CN111766010A - Capacitive touch sensor - Google Patents
Capacitive touch sensor Download PDFInfo
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- CN111766010A CN111766010A CN202010654660.7A CN202010654660A CN111766010A CN 111766010 A CN111766010 A CN 111766010A CN 202010654660 A CN202010654660 A CN 202010654660A CN 111766010 A CN111766010 A CN 111766010A
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
- G01L1/00—Measuring force or stress, in general
- G01L1/14—Measuring force or stress, in general by measuring variations in capacitance or inductance of electrical elements, e.g. by measuring variations of frequency of electrical oscillators
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Abstract
The invention provides a capacitive touch sensor, wherein a single sensing unit of the capacitive touch sensor is triangular and consists of an upper polar plate, a lower polar plate and a dielectric layer; the upper polar plate and the lower polar plate are correspondingly arranged, wherein the upper polar plate comprises three first polar plates, the lower polar plate comprises three second polar plates, the first polar plates and the second polar plates are isosceles triangles with vertex angles of one hundred twenty degrees, the vertex angles of the three first polar plates are oppositely arranged, the top ends of the three second polar plates are mutually connected, and the three first polar plates and the three second polar plates jointly form three independent capacitors; through the structural arrangement, the number of pole plates and the number of capacitors are reduced, and a measuring circuit is greatly simplified, so that the three-dimensional force can be accurately measured and decoupled.
Description
Technical Field
The invention relates to the field of sensors, in particular to a capacitive touch sensor.
Background
With the development and integration of various disciplines, the field of robots integrating various technologies is also developing vigorously, and in order to realize the intellectualization of robots, the robots need to have the ability of interacting with the outside. From the perspective of imitating human perception, robots of the present day are provided with various sensors to ensure that the robots can receive various information from the outside. Such as cameras and image processing techniques that mimic human vision; vibration sensors and speech recognition techniques that mimic human hearing; infrared thermometers that mimic human touch, and the like. The touch sensor is the only sensor in direct contact with the outside in many sensors, and can obtain abundant outside environment information, such as force, hardness, roughness, texture, shape, slippage and temperature, and has irreplaceable important function.
There are generally the following types of existing flexible tactile sensors:
(1) piezoelectric tactile sensor: the principle is the piezoelectric effect, namely when the piezoelectricity receives the external force effect, the internal charge can gather to the forced surface, and the magnitude of the charge changes along with the change of the external force. The common flexible piezoelectric material is polyvinylidene fluoride, has the advantages of high sensitivity, good temperature stability and the like, and has the flexibility close to human skin. However, the piezoelectric tactile sensor cannot measure static force, and the application range is limited.
(2) Piezoresistive tactile sensor: the piezoresistive tactile sensor is a sensing device manufactured based on the clamping effect principle that the resistivity of a semiconductor elastic material changes along with the change of the magnitude of an external force. The sensitive unit substrate deforms under the action of external force, and the resistance value changes along with the deformation, so that the bridge formed by the internal diffusion resistors is output in an unbalanced mode. The piezoresistive tactile sensor has the advantages of high frequency response, small noise interference and the like. However, since the conductive material is unevenly distributed in the polymer during the manufacturing process of the semiconductor material, the decoupling accuracy of the three-dimensional force may be affected, and the repeatability of the sensor is poor.
(3) Capacitive touch sensor: capacitive touch sensors have a core element of variable parameter capacitance, typically consisting of a dielectric layer and an electrode layer. Under the action of external force, the distance between the upper and lower electrode plates of the capacitor and the facing area of the upper and lower electrode plates can be changed, so that the capacitance value is changed, and the magnitude of the applied force is reflected through the change of the capacitance value. The capacitance type sensor has the advantages of high measurement sensitivity, small temperature influence, good dynamic response and the like. However, a single sensing unit of the existing capacitive touch sensor often comprises a plurality of electrode plates and a plurality of capacitors, so that a measuring circuit is complex and the sensitivity of the measuring circuit to tangential force measurement is low.
Disclosure of Invention
The invention aims to provide a capacitive touch sensor, which reduces the number of pole plates and the number of capacitors on the basis of the existing capacitive touch sensor so as to realize accurate measurement and decoupling of three-dimensional force.
To achieve the above object, the present invention provides a capacitive touch sensor including:
the sensing unit is triangular and comprises an upper polar plate, a lower polar plate and a dielectric layer; the dielectric layer is positioned between the upper polar plate and the lower polar plate; the upper polar plate and the lower polar plate are correspondingly arranged; the upper polar plate comprises three first polar plates, and the vertex angles of the three first polar plates are arranged oppositely; the lower polar plate comprises three second polar plates, and the top ends of the three second polar plates are connected with each other; the three first polar plates and the three second polar plates form a three-capacitor structure;
when the three-capacitor structure is acted by external force, the dielectric layer in the three-capacitor structure deforms, the external force is decomposed to three mutually perpendicular degrees of freedom, and three-dimensional decoupling is carried out, so that three capacitance values are changed.
Optionally, the first polar plate and the second polar plate are both isosceles triangle polar plates with a vertex angle of 120 °.
Optionally, the first polar plate and the second polar plate are both in a comb-tooth polar plate structure; n length degressive fishback passes through the connecting plate and connects, constitutes the fishback polar plate structure, three the second polar plate the top of connecting plate is connected, and n is more than or equal to 2 positive integer.
Optionally, the comb-tooth-shaped polar plate structure is arranged as an integral structure.
Optionally, the top ends of three second polar plates are integrally arranged.
Optionally, the width of the comb plate is equal to the distance between the comb plates.
Optionally, the comb plates on the first polar plate and the comb plates on the second polar plate are arranged in a one-to-one correspondence, and have an initial staggered area of fifty percent.
Optionally, the dielectric layer is polydimethylsiloxane.
Optionally, the upper electrode plate and the lower electrode plate are both copper electrode plates.
According to the specific embodiment provided by the invention, the invention discloses the following technical effects:
the invention provides a capacitive touch sensor, wherein a single sensing unit of the capacitive touch sensor is triangular and consists of an upper polar plate, a lower polar plate and a dielectric layer; the upper polar plate and the lower polar plate are correspondingly arranged, wherein the upper polar plate comprises three first polar plates, the lower polar plate comprises three second polar plates, the first polar plates and the second polar plates are isosceles triangles with vertex angles of one hundred twenty degrees, the vertex angles of the three first polar plates are oppositely arranged, the top ends of the three second polar plates are mutually connected, and the three first polar plates and the three second polar plates jointly form three independent capacitors; through the structural arrangement, the number of pole plates and the number of capacitors are reduced, and a measuring circuit is greatly simplified, so that the three-dimensional force can be accurately measured and decoupled.
Drawings
In order to more clearly illustrate the embodiments of the present invention or the technical solutions in the prior art, the drawings needed to be used in the embodiments will be briefly described below, and it is obvious that the drawings in the following description are only some embodiments of the present invention, and it is obvious for those skilled in the art to obtain other drawings without inventive exercise.
FIG. 1 is a three-capacitor structure diagram of a capacitive touch sensor in accordance with an embodiment of the present invention;
FIG. 2 is a diagram of a second plate of a capacitive touch sensor in accordance with an embodiment of the invention;
FIG. 3 is a side view of a capacitive touch sensor in accordance with an embodiment of the invention when not under a force;
FIG. 4 is a side view of a capacitive touch sensor in accordance with an embodiment of the present invention under tangential force;
FIG. 5 is a side view of a capacitive touch sensor in accordance with an embodiment of the present invention when subjected to a normal force;
wherein, 1, fishback, 2, connecting plate.
Detailed Description
The technical solutions in the embodiments of the present invention will be clearly and completely described below with reference to the drawings in the embodiments of the present invention, and it is obvious that the described embodiments are only a part of the embodiments of the present invention, and not all of the embodiments. All other embodiments, which can be derived by a person skilled in the art from the embodiments given herein without making any creative effort, shall fall within the protection scope of the present invention.
The invention aims to provide a capacitive touch sensor, which reduces the number of pole plates and the number of capacitors on the basis of the existing capacitive touch sensor so as to realize accurate measurement and decoupling of three-dimensional force.
In order to make the aforementioned objects, features and advantages of the present invention comprehensible, embodiments accompanied with figures are described in further detail below.
The present invention discloses a capacitive touch sensor, comprising:
the sensing unit is triangular and comprises an upper polar plate, the upper polar plate comprises three first polar plates, and vertex angles of the three first polar plates are arranged oppositely;
the lower polar plate comprises three second polar plates, and the top ends of the three second polar plates are connected with each other and are arranged in an integrated structure;
a dielectric layer between the upper plate and the lower plate.
As shown in fig. 1, the upper plate and the lower plate are disposed correspondingly, and three first plates and three second plates form a three-capacitor structure, i.e. a first capacitor C1A second capacitor C2And a third capacitance C3(ii) a When the three-capacitor structure is acted by external force, the dielectric layer in the three-capacitor structure deforms, the external force is decomposed to three mutually perpendicular degrees of freedom, and three-dimensional decoupling is carried out, so that three capacitance values are changed. Through the three-capacitor structure, when the three capacitors are subjected to external force in the same direction, the capacitors are changedThe chemical quantities are proportional to each other, and the formula for three-dimensional force decoupling is expressed as:
in the formula,. DELTA.CZ，ΔCX，ΔCYThe capacitance value variable quantities in the three directions are respectively normalized and are used for reflecting the force magnitudes in the three directions corresponding to the force decoupling acting on the sensor; delta C1，ΔC2，ΔC3The capacitance value variation of three independent capacitors of the sensor is respectively.
In this embodiment, the first polar plate and the second polar plate are both isosceles triangle polar plates with an apex angle of 120 °.
As shown in fig. 2, the first polar plate and the second polar plate are both of a comb-tooth polar plate structure; n length degressive fishback 1 passes through connecting plate 2 to be connected, constitutes the fishback polar plate structure, three the second polar plate the top of connecting plate 2 is connected, n is more than or equal to 2 positive integer. Under the condition of not changing the area of a single sensing unit, when the sensor is subjected to tangential force, the variation of the area just opposite to the upper and lower polar plates is greatly increased, so that the sensitivity of the sensor in measuring the tangential force is improved.
In this embodiment, the comb-tooth-shaped polar plate structure is an integral structure, and the width of the comb plate 1 is equal to the distance between the comb plates 1.
In this embodiment, the comb plates 1 on the first polar plate and the comb plates 1 on the second polar plate are arranged in a one-to-one correspondence, and have an initial staggered area of fifty percent.
The formula of three independent capacitors in the three-capacitor structure is shown as follows:
in the formula (I), the compound is shown in the specification,0is a vacuum dielectric constant, d is the distance between the upper and lower polar plates, w is the width of the comb plate 1, and m is the staggered width of each pair of comb plates 1 of the upper and lower polar platesAnd l is the length of the comb plate 1. By the formula, the capacitance value can be changed by changing the distance between the upper and lower polar plates and the dead area of each pair of comb plates 1, and the three-dimensional force is measured.
As shown in fig. 3, when the capacitive touch sensor is not under stress, the distance between the upper and lower plates is d, and the staggered width of each pair of comb plates 1 of the upper and lower plates is m. The dielectric shape changes when subjected to tangential and normal forces.
As shown in fig. 4, when the sensor is subjected to a tangential force, the dielectric layer is subjected to shear deformation, and the facing width m of each pair of comb plates 1 of the upper and lower pole plates of the sensor changes, resulting in a change in capacitance value. Because the three individual capacitances are aligned at 120 ° to each other, the following relationship exists:
in the formula,. DELTA.C1X，ΔC2X，ΔC3XThe components of tangential force on the three independent capacitors in the x direction, Delta C1Y，ΔC2Y，ΔC3YThe components of the tangential force in the y direction experienced by the three independent capacitors are respectively.
When the sensor is subjected to a normal force, as shown in fig. 5, the thickness of the dielectric layer is compressed, which causes the distance d between the upper and lower plates of the sensor to change, thereby changing the capacitance value. Thus, the following relationship exists:
ΔC1Z＝ΔC2Z＝ΔC3Z；
in the formula,. DELTA.C1Z，ΔC2Z，ΔC3ZThe normal forces experienced by the three independent capacitors are respectively.
In this embodiment, the dielectric layer is a flexible composite material, and is polydimethylsiloxane prepared from polydimethylsiloxane prepolymer and a curing agent, and has a relatively low elastic modulus and a relatively high dielectric constant, so that the sensor has relatively good anti-interference capability. Specifically, the dielectric layer changes the elastic modulus of the material within a certain range according to different preparation proportions, so that the measuring range of the sensor is changed according to different application occasions.
In this embodiment, the upper electrode plate and the lower electrode plate are both copper electrode plates.
The embodiments in the present description are described in a progressive manner, each embodiment focuses on differences from other embodiments, and the same and similar parts among the embodiments are referred to each other.
The principles and embodiments of the present invention have been described herein using specific examples, which are provided only to help understand the method and the core concept of the present invention; meanwhile, for a person skilled in the art, according to the idea of the present invention, the specific embodiments and the application range may be changed. In view of the above, the present disclosure should not be construed as limiting the invention.
Claims (9)
1. A capacitive touch sensor, comprising: the sensing unit is triangular and comprises an upper polar plate, a lower polar plate and a dielectric layer; the dielectric layer is positioned between the upper polar plate and the lower polar plate; the upper polar plate and the lower polar plate are correspondingly arranged; the upper polar plate comprises three first polar plates, and the vertex angles of the three first polar plates are arranged oppositely; the lower polar plate comprises three second polar plates, and the top ends of the three second polar plates are connected with each other; the three first polar plates and the three second polar plates form a three-capacitor structure;
when the three-capacitor structure is acted by external force, the dielectric layer in the three-capacitor structure deforms, the external force is decomposed to three mutually perpendicular degrees of freedom, and three-dimensional decoupling is carried out, so that three capacitance values are changed.
2. A capacitive touch sensor as in claim 1, wherein said first plate and said second plate are isosceles triangle plates with 120 ° apex angle.
3. A capacitive touch sensor as in claim 2, wherein said first plate and said second plate are both of a comb-type plate configuration; n length degressive fishback passes through the connecting plate and connects, constitutes the fishback polar plate structure, three the second polar plate the top of connecting plate is connected, and n is more than or equal to 2 positive integer.
4. A capacitive touch sensor as claimed in claim 3, wherein the comb-shaped plate structure is provided as a unitary structure.
5. A capacitive touch sensor as in claim 1, wherein the tips of three of said second plates are integrally formed.
6. A capacitive touch sensor as claimed in claim 3, wherein the width of the comb plates is equal to the spacing between the comb plates.
7. A capacitive touch sensor as in claim 3, wherein the combs on the first plate and the combs on the second plate are arranged in a one-to-one correspondence and have an initial staggered area of fifty percent.
8. A capacitive touch sensor as in claim 1, wherein said dielectric layer is polydimethylsiloxane.
9. A capacitive touch sensor as in claim 1, wherein said top plate and said bottom plate are both copper plates.
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Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN112477112A (en) * | 2020-11-26 | 2021-03-12 | 华中科技大学 | Simulated nerve touch sensor based on 4D printing forming |
| CN112504110A (en) * | 2020-11-18 | 2021-03-16 | 南通大学 | High-sensitivity wearable elastic substance deformation amount measuring device |
| CN114674467A (en) * | 2022-04-08 | 2022-06-28 | 福州大学 | Capacitive touch sensor |
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| CN114674467A (en) * | 2022-04-08 | 2022-06-28 | 福州大学 | Capacitive touch sensor |
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Effective date of registration: 20210108 Address after: 100191 No. 37, Haidian District, Beijing, Xueyuan Road Applicant after: BEIHANG University Applicant after: Ningbo Institute of innovation Beijing University of Aeronautics and Astronautics Address before: 100191 No. 37, Haidian District, Beijing, Xueyuan Road Applicant before: BEIHANG University |
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