CN111774721A - Optical axis angle adjusting device and method for wave plate - Google Patents
Optical axis angle adjusting device and method for wave plate Download PDFInfo
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- CN111774721A CN111774721A CN202010463236.4A CN202010463236A CN111774721A CN 111774721 A CN111774721 A CN 111774721A CN 202010463236 A CN202010463236 A CN 202010463236A CN 111774721 A CN111774721 A CN 111774721A
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- wave plate
- motor
- optical axis
- encoder
- axis angle
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
- B23K26/00—Working by laser beam, e.g. welding, cutting or boring
- B23K26/02—Positioning or observing the workpiece, e.g. with respect to the point of impact; Aligning, aiming or focusing the laser beam
- B23K26/04—Automatically aligning, aiming or focusing the laser beam, e.g. using the back-scattered light
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
- B23K26/00—Working by laser beam, e.g. welding, cutting or boring
- B23K26/02—Positioning or observing the workpiece, e.g. with respect to the point of impact; Aligning, aiming or focusing the laser beam
- B23K26/04—Automatically aligning, aiming or focusing the laser beam, e.g. using the back-scattered light
- B23K26/042—Automatically aligning the laser beam
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B5/00—Optical elements other than lenses
- G02B5/30—Polarising elements
- G02B5/3083—Birefringent or phase retarding elements
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B7/00—Mountings, adjusting means, or light-tight connections, for optical elements
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- Optics & Photonics (AREA)
- Engineering & Computer Science (AREA)
- General Physics & Mathematics (AREA)
- Plasma & Fusion (AREA)
- Mechanical Engineering (AREA)
- Mechanical Light Control Or Optical Switches (AREA)
- Optical Transform (AREA)
Abstract
The invention relates to an optical axis angle adjusting device of a wave plate and an adjusting method thereof. The synchronous belt is wound on the wheel surfaces of the driving belt wheel and the driven belt wheel, the wave plate seat is connected with the outer side surface of the driven belt wheel, the wave plate is fixed by the wave plate seat, and the wave plate corresponds to the light through hole of the driven belt wheel. The transmission shaft and the driving pulley of motor are connected, and the motor can order about driving pulley and driven pulley synchronous revolution, and driven pulley drives the rotatory optical axis angle in order to adjust the wave plate of wave plate seat. The optical axis angle of the wave plate is fast in adjusting speed, the wave plate rotating process is stable, and the rotating angle of the wave plate can be accurately adjusted.
Description
Technical Field
The invention relates to the field of laser processing equipment, in particular to a device and a method for adjusting the optical axis angle of a wave plate.
Background
In laser devices, a wave plate, also called a phase retarder, is often used, which is machined from a birefringent material, with its optical axis parallel to the wafer surface. It causes a phase shift in two mutually orthogonal polarization components passing through the waveplate, which can be used to adjust the polarization state of the beam. The wave plates are mainly a half wave plate and a quarter wave plate. The quarter-wave plate can realize the mutual conversion of linearly polarized light and elliptically polarized light with specific wavelengths, and the half-wave plate can change the vibration direction of the linearly polarized light.
In the laser processing process, due to process requirements, linearly polarized light and circularly polarized light are required to be switched, and the polarization state is changed by adjusting the angle of the optical axis of the wafer of the quarter-wave plate. The beam splitting ratio or the power is changed by adjusting the angle of the optical axis of the wafer of the half-wave plate. The optical axis angle of the wave plate needs to be adjusted in the laser processing and laser debugging processes, and the optical axis angle adjusting speed and the adjusting precision of the wave plate are low through manual adjustment in the prior art.
Disclosure of Invention
The invention aims to provide a wave plate optical axis angle adjusting device and a wave plate optical axis angle adjusting method for improving wave plate adjusting speed and accuracy.
In order to realize the purpose, the technical scheme is as follows: an optical axis angle adjusting apparatus of a wave plate, comprising:
a fixing plate, which is provided with a shaft hole. And the bearing is provided with an inner ring and an outer ring which rotate relatively, and the outer ring of the bearing is pressed in the shaft hole.
The middle of the driven belt wheel is provided with a light through hole, and the driven belt wheel is provided with an inner side surface and an outer side surface which are deviated from each other. The inner side surface of the driven belt wheel is provided with a wheel shaft, the wheel shaft is formed by extending from the outer circumference of the hole end of the light through hole in the direction away from the inner side surface, and the wheel shaft is pressed in the inner ring of the bearing.
And the driving belt wheel and the driven belt wheel are wound with a synchronous belt, and the wheel core of the driving belt wheel and the wheel core of the driven belt wheel are parallel and arranged at intervals.
And the wave plate seat is connected with the outer side surface of the driven belt wheel, the wave plate seat fixes the wave plate, and the wave plate corresponds to the light through hole of the driven belt wheel.
The motor assembly comprises a motor, a transmission shaft of the motor is connected with a driving belt wheel, the motor can drive the driving belt wheel to synchronously rotate with a driven belt wheel, and the driven belt wheel drives a wave plate seat to rotate so as to adjust the angle of an optical axis of the wave plate.
Furthermore, the optical axis angle adjusting device of the wave plate also comprises an optoelectronic switch and a light blocking plate. The optoelectronic switch has a transmitter, a receiver and an information output. The emitter and the receiver are connected with the fixing plate, the emitter and the receiver are arranged oppositely, and the receiver can receive the light beam emitted by the emitter.
The light blocking plate is connected with the wave plate seat, the wave plate seat drives the light blocking plate to rotate around the axis of the wheel shaft, the path is located between the emitter and the receiver, and the light blocking plate can block light beams emitted by the emitter. The motor assembly also comprises an encoder and a motor controller, and an information receiving end of the encoder is connected with an information output end of the photoelectric switch. The coding disc of the coder is connected with the motor controller.
Furthermore, the fixing plate is also provided with a through hole. The motor assembly further comprises a support, the support is fixed with the shell of the motor and connected with a fixing plate on the periphery of the through hole, and a transmission shaft of the motor penetrates through the through hole and is connected with the driving belt wheel. The encoder is connected with the bracket, and the tail end of the motor transmission shaft is inserted into the corner detection port of the encoder.
Further, the wave plate seat is annular. The ring body of the wave plate seat is connected with the outer side surface of the driven belt wheel through a screw. The wave plate is fixed in the inner ring of the wave plate seat, the edge of the wave plate seat is connected with the light blocking plate, and the light blocking plate is outwards suspended along the radial direction of the wave plate seat.
Further, the optical axis angle adjusting device of the wave plate also comprises a base. The bottom surface of the fixed plate is connected with the base. The top surface of the fixed plate is connected with the photoelectric switch. The back of the fixing plate is connected with the bracket. One side of the surface of the fixing plate is provided with a wave plate seat.
Furthermore, the diameter of the driven pulley is 40 mm-80 mm. The diameter of the driving belt wheel is 10 mm-20 mm.
Further, the motor is a stepping motor.
The invention also provides a method for adjusting the optical axis angle of the wave plate, which comprises the following steps: the encoder receives a current rotation angle instruction, converts the current rotation angle instruction into a first angular displacement signal and outputs the first angular displacement signal to the motor controller, and the motor controller controls a transmission shaft of the motor to rotate to a first target angle according to the first angular displacement signal so as to adjust the angle of the wave plate to the first optical axis.
The encoder receives the next rotation angle command, the transmission shaft of the motor drives the light blocking sheet to rotate, the light blocking sheet rotates to a position between the emitter and the receiver to block light beams emitted by the emitter, the information output end of the photoelectric switch outputs information generated by blocking the light beams to the information receiving end of the encoder, and the encoder sets the rotation position of the motor to be a zero position according to the information generated by blocking the light beams.
The encoder outputs a second angular displacement signal converted from the next rotation angle instruction to the motor controller, and the motor controller controls a transmission shaft of the motor to rotate to a second target angle according to the second angular displacement signal so as to adjust the angle of the wave plate to a second optical axis.
Compared with the prior art, the invention has the technical effects that: the motor is according to the corner instruction of user input, and the motor function is in order to order about driving pulley and driven pulley synchronous revolution, and driven pulley can drive the waveplate seat synchronous revolution, even if so the waveplate rotates, driven pulley and shaft also can't shelter from the laser that jets out through the waveplate owing to be pipy shaft lumen and logical unthreaded hole intercommunication.
According to the invention, the motor drives the driven belt pulley to rotate through the synchronous belt, and the driven belt pulley and the wave plate seat synchronously rotate so as to realize adjustment of the angle of the optical axis of the wave plate.
Drawings
FIG. 1 is an exploded view of an optical axis angle adjustment device of a wave plate according to the present invention;
FIG. 2 is a schematic perspective view of an optical axis angle adjusting device of a wave plate according to the present invention;
fig. 3 is a schematic perspective view of the motor assembly of the present invention.
Detailed Description
The following describes embodiments of the present invention with reference to the drawings.
As shown in fig. 1, an optical axis angle adjusting apparatus of a wave plate includes: a fixing plate 10, which is provided with a shaft hole 11. And a bearing 20 having an inner race and an outer race that rotate relative to each other, the outer race of the bearing 20 being press-fitted into the shaft hole 11.
A driven belt wheel 30, the middle of which is provided with a light through hole 31, and the driven belt wheel 30 is provided with an inner side surface and an outer side surface which are deviated from each other. An axle 32 is arranged on the inner side surface of the driven pulley 30, the axle 32 is formed by extending from the outer circumference of the hole end of the light through hole 31 in the direction away from the inner side surface, and the axle 32 is pressed in the inner ring of the bearing 20.
And a driving pulley 40 on which a timing belt 41 is wound on a face of the driven pulley 30, a core of the driving pulley 40 being parallel to and spaced apart from a core of the driven pulley 30.
And the wave plate seat 50 is connected with the outer side surface of the driven pulley 30, the wave plate seat 50 fixes the wave plate 51, and the wave plate 51 corresponds to the light through hole 31 of the driven pulley 30.
And a motor assembly 60 including a motor 61, wherein a transmission shaft 611 of the motor 61 is connected to the driving pulley 40, the motor 50 can drive the driving pulley 40 and the driven pulley 30 to rotate synchronously, and the driven pulley 30 drives the wave plate holder 50 to rotate so as to adjust the optical axis angle of the wave plate 51.
In the invention, the axle 32 is arranged on the inner side surface of the driven pulley 30, the axle 32 is formed by extending from the outer circumference of the hole end of the light through hole 31 in the direction away from the inner side surface, in other words, the axle 32 is tubular, and the tube cavity of the axle 32 is communicated with the light through hole 31, so that the wave plate 51 on the wave plate seat 50 corresponds to the light through hole 31 of the driven pulley 30, and laser can be emitted outwards through the wave plate 51, the light through hole 31 and the tube cavity of the axle 32.
The motor 61 operates to drive the driving pulley 40 and the driven pulley 30 to synchronously rotate according to the rotation angle command input by the user, the driven pulley 30 can drive the wave plate holder 50 to synchronously rotate, and since the tubular axle 32 is communicated with the light through hole 31, even if the wave plate 51 rotates, the driven pulley 30 and the axle 32 cannot shield the laser emitted through the wave plate 51.
In the invention, the motor 61 drives the driven belt wheel 30 to rotate through the synchronous belt 41, the driven belt wheel 30 and the wave plate seat 50 synchronously rotate so as to realize the adjustment of the optical axis angle of the wave plate 51, the adjustment speed of the optical axis angle of the wave plate 51 is high, the rotation process of the wave plate 51 is stable, and the rotation angle of the wave plate 51 can be accurately adjusted.
The optical axis angle adjusting device of the wave plate of the present invention further includes an electro-optical switch 70 and a light blocking plate 73. The opto-electronic switch 70 has a transmitter 71, a receiver 72 and an information output.
The emitter 71 and the receiver 72 are connected to the fixing plate 10, the emitter 71 and the receiver 72 are disposed opposite to each other, and the receiver 72 can receive the light beam emitted from the emitter 71.
The light blocking sheet 73 is connected with the wave sheet seat 50, a path of the wave sheet seat 50 driving the light blocking sheet 73 to rotate around the axis of the wheel shaft is located between the emitter 71 and the receiver 72, and the light blocking sheet 73 can block light beams emitted by the emitter 71.
The motor assembly 60 further comprises an encoder 62 and a motor controller 612, and the information receiving end of the encoder 62 is connected with the information output end of the photoelectric switch 70. The encoder disk of the encoder 62 is connected to a motor controller 612.
The optical axis angle adjusting method of the wave plate comprises the following steps: the encoder 62 receives the current rotation angle command, the encoder 62 converts the current rotation angle command into a first angular displacement signal and outputs the first angular displacement signal to the motor controller 612, and the motor controller 612 controls the transmission shaft 611 of the motor 61 to rotate to a first target angle according to the first angular displacement signal, so as to adjust the wave plate 51 to the first optical axis angle.
The encoder disc of the encoder 62 receives the next rotation angle command, the transmission shaft 611 of the motor 61 drives the light blocking sheet 73 to rotate, the light blocking sheet 73 rotates to a position between the emitter 71 and the receiver 72 to block the light beam emitted by the emitter 71, the information output end of the photoelectric switch 70 outputs information generated by blocking the light beam to the information receiving end of the encoder 62, and the encoder 62 sets the rotation position of the motor 61 to be a zero position according to the information generated by blocking the light beam.
The encoder 62 outputs the second angular displacement signal converted from the next rotation angle command to the motor controller 612, and the motor controller 612 controls the transmission shaft 611 of the motor 61 to rotate to the second target angle according to the second angular displacement signal, so as to adjust the wave plate 51 to the second optical axis angle.
As shown in fig. 2, the wave plate holder 50 is in the initial position, that is, the light blocking plate 73 connected to the wave plate holder 50 is located between the transmitter 71 and the receiver 72, the current rotation angle command received by the encoder disc of the encoder 62, that is, the first adjustment of the optical axis angle of the wave plate 51, is converted by the encoder 62 into a first angular displacement signal and output to the motor controller 612, and the motor controller 612 controls the transmission shaft 611 of the motor 61 to rotate to a first target angle according to the first angular displacement signal, so as to adjust the wave plate 51 to the first optical axis angle.
The encoder disc of the encoder 62 receives the next rotation angle command, that is, the optical axis angle of the wave plate 51 is adjusted for the second time, at this time, the wave plate 51 on the wave plate seat 50 is at the first optical axis angle, and the transmission shaft 611 of the motor 61 drives the light blocking plate 73 to rotate.
Under the condition that the light blocking sheet 73 rotates to a position between the emitter 71 and the receiver 72 to block the light beam emitted by the emitter 71, the information output end of the photoelectric switch 70 outputs information generated by blocking the light beam to the information receiving end of the encoder 62, and the encoder 62 sets the rotation position of the motor 61 to be a zero position according to the information generated by blocking the light beam. That is, the calculation of the rotation amount of the motor 33 is restarted from the zero position of the motor 61.
In this way, the encoder 62 outputs the second angular displacement signal converted from the next rotation angle command to the motor controller 612, and the motor controller 612 controls the transmission shaft 611 of the motor 61 to rotate to the second target angle according to the second angular displacement signal, so as to adjust the rotation angle of the wave plate 51 to the second optical axis angle, thereby improving the precision of the secondary adjustment of the optical axis angle of the wave plate 51.
The optoelectronic switch 70 is a correlation type optoelectronic switch, and when the light beam between the transmitter 71 and the receiver 72 of the optoelectronic switch 70 is interrupted, the optoelectronic switch 70 generates a switch signal change, i.e. blocks the information generated by the light beam.
In the present invention, the fixing plate 10 is further provided with a through hole 12. As shown in fig. 3, the motor assembly 60 further includes a bracket 63, the bracket 63 is fixed to the housing of the motor 61, the bracket 63 is connected to the fixing plate 10 at the periphery of the through hole 12, and the transmission shaft 611 of the motor 61 passes through the through hole 12 and is connected to the driving pulley 40. The encoder 62 is connected to the bracket 63, and the rear end of the drive shaft 611 of the motor 62 is inserted into the rotation angle detection port 621 of the encoder 62.
The wave plate holder 50 of the present invention is ring-shaped. The ring body of the vane seat 50 is connected with the outer side surface of the driven pulley 30 through screws. The wave plate 51 is fixed in the inner ring of the wave plate seat 50, the edge of the wave plate seat 50 is connected with the light blocking plate 73, and the light blocking plate 73 is outwards suspended along the radial direction of the wave plate seat 50.
The light barrier 73 connected by the edge of the wave plate holder 50 is cantilevered outward in the radial direction of the wave plate holder 50. Ensuring that the light barrier 73 is able to block the light beam emitted by the emitter 71.
The present invention also includes a base 80. The bottom surface of the fixed plate 10 is connected to the base 80. The top surface of the fixing plate 10 is connected to the photoelectric switch 70. The rear surface of the fixing plate 10 is connected to the bracket 63. The wave plate seat 50 is disposed on one side of the plate surface of the fixing plate 10.
The motor assembly 60 can be integrally disassembled and assembled, and circuit maintenance is facilitated. The motor assembly 60 and the wave plate seat 50 are respectively positioned at two sides of the fixing plate 10, so that installation space is reserved for other optical devices at two sides of the device, and compact layout of an optical path structure is convenient to realize.
The base 80 is provided with screw fixing holes, the fixing plate 10 can be fixed on the base 80 by three screws, the mounting and dismounting are convenient, the whole structure is small and compact, and the mounting and maintenance are convenient.
Specifically, the diameter of the driven pulley 30 is 40mm to 80 mm. The diameter of the driving pulley 40 is 10 mm-20 mm.
The diameter of the driving pulley 40 is small, so that the volume of the device is reduced, and the structure of the device is more compact.
The motor 61 is a stepping motor, and the motor 51 can convert the electric pulse excitation signal into a discrete value of corresponding angular displacement or linear displacement to control the motor, so that the rotation angle of the transmission shaft 611 can be accurately controlled, and the optical axis angle of the wave plate 51 can be accurately adjusted.
Claims (8)
1. An optical axis angle adjusting apparatus of a wave plate, comprising:
a fixing plate (10) provided with a shaft hole (11);
a bearing (20) which is provided with an inner ring and an outer ring which rotate relatively, wherein the outer ring of the bearing (20) is pressed in the shaft hole (11);
the middle of the driven belt wheel (30) is provided with a light through hole (31), and the driven belt wheel (30) is provided with an inner side surface and an outer side surface which are deviated from each other; the inner side face of the driven belt wheel (30) is provided with a wheel shaft (32), the wheel shaft (32) extends from the outer circumference of the hole end of the light through hole (31) to the direction far away from the inner side face, and the wheel shaft (32) is pressed in the inner ring of the bearing (20);
a driving pulley (40) and a driven pulley (30) are wound with a synchronous belt (41), and the wheel core of the driving pulley (40) and the wheel core of the driven pulley (30) are parallel and arranged at intervals;
the wave plate seat (50) is connected with the outer side surface of the driven belt wheel (30), the wave plate seat (50) is used for fixing a wave plate (51), and the wave plate (51) corresponds to the light through hole (31) of the driven belt wheel (30); the motor assembly (60) comprises a motor (61), a transmission shaft (611) of the motor (61) is connected with the driving pulley (40), the motor (50) can drive the driving pulley (40) and the driven pulley (30) to synchronously rotate, and the driven pulley (30) drives the wave plate seat (50) to rotate so as to adjust the optical axis angle of the wave plate (51).
2. The optical axis angle adjusting apparatus of claim 1, further comprising a photo switch (70) and a light blocking plate (73); said opto-electronic switch (70) having a transmitter (71), a receiver (72) and an information output;
the emitter (71) and the receiver (72) are connected with the fixing plate (10), the emitter (71) and the receiver (72) are arranged oppositely, and the receiver (72) can receive the light beam emitted by the emitter (71);
the light blocking sheet (73) is connected with the wave sheet seat (50), the wave sheet seat (50) drives the light blocking sheet (73) to rotate around the axis of the wheel shaft, the path is located between the emitter (71) and the receiver (72), and the light blocking sheet (73) can block light beams emitted by the emitter (71);
the motor assembly (60) further comprises an encoder (62) and a motor controller (612), wherein the information receiving end of the encoder (62) is connected with the information output end of the photoelectric switch (70); the coding disc of the coder (62) is connected with a motor controller (612).
3. The device for adjusting the optical axis angle of a wave plate according to claim 2, wherein the fixing plate (10) is further provided with a through hole (12);
the motor assembly (60) further comprises a support (63), the support (63) is fixed with a shell of the motor (61), the support (63) is connected with a fixing plate (10) on the periphery of the through hole (12), and a transmission shaft (611) of the motor (61) penetrates through the through hole (12) to be connected with the driving pulley (40);
the encoder (62) is connected with the bracket (63), and the tail end of a transmission shaft (611) of the motor (62) is inserted into a rotation angle detection port (621) of the encoder (62).
4. The device for adjusting the angle of the optical axis of a wave plate according to claim 2, wherein the wave plate holder (50) is ring-shaped; the ring body of the wave plate seat (50) is connected with the outer side surface of the driven belt wheel (30) through a screw;
the wave plate (51) is fixed in the inner ring of the wave plate seat (50), the edge of the wave plate seat (50) is connected with the light blocking sheet (73), and the light blocking sheet (73) is outwards suspended along the radial direction of the wave plate seat (50).
5. The device for adjusting the angle of the optical axis of a wave plate according to claim 2, further comprising a base (80);
the bottom surface of the fixed plate (10) is connected with the base (80); the top surface of the fixing plate (10) is connected with the photoelectric switch (70); the back surface of the fixing plate (10) is connected with the bracket (63); one side of the plate surface of the fixing plate (10) is provided with a wave plate seat (50).
6. The device for adjusting the optical axis angle of a wave plate according to claim 2, wherein the diameter of the driven pulley (30) is 40mm to 80 mm; the diameter of the driving belt wheel (40) is 10 mm-20 mm.
7. The device for adjusting the optical axis angle of a wave plate according to claim 2, wherein said motor (61) is a stepping motor.
8. An adjusting method based on the optical axis angle adjusting device of any one of claims 2 to 7, characterized in that the encoder disc of the encoder (62) receives a current rotation angle command, the encoder (62) converts the current rotation angle command into a first angular displacement signal and outputs the first angular displacement signal to the motor controller (612), and the motor controller (612) controls the transmission shaft (611) of the motor (61) to rotate to a first target angle according to the first angular displacement signal so as to adjust the wave plate (51) to a first optical axis angle;
the encoding disc of the encoder (62) receives a next turning angle instruction, the transmission shaft (611) of the motor (61) drives the light blocking sheet (73) to rotate, the light blocking sheet (73) rotates to a position between the emitter (71) and the receiver (72) to block the light beam emitted by the emitter (71), the information output end of the photoelectric switch (70) outputs information generated by blocking the light beam to the information receiving end of the encoder (62), and the encoder (62) sets the rotation position of the motor (61) to be a zero position according to the information generated by blocking the light beam;
the encoder (62) outputs a second angular displacement signal converted from the next rotation angle instruction to the motor controller (612), and the motor controller (612) controls the transmission shaft (611) of the motor (61) to rotate to a second target angle according to the second angular displacement signal so as to adjust the wave plate (51) to a second optical axis angle.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202010463236.4A CN111774721A (en) | 2020-05-27 | 2020-05-27 | Optical axis angle adjusting device and method for wave plate |
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| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202010463236.4A CN111774721A (en) | 2020-05-27 | 2020-05-27 | Optical axis angle adjusting device and method for wave plate |
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| CN111774721A true CN111774721A (en) | 2020-10-16 |
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| CN202010463236.4A Pending CN111774721A (en) | 2020-05-27 | 2020-05-27 | Optical axis angle adjusting device and method for wave plate |
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Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN113900188A (en) * | 2021-10-15 | 2022-01-07 | 中国电子科技集团公司第三十四研究所 | All-optical fiber delay device |
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| CN110919174A (en) * | 2019-12-20 | 2020-03-27 | 武汉华工激光工程有限责任公司 | Rotary light path light beam device and rotary light path light beam system |
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| CN2581942Y (en) * | 2002-11-05 | 2003-10-22 | 华南师范大学 | Automatic detecting and controlling apparatus for polaroid rotating angle |
| JP2013025065A (en) * | 2011-07-21 | 2013-02-04 | Seiko Epson Corp | Wave plate, polarization conversion element, polarization conversion unit and projection device |
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| CN113900188A (en) * | 2021-10-15 | 2022-01-07 | 中国电子科技集团公司第三十四研究所 | All-optical fiber delay device |
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