CN111769150A - Array substrate, preparation method thereof and display panel - Google Patents

Array substrate, preparation method thereof and display panel Download PDF

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Publication number
CN111769150A
CN111769150A CN202010658560.1A CN202010658560A CN111769150A CN 111769150 A CN111769150 A CN 111769150A CN 202010658560 A CN202010658560 A CN 202010658560A CN 111769150 A CN111769150 A CN 111769150A
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CN
China
Prior art keywords
light
substrate
photosensitive
array substrate
layer
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CN202010658560.1A
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Chinese (zh)
Inventor
周鹏
郭胜
刘瑞
程立技
赖韦霖
鲍建东
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BOE Technology Group Co Ltd
Chengdu BOE Optoelectronics Technology Co Ltd
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BOE Technology Group Co Ltd
Chengdu BOE Optoelectronics Technology Co Ltd
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Priority to CN202010658560.1A priority Critical patent/CN111769150A/en
Publication of CN111769150A publication Critical patent/CN111769150A/en
Pending legal-status Critical Current

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    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10KORGANIC ELECTRIC SOLID-STATE DEVICES
    • H10K59/00Integrated devices, or assemblies of multiple devices, comprising at least one organic light-emitting element covered by group H10K50/00
    • H10K59/60OLEDs integrated with inorganic light-sensitive elements, e.g. with inorganic solar cells or inorganic photodiodes
    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10KORGANIC ELECTRIC SOLID-STATE DEVICES
    • H10K59/00Integrated devices, or assemblies of multiple devices, comprising at least one organic light-emitting element covered by group H10K50/00
    • H10K59/10OLED displays
    • H10K59/12Active-matrix OLED [AMOLED] displays
    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10KORGANIC ELECTRIC SOLID-STATE DEVICES
    • H10K59/00Integrated devices, or assemblies of multiple devices, comprising at least one organic light-emitting element covered by group H10K50/00
    • H10K59/10OLED displays
    • H10K59/12Active-matrix OLED [AMOLED] displays
    • H10K59/1201Manufacture or treatment

Abstract

The invention provides an array substrate, a preparation method thereof and a display panel, belongs to the technical field of display, and can at least partially solve the problem that the conventional display device does not have a photosensitive function. An array substrate of the present invention includes: a substrate; a plurality of pixel units on the substrate; the photosensitive unit is positioned on the substrate, the projection of the photosensitive unit and the pixel unit on the substrate is not contacted, and the photosensitive unit is used for sensing the ambient light emitted to the photosensitive unit.

Description

Array substrate, preparation method thereof and display panel
Technical Field
The invention belongs to the technical field of display, and particularly relates to an array substrate, a preparation method of the array substrate and a display panel.
Background
Nowadays, mobile terminals (such as mobile phones) have become indispensable tools in our lives, and display devices are important components of mobile terminals, and the updating speed of the display devices is very fast. Among them, the organic light emitting diode display device (OLED) is widely used due to its advantages of high brightness, color saturation, lightness, thinness, flexibility, etc. Currently, a common organic light emitting diode display device in the market is a display device (TSP) with a touch function.
However, for some special occasions, the application of the display device requires that the display device has a light sensing function, so as to form a display device capable of controlling the external light, for example, a display device capable of forming light touch can be formed, the touch function of the display device can be realized by the light incidence of a laser pen or a special waveband, and the light path can be presented; the display device can be applied to laser target-shooting entertainment projects and the like of amusement parks. Therefore, there is a need for an organic light emitting diode display device having a light sensing function.
Disclosure of Invention
The invention at least partially solves the problem that the existing display device does not have a photosensitive function, and provides an array substrate with the photosensitive function.
The technical scheme adopted for solving the technical problem of the invention is an array substrate, which comprises:
a substrate;
a plurality of pixel units on the substrate;
the photosensitive unit is positioned on the substrate, the projection of the photosensitive unit and the pixel unit on the substrate is not contacted, and the photosensitive unit is used for sensing the ambient light emitted to the photosensitive unit.
It is further preferable that the photosensitive unit includes: the photosensitive layer is positioned between the first light-transmitting conductive layer and the second light-transmitting conductive layer, the resistance of the photosensitive layer can change along with the change of the environmental light emitted to the photosensitive layer, and the first light-transmitting conductive layer and the second light-transmitting conductive layer are used for providing electric signals for the photosensitive layer.
It is further preferable that the photosensitive layer has a thickness of 340 to 360 nm, the first light-transmitting conductive layer has a thickness of 30 to 300nm, and the second light-transmitting conductive layer has a thickness of 30 to 360 nm.
Further preferably, the photosensitive layer is formed of a semiconductor material, and the first light-transmitting conductive layer and the second light-transmitting conductive layer are formed of a metal material.
It is further preferable that a material forming the photosensitive layer includes at least one of metal sulfide, selenide, and telluride, and a material forming the first light-transmitting conductive layer and the second light-transmitting conductive layer includes at least one of silver, titanium, and aluminum.
It is further preferable that a plurality of the pixel units are arranged at intervals, and projections of the photosensitive units on the substrate are located between intervals of projections of adjacent pixel units on the substrate.
It is further preferred that the light sensing unit is further from the substrate than the pixel unit.
Further preferably, the array substrate further includes: and the packaging layer is positioned between the photosensitive unit and the pixel unit in the direction of pointing the photosensitive unit to the pixel unit.
The technical scheme adopted for solving the technical problem of the invention is a preparation method of an array substrate, based on the array substrate, the preparation method comprises the following steps:
forming a pixel unit on a substrate;
and forming a photosensitive unit on the substrate in a patterning mode.
The technical scheme adopted for solving the technical problem of the invention is a display panel which comprises the array substrate.
Drawings
The accompanying drawings, which are included to provide a further understanding of the invention and are incorporated in and constitute a part of this specification, illustrate embodiments of the invention and together with the description serve to explain the principles of the invention and not to limit the invention. In the drawings:
fig. 1 is a side view structural diagram of an array substrate according to an embodiment of the invention;
fig. 2 is a top view structural diagram of an array substrate according to an embodiment of the invention;
fig. 3 is a schematic flow chart of a method for manufacturing an array substrate according to an embodiment of the invention;
wherein the reference numerals are: 1. a substrate; 2. a pixel unit; 3. a light sensing unit; 31. a first light-transmitting conductive layer; 32. a second light-transmitting conductive layer; 33. a photosensitive layer; 4. and (7) packaging the layer.
Detailed Description
In order to make the technical solutions of the present invention better understood, the present invention will be described in further detail with reference to the accompanying drawings and specific embodiments.
In the present invention, the two structures "in the same layer" means that they are formed of the same material layer and thus are in the same layer in a stacked relationship, but do not represent that they are equidistant from the substrate nor that they are completely identical in structure with other layers between the substrate.
In the present invention, the "patterning process" refers to a step of forming a structure having a specific pattern, which may be a photolithography process including one or more steps of forming a material layer, coating a photoresist, exposing, developing, etching, stripping a photoresist, and the like; of course, the "patterning process" may also be an imprinting process, an inkjet printing process, or other processes.
The invention will be described in more detail below with reference to the accompanying drawings. Like elements in the various figures are denoted by like reference numerals. For purposes of clarity, the various features in the drawings are not necessarily drawn to scale. Moreover, certain well-known elements may not be shown in the figures.
In the following description, numerous specific details of the invention, such as structure, materials, dimensions, processing techniques and techniques of components, are set forth in order to provide a more thorough understanding of the invention. However, as will be understood by those skilled in the art, the present invention may be practiced without these specific details.
Example 1:
as shown in fig. 1 to 3, the present embodiment provides an array substrate, including:
a substrate 1;
a plurality of pixel units 2 on a substrate 1;
and the photosensitive unit 3 is positioned on the substrate 1, the photosensitive unit 3 is not in contact with the projection of the pixel unit 2 on the substrate 1, and the photosensitive unit 3 is used for sensing the ambient light emitted to the photosensitive unit 3.
The pixel unit 2 is used for emitting light to form a display image of the array substrate. The light sensing unit 3 is used to sense the intensity, irradiation position, and the like of ambient light emitted from the outside to the array substrate.
In the array substrate of this embodiment, the light sensing unit 3 for sensing ambient light is disposed, so that the array substrate has light sensing performance (to realize light control), and thus the application range of the array substrate is expanded, and a display panel capable of realizing control of external light (such as ambient light or other external light) is formed.
The array substrate of the present embodiment may be a liquid crystal array substrate, an Organic Light Emitting Diode (OLED) array substrate, or the like, and is preferably an organic light emitting diode array substrate. When the array substrate of the present embodiment is an organic light emitting diode array substrate, each pixel unit 2 includes a cathode layer, a light emitting layer, and an anode layer.
Preferably, the photosensitive unit 3 includes: the light-transmitting device comprises a first light-transmitting conductive layer 31, a photosensitive layer 33 and a second light-transmitting conductive layer 32 which are mutually overlapped, wherein the photosensitive layer 33 is positioned between the first light-transmitting conductive layer 31 and the second light-transmitting conductive layer 32, the resistance of the photosensitive layer 33 can change along with the change of the environmental light which is irradiated to the photosensitive layer, and the first light-transmitting conductive layer 31 and the second light-transmitting conductive layer 32 are used for providing an electric signal for the photosensitive layer 33.
The photosensitive unit 3 is composed of three parts, namely, two transparent conductive layers and a photosensitive layer 33, and has a "sandwich" structure. The electrical signals of the first transparent conductive layer 31(Metal1) and the second transparent conductive layer 32(Metal2) can be used to detect the resistance of the photosensitive layer 33, when a specific waveband of ambient light is irradiated to the photosensitive layer 33 through the first transparent conductive layer 31 or the second transparent conductive layer 32, the resistance of the photosensitive layer 33 changes due to the received light, that is, if there is a current in the photosensitive layer 33, the current signal changes, so as to obtain the change of the resistance of the photosensitive layer 33, and further obtain the intensity of the ambient light.
In addition, in the photosensitive layer 33, the resistance of the portion that receives light changes, and the resistance of the portion that does not receive light does not change, so that the position of the environmental light can be obtained from the position of the change in the resistance of the photosensitive layer 33.
The photosensitive unit 3 has a simple structure and is easy and convenient to manufacture, so that the array substrate of the embodiment is easy to manufacture, and the ambient light irradiated to the array substrate can be accurately sensed, so that the photosensitive performance of the array substrate of the embodiment is ensured.
Specifically, the photosensitive layer 33 has a thickness of 340 to 360 nm, preferably 350 nm; the first light-transmitting conductive layer 31 is 30 to 300 nanometers; the thickness of the second light-transmitting conductive layer 32 is 30 to 360 nm.
In other words, the first light-transmitting conductive layer 31 is closer to the light-emitting side of the array substrate than the second light-transmitting conductive layer 32, that is, the ambient light is irradiated to the photosensitive layer 33 through the first light-transmitting conductive layer 31, and therefore, in order to ensure the light-transmitting performance of the first light-transmitting conductive layer 31, the thickness of the first light-transmitting conductive layer 31 needs to be set slightly smaller than that of the second light-transmitting conductive layer 32.
Preferably, the photosensitive layer 33 is formed of a semiconductor material, and the first light-transmitting conductive layer 31 and the second light-transmitting conductive layer 32 are formed of a metal material.
Specifically, the material for forming the photosensitive layer 33 includes at least one of metal sulfide, selenide, and telluride, and the material for forming the first light-transmitting conductive layer 31 and the second light-transmitting conductive layer 32 includes at least one of silver, titanium, and aluminum.
Among them, that is, the first light-transmitting conductive layer 31 may be formed of a metal material such as silver; or the film can be formed by stacking three metal layers of titanium, aluminum and titanium (Ti/Al/Ti), and specifically, the thicknesses of the stacked titanium, aluminum and titanium film layers can be respectively 30nm, 150nm and 30 nm. The second light-transmitting conductive layer 32 may be formed of a metal material such as silver; or the film can be formed by stacking three metal layers of titanium, aluminum and titanium (Ti/Al/Ti), and specifically, the thicknesses of the stacked titanium, aluminum and titanium film layers can be respectively 30nm, 300nm and 30 nm.
Preferably, the plurality of pixel units 2 are arranged at intervals, and the projection of the photosensitive unit 3 on the substrate 1 is positioned between the intervals of the projections of the adjacent pixel units 2 on the substrate 1.
The light sensing unit 3 and the pixel unit 2 are not overlapped, so that light emitted from the light emitting side by the pixel unit 2 and ambient light received by the light sensing unit 3 from the light emitting side are not affected by each other, and the light sensing performance and the display performance of the array substrate are ensured.
Specifically, the plurality of pixel units 2 may be divided into three pixels, i.e., a red pixel R, a green pixel G, and a blue pixel B, which are arranged as shown in fig. 2; meanwhile, the photosensitive units 3 are disposed between the pixel units 2 in a mesh structure, and the arrangement is as shown in fig. 2.
Preferably, the light sensing unit 3 is further from the substrate 1 than the pixel unit 2.
In the direction perpendicular to the substrate 1, there are sequentially, as shown in fig. 1, the substrate 1, the pixel unit 2, and the photosensitive unit 3.
Specifically, the array substrate of this embodiment further includes: and an encapsulation layer 4, the encapsulation layer 4 being located between the light sensing unit 3 and the pixel unit 2 in a direction in which the light sensing unit 3 is directed to the pixel unit 2.
In the direction perpendicular to the substrate 1, there are sequentially, a substrate 1, a pixel unit 2, an encapsulation layer 4, and a photosensitive unit 3. It should be noted that the array substrate of this embodiment further includes a transistor structure, which is connected to the pixel unit 2 and is used for providing a display signal to the pixel unit 2.
The embodiment also provides a preparation method of the array substrate, and based on the array substrate, the preparation method includes:
s11, forming a pixel unit 2 on the substrate 1.
Before forming the pixel unit 2 on the substrate 1, a transistor structure and an insulating layer (not shown) covering the transistor structure may be formed on the substrate 1, and then a plurality of pixel units 2 may be formed on the insulating layer.
S12, forming an encapsulation layer 4 on the plurality of pixel units 2, and encapsulating each pixel unit 2 to prevent each pixel unit 2 from being damaged in the following step, i.e. the encapsulation layer 4 has a protective effect on each pixel unit 2.
S13, forming the photosensitive unit 3 on the substrate 1 by patterning.
Specifically, the second transparent conductive layer 32, the photosensitive layer 33, and the first transparent conductive layer 31 are formed on the encapsulation layer 4 by patterning (sputtering, developing, and etching).
Example 2:
the present embodiment provides a display panel including the array substrate in embodiment 1.
In the display panel of the embodiment, the light sensing unit 3 for sensing the ambient light is disposed, so that the display panel has light sensing performance, thereby expanding the application range of the array substrate, for example, the display panel has light control and light path presenting features, and the display panel can be applied to laser target shooting entertainment projects in amusement parks and the like.
Specifically, the display panel may be any product or component having a display function, such as a liquid crystal display panel, an Organic Light Emitting Diode (OLED) display panel, electronic paper, a mobile phone, a tablet computer, a television, a display, a notebook computer, a digital photo frame, and a navigator.
It is noted that, herein, relational terms such as first and second, and the like may be used solely to distinguish one entity or action from another entity or action without necessarily requiring or implying any actual such relationship or order between such entities or actions. Also, the terms "comprises," "comprising," or any other variation thereof, are intended to cover a non-exclusive inclusion, such that a process, method, article, or apparatus that comprises a list of elements does not include only those elements but may include other elements not expressly listed or inherent to such process, method, article, or apparatus. Without further limitation, an element defined by the phrase "comprising an … …" does not exclude the presence of other identical elements in a process, method, article, or apparatus that comprises the element.
While embodiments in accordance with the invention have been described above, these embodiments are not intended to be exhaustive or to limit the invention to the precise embodiments described. Obviously, many modifications and variations are possible in light of the above teaching. The embodiments were chosen and described in order to best explain the principles of the invention and the practical application, to thereby enable others skilled in the art to best utilize the invention and various embodiments with various modifications as are suited to the particular use contemplated. The invention is limited only by the claims and their full scope and equivalents.

Claims (10)

1. An array substrate, comprising:
a substrate;
a plurality of pixel units on the substrate;
the photosensitive unit is positioned on the substrate, the projection of the photosensitive unit and the pixel unit on the substrate is not contacted, and the photosensitive unit is used for sensing the ambient light emitted to the photosensitive unit.
2. The array substrate of claim 1, wherein the photosensitive unit comprises: the photosensitive layer is positioned between the first light-transmitting conductive layer and the second light-transmitting conductive layer, the resistance of the photosensitive layer can change along with the change of the environmental light emitted to the photosensitive layer, and the first light-transmitting conductive layer and the second light-transmitting conductive layer are used for providing electric signals for the photosensitive layer.
3. The array substrate of claim 2, wherein the photosensitive layer has a thickness of 340 to 360 nm, the first light-transmissive conductive layer has a thickness of 30 to 300nm, and the second light-transmissive conductive layer has a thickness of 30 to 360 nm.
4. The array substrate of claim 2, wherein the photosensitive layer is formed of a semiconductor material, and the first and second light-transmissive conductive layers are formed of a metal material.
5. The array substrate of claim 4, wherein the photosensitive layer is formed of at least one of metal sulfide, selenide, and telluride, and the first and second light-transmitting conductive layers are formed of at least one of silver, titanium, and aluminum.
6. The array substrate of claim 1, wherein a plurality of the pixel units are arranged at intervals, and projections of the photosensitive units on the substrate are located between intervals of projections of adjacent pixel units on the substrate.
7. The array substrate of claim 1, wherein the light sensing units are further from the base than the pixel units.
8. The array substrate of claim 7, further comprising: and the packaging layer is positioned between the photosensitive unit and the pixel unit in the direction of pointing the photosensitive unit to the pixel unit.
9. A method for manufacturing an array substrate, based on the array substrate of any one of claims 1 to 8, the method comprising:
forming a pixel unit on a substrate;
and forming a photosensitive unit on the substrate in a patterning mode.
10. A display panel comprising the array substrate according to any one of claims 1 to 8.
CN202010658560.1A 2020-07-09 2020-07-09 Array substrate, preparation method thereof and display panel Pending CN111769150A (en)

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Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN112967674A (en) * 2021-02-04 2021-06-15 维沃移动通信有限公司 Electronic device and brightness control method
CN114420067A (en) * 2022-01-29 2022-04-29 联想(北京)有限公司 Display panel and display control method

Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN107632738A (en) * 2017-09-29 2018-01-26 京东方科技集团股份有限公司 A kind of touch-control display panel and preparation method thereof, touch control display apparatus
CN109767725A (en) * 2019-03-19 2019-05-17 京东方科技集团股份有限公司 A kind of pixel-driving circuit and its driving method, display device
US20200135817A1 (en) * 2018-10-31 2020-04-30 Shanghai Tianma AM-OLED Co., Ltd. Display panel, display device and driving method for display device

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN107632738A (en) * 2017-09-29 2018-01-26 京东方科技集团股份有限公司 A kind of touch-control display panel and preparation method thereof, touch control display apparatus
US20200135817A1 (en) * 2018-10-31 2020-04-30 Shanghai Tianma AM-OLED Co., Ltd. Display panel, display device and driving method for display device
CN109767725A (en) * 2019-03-19 2019-05-17 京东方科技集团股份有限公司 A kind of pixel-driving circuit and its driving method, display device

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN112967674A (en) * 2021-02-04 2021-06-15 维沃移动通信有限公司 Electronic device and brightness control method
CN114420067A (en) * 2022-01-29 2022-04-29 联想(北京)有限公司 Display panel and display control method

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