CN111809217B - Electrochemical deposition and diamond cutting material increase and decrease manufacturing device and method - Google Patents
Electrochemical deposition and diamond cutting material increase and decrease manufacturing device and method Download PDFInfo
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- C25D—PROCESSES FOR THE ELECTROLYTIC OR ELECTROPHORETIC PRODUCTION OF COATINGS; ELECTROFORMING; APPARATUS THEREFOR
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B33—ADDITIVE MANUFACTURING TECHNOLOGY
- B33Y—ADDITIVE MANUFACTURING, i.e. MANUFACTURING OF THREE-DIMENSIONAL [3-D] OBJECTS BY ADDITIVE DEPOSITION, ADDITIVE AGGLOMERATION OR ADDITIVE LAYERING, e.g. BY 3-D PRINTING, STEREOLITHOGRAPHY OR SELECTIVE LASER SINTERING
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- B33Y—ADDITIVE MANUFACTURING, i.e. MANUFACTURING OF THREE-DIMENSIONAL [3-D] OBJECTS BY ADDITIVE DEPOSITION, ADDITIVE AGGLOMERATION OR ADDITIVE LAYERING, e.g. BY 3-D PRINTING, STEREOLITHOGRAPHY OR SELECTIVE LASER SINTERING
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Abstract
A device and a method for manufacturing materials by electrochemical deposition and diamond cutting increase and decrease belong to the technical field of mixed material increase and decrease manufacturing, wherein a working electrode is cleaned on the surface by acetone, isopropanol and deionized water and then dried for later use; installing a working electrode and injecting a supporting solution; observing the electrochemical current change in the electrochemical potentiostat system to ensure that the electrochemical deposition can be carried out; injecting a metal solution into the fluid force microscope, and performing electrochemical deposition by using the csv file; observing the metal precipitation process by using an X-ray microscope detection system in the deposition process; and (3) performing micro cutting on the position with the micro reentrant corner structure by using a diamond cutter with a micro edge circle radius, and designing a qualified mechanism according to design requirements. The invention utilizes localized electrochemical micro-additive to stack a microstructure main body, and secondarily trims and deposits the structure of the body by a micro-diamond cutter so as to meet the current high-precision requirements on the verticality and the parallelism at concave angles such as micro-grooves, micro-holes and the like of the microstructure.
Description
Technical Field
The invention belongs to the technical field of mixed material increase and decrease manufacturing, and particularly relates to a method for manufacturing material increase and decrease through electrochemical deposition and diamond cutting.
Background
With the increasing application of metal micro parts, the material-structure-performance integration requirement of the parts is gradually improved, and the manufacturing method of the complex micro parts is slightly insufficient. At present, an additive and subtractive processing mode of electrochemical deposition and electrolytic processing exists, and a mixed additive and subtractive manufacturing mode of subsequent mechanical processing of laser sintering processing also exists, but no additive and subtractive manufacturing mode of a combination mode of localized deposition and micro-processing of submicron metal micro parts is realized by a technology.
In the aspect of additive manufacturing, localized electrochemical deposition is an emerging metal micro-additive manufacturing technology, and first proposed in 1996 by Hunt et al, in which a three-dimensional structure is formed by stacking layer by layer at an atomic scale during deposition, wherein the localized electrochemical deposition technology based on a fluid force microscope has significant advantages in deposition accuracy and deposition rate. Localized electrochemical deposition directly forms a three-dimensional cantilever structure without mask deposition, and subsequent treatment is not needed; in the aspect of material reduction processing, the core idea of diamond micro-cutting processing is to install a diamond cutter with the cutting edge radius of a submicron cutter on a micro-motion platform, so that the three-dimensional movement of the diamond cutter is realized, and further, the cutting of the surface of a metal microstructure is realized. The cutting quality is guaranteed through the positioning precision and the repeated positioning precision of three moving shafts of the working platform; the two methods are combined in the same equipment to carry out the synergistic material increase and decrease manufacturing, which is an important supplement to the key technology of the existing micro part manufacturing, fully exerts the advantages of the submicron-level manufacturing precision of the localized electrochemical deposition manufacturing, and simultaneously can realize the high-precision metal micro-cutting by the diamond. The two technologies are cooperated to realize the in-situ material increase and decrease manufacturing of the micro structure.
The existing electrochemical micro-deposition technology has a large-bottom deposition structure, and a non-uniform deposition body structure is formed. Particularly, at the bonding position of the deposition body and the substrate, stray deposition, plating, and the like may occur. The micro-scale machining of the determined position can be realized by using the diamond cutter. Therefore, the technical problem that the manufacturing scale of the electro-deposition is small and the secondary processing is not facilitated is solved, and the purpose of in-situ secondary processing is realized by using the diamond cutter with the tiny cutter point.
Therefore, a new technical solution is needed to implement in-situ material-increasing and-decreasing manufacturing and processing of the micro metal structural component, and further expand the manufacturing and trimming methods of the metal micro structure.
Disclosure of Invention
The technical problem to be solved by the invention is as follows: firstly, utilizing localized electrochemical micro-deposition additive manufacturing to manufacture a metal cantilever microstructure with submicron scale; then, ultra-precisely cutting the metal microstructure by a micro diamond cutter; and finally, the electrochemical additive manufacturing technology and the diamond metal micro-cutting technology are cooperated to solve the technical problem of in-situ material increase and decrease processing of the metal microstructure.
Electrochemical deposition and diamond cutting increase and decrease material manufacturing installation, characterized by: comprises a vibration isolation system, an additive and subtractive manufacturing device body, a camera detection system, an X-ray microscope detection system, a Z-axis moving system, an electrochemical unit and a diamond cutting unit,
the vibration isolation system comprises a vibration isolation platform, an electrochemical potentiometer system and a master controller, wherein the vibration isolation platform is a device base and is used for isolating external vibration, and the electrochemical potentiometer system and the master controller are arranged on the upper part of the vibration isolation platform through bolts;
the material adding and reducing manufacturing device main body comprises a moving shaft shell, a longitudinal Y II guide rail, a cleaning groove, a longitudinal Y I guide rail and an X-direction guide rail, wherein the moving shaft shell is of a square hollow structure and is fixedly arranged on the vibration isolation platform; the longitudinal Y II guide rail is fixedly arranged at the bottom of the movable shaft shell through a bolt; the cleaning tank is arranged on the inner side of the longitudinal YII guide rail and is connected with the longitudinal YII guide rail in a sliding manner; the longitudinal YI guide rail is arranged at the upper part of the movable shaft shell and is parallel to the longitudinal YI guide rail; the X-direction guide rail is arranged at the upper part of the movable shaft shell and is vertical to the longitudinal YI guide rail;
the Z-axis moving system comprises a Z-axis protective cover, a Z-axis connecting plate, a fluid force microscope and a Z-axis moving base, the Z-axis moving base is arranged at the upper part of the X-direction guide rail, the Z-axis protective cover is connected with the Z-axis moving base through the Z-axis connecting plate, and the fluid force microscope is arranged on the Z-axis connecting plate;
the camera detection system comprises a top-view camera and a bottom-view camera, and the top-view camera is arranged on the side surface of the Z-axis protective cover; the bottom view camera is arranged on the bottom surface of the movable shaft shell;
the X-ray microscope detection system comprises an X-ray microscope receiving end, an X-ray microscope analog-to-digital converter and an X-ray microscope transmitting end, wherein the X-ray microscope receiving end is arranged at an opening on one side wall of the movable shaft shell, and the X-ray microscope transmitting end is arranged at an opening on the other side wall of the movable shaft shell and corresponds to the X-ray microscope receiving end; the X-ray microscope analog-to-digital converter is connected with the receiving end of the X-ray microscope;
the electrochemical unit is arranged in the movable shaft shell and comprises a working electrode, a reference electrode Ag/AgCl, a working electrode mounting bracket and a counter electrode with transparent glass; the working electrode is a silicon wafer with titanium and gold coatings; the reference electrode Ag/AgCl is the reference potential of the electrochemical unit; the working electrode mounting bracket is made of insulating materials and is arranged between the working electrode and a counter electrode with transparent glass to form a three-electrode electrochemical unit;
the diamond cutting unit comprises a diamond cutter with a tiny blade circle radius and a piezoelectric ceramic stack in the Z direction of the diamond cutter; the diamond cutter with a micro-edge circle radius is an actuating component for diamond micro-machining and is positioned at the lower end of the piezoelectric ceramic stack in the Z direction of the diamond cutter.
The X-direction and Y-direction movement of the diamond cutter with the small edge circle radius and a Z-axis movement system share one set of system, and the Z-direction movement system of the diamond cutter with the small edge circle radius performs micro-displacement movement through a piezoelectric ceramic stack in the Z direction of the diamond cutter.
The camera detection system further comprises a top-view camera fixing frame, wherein the top-view camera fixing frame is arranged on the side face of the Z-axis protection cover through a bolt and used for fixing the fixed top-view camera on the Z-axis protection cover.
The X-ray microscope transmitting end comprises an X-ray transmitting tube and an X-ray transmitting tube clamping end.
The Z-axis moving system further comprises a fluid force microscope connecting end, and the fluid force microscope connecting end is connected with the Z-axis connecting plate through a sliding groove and used for installing the fluid force microscope.
The manufacturing method of the electrochemical deposition and diamond cutting additive and subtractive material is characterized in that: the manufacturing device applying the electrochemical deposition and diamond cutting additive and subtractive material comprises the following steps,
step one, immersing a working electrode with titanium and gold coatings in an acetone solution, ultrasonically cleaning for 1 minute, taking out, cleaning the working electrode by using isopropanol to remove organic matters on the surface, secondarily cleaning the working electrode by using deionized water to remove inorganic matters on the surface, and drying the working electrode for later use;
step two, installing the working electrode in the working electrode installing support, screwing the working electrode by using a bolt made of an insulating material, and injecting a supporting solution into the counter electrode with transparent glass;
observing an electrochemical current signal through an electrochemical potentiostat system to ensure that electrochemical deposition can be carried out;
injecting an electrochemical inert metal solution into the fluid force microscope, and positioning the needle point of the fluid force microscope to the central position of the working electrode under the assistance of the top view camera and the bottom view camera; the structure designed by the three-dimensional software is stored as an stl file and then converted into a csv file for electrochemical deposition;
observing the integral process of separating out and forming solid metal in the metal solution flowing out of the fluid force microscope by using an X-ray microscope detection system;
and step six, performing micro cutting on the position with the micro reentrant corner structure through a diamond cutter with a micro edge circle radius, and cutting a qualified mechanism according to design requirements.
And fifthly, the process of separating out and forming solid metal in the metal solution is the process of converting metal ions into metal atoms.
Through the design scheme, the invention can bring the following beneficial effects: the electrochemical deposition and diamond cutting material increasing and decreasing manufacturing device and method utilize localized electrochemical micro additive to stack a micro structure body, and secondarily trim a deposition body structure through a micro diamond cutter so as to meet the current high-precision requirements on the verticality and the parallelism of concave angles such as micro grooves, micro holes and the like of a micro structure.
The invention has the further beneficial effects that:
1. the micro additive manufacturing process does not need mask process treatment, and can directly carry out a direct localized deposition process of the overhang structure.
2. And (3) processing a reentrant structure with high parallelism and verticality requirements by diamond micro-cutting.
3. The in-situ mixed additive and subtractive manufacturing is realized by combining two technologies of localized telephony deposition and diamond micro-cutting.
Drawings
The invention is further described in the following detailed description in conjunction with the drawings in which:
FIG. 1 is a schematic view of the apparatus for manufacturing additive/subtractive diamond-cutting by electrochemical deposition according to the present invention.
FIG. 2 is a cross-sectional view of the printing and cutting inspection of the manufacturing apparatus for electrochemical deposition and diamond cutting additive/subtractive material according to the present invention.
In the figure, 1-vibration isolation system, 101-vibration isolation platform, 102-electrochemical potentiometer system, 103-total controller, 2-manufacturing device body of material increase and decrease, 201-moving shaft shell, 202-longitudinal YI guide rail, 203-cleaning tank, 204-longitudinal YI guide rail, 205-X guide rail, 3-camera detection system, 301-top camera fixing frame, 302-top camera, 303-bottom camera, 4-X-ray microscope detection system, 401-X-ray microscope receiving end, 402-X-ray microscope analog-to-digital converter, 403-X-ray microscope transmitting end, 404-X-ray transmitting tube, 405-X-ray transmitting tube clamping end, 5-Z-axis moving system, 501-Z-axis protective cover, 502-Z-axis connecting plate, 503-fluid force microscope, 504-fluid force microscope connecting end, 505-Z-axis moving base, 6-electrochemical unit, 601-working electrode, 602-reference electrode Ag/AgCl, 603-working electrode mounting bracket, 604-counter electrode with transparent glass, 7-fluid force microscope connecting end, 505-Z-axis moving base, diamond cutter round diamond cutter with micro-Z-radius, piezoelectric diamond cutter ceramic blade stacking and Z-direction diamond cutter stacking ceramic.
Detailed Description
As shown in fig. 1 and 2, the apparatus for manufacturing an additive/subtractive diamond material by electrochemical deposition and diamond cutting includes a vibration isolation system 1, an additive/subtractive material manufacturing apparatus main body 2, a camera detection system 3, an X-ray microscope detection system 4, a Z-axis movement system 5, an electrochemical cell 6, and a diamond cutting cell 7.
The vibration isolation system 1 comprises a vibration isolation platform 101, an electrochemical potentiostat system 102 and a master controller 103; the vibration isolation platform 101 is a base of the whole device and isolates external vibration, and the electrochemical potentiostat system 102 and the master controller 103 are mounted on the vibration isolation platform 101 through bolts.
The material adding and reducing manufacturing device main body 2 comprises a moving shaft shell 201, a longitudinal YI guide rail 202, a cleaning tank 203, a longitudinal YI guide rail 204 and an X-direction guide rail 205; the moving shaft shell 201 is fixed on the vibration isolation platform 101, the moving shaft shell 201 is a hollow structure, the longitudinal YII guide rail 202 is fixed at the bottom of the moving shaft shell 201 through bolts, the cleaning tank 203 is placed at the left end of the longitudinal YII guide rail 202, the cleaning tank 203 can move along the longitudinal YII guide rail 202, the longitudinal YI guide rail 204 is located at the upper part of the moving shaft shell 201 and is parallel to the longitudinal YII guide rail 202 and is in a vertical position relation, the X-direction guide rail 205 is perpendicular to the longitudinal YI guide rail 204, and the whole Z-axis moving system 5 is located on the X-direction guide rail 205.
The camera detection system 3 comprises a top-view camera fixing frame 301, a top-view camera 302 and a bottom-view camera 303; the top view camera fixing frame 301 is installed on the side face of the Z-axis protection cover 501 through bolts, the top view camera 302 is installed on the top view camera fixing frame 301, and the bottom view camera 303 is located on the bottom face of the hollow structure of the movable shaft shell 201.
The X-ray microscope detection system 4 comprises an X-ray microscope receiving end 401, an X-ray microscope analog-to-digital converter 402, an X-ray microscope transmitting end 403, an X-ray transmitting tube 404 and an X-ray transmitting tube clamping end 405; an X-ray microscope receiving end 401 is fixed at an opening on the side face of the movable shaft shell 201, an X-ray microscope analog-to-digital converter 402 is connected with the X-ray microscope receiving end 401 and is responsible for processing analog data obtained by the X-ray microscope receiving end 401, and an X-ray microscope transmitting end 403 is installed at an opening on the other side of the movable shaft shell 201 and is responsible for transmitting X-rays.
The Z-axis moving system 5 comprises a Z-axis protective cover 501, a Z-axis connecting plate 502, a fluid force microscope 503, a fluid force microscope connecting end 504 and a Z-axis moving base 505; the Z-axis protective cover 501 is the uppermost end of the Z axis and is used as a protective device, the Z-axis connecting plate 502 is a bridge for connecting the Z-axis protective cover 501 and the Z-axis moving base 505, the fluid force microscope 503 is installed at the lower end of the connecting end 504 of the fluid force microscope and is an executive component for additive manufacturing, the localized, oriented and quantitative forward manufacturing of the metal microstructure is realized by utilizing the principle of electrochemical deposition, one end of the connecting end 504 of the fluid force microscope is connected to the Z-axis connecting plate 502 through a chute, one end of the connecting end is connected with the fluid force microscope 503, and the Z-axis moving base 505 is a base of the whole Z-axis moving system 5 and is responsible for the whole X/Y direction movement of the Z-axis moving system 5.
The electrochemical unit 6 comprises a working electrode 601, a reference electrode Ag/AgCl602, a working electrode mounting bracket 603 and a counter electrode 604 with transparent glass; the working electrode 601 is a silicon wafer with titanium and gold coatings as a substrate for localized electrochemical deposition, all structures are grown on the working electrode, the reference electrode Ag/AgCl602 is used as a reference potential of an electrochemical unit, the magnitude of applied interelectrode voltage is the potential of the reference electrode Ag/AgCl602, and the working electrode mounting bracket 603 is made of an insulating material and separates the working electrode 601 from the counter electrode 604 with transparent glass to form a three-electrode electrochemical unit.
The diamond cutting unit 7 comprises a diamond cutter 701 with a tiny edge circle radius, and a piezoelectric ceramic stack 702 in the Z direction of the diamond cutter; the diamond tool 701 with the tiny cutting edge circle radius is an executing part for diamond micro-machining and is positioned at the lower end of a piezoelectric ceramic stack 702 in the Z direction of the diamond tool, the movement of the diamond tool 701 with the tiny cutting edge circle radius in the X/Y directions shares a set of system with a Z-axis moving system 5, and the Z-direction moving system of the diamond tool 701 with the tiny cutting edge circle radius performs micro-displacement movement through the piezoelectric ceramic stack 702 in the Z direction of the diamond tool.
The manufacturing method of the electrochemical deposition and diamond cutting additive and subtractive material, which applies the manufacturing device of the electrochemical deposition and diamond cutting additive and subtractive material, comprises the following steps,
firstly, immersing a working electrode 601 with titanium and gold plating layers in an acetone solution for ultrasonic cleaning for 1 minute, taking out the working electrode 601 by using a pair of tweezers, cleaning the surface by using isopropanol to remove organic matters on the surface of the electrode, then cleaning the surface by using deionized water for the second time to remove inorganic matters on the surface of the electrode, and drying the working electrode 601 for later use.
Step two, the working electrode 601 is mounted in the working electrode mounting bracket 603 and screwed with a bolt of an insulating material, and a supporting solution (54 mM H) is injected into the counter electrode 604 with transparent glass 2 SO 4 And 0.5mM HCl mixed solution) until the working electrode 601 is completely submerged.
And step three, observing an electrochemical current signal through the electrochemical potentiometer system 102, wherein the electrochemical polarization current signal is stabilized at about 1mA at the temperature of 25 ℃, and ensuring that electrochemical deposition can be carried out.
Injecting an electrochemical inert metal solution into the fluid force microscope 503, and positioning the needle point of the fluid force microscope 503 to the middle of the working electrode 601 under the assistance of the top view camera 302 and the bottom view camera 303. The structure designed by the three-dimensional software is stored as an stl file and then converted into a csv file for electrochemical deposition.
And step five, observing the whole process of precipitating and forming solid metal in the metal solution flowing out of the fluid force microscope 503 by using the X-ray microscope detection system 4. Thereby characterizing the process of converting metal ions to metal atoms.
And step six, performing fine cutting on the position with the micro reentrant corner structure through the diamond cutter 701 with the micro cutting edge radius, and designing a qualified mechanism according to design requirements.
Claims (7)
1. Electrochemical deposition and diamond cutting increase and decrease material manufacturing installation, characterized by: comprises a vibration isolation system (1), an additive and subtractive material manufacturing device main body (2), a camera detection system (3), an X-ray microscope detection system (4), a Z-axis moving system (5), an electrochemical unit (6) and a diamond cutting unit (7),
the vibration isolation system (1) comprises a vibration isolation platform (101), an electrochemical potentiostat system (102) and a master controller (103), wherein the vibration isolation platform (101) is a device base and is used for isolating external vibration, and the electrochemical potentiostat system (102) and the master controller (103) are both arranged on the upper part of the vibration isolation platform (101) through bolts;
the material adding and reducing manufacturing device main body (2) comprises a moving shaft shell (201), a longitudinal YI guide rail (202), a cleaning groove (203), a longitudinal YI guide rail (204) and an X-direction guide rail (205), wherein the moving shaft shell (201) is of a square hollow structure and is fixedly arranged on the vibration isolation platform (101); the longitudinal YI guide rail (202) is fixedly arranged at the bottom of the movable shaft shell (201) through a bolt; the cleaning tank (203) is arranged on the inner side of the longitudinal YII guide rail (202) and is connected with the longitudinal YII guide rail (202) in a sliding manner; the longitudinal YI guide rail (204) is arranged at the upper part of the moving shaft shell (201) and is parallel to the longitudinal YI guide rail (202); the X-direction guide rail (205) is arranged at the upper part of the moving shaft shell (201) and is vertical to the longitudinal YI guide rail (204);
the Z-axis moving system (5) comprises a Z-axis protective cover (501), a Z-axis connecting plate (502), a fluid force microscope (503) and a Z-axis moving base (505), wherein the Z-axis moving base (505) is arranged at the upper part of the X-direction guide rail (205), the Z-axis protective cover (501) is connected with the Z-axis moving base (505) through the Z-axis connecting plate (502), and the fluid force microscope (503) is arranged on the Z-axis connecting plate (502);
the camera detection system (3) comprises a top-view camera (302) and a bottom-view camera (303), wherein the top-view camera (302) is arranged on the side surface of the Z-axis protective cover (501); the bottom view camera (303) is arranged on the bottom surface of the movable shaft shell (201);
the X-ray microscope detection system (4) comprises an X-ray microscope receiving end (401), an X-ray microscope analog-to-digital converter (402) and an X-ray microscope transmitting end (403), wherein the X-ray microscope receiving end (401) is arranged at an opening of one side wall of the movable shaft shell (201), and the X-ray microscope transmitting end (403) is arranged at an opening of the other side wall of the movable shaft shell (201) and corresponds to the X-ray microscope receiving end (401); the X-ray microscope analog-to-digital converter (402) is connected with an X-ray microscope receiving end (401);
the electrochemical unit (6) is arranged in the movable shaft shell (201) and comprises a working electrode (601), a reference electrode Ag/AgCl (602), a working electrode mounting bracket (603) and a counter electrode (604) with transparent glass; the working electrode (601) is a silicon wafer with titanium and gold plating layers; the reference electrode Ag/AgCl (602) is the reference potential of the electrochemical unit (6); the working electrode mounting bracket (603) is made of insulating materials and is arranged between the working electrode (601) and a counter electrode (604) with transparent glass to form a three-electrode electrochemical unit;
the diamond cutting unit (7) comprises a diamond cutter (701) with a tiny edge circle radius and a piezoelectric ceramic stack (702) of the diamond cutter in the Z direction; the diamond cutter (701) with a small edge circle radius is an executive component for diamond micro-machining and is positioned at the lower end of the piezoelectric ceramic stack (702) of the diamond cutter in the Z direction.
2. The apparatus as claimed in claim 1, wherein the apparatus comprises: the X-direction and Y-direction movement of the diamond cutter (701) with the small edge circle radius and a Z-axis movement system (5) share one set of system, and the Z-direction movement system of the diamond cutter (701) with the small edge circle radius performs micro-displacement movement through a piezoelectric ceramic stack (702) in the Z direction of the diamond cutter.
3. The apparatus as claimed in claim 1, wherein the apparatus comprises: the camera detection system (3) further comprises a top-view camera fixing frame (301), wherein the top-view camera fixing frame (301) is arranged on the side face of the Z-axis protection cover (501) through a bolt and used for fixing the fixed top-view camera (302) on the Z-axis protection cover (501).
4. The apparatus as claimed in claim 1, wherein the apparatus comprises: the X-ray microscope launching end (403) comprises an X-ray launching tube (404) and an X-ray launching tube clamping end (405).
5. The manufacturing apparatus of electrochemical deposition and diamond cutting additive/subtractive material according to claim 1, wherein: the Z-axis moving system (5) further comprises a fluid force microscope connecting end (504), and the fluid force microscope connecting end (504) is connected with the Z-axis connecting plate (502) through a sliding groove and used for installing a fluid force microscope (503).
6. The manufacturing method of the electrochemical deposition and diamond cutting additive and subtractive material is characterized in that: the device for manufacturing additive/subtractive diamond material by using electrochemical deposition and diamond cutting according to claim 1, comprising the steps of,
step one, immersing a working electrode (601) with a titanium and gold coating in an acetone solution, ultrasonically cleaning for 1 minute, taking out, cleaning the working electrode (601) by using isopropanol, removing organic matters on the surface, secondarily cleaning the working electrode (601) by using deionized water, removing inorganic matters on the surface, and drying the working electrode (601) for later use;
step two, installing the working electrode (601) in a working electrode installing support (603), screwing the working electrode with a bolt made of an insulating material, and injecting a supporting solution into a counter electrode (604) with transparent glass;
observing an electrochemical current signal through an electrochemical potentiostat system (102) to ensure that electrochemical deposition can be carried out;
injecting an electrochemical inert metal solution into the fluid force microscope (503), and positioning the needle tip of the fluid force microscope (503) to the central position of the working electrode (601) under the assistance of the top view camera (302) and the bottom view camera (303); the structure designed by the three-dimensional software is saved as an stl file and then converted into a csv file for electrochemical deposition;
observing the whole process of precipitating and forming solid metal in the metal solution flowing out of the fluid force microscope (503) by using an X-ray microscope detection system (4);
and step six, performing fine cutting on the part with the micro reentrant corner structure through a diamond cutter (701) with the micro cutting edge circle radius, and cutting an acceptable mechanism according to design requirements.
7. The method as claimed in claim 6, wherein the material is selected from the group consisting of: and fifthly, the process of separating out and forming solid metal in the metal solution is the process of converting metal ions into metal atoms.
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| DE4307869C2 (en) * | 1993-03-12 | 1996-04-04 | Microparts Gmbh | Microstructure body and process for its manufacture |
| JP3795611B2 (en) * | 1997-02-25 | 2006-07-12 | 独立行政法人科学技術振興機構 | Rapid prototyping of metal parts by electrolyte jet machining |
| CN104593830A (en) * | 2013-11-01 | 2015-05-06 | 无锡华臻新能源科技有限公司 | Electrochemical additive manufacturing method with measuring feedback, and apparatus thereof |
| CN108220915B (en) * | 2017-12-30 | 2020-04-07 | 天津大学 | Micro-additive and micro-additive composite manufacturing method for preparation of graphical diamond film |
| WO2020118365A1 (en) * | 2018-12-11 | 2020-06-18 | Deakin University | Method of nanofabrication |
| CN109913930B (en) * | 2019-03-03 | 2020-10-20 | 吉林大学 | Array composite electric field metal electrochemical micro-nano scale additive manufacturing device and method |
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