CN111752088B - Method for unifying sizes of grid graphs, storage medium and computer equipment - Google Patents
Method for unifying sizes of grid graphs, storage medium and computer equipment Download PDFInfo
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Abstract
The invention provides a method for unifying the size of grid graphs, a storage medium and computer equipment, wherein the method for unifying the size of the grid graphs comprises the steps of selecting a first target graph with a plurality of first width graph lines and a plurality of second width graph lines, wherein the line width of the first width graph lines is equal to the line width of the second width graph lines plus the graph size precision; and expanding the line width of at least one second width graph line to the line width of the first width graph line according to the intersection point of the graph lines in the first target graph and the second width graph line. The method for unifying the sizes of the grid graphs selects the side lines of the graph lines needing to be adjusted according to the concave-convex of the grid cross graphs, fully considers the position relation between the graph lines needing to be adjusted and the adjacent graph lines in the same direction, and can ensure that the side lines of the graph lines in the grid graphs do not deviate while unifying the sizes of the grid lines.
Description
Technical Field
The invention belongs to the field of microelectronic layout data optical correction, and particularly relates to a method for unifying grid graphs in size, a storage medium and computer equipment.
Background
In the prior art, large scale integrated circuits are generally manufactured by using a lithography system, and the basic principle is to expose a layout on a mask to image the layout on a silicon wafer coated with photoresist. With the advance of technology, in order to produce more products, reducing the area and size of products has become a conventional method in the field of mask technology, however, due to the accuracy limitation of the dimension accuracy of patterns, when the patterns with the same dimension repeatability exist in the layout, the reduced target dimension may not be consistent, for example, the target dimension is reduced by 90% from 144nm, and the reduced target dimension should be 129.6nm, but in the case of OPC accuracy or pattern dimension accuracy of 0.5nm, the actually obtained reduced target dimension is 130nm or 129.5nm. The inconsistency of the target size can cause the inconsistency of the layout after the subsequent Optical Proximity Correction (OPC), thereby causing the consistency of the size of the silicon wafer pattern to be poor, and further influencing the yield of the subsequent lithography system. The reason for correcting the optical proximity effect is as follows: when the minimum feature size and pitch of an integrated circuit is reduced below the wavelength of the light source used in the lithography machine, problems due to interference and diffraction of light, and development, can cause severe distortion of the pattern exposed on the silicon wafer, which is referred to as Optical Proximity Effect (OPE) distortion. The deviation caused by these distortions can reach 20% or even higher, which seriously affects the product yield. Therefore, in order to make the lithographic result more consistent with the layout design, optical Proximity Correction (OPC) is usually used to reduce the influence of the OPC on the yield of the integrated circuit.
When the target size of the grid graph has graph size precision difference, as shown in fig. 1A, a = b + G, G is the graph size precision, and the borderlines of the graph lines on the left and right sides of the circular virtual frame in the graph are not on the same horizontal line; there may be inconsistency in the mesh pattern size after OPC, i.e., x ≠ y, as shown in fig. 1B. In order to improve the consistency of the post-OPC layout, the consistency of the target graph is ensured firstly. In the prior art, as shown in fig. 1C, for a grid pattern with a difference in the pattern size precision, a pattern size unifying method is as follows: inputting a target graph, selecting a grid graph line with smaller graph size precision, and extending the graph line to the right or upwards to obtain a final target graph, wherein the graph size precision is the same as that of the graph line, however, the method is simple and easy to implement, but has the following defects: as shown in fig. 1D, for the situation that the upper edge lines of the graph lines on the left and right sides of the circular virtual frame in fig. 1A are originally on the same horizontal line, after a smaller graph line with the graph dimension accuracy expands upwards, the adjacent graph edges E01 and E02 are not on the same horizontal line, that is, the Y coordinate differs from the graph dimension accuracy, which finally causes the inconsistency between the post-OPC layout and the target dimension, and affects the yield of the product. It will be appreciated that similar problems exist in the vertical direction.
Therefore, it is necessary to provide a method for unifying the sizes of grid graphics, so as to solve the problem in the prior art that the graphics edges are not uniform when the sizes of the grid graphics lines are unified.
It is noted that the information disclosed in this background section is only for enhancement of understanding of the general background of the invention and should not be taken as an acknowledgement or any form of suggestion that this information forms the prior art already known to a person skilled in the art.
Disclosure of Invention
The invention aims to provide a method, a storage medium and computer equipment for unifying grid graphics in size, which are used for solving the problem that the graphics sidelines are inconsistent when the line sizes of the grid graphics are unified in the prior art.
In order to achieve the purpose, the invention is realized by the following technical scheme: a method for unifying the size of grid graphics comprises,
selecting a first target pattern, wherein the first target pattern comprises a plurality of first width pattern lines and a plurality of second width pattern lines, the line width of the first width pattern lines and the line width of the second width pattern lines meet the following relational expression, a = b + G, a is the line width of the first width pattern lines, b is the line width of the second width pattern lines, and G is pattern size precision;
and expanding the line width of at least one second width graph line to the line width of the first width graph line according to the intersection point of the graph lines in the first target graph and the second width graph line.
Optionally, the first width pattern line is perpendicular to the second width pattern line.
Optionally, defining a horizontal direction as a first direction, and defining a direction perpendicular to the first direction as a second direction;
defining the first width graph line parallel to the second direction as a first graph line, and defining the second width graph line parallel to the first direction as a second graph line;
adjusting the line width of the second width pattern line to the line width of the first width pattern line according to the intersection of the pattern lines in the first target pattern and the second width pattern line includes judging whether the second pattern line exists in the first target pattern, if not, the first target pattern is taken as a third target pattern, otherwise, the following steps are performed,
step S1: inputting the first target graph, and extracting the first width graph line and the second width graph line from the first target graph to obtain a first output graph; removing the first output graph from the first target graph to obtain a first intersection point graph;
step S2: extracting the second graph line in the first output graph to obtain a second output graph;
and step S3: merging the first intersection point graph and the second output graph to obtain a third output graph;
and step S4: in the third output graph, according to the connection relation between the second graph line and the first connecting edge, the size precision of the graph size of the upper line and/or the lower line of the second graph line is expanded outwards along the second direction, and a fourth output graph is obtained; the step edge formed by the first intersection point pattern and the second output pattern after being merged and the second pattern line is the first connecting edge;
step S5: combining the first target graph and the fourth output graph to obtain a second target graph;
step S6: judging whether a fifth graph line exists in the second target graph or not, if not, taking the second target graph as a third target graph, and finishing the line width adjustment of the second graph line, wherein the fifth graph line is obtained by the second graph line and the fourth output graph, and the fifth graph line and the first graph line satisfy the following relational expression, c = a + G, a is the line width of the first graph line, and c is the line width of the fifth graph line;
otherwise, extracting all the fifth graphic lines in the second target graph to obtain a fifth output graph, shrinking the graphic dimension precision of the fifth graphic lines downwards and leftwards along the first direction to obtain a sixth output graph, and executing the step S7;
step S7: and removing the fifth output graph in the second target graph, and combining the sixth output graph to obtain a third target graph.
Optionally, the first connecting edge is perpendicular to an upper line of the second graphic line or perpendicular to a lower line of the second graphic line.
Optionally, the length of the first connecting edge is equal to the graphic dimension precision.
Optionally, the step S1 of removing the first output graph from the first target graph to obtain a first intersection point graph includes obtaining the first intersection point graph by performing a logical negation operation on the first output graph.
Optionally, the second width pattern line parallel to the second direction is defined as a third pattern line, and the first width pattern line parallel to the first direction is defined as a fourth pattern line;
adjusting the line width of the second-width pattern line to the line width of the first-width pattern line according to the intersection of the first-width pattern line and the second-width pattern line further comprises judging whether a third pattern line exists in the third target pattern, and if not, taking the third target pattern as a fifth target pattern; otherwise, the following steps are executed,
step S8: extracting the first width graph line and the second width graph line from the third target graph to obtain a seventh output graph; removing the seventh output graph from the third target graph to obtain a second intersection point graph;
extracting the third graph line in the seventh output graph to obtain an eighth output graph;
step S9: merging the second intersection point pattern and the eighth output pattern to obtain a ninth output pattern;
in the ninth output graph, according to the connection relation between the third graph line and the second connection edge, expanding the size precision of the graph size of the left edge line and/or the right edge line of the third graph line along the first direction to obtain a tenth output graph, and combining the third target graph and the tenth output graph to obtain a fourth target graph; the step edge formed by the merged second intersection point pattern and the eighth output pattern line and the third pattern line is the second connecting edge, and the extending direction of the second connecting edge is parallel to the first direction;
step S10: judging whether a sixth graph line exists in the fourth target graph or not, if not, taking the fourth target graph as a fifth target graph, and finishing the line width adjustment of the third graph line, wherein the sixth graph line is obtained by the third graph line and the tenth output graph, the sixth graph line and the first graph line meet the following relational expression, d = a + G, a is the line width of the first graph line, and d is the line width of the sixth graph line;
otherwise, extracting a sixth graphic line in the fourth target graphic to obtain an eleventh output graphic, shrinking the graphic size precision of the sixth graphic line leftwards and downwards along the second direction to obtain a twelfth output graphic, and executing the step S11;
step S11: and removing the eleventh output graph in the fourth target graph, and combining the twelfth output graph to obtain a fifth target graph.
Based on the same inventive concept, the present invention further provides a computer-readable storage medium, on which computer-executable instructions are stored, and when the computer-executable instructions are executed, the steps of the method for uniform size of grid graphics described in any one of the above are implemented.
Based on the same inventive concept, the present invention also provides a computer device, comprising a processor and a storage device, wherein the processor is adapted to implement instructions, and the storage device is adapted to store a plurality of instructions, and the instructions are adapted to load the method for grid graphics uniform size according to any one of the above items by the processor.
Compared with the prior art, the method for unifying the sizes of the grid graphs provided by the invention has the following beneficial effects:
the invention provides a method for unifying the size of grid graphs, aiming at the problem of target size difference existing after the grid shape is reduced, selecting the side line of a graph line needing size adjustment according to the concave-convex shape of a grid cross graph, expanding the graph line side by the size precision of the graph, fully considering the position relation between the graph line needing size adjustment and the adjacent graph line in the same direction, and selecting a proper side line for expanding the graph line needing size adjustment. Therefore, the method for unifying the sizes of the grid graphs provided by the invention can unify the sizes of the grid lines and simultaneously ensure that the sidelines of the graph lines in the grid graphs do not deviate.
Furthermore, the graph line can reach the target size by expanding the size precision of the graph of a single graph side; if two graph edges of the graph line needing to be adjusted in size are expanded, the edge lines of the graph line shrink leftwards and downwards by the size of graph size precision, and therefore the grid-shaped graph size is unified. That is, the side lines of the graph lines are on the same horizontal line along the first direction, and the side lines of the graph lines are on the same vertical line along the second direction. Compared with the mode of unifying the size of the grid graph which expands upwards or downwards on the graph side line in the prior art, the method for unifying the size of the grid graph provided by the invention can obtain the target graph with unified size, the consistency of the graph size of the OPC is better when the OPC is subsequently processed, and the yield of products can be improved, thereby saving the production cost and improving the production efficiency.
Since the computer-readable storage medium and the computer device provided by the present invention belong to the same inventive concept as the method for unifying the sizes of the grid patterns, at least the same beneficial effects are obtained, and for details, the beneficial effects of the method for unifying the sizes of the grid patterns are referred to, and are not described again.
Drawings
FIG. 1A is a schematic diagram of one of the meshes of a target mesh pattern prior to OPC;
FIG. 1B is a schematic diagram of the grid pattern of FIG. 1A after OPC;
FIG. 1C is a flow chart of a prior art method for unifying the sizes of grid graphics;
FIG. 1D is a schematic diagram of the target mesh graph of FIG. 1A obtained by the method of FIG. 1C;
FIG. 2 is a diagram illustrating a first target pattern structure according to an embodiment of the present invention;
FIG. 3 is an enlarged schematic view of one of the grids of FIG. 2 (indicated by the dashed box in FIG. 2);
FIG. 4A is a schematic flow chart of a method according to an embodiment of the present invention;
FIG. 4B is a flowchart illustrating a method for unifying dimensions according to an embodiment of the present invention;
FIG. 5 is a schematic diagram of a first output graph;
FIG. 5A is an enlarged partial schematic view of FIG. 5 at the dashed box;
FIG. 6 is a schematic diagram of a first intersection pattern;
FIG. 7 is a schematic diagram of a second output graph;
FIG. 8 is a schematic diagram of a third output graph;
FIG. 8A is an enlarged partial view of one of the connection relationships between the second graphic lines and the first connecting edges in FIG. 8;
FIG. 8B is a partially enlarged view of another connection relationship between the second graphic line and the first connecting edge of FIG. 8;
FIG. 8C is a partially enlarged view of still another connection relationship between the second graphic line and the first connecting edge of FIG. 8;
FIG. 9 is a schematic diagram of a fourth output graph;
FIG. 9A is a (partial) schematic view of a fourth one of the output patterns of FIG. 9 based on FIG. 8A;
FIG. 9B is a (partial) schematic view of another fourth output pattern obtained based on FIGS. 8B and 8;
FIG. 9C is a (partial) schematic view of another fourth output pattern obtained based on FIGS. 8C and 8;
FIG. 10 is a (partial) schematic view of a second target pattern;
FIG. 11 is a fifth output graph (partial) diagram;
FIG. 12 is a sixth output graph (partial) diagram;
FIG. 13 is a (partial) view of a third target pattern;
FIG. 14 is an enlarged partial view of the circular dashed box of FIG. 13;
fig. 15 is a partially enlarged view of a fifth target pattern.
Detailed Description
To make the objects, advantages and features of the present invention more apparent, a method, a storage medium and a computer apparatus for unifying sizes of mesh patterns according to the present invention are described in detail below with reference to the accompanying drawings. It will be apparent that the methods described herein comprise a series of steps and that the order of such steps presented herein is not necessarily the only order in which such steps may be performed, and that some of the described steps may be omitted and/or some other steps not described herein may be added to the methods. Further, the described embodiments are only some embodiments of the invention, not all embodiments. All other embodiments, which can be obtained by a person skilled in the art without making any creative effort based on the embodiments in the present invention, belong to the protection scope of the present invention.
Referring to fig. 2 to 15, an embodiment of the present invention provides a method for unifying sizes of grid patterns, including, as shown in fig. 4A, first selecting a first target pattern P1 from the grid patterns shown in fig. 2, where the first target pattern P1 includes a plurality of first width pattern lines and second width pattern lines, a line width a of the first width pattern lines and a line width b of the second width pattern lines satisfy the following relation, a = b + G, a is a line width of the first width pattern lines, b is a line width of the second width pattern lines, and G is a pattern size precision; and according to the intersection points of the graph lines in the first target graph and the graph lines with the second width, the line width of at least one graph line with the second width is expanded to the line width of the graph line with the first width. The following description will be given by taking a =130nm, b =129.5nm, g =0.5nm as an example. It is to be understood that the invention is not limited to specific values of a, b and G.
Preferably, in one embodiment, referring to fig. 3, a schematic diagram of a grid enlargement of the first target pattern P1 is shown (hereinafter, a single grid is taken as an example), and the first width pattern line in the first target pattern P1 is perpendicular to the second width pattern line, which is only described in the preferred embodiment and is not a limitation of the present invention.
For convenience of description, a horizontal direction is defined as a first direction, a direction perpendicular to the first direction is defined as a second direction, the first width pattern line parallel to the second direction is defined as a first pattern line, the second width pattern line parallel to the first direction is defined as a second pattern line, the second width pattern line parallel to the second direction is defined as a third pattern line, and the first width pattern line parallel to the first direction is defined as a fourth pattern line. Referring to fig. 3, the first target pattern P1 includes the first pattern line L1, the second pattern line L2, the third pattern line L3, and the fourth pattern line L4 as an example, and it is obvious that the present invention is also applicable to a case where only the second pattern line L2 or the third pattern line L3 is included.
Specifically, referring to fig. 3 to 15, the method for adjusting the line width of the second graphic line L2 to the line width of the first graphic line L1 according to the intersection of the graphic lines in the first target graphic P1 and the second width graphic line L2 includes determining whether the second graphic line L2 exists in the first target graphic P1, and if not, using the first target graphic P1 as a third target graphic P3; otherwise, the following steps are executed, and the detailed flow is shown in fig. 4B.
Step S1: inputting the first target pattern, and extracting the first width pattern line and the second width pattern line from the first target pattern P1 to obtain a first output pattern PL1, see fig. 5 and 5A, where fig. 5A is an enlarged schematic diagram of one of the grids indicated by the dashed boxes in fig. 5. As can be seen from the figure, the first output pattern PL1 includes the first pattern line L1, the second pattern line L2, the third pattern line L3, and the third pattern line L4.
The first output pattern PL1 is removed from the first target pattern P1 to obtain a first cross-point pattern PC1, as shown in fig. 6. Preferably, in one embodiment, the first intersection point pattern PC1 can be obtained by performing a logical negation operation on the first output pattern PL1 based on the first target pattern P1.
Step S2: extracting the second graphics line L2 in the first output graphics PL1 to obtain a second output graphics PH11, referring to fig. 7, it can be seen that the second output graphics PH11 only includes the second graphics line L2, and the line width of the second graphics line L2 is b, that is: the second output pattern PH11 includes only a pattern line having a smaller line width in the first direction by one pattern dimension precision.
And step S3: the first intersection point pattern PC1 and the second output pattern PH11 are merged to obtain a third output pattern PH12, see fig. 8, and it can be seen that the pattern lines in the third output pattern PH12 are merged by the second pattern lines L2 and the first intersection point pattern PC1. The step edge formed by the merged first intersection point pattern PC1 and the second output pattern PH11 and the second pattern line L2 is the first connecting edge jg, the length of the first connecting edge is equal to the pattern dimension accuracy size G, and in this embodiment, jg =0.5nm. Refer to fig. 8A, 8B and 8C for enlarged partial views of various connection (position) relationships between the second graphic lines and the first connecting edges, respectively.
And step S4: in the third output pattern PH12, according to the connection relationship between the second pattern line L2 and the first connection edge jg, the pattern size accuracy G of the upper edge line and/or the lower edge line of the second pattern line L2 is expanded outward along the second direction, so as to obtain a fourth output pattern, which is shown in fig. 9. Specifically, in one embodiment, referring to fig. 9A, fig. 9A corresponds to fig. 8A, an included angle of 90 ° is formed between the first connecting edge jg and an expanded upper edge line (not labeled in the figure) of the second pattern line L2, and the pattern dimension accuracy G is expanded upward along the upper edge line of the second pattern line L2, so as to obtain a first expanded pattern EXP1. Similarly, in another embodiment, referring to fig. 9B, fig. 9B corresponds to fig. 8B, and if the first connecting side jg has an angle of 270 ° with the expanded lower line EH1 of the second graphic line L2, the graphic dimension accuracy G of the lower line of the second graphic line L2 is expanded downward, so as to obtain a second expanded graphic EXP2. Further, in another embodiment, referring to fig. 9C, corresponding to fig. 8C, if both the upper edge line (not labeled in the figure) and the lower edge line of the second graph line L2 have the first connecting edge jg connected thereto, both the upper edge line and the lower edge line EH1 of the second graph line L2 are expanded outward to obtain a third expanded graph EXP3, and the third expanded graph EXP3 includes two portions, namely, the graph line expanded upward from the upper edge line of the second graph line L2 and the graph line expanded downward from the lower edge line EH 1.
Step S5: and combining the first target graph P1 and the fourth output graph to obtain a second target graph P2. Referring to fig. 10, fig. 10 is an enlarged schematic diagram of one of the grids of the second target pattern P2 (corresponding to fig. 5A), and it can be seen from the diagram that the first extended pattern EXP1 and/or the second extended pattern EXP2 and the second pattern line L2 are merged into a fourth pattern line L4, and the third extended pattern EXP3 and the second pattern line L2 are merged into a fifth pattern line L5. The second target pattern P2 includes the first pattern line L1, the third pattern line L3, the fourth pattern line L4, and the fifth pattern line L5. As can be seen, the line width of the fifth graphics line L5 is a + G.
Step S6: judging whether the fifth graphic line L5 exists in the second target graphic P2, if not, taking the second target graphic P2 as a third target graphic P3, and finishing the line width adjustment of the second graphic line L2; otherwise, all fifth graph lines L5 in the second target graph P2 are extracted to obtain a fifth output graph P21, as shown in fig. 11, where the fifth graph line L5 is obtained from the second graph line L2 and the fourth output graph, and the fifth graph line L5 and the first graph line L1 satisfy the following relational expression, c = a + G, a is the line width of the first graph line L1, c is the line width of the fifth graph line L5, and G is the graph dimension precision. Shrinking the pattern dimension accuracy size G down and left along the first direction by the upper line of the fifth pattern line L5 results in a sixth output pattern P22, as shown in fig. 12. In particular, the fifth output pattern P21 in fig. 11 comprises only a number of the fifth pattern lines L5, and the sixth output pattern P22 in fig. 12 comprises only the fourth pattern lines L4 resulting from the fifth pattern lines L5.
Step S7: removing the fifth output pattern P21 from the second target pattern P2, and combining the sixth output pattern P22 to obtain a third target pattern P3, see fig. 13.
After the above steps, along the first direction, all the second graphic lines L2 in the third target graphic P3 are extended to be the fourth graphic lines L4 only, and the third target graphic P3 includes the first graphic lines L1, the third graphic lines L3 and the fourth graphic lines L4. Referring to fig. 14, by extending the second graph line L2, the method for providing uniform size of grid graph according to the present invention can ensure that the edges of the grid graph lines are not shifted, i.e. on the same horizontal line, while the size of the grid lines is uniform.
Next, a specific process of how to expand the third graphics line L3 to the first graphics line L1 is described.
Based on the same principle, the second width graphic lines in the second direction of the grid-shaped graphic structure are processed in a unified size. Specifically, the adjusting the line width of the second-width pattern line to the line width of the first-width pattern line according to the intersection of the first-width pattern line and the second-width pattern line includes determining whether the third pattern line exists in the third target pattern, if not, taking the third target pattern as a fifth target pattern, otherwise, executing the following steps.
Step S8: extracting the first width graph line and the second width graph line from the third target graph to obtain a seventh output graph; removing the seventh output graph from the third target graph to obtain a second intersection point graph; and extracting the third graph line in the seventh output graph to obtain an eighth output graph.
Step S9: and combining the second intersection point pattern and the eighth output pattern to obtain a ninth output pattern. In the ninth output graph, according to the connection relation between the third graph line and the second connection edge, along the first direction, expanding the graph size precision of the left edge line and/or the right edge line of the third graph line to obtain a tenth output graph, and combining the third target graph and the tenth output graph to obtain a fourth target graph; wherein, the step edge formed by the merged second intersection point pattern and the eighth output pattern line and the third pattern line is the second connecting edge, and the extending direction of the second connecting edge is parallel to the first direction.
Step S10: and judging whether the sixth graphic line exists in the fourth target graphic, if not, taking the fourth target graphic as a fifth target graphic, and finishing the line width adjustment of the third graphic line. The sixth graphic line is obtained from the third graphic line and the tenth output graphic, and the sixth graphic line and the first graphic line satisfy the following relational expression, d = a + G, a is the line width of the first graphic line, and d is the line width of the sixth graphic line.
Otherwise, extracting a sixth graphic line in the fourth target graphic to obtain an eleventh output graphic, shrinking the graphic dimension accuracy G of the right edge line of the sixth graphic line leftwards and downwards along the second direction to obtain a twelfth output graphic, and executing the step S11.
Step S11: and removing the eleventh output graph in the fourth target graph, and combining the twelfth output graph to obtain a fifth target graph.
The grid pattern with unified size after the method for providing unified size of grid pattern of the present invention is disclosed, referring to fig. 15, wherein fig. 15 is an enlarged schematic view of one of the grids.
As can be seen from fig. 15, with the method for unifying the sizes of the grid patterns provided by the present invention, the unified target pattern has only the first pattern line L1 and the fourth pattern line L4. By using the method for unifying the grid patterns provided by the invention, the third pattern line L3 is expanded, so that the edges of the grid pattern lines can be ensured not to generate offset, namely, on the same vertical line while the size of the grid lines is unified.
It should be understood that the above-mentioned order of unifying the second graphic line size first and then unifying the third graphic line size is not a limitation of the present invention, and in other embodiments, the order of unifying the third graphic line size first and then unifying the second graphic line size may be also used, but all of them are within the protection scope of the present invention.
In one embodiment, the method for unifying the sizes of the grid graphs provided by the invention can be implemented by an SVRF tool of a verification tool calibre, and the local target size adjustment is carried out on the grid graphs, so that the sizes of the grid graphs are unified; obviously, this is not a limitation of the present invention, and in other embodiments, the present invention may also be implemented by combining software and hardware, and the present invention is not limited in any way.
In summary, the method for unifying the sizes of the grid graphs provided by the invention is used for solving the problem of target size difference existing after a grid shape is reduced, selecting a side line of a graph line needing size adjustment according to the concave-convex shape of a grid cross graph, expanding the graph line side by one graph size precision size, fully considering the position relation between the graph line needing size adjustment and an adjacent graph line in the same direction, selecting a proper side line for expanding the graph line needing size adjustment, and expanding the graph size precision size by expanding a single graph to reach the target size; and if the two graph edges of the graph line needing to be adjusted in size are expanded, the size precision of the graph is shrunk in a single direction, and therefore the size of the latticed graph is unified. The method for unifying the sizes of the grid graphs provided by the invention can unify the sizes of the grid lines and simultaneously ensure that the sidelines of the graph lines in the grid graphs do not deviate, namely, the sidelines of the graph lines are on the same horizontal line along the first direction and the sidelines of the graph lines are on the same vertical line along the second direction. Compared with the mode of unifying the size of the grid graph which expands upwards or downwards on the graph side line in the prior art, the method for unifying the size of the grid graph provided by the invention can obtain the target graph with unified size, the consistency of the graph size of the OPC is better when the OPC is subsequently processed, and the yield of products can be improved, thereby saving the production cost and improving the production efficiency.
Other embodiments of the present invention further provide a computer-readable storage medium, where computer-executable instructions are stored on the computer-readable storage medium, and when the computer-executable instructions are executed, the steps of the method for grid graphics uniform size are implemented as described above, and specific steps are described in detail above, which are not described herein again.
Yet another embodiment of the present invention further provides a computer device, where the computer device includes a processor and a storage device, the processor is adapted to implement each instruction, the storage device is adapted to store a plurality of instructions, and the instructions are adapted to be loaded by the processor and to query the steps of the method for grid graphics uniform size according to any embodiment, where the specific steps are described above in detail and are not described herein again.
From the above description of embodiments, it should be apparent to those skilled in the art that embodiments of the present invention may be provided as a method, system, or computer program product. Accordingly, the present invention may take the form of an entirely hardware embodiment, an entirely software embodiment or an embodiment combining software and hardware aspects that is presently preferred. With this understanding in mind, portions of the present invention that contribute to the prior art can be embodied in the form of a computer software product that is stored on a computer readable storage medium, including but not limited to disk storage, CD-ROMs, optical storage, and the like.
The present invention is described with reference to flowchart illustrations and/or block diagrams of methods and computer program products according to embodiments of the invention. It will be understood that each flow and/or block of the flow diagrams and/or block diagrams, and combinations of flows and/or blocks in the flow diagrams and/or block diagrams, can be implemented by computer program instructions. These computer program instructions may be provided to a processor of a general purpose computer, special purpose computer, embedded processor, or other programmable data processing apparatus to produce a machine, such that the instructions, which execute via the processor of the computer or other programmable data processing apparatus, create means for implementing the functions specified in the flowchart flow or flows and/or block diagram block or blocks.
These computer program instructions may also be stored in a computer-readable memory that can direct a computer or other programmable data processing apparatus to function in a particular manner, such that the instructions stored in the computer-readable memory produce an article of manufacture including instruction means which implement the function specified in the flowchart flow or flows and/or block diagram block or blocks.
These computer program instructions may also be loaded onto a computer or other programmable data processing apparatus to cause a series of operational steps to be performed on the computer or other programmable apparatus to produce a computer implemented process such that the instructions which execute on the computer or other programmable apparatus provide steps for implementing the functions specified in the flowchart flow or flows and/or block diagram block or blocks.
The above description is only a preferred embodiment of the present invention, and is not intended to limit the scope of the present invention in any way, and the present invention includes, but is not limited to, the configurations listed in the above embodiments. Various modifications and variations of the embodiments of the present invention will be apparent to those skilled in the art in light of the above teachings. Any modification, equivalent replacement, or improvement made within the spirit and principle of the present invention should be included in the protection scope of the present invention.
Claims (7)
1. A method for unifying the size of grid patterns is characterized by comprising the following steps,
selecting a first target graph, wherein the first target graph comprises a plurality of first width graph lines and a plurality of second width graph lines, and the line width of the first width graph lines and the line width of the second width graph lines meet the following first relational expression:
a＝b+G，
in the first relational expression, a is the line width of the first width pattern line, b is the line width of the second width pattern line, and G is the pattern size precision;
the first width pattern line is perpendicular to the second width pattern line; defining a horizontal direction as a first direction, and defining a direction perpendicular to the first direction as a second direction; defining the first width graph line parallel to the second direction as a first graph line, and defining the second width graph line parallel to the first direction as a second graph line;
according to the intersection point of the graph lines in the first target graph and the graph lines with the second width, the line width of at least one graph line with the second width is expanded to the line width of the graph line with the first width through the following steps:
judging whether the second graph line exists in the first target graph or not, if not, taking the first target graph as a third target graph, otherwise, executing the following steps,
step S1: inputting the first target graph, and extracting the first width graph line and the second width graph line from the first target graph to obtain a first output graph; removing the first output graph from the first target graph to obtain a first intersection point graph;
step S2: extracting the second graph line in the first output graph to obtain a second output graph;
and step S3: merging the first intersection point graph and the second output graph to obtain a third output graph;
and step S4: in the third output graph, according to the connection relation between the second graph line and the first connecting edge, the size precision of the graph size of the upper line and/or the lower line of the second graph line is expanded outwards along the second direction, and a fourth output graph is obtained; the step edge formed by the first intersection point pattern and the second output pattern after being merged and the second pattern line is the first connecting edge;
step S5: merging the first target graph and the fourth output graph to obtain a second target graph;
step S6: judging whether a fifth graph line exists in the second target graph, if not, taking the second target graph as a third target graph, and finishing the line width adjustment of the second graph line, wherein the fifth graph line is obtained by the second graph line and the fourth output graph, and the fifth graph line and the first graph line meet the following second relational expression:
c＝a+G，
in the second relational expression, a is the line width of the first pattern line, c is the line width of the fifth pattern line, and G is the pattern dimension accuracy;
otherwise, extracting all the fifth graphic lines in the second target graph to obtain a fifth output graph, shrinking the graphic dimension precision of the fifth graphic lines downwards and leftwards along the first direction to obtain a sixth output graph, and executing the step S7;
step S7: and removing the fifth output graph in the second target graph, and combining the sixth output graph to obtain a third target graph.
2. A method of grid pattern uniform size as recited in claim 1, wherein said first connecting edge is perpendicular to an upper line of said second pattern line or perpendicular to a lower line of said second pattern line.
3. A method for unifying the size of grid graphics as claimed in claim 2, wherein the length of said first connecting edge is equal to said graphic size precision.
4. The method for unifying sizes of mesh graphics according to claim 1, wherein the step S1 of removing the first output graphic from the first target graphic to obtain a first intersection graphic comprises performing a logical not operation on the first output graphic to obtain the first intersection graphic.
5. A method for unifying the size of grid graphics according to claim 1, wherein the second width graphics line parallel to the second direction is defined as a third graphics line, and the first width graphics line parallel to the first direction is defined as a fourth graphics line;
adjusting the line width of the second-width pattern line to the line width of the first-width pattern line according to the intersection of the first-width pattern line and the second-width pattern line, and judging whether a third pattern line exists in the third target pattern, if not, taking the third target pattern as a fifth target pattern; otherwise, the following steps are executed,
step S8: extracting the first width graph line and the second width graph line from the third target graph to obtain a seventh output graph; removing the seventh output graph from the third target graph to obtain a second intersection point graph;
extracting the third graph line in the seventh output graph to obtain an eighth output graph;
step S9: merging the second intersection point pattern and the eighth output pattern to obtain a ninth output pattern;
in the ninth output graph, according to the connection relation between the third graph line and the second connection edge, expanding the size precision of the graph size of the left edge line and/or the right edge line of the third graph line along the first direction to obtain a tenth output graph, and combining the third target graph and the tenth output graph to obtain a fourth target graph; the second intersection point pattern and the eighth output pattern line are merged and then form a step edge with the third pattern line, wherein the step edge is the second connecting edge, and the extending direction of the second connecting edge is parallel to the first direction;
step S10: judging whether a sixth graph line exists in the fourth target graph, if not, taking the fourth target graph as a fifth target graph, and finishing the line width adjustment of the third graph line, wherein the sixth graph line is obtained from the third graph line and the tenth output graph, and the sixth graph line and the first graph line satisfy the following third relation:
d＝a+G，
in the third relation, a is the line width of the first pattern line, d is the line width of the sixth pattern line, and G is the pattern dimension accuracy;
otherwise, extracting a sixth graphic line in the fourth target graphic to obtain an eleventh output graphic, shrinking the graphic size precision of the sixth graphic line leftwards and downwards along the second direction to obtain a twelfth output graphic, and executing the step S11;
step S11: and removing the eleventh output graph in the fourth target graph, and combining the twelfth output graph to obtain a fifth target graph.
6. A computer-readable storage medium having computer-executable instructions stored thereon, wherein the computer-executable instructions, when executed, implement the method for uniform size of mesh graphics of any one of claims 1 to 5.
7. A computer device comprising a processor adapted to implement instructions and a storage device adapted to store instructions adapted to be loaded by the processor and to perform the method of uniform size of mesh graphics of any of claims 1 to 5.
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