CN111823134A - Spindle assembly, spindle mounting base, substrate grinding equipment and spindle dismounting method - Google Patents
Spindle assembly, spindle mounting base, substrate grinding equipment and spindle dismounting method Download PDFInfo
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- CN111823134A CN111823134A CN202010749102.9A CN202010749102A CN111823134A CN 111823134 A CN111823134 A CN 111823134A CN 202010749102 A CN202010749102 A CN 202010749102A CN 111823134 A CN111823134 A CN 111823134A
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- spindle
- main shaft
- component
- body portion
- main body
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B24—GRINDING; POLISHING
- B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
- B24B41/00—Component parts such as frames, beds, carriages, headstocks
- B24B41/04—Headstocks; Working-spindles; Features relating thereto
- B24B41/047—Grinding heads for working on plane surfaces
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B24—GRINDING; POLISHING
- B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
- B24B7/00—Machines or devices designed for grinding plane surfaces on work, including polishing plane glass surfaces; Accessories therefor
- B24B7/20—Machines or devices designed for grinding plane surfaces on work, including polishing plane glass surfaces; Accessories therefor characterised by a special design with respect to properties of the material of non-metallic articles to be ground
- B24B7/22—Machines or devices designed for grinding plane surfaces on work, including polishing plane glass surfaces; Accessories therefor characterised by a special design with respect to properties of the material of non-metallic articles to be ground for grinding inorganic material, e.g. stone, ceramics, porcelain
- B24B7/228—Machines or devices designed for grinding plane surfaces on work, including polishing plane glass surfaces; Accessories therefor characterised by a special design with respect to properties of the material of non-metallic articles to be ground for grinding inorganic material, e.g. stone, ceramics, porcelain for grinding thin, brittle parts, e.g. semiconductors, wafers
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- Mechanical Engineering (AREA)
- Chemical & Material Sciences (AREA)
- Ceramic Engineering (AREA)
- Inorganic Chemistry (AREA)
- Constituent Portions Of Griding Lathes, Driving, Sensing And Control (AREA)
- Machine Tool Units (AREA)
Abstract
The invention discloses a spindle assembly for a substrate grinding apparatus including a table, the spindle assembly including a spindle, a first member for connecting to the table, and a second member for detachably connecting to the first member, the first member and the second member being disposed around the spindle to hold the spindle in place when the spindle assembly is mounted to the table, the first member being capable of determining an attitude of the spindle in the table, the spindle being removable from the first member in a radial direction of the spindle when the second member is detached from the first member. The invention also discloses a main shaft mounting seat, substrate grinding equipment comprising the main shaft assembly and a main shaft dismounting method. According to the invention, when the main shaft needs to be debugged and replaced, the main shaft mounting seat does not need to be completely detached from the workbench, and when the main shaft is remounted, the pose of the main shaft does not need to be readjusted, so that the operation is convenient and fast, and the working efficiency is improved.
Description
Technical Field
The invention relates to the field of grinding of semiconductor substrates, in particular to an ultra-precise grinding spindle assembly capable of facilitating replacement of a spindle of substrate grinding equipment. The invention also relates to a spindle mounting seat, a substrate grinding device and a spindle dismounting method.
Background
The process of the IC chip comprises 4 stages, which are respectively: 1) preparing a silicon wafer, namely processing and preparing a monocrystalline silicon wafer; 2) a front process, printing a circuit on the surface of the silicon chip to manufacture a substrate; 3) testing a substrate; 4) and the subsequent process is carried out, namely thinning, dividing and packaging the silicon chip. In the later process stage of IC manufacturing, in order to reduce the package mounting height, reduce the chip package volume, improve the thermal diffusion efficiency, electrical performance, mechanical performance of the chip, and reduce the chip processing amount, the substrate needs to be back-thinned before subsequent packaging, and the chip thickness after back-thinning may even reach less than 5% of the initial thickness. Substrate thinning has wide application in the semiconductor manufacturing field of Micro Electro Mechanical Systems (MEMS), LED chips and packages thereof, CMOS image sensing Chips (CIS) and other wafer level packages and the like.
The substrate thinning processing needs to be completed on a substrate thinning device, the substrate thinning device generally comprises a vertical workbench, a horizontal workbench, a main shaft mounting seat and a main shaft, the main shaft is mounted on the vertical workbench through the main shaft mounting seat, and the substrate mounted on the horizontal workbench is processed through a grinding tool mounted on the main shaft. Fig. 8 is a schematic structural diagram of a substrate thinning apparatus 1 ' in the prior art, the substrate thinning apparatus 1 ' includes a vertical table 10 ' and a horizontal table 11 ', the vertical table 10 ' includes a guide rail 120 ', a spindle 110 ' is mounted to the vertical table 10 ' through a spindle mounting base 100 ' via an adjusting device 150 ', a grinding tool 130 ' is mounted to a lower end of the spindle 110 ', the horizontal table 11 ' is rotatable, a suction cup 140 ' for sucking a substrate is provided on a top surface, the spindle 110 ' is driven to rotate after the substrate is sucked to the horizontal table 11 ' through the suction cup 140 ', the grinding tool 130 ' mounted at a lower end of the spindle 110 ' is driven to rotate to grind a surface of the substrate, and the substrate is thinned.
However, in the substrate thinning apparatus 1 ' in the related art shown in fig. 1, the spindle 110 ' is inserted into the spindle attachment base 100 ' and is attached to the lower end surface of the spindle attachment base 100 ' by the attachment flange 1101 ' located outside the spindle attachment base 100 ', and is fixed to the spindle attachment base 100 ' from below by the fastening bolt. Since the horizontal table 11 ' and the suction cups 140 ' are further disposed below the main shaft 110 ', and the height of the guide rail 120 ' of the vertical table 10 ' is limited by the processing accuracy and stability, the layout structure results in a shortened working space of the main shaft 30 ' in the vertical direction, the main shaft 110 ' cannot be directly detached from the lower side of the main shaft mount 100 ' when detached, and needs to be detached together with the main shaft mount 100 ', and needs to be fixed to the main shaft mount 100 ' in advance when attached, and then the main shaft mount 100 ' together with the main shaft 110 ' is attached to the vertical table 10 ', and then the main shaft mount 100 ' needs to be readjusted to determine the posture of the main shaft 110 '. Therefore, the structure of the spindle mounting 100 'in the prior art is not favorable for debugging and replacing the spindle 110' and daily maintenance of the equipment in the later period.
In order to ensure that the TTV of the grinding surface is controlled to be not more than 2 μm, the spindle needs to be disassembled for maintenance without affecting the ultra-precise angular orientation (+ -0.015) of the adjusted spindle seat, and it is necessary to improve the existing spindle mounting structure and ensure the spindle alignment, precision and rigidity, so as to solve the technical problems in the prior art.
Disclosure of Invention
The invention aims to provide a main shaft assembly which is convenient for debugging and replacing a main shaft and solves the problems.
According to one aspect of the present invention, there is provided a spindle mount for a substrate grinding apparatus comprising a table, the spindle assembly comprising a spindle, a first part for slidably connecting to the table and a second part for detachably connecting to the first part, the first and second parts being arranged around the spindle to rigidly hold the spindle in place when the spindle assembly is mounted to the table, the first part being capable of determining the attitude of the spindle in the table, the spindle being removable from the first part in the radial direction of the spindle when the second part is dismounted from the first part.
According to the invention, when the main shaft needs to be disassembled, the first part does not need to be disassembled from the workbench, the main shaft can be removed along the radial direction only by disassembling the second part, the pose of the main shaft can be determined by the first part, and the pose of the main shaft can be determined when the replaced main shaft is re-installed on the first part, so that the main shaft still keeps the same pose as the pose before replacement, and the re-debugging is not needed.
Preferably, the first member comprises: a body portion disposed around the main shaft lateral cylindrical outer surface along a portion of the main shaft circumference, a portion of an inner surface of the body portion being formed as a cylindrical inner surface complementary in shape to the main shaft lateral cylindrical outer surface for mating with the main shaft lateral cylindrical outer surface, and a spigot formed along a remainder of the main shaft circumference, the spigot being sized to enable the main shaft to be removed therefrom; a spindle axial positioning portion whose flat surface perpendicular to the spindle axial direction is used to fit with a corresponding surface of the spindle to position the spindle in the axial direction; a wing extending outwardly from the outer surface of the body portion for mounting the first component to a table; wherein the wing plate, the cylindrical inner surface and the spindle axial positioning portion of the first member determine the attitude of the spindle mounted therein on the table, and the second member is detachably attached to the first member at the spigot.
According to a preferred embodiment of the invention, the first part is fixed on the table, the spindle can be removed in the radial direction of the spindle by detaching the second part, and the first part positions the spindle laterally by means of a cylindrical inner surface cooperating with a cylindrical outer surface of the spindle, positions the spindle axially by means of a spindle axial positioning portion, and finally determines the position of the spindle on the table by means of the positional relationship of the wing plate and the table, so that the pose of the replacement spindle can be determined without subsequent adjustment after being remounted in the first part.
Preferably, the main body portion of the first part further comprises tangential extensions at the side edges of the inner surface of the main body portion of the first part, on either side of the seam allowance, such that the opening defined by the seam allowance is flared outwardly, facilitating entry or removal of the spindle from or via the seam allowance into or from the main body portion of the first part.
Generally, the first part needs to have both strength and precision, so the size of the spigot of the first part is as small as possible under the condition that the spindle can be removed along the radial direction, and the spindle can be conveniently detached and installed on the premise of not influencing the strength and the precision by arranging the tangential extension part in order to avoid collision between the spindle part and the edge of the spigot.
Preferably, the tangential extensions are planar portions extending tangentially from the cylindrical inner surface of the main body portion on either side of the seam allowance.
Preferably, the wing plate further comprises a main shaft pose adjusting device for adjusting the up-down position, the left-right swinging angle and the front-back pitching angle of the main shaft relative to the workbench.
The wing plate forms a main shaft pose adjusting device, so that intermediate parts are reduced, and the strength and the precision of the main shaft mounting seat are improved.
Preferably, the main shaft attitude adjustment means includes a positioning pin provided on the wing plate and an adjustment screw connected to the wing plate through an adjustment reference plate attached to the table.
Preferably, the main shaft pose adjusting device comprises a wedge-shaped base plate which is partially arranged between the wing plate and the workbench installation surface when the wing plate is installed on the workbench, and the pitching angle of the first component is finely adjusted by adjusting the size of the part, between the wing plate and the workbench installation surface, of the wedge-shaped base plate.
Preferably, the main shaft attitude adjusting means includes a drive motor mounted on the wing plate for driving the first mount to move in the vertical direction when the first mount is mounted to the table.
Preferably, the sail includes a thickening at the location where the drive motor is mounted to reinforce the sail.
Preferably, the spindle axial direction positioning portion of the first member is a bottom surface of the main body portion of the first member.
Preferably, the axial positioning portion further comprises a protrusion or a groove extending inward or outward in a radial direction from the inner surface of the main body portion to form an at least partially annular shape, and a flat surface perpendicular to the axial direction of the annular shape protrusion or groove is used for cooperating with a corresponding surface of the main shaft to position the main shaft in the axial direction.
Preferably, the cylindricity of the cylindrical outer surface of the main shaft side and the cylindrical inner surface of the first main body part cooperating therewith is better than 0.015mm, the perpendicularity between the cooperating surface of the protrusion or groove and the cylindrical inner surface of the main body part is better than 0.02mm, and the inner diameter of the protrusion or groove is 0.05-0.08mm larger than the outer diameter of the mounting flange 1101.
Preferably, the second part comprises a body portion, a portion of which is formed as a cylindrical inner surface of complementary shape to the cylindrical outer surface of the side of the spindle, and a projection or recess corresponding to the first part, the second part cooperating with the first part to secure and locate the spindle by means of the respective bottom surface, projection or recess and cylindrical inner surface.
Preferably, the second member surrounds the circumference of the main shaft together with the first member, the first member includes a fastener mounting hole at a lateral end face, the second member has a fastener mounting hole at a side portion corresponding to the mounting hole of the first member, and the second member is detachably connected to the first member by a fastener which is fixed in the fastener mounting hole of the first member through the fastener mounting hole of the second member.
Preferably, the first member further comprises reinforcing ribs on its outer surface for reinforcing the first member and ensuring its location and retention on the table.
According to another aspect of the present invention there is provided a spindle mount comprising the first and second parts described above.
According to a third aspect of the present invention, there is provided a substrate grinding apparatus comprising a vertical table, a horizontal table, the aforementioned spindle mount, and a spindle mounted to the vertical table through the spindle mount, the substrate mounted to the horizontal table being machined by a grinding tool mounted to the spindle.
According to a fourth aspect of the present invention, there is provided a spindle attachment and detachment method for a substrate grinding apparatus, comprising the steps of: using the spindle assembly described above; connecting the first component to a table of the grinding apparatus; fitting the spindle to the first component; connecting the second part to the first part, whereby the first and second parts are arranged around the spindle, holding the spindle in place; adjusting the first component to adjust the pose of the spindle in the table; detaching the second part from the first part and removing the spindle in a radial direction when the spindle needs to be replaced; fitting a new replacement spindle to the first part in a radial direction and connecting the second part to the first part, the first part maintaining the new spindle in alignment with the previous spindle attitude.
According to the invention, when the main shaft needs to be debugged and replaced, the main shaft mounting seat does not need to be completely detached from the workbench, and when the main shaft is remounted, the pose of the main shaft does not need to be readjusted, so that the operation is convenient and fast, and the working efficiency is improved.
Drawings
Other features, objects and advantages of the invention will become more apparent upon reading of the detailed description of non-limiting embodiments made with reference to the following drawings:
FIG. 1 is a schematic view showing a spindle assembly according to a first embodiment of the present invention when mounted together on a table;
FIG. 2 is an exploded view of the view shown in FIG. 1;
FIG. 3 is an exploded view of the spindle assembly shown in FIGS. 1 and 2;
FIG. 4A is an exploded view of a spindle assembly according to a second embodiment of the present invention;
FIG. 4B is an exploded view of the spindle assembly according to the second embodiment of the present invention;
FIG. 5 is an exploded view of a spindle assembly according to a third embodiment of the present invention;
FIG. 6 is a schematic view from the front of a spindle assembly according to a fourth embodiment of the present invention mounted to a guide rail of a table;
FIG. 7 is a side cross-sectional view of a spindle assembly according to a fifth embodiment of the present invention mounted to a rail of a table; and
FIG. 8 is a schematic view of a substrate grinding apparatus including a prior art spindle assembly.
Detailed Description
The present application will be described in further detail with reference to the following drawings and examples. It is to be understood that the specific embodiments described herein are merely illustrative of the relevant invention and not restrictive of the invention. It should be noted that, for convenience of description, only the portions related to the present invention are shown in the drawings.
The directional terms "axial", "lateral", "horizontal" and "vertical" used herein refer to the axial direction, the lateral direction of the main shaft in the mounted state shown in the drawings, and the horizontal and vertical directions shown in the drawings, and are used for convenience of description only and are not intended to limit the present invention.
In the present invention, the term "spindle" means an assembly member including a driving motor, a driving shaft, a bearing, and a mounting member, and is simply referred to as a spindle herein for the sake of simplicity and clarity of description.
Fig. 1 is a schematic view showing a spindle assembly according to a first embodiment of the present invention mounted together to a table 10 of a substrate grinding apparatus, the table 10 being partially shown, the spindle assembly including a spindle mount 100 and a spindle 110, the spindle mount 100 being mounted to a guide rail 120 of the table 10. Spindle 110 is surrounded by spindle mount 100, and spindle 110 is fitted to the bottom of spindle mount 100 through mounting flange 1101 and fixed to the bottom of spindle mount 100 by screws. The lower end of the main shaft 110 is also mounted with a grinding tool 130.
Fig. 2 is an exploded view of the view shown in fig. 1. As can be seen from fig. 2, the spindle mount 100 comprises a first part 101 and a second part 102, the first part 101 being mounted to a guide rail 120 of the table 10 via an adjustment device, the first part 101 being capable of adjusting position parameters, such as a swing angle 160 and a pitch angle 170 as shown in fig. 1, by the adjustment device and also of adjusting the height of the first part 101 on the guide rail 120 by the drive device.
As can be seen from fig. 1 and 2, the second member 102 is detachably connected to the first member 101 by screws, and when the spindle 110 is mounted to the spindle mount 100, the first member 101 and the second member 102 are disposed around the spindle 110, and the spindle 110 can be positioned in the spindle mount 100 in the lateral direction and the axial direction by the inner side surfaces of the first member 101 and the second member 102 being closely fitted to the outer side surface of the spindle 110, and by the upper surface of the mounting flange 1101 of the spindle 110 being fitted to the bottom surfaces of the first member 101 and the second member 102.
That is, after the first block 101 is mounted on the guide rail 120 and the position parameters are adjusted, the posture of the main shaft 110 after being mounted on the table 10 can be determined by mounting the main shaft 110 in the first block 101. Thus, it is ensured that the first member 101 is fixed to the table 10, and thus the positional parameters are not changed, and the main shaft 110 can be maintained in the posture before replacement without readjustment after the main shaft 110 is replaced and mounted to the first member 101.
Furthermore, the first part 101 is arranged to enable the spindle 110 to be removed from the first part 101 in the radial direction of the spindle, i.e. in the horizontal direction in the figure, when the second part 102 is disassembled. Thus, when the main shaft 110 needs to be disassembled for replacement, the main shaft 110 can be removed only by disassembling the second part 102 without disassembling the first part 101.
Referring also to fig. 3, fig. 3 is an exploded view of the spindle assembly shown in fig. 1 and 2, further illustrating the detailed structure of the spindle mount 100 and the spindle 110.
In this first embodiment, the first part 101 includes a body portion 1011 which is disposed around the cylindrical outer surface of the side of the main shaft 110 along a portion of the circumference of the main shaft 110, a portion of the inner surface of the body portion 1011 is formed as a cylindrical inner surface complementary in shape to the cylindrical outer surface of the side of the main shaft 110 for closely mating with and laterally positioning the side outer surface of the main shaft 110, and a spigot is formed at the remaining portion along the circumference of the main shaft 110, the spigot being sized to enable the main shaft 110 to be removed therefrom.
The first part 101 further comprises a spindle axial positioning portion, which in this embodiment is a bottom surface 1013 of the first part 101, a flat surface perpendicular to the axial direction of the spindle for cooperating with an upper surface of a mounting flange 1101 of the spindle 110, the spindle 110 being fixed to the first part 1101 in the axial direction by screws. In order to increase the surface for fitting the mounting flange 1101 of the main shaft 110, in this embodiment, the bottom of the first member 1101 further includes a protrusion 1018 in an annular shape extending inward in the radial direction from the inner surface of the main body portion 1011, and in order to ensure the mounting accuracy, the perpendicularity between the cylindrical axis of the protrusion 1018 and the mounting end surface of the main shaft is better than 0.03mm with respect to the mounting end surface of the main shaft, and the perpendicularity between the rail mounting surface 1, the rail mounting surface 2 and the mounting end surface of the main shaft is better than 0.02 mm. .
The cylindrical surface of the mounting flange 1101 and the mating cylindrical inner surface of the main body portion 1011 of the first part 101 require a cylindricity of better than 0.015mm and a perpendicularity between the cylindrical surface of the mounting flange 1101 and the upper end surface of the mounting flange 1101 require a perpendicularity of better than 0.02 mm. The perpendicularity between the mating end face of the axial positioning portion and the cylindrical inner surface of the main body portion 1011 is also required to be better than 0.02 mm. The cylindrical diameter (i.e., inner diameter) of the protrusion 1018 is 0.05-0.08mm greater than the cylindrical diameter (i.e., outer diameter) of the mounting flange 1101.
The first part 101 further comprises a wing 1012, the wing 1012 extending outwardly from the outer surface of the body portion 1011 of the first part 101 for mounting the first part 101 to the rail 120 of the table 10 via the adjustment means. The positional parameters of the wing 1012, for example, the swing angle 160 and the pitch angle 170 as shown in fig. 1, are adjusted by the adjusting means, and the height of the wing 1012 on the guide rail 120 can also be adjusted by the driving means, thereby adjusting the positional parameters of the first member 101. In fig. 3, the drive of the wing 1012 is added at the thickening 1016 of the wing 1012 on the right side of the first part 101, which thickening 1016 at the same time serves to reinforce the wing.
As can be seen from this, in the present embodiment, the fins 1012, the cylindrical inner surface, and the spindle axial positioning portion (bottom surface 1013 in the present embodiment) of the first member 101 determine the attitude of the spindle 110 mounted in the first member 101 on the table 10.
The second part 102 is detachably connected to the first part 101 at the seam allowance of the first part 101. In this embodiment, the second member 102 may correspondingly include an annular shaped protrusion 1028 at the bottom surface 1023 extending radially inward from the bottom of the inner surface of the body portion 1021 of the second member 102 to increase the mating surface of the bottom surfaces 1013 and 1023 with the mounting flange 1101 of the spindle 110 in conjunction with the protrusion 1018 of the first member 101.
Since the main shaft 110 can determine the attitude through the first member 101, the accuracy requirement of the mating surface of the second member can be reduced.
As can be seen in conjunction with fig. 1 to 3, when the spindle 110 is mounted to the table 10, the second member 102 surrounds the circumference of the spindle 110 together with the first member 101, the first member 101 includes fastener mounting holes 1014 at a lateral end surface, the second member 102 has fastener mounting holes 1024 at a side portion corresponding to the mounting holes 1014 of the first member 101, and the second member 102 is detachably connected to the first member 101 by fasteners passing through the fastener mounting holes 1024 of the second member 102 to be fixed in the fastener mounting holes 1024 of the first member 101.
With continued reference to fig. 3, the first member 101 further includes reinforcing ribs 1015 on the outer surface thereof, the reinforcing ribs 1015 serving to reinforce the first member 101 and also serving as positioning portions to ensure positioning and retention of the first member 101 on the table 10.
Fig. 4A is an exploded view of a spindle assembly according to a second embodiment of the present invention. The spindle mount 200 of the second embodiment includes a first member 201 and a second member 202 detachably connected to the first member 201. First part 201 includes a body portion 2011, wings 2012 and a bottom surface 2013, and further includes fastener mounting holes 2014 on lateral end faces, second part 202 includes a body portion 2021, body portion 2021 includes fastener mounting holes 2024 on the side corresponding to fastener mounting holes 2014 of first part 201, and when spindle 210 is mounted to the table, second part 202 is secured to first part 201 by fastening screws mounted through its fastener mounting holes 2024 into fastener mounting holes 2014 of first part 201, thereby positioning spindle 210 laterally while positioning spindle 210 axially by the mating of the upper surface of mounting flange 2101 of spindle 210 with bottom surface 2013 of first part 201 and bottom surface 2023 of second part 202. The lower end of the main shaft 210 is mounted with a grinding tool 230.
The second embodiment may or may not include other structural features described in the first embodiment without affecting the second embodiment's ability to achieve the objects of the invention.
The second embodiment differs from the first embodiment mainly in that the main body 2011 of the first component 201 further includes tangential extensions 2017, and the tangential extensions 2017 are located at side edges of the inner surface of the main body 2011 of the first component 201 and at two sides of the seam allowance, so that an opening defined by the seam allowance is expanded outwards, and the main shaft 210 can enter the main body 2011 of the first component 201 from the seam allowance or be removed from the main body 2011 through the seam allowance.
In the present embodiment, the tangential extensions 2017 are flat surface portions that extend tangentially from the cylindrical inner surface of the main body 2011 on both sides of the seam allowance. The tangential extensions 2017 may also be implemented in other forms, such as outwardly flared chamfers, rounded corners, or flat portions that slope outwardly at an angle greater than the tangential plane to enlarge the opening.
As shown in fig. 4B, to ensure the mounting accuracy of the spindle assembly, the length D of the tangential extension 2017 and the arc α of the second member 102 may be configured to:
by providing the tangential extension 2017 (extending from the semicircular portion in the tangential direction), the connection area between the first member 101 and the main shaft 210 is increased, and the contact rigidity is improved to meet the work accuracy requirement of the main shaft 210 (adjusted by ± 0.15 ° in the front-rear direction or the left-right direction). The characteristic dimension D of the tangential extension 2017 is generally set to be between R/4 and R/3; further, the central angle α of the second member 102 may be calculated to be 180 ° -2arcsin (D/R), 151 ° ≦ α ≦ 141 °.
Fig. 5 is an exploded view of a spindle assembly according to a third embodiment of the present invention. The spindle mount 300 of the third embodiment includes a first member 301 and a second member 302 detachably connected to the first member 301. The first part 301 comprises a main body portion 3011, wings 3012 and a bottom surface 3013 serving as a spindle axial positioning portion, the main body portion 3011 of the first part 301 further comprises tangential extensions 3017, and the tangential extensions 3017 are at side edges of the inner surface of the main body portion 3011 of the first part 301 and at two sides of the seam allowance, so that an opening defined by the seam allowance is expanded outwards, and the spindle 310 is convenient to enter the main body portion 3011 of the first part 301 from the seam allowance or remove from the main body portion 3011 through the seam allowance. And the first part 301 further includes fastener mounting holes 3014 on the lateral end face of the main body portion 3011, the second part 302 includes a main body portion 3021, the main body portion 3021 includes fastener mounting holes 3024 on the side corresponding to the fastener mounting holes 3014 of the first part 301, when the main shaft 310 is mounted to the table, the second part 302 is fixed to the first part 301 by fastening screws fitted into the fastener mounting holes 3014 of the first part 301 through the fastener mounting holes 3024 thereof, the main shaft 310 is positioned laterally, and the main shaft 310 is positioned axially by the fitting of the mounting flange 3101 of the main shaft 310 with the bottom face 3013 of the first part 301 and the bottom face 3023 of the second part 302. The lower end of the main shaft 310 is mounted with a grinding tool 330.
It should be noted that, in addition to the requirements regarding the perpendicularity of the first components 101, 201, 301, 401 and mounting flange to ensure the mounting accuracy between the spindle and the first components, as an ultra-precise machining apparatus, the mounting flanges 3101 and 1101 should each have a good rigidity, specifically, the thickness of the mounting flanges 3101 and 1101 should be no less than 15mm and preferably no less than or equal to 20mm and configured such that the cylindricity of the mounting flange outer cylindrical surface is better than 0.015mm and the perpendicularity between the outer cylindrical surface and the upper end surface of the mounting flange is better than 0.02mm, so that the overall rigidity of the spindle assembly meets the rigidity requirements of the inclination adjustment accuracy of 0.15 ° before and after and the inclination adjustment accuracy of 0.15 ° left and right.
The third embodiment differs from the second embodiment mainly in that the body portion 3011 of the first part 301 further comprises a protrusion or groove 3018 extending inwardly or outwardly in a radial direction from the inner surface of the body portion 3011 to form an at least partially annular shape, the flat surface of the annular shape protrusion or groove 3018 perpendicular to the axial direction being adapted to cooperate with the surface of a corresponding groove or protrusion 3102 of the main shaft 310, the protrusion or groove 3018 also serving as an axial positioning part to position the main shaft 310 in the axial direction. The second part 302 may also correspondingly secure and position the main shaft 310 by means of the respective bottom surfaces 3013, 3023, the protrusions or recesses 3018, 3028 and the cylindrical inner surface when the main body portion 3012 comprises protrusions or recesses 3018 corresponding to the protrusions or recesses 3018 of the first part 301 and the second part 302 is connected to the first part 301.
The perpendicularity between the mating end face of the protrusion or recess 3018 and the cylindrical inner surface of the body portion 3011 is required to be better than 0.02 mm. The cylindrical diameter (i.e., inner diameter) of the protrusion or recess 3018 is 0.05-0.08mm greater than the cylindrical diameter (i.e., outer diameter) of the mounting flange 1101.
In the first to third embodiments, the cylindrical inner surface of the first member is formed integrally as a cylindrical surface, but the present invention is not limited thereto, and it is also possible to form a partial cylindrical surface, or other structures capable of positioning the side surface of the main shaft are also within the scope of the present invention, and likewise, the inner surface of the second member. The second member does not necessarily surround the circumference of the main shaft with the first member, and may partially overlap the first member as long as the main shaft can be detachably attached to the first member, and therefore the detachable attachment of the second member to the first member is not limited to the use of a fastener to be fixed to the first member through a fastener attachment hole formed in the side portion, and may be attached to the wing plate of the first member, for example, by providing a connection portion.
Fig. 6 is a schematic view of a spindle assembly according to a fourth embodiment of the present invention mounted to a guide rail 420 of a table, as viewed from the front. This fourth embodiment may include all or a part of the technical features of the first to third embodiments, and the same or similar components as those of the first to third embodiments are denoted by the same reference numerals except that the leading digit is changed to 4.
This fourth embodiment is mainly different from the first to third embodiments in that the first member 401 includes a positioning pin 4019 at one flange 4012, and an upper adjusting screw 4120 and a lower adjusting screw 4121, the upper adjusting screw 4120 and the lower adjusting screw 4121 are connected to the flange 4012 through an adjusting reference plate 4122 mounted to the table, and the first member 401 can be swung at a slight angle in a plane perpendicular to the positioning pin 4019 around the positioning pin 4019 by adjusting the upper adjusting screw 4120 or the lower adjusting screw 4121, thereby finely adjusting the angle of the main shaft 410 in the plane perpendicular to the positioning pin 4019.
Fig. 7 is a side sectional view of a spindle assembly according to a fifth embodiment of the present invention mounted to a 520 guide rail of a table. This fifth embodiment may include all or a part of the technical features of the first to third embodiments, and the same or similar components as those of the first to third embodiments are denoted by the same reference numerals except that the leading digit is changed to 5.
The main difference between this fifth embodiment and the first through third embodiments is that the spindle mount 500 includes a flat shim 5023 disposed between the wing 5012 of the first member 501 and the slider coupling plate 550, and a wedge shim 5024 partially disposed between the wing 5012 of the first member 501 and the slider coupling plate 550, the slider coupling plate 550 for coupling the slider 540 mounted to the guide rail 520. In the figure, the flat pad 5023 is arranged at the upper part, the wedge-shaped pad 5024 is arranged at the lower part, and the wedge-shaped pad 5024 is gradually increased in thickness from top to bottom and is formed into a wedge shape. The pitch angle of the first member 501 is fine-tuned by adjusting the thickness of the wedge shim 5024 entering between the flap 5012 and the lower edge of the slider link 550 by adjusting the size of the portion of the wedge shim 5024 located between the flap 5012 and the slider link 550.
In the embodiment of the invention shown in fig. 6 and 7, the first component is arranged to include the adjusting device itself, and the intermediate adjusting mechanism is reduced, so that the use of the component is reduced, the robustness of the whole working system is improved, and the adjusting precision and efficiency are improved.
When the spindle assembly is used, the first part of the spindle mounting seat is connected to a workbench of grinding equipment; then assembling the spindle to the first part; the second member is then connected to the first member whereby the first and second members are disposed about the spindle to hold the spindle in place. The first component is adjusted to adjust the pose of the main shaft in the workbench, and after the main shaft is adjusted, the substrate can be ground by the grinding tool arranged on the main shaft.
When the main shaft needs to be replaced, the second part is detached from the first part, and then the main shaft is removed along the radial direction, so that the main shaft can be detached without detaching the first part from the workbench. Then, a new spindle to be replaced is fitted to the first block in the radial direction, and the second block is attached to the first block, and since the first block is not detached and does not change, the new spindle can be held in agreement with the previous spindle attitude without further adjustment of the spindle attitude.
The above description is only a preferred embodiment of the application and is illustrative of the principles of the technology employed. It will be appreciated by a person skilled in the art that the scope of the invention as referred to in the present application is not limited to the embodiments with a specific combination of the above-mentioned features, but also covers other embodiments with any combination of the above-mentioned features or their equivalents without departing from the inventive concept. For example, the above features may be replaced with (but not limited to) features having similar functions disclosed in the present application.
Claims (11)
1. A spindle assembly for a substrate grinding apparatus including a table, the spindle assembly including a spindle, a first member for slidably connecting to the table, and a second member for detachably connecting to the first member, the first member and the second member being disposed around the spindle to rigidly hold the spindle in place when the spindle assembly is mounted to the table, the first member being capable of determining an attitude of the spindle in the table, the spindle being capable of being removed from the first member in a radial direction of the spindle when the second member is dismounted from the first member,
wherein the first component comprises:
a body portion disposed around the main shaft lateral cylindrical outer surface along a portion of the main shaft circumference, a portion of an inner surface of the body portion being formed as a cylindrical inner surface complementary in shape to the main shaft lateral cylindrical outer surface for mating with the main shaft lateral cylindrical outer surface, and a spigot formed along a remainder of the main shaft circumference, the spigot being sized to enable the main shaft to be removed therefrom;
a spindle axial positioning portion formed as a flat surface perpendicular to a spindle axial direction for cooperating with a corresponding surface of the spindle to position the spindle in the axial direction;
a wing extending outwardly from the outer surface of the body portion for mounting the first component to a table;
wherein the wing plate, the cylindrical inner surface and the spindle axial positioning portion of the first member determine the attitude of the spindle mounted therein on the table, the second member is detachably attached to the first member at the spigot,
the main body part of the first component further comprises tangential extension parts, the opening defined by the seam allowance is outwards expanded at the side edges of the inner surface of the main body part of the first component and on two sides of the seam allowance, the main shaft can conveniently enter the main body part of the first component from the seam allowance or be removed from the main body part through the seam allowance, and the characteristic dimension D of the tangential extension parts is set to be greater than or equal to R/4 and smaller than or equal to R/3.
2. A spindle assembly according to claim 3, in which the tangential extensions are planar portions extending tangentially from the cylindrical inner surface of the main body portion on either side of the spigot.
3. The spindle assembly according to claim 1, wherein the spindle axial positioning portion of the first member is a bottom surface of the main body portion of the first member.
4. The spindle assembly of claim 3, wherein the spindle axial positioning portion further comprises a protrusion or a groove extending inward or outward in a radial direction from an inner surface of the main body portion to form an at least partially annular shape, a flat surface of the annular shape protrusion or groove perpendicular to the axial direction being adapted to cooperate with a corresponding surface of the spindle to position the spindle in the axial direction.
5. The spindle assembly according to claim 4, wherein the cylindricity of the spindle side cylindrical outer surface and the cylindrical inner surface of the first body part cooperating therewith is better than 0.015mm, the perpendicularity between the cooperating surface of the protrusion or groove and the cylindrical inner surface of the body part is better than 0.02mm, and the inner diameter of the protrusion or groove is 0.05-0.08mm larger than the outer diameter of the mounting flange 1101.
6. A spindle assembly according to claim 5, wherein the second part comprises a body portion, a portion of which is formed as a cylindrical inner surface of complementary shape to the cylindrical outer surface of the spindle side, and a corresponding projection or recess to the first part, the second part cooperating with the first part to secure and locate the spindle by means of the respective bottom surface, projection or recess and cylindrical inner surface.
7. The spindle assembly according to any one of claims 1 to 6, wherein the second member surrounds a circumference of the spindle together with the first member, the first member including a fastener mounting hole at a lateral end face, the second member having a fastener mounting hole at a side portion corresponding to the mounting hole of the first member, the second member being detachably connected to the first member by a fastener fixed in the fastener mounting hole of the first member through the fastener mounting hole of the second member.
8. The spindle assembly of any one of claims 1 to 6, further comprising reinforcing ribs on the outer surface of the first component for reinforcing the first component and ensuring positioning and retention of the first component on the table.
9. A spindle mount comprising a first component and a second component according to any one of claims 1 to 8.
10. A substrate grinding apparatus comprising a vertical table, a horizontal table, a spindle assembly according to any one of claims 1 to 8 mounted to the vertical table, and a substrate mounted to the horizontal table is machined by a grinding tool mounted to the spindle.
11. A main shaft dismounting method is used for a substrate grinding device and is characterized by comprising the following steps:
using the spindle assembly of claims 1-8;
connecting the first component to a table of the grinding apparatus;
fitting the spindle to the first component;
connecting the second part to the first part, whereby the first and second parts are arranged around the spindle, holding the spindle in place;
adjusting the first component to adjust the pose of the spindle in the table;
detaching the second part from the first part and removing the spindle in a radial direction when the spindle needs to be replaced;
fitting a new replacement spindle to the first part in a radial direction and connecting the second part to the first part, the first part maintaining the new spindle in alignment with the previous spindle attitude.
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| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202010749102.9A CN111823134B (en) | 2020-07-30 | 2020-07-30 | Spindle assembly, spindle mounting base, substrate grinding equipment and spindle dismounting method |
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| CN202010749102.9A CN111823134B (en) | 2020-07-30 | 2020-07-30 | Spindle assembly, spindle mounting base, substrate grinding equipment and spindle dismounting method |
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| CN111823134B CN111823134B (en) | 2021-10-15 |
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| CN111823134B (en) | 2021-10-15 |
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