the outer pipe is provided with a first water inlet and a first water outlet, and the first water inlet and the first water outlet are both communicated with the first cooling liquid cavity; the first connecting block is connected to the mounting seat or a second connecting block of an adjacent arc-shaped pipe assembly or a second connecting block of an adjacent straight pipe assembly, the second connecting block is connected to the first connecting block of the adjacent arc-shaped pipe assembly or the first connecting block of the adjacent straight pipe assembly, the plurality of locking parts are used for locking the first connecting block to the mounting seat, and the plurality of locking screws are also used for locking the second connecting block to the first connecting block of the adjacent arc-shaped pipe assembly or the first connecting block of the adjacent straight pipe assembly; an electromagnetic induction coil is sleeved on the outer side of the outer tube;

the target chuck mechanism is arranged on the mounting seat and positioned inside the inner tube, and is used for clamping the target to be ionized; the cooling mechanism is arranged on the mounting seat and is used for cooling the target to be ionized clamped by the target chuck mechanism; the arc striking mechanism is rotatably connected to the mounting seat and located inside the inner tube, the driving mechanism is arranged on the mounting seat and used for driving the arc striking mechanism to rotate, and the arc striking mechanism is used for enabling the target to be ionized, clamped by the target chuck mechanism, to generate arc spots.

Furthermore, the cooling mechanism comprises a water pipe sleeve, a water inlet pipe, a water outlet pipe locking assembly and a heat exchange seat, the heat exchange seat is arranged on one side of the mounting seat and is positioned in the inner pipe, and the water pipe sleeve and the water outlet pipe locking assembly are arranged on the other side of the mounting seat; the water pipe sleeve is provided with a second water inlet and a second water outlet, the heat exchange seat is provided with a first accommodating cavity, a second accommodating cavity and a through hole, the through hole is communicated with the first accommodating cavity and the second accommodating cavity, the heat exchange seat is connected with the target chuck mechanism, and the first accommodating cavity is positioned at one end, close to the target chuck mechanism, of the heat exchange seat; the water outlet pipe is sleeved outside the water inlet pipe, and a circulation gap is formed between the water inlet pipe and the water outlet pipe; the mounting seat is provided with a first mounting hole, the first mounting hole penetrates through the mounting seat, one end of the water inlet pipe is connected to the water pipe sleeve, the other end of the water inlet pipe penetrates through the first mounting hole and is connected to the heat exchange seat, and the water inlet pipe is communicated with the second water inlet and the first accommodating cavity; one end of the water outlet pipe is connected with the water pipe sleeve, the other end of the water outlet pipe penetrates through the first mounting hole and is connected with the heat exchange seat, and the water outlet pipe is communicated with the second water outlet and the second accommodating cavity; the water outlet pipe locking assembly is used for locking the water outlet pipe on the mounting seat.

Furthermore, the water pipe sleeve is provided with a third accommodating cavity and a fourth accommodating cavity, and the fourth accommodating cavity is communicated with the third accommodating cavity and the outside; the second water inlet is communicated with the third accommodating cavity, and the second water outlet is communicated with the fourth accommodating cavity; the inner wall of the third accommodating cavity is provided with a first internal thread, and the outer wall of the water inlet pipe is provided with a first external thread which is in threaded connection with the first internal thread; and a second internal thread is arranged on the inner wall of the fourth accommodating cavity, and a second external thread which is in threaded connection with the second internal thread is arranged on the outer wall of the water outlet pipe.

Furthermore, a plurality of striker plates are arranged inside the inner pipe of the arc pipe assembly or/and the straight pipe assembly at intervals.

Further, the target chuck mechanism comprises a chuck base and a chuck base, wherein the chuck base is connected to the mounting base, the chuck base is connected to one end of the chuck base, which is far away from the mounting base, and the chuck base is used for clamping the target to be ionized; the chuck base is provided with a cooling mechanism accommodating cavity, and the heat exchange seat is positioned in the cooling mechanism accommodating cavity and abuts against the bottom of the chuck base.

Furthermore, the ion generating mechanism comprises an assembly base body, an anode carrier, a cathode carrier, an air cavity base part and a cooling component, wherein the assembly base body is arranged in the vacuum inner cavity, the cathode carrier is arranged at the top of the assembly base body, the cooling component is arranged at the bottom of the cathode carrier and is used for cooling the cathode carrier, and the air cavity base part is arranged between the anode carrier and the cathode carrier; the air cavity base member is provided with an ion generation cavity and a plurality of ion emission through holes which are respectively communicated with the ion generation cavity.

Further, the cooling assembly comprises a cooling support piece, a third water inlet and a third water outlet; the cooling support piece is arranged at the bottom of the negative pole carrier piece, the cooling support piece and the negative pole carrier piece are arranged in a surrounding mode to form a second cooling liquid cavity, a third water inlet and a third water outlet are respectively formed in two ends of the cooling support piece, and the third water inlet and the third water outlet are respectively communicated with the second cooling liquid cavity; the positive pole carrier is provided with an electrode binding post which is used for being connected to the positive pole of an external power supply; the negative pole carrier is used for being connected with an external power negative pole.

Furthermore, the ion generating mechanism also comprises a cooling enclosing plate, the middle part of the cooling enclosing plate is provided with a second mounting hole, and the air cavity base piece is mounted on the cooling enclosing plate through the second mounting hole; the bottom of the cooling enclosing plate is provided with a liquid injection rod, the liquid injection rod is provided with a first liquid inlet channel and a first liquid outlet channel, the top of the cooling enclosing plate is provided with a cooling ring groove, the first liquid inlet channel and the first liquid outlet channel are both communicated with the cooling ring groove, and the cooling ring groove is used for cooling the base piece of the air cavity; the outside cover of annotating the liquid stick is equipped with the insulating part who is used for the protection to annotate the liquid stick.

Furthermore, the ion generating mechanism also comprises a plurality of magnetic components, the air cavity base part is provided with a plurality of limiting holes, and the limiting holes are arranged in an annular array to form a limiting hole ring; the plurality of ion emission through holes are in a linear array, are all located inside the limiting hole ring, and are assembled with the plurality of limiting holes in a one-to-one correspondence mode.

Further, the vacuum container also comprises a container body, a baffle door, a heating rod and a gas supply pipe; the shutter is rotatably arranged on the container body and used for opening or closing the vacuum inner cavity of the container body; the shutter is provided with the installation trench, and ion generation mechanism installs in the installation trench, and the quantity of heating rod is a plurality of, and a plurality of heating rods are annular array and set up in the vacuum cavity, and the gas supply pipe sets up in the vacuum cavity and is used for the gas supply to ion generation mechanism.

The invention has the beneficial effects that: in actual work, one or more groups of straight pipe assemblies are installed at two ends of the arc-shaped pipe assembly according to production requirements to be connected into a vacuum pipe mechanism, and then the vacuum pipe mechanism is connected to the installation seat to be connected into a target material ionization mechanism. And then connecting the target ionization mechanisms to a vacuum container respectively, and then loading the target to be ionized into a target chuck mechanism which clamps the target to be ionized. Then, a plurality of ion generating mechanisms and base materials (workpieces) are respectively arranged in the vacuum inner cavity. After the target ionization mechanisms and the ion generation mechanisms are installed, the vacuum pump vacuumizes the vacuum container and the inner tube, and then inert gas is filled into the inner tube. The target chuck mechanism is connected with the cathode, the arc striking mechanism is electrically connected with an arc striking circuit, the arc striking circuit is a conventional circuit, and the current output by the arc striking mechanism hits the target to be ionized clamped by the target chuck mechanism so as to generate arc spots on the surface of the target to be ionized. After the electromagnetic induction coil is electrified, a magnetic field is generated near the vacuum tube mechanism, and after the target to be ionized clamped by the target chuck mechanism is ionized to form charged target atoms, the charged target atoms are sputtered onto the surface of a base material (workpiece) in the vacuum cavity along a specific path under the action of the magnetic field force and deposit to form a coating. Simultaneously, under the screening effect of arc pipe subassembly and magnetic field, some heteroatom or ion by the ionization can be thrown to the inner tube of arc pipe subassembly or/and the inner tube of straight tube subassembly on, because the arc pipe subassembly has certain radian, can be better with some heteroatom or ion by the ionization keep off to the inner tube of arc pipe subassembly on, increase the filter effect of the coating machine of this application. Meanwhile, the target material ionization mechanism can generate a large amount of heat in the working process, and in order to reduce the temperature of the target material ionization mechanism, on one hand, the cooling mechanism can introduce cooling liquid to carry out cooling treatment on the ionized target material clamped by the target material chuck mechanism; on the other hand, the coolant liquid of external water tank is carried to the coolant liquid chamber via first water inlet to external water pump, and the coolant liquid in the coolant liquid chamber cools off vacuum tube mechanism, and simultaneously, the coolant liquid in the coolant liquid chamber is discharged to external water tank via first delivery port to realize the cyclic utilization of coolant liquid. The control cabinet can control the vacuum pump, the target ionization mechanisms and the ion generation mechanisms to automatically work.

The target ionization mechanism cools the ionization target and the vacuum tube mechanism clamped by the target chuck mechanism respectively through two cooling modes, so that the cooling effect of the target ionization mechanism is greatly improved, parts inside the target ionization mechanism are protected, the target ionization mechanism can stably and normally work, the failure rate and the maintenance rate of the target ionization mechanism are reduced, and the production cost is further reduced. Simultaneously, target chuck mechanism is provided with one section arc pipe assembly, and the arc pipe assembly has certain radian, can be better with some heteroatom or the ion fender of being ionized to the inner tube of arc pipe assembly on, increase the filter effect of the coating machine of this application.

Drawings

FIG. 1 is a schematic structural diagram of the present invention.

Fig. 2 is a schematic structural diagram of the target ionization mechanism of the present invention.

Fig. 3 is a schematic structural diagram of the arc striking mechanism, the target chuck mechanism and the cooling mechanism of the present invention.

FIG. 4 is a schematic view showing the structure of a water tube jacket according to the present invention.

Fig. 5 is a schematic perspective view of the ion generating mechanism of the present invention.

Fig. 6 is a first cross-sectional view of the ion generating mechanism of the present invention.

Fig. 7 is a second sectional view of the ion generating mechanism of the present invention.

FIG. 8 is a schematic structural view of an air cavity base member, ion-emitting through-holes, limiting holes, and limiting ring of the present invention.

Fig. 9 is a perspective view of a cooling shroud of the present invention.

Fig. 10 is a perspective view of the vacuum vessel according to the present invention.

Description of reference numerals:

a vacuum vessel 1; a vacuum chamber 11; a container body 12; a shutter 13; a heating rod 14; a gas supply pipe 15; an installation slot 16; a target material ionization mechanism 2; a mounting base 21; an arc striking mechanism 22; an arc runner 221; an arc starting connection rod 222; a drive mechanism 23; a target chuck mechanism 24; a chuck base 241; an insulating sleeve 2411; a chuck base 242; a collet seat sealing ring 2421; a cooling mechanism 25; a water pipe sleeve 251; a second water inlet 2511; a second water outlet 2512; a third receiving chamber 2513; a fourth receiving cavity 2514; water tube jacket seals 2515; a sealing gland 2516; a seal ring locking sleeve 2517; an inlet pipe 252; a water outlet pipe 253; a stop nut 2531; outlet pipe locking assembly 254; outlet pipe screw seat 2541; a heat exchange base 255; a first accommodating chamber 2551; a second accommodating chamber 2552; a through hole 2553; a vacuum tube mechanism 26; an inner tube 261; an outer tube 262; a first connection block 263; a second connection block 264; a locking screw 265; a first coolant cavity 266; an electromagnetic induction coil 267; an arced tube assembly 27; a striker plate 271; a straight tube assembly 28; an ion generating mechanism 3; the mounting base 31; a positive electrode carrier 32; a negative electrode carrier 33; an air cavity base member 34; a cooling assembly 35; an ion generating chamber 36; an ion-emitting through-hole 37; a cooling tray 38; the third water inlet 39; a third water outlet 310; the second coolant chamber 311; cooling the carrier seal ring 312; an air charging nozzle 313; an electrode post 314; cooling the shroud 315; a second mounting hole 316; a liquid injection bar 317; a first inlet passage 318; a first outlet channel 319; cooling ring groove 320; an insulating member 321; a limiting hole 323; a stop collar 324; a control cabinet 4; a vacuum pump 5.

Detailed Description

In order to facilitate understanding of those skilled in the art, the present invention will be further described with reference to the following examples and drawings, which are not intended to limit the present invention.

As shown in fig. 1, fig. 2, fig. 3, fig. 5 and fig. 10, the elbow filter coating machine provided by the present invention comprises a control cabinet 4 and a vacuum pump 5, and further comprises a vacuum container 1, a plurality of target ionization mechanisms 2 and a plurality of ion generation mechanisms 3;

the vacuum container 1 is provided with a vacuum inner cavity 11, and the plurality of ion generating mechanisms 3 are respectively arranged in the vacuum inner cavity 11 and used for generating ions to the vacuum inner cavity 11; the target ionization mechanisms 2 are respectively connected to the vacuum container 1; the vacuum pump 5 is connected to the vacuum container 1 and is used for vacuumizing the vacuum container 1; the vacuum pump 5, the target ionization mechanisms 2 and the ion generation mechanisms 3 are electrically connected with the control cabinet 4;

the target ionization mechanism 2 comprises a mounting seat 21, an arc striking mechanism 22, a driving mechanism 23, a target chuck mechanism 24, a cooling mechanism 25 and a vacuum tube mechanism 26; the vacuum tube mechanism 26 comprises an arc tube assembly 27 and a plurality of groups of straight tube assemblies 28, wherein two ends of the arc tube assembly 27 are respectively connected with at least one group of straight tube assemblies 28; the arc tube assembly 27 and the straight tube assembly 28 both comprise an inner tube 261, an outer tube 262, a first connecting block 263, a second connecting block 264 and a plurality of locking pieces 265;

the vacuum tube mechanism 26 is connected to the vacuum container 1, and the inner tube 261 is communicated with the vacuum inner cavity 11; two ends of the inner tube 261 are respectively connected to the first connecting block 263 and the second connecting block 264, two ends of the outer tube 262 are respectively connected to the first connecting block 263 and the second connecting block 264, the outer tube 262 is sleeved outside the inner tube 261, and a first cooling liquid cavity 266 is arranged between the outer tube 262 and the inner tube 261;

the outer pipe 262 is provided with a first water inlet (not shown) and a first water outlet (not shown), and both the first water inlet and the first water outlet are communicated with the first cooling liquid cavity 266; the first connecting block 263 is connected to the mounting base 21 or a second connecting block 264 of an adjacent arc-shaped pipe assembly 27 or a second connecting block 264 of an adjacent straight pipe assembly 28, the second connecting block 264 is connected to the first connecting block 263 of an adjacent arc-shaped pipe assembly 27 or the first connecting block 263 of an adjacent straight pipe assembly 28, a plurality of locking members 265 are used for locking the first connecting block 263 to the mounting base 21, and a plurality of locking screws 265 are also used for locking the second connecting block 264 to the first connecting block 263 of an adjacent arc-shaped pipe assembly 27 or the first connecting block 263 of an adjacent straight pipe assembly 28; an electromagnetic induction coil 267 is sleeved outside the outer tube 262; preferably, the locking member 265 is a locking screw.

The target chuck mechanism 24 is arranged on the mounting base 21 and located inside the inner tube 261, and the target chuck mechanism 24 is used for clamping the target to be ionized; the cooling mechanism 25 is arranged on the mounting base 21 and is used for cooling the target to be ionized clamped by the target chuck mechanism 24; the arc striking mechanism 22 is rotatably connected to the mounting base 21 and located inside the inner tube 261, the driving mechanism 23 is disposed on the mounting base 21 and is used for driving the arc striking mechanism 22 to rotate, and the arc striking mechanism 22 is used for enabling the target to be ionized, which is clamped by the target chuck mechanism 24, to generate arc spots.

The sputtering principle is as follows: firstly, inert gas (usually Ar gas) generates glow discharge phenomenon to generate charged ions, and positive ions (usually Ar +) bombard a cathode (a target made of a deposition material) in a vacuum chamber; the charged ions are accelerated by the electric field and then impact the surface of the target material, so that target material atoms are bombarded and fly out, secondary electrons are generated at the same time, and the secondary electrons impact gas atoms to form more charged ions; the target material atoms carry enough kinetic energy to sputter to the surface of the substrate (workpiece) for deposition to form a coating. After the target material atoms pass through the plasma region and are bombarded and collided by high-energy electrons, part of the target material atoms are ionized, and the ionized target material atoms are not necessarily in a single ion state, but are usually mainly in a cluster shape.

In actual operation, one or more straight tube assemblies 28 are connected to the two ends of the arced tube assembly 27 as required to form the vacuum tube mechanism 26. When two sets of straight tube assemblies 28 are connected to one end of the arced tube assembly 27, then the first connecting block 263 of one set of straight tube assemblies 28 is connected to the second connecting block 264 of the adjacent set of straight tube assemblies 28, thereby connecting the adjacent sets of straight tube assemblies 28. Then, the vacuum tube mechanism 26 is connected to the mount 21, thereby connecting the target ionization mechanism 2. Then, a plurality of target material ionization mechanisms 2 are respectively connected to the vacuum container 1, and then the target material to be ionized is loaded into the target material chuck mechanism 24, and the target material chuck mechanism 24 clamps the target material to be ionized. Then, the ion generating mechanisms 3 and the substrate (workpiece) are respectively arranged in the vacuum chamber 11. After the target ionization mechanisms 2 and the ion generation mechanisms 3 are mounted, the vacuum pump 5 vacuumizes the vacuum container 1 and the inner tube 261, and then fills the inert gas into the inner tube 261. The target chuck mechanism 24 is connected with the cathode, the arc striking mechanism 22 is electrically connected with an arc striking circuit, the arc striking circuit is a conventional circuit, and the current output by the arc striking mechanism 22 hits the target to be ionized clamped by the target chuck mechanism 24 so as to generate arc spots on the surface of the target to be ionized. When the electromagnetic induction coil 267 is energized, a magnetic field is generated near the vacuum tube mechanism 26, and after the target to be ionized, which is clamped by the target chuck mechanism 24, is ionized to form charged target atoms, the charged target atoms are sputtered to the surface of the substrate (workpiece) in the vacuum cavity 11 along a specific path under the action of the magnetic field force and deposited to form a coating. Meanwhile, under the screening effect of the arc tube assembly 27 and the magnetic field, certain ionized hetero atoms or ions can be thrown onto the inner tube 261 of the arc tube assembly 27 or/and the inner tube 261 of the straight tube assembly 28, and because the arc tube assembly 27 has a certain radian, certain ionized hetero atoms or ions can be better kept off onto the inner tube 261 of the arc tube assembly 27, so that the filtering effect of the coating machine is improved. Meanwhile, the target material ionization mechanism 2 generates a large amount of heat in the working process, and in order to reduce the temperature of the target material ionization mechanism 2, on one hand, the cooling mechanism 25 can introduce cooling liquid to cool the ionized target material clamped by the target material chuck mechanism 24; on the other hand, the external water pump conveys the coolant of the external water tank to the coolant cavity 266 through the first water inlet, the coolant in the coolant cavity 266 cools the vacuum tube mechanism 26, and meanwhile, the coolant in the coolant cavity 266 is discharged to the external water tank through the first water outlet, so that the coolant is recycled. The control cabinet 4 can control the vacuum pump 5, the target ionization mechanisms 2 and the ion generation mechanisms 3 to automatically work.

The target ionization mechanism 2 of the application cools the ionization target and the vacuum tube mechanism 26 clamped by the target chuck mechanism 24 respectively through two cooling modes, so that the cooling effect of the target ionization mechanism 2 is greatly improved, parts inside the target ionization mechanism 2 are protected, the target ionization mechanism 2 can stably and normally work, the failure rate and the maintenance rate of the target ionization mechanism 2 are reduced, and the production cost is further reduced. Meanwhile, as the arc-shaped pipe assembly 27 has a certain radian, certain ionized heteroatoms or ions can be better blocked on the inner pipe 261 of the arc-shaped pipe assembly 27, and the filtering effect of the coating machine is improved.

Specifically, the arc striking mechanism 22 includes an arc striking head 221 and an arc striking head connecting rod 222, one end of the arc striking head connecting rod 222 is rotatably connected to the mounting base 21, and the other end of the arc striking head connecting rod 222 is connected to the arc striking head 221; the driving mechanism 23 is used for driving the arc striking head connecting rod 222 to rotate. In actual operation, the driving mechanism 23 drives the arc-striking head connecting rod 222 to rotate, the arc-striking head connecting rod 222 drives the arc-striking head 221 to rotate, and when the arc-striking head 221 rotates to the surface of the target to be ionized clamped by the target chuck mechanism 24, the arc-striking head 221 outputs current to hit the target to be ionized clamped by the target chuck mechanism 24, so that arc spots are generated on the surface of the target to be ionized. When the arc striking head 221 does not work, the driving mechanism 23 drives the arc striking head connecting rod 222 to rotate so as to drive the arc striking head 221 to rotate to the position to be worked. The arc striking mechanism 22 has a simple structure and high controllability.

As shown in fig. 3, in the present embodiment, the cooling mechanism 25 includes a water pipe sleeve 251, a water inlet pipe 252, a water outlet pipe 253, a water outlet pipe locking assembly 254 and a heat exchange seat 255, the heat exchange seat 255 is disposed at one side of the installation seat 21 and located inside the inner pipe 261, and the water pipe sleeve 251 and the water outlet pipe locking assembly 254 are disposed at the other side of the installation seat 21; the water pipe sleeve 251 is provided with a second water inlet 2511 and a second water outlet 2512, the heat exchange base 255 is provided with a first accommodating cavity 2551, a second accommodating cavity 2552 and a through hole 2553, the through hole 2553 is communicated with the first accommodating cavity 2551 and the second accommodating cavity 2552, the heat exchange base 255 is connected with the target chuck mechanism 24, and the first accommodating cavity 2551 is located at one end of the heat exchange base 255 close to the target chuck mechanism 24; the water outlet pipe 253 is sleeved outside the water inlet pipe 252, and a circulation gap (not shown) is formed between the water inlet pipe 252 and the water outlet pipe 253; the mounting seat 21 is provided with a first mounting hole (not shown in the figures), the first mounting hole penetrates through the mounting seat 21, one end of the water inlet pipe 252 is connected to the water pipe sleeve 251, the other end of the water inlet pipe 252 penetrates through the first mounting hole and is connected to the heat exchange seat 255, and the water inlet pipe 252 is communicated with a second water inlet 2511 and a first accommodating cavity 2551; one end of the water outlet pipe 253 is connected to the water pipe sleeve 251, the other end of the water outlet pipe 253 penetrates through the first mounting hole and is connected to the heat exchange base 255, and the water outlet pipe 253 is communicated with a second water outlet 2512 and a second accommodating cavity 2552; outlet pipe locking assembly 254 is used to lock outlet pipe 253 to mount 21.

In actual work, the external water pump conveys the cooling liquid of the external water tank to the first accommodating cavity 2551 through the second water inlet 2511 and the water inlet pipe 252, and the cooling liquid in the first accommodating cavity 2551 absorbs the heat of the target chuck mechanism 24 through the heat exchange seat 255, so that the temperature of the target chuck mechanism 24 is reduced, the target chuck mechanism 24 can be ensured to stably and normally work, the service life of the target chuck mechanism 24 is prolonged, the failure rate and the maintenance rate of the target chuck mechanism 24 are reduced, and the production cost is reduced. Meanwhile, the cooling liquid in the first accommodating cavity 2551 flows into the second accommodating cavity 2552 through the through hole 2553, and the cooling liquid in the second accommodating cavity 2552 is discharged to an external water tank through the water outlet pipe 253 and the second water outlet 2512. The heat exchange base 255 of the present application is provided with the first accommodating cavity 2551 and the second accommodating cavity 2552, which can ensure that the temperature of the cooling liquid conveyed to the first accommodating cavity 2551 is the lowest to the greatest extent, thereby improving the cooling effect of the target chuck mechanism 24. If the heat exchange base 255 is provided with only one accommodating cavity, the coolant that newly flows into the accommodating cavity will be mixed with the original coolant in the accommodating cavity, and since the original coolant in the accommodating cavity already absorbs the heat of the target chuck mechanism 24, the temperature of the coolant in the accommodating cavity will be higher after the two are mixed, thereby reducing the cooling effect of the coolant in the accommodating cavity. The cooling mechanism 25 is reasonable in structural design, and the cooling effect of the cooling mechanism 25 on the target chuck mechanism 24 is good.

Specifically, the outlet pipe locking assembly 254 includes an outlet pipe threaded seat 2541, the outlet pipe threaded seat 2541 is connected to the mounting seat 21, the outlet pipe threaded seat 2541 is provided with an outlet pipe threaded hole (not shown in the drawings), the outlet pipe threaded hole penetrates through the outlet pipe threaded seat 2541, and the inner wall of the outlet pipe threaded hole is provided with a fourth internal thread (not shown in the drawings); the outer wall of the water outlet pipe 253 is provided with a fourth external thread (not shown in the figures) for threaded connection with the fourth internal thread. In actual operation, outlet pipe 253 is connected to outlet pipe screw seat 2541 through the threaded fit of fourth external thread and fourth internal thread, so that outlet pipe 253 can be mounted and dismounted conveniently, and meanwhile, cooling mechanism 25 can be stably mounted on mounting seat 21 by water pipe locking assembly 254, thereby ensuring that cooling mechanism 25 can work stably.

As shown in fig. 3 and fig. 4, in this embodiment, the water tube sleeve 251 is provided with a third receiving cavity 2513 and a fourth receiving cavity 2514, and the fourth receiving cavity 2514 is communicated with the third receiving cavity 2513 and the outside; the second water inlet 2511 is communicated with the third accommodating cavity 2513, and the second water outlet 2512 is communicated with the fourth accommodating cavity 2514; a first internal thread (not shown) is arranged on the inner wall of the third accommodating cavity 2513, and a first external thread (not shown) for threaded connection with the first internal thread is arranged on the outer wall of the water inlet pipe 252; the inner wall of the fourth receiving cavity 2514 is provided with a second internal thread (not shown), and the outer wall of the water outlet pipe 253 is provided with a second external thread (not shown) for being in threaded connection with the second internal thread.

In actual work, after the water inlet pipe 252 is inserted into the water outlet pipe 253, one end of the water inlet pipe 252 is connected to the water pipe sleeve 251 through the thread fit of the first external thread and the first internal thread, and the second water inlet 2511 is communicated with the water inlet pipe 252 through the third accommodating cavity 2513; one end of the water outlet pipe 253 is connected to the water pipe sleeve 251 through the thread matching of the second external thread and the second internal thread, and the second water outlet 2512 is communicated with the water outlet pipe 253 through the fourth accommodating cavity 2514. The installation and the dismantlement of the water pipe cover 251, inlet tube 252 and outlet pipe 253 of this application are convenient, and simultaneously, second water inlet 2511 and the equal detachably connection of second delivery port 2512 are in water pipe cover 251, when a certain part of water pipe cover 251, second water inlet 2511, second delivery port 2512, inlet tube 252 or outlet pipe 253 goes wrong, only need change the part that corresponds, easy maintenance, cost of maintenance is also low moreover.

Specifically, the water pipe sleeve 251 is provided with a water pipe sleeve sealing ring 2515, a sealing pressing sleeve 2516 and a sealing ring locking sleeve 2517; the water pipe sleeve sealing ring 2515 and the sealing pressing sleeve 2516 are respectively sleeved on the outer wall of the water outlet pipe 253, and the sealing pressing sleeve 2516 is used for pressing the water pipe sleeve sealing ring 2515 on the water pipe sleeve 251; a third internal thread (not shown) is arranged on the inner wall of the sealing ring locking sleeve 2517, and a third external thread (not shown) for threaded connection with the third internal thread is arranged on the outer wall of the water pipe sleeve 251; the seal ring locking sleeve 2517 snaps the seal pressing sleeve 2516 and is used for locking the seal pressing sleeve 2516 to the water pipe sleeve 251. In actual work, the water pipe sleeve sealing ring 2515 and the sealing pressing sleeve 2516 are respectively sleeved on the outer wall of the water outlet pipe 253, then the water outlet pipe 253 is connected with the water pipe sleeve 251, after the water outlet pipe 253 is connected with the water pipe sleeve 251, the sealing ring locking sleeve 2517 is connected with the water pipe sleeve 251 through the threaded fit of the third internal thread and the third external thread, and then the sealing pressing sleeve 2516 and the water pipe sleeve sealing ring 2515 are locked on the water pipe sleeve 251. The water tube jacket seal 2515 is used to seal the gap between the water outlet tube 253 and the water tube jacket 251 to prevent water leakage between the water outlet tube 253 and the water tube jacket 251.

As shown in fig. 2, in the present embodiment, a plurality of striker plates 271 are spaced inside the inner tube 261 of the arc tube assembly 27 or/and the straight tube assembly 28. In practical operation, the plurality of baffles 271 of the inner pipe 261 of the arc pipe assembly 27 or/and the straight pipe assembly 28 can effectively baffle some ionized hetero atoms or ions onto the inner pipe 261 of the arc pipe assembly 27 or/and the straight pipe assembly 28, and the filtering effect of the coating machine of the application is increased.

As shown in fig. 2 and fig. 3, in the present embodiment, the target chuck mechanism 24 includes a chuck base 241 and a chuck base 242, the chuck base 241 is connected to the mounting base 21, the chuck base 242 is connected to an end of the chuck base 241 far from the mounting base 21, and the chuck base 242 is used for clamping the target to be ionized; the chuck base 241 is provided with a cooling mechanism accommodating cavity (not shown), and the heat exchanging seat 255 is located in the cooling mechanism accommodating cavity and abuts against the bottom of the chuck base 242. The target chuck mechanism 24 has a compact structure, and the chuck base 242 can effectively clamp the target to be ionized. Preferably, the chuck base 241 is made of an insulating material, so that the current output by the arc striking mechanism 22 can be effectively prevented from being transmitted to the mounting base 21 to cause a current leakage phenomenon, and the production safety can be ensured.

Specifically, a chuck seat sealing ring 2421 is arranged between the heat exchange seat 255 and the chuck seat 242, and the chuck seat sealing ring 2421 is used for sealing a gap between the heat exchange seat 255 and the chuck seat 242, so that the sealing performance is good. In practice, the chuck base sealing ring 2421 can prevent water leakage between the heat exchange base 255 and the chuck base 242.

Specifically, the chuck base 241 is provided with an insulating sleeve 2411, and the insulating sleeve 2411 is sleeved on the outer side of the chuck base 242. In practical operation, the insulating sleeve 2411 can protect the chuck base 242 and the cooling mechanism 25 disposed inside the chuck base 242, and can effectively prevent the current output by the arc striking mechanism 22 from damaging the chuck base 242 and the cooling mechanism 25 disposed inside the chuck base 242.

Specifically, the outer wall of the water outlet pipe 253 is connected with a limit nut 2531, the limit nut 2531 is located in the cooling mechanism accommodating cavity, and the limit nut 2531 is used for abutting against the chuck base 241. In practical operation, stop nut 2531 can limit the position of outlet pipe 253 in the cooling mechanism accommodating cavity, and is convenient for installation and positioning of outlet pipe 253. Preferably, the limiting nut 2531 is a copper nut. Copper nut has fine ductility, because target ionization mechanism 2 can produce a large amount of heats at the in-process of work, the condition of expend with heat and contract with cold can appear in outlet pipe 253, and copper nut can follow outlet pipe 253's change and change well, prevents that outlet pipe 253 or stop nut 2531 from appearing damaging.

As shown in fig. 5 to 7, in the present embodiment, the ion generating mechanism 3 includes an assembly base 31, a positive carrier 32, a negative carrier 33, an air cavity base member 34 and a cooling member 35, the assembly base 31 is installed in the vacuum cavity 11, the negative carrier 33 is installed on the top of the assembly base 31, the cooling member 35 is installed on the bottom of the negative carrier 33 and is used for cooling the negative carrier 33, after the positive carrier 32 and the negative carrier 33 are powered on, an electric field is generated between the positive carrier 32 and the negative carrier 33, and the air cavity base member 34 is disposed between the positive carrier 32 and the negative carrier 33; the air cavity base member 34 is provided with an ion generation cavity 36 and a plurality of ion emitting through-holes 37, and the plurality of ion emitting through-holes 37 are respectively communicated with the ion generation cavity 36.

In actual operation, the ion generating chamber 36 is filled with gas, the gas in the ion generating chamber 36 is broken down under the action of the electric field between the positive electrode carrier 32 and the negative electrode carrier 33, and the physical phenomenon of gas discharge, namely glow discharge phenomenon, is presented, plasma is formed by gas discharge, the plasma is ionized gas, and is an aggregation of ions, electrons, high-energy atoms and the like, the positive ions and the electrons always appear in pairs, the total number is approximately equal, the whole body is quasi-electroneutrality, and the ionized state is formed by charged particles and is called as the fourth state of matter, namely the plasma state. In the sputtering coating process, gas and target metal atoms are impacted and ionized by high-energy electrons into plasma consisting of conductive particles such as electrons, gas ions and metal ions. The plasma moves from the ion emitting through-hole 37 to the vacuum chamber 11 as bombarding particles for the sputter coating process. During the gas discharge process, the negative carrier 33 is in a super high temperature state, and flowing cooling liquid is introduced from the cooling assembly 35 to effectively and rapidly cool the negative carrier 33 and the air cavity base member 34.

As shown in fig. 6 and 7, in the present embodiment, the cooling assembly 35 includes a cooling holder 38, a third water inlet 39 and a third water outlet 310; the cooling support piece 38 is arranged at the bottom of the negative pole carrier piece 33, the cooling support piece 38 and the negative pole carrier piece 33 are arranged in an enclosing mode to form a second cooling liquid cavity 311, the third water inlet 39 and the third water outlet 310 are respectively arranged at two ends of the cooling support piece 38, and the third water inlet 39 and the third water outlet 310 are respectively communicated with the second cooling liquid cavity 311; the positive pole carrier 32 is provided with an electrode binding post 314, and the electrode binding post 314 is used for being connected to the positive pole of an external power supply; the negative pole carrier 33 is used for being connected with an external power negative pole; specifically, a cooling holder seal ring 312 is installed between the cooling holder 38 and the negative electrode carrier 33, and the cooling holder seal ring 312 is used for sealing a gap between the cooling holder 38 and the negative electrode carrier 33. When energized, an electric field is generated between the positive carrier 32 and the negative carrier 33. Specifically, the cooling liquid is guided into the second cooling liquid cavity 311 from the third water inlet 39, and directly contacts with the negative pole carrier 33, the cooling liquid in the second cooling liquid cavity 311 flows out from the third water outlet 310, and the cooling liquid is in a real-time flowing state, so that the negative pole carrier 33 can be effectively and quickly cooled, and the service life is prolonged. After the cooling liquid is introduced into the second cooling liquid cavity 311, the cooling carrier sealing ring 312 is used to prevent the cooling liquid from overflowing the second cooling liquid cavity 311, and further prevent the cooling liquid from being wasted and polluting other parts. The electrode terminal 314 is connected to the positive pole of the external power supply, the negative pole carrier 33 is connected to the negative pole of the external power supply, and the positive pole carrier 32 and the negative pole carrier 33 are electrified to provide an electric field for the ion generation cavity 36. The negative electrode carrier 33 is provided with an inflation nozzle 313, the inflation nozzle 313 is communicated with the ion generation cavity 36, and the inflation nozzle 313 is connected with an external inflation device to supply sufficient gas for the ion generation cavity 36. Ensuring the work to be carried out stably.

As shown in fig. 7 and 9, in the present embodiment, the ion generating mechanism 3 further includes a cooling enclosure 315, a second mounting hole 316 is provided in the middle of the cooling enclosure 315, and the air cavity base member 34 is mounted on the cooling enclosure 315 via the second mounting hole 316; the bottom of the cooling enclosing plate 315 is provided with a liquid injection rod 317, the liquid injection rod 317 is provided with a first liquid inlet channel 318 and a first liquid outlet channel 319, the top of the cooling enclosing plate 315 is provided with a cooling ring groove 320, the first liquid inlet channel 318 and the first liquid outlet channel 319 are both communicated with the cooling ring groove 320, in actual work, cooling liquid sequentially flows through the first liquid inlet channel 318, the cooling ring groove 320 and the first liquid outlet channel 319, and the cooling ring groove 320 is used for cooling the base part 34 of the air cavity; the outer side of the liquid injection rod 317 is sleeved with an insulating component 321 for protecting the liquid injection rod 317. Specifically, the shape of the second mounting hole 316 matches the shape of the air cavity base member 34, with the air cavity base member 34 being located in the middle of the cooling shroud 315. The plane of the cooling ring groove 320 is perpendicular to the axial center line of the liquid injection rod 317, the cooling component 35 cools the negative electrode carrier 33, the air cavity base part 34 is located on the negative electrode carrier 33, therefore, the cooling component 35 can cool the bottom of the air cavity base part 34, and the cooling ring groove 320 is used for cooling the edge of the air cavity base part 34. The cooling component 35 and the cooling ring groove 320 cool a plurality of positions of the air cavity base part 34 at the same time, so that the cooling effect can be enhanced, and the process of discharging the plasma formed in the ion generating cavity 36 by gas can be smoothly carried out. Because the liquid injection rod 317 is arranged between the negative electrode carrier 33 and the positive electrode carrier 32 and is easily broken down and burnt, the insulating component 321 can enable the liquid injection rod 317 to be in an insulated state, the liquid injection rod 317 is effectively protected, and the service life is prolonged.

As shown in fig. 7 and 8, in the present embodiment, the ion generating mechanism 3 further includes a plurality of magnetic components (not shown in the drawings), the air cavity base member 34 is provided with a plurality of limiting holes 323, and the plurality of limiting holes 323 are arranged in an annular array to form a limiting hole ring 324; the plurality of ion emitting through holes 37 are in a linear array, the plurality of ion emitting through holes 37 are all located inside the limiting hole ring 324, and the plurality of magnetic components and the plurality of limiting holes 323 are assembled in a one-to-one correspondence mode. Specifically, the magnetic component is used for controlling the speed of ions emitted from the ion emission through hole 37, and the movement direction and the track of the ions are changed by controlling the position relation between the magnetic component and the ion emission through hole 37, so that the ions are used as bombardment particles in the sputtering coating process, the target bombardment effect is good, and the utilization rate of the target is improved.

As shown in fig. 10, in the present embodiment, the vacuum vessel 1 further includes a vessel body 12, a shutter 13, a heating rod 14, and a gas supply pipe 15; the shutter 13 is rotatably arranged on the container body 12, and the shutter 13 is used for opening or closing the vacuum cavity 11 of the container body 12; the shutter 13 is provided with installation trench 16, and ion generation mechanism 3 installs in installation trench 16, and the quantity of heating rod 14 is a plurality of, and a plurality of heating rods 14 are the annular array and set up in vacuum inner chamber 11, and a plurality of heating rods 14 are used for providing the heat to vacuum inner chamber 11 for vacuum inner chamber 11's heat distributes evenly, and gas supply pipe 15 sets up in vacuum inner chamber 11 and is used for supplying gas to ion generation mechanism 3. The stop door 13 can facilitate the operator to take and place the workpiece. The heating rod 14 is used for controlling the temperature of the vacuum cavity 11 so as to meet the coating requirements of various workpieces.

All the technical features in the embodiment can be freely combined according to actual needs.

The above embodiments are preferred implementations of the present invention, and the present invention can be implemented in other ways without departing from the spirit of the present invention.

Claims (10)

1. The utility model provides a return bend filtration formula coating machine, includes switch board and vacuum pump, its characterized in that: the device also comprises a vacuum container, a plurality of target ionization mechanisms and a plurality of ion generation mechanisms;

the vacuum container is provided with a vacuum inner cavity, and the ion generating mechanisms are respectively arranged in the vacuum inner cavity and are used for generating ions to the vacuum inner cavity; the target ionization mechanisms are respectively connected to the vacuum container; the vacuum pump is connected to the vacuum container and is used for vacuumizing the vacuum container; the vacuum pump, the target ionization mechanisms and the ion generation mechanisms are all electrically connected with the control cabinet;

the target ionization mechanism comprises a mounting seat, an arc striking mechanism, a driving mechanism, a target chuck mechanism, a cooling mechanism and a vacuum tube mechanism; the vacuum tube mechanism comprises an arc tube assembly and a plurality of groups of straight tube assemblies, and two ends of the arc tube assembly are respectively connected with at least one group of straight tube assemblies; the arc-shaped pipe assembly and the straight pipe assembly respectively comprise an inner pipe, an outer pipe, a first connecting block, a second connecting block and a plurality of locking pieces;

the vacuum tube mechanism is connected to the vacuum container, and the inner tube is communicated with the vacuum inner cavity; the two ends of the inner pipe are respectively connected to the first connecting block and the second connecting block, the two ends of the outer pipe are respectively connected to the first connecting block and the second connecting block, the outer pipe is sleeved on the outer side of the inner pipe, and a first cooling liquid cavity is arranged between the outer pipe and the inner pipe;

the outer pipe is provided with a first water inlet and a first water outlet, and the first water inlet and the first water outlet are both communicated with the first cooling liquid cavity; the first connecting block is connected to the mounting seat or a second connecting block of an adjacent arc-shaped pipe assembly or a second connecting block of an adjacent straight pipe assembly, the second connecting block is connected to the first connecting block of the adjacent arc-shaped pipe assembly or the first connecting block of the adjacent straight pipe assembly, the plurality of locking parts are used for locking the first connecting block to the mounting seat, and the plurality of locking screws are also used for locking the second connecting block to the first connecting block of the adjacent arc-shaped pipe assembly or the first connecting block of the adjacent straight pipe assembly; an electromagnetic induction coil is sleeved on the outer side of the outer tube;

the target chuck mechanism is arranged on the mounting seat and positioned inside the inner tube, and is used for clamping the target to be ionized; the cooling mechanism is arranged on the mounting seat and is used for cooling the target to be ionized clamped by the target chuck mechanism; the arc striking mechanism is rotatably connected to the mounting seat and located inside the inner tube, the driving mechanism is arranged on the mounting seat and used for driving the arc striking mechanism to rotate, and the arc striking mechanism is used for enabling the target to be ionized, clamped by the target chuck mechanism, to generate arc spots.

2. The elbow filtration coating machine according to claim 1, wherein: the cooling mechanism comprises a water pipe sleeve, a water inlet pipe, a water outlet pipe locking assembly and a heat exchange seat, the heat exchange seat is arranged on one side of the mounting seat and is positioned in the inner pipe, and the water pipe sleeve and the water outlet pipe locking assembly are arranged on the other side of the mounting seat; the water pipe sleeve is provided with a second water inlet and a second water outlet, the heat exchange seat is provided with a first accommodating cavity, a second accommodating cavity and a through hole, the through hole is communicated with the first accommodating cavity and the second accommodating cavity, the heat exchange seat is connected with the target chuck mechanism, and the first accommodating cavity is positioned at one end, close to the target chuck mechanism, of the heat exchange seat; the water outlet pipe is sleeved outside the water inlet pipe, and a circulation gap is formed between the water inlet pipe and the water outlet pipe; the mounting seat is provided with a first mounting hole, the first mounting hole penetrates through the mounting seat, one end of the water inlet pipe is connected to the water pipe sleeve, the other end of the water inlet pipe penetrates through the first mounting hole and is connected to the heat exchange seat, and the water inlet pipe is communicated with the second water inlet and the first accommodating cavity; one end of the water outlet pipe is connected with the water pipe sleeve, the other end of the water outlet pipe penetrates through the first mounting hole and is connected with the heat exchange seat, and the water outlet pipe is communicated with the second water outlet and the second accommodating cavity; the water outlet pipe locking assembly is used for locking the water outlet pipe on the mounting seat.

3. The elbow filtration coating machine according to claim 2, wherein: the water pipe sleeve is provided with a third accommodating cavity and a fourth accommodating cavity, and the fourth accommodating cavity is communicated with the third accommodating cavity and the outside; the second water inlet is communicated with the third accommodating cavity, and the second water outlet is communicated with the fourth accommodating cavity; the inner wall of the third accommodating cavity is provided with a first internal thread, and the outer wall of the water inlet pipe is provided with a first external thread which is in threaded connection with the first internal thread; and a second internal thread is arranged on the inner wall of the fourth accommodating cavity, and a second external thread which is in threaded connection with the second internal thread is arranged on the outer wall of the water outlet pipe.

4. The elbow filtration coating machine according to claim 1, wherein: and a plurality of material baffle plates are arranged inside the inner pipe of the arc pipe assembly or/and the straight pipe assembly at intervals.

5. The elbow filtration coating machine according to claim 2, wherein: the target material chuck mechanism comprises a chuck base and a chuck base, the chuck base is connected to the mounting seat, the chuck base is connected to one end, far away from the mounting seat, of the chuck base, and the chuck base is used for clamping a target material to be ionized; the chuck base is provided with a cooling mechanism accommodating cavity, and the heat exchange seat is positioned in the cooling mechanism accommodating cavity and abuts against the bottom of the chuck base.

6. The elbow filtration coating machine according to claim 1, wherein: the ion generation mechanism comprises an assembly matrix, an anode carrier, a cathode carrier, an air cavity base part and a cooling component, wherein the assembly matrix is arranged in a vacuum inner cavity, the cathode carrier is arranged at the top of the assembly matrix, the cooling component is arranged at the bottom of the cathode carrier and is used for cooling the cathode carrier, and the air cavity base part is arranged between the anode carrier and the cathode carrier; the air cavity base member is provided with an ion generation cavity and a plurality of ion emission through holes which are respectively communicated with the ion generation cavity.

7. The elbow filtration coating machine according to claim 6, wherein: the cooling assembly comprises a cooling support piece, a third water inlet and a third water outlet; the cooling support piece is arranged at the bottom of the negative pole carrier piece, the cooling support piece and the negative pole carrier piece are arranged in a surrounding mode to form a second cooling liquid cavity, a third water inlet and a third water outlet are respectively formed in two ends of the cooling support piece, and the third water inlet and the third water outlet are respectively communicated with the second cooling liquid cavity; the positive pole carrier is provided with an electrode binding post which is used for being connected to the positive pole of an external power supply; the negative pole carrier is used for being connected with an external power negative pole.

8. The elbow filtration coating machine according to claim 6, wherein: the ion generating mechanism also comprises a cooling enclosing plate, the middle part of the cooling enclosing plate is provided with a second mounting hole, and the air cavity base piece is mounted on the cooling enclosing plate through the second mounting hole; the bottom of the cooling enclosing plate is provided with a liquid injection rod, the liquid injection rod is provided with a first liquid inlet channel and a first liquid outlet channel, the top of the cooling enclosing plate is provided with a cooling ring groove, the first liquid inlet channel and the first liquid outlet channel are both communicated with the cooling ring groove, and the cooling ring groove is used for cooling the base piece of the air cavity; the outside cover of annotating the liquid stick is equipped with the insulating part who is used for the protection to annotate the liquid stick.

9. The elbow filtration coating machine according to claim 6, wherein: the ion generating mechanism also comprises a plurality of magnetic components, the air cavity base part is provided with a plurality of limiting holes, and the limiting holes are arranged in an annular array to form a limiting hole ring; the plurality of ion emission through holes are in a linear array, are all located inside the limiting hole ring, and are assembled with the plurality of limiting holes in a one-to-one correspondence mode.

10. The elbow filtration coating machine according to claim 1, wherein: the vacuum container also comprises a container body, a baffle door, a heating rod and a gas supply pipe; the shutter is rotatably arranged on the container body and used for opening or closing the vacuum inner cavity of the container body; the shutter is provided with the installation trench, and ion generation mechanism installs in the installation trench, and the quantity of heating rod is a plurality of, and a plurality of heating rods are annular array and set up in the vacuum cavity, and the gas supply pipe sets up in the vacuum cavity and is used for the gas supply to ion generation mechanism.

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