CN111785854A - Display panel, manufacturing method thereof and display device - Google Patents

Display panel, manufacturing method thereof and display device Download PDF

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Publication number
CN111785854A
CN111785854A CN202010793484.5A CN202010793484A CN111785854A CN 111785854 A CN111785854 A CN 111785854A CN 202010793484 A CN202010793484 A CN 202010793484A CN 111785854 A CN111785854 A CN 111785854A
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China
Prior art keywords
layer
electrode
openings
display panel
opening
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李泽亮
崔国意
丁小琪
贾立
高涛
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BOE Technology Group Co Ltd
Chengdu BOE Optoelectronics Technology Co Ltd
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BOE Technology Group Co Ltd
Chengdu BOE Optoelectronics Technology Co Ltd
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Priority to CN202010793484.5A priority Critical patent/CN111785854A/en
Publication of CN111785854A publication Critical patent/CN111785854A/en
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    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10KORGANIC ELECTRIC SOLID-STATE DEVICES
    • H10K50/00Organic light-emitting devices
    • H10K50/80Constructional details
    • H10K50/805Electrodes
    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10KORGANIC ELECTRIC SOLID-STATE DEVICES
    • H10K59/00Integrated devices, or assemblies of multiple devices, comprising at least one organic light-emitting element covered by group H10K50/00
    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10KORGANIC ELECTRIC SOLID-STATE DEVICES
    • H10K59/00Integrated devices, or assemblies of multiple devices, comprising at least one organic light-emitting element covered by group H10K50/00
    • H10K59/10OLED displays
    • H10K59/12Active-matrix OLED [AMOLED] displays
    • H10K59/1201Manufacture or treatment
    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10KORGANIC ELECTRIC SOLID-STATE DEVICES
    • H10K59/00Integrated devices, or assemblies of multiple devices, comprising at least one organic light-emitting element covered by group H10K50/00
    • H10K59/10OLED displays
    • H10K59/12Active-matrix OLED [AMOLED] displays
    • H10K59/122Pixel-defining structures or layers, e.g. banks
    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10KORGANIC ELECTRIC SOLID-STATE DEVICES
    • H10K71/00Manufacture or treatment specially adapted for the organic devices covered by this subclass

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  • Engineering & Computer Science (AREA)
  • Manufacturing & Machinery (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Electroluminescent Light Sources (AREA)

Abstract

The invention discloses a display panel, a manufacturing method thereof and a display device, wherein the display panel comprises: the pixel structure comprises a substrate, a plurality of first electrodes, a pixel definition layer, a second electrode, a light-emitting layer and a plurality of photosensitive detection units; a pixel definition layer comprising: a plurality of first openings respectively exposing the first electrodes, and a plurality of second openings respectively corresponding to the photosensitive detection units; a second electrode comprising: a plurality of third openings corresponding to the second openings, respectively; the orthographic projection of the third opening on the substrate base plate and the orthographic projection of the corresponding photosensitive detection unit on the substrate base plate have an overlapping area. The plurality of second openings are arranged in the pixel defining layer, and the third openings are arranged in the second electrode, so that reflected light of a finger directly passes through the third openings and the second openings to irradiate the photosensitive detection unit, loss of the reflected light is reduced, intensity of light irradiating the photosensitive detection unit is increased, and fingerprint identification precision is improved.

Description

Display panel, manufacturing method thereof and display device
Technical Field
The present invention relates to the field of display technologies, and in particular, to a display panel, a manufacturing method thereof, and a display device.
Background
With the rapid development of display technology, in addition to the functions of traditional information display, the fingerprint recognition function of an Organic Light-Emitting Diode (OLED) display is gradually becoming the standard of the display, and the requirement on the shape is gradually increasing, and the larger screen occupation ratio is the trend of the future market, so the in-screen fingerprint recognition technology is favored by consumers.
However, for the display for fingerprint identification in the screen, the reflected light of the finger needs to pass through the films such as the cathode and the like to be emitted to the photosensitive sensor, and at least half of the light is lost when the reflected light passes through the films such as the cathode and the like, so that the light emitted to the photosensitive sensor is less, and the fingerprint identification effect is poor.
Disclosure of Invention
The embodiment of the invention provides a display panel, a manufacturing method thereof and a display device, which are used for solving the problem of poor fingerprint identification effect in the related art.
In a first aspect, an embodiment of the present invention provides a display panel, including: the photosensitive detection device comprises a substrate, a plurality of first electrodes, a pixel defining layer, a second electrode, a light-emitting layer and a plurality of photosensitive detection units, wherein the first electrodes are positioned on the substrate, the pixel defining layer is positioned on one side, away from the substrate, of the first electrodes, the second electrode is positioned on one side, away from the substrate, of the pixel defining layer, the light-emitting layer is positioned between the first electrodes and the second electrodes, and the photosensitive detection units are positioned on one side, away from the second electrodes, of the light-emitting layer;
the pixel definition layer includes: a plurality of first openings respectively exposing each of the first electrodes, and a plurality of second openings respectively corresponding to each of the photosensitive detection units;
the second electrode includes: a plurality of third openings corresponding to the second openings, respectively;
the orthographic projection of the third opening on the substrate base plate and the orthographic projection of the corresponding photosensitive detection unit on the substrate base plate have an overlapping area.
In a possible implementation manner, in the display panel provided in the embodiment of the present invention, the second electrode covers a sidewall of the second opening;
the cross-sectional area of the second opening in the direction parallel to the substrate base plate gradually increases in the direction in which the substrate base plate points to the light emitting layer.
In a possible implementation manner, in the display panel provided in the embodiment of the present invention, the display panel further includes: a plurality of support structures located between the pixel defining layer and the second electrode;
the support structure comprises a fourth opening corresponding to the second opening;
the second electrode covers the side wall of the fourth opening;
in the direction of the substrate base plate pointing to the light-emitting layer, the cross-sectional area of the fourth opening in the direction parallel to the substrate base plate gradually increases.
In a possible implementation manner, in the display panel provided in the embodiment of the present invention, the first inclination angle is greater than or equal to the second inclination angle;
the first inclined angle is an included angle between the side wall of the second opening and the bottom surface of the pixel defining layer; the bottom surface of the pixel defining layer is the surface of one side of the pixel defining layer close to the substrate base plate;
the second inclined angle is an included angle between the side wall of the fourth opening and the top surface of the pixel defining layer; the top surface of the pixel definition layer is the surface of the pixel definition layer far away from the substrate.
In a possible implementation manner, in the display panel provided by the embodiment of the present invention, the first inclination angle is greater than or equal to 45 ° and less than 90 °;
the second inclination angle is greater than or equal to 15 ° and less than or equal to 45 °.
In a possible implementation manner, in the display panel provided in the embodiment of the present invention, a sidewall of the second opening is a plane or an arc;
the side wall of the fourth opening is a plane or an arc surface.
In one possible implementation manner, in the display panel provided by the embodiment of the present invention, the pixel defining layer includes a material that is opaque to light.
In a possible implementation manner, in the display panel provided in the embodiment of the present invention, the display panel further includes: the flat layer is positioned on one side of the first electrode close to the substrate;
the photosensitive detection unit is located between the substrate base plate and the flat layer.
In a possible implementation manner, in the display panel provided in the embodiment of the present invention, the display panel further includes: an organic inhibiting layer between the light emitting layer and the second electrode;
the organic inhibiting layer includes: a plurality of organic suppressing units respectively corresponding to the photosensitive detecting units.
In a second aspect, an embodiment of the present invention further provides a display device, including: the display panel is provided.
In a third aspect, an embodiment of the present invention further provides a manufacturing method of the display panel, including:
forming a plurality of photosensitive detection units and a plurality of first electrodes on a substrate;
forming a pixel definition layer on the film layer where the first electrode is located, and patterning the pixel definition layer to obtain a plurality of first openings and a plurality of second openings;
forming a light emitting layer over the pixel defining layer;
and forming a patterned second electrode on the light-emitting layer to obtain a plurality of third openings.
In a possible implementation manner, in the manufacturing method provided by the embodiment of the invention, the forming a patterned second electrode over the light emitting layer to obtain a plurality of third openings includes:
shielding positions except the photosensitive detection units by using a mask plate, and evaporating an organic inhibition layer on the light-emitting layer; the organic inhibiting layer is used for inhibiting the second electrode from forming a film;
and evaporating the second electrode on the organic inhibition layer to form the patterned second electrode.
The invention has the following beneficial effects:
the display panel, the manufacturing method thereof and the display device provided by the embodiment of the invention comprise the following steps: the photosensitive detection device comprises a substrate base plate, a plurality of first electrodes, a pixel definition layer, a second electrode, a light-emitting layer and a plurality of photosensitive detection units, wherein the plurality of first electrodes are positioned on the substrate base plate; a pixel definition layer comprising: a plurality of first openings respectively exposing the first electrodes, and a plurality of second openings respectively corresponding to the photosensitive detection units; a second electrode comprising: a plurality of third openings corresponding to the second openings, respectively; the orthographic projection of the third opening on the substrate base plate and the orthographic projection of the corresponding photosensitive detection unit on the substrate base plate have an overlapping area. The plurality of second openings are arranged in the pixel defining layer, and the third openings are arranged in the second electrode, so that reflected light of a finger directly passes through the third openings and the second openings to irradiate the photosensitive detection unit, loss of the reflected light is reduced, intensity of light irradiating the photosensitive detection unit is increased, and fingerprint identification precision is improved.
Drawings
Fig. 1 is a schematic top view of a display panel according to an embodiment of the present invention;
FIG. 2 is one of the cross-sectional illustrations taken along line AA' of FIG. 1;
FIG. 3 is a partial schematic view of a concentrator with a second electrode formed at a second opening;
fig. 4-6 are simplified schematic diagrams of a concentrator with a second electrode formed at a second opening and a fourth opening according to an embodiment of the present invention;
FIG. 7 is a second schematic cross-section taken along line AA' of FIG. 1;
FIG. 8 is a three-part schematic cross-section taken along line AA' of FIG. 1;
fig. 9 is a flowchart of a method for manufacturing the display panel according to an embodiment of the invention;
fig. 10 to fig. 14 are schematic structural diagrams corresponding to steps in the manufacturing method according to the embodiment of the present invention.
Detailed Description
The embodiment of the invention provides a display panel, a manufacturing method thereof and a display device, aiming at the problem of poor fingerprint identification effect in the related art.
Embodiments of a display panel, a method for manufacturing the same, and a display device according to embodiments of the present invention will be described in detail below with reference to the accompanying drawings. The thicknesses and shapes of the various film layers in the drawings are not to be considered true proportions, but are merely intended to illustrate the present invention.
In a first aspect, an embodiment of the present invention provides a display panel, fig. 1 is a schematic top view structure diagram of the display panel provided in the embodiment of the present invention, and fig. 2 is a schematic cross-sectional view taken along line AA' in fig. 1, as shown in fig. 1 and fig. 2, including: the liquid crystal display device comprises a substrate 10, a plurality of first electrodes 11 positioned on the substrate 10, a pixel defining layer 12 positioned on one side of the first electrodes 11, which is far away from the substrate 10, a second electrode 13 positioned on one side of the pixel defining layer 12, which is far away from the substrate 10, a light-emitting layer 14 positioned between the first electrodes 11 and the second electrode 13, and a plurality of photosensitive detection units 15 positioned on one side of the light-emitting layer 14, which is far away from the second electrode 13;
a pixel defining layer 12 comprising: a plurality of first openings U1 exposing the respective first electrodes 11, and a plurality of second openings U2 corresponding to the respective photosensitive detection cells 15, respectively;
a second electrode 13 comprising: a plurality of third openings U3 corresponding to the second openings U2, respectively;
the orthographic projection of the third opening U3 on the substrate base plate 10 has an overlapping area with the orthographic projection of the corresponding photosensitive detection unit 15 on the substrate base plate 10.
In the display panel provided by the embodiment of the invention, the plurality of second openings respectively corresponding to the photosensitive detection units are arranged in the pixel defining layer, the pair of third openings respectively corresponding to the second openings are arranged in the second electrode, and the orthographic projection of the third openings on the substrate and the orthographic projection of the corresponding photosensitive detection units on the substrate have an overlapped area, so that the reflected light of the finger directly passes through the third openings and the second openings to irradiate the photosensitive detection units, the loss of the reflected light is reduced, the intensity of the light irradiating the photosensitive detection units is increased, and the fingerprint identification precision is improved.
As shown in fig. 2, the pixel defining layer 12 may define a region of each sub-pixel, and in particular, the pixel defining layer 12 includes a plurality of first openings U1 exposing each first electrode 11, respectively, so that the light emitting layer 14 may be in contact with the first electrode 11, and carriers are supplied to the light emitting layer 14 through the first electrode 11 and the second electrode 13, respectively, to cause the light emitting layer 14 to emit light. In practical applications, the light emitting layer 14 may include a plurality of light emitting units corresponding to the first openings U1, or the light emitting layer 14 may be provided as a whole layer, which is not limited herein, and a functional layer such as a hole injection layer, a hole transport layer, an electron injection layer, or an electron transport layer may be provided between the first electrode 11 and the second electrode 13, and the functional layer may be provided as a functional unit corresponding to each of the first openings U1, or the functional layer may be provided as a whole layer, which is not limited herein.
In the present embodiment, the first electrode 11 is an anode and the second electrode 13 is a cathode, or the first electrode 11 is a cathode and the second electrode 13 is an anode, and in the present embodiment, the first electrode 11 is an anode and the second electrode 13 is a cathode. In a specific implementation, the first electrode 11 may be made of a transparent conductive oxide such as Indium Tin Oxide (ITO), and the second electrode 13 may be made of a metal material or an alloy such as silver and magnesium. Referring to fig. 1, the second electrode 13 is disposed over the entire area except for the third openings U3.
As shown in fig. 1, each photosensitive detection unit 15 may be disposed in the fingerprint identification area C, and the photosensitive detection unit 15 is located in the non-opening area between the sub-pixels, and in conjunction with fig. 2, when a touch is made in the fingerprint identification area C by the finger F, the light emitted from the light emitting layer 14 is emitted to the finger F, and the reflected light of the finger F is emitted to the photosensitive detection unit 15 through the third opening U3 in the second electrode 13 and the second opening U2 in the pixel defining layer 12, so that the fingerprint pattern of the finger F can be obtained by detecting the intensity of the light received by each photosensitive detection unit 15 due to the difference in the intensity of the reflected light from the valleys and ridges in the finger F. In the embodiment of the present invention, by providing a plurality of second openings U2 in the pixel defining layer 12, providing a plurality of third openings U3 in the second electrode 13, and providing an overlapping area between the orthographic projection of the third opening U3 on the substrate 10 and the orthographic projection of the corresponding photosensitive detection unit 15 on the substrate 10, the reflected light of the finger F can be emitted to the photosensitive detection unit 15 through the third opening U3 and the second opening U2, without passing through the second electrode 13 and the pixel defining layer 12, the loss of the reflected light of the finger F can be reduced, the intensity of the light emitted to the photosensitive detection unit 15 can be increased, and the fingerprint identification effect can be improved.
As shown in fig. 1, the fingerprint identification area C is shown as being disposed at a lower position in the display panel for example, in a specific implementation, the fingerprint identification area C may also be disposed at other positions, which is not limited herein, for example, the fingerprint identification area C may also be disposed at an upper position in the display panel, or the fingerprint identification area C may also be disposed to be consistent with the display area of the display panel, so as to implement full-screen fingerprint identification.
As shown in fig. 2, the photosensitive detection unit 15 may be located inside the display panel, that is, the photosensitive detection unit 15 may be located between the light emitting layer 14 and the substrate base plate 10, or the photosensitive detection unit 15 may also be located on a side of the substrate base plate 10 away from the light emitting layer 14, in a specific implementation, a plurality of photosensitive detection units 15 may be fabricated on a silicon-based substrate, and then the silicon-based substrate is attached to a side of the substrate base plate 10 away from the light emitting layer 14 by using a transparent optical adhesive.
Further, in the display panel provided in the embodiment of the present invention, as shown in fig. 2, the second electrode 13 covers a sidewall of the second opening U2;
in a direction (upward direction in the drawing) in which the base substrate 10 is directed to the light-emitting layer 14, the cross-sectional area of the second opening U2 in a direction parallel to the base substrate 10 gradually increases.
That is to say, the second opening U2 is funnel-shaped, for example, in the cross-sectional view shown in fig. 2, the second opening U2 is inverted trapezoid, and since the second electrode 13 is generally made of metal or alloy material, the second electrode 13 has high reflectivity, the second electrode 13 covers the side wall of the second opening U2, so that the second electrode 13 forms a funnel-shaped light collector at the second opening U2, and therefore, the reflected light of the finger F is reflected to the photosensitive detection unit 15 through the light collector, thereby expanding the light receiving range of the photosensitive detection unit 15, improving the utilization rate of light, further improving the fingerprint identification accuracy, and enhancing the fingerprint identification effect.
Fig. 3 is a partial schematic view of the light collector formed by the second electrode 13 at the second opening U2, and it is apparent from fig. 3 that the light reflected by the finger F is reflected back and forth in the light collector and finally emitted to the photosensitive detection unit after being emitted to the light collector, thereby significantly expanding the light receiving range of the photosensitive detection unit.
Further, as shown in fig. 2, the display panel provided in the embodiment of the present invention may further include: a plurality of support structures 16 located between the pixel defining layer 12 and the second electrode 13;
the support structure 16 includes a fourth opening U4 corresponding to the second opening U2;
the second electrode 13 covers the sidewall of the fourth opening U4;
the sectional area of the fourth opening U4 in the direction parallel to the base substrate 10 gradually increases in the direction in which the base substrate 10 is directed toward the light-emitting layer 14 (upward direction in the drawing).
By providing the support structure 16 between the pixel defining layer 12 and the second electrode 13, the support structure 16 includes a fourth opening U4 corresponding to the second opening U2, referring to fig. 2, it can be understood that the support structure 16 can be a ring-shaped structure, since the cross-sectional area of the fourth opening U4 in the direction parallel to the substrate 10 is gradually increased in the direction of the substrate 10 toward the light emitting layer 14, and the second electrode 13 is provided to cover the side wall of the fourth opening U4, the volume of the light collector can be further increased, that is, the second electrode 13 covers the second opening U2 and the fourth opening U4, a larger funnel-shaped light collector can be formed, and therefore, the reflected light emitted to the positions of the side wall of the fourth opening U4 and the side wall of the second opening U2 can be reflected and finally emitted to the photodetecting unit 15, thereby further increasing the light receiving range of the photodetecting unit 15, the fingerprint identification effect is further enhanced.
In practical implementation, the minimum cross-sectional area of the fourth opening U4 in the direction parallel to the substrate base plate 10 may be greater than or equal to the maximum cross-sectional area of the second opening U2 in the direction parallel to the substrate base plate 10, and the bottom of the side wall of the fourth opening U4 may be connected to the top of the side wall of the second opening U2, so that the inner walls of the formed condenser are all inclined surfaces, and the condensing effect is better.
In practical applications, the display panel provided in the embodiment of the present invention may further include: the spacer 18 located between the pixel defining layer 12 and the second electrode 13 can be fabricated by the same patterning process as the spacer 18 in the actual process, thereby saving one step of fabrication process and cost.
Specifically, in the display panel provided by the embodiment of the present invention, referring to fig. 2, the first inclination angle α is greater than or equal to the second inclination angle β;
the first inclination angle α is an angle between a sidewall of the second opening U2 and the bottom surface of the pixel defining layer 12; the bottom surface of the pixel defining layer 12 is the surface of the pixel defining layer 12 close to the substrate 10;
the second inclination angle β is an included angle between the sidewall of the fourth opening U4 and the top surface of the pixel defining layer 12; the top surface of the pixel defining layer 12 is a surface of the pixel defining layer 12 on a side away from the substrate base plate 10.
Thus, the aperture of the condenser formed by the second electrode 13 at the second opening U2 and the fourth opening U4 is gradually increased in the direction of the base substrate 10 toward the light-emitting layer 14, so that the condensing effect of the condenser is high. Under the condition that the process conditions allow, the larger the angle of the first inclination angle alpha is, the better the light condensation effect of the light condenser is, and the smaller the second inclination angle beta is, the better the light condensation effect is on the premise of ensuring.
More specifically, in the display panel provided in the embodiment of the present invention, as shown in fig. 2, the first inclination angle α is greater than or equal to 45 ° and less than 90 °; the second inclination angle β is greater than or equal to 15 ° and less than or equal to 45 °, so that the first inclination angle α is greater than or equal to the second inclination angle β, and a good light condensing effect of the light condenser is ensured, and the second opening U2 and the fourth opening U4 are relatively easily formed in a process manufacturing process. In specific implementation, the pixel defining layer 12 and the supporting structure 16 may be made of photosensitive materials, and the first opening U1, the second opening U2, and the fourth opening U4 are obtained through a photolithography process, and the magnitudes of the first inclination angle α and the second inclination angle β may be adjusted by adjusting parameters in the photolithography process, for example, parameters such as light intensity or exposure time in an exposure process may be adjusted.
In a specific implementation, in the display panel provided in the embodiment of the present invention, referring to fig. 2, a side wall of the second opening U2 is a plane or an arc;
the side wall of the fourth opening U4 is a plane or an arc.
Fig. 4 to 6 are simplified schematic diagrams of the light collector formed by the second electrode at the second opening and the fourth opening in the embodiment of the present invention, where W1 denotes a portion corresponding to the second opening U2, W2 denotes a portion corresponding to the fourth opening U4, as shown in fig. 4, the sidewalls of the second opening U2 and the fourth opening U4 corresponding to the light collector are both planar, as shown in fig. 5, the sidewalls of the second opening U2 and the fourth opening U4 corresponding to the light collector are both planar, and the first inclination angle is equal to the second inclination angle, as shown in fig. 6, the sidewall of the second opening U2 corresponding to the light collector is planar, and the sidewall of the fourth opening U4 corresponding to the light collector is concave, in the embodiment of the present invention, the shape of the light collector shown in fig. 4 to 6 is taken as an example, and in specific implementation, the sidewalls of the second opening U2 and the fourth opening U4 may also be other shapes, and are not limited herein.
In specific implementation, referring to fig. 2, a film layer such as an encapsulation layer and a color film layer may be further disposed on a side of the second electrode 13 away from the substrate base plate 10, and in light emitted from the light emitting layer, a part of the light may be emitted from the display surface of the display panel, and another part of the light may be reflected by the film layer and then return to the inside of the display panel to form interference light, and the interference light is finally transmitted to the photosensitive detection unit 15 to affect the fingerprint identification effect. In the display panel provided in the embodiment of the present invention, the pixel defining layer 12 may include an opaque material, for example, the pixel defining layer 12 may be made of a black photosensitive polymer material, so as to filter interference light reflected back to the inside of the display panel, avoid the interference light from influencing the fingerprint identification effect, and improve the signal-to-noise ratio of fingerprint detection.
In addition, a light-blocking layer may be disposed between the pixel defining layer 12 and the substrate 10, and openings corresponding to the second openings U2 are disposed in the light-blocking layer, so that the reflected light of the finger F can be emitted to the photosensitive detection unit 15, and the interference light reflected by other film layers back into the display panel cannot pass through the light-blocking layer, thereby preventing the interference light from affecting the fingerprint identification effect.
In practical applications, as shown in fig. 7, the display panel provided in the embodiment of the present invention may further include: a flat layer 17 on the side of the first electrode 11 close to the substrate base plate 10;
the photosensitive detection unit 15 is located between the substrate base plate 10 and the planarization layer 17.
Therefore, the photosensitive detection unit 15 and the second electrode 13 can be isolated through the flat layer 17, insulation between the photosensitive detection unit 15 and the second electrode 13 is guaranteed, and the phenomenon that the second electrode 13 is contacted with the photosensitive detection unit 15 to cause abnormity of a display signal and a fingerprint identification signal is avoided.
In practical implementation, referring to fig. 2, when the photosensitive detecting unit 15 is located on the side of the planarization layer 17 away from the substrate 10, the photosensitive detecting unit 15 needs to be insulated from the second electrode 13, for example, during the process, the pattern of the second electrode 13 can be controlled such that the second electrode 13 does not cover the bottom of the second opening U2.
Specifically, the photosensitive detection unit 15 may be a photodiode, that is, the photosensitive detection unit 15 may include an N-type semiconductor layer 151, an intrinsic semiconductor layer 152, and a P-type semiconductor layer 153. In addition, the display panel may further include: a plurality of transparent electrodes 19 corresponding to the photosensitive detection units 15, respectively, a plurality of signal lines L corresponding to the photosensitive detection units 15, respectively, and a control circuit; the transparent electrode 19 is located on a side of the photosensitive detection unit 15 away from the substrate 10, and the P-type semiconductor layer 153 in the photosensitive detection unit 15 is electrically connected to the corresponding signal line L through the transparent electrode 19; the N-type semiconductor layer 151 in the photodetecting unit 15 is electrically connected to a control circuit. The transparent electrode 19 may be made of a transparent conductive material such as indium tin oxide, so that the reflected light from the finger F is not affected to the fingerprint recognition unit 15.
As shown in fig. 2, the control circuit may include a first transistor TFT1 and a second transistor TFT2, wherein the first transistor TFT1 may include a first active layer T1, a first gate electrode G1, a first source electrode S1, and a first drain electrode D1, and the first electrode 11 is electrically connected to the first drain electrode D1, so that light emission of the light emitting layer 14 may be controlled by the first transistor TFT 1. The second transistor TFT2 may include a second active layer T2, a second gate electrode G2, a second source electrode S2, and a second drain electrode D2, and the N-type semiconductor layer 151 in the photo sensing unit 15 is electrically connected to the second source electrode S2, so that the fingerprint recognition process may be controlled by the second transistor TFT 2.
In a specific implementation, as shown in fig. 8, the display panel provided in the embodiment of the present invention may further include: an organic inhibiting layer between the light-emitting layer 14 and the second electrode 13;
an organic inhibiting layer comprising: a plurality of organic suppressing units 201 respectively corresponding to the photosensitive detecting units 15.
In the actual process, the second electrode 13 is generally formed by an evaporation process and an Open Mask (Open Mask), however, since the shielding portions corresponding to the third openings U3 cannot be provided in the open mask, it is not possible to directly use an open mask to form the patterned second electrode 13, and, in the practice of the present invention, by masking the positions except the photosensitive detection units 15 with a mask, forming an organic inhibition layer by an evaporation process, the organic inhibiting layer comprises a plurality of organic inhibiting units 201 corresponding to the photosensitive detecting units 15 respectively, and then a second electrode is evaporated on the organic inhibiting layer by adopting an open mask, since the organic suppression layer can suppress the formation of the second electrode, the second electrode cannot be formed at the position of each organic suppression unit 201, thereby forming the second electrode 13 having the plurality of third openings U3. Since the organic inhibiting layer is a transparent film layer, the organic inhibiting unit 201 does not affect the transmission of the reflected light of the finger F, so that the organic inhibiting unit 201 does not need to be removed, and in addition, the organic inhibiting unit 201 can also play a role in isolating the second electrode 13 from the photosensitive detection unit 15.
In a second aspect, based on the same inventive concept, an embodiment of the present invention further provides a display apparatus, including: the display panel and the display device can be applied to any products or components with display functions, such as mobile phones, tablet computers, televisions, displays, notebook computers, digital photo frames, navigators and the like. Since the principle of the display device to solve the problem is similar to that of the display panel, the display device can be implemented by the display panel, and repeated descriptions are omitted.
In a third aspect, based on the same inventive concept, an embodiment of the present invention further provides a manufacturing method of the display panel, and since a principle of the manufacturing method for solving the problem is similar to that of the display panel, implementation of the manufacturing method can refer to implementation of the display panel, and repeated details are not repeated.
As shown in fig. 9, the method for manufacturing the display panel according to the embodiment of the present invention includes:
s301, referring to fig. 10, forming a plurality of photosensitive detection units 15 and a plurality of first electrodes 11 on a substrate base plate 10;
s302, referring to fig. 11, forming a pixel defining layer 12 on the film layer where the first electrode 11 is located, and patterning the pixel defining layer 12 to obtain a plurality of first openings U1 and a plurality of second openings U2; for example, the pixel defining layer 12 may be formed using a photosensitive material, and the plurality of first openings U1 and the plurality of second openings U2 may be formed using a photolithography process;
s303, referring to fig. 12, forming a light emitting layer 14 on the pixel defining layer 12; in specific implementation, the light-emitting layer 14 may be formed by an evaporation process;
s304, a patterned second electrode 13 is formed on the light-emitting layer 14 to obtain a plurality of third openings U3, resulting in the structure shown in fig. 2.
In the manufacturing method of the display panel provided by the embodiment of the invention, the pixel definition layer is patterned to obtain the plurality of second openings respectively corresponding to the photosensitive detection units, the patterned second electrodes are formed, and the pair of third openings respectively corresponding to the second openings are obtained, so that the reflected light of the finger directly passes through the third openings and the second openings and is emitted to the photosensitive detection units, the loss of the reflected light is reduced, the intensity of the light emitted to the photosensitive detection units is increased, and the fingerprint identification precision is improved.
In a specific implementation, before the step S301, the method may further include: a control circuit is formed over the base substrate 10, and specifically, each film layer in the first transistor TFT1 and the second transistor TFT2 may be formed, and the planarization layer 17 may be formed. After the step S301, before the step S302, the method may further include: a plurality of transparent electrodes 19 and a plurality of signal lines L are formed to correspond to the photodetecting units 15, respectively.
After the step S302 and before the step S303, the method may further include: the spacers 18 and support structures 16 are formed using the same patterning process. In step S303, the method may further include: functional layers such as a hole injection layer, a hole transport layer, an electron injection layer, and an electron transport layer are formed.
Specifically, in the manufacturing method provided by the embodiment of the present invention, the step S304 may include:
as shown in fig. 13, a mask M is used to mask the positions except for the photosensitive detection units 15, and an organic inhibition layer is deposited on the light-emitting layer 14, wherein the downward arrow in fig. 13 indicates the deposition process; the organic inhibiting layer is used for inhibiting the second electrode from forming a film; as shown in fig. 14, the organic inhibiting layer is formed to include: a plurality of organic suppressing units 201 corresponding to the photosensitive detecting units 15, respectively;
a second electrode 13 is deposited over the organic suppression layer to form a patterned second electrode 13, resulting in the structure shown in fig. 2.
In the actual process, the second electrode 13 is generally formed by an evaporation process and an Open Mask (Open Mask), however, since the shielding portions corresponding to the third openings U3 cannot be provided in the open mask, it is not possible to directly use an open mask to form the patterned second electrode 13, and, in the practice of the present invention, by masking the positions except the photosensitive detection units 15 with a mask, forming an organic inhibition layer by an evaporation process, the organic inhibiting layer comprises a plurality of organic inhibiting units 201 corresponding to the photosensitive detecting units 15 respectively, and then a second electrode is evaporated on the organic inhibiting layer by adopting an open mask, since the organic suppression layer can suppress the formation of the second electrode, the second electrode cannot be formed at the position of each organic suppression unit 201, thereby forming the second electrode 13 having the plurality of third openings U3. Since the organic suppression layer is a transparent film layer, the organic suppression unit 201 does not affect the transmission of the reflected light of the finger F, and thus the organic suppression unit 201 does not need to be removed.
According to the display panel, the manufacturing method thereof and the display device provided by the embodiment of the invention, the plurality of second openings respectively corresponding to the photosensitive detection units are arranged in the pixel definition layer, the pair of third openings respectively corresponding to the second openings are arranged in the second electrode, and the orthographic projection of the third openings on the substrate and the orthographic projection of the corresponding photosensitive detection units on the substrate have an overlapped area, so that the reflected light of the finger directly passes through the third openings and the second openings to be emitted to the photosensitive detection units, the loss of the reflected light is reduced, the intensity of the light emitted to the photosensitive detection units is increased, and the fingerprint identification precision is improved.
It will be apparent to those skilled in the art that various changes and modifications may be made in the present invention without departing from the spirit and scope of the invention. Thus, if such modifications and variations of the present invention fall within the scope of the claims of the present invention and their equivalents, the present invention is also intended to include such modifications and variations.

Claims (12)

1. A display panel, comprising: the photosensitive detection device comprises a substrate, a plurality of first electrodes, a pixel defining layer, a second electrode, a light-emitting layer and a plurality of photosensitive detection units, wherein the first electrodes are positioned on the substrate, the pixel defining layer is positioned on one side, away from the substrate, of the first electrodes, the second electrode is positioned on one side, away from the substrate, of the pixel defining layer, the light-emitting layer is positioned between the first electrodes and the second electrodes, and the photosensitive detection units are positioned on one side, away from the second electrodes, of the light-emitting layer;
the pixel definition layer includes: a plurality of first openings respectively exposing each of the first electrodes, and a plurality of second openings respectively corresponding to each of the photosensitive detection units;
the second electrode includes: a plurality of third openings corresponding to the second openings, respectively;
the orthographic projection of the third opening on the substrate base plate and the orthographic projection of the corresponding photosensitive detection unit on the substrate base plate have an overlapping area.
2. The display panel according to claim 1, wherein the second electrode covers a sidewall of the second opening;
the cross-sectional area of the second opening in the direction parallel to the substrate base plate gradually increases in the direction in which the substrate base plate points to the light emitting layer.
3. The display panel of claim 2, further comprising: a plurality of support structures located between the pixel defining layer and the second electrode;
the support structure comprises a fourth opening corresponding to the second opening;
the second electrode covers the side wall of the fourth opening;
in the direction of the substrate base plate pointing to the light-emitting layer, the cross-sectional area of the fourth opening in the direction parallel to the substrate base plate gradually increases.
4. The display panel of claim 3, wherein the first tilt angle is greater than or equal to the second tilt angle;
the first inclined angle is an included angle between the side wall of the second opening and the bottom surface of the pixel defining layer; the bottom surface of the pixel defining layer is the surface of one side of the pixel defining layer close to the substrate base plate;
the second inclined angle is an included angle between the side wall of the fourth opening and the top surface of the pixel defining layer; the top surface of the pixel definition layer is the surface of the pixel definition layer far away from the substrate.
5. The display panel according to claim 4, wherein the first inclination angle is greater than or equal to 45 ° and less than 90 °;
the second inclination angle is greater than or equal to 15 ° and less than or equal to 45 °.
6. The display panel according to claim 3, wherein a sidewall of the second opening is a flat surface or an arc surface;
the side wall of the fourth opening is a plane or an arc surface.
7. The display panel of claim 1, wherein the pixel defining layer comprises an opaque material.
8. The display panel of claim 1, further comprising: the flat layer is positioned on one side of the first electrode close to the substrate;
the photosensitive detection unit is located between the substrate base plate and the flat layer.
9. The display panel according to any one of claims 1 to 8, further comprising: an organic inhibiting layer between the light emitting layer and the second electrode;
the organic inhibiting layer includes: a plurality of organic suppressing units respectively corresponding to the photosensitive detecting units.
10. A display device, comprising: the display panel according to any one of claims 1 to 9.
11. A method for manufacturing a display panel according to any one of claims 1 to 9, comprising:
forming a plurality of photosensitive detection units and a plurality of first electrodes on a substrate;
forming a pixel definition layer on the film layer where the first electrode is located, and patterning the pixel definition layer to obtain a plurality of first openings and a plurality of second openings;
forming a light emitting layer over the pixel defining layer;
and forming a patterned second electrode on the light-emitting layer to obtain a plurality of third openings.
12. The method of claim 11, wherein forming a patterned second electrode over the light-emitting layer to obtain a plurality of third openings comprises:
shielding positions except the photosensitive detection units by using a mask plate, and evaporating an organic inhibition layer on the light-emitting layer; the organic inhibiting layer is used for inhibiting the second electrode from forming a film;
and evaporating the second electrode on the organic inhibition layer to form the patterned second electrode.
CN202010793484.5A 2020-08-10 2020-08-10 Display panel, manufacturing method thereof and display device Pending CN111785854A (en)

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