CN111774712A - Furnace door supporting floating mechanism of induction diffusion welding device - Google Patents

Furnace door supporting floating mechanism of induction diffusion welding device Download PDF

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Publication number
CN111774712A
CN111774712A CN202010531472.5A CN202010531472A CN111774712A CN 111774712 A CN111774712 A CN 111774712A CN 202010531472 A CN202010531472 A CN 202010531472A CN 111774712 A CN111774712 A CN 111774712A
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CN
China
Prior art keywords
bearing
ring
wall
furnace
supporting seat
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Pending
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CN202010531472.5A
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Chinese (zh)
Inventor
李护林
刘友强
刘广续
王永锋
马尧
张萌
谢红
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Xian Aerospace Engine Co Ltd
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Xian Aerospace Engine Co Ltd
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Priority to CN202010531472.5A priority Critical patent/CN111774712A/en
Publication of CN111774712A publication Critical patent/CN111774712A/en
Pending legal-status Critical Current

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    • BPERFORMING OPERATIONS; TRANSPORTING
    • B23MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23KSOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K20/00Non-electric welding by applying impact or other pressure, with or without the application of heat, e.g. cladding or plating
    • B23K20/02Non-electric welding by applying impact or other pressure, with or without the application of heat, e.g. cladding or plating by means of a press ; Diffusion bonding
    • B23K20/023Thermo-compression bonding
    • B23K20/026Thermo-compression bonding with diffusion of soldering material
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B23MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23KSOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K20/00Non-electric welding by applying impact or other pressure, with or without the application of heat, e.g. cladding or plating
    • B23K20/26Auxiliary equipment

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  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Heat Treatment Of Articles (AREA)

Abstract

The invention relates to a furnace door supporting floating mechanism of an induction diffusion welding device, belonging to the field of rocket engine manufacturing; the furnace cover comprises a furnace cover, a bearing ring, a limiting ring, a bearing hub, 2 bearings, a sealing ring, a supporting seat, n spring washers, n hexagon nuts, n bolts and a bearing large shaft; the limiting ring is sleeved on the outer wall of the bearing large shaft; the supporting seat is sleeved on the outer wall of the bearing large shaft; the bearing hub is arranged between the limiting ring and the supporting seat; 2 bearings are sleeved on the outer wall of the bearing large shaft side by side; the bearing ring is sleeved on the outer wall of the bearing hub; the furnace cover is sleeved on the outer wall of the bearing ring; n through holes are uniformly formed in the supporting seat along the circumferential direction; the n stud bolts correspondingly penetrate through the n through holes; 1 spring washer is correspondingly arranged between each bolt and the support seat; the n hexagon nuts correspond to the n bolts one by one; the sealing ring is arranged between the supporting seat and the bearing ring; the invention realizes that the furnace cover has a certain free floating space and performs certain angle adjustment, thereby achieving the state that the end surface of the furnace body is parallel to the end surface of the furnace cover.

Description

Furnace door supporting floating mechanism of induction diffusion welding device
Technical Field
The invention belongs to the field of rocket engine manufacturing, and relates to a furnace door supporting floating mechanism of an induction diffusion welding device.
Background
In the manufacturing process of the rocket engine, parts need to be welded in the furnace body, and in the whole welding process, the reliable sealing between the furnace cover and the furnace body is especially important. In order to ensure that the furnace door cover realizes reliable sealing when the device works, the furnace cover needs to have a certain free floating space and carry out the adjustment of a certain angle, thereby achieving the state that the end surface of the furnace body is parallel to the end surface of the furnace cover. The traditional structure is for welding the bell on the bearing ring to with the bearing ring cover on the bearing, the bearing ring is fixed with bolt for the supporting seat, does not have the regulation surplus after the assembly, when the bell is closed, because installation error, there is the condition of nonparallel in bell terminal surface position for fixed furnace body terminal surface, consequently can not guarantee that the laminating of major diameter furnace door closure is sealed, will influence the normal work of furnace body like this.
Disclosure of Invention
The technical problem solved by the invention is as follows: the defects of the prior art are overcome, and the furnace door supporting floating mechanism of the induction diffusion welding device is provided, so that a furnace cover has a certain free floating space, and is adjusted at a certain angle, and the end face of the furnace body is parallel to the end face of the furnace cover.
The technical scheme of the invention is as follows:
a furnace door supporting floating mechanism of an induction diffusion welding device comprises a furnace cover, a bearing ring, a limiting ring, a bearing hub, 2 bearings, a sealing ring, a supporting seat, n spring washers, n hexagon nuts, n bolts and a bearing large shaft; wherein, the bearing large shaft is horizontally arranged in the axial direction; the limiting ring is coaxially sleeved on the outer wall of the bearing large shaft; the supporting seat is coaxially sleeved on the outer wall of the bearing large shaft; the bearing hub is fixedly arranged between the limiting ring and the supporting seat; one axial end of the bearing hub is matched with the step on the side wall of the shaft end of the limiting ring; the other axial end of the bearing hub is fixedly connected with the supporting seat; 2 bearings are sleeved on the outer wall of the bearing large shaft side by side; and 2 bearings are contacted with the inner wall of the bearing hub; the bearing ring is sleeved on the outer wall of the bearing hub; the furnace cover is sleeved on the outer wall of the bearing ring; the supporting seat is of a disc-shaped structure; n through holes are uniformly formed in the supporting seat along the circumferential direction; the n stud bolts correspondingly penetrate through the n through holes and extend into the bearing ring; 1 spring washer is correspondingly arranged between each bolt and the support seat; the n hexagon nuts correspond to the n bolts one by one, and the n bolts are fixed; the sealing ring is arranged between the supporting seat and the bearing ring; n is a positive integer, and n is not less than 8.
In the furnace door supporting floating mechanism of the induction diffusion welding device, the furnace door supporting floating mechanism further comprises an inner hexagonal socket head cap screw; the inner hexagonal socket head cap screw is arranged between the limiting ring and the bearing hub, so that the fixing of the limiting ring and the bearing hub is realized, and the axial limiting of the limiting ring to 2 bearings is realized simultaneously.
In the furnace door supporting floating mechanism of the induction diffusion welding device, the through hole is a conical through hole; the small diameter end of the through hole points to the bearing ring; the diameter L1 of the small-diameter end of the through hole is 20 mm; the large diameter end diameter L2 of the through hole is 24 mm.
In the furnace door supporting floating mechanism of the induction diffusion welding device, the circumferential outer wall of the bearing hub is of an asymmetric arc structure; the radius R of the arc-shaped outer wall of the bearing hub is 86 mm; the distance L6 between the center point of the arc-shaped outer wall and the axial end face of the bearing hub pointing to the limit ring is 36 mm; the distance L7 between the center point of the arc outer wall and the axial end face of the bearing hub pointing to the supporting seat is 58 mm.
In the furnace door supporting floating mechanism of the induction diffusion welding device, the sealing ring is of an annular structure; the thickness L3 of the sealing ring is 18 mm; the inner diameter L4 of the sealing ring is 388 mm; the diameter L5 of the outer diameter of the sealing ring is 408 mm.
In the furnace door supporting floating mechanism of the induction diffusion welding device, the 2 bearings are adjacently arranged between the inner wall of the bearing hub and the outer wall of the bearing large shaft, so that the bearing hub does not move relatively when the bearing large shaft rotates.
In the furnace door supporting floating mechanism of the induction diffusion welding device, when the furnace door supporting floating mechanism is arranged on an external furnace body, the bolt realizes micro-swing in the tapered through hole of the supporting seat; and meanwhile, the inner wall of the bearing ring freely moves along the arc-shaped outer wall of the bearing hub, so that the floating movement of the furnace cover is realized, and the smooth butt joint of the furnace cover and the end face of the external furnace body is finally completed.
In the above mentioned oven door supporting floating mechanism of the induction diffusion welding device, the assembling method of the oven door supporting floating mechanism is as follows:
firstly, welding and fixing a bearing hub on a support seat, and sleeving the bearing hub on a bearing large shaft; the supporting seat is fixed with an external loading mechanism;
step two, sleeving the 2 bearings on a large bearing shaft, and installing a limiting ring at the axial left end of the 2 bearings; the limiting ring and the bearing hub are fixed through the inner hexagonal socket head cap screw, and the limiting ring realizes axial fixation of 2 bearings;
thirdly, placing the sealing ring in a sealing groove of the supporting seat, welding and fixing the furnace cover on the outer wall of the bearing ring, and sleeving the bearing ring on the bearing hub;
and step four, the bolt is arranged in the conical through hole to realize the connection of the bearing ring and the supporting seat, and the bearing ring and the supporting seat are fastened by a hexagon nut and a spring washer after being arranged, so that the sealing effect is realized.
In the above furnace door supporting floating mechanism of the induction diffusion welding device, the use method of the furnace door supporting floating mechanism comprises:
starting an external loading mechanism to realize that a furnace door supporting floating mechanism moves towards a furnace body;
step two, when the furnace cover is contacted with the end surface of the external furnace body, the bearing ring freely floats along the cambered surface of the bearing hub; until the furnace cover is in smooth butt joint with the end face of the external furnace body, the external loading mechanism stops;
step three, vacuumizing the external furnace body, filling inert gas, starting an external induction diffusion welding device, and heating welding parts in the external furnace body; and after the solder between the parts to be welded is heated and melted, finishing diffusion welding.
Compared with the prior art, the invention has the beneficial effects that:
(1) the invention solves the problems that the parallelism of the furnace body and the furnace cover has errors and the fitting is not tight in the process of installing equipment;
(2) the outer side of the bearing hub is an arc curved surface, so that the furnace cover and the bearing ring are supported, and the bearing ring can move along the curved surface;
(3) the bearing ring and the supporting seat are fixed through the bolt, and the conical hole of the supporting seat enables the bolt to have a certain floating space. The structure can ensure that the end face of the furnace cover has a certain floating space relative to the end face of the furnace body, thereby realizing the fine adjustment effect of the rigid contact surface when sealing and fitting, and compared with the traditional furnace door sealing structure, the furnace door sealing structure has the advantages of good sealing effect and strong adaptability.
Drawings
FIG. 1 is a schematic view of the oven door support float mechanism of the present invention;
FIG. 2 is a schematic view of a support base according to the present invention;
FIG. 3 is a schematic view of a seal ring according to the present invention;
fig. 4 is a schematic view of the bearing hub of the invention.
Detailed Description
The invention is further illustrated by the following examples.
The invention overcomes the defects of the traditional technology, provides the furnace door supporting floating mechanism of the induction diffusion welding device, and solves the problem of the fitting of a large-diameter furnace door cover.
An induction diffusion welding device furnace door supporting floating mechanism is shown in figure 1 and comprises a furnace cover 1, a force bearing ring 2, inner hexagonal socket head screws 3, a limiting ring 4, a force bearing hub 5, 2 bearings 6, a sealing ring 7, a supporting seat 8, n spring washers 9, n hexagon nuts 10, n bolts 11 and a bearing large shaft 12; wherein, the bearing large shaft 12 is axially and horizontally arranged; the limiting ring 4 is coaxially sleeved on the outer wall of the bearing large shaft 12; the supporting seat 8 is coaxially sleeved on the outer wall of the bearing large shaft 12; the bearing hub 5 is fixedly arranged between the limiting ring 4 and the supporting seat 8; one axial end of the bearing hub 5 is matched with a step on the side wall of the shaft end of the limit ring 4; the other axial end of the bearing hub 5 is fixedly connected with the supporting seat 8; 2 bearings 6 are sleeved on the outer wall of the bearing large shaft 12 side by side; and 2 bearings 6 are contacted with the inner wall of the bearing hub 5; the 2 bearings 6 are adjacently arranged between the inner wall of the bearing hub 5 and the outer wall of the bearing large shaft 12, so that the bearing hub 5 does not move relatively when the bearing large shaft 12 rotates. The bearing ring 2 is sleeved on the outer wall of the bearing hub 5; the furnace cover 1 is sleeved on the outer wall of the bearing ring 2; the supporting seat 8 is of a disc-shaped structure; the supporting seat 8 is uniformly provided with n through holes 81 along the circumferential direction; the n stud bolts 11 correspondingly penetrate through the n through holes 81 and extend into the bearing ring 2; 1 spring washer 9 is correspondingly arranged between each bolt 11 and the support seat 8; the n hexagon nuts 10 correspond to the n bolts 11 one by one, and the n bolts 11 are fixed; the sealing ring 7 is arranged between the supporting seat 8 and the bearing ring 2; n is a positive integer, and n is not less than 8. The inner hexagonal socket head cap screw 3 is arranged between the limiting ring 4 and the bearing hub 5, so that the fixing of the limiting ring 4 and the bearing hub 5 is realized, and the axial limiting of the limiting ring 4 to the 2 bearings 6 is realized simultaneously.
8 groups of T-shaped holes are formed in the limiting ring 4 along the circumferential direction, the hole depth is 6mm, the diameter phi 20 holes and the hole depth is 5mm, the diameter phi 12 holes are evenly distributed with 8 threaded holes in the corresponding positions of the bearing hub 5, the limiting ring 4 and the bearing hub 5 are fixed through the M10 hexagon socket head cap screws 3, and the limiting ring 4 is used for axially fixing the bearing 6.
As shown in fig. 2, the through-hole 81 is a tapered through-hole; the small diameter end of the through hole 81 points to the bearing ring 2; the diameter L1 of the small-diameter end of the through hole 81 is 20 mm; the large-diameter end diameter L2 of the through-hole 81 is 24 mm. When the furnace door supporting floating structure is arranged on an external furnace body, the bolt 11 realizes micro-swing in the tapered through hole 81 of the supporting seat 8; meanwhile, the inner wall of the bearing ring 2 freely moves along the arc-shaped outer wall of the bearing hub 5, so that the floating movement of the furnace cover 1 is realized, and finally, the smooth butt joint of the furnace cover 1 and the end surface of an external furnace body is completed.
As shown in fig. 4, the circumferential outer wall of the bearing hub 5 is an asymmetric arc-shaped structure; the radius R of the arc-shaped outer wall of the bearing hub 5 is 86 mm; the distance L6 between the center point of the arc-shaped outer wall and the axial end face of the bearing hub 5 pointing to the limit ring 4 is 36 mm; the distance L7 between the center point of the arc-shaped outer wall and the axial end face of the bearing hub 5 pointing to the supporting seat 8 is 58 mm. When the furnace cover 1 swings, the asymmetric arc shape is more beneficial to the large-amplitude swing of the furnace cover 1 when the furnace cover 1 is far away from an external furnace body, and the small-amplitude accurate swing of the furnace cover 1 when the furnace cover 1 is close to the external furnace body is suitable for a furnace mouth of the external furnace body, so that the stable butt joint is finally realized.
A concave sealing groove is formed in the inner side of the supporting seat 8, and as shown in fig. 3, the sealing ring 7 is of an annular structure; the thickness L3 of the sealing ring 7 is 18 mm; the inner diameter L4 of the sealing ring 7 is 388 mm; the outer diameter L5 of the sealing ring 7 is 408 mm. When the sealing ring is installed, the sealing ring 7 is installed in the sealing groove on the inner side of the supporting seat 8.
The assembly method of the furnace door supporting floating mechanism comprises the following steps:
firstly, welding and fixing a bearing hub 5 on a support seat 8, and sleeving the bearing hub on a bearing large shaft 12; the supporting seat 8 is fixed with an external loading mechanism;
step two, sleeving 2 bearings 6 on a large bearing shaft 12, and installing a limiting ring 4 at the left end of each bearing 6; 8 groups of T-shaped holes are formed in the left limiting ring 4 along the circumferential direction, threaded holes are formed in the corresponding position of the bearing hub 5 along the circumferential direction, the limiting ring 4 and the bearing hub 5 are fixed through an inner hexagonal socket head cap screw 3 of M10, and the limiting ring 4 realizes axial fixation of 2 bearings 6;
thirdly, a sealing ring 7 is arranged in a sealing groove of a supporting seat 8, a furnace cover 1 is welded and fixed on the outer wall of a bearing ring 2, and the bearing ring 2 is sleeved on a bearing hub 5;
and step four, the bolt 11 is arranged in the conical through hole 81 to realize the connection of the bearing ring 2 and the supporting seat 8, and the bearing ring is fastened by the hexagon nut 10 and the spring washer 9 after being arranged, so that the sealing effect is realized.
The using method of the furnace door supporting floating mechanism comprises the following steps:
starting an external loading mechanism to realize that a furnace door supporting floating mechanism moves towards a furnace body;
step two, when the furnace cover 1 is contacted with the end surface of the external furnace body, the bearing ring 2 freely floats along the cambered surface of the bearing hub 5; until the furnace cover 1 is in smooth butt joint with the end face of the external furnace body, the external loading mechanism stops;
step three, vacuumizing the external furnace body, filling inert gas, starting an external induction diffusion welding device, and heating welding parts in the external furnace body; and after the solder between the parts to be welded is heated and melted, finishing diffusion welding.
Although the present invention has been described with reference to the preferred embodiments, it is not intended to limit the present invention, and those skilled in the art can make variations and modifications of the present invention without departing from the spirit and scope of the present invention by using the methods and technical contents disclosed above.

Claims (9)

1. The utility model provides an induction diffusion welding device furnace gate supports relocation mechanism which characterized in that: the furnace cover comprises a furnace cover (1), a bearing ring (2), a limiting ring (4), a bearing hub (5), 2 bearings (6), a sealing ring (7), a supporting seat (8), n spring washers (9), n hexagon nuts (10), n bolts (11) and a bearing large shaft (12); wherein, the bearing large shaft (12) is axially and horizontally arranged; the limiting ring (4) is coaxially sleeved on the outer wall of the bearing large shaft (12); the supporting seat (8) is coaxially sleeved on the outer wall of the bearing large shaft (12); the bearing hub (5) is fixedly arranged between the limiting ring (4) and the supporting seat (8); one axial end of the bearing hub (5) is matched with a step on the side wall of the shaft end of the limiting ring (4); the other axial end of the bearing hub (5) is fixedly connected with the supporting seat (8); 2 bearings (6) are sleeved on the outer wall of the bearing large shaft (12) side by side; and 2 bearings (6) are contacted with the inner wall of the bearing hub (5); the bearing ring (2) is sleeved on the outer wall of the bearing hub (5); the furnace cover (1) is sleeved on the outer wall of the bearing ring (2); the supporting seat (8) is of a disc-shaped structure; n through holes (81) are uniformly formed in the supporting seat (8) along the circumferential direction; the n stud bolts (11) correspondingly penetrate through the n through holes (81) and extend into the bearing ring (2); 1 spring washer (9) is correspondingly arranged between each bolt (11) and the support seat (8); the n hexagon nuts (10) correspond to the n bolts (11) one by one, and the n bolts (11) are fixed; the sealing ring (7) is arranged between the supporting seat (8) and the bearing ring (2); n is a positive integer, and n is not less than 8.
2. The induction diffusion welding apparatus oven door support float mechanism of claim 1, wherein: the furnace door supporting floating mechanism also comprises an inner hexagonal cylindrical head screw (3); the inner hexagonal socket head cap screw (3) is arranged between the limiting ring (4) and the bearing hub (5), so that the fixing connection of the limiting ring (4) and the bearing hub (5) is realized, and the axial limiting of the limiting ring (4) to 2 bearings (6) is realized simultaneously.
3. The induction diffusion welding apparatus oven door support float mechanism of claim 2, wherein: the through hole (81) is a conical through hole; the small-diameter end of the through hole (81) points to the bearing ring (2); the diameter L1 of the small-diameter end of the through hole (81) is 20 mm; the diameter L2 of the large diameter end of the through hole (81) is 24 mm.
4. The induction diffusion welding apparatus furnace door support float mechanism of claim 3, wherein: the circumferential outer wall of the bearing hub (5) is of an asymmetric arc structure; the radius R of the arc-shaped outer wall of the bearing hub (5) is 86 mm; the distance L6 between the center point of the arc-shaped outer wall and the axial end face of the bearing hub (5) pointing to the limit ring (4) is 36 mm; the distance L7 between the center point of the arc-shaped outer wall and the axial end face of the bearing hub (5) pointing to the supporting seat (8) is 58 mm.
5. The induction diffusion welding apparatus furnace door support float mechanism of claim 4, wherein: the sealing ring (7) is of an annular structure; the thickness L3 of the sealing ring (7) is 18 mm; the inner diameter L4 of the sealing ring (7) is 388 mm; the diameter L5 of the outer diameter of the sealing ring (7) is 408 mm.
6. The induction diffusion welding apparatus furnace door support float mechanism of claim 5, wherein: the 2 bearings (6) are adjacently arranged between the inner wall of the bearing hub (5) and the outer wall of the bearing large shaft (12), so that the bearing hub (5) does not move relatively when the bearing large shaft (12) rotates.
7. The induction diffusion welding apparatus furnace door support float mechanism of claim 6, wherein: when the furnace door supporting floating structure is arranged on an external furnace body, the bolt (11) realizes micro-swing in the conical through hole (81) of the supporting seat (8); meanwhile, the inner wall of the bearing ring (2) freely moves along the arc-shaped outer wall of the bearing hub (5), so that the furnace cover (1) can float and move, and finally, the smooth butt joint of the furnace cover (1) and the end face of an external furnace body is completed.
8. An induction diffusion welding furnace door support float mechanism as claimed in any one of claims 1 to 7, wherein: the assembly method of the furnace door supporting floating mechanism comprises the following steps:
firstly, welding and fixing a bearing hub (5) on a support seat (8), and sleeving the bearing hub on a bearing large shaft (12); the supporting seat (8) is fixed with an external loading mechanism;
step two, sleeving 2 bearings (6) on a large bearing shaft (12), and installing a limiting ring (4) at the axial left end of each bearing (6); the limiting ring (4) and the bearing hub (5) are fixed through the inner hexagonal socket head cap screw (3), and the limiting ring (4) realizes axial fixation of 2 bearings (6);
thirdly, a sealing ring (7) is arranged in a sealing groove of a supporting seat (8), a furnace cover (1) is welded and fixed on the outer wall of a bearing ring (2), and the bearing ring (2) is sleeved on a bearing hub (5);
and step four, the bolt (11) is arranged in the conical through hole (81) to realize the connection of the bearing ring (2) and the supporting seat (8), and the bearing ring is fastened by a hexagon nut (10) and a spring washer (9) after being arranged, so that the sealing effect is realized.
9. The induction diffusion welding apparatus oven door support float mechanism of claim 8, wherein: the use method of the furnace door supporting floating mechanism comprises the following steps:
starting an external loading mechanism to realize that a furnace door supporting floating mechanism moves towards a furnace body;
step two, when the furnace cover (1) is contacted with the end surface of the external furnace body, the bearing ring (2) freely floats along the cambered surface of the bearing hub (5); until the furnace cover (1) is in smooth butt joint with the end face of the external furnace body, the external loading mechanism stops;
step three, vacuumizing the external furnace body, filling inert gas, starting an external induction diffusion welding device, and heating welding parts in the external furnace body; and after the solder between the parts to be welded is heated and melted, finishing diffusion welding.
CN202010531472.5A 2020-06-11 2020-06-11 Furnace door supporting floating mechanism of induction diffusion welding device Pending CN111774712A (en)

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Application Number Priority Date Filing Date Title
CN202010531472.5A CN111774712A (en) 2020-06-11 2020-06-11 Furnace door supporting floating mechanism of induction diffusion welding device

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Application Number Priority Date Filing Date Title
CN202010531472.5A CN111774712A (en) 2020-06-11 2020-06-11 Furnace door supporting floating mechanism of induction diffusion welding device

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CN111774712A true CN111774712A (en) 2020-10-16

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Publication number Priority date Publication date Assignee Title
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CN201209649Y (en) * 2008-06-27 2009-03-18 濮阳市先科环保节能减速机械制造有限公司 Energy-conserving type speed reducer
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Publication number Priority date Publication date Assignee Title
CN1293096A (en) * 2000-11-28 2001-05-02 中国科学院广州电子技术研究所 Floating device of hot-press welder
WO2003072487A2 (en) * 2002-02-27 2003-09-04 Honeywell International Inc. Bonding for a micro-electro-mechanical system (mems) and mems based devices
CN2886484Y (en) * 2005-12-28 2007-04-04 杨润泉 Sintering horizontal elastic slideway sealing device
CN101307814A (en) * 2008-06-27 2008-11-19 濮阳市先科环保节能减速机械制造有限公司 Energy-saving -type speed reducer
CN201209649Y (en) * 2008-06-27 2009-03-18 濮阳市先科环保节能减速机械制造有限公司 Energy-conserving type speed reducer
CN205980796U (en) * 2016-08-30 2017-02-22 浙江德西瑞光电科技有限公司 Furnace door structure of diffusion furnace
CN109249596A (en) * 2018-11-19 2019-01-22 广东正茂精机有限公司 A kind of electronic push pin device

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董飞等: "高温加压中频感应炉的结构设计", 《工业加热》 *

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