CN111820811A

CN111820811A - Toilet is with low angle illumination micronic dust cleaning device and have device's toilet

Info

Publication number: CN111820811A
Application number: CN201910315291.6A
Authority: CN
Inventors: 杨之逸; 近藤博仁
Original assignee: Lumos Technology Co Ltd
Current assignee: Lumos Technology Co Ltd
Priority date: 2019-04-19
Filing date: 2019-04-19
Publication date: 2020-10-27

Abstract

The invention discloses a low-angle illumination tiny dust cleaning device for a clean room, which is used for leading in a negative pressure environment to absorb tiny dust in an operation space, and comprises: a main body connected to the negative pressure environment; a light source suction nozzle assembly, including a suction nozzle connected with the main body and connected with the negative pressure environment, the suction nozzle has a ventilating body and a suction head end, the suction head end forms an opening for sucking the micro dust at a suction working area corresponding to the opening in the operation space, and a group of low-angle light sources for irradiating the suction working area at a low angle; and a dust generating device corresponding to the suction nozzle, when the micro dust is attached to a working surface of the operation space, the micro dust is driven away from the working surface by a non-contact force for being sucked by the suction nozzle. In addition, the invention also discloses a clean room with the low-angle illumination micro-dust cleaning device.

Description

Toilet is with low angle illumination micronic dust cleaning device and have device's toilet

Technical Field

The invention relates to a cleaning device, in particular to a low-angle illumination micro-dust cleaning device for a clean room and the clean room with the same.

Background

The clean room is a common facility in the fields of food, photoelectricity, semiconductor production, biochemical technology, biotechnology, precision machinery, pharmacy, operating rooms in hospitals and the like, and in order to improve the quality, yield and reliability of products or experimental processes, the environmental conditions in the clean room must be strictly controlled, and the clean room has strict requirements on the quantity of micro-dust particles except for temperature, humidity and air quality.

General dust particles can be filtered by a filter screen in the process of air repeated convection in a clean room; however, some special fine dust particles, such as cosmetic particles, electrostatic particles from gloves or clothes, and even dust adhering to grease on the surface of a human body, are usually adhered to the surface of the worktable due to slight adhesion. Even if the mode of additionally adopting the vacuum cleaner to suck, the dust can still be difficult to be sucked away from the surface to which the dust is attached due to the excessive adhesive force caused by the static electricity or grease of the dust; if the high pressure air is used to blow off the micro-dust attached to the surface of the object, the micro-dust may splash to other places due to the air flow, and the second pollution of the clean room may be caused.

On the other hand, the quantity and the position of the dust which is extremely difficult to observe by naked eyes cannot be accurately judged, even if the dust is required to be processed in a manual wiping mode, the dust can still be difficult to be effectively cleaned and removed, even if light auxiliary lighting is added, the dust can be too small, particularly when the main incident light angle is too steep, the light reflection of the working table surface is too strong, the dust can directly enter the eyes of an operator, and the judgment on whether the dust is clean or not in the position and the bottom wiping process can be influenced.

In addition, in a common self-walking sweeping robot, the sweeping mode completely depends on the rotation of the brush head, so that larger granular impurities are driven away from the original position and are sucked; however, when the same structure is applied to the technical field, on one hand, when the brush structure contacts the cleaning surface for cleaning, the micro dust may be adhered to the brush and then fall to other positions, or is directly driven to other positions due to the cleaning power path, thereby causing expected pollution; on the other hand, the brush itself is worn away during the contact with the cleaning surface, and even the brush may scratch the cleaning surface, especially when the cleaning object is a mask, which causes a lot of troubles. Therefore, the clean room cleaning operation of the present invention must avoid the above-mentioned contact type cleaning method.

Therefore, it is an object of the present invention to provide a cleaning device that can effectively remove fine dust particles with a large adhesive force from an adhesive surface and prevent the fine dust particles from splashing to other places, particularly to provide an auxiliary illumination device with a light source that does not interfere with observation.

Disclosure of Invention

In view of the above-mentioned shortcomings of the prior art, it is desirable to provide a low-angle light micro-dust cleaning device for a clean room according to an embodiment of the present invention, which aims to achieve the following objectives: (1) the dust can be effectively driven away from the attachment surface and absorbed; (2) the light source with low angle is used for auxiliary lighting, not only the working area is illuminated, but also the direct reflected light is reduced, the tiny dust is easy to observe, and whether the tiny dust is indeed cleared away can be confirmed; (3) by having self-propelled function, a working area is automatically cleaned. It is also desirable to provide a clean room having a low-angle light dust cleaning apparatus, which can automatically detect dust particles in an operating space and instruct the cleaning apparatus having a self-propelled function to proceed to cleaning according to a locking position.

According to an embodiment, the present invention provides a low-angle light micro-dust cleaning apparatus for a clean room, for guiding into a negative pressure environment to suck micro-dust in an operation space, the low-angle light micro-dust cleaning apparatus comprising: a main body connected to the negative pressure environment; a light source suction nozzle assembly for detachably connecting to the main body, the light source suction nozzle assembly including a suction nozzle connected to the main body and connected to the negative pressure environment, the suction nozzle having a ventilation body and a suction end far from the main body, the suction end having an opening formed thereon so that the negative pressure environment is applied to the opening for sucking the micro dust at a suction working area corresponding to the opening in the operation space, and a set of low-angle light sources for irradiating the suction working area at a low angle so that the reflected light of the low-angle light sources from the suction working area is far from an observation angle; and a dust generating device corresponding to the suction nozzle, when the micro dust is attached to a working surface of the operation space, the micro dust is driven away from the working surface by a non-contact force for being sucked by the suction nozzle.

According to an embodiment, the present invention also provides a clean room with a low-angle light micro-dust cleaning device, comprising a clean operation space formed by at least one top wall and at least one surrounding wall, and at least one low-angle light micro-dust cleaning device for a clean room, for introducing a negative pressure environment to suck micro-dust in the clean operation space, the low-angle light micro-dust cleaning device comprising: a main body connected to the negative pressure environment, the main body including a set of rollers; a light source suction nozzle assembly for detachably connecting to the main body, the light source suction nozzle assembly including a suction nozzle connected to the main body and connected to the negative pressure environment, the suction nozzle having a ventilation body and a suction end far from the main body, the suction end having an opening formed thereon so that the negative pressure environment is applied to the opening for sucking the micro dust at a suction working area corresponding to the opening in the operation space, and a set of low-angle light sources for irradiating the suction working area at a low angle so that the reflected light of the low-angle light sources from the suction working area is far from an observation angle; a dust generating device corresponding to the suction nozzle, when the micro dust is attached to a working surface of the operation space, the micro dust is driven away from the working surface by non-contact force for being sucked by the suction nozzle; and a set of microprocessor for driving the roller.

Compared with the prior art, the low-angle illumination dust cleaning device for the clean room can effectively observe and identify and confirm the existence of dust particles; then, the dust generating device drives the micro-dust away from the working surface, and the micro-dust is sucked by the suction nozzle connected with the negative pressure environment, so that not only can the micro-dust particles be effectively removed, but also the micro-dust particles can be prevented from splashing to other places; the low-angle light source can avoid interference of direct reflected light on observation, and the reliability of dust removal is ensured; the clean room with the low-angle illumination dust cleaning device correctly senses the dust in the operation space by the optical sensor arranged on the top wall or the surrounding wall, and effectively and automatically drives the dust removal.

Drawings

FIG. 1 is a schematic view of a low-angle light dust cleaning apparatus for a clean room according to a first preferred embodiment of the present invention.

Fig. 2 is a schematic view of the light source nozzle assembly in the embodiment of fig. 1.

FIG. 3 is a schematic view of a second preferred embodiment of the low-angle light dust cleaning apparatus for a clean room according to the present invention.

FIG. 4 is a schematic view of the operation of the ultrasonic probe set in the embodiment of FIG. 3.

FIG. 5 is a schematic view of a low-angle light dust cleaning apparatus for a clean room according to a third preferred embodiment of the present invention.

FIG. 6 is a schematic view of a clean room with a low-angle light micro-dust cleaning device according to a first preferred embodiment of the present invention.

FIG. 7 is a schematic diagram of reflected light and diffuse reflected light for a low angle light source.

Wherein: 1 is incident light; 2 is reflected light; 3 is an operator; 4 is diffuse reflected light; 10. 20, 30 are micro dust cleaning devices; 11. 21, 31 are main bodies; 12. 22 is a light source suction nozzle component; 13. 23, 33 are dust-raising devices; 14. 24 is a working surface; 15. 25 is mote; 110. 210 is a handle; 121. 221, 321 are suction nozzles; 122. 222 is a vent body; 123. 223 is a suction end; 126. 226, 227, 326, 45 are low angle light sources; 26 an image enlarging device; 27 is a pipeline; 231 is an ultrasonic unit cell; 36 is a microprocessor; 37 is a roller; 38. 44 is a light sensor; 39 is a light hole; 327 is a getter pump; 328 is a dust collecting groove; 40 is a clean room; 41 is a top wall; 42 is a surrounding wall; 43 is a controller; a is an included angle.

Detailed Description

The invention is further illustrated with reference to the following figures and specific examples. These examples are to be construed as merely illustrative and not limitative of the remainder of the disclosure in any way whatsoever. After reading the description of the invention, one skilled in the art can make various changes and modifications to the invention, and such equivalent changes and modifications also fall into the scope of the invention defined by the claims.

First preferred embodiment

A first preferred embodiment of a low-angle light dust cleaning device for a clean room according to the present invention is shown in fig. 1, in this embodiment, an operator uses the dust cleaning device 10 to clean dust in an operation space in a handheld manner, and the dust cleaning device 10 includes a main body 11, a light source nozzle assembly 12, and a dust generating device 13. The dust particles in the invention are suspended particles, dust or other dust with fine particles, especially fine dust particles attached to the surface of an article or the ground due to grease or static electricity, and the dust particles in the invention are removed by absorbing and isolating the particles with the size larger than that of the dust particles in an operation space.

Referring to fig. 2, the main body 11 has a handle 110 for an operator to handle, and an internal suction pump (not shown) for providing a negative pressure environment; the light source nozzle assembly 12 is detachably linked to the main body 11, the light source nozzle assembly 12 includes a nozzle 121 and a set of low-angle light sources 126, the nozzle 121 is connected to the main body 11 and is connected to the suction pump, the nozzle 121 has a ventilating body 122 and a suction head end 123 far away from the main body 11, the suction head end 123 is formed with an opening, when the dust cleaning device 10 is started, the negative pressure provided by the suction pump is applied to the opening, so that the dust in the range of the suction working area corresponding to the opening can be sucked to a dust collecting groove (not shown) inside the main body 11, the low-angle light sources 126 are a set of a plurality of LED ring lamps arranged in a surrounding manner, the ring lamps are combined to the main body in a magnetic absorption manner, and in this embodiment surround the suction head end 123, when an operator holds the handle 110 for operation, since an included angle a between the light beam 1 emitted by the LED and the working plane is less than 45 degrees, so that the reflected light 2 is reflected at an angle far from the observation angle of the operator 3 as shown in fig. 7, therefore, the light source of the present invention is referred to as a low-angle light source 126, once the dust particles 15 are on the working surface 14, the light beam 1 emitted by the low-angle light source 126 will be diffusely reflected by the dust particles 15 in the irregular diffuse reflection light 4 in all directions, and since the low-angle light source 126 is adopted, the angle of the incident light 1 and the angle of the reflected light 2 are inclined with the observation angle of the operator 3, so that the directly reflected light 2 with intensity much higher than the intensity of the diffuse reflection light 4 is far from the observation angle of the operator 3, and the weak diffuse reflection light, phosphorescence or fluorescence caused by the dust particles 15 can be more obvious and easily observed by the operator 3.

The low-angle light source 126 will illuminate towards the extraction work area in a limited solid angle and due to the oblique angle of illumination and the viewing angle of the operator 3, the reflected light 2 will be reflected at an angle away from the viewing angle of the operator 3, so that the diffusely reflected light or fluorescence caused by the mote 15 will be more visible and easily viewed by the operator 3.

The dust generating device 13 is a positive pressure blowing nozzle connected to the positive pressure environment in the embodiment, and is separated from the main body 11 and is connected to a clean air supply device (not shown) outside the clean room in the embodiment, the operator can hold the handle 110 and the dust generating device 13 with both hands to operate, first, illuminate the working surface 14 with the low-angle light source 126, observe whether the micro dust 15 exists, and try to suck with the suction nozzle; once the dust particles 15 are adhered to the working surface 14 and cannot be easily sucked, the dust particles 15 adhered to the working surface 14 are further removed by the air blown from the dust-removing device 13, and when the dust particles 15 are separated from the working surface 14, the dust-collecting nozzles 121 can easily suck the dust particles 15 into the dust-collecting grooves inside the main body 11. Certainly, the positive pressure blowing nozzle can adopt a structure with a plurality of air blowing openings, such as a main air blowing opening and auxiliary air blowing openings respectively arranged at the left side and the right side of the main air blowing opening, and then the micro dust is blown up by different time sequences or air volume guiding air blowing modes. For example, a main blowing port with a high flow rate is matched with auxiliary blowing ports with low flow rates on two sides, and the principle of the white effort can be known, because the flow rate of the main blowing port is high and the gas pressure is low, the tiny dust separated from the working surface cannot fly to two sides in a mess, and the tiny dust can move along the wind direction of the main blowing port; or by means of time sequence type difference, after the main air blowing port blows away the micro-dust firstly, the auxiliary air blowing port is opened, so that the micro-dust can be guided to the suction nozzle in a centralized manner.

Furthermore, since the high pressure air will flow in a turbulent or vortex manner due to the viscosity of the air fluid after passing through a certain path, and the traveling direction of the fine dust blown by the high pressure air becomes unpredictable, in this embodiment, a spacer may be additionally added to the nozzle portion to ensure that the nozzle does not directly contact the working surface to cause damage, and to ensure that the distance between the nozzle and the working surface does not exceed, for example, 5mm, so as to avoid the high pressure air from flowing in a turbulent manner.

Second preferred embodiment

Of course, as those skilled in the art can easily understand, the dust generating device is not limited to be separated from the main body, and a second preferred embodiment of the dust cleaning device of the present invention is shown in fig. 3, wherein the dust cleaning device 20 further comprises an image magnifying device 26, which is illustrated as a magnifying glass in this example, disposed on the main body 21, and the operator can more clearly observe the dust 25 sucked into the working area through the image magnifying device 26; in addition, the dust-generating device 23 of the present embodiment is an ultrasonic oscillator integrally disposed on the main body 21, and the ultrasonic oscillator of the present embodiment is composed of a plurality of cells disposed in a single row, for example. The dust particles 25 and/or the work surface 24 are vibrated by the sound wave vibration, so that the dust particles 25 are moved relative to the work surface 24 by the vibration and are absorbed by the dust particles separated from the work surface 24.

Since the ultrasonic oscillator in this embodiment includes a plurality of ultrasonic cells 231, they can be driven by the same or different timing signals according to the environment, so as to form synchronous or respectively different phase oscillations, thereby causing the ultrasonic waves to be selectively transmitted in a parallel wave manner or causing any mutually interfering wave fronts (wavefront). For example, as shown in fig. 4, the ultrasonic cells 231 at the two ends start to oscillate the air molecules at the near position with a phase ahead to emit ultrasonic waves, and the ultrasonic cells 231 at the central position start to oscillate with a phase behind, so that the whole vibration waves form a wavefront in a convergent direction, and a predetermined focus is defined by the phase order, so that the vibration caused by each ultrasonic cell forms constructive interference at the focus position.

By means of the constructive interference, the maximum vibration wave can be generated by the addition of all vibration waves at the contact position of the dust particle 25 and the working surface 24, and the two are forced to generate asynchronous relative movement by virtue of the mass difference between the working surface 24 and the dust particle 25, so that the two are separated and then sucked by the suction nozzle. Here, since the ultrasonic wave oscillator only vibrates the original air molecules and does not suck any gas from the outside of the clean room, no additional pollution is caused.

The left side and the right side of the main body 21 are respectively linked with the light source suction nozzle component 22 and the dust raising device 23, the light source suction nozzle component 22 comprises a suction nozzle 221 and a low-angle light source 226, the suction nozzle 221 is provided with a ventilation body 222 and a suction head end 223, an opening of the suction head end 223 can generate negative pressure through a pipeline 27 externally connected to a negative pressure environment, and the micro dust 25 is sucked and separated from the working surface 24; the low-angle light source 226 in this embodiment further includes a plurality of LED dies with different central light emitting wavelengths, and the LED dies can emit light toward the absorption working area under the image magnifying device 26 at a low angle by selecting, for example, white light or ultraviolet light, so that the operator can observe the micro-dust 25 on the working surface 24 more clearly to obtain the diffuse reflection light or fluorescence image of the specific micro-dust 25; another auxiliary low-angle light source 227 is disposed at a side close to the dust-collecting device 23 to change the illumination angle and assist the illumination of the low-angle light source 226. The main body 21 is further provided with handles 210 at two outer sides for an operator to hold the dust cleaning apparatus 20 in a more stable manner.

Third preferred embodiment

Of course, if the area to be cleaned is a working surface which is originally flat, the third preferred embodiment of the low-angle light dust cleaning apparatus for clean rooms of the present invention is shown in fig. 5, the dust cleaning apparatus 30 can also be a self-propelled machine, the dust cleaning apparatus 30 in this embodiment is added with a set of microprocessor 36 and the main body 31 is further provided with a set of rollers 37 and light sensor 38, so that the dust cleaning apparatus 30 can move in the operation space by itself and perform the cleaning operation according to the result detected by the light sensor 38.

The light sensor 38 receives the feedback light caused by the light beam emitted from the low-angle light source 326 of the light source nozzle assembly and the scattered light or photoluminescence of the dust, and converts the feedback light signal into a sensing signal to be transmitted to the microprocessor 36, the microprocessor 36 drives the roller 37 to move to the position of the dust according to the received sensing signal, and the dust is vibrated or blown off from the working surface by the dust generating device 33, and then the dust is sucked into the dust collecting groove 328 by the suction pump 327 through the nozzle 321 of the light source nozzle assembly. The dust cleaning device 30 is further formed with a light hole 39, which not only allows external light to penetrate to the suction working area, but also allows an external sensor to sense dust in the range of the suction working area when the external sensor is disposed.

The cleaning apparatus 30 shown in fig. 5 can be further applied to the clean room 40 shown in fig. 6, the clean room 40 is a clean operation space formed by a top wall 41 and a surrounding wall 42, the clean room 40 has a controller 43 capable of being communicatively linked with a microprocessor of the cleaning apparatus 30, the top wall 41 and the surrounding wall 42 are provided with optical sensor elements, the optical sensor elements include a plurality of optical sensors 44 and low-angle light sources 45, the low-angle light sources 45 can make the light sources in the clean room 40 more sufficient to improve the accuracy of the light sensors 44 for detecting the dust particles, the controller 43 receives the signals of the optical sensors 44 and then provides the distribution information of the dust particles in the clean room 40 to the cleaning apparatus 30 for reference, and the cleaning apparatus 30 can move to the place to be cleaned according to the information transmitted by the controller 43 and the sensing conditions of its own sensors to remove the dust particles; of course, the dust cleaning device 30 can also be operated in the power saving mode, and after moving to the position of the dust, the cleaning mode is activated, thereby increasing the power endurance time of the dust cleaning device 30.

In summary, the low-angle light dust cleaning device for a clean room provided by the present invention is capable of blowing or vibrating the dust particles away from the attached surface by the dust-generating device in a non-contact manner, and sucking the dust particles by the suction nozzle, so that the dust particles can be effectively guided to the collection position by the air flow formed by blowing and sucking; the low-angle light source can generate uniform diffuse reflection as much as possible, and the condition that the direct reflected light returns to interfere with the observation of the tiny dust is reduced. The cleaning device with the microprocessor, the sensor and the roller can automatically sense the range and the position of the dust particles and move to a specified position to remove the dust particles; the clean room provided with the sensor and the low-angle light source can further improve the efficiency and the reliability of detecting and removing the micro-dust in the clean room.

Claims

1. A kind of clean room illuminates the dust cleaning device of the micronic dust with the low angle, for leading into a negative pressure environment and absorbing the micronic dust in an operation space, its characteristic is, should illuminate the dust cleaning device of the micronic dust with the low angle and include:

a main body connected to the negative pressure environment;

a light source nozzle assembly for removably attaching to the body, the light source nozzle assembly comprising:

a suction nozzle connected with the main body and connected with the negative pressure environment, the suction nozzle is provided with a ventilation body and a suction head end far away from the main body, the suction head end is provided with an opening, so that the negative pressure environment is applied to the opening for sucking the micro dust at a suction working area corresponding to the opening in the operation space, and

a set of low-angle light sources illuminating the absorption working area at a low angle, so that the reflected light of the absorption working area to the low-angle light sources is far away from an observation angle; and

a dust-generating device corresponding to the suction nozzle, when the micro dust is attached to a working surface of the operation space, the micro dust is driven away from the working surface by non-contact force for being sucked by the suction nozzle.

2. The low angle light micro dust cleaning apparatus for clean room as claimed in claim 1, wherein said dust generating means is a positive pressure nozzle.

3. The low-angle light dust cleaning apparatus for clean room as claimed in claim 2, wherein said positive pressure blowing nozzle comprises at least a main blowing port and a plurality of auxiliary blowing ports, said auxiliary blowing ports having a guiding blowing pattern corresponding to said main blowing port, whereby said dust is guided to push toward said suction nozzle when said dust is blown off said working surface by said main blowing port.

4. The low-angle light micro-dust cleaning apparatus for clean room as claimed in claim 1, wherein said dust-generating means is an ultrasonic vibrator.

5. The low-angle light beam cleaning apparatus for a cleaning room of claim 4, wherein said ultrasonic oscillator includes a plurality of cells driven with timing signals different from each other, whereby the ultrasonic waves can selectively cause mutually interfering wave fronts.

6. The clean room low-angle light micro dust cleaning apparatus according to claim 1, 2, 3, 4 or 5, further comprising a set of microprocessors; and the main body is also provided with a group of rollers driven by the microprocessor.

7. The low-angle light dust cleaning apparatus for clean room as claimed in claim 6, further comprising a set of sensors disposed on said main body for receiving feedback light caused by the diffuse reflection and/or self-luminescence of light beams emitted from said low-angle light source by said dust particles, and converting said feedback light signal into a sensing signal to be transmitted to said microprocessor.

8. The low-angle light dust cleaning apparatus for clean room of claim 1, further comprising an image magnifying device disposed on said main body for an operator to observe the dust at said suction working area.

9. A clean room with a low-angle light micro-dust cleaning device comprises a clean operation space formed by at least one top wall and at least one surrounding wall, and at least one low-angle light micro-dust cleaning device for the clean room, which is used for leading in a negative pressure environment to absorb micro-dust in the clean operation space, and is characterized in that the low-angle light micro-dust cleaning device comprises:

a main body connected to the negative pressure environment, the main body including a set of rollers;

a set of low-angle light sources illuminating the absorption working area at a low angle, so that the reflected light of the absorption working area to the low-angle light sources is far away from an observation angle;

a dust generating device corresponding to the suction nozzle, when the micro dust is attached to a working surface of the operation space, the micro dust is driven away from the working surface by non-contact force for being sucked by the suction nozzle; and

and a set of microprocessors for driving the rollers.

10. The clean room of claim 9, further comprising a controller communicatively linked to said microprocessor and a plurality of light sensor assemblies, said light sensor assemblies comprising a plurality of light sensors disposed on said top wall and/or said surrounding wall.