CN111747658A - Colorful color-changing coated glass and preparation method thereof - Google Patents

Colorful color-changing coated glass and preparation method thereof Download PDF

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Publication number
CN111747658A
CN111747658A CN202010620809.XA CN202010620809A CN111747658A CN 111747658 A CN111747658 A CN 111747658A CN 202010620809 A CN202010620809 A CN 202010620809A CN 111747658 A CN111747658 A CN 111747658A
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film layer
layer
refractive index
thickness
inner layer
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赵永进
付亚东
马轶先
邵长旭
郭伟
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Tianjin Syp Engineering Glass Group Co ltd
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Tianjin Syp Engineering Glass Group Co ltd
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    • CCHEMISTRY; METALLURGY
    • C03GLASS; MINERAL OR SLAG WOOL
    • C03CCHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
    • C03C17/00Surface treatment of glass, not in the form of fibres or filaments, by coating
    • C03C17/34Surface treatment of glass, not in the form of fibres or filaments, by coating with at least two coatings having different compositions
    • C03C17/3411Surface treatment of glass, not in the form of fibres or filaments, by coating with at least two coatings having different compositions with at least two coatings of inorganic materials
    • C03C17/3417Surface treatment of glass, not in the form of fibres or filaments, by coating with at least two coatings having different compositions with at least two coatings of inorganic materials all coatings being oxide coatings
    • CCHEMISTRY; METALLURGY
    • C03GLASS; MINERAL OR SLAG WOOL
    • C03CCHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
    • C03C2217/00Coatings on glass
    • C03C2217/20Materials for coating a single layer on glass
    • C03C2217/21Oxides
    • C03C2217/213SiO2
    • CCHEMISTRY; METALLURGY
    • C03GLASS; MINERAL OR SLAG WOOL
    • C03CCHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
    • C03C2217/00Coatings on glass
    • C03C2217/20Materials for coating a single layer on glass
    • C03C2217/21Oxides
    • C03C2217/218V2O5, Nb2O5, Ta2O5
    • CCHEMISTRY; METALLURGY
    • C03GLASS; MINERAL OR SLAG WOOL
    • C03CCHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
    • C03C2217/00Coatings on glass
    • C03C2217/70Properties of coatings
    • C03C2217/73Anti-reflective coatings with specific characteristics
    • C03C2217/734Anti-reflective coatings with specific characteristics comprising an alternation of high and low refractive indexes
    • CCHEMISTRY; METALLURGY
    • C03GLASS; MINERAL OR SLAG WOOL
    • C03CCHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
    • C03C2218/00Methods for coating glass
    • C03C2218/10Deposition methods
    • C03C2218/15Deposition methods from the vapour phase
    • C03C2218/154Deposition methods from the vapour phase by sputtering
    • C03C2218/156Deposition methods from the vapour phase by sputtering by magnetron sputtering

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  • Chemical & Material Sciences (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • General Chemical & Material Sciences (AREA)
  • Geochemistry & Mineralogy (AREA)
  • Materials Engineering (AREA)
  • Organic Chemistry (AREA)
  • Surface Treatment Of Glass (AREA)

Abstract

The invention provides colorful color-changing coated glass, which comprises a glass substrate and an outer layer Nb with high refractive index2O5Film layer of high refractive index Nb from glass substrate to outer layer2O5A plurality of inner layers of high-refractive-index Nb are sequentially and alternately arranged in the direction of the film layer2O5Film layer, inner layer low refractive index SiO2And (5) film layer. Also provides a preparation method of the colorful color-changing coated glass. The colorful color-changing coated glass provided by the invention can be used for alternately forming a coated film layer structure by selecting film layers with different materials and different thicknesses, so that reflected light rays are subjected to constructive interference and form different interference wave bands along with the change of angles within a visible light range, the reflection bandwidth is reduced, and the colorful color-changing effect is further realized.

Description

Colorful color-changing coated glass and preparation method thereof
Technical Field
The invention belongs to the technical field of vacuum coating, and particularly relates to colorful color-changing coated glass and a preparation method thereof.
Background
The coated glass is formed by adopting a vacuum magnetron sputtering technology, a plurality of layers of metal or compound films with certain nanometer thickness are formed by accumulation and crystallization on the surface of the glass, and different interference effects are carried out on light rays, so that different colors and different photo-thermal properties are formed. At present, in the field of traditional architectural glass, the common color of the glass is single color such as blue, gray, brown, golden and the like, or fixed patterns and colors are formed by adopting digital printing or a coloring PVB film. In recent years, along with the gradual diversification of the color requirements of glass in the market, even the color-changing effect of dazzling is required to meet the actual application requirements and the aesthetic effect, the existing single-color glass cannot meet the increasing requirements of the market on the color-changing glass, and therefore the application range of the glass is limited.
Disclosure of Invention
In view of the above, the invention aims to provide a colorful color-changing coated glass and a preparation method thereof, wherein coating film layer structures are formed by selecting film layers of different materials and different thicknesses alternately, so that reflected light rays are subjected to constructive interference and different interference wave bands are formed along with the change of angles in a visible light range, the reflection bandwidth is reduced, and the colorful color-changing effect is realized.
In order to achieve the purpose, the technical scheme of the invention is realized as follows:
the colorful color-changing coated glass comprises a glass substrate and an outer layer of Nb with high refractive index2O5Film layer of high refractive index Nb from glass substrate to outer layer2O5A plurality of inner layers of high-refractive-index Nb are sequentially and alternately arranged in the direction of the film layer2O5Film layer, inner layer low refractive index SiO2And (5) film layer.
The coating film layer structure is formed by selecting different materials and films with different thicknesses alternately, so that reflected light rays are subjected to constructive interference and form different interference wave bands along with the change of angles in a visible light range, the reflection bandwidth is reduced, and the effect of dazzle color change is realized.
The outer layer of the film layer structure is made of a material with a high refractive index, so that the loss of light energy can be reduced, and a plurality of groups of films with low refractive indexes and high refractive indexes are sequentially matched with each other from the material with the high refractive index of the outer layer to the glass substrate, so that the coated glass with high color brightness is obtained.
Further, the outer layer has a high refractive index Nb2O5Film layer, multiple inner layers and high refractive index Nb2O5Film layer, multiple inner layers and low refractive index SiO2The total thickness of the film layer is 400-760 nm.
The total thickness of the multiple film layers enables the central wavelength of the reflection spectrum to move in the visible light range, and finally the colorful and color-changing effect can be obtained.
Further, high refractive index Nb is provided from the glass substrate to the outer layer2O5The film layer direction is sequentially provided with a first inner layer high-refractive index Nb2O5Film layer, first inner layer low refractive index SiO2Film layer and second inner layer high-refractive-index Nb2O5Film layer, second inner layer low refractive index SiO2Film layer and third inner layer high-refractive-index Nb2O5Film layer, third inner layer low refractive index SiO2And (5) film layer.
Further, the second inner layer has a high refractive index Nb2O5Thickness of film layer, third inner layer high refractive index Nb2O5The thickness of the film layer is smaller than that of the first inner layer high-refractive-index Nb2O5The thickness of the film layer.
Further, the first inner layer has a high refractive index Nb2O5The thickness of the film layer is 30nm-60nm, and the first inner layer is SiO with low refractive index2The thickness of the film layer is 20nm-35 nm.
Further, the second inner layer has a high refractive index Nb2O5The thickness of the film layer is 10nm-20nm, and the second inner layer is SiO with low refractive index2The thickness of the film layer is 20nm-50 nm.
Further, the third inner layer has a high refractive index Nb2O5The thickness of the film layer is 15nm-25nm, and the third inner layer is SiO with low refractive index2The thickness of the film layer is 15nm-35nm, and the outer layer has high refractive index Nb2O5The thickness of the film layer is 20nm-70 nm.
Further, the outer layer has a high refractive index Nb2O5Film layer and inner layer high refractive index Nb2O5The refractive index of the film layer is 1.8-3.0.
Further, the inner layer is made of SiO with low refractive index2The refractive index of the film layer is 1.4-1.8.
A method for preparing colorful color-changing coated glass comprises the steps of carrying out medium-frequency magnetron sputtering on a glass substrate in a vacuum environment, and sequentially and alternately depositing a plurality of inner-layer high-refractive-index Nb films on the outer wall of the glass substrate2O5Film layer, inner layer low refractive index SiO2A film layer, and finally forming an outer layer of high-refractive-index Nb2O5And (5) film layer.
Further, said Nb2O5The film layer is formed by sputtering a niobium oxide target material, the purity of the niobium oxide target material is 3N9, the sputtering power of the niobium oxide target material is 20-60kw, the sputtering pressure is (2-3) × 10-3mbar, the sputtering atmosphere is argon and oxygen, and the volume ratio of the argon to the oxygen is 80: 4.
The volume ratio of argon to oxygen is 80:4, which can not only completely oxidize the sputtering material, but also meet the highest sputtering efficiency.
Further, the SiO2The film layer is formed by sputtering a silicon-aluminum target, the sputtering power of the silicon-aluminum target is 40-100kw, the sputtering pressure is (2-3) × 10-3mbar, the sputtering atmosphere is argon and oxygen, and the volume ratio of the argon to the oxygen is 8: 5.
The volume ratio of argon to oxygen is 8:5, which not only can completely oxidize the sputtering material, but also can meet the highest sputtering efficiency.
Further, the weight ratio of silicon to aluminum in the silicon-aluminum target material is 9:1, the silicon-aluminum target material is a rotating target, and the sputtering frequency of a target material power supply is an intermediate frequency.
Compared with the prior art, the colorful color-changing coated glass and the preparation method thereof have the following advantages:
(1) according to the colorful color-changing coated glass, the coating film layer structures are formed by selecting film layers of different materials and different thicknesses alternately, so that reflected light rays are subjected to constructive interference and different interference wave bands are formed along with the change of angles in a visible light range, the reflection bandwidth is reduced, and the colorful color-changing effect is realized.
(2) According to the colorful color-changing coated glass, the outer layer of the film layer structure is made of the material with the high refractive index, so that the light energy loss can be reduced, and a plurality of groups of structures with the low refractive index and the high refractive index which are alternately matched are sequentially arranged between the material with the high refractive index of the outer layer and the glass substrate, so that the coated glass with high color brightness is obtained.
(3) The colorful color-changing coated glass disclosed by the invention realizes rich color change along with the change of light and angles, so that bright, saturated and color-changeable colors have different effects on buildings.
Drawings
The accompanying drawings, which are incorporated in and constitute a part of this specification, illustrate embodiments of the invention and, together with the description, serve to explain the invention without limitation. In the drawings:
fig. 1 is a schematic structural view of a coated glass with color change in an embodiment of the present invention.
Description of reference numerals:
1-a glass substrate; 2-first inner layer high refractive index Nb2O5A film layer; 3-first inner layer low refractive index SiO2A film layer; 4-second inner layer high refractive index Nb2O5A film layer; 5-second inner layer low refractive index SiO2A film layer; 6-third inner layer high refractive index Nb2O5A film layer; 7-third inner layer Low refractive index SiO2A film layer; 8-outer layer high refractive index Nb2O5And (5) film layer.
Detailed Description
It should be noted that the embodiments and features of the embodiments of the present invention may be combined with each other without conflict.
In the description of the present invention, it is to be understood that the terms "central," "longitudinal," "lateral," "upper," "lower," "front," "rear," "left," "right," "vertical," "horizontal," "top," "bottom," "inner," "outer," and the like are used in the orientation or positional relationship indicated in the drawings, which are merely for convenience in describing the invention and to simplify the description, and are not intended to indicate or imply that the referenced device or element must have a particular orientation, be constructed and operated in a particular orientation, and are therefore not to be construed as limiting the invention. Furthermore, the terms "first", "second", etc. are used for descriptive purposes only and are not to be construed as indicating or implying relative importance or implicitly indicating the number of technical features indicated. Thus, a feature defined as "first," "second," etc. may explicitly or implicitly include one or more of that feature. In the description of the invention, the meaning of "a plurality" is two or more unless otherwise specified.
In the description of the invention, it is to be noted that, unless otherwise explicitly specified or limited, the terms "mounted", "connected" and "connected" are to be construed broadly, e.g. as being fixed or detachable or integrally connected; can be mechanically or electrically connected; they may be connected directly or indirectly through intervening media, or they may be interconnected between two elements. Unless otherwise specifically stated or limited, the term "fixedly connected" may be a commonly used fixedly connected manner such as a plug, a weld, a threaded connection, a bolt connection, etc. The specific meaning of the above terms in the creation of the present invention can be understood by those of ordinary skill in the art through specific situations.
The invention will be described in detail with reference to the following embodiments with reference to the attached drawings.
The optical data in the technical scheme of the invention adopts CIE L a b color model (a uniform color space revised by the International Commission on illumination in 1976, wherein L represents lightness of color, a positive value represents red, a negative value represents green, b positive value represents yellow, and a negative value represents blue) to measure data.
Example 1:
dazzle various coated glass that discolours, including glass substrate 1, glass substrate 1 outwards is equipped with first inlayer high refractive index Nb in proper order2O5Film layer 2, first inner layer low refractive index SiO2 Film layer 3 and second inner layer high-refractive-index Nb2O5Film layer 4, second inner layer low refractive index SiO2 Film 5, third inner layer high refractive index Nb2O5Film layer 6 and third inner layer low-refractive-index SiO2 Film 7, outer high refractive index Nb2O5 A membrane layer 8.
The first inner layer has a high refractive index Nb2O5The thickness of the film layer 2 is 45nm, and the first inner layer is SiO with low refractive index2The thickness of the film layer 3 is 28nm, and the second inner layer is Nb with high refractive index2O5The thickness of the film layer 4 is 13nm, and the second inner layer is SiO with low refractive index2The thickness of the film layer 5 is 30nm, and the third inner layer is Nb with high refractive index2O5The thickness of the film layer 6 is 18nm, and the third inner layer is SiO with low refractive index2The thickness of the film layer 7 is 35nm, and the outer layer is Nb with high refractive index2O5The thickness of the membrane layer 8 is 25 nm.
The glass substrate 1 of the colorful and color-changing coated glass is 5mm of ultra-white glass.
Example 2:
dazzle various coated glass that discolours, including glass substrate 1, glass substrate 1 outwards is equipped with first inlayer high refractive index Nb in proper order2O5Film layer 2, first inner layer low refractive index SiO2 Film layer 3 and second inner layer high-refractive-index Nb2O5Film layer 4, second inner layer low refractive index SiO2 Film 5, third inner layer high refractive index Nb2O5Film layer 6 and third inner layer low-refractive-index SiO2 Film 7, outer high refractive index Nb2O5 A membrane layer 8.
The first inner layer has a high refractive index Nb2O5The thickness of the film layer 2 is 60nm, and the first inner layer is SiO with low refractive index2The thickness of the film layer 3 is 20nm, and the second inner layer is Nb with high refractive index2O5The thickness of the film layer 4 is 13nm, and the second inner layer is SiO with low refractive index2The thickness of the film layer 5 is 46nm, and the third inner layer is high-refractive-index Nb2O5The thickness of the film layer 6 is 25nm, and the third inner layer is SiO with low refractive index2The thickness of the film layer 7 is 25nm, and the outer layer has high refractive index Nb2O5The thickness of the membrane layer 8 is 70 nm.
The glass substrate 1 of the colorful and color-changing coated glass is 5mm of ultra-white glass.
Example 3:
dazzle various coated glass that discolours, including glass substrate 1, glass substrate 1 outwards is equipped with first inlayer high refractive index Nb in proper order2O5Film layer 2, first inner layer low refractive index SiO2 Film layer 3 and second inner layer high-refractive-index Nb2O5Film layer 4, second inner layer low refractive index SiO2 Film 5, third inner layer high refractive index Nb2O5Film layer 6 and third inner layer low-refractive-index SiO2 Film 7, outer high refractive index Nb2O5 A membrane layer 8.
The first inner layer has a high refractive index Nb2O5The thickness of the film layer 2 is 35nm, and the first inner layer is SiO with low refractive index2The thickness of the film layer 3 is 31nm, and the second inner layer is Nb with high refractive index2O5The thickness of the film layer 4 is 13nm, and the second inner layer is SiO with low refractive index2The thickness of the film layer 5 is 20nm, and the third inner layer is Nb with high refractive index2O5The thickness of the film layer 6 is 18nm, and the third inner layer is SiO with low refractive index2The thickness of the film layer 7 is 18nm, and the outer layer is Nb with high refractive index2O5The thickness of the membrane layer 8 was 37 nm.
The glass substrate 1 of the colorful and color-changing coated glass is 5mm of ultra-white glass.
Comparative example 1:
the coated glass comprises a glass substrate 1, wherein the glass substrate 1 is sequentially provided with a first inner layer of high-refractive-index Nb outwards2O5Film layer 2, first inner layer low refractive index SiO2 Film layer 3 and outer layer of high refractive index Nb2O5 A membrane layer 8.
The first inner layer has a high refractive index Nb2O5The thickness of the film layer 2 is 50nm, and the first inner layer is SiO with low refractive index2The thickness of the film layer 3 is 23nm, and the outer layer is Nb with high refractive index2O5The thickness of the membrane layer 8 is 18 nm.
The glass substrate 1 is 5mm of ultra-white glass.
Comparative example 2:
a coated glass comprises a glass substrate 1, wherein the glass substrate 1 is sequentially provided with a first inner layer outwardsHigh refractive index Nb2O5Film layer 2, first inner layer low refractive index SiO2Film layer 3 and second inner layer high-refractive-index Nb2O5Film layer 4, second inner layer low refractive index SiO2Film layer 5 and third inner layer high-refractive-index Nb2O5Film layer 6 and third inner layer low-refractive-index SiO2Film 7, outer high refractive index Nb2O5 A membrane layer 8.
The first inner layer has a high refractive index Nb2O5The thickness of the film layer 2 is 45nm, and the first inner layer is SiO with low refractive index2The thickness of the film layer 3 is 46nm, and the second inner layer is Nb with high refractive index2O5The thickness of the film layer 4 is 36nm, and the second inner layer is SiO with low refractive index2The thickness of the film layer 5 is 38nm, and the third inner layer is high-refractive-index Nb2O5The thickness of the film layer 6 is 18nm, and the third inner layer is SiO with low refractive index2The thickness of the film layer 7 is 28nm, and the outer layer is Nb with high refractive index2O5The thickness of the membrane layer 8 is 18 nm.
The glass substrate 1 is 5mm of ultra-white glass.
In order to study the performance of the colored coated glass of the present invention, the coated glass of the examples and comparative examples was tested, and the test results are shown in tables 1 and 2.
TABLE 1 film layer structure and thickness of each example and comparative example
Figure BDA0002565092780000061
TABLE 2 color data as a function of angle for coated glasses of each example and comparative example
Figure BDA0002565092780000071
Figure BDA0002565092780000081
As can be seen from tables 1 and 2, the glare coated glass of examples 1 to 3 of the present invention has high reflectivity and variable color with the change of angle. And a variety of different color changes may occur as the thickness of the various film layers change.
As can be seen from comparative example 1, when the number of the film layers of the coated glass is small, the coated glass has low reflectivity and cannot meet the requirement of multi-color discoloration, and with the change of angles, only three colors of purplish red, dark gray and blue-green can appear, and the discoloration range is small.
It can be seen from comparative example 2 that, although the film structure of comparative example 2 is the same as that of the example, when the thickness of the first inner low refractive index SiO2 film layer and the thickness of the second inner high refractive index Nb2O5 film layer in comparative example 2 are greater than the corresponding film thicknesses in the example, the coated glass can achieve the effect of color change, but the color change range is narrow, and the change of multiple colors cannot occur.
The above description is only for the purpose of illustrating the preferred embodiments of the present invention and should not be taken as limiting the invention, so that any modifications, equivalents, improvements and the like, which are within the spirit and principle of the present invention, should be included in the scope of the present invention.

Claims (10)

1. The utility model provides a dazzle various coated glass that discolours which characterized in that: comprises a glass substrate (1) and an outer layer of high-refractive-index Nb2O5A film layer (8) of high refractive index Nb extending from the glass substrate (1) to the outer layer2O5A plurality of inner layers of high refractive index Nb are sequentially and alternately arranged in the direction of the film layer (8)2O5Film layer, inner layer low refractive index SiO2And (5) film layer.
2. The dazzle color change coated glass of claim 1, wherein: the outer layer has a high refractive index Nb2O5Film layer (8), multiple inner layers of high refractive index Nb2O5Film layer, multiple inner layers and low refractive index SiO2The total thickness of the film layer is 400-760 nm.
3. The dazzle color change coated glass of claim 1, wherein: high refractive index Nb from the glass substrate (1) to the outer layer2O5A first inner layer of high-refractive-index Nb is sequentially arranged in the direction of the film layer (8)2O5Film layer (2), first inner layer low refractive index SiO2Film layer (3) and second inner layer high-refractive index Nb2O5Film layer (4), second inner layer low refractive index SiO2Film layer (5) and third inner layer high-refractive-index Nb2O5Film layer (6) and third inner layer low-refractive-index SiO2A membrane layer (7).
4. The dazzle color change coated glass of claim 3, wherein: the second inner layer has a high refractive index Nb2O5Thickness of film layer (4), third inner layer high refractive index Nb2O5The thickness of the film layer (6) is smaller than that of the first inner layer high-refractive-index Nb2O5The thickness of the film layer (2).
5. The dazzle color change coated glass of claim 3, wherein: the first inner layer has a high refractive index Nb2O5The thickness of the film layer (2) is 30nm-60nm, and the first inner layer is made of SiO with low refractive index2The thickness of the film layer (3) is 20nm-35 nm.
6. The dazzle color change coated glass of claim 3, wherein: the second inner layer has a high refractive index Nb2O5The thickness of the film layer (4) is 10nm-20nm, and the second inner layer is SiO with low refractive index2The thickness of the film layer (5) is 20nm-50 nm.
7. The dazzle color change coated glass of claim 3, wherein: the third inner layer has a high refractive index Nb2O5The thickness of the film layer (6) is 15nm-25nm, and the third inner layer is SiO with low refractive index2The thickness of the film layer (7) is 15nm-35nm, and the outer layer is Nb with high refractive index2O5The thickness of the film layer (8) is 20nm-70 nm.
8. Method for producing a glare color change coated glass according to any of claims 1 to 7, characterized in that: in trueCarrying out medium-frequency magnetron sputtering on the glass substrate (1) in an air environment, and sequentially and alternately depositing a plurality of inner-layer high-refractive-index Nb on the outer wall of the glass substrate (1)2O5Film layer, inner layer low refractive index SiO2A film layer, and finally forming an outer layer of high-refractive-index Nb2O5A membrane layer (8).
9. The method for preparing the colorful color-changing coated glass according to claim 8, wherein the method comprises the following steps: the Nb2O5The film layer is formed by sputtering a niobium oxide target material, the purity of the niobium oxide target material is 3N9, the sputtering power of the niobium oxide target material is 20-60kw, the sputtering pressure is 2 × 10-3-3 × 10-3mbar, the sputtering atmosphere is argon and oxygen, and the volume ratio of the argon to the oxygen is 80: 4.
10. The method for preparing the colorful color-changing coated glass according to claim 8, wherein the method comprises the following steps: the SiO2The film layer is formed by sputtering a silicon-aluminum target, the sputtering power of the silicon-aluminum target is 40-100kw, the sputtering pressure is 2 × 10-3-3 × 10-3mbar, the sputtering atmosphere is argon and oxygen, and the volume ratio of the argon to the oxygen is 8: 5.
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Cited By (2)

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CN113880452A (en) * 2021-09-29 2022-01-04 中建材科创新技术研究院(山东)有限公司 Colored glass and preparation method and application thereof
CN115724594A (en) * 2022-11-28 2023-03-03 宁波云涂科技有限公司 Processing method and equipment for colorful glass of photovoltaic curtain wall

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