CN111744349A - Cleaning method of tail gas treatment system - Google Patents
Cleaning method of tail gas treatment system Download PDFInfo
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- CN111744349A CN111744349A CN201910238544.4A CN201910238544A CN111744349A CN 111744349 A CN111744349 A CN 111744349A CN 201910238544 A CN201910238544 A CN 201910238544A CN 111744349 A CN111744349 A CN 111744349A
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01D—SEPARATION
- B01D53/00—Separation of gases or vapours; Recovering vapours of volatile solvents from gases; Chemical or biological purification of waste gases, e.g. engine exhaust gases, smoke, fumes, flue gases, aerosols
- B01D53/34—Chemical or biological purification of waste gases
- B01D53/74—General processes for purification of waste gases; Apparatus or devices specially adapted therefor
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- B—PERFORMING OPERATIONS; TRANSPORTING
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- B01D—SEPARATION
- B01D53/00—Separation of gases or vapours; Recovering vapours of volatile solvents from gases; Chemical or biological purification of waste gases, e.g. engine exhaust gases, smoke, fumes, flue gases, aerosols
- B01D53/34—Chemical or biological purification of waste gases
- B01D53/46—Removing components of defined structure
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
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- B01D2251/00—Reactants
- B01D2251/10—Oxidants
- B01D2251/102—Oxygen
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01D—SEPARATION
- B01D2251/00—Reactants
- B01D2251/10—Oxidants
- B01D2251/11—Air
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01D—SEPARATION
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- B01D2257/55—Compounds of silicon, phosphorus, germanium or arsenic
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Abstract
The invention provides a method for cleaning a tail gas treatment system, wherein flammable and explosive substances are remained in the tail gas treatment system, and the method comprises the following steps: introducing a first gas into the tail gas treatment system within a first time period, wherein the first time period is at least the time for replacing the tail gas treatment system with a first gas environment; introducing a second gas into the tail gas treatment system for X times, wherein the second gas comprises an oxidizing gas and an inert gas, and the pressure of the oxidizing gas introduced into the tail gas treatment system for the Nth time is greater than that of the oxidizing gas introduced into the tail gas treatment system for the N-1 st time; wherein X is a positive integer greater than or equal to 1, and N is a positive integer greater than or equal to 1 and less than or equal to X. According to the cleaning method of the tail gas treatment system, the inflammable and explosive substances are subjected to oxidation treatment, so that the inflammable and explosive substances can form substances which are not easy to combust or explode when meeting air after chemical change, and the situation that residual substances in the tail gas treatment system are combusted or explode can be avoided when the tail gas treatment system is disassembled and cleaned.
Description
Technical Field
The invention relates to the technical field of semiconductor or solar cell manufacturing, in particular to a method for cleaning a tail gas treatment system.
Background
Due to the growth requirement of a process film layer in the semiconductor industry and the solar cell manufacturing, for example, a gallium arsenide film layer grows on a substrate, some substances (such as toxic, flammable and explosive substances such as arsenic and phosphorus) can be remained in a tail gas pipeline of a tail gas treatment system, the performance of a component can be reduced along with the accumulation of the residual substances, and the tail gas pipeline needs to be detached to clean the residual substances in the tail gas pipeline. When dismantling the tail gas pipeline part and carrying out inside residual substance clearance, because the tail gas pipeline is amalgamated has a large amount of flammable and explosive materials of meeting the air, so can appear the condition that the residual substance burns or explodes when dismantling clearance tail gas processing system, seriously threaten clearance personnel's safety.
How to well treat flammable and combustible toxic substances remained in a tail gas treatment system before the tail gas treatment system is disassembled and cleaned is a problem to be solved urgently at present.
Disclosure of Invention
The invention provides a method for cleaning a tail gas treatment system, aiming at the technical problems in the prior art. The cleaning method of the tail gas treatment system can enable the flammable and explosive substances to form substances which are not easy to combust or explode when meeting air after chemical changes, so that the situation that residual substances in the tail gas treatment system are combusted or explode can be avoided when the tail gas treatment system is detached and cleaned, and the cleaning safety of the tail gas treatment system is further ensured.
The invention provides a method for cleaning a tail gas treatment system, wherein flammable and combustible substances are remained in the tail gas treatment system, and the method comprises the following steps:
introducing a first gas into the exhaust treatment system for a first period of time, the first period of time being at least the time that the exhaust treatment system is replaced with a first gas environment;
introducing a second gas into the tail gas treatment system for X times, wherein the second gas comprises an oxidizing gas and an inert gas, and the pressure of the oxidizing gas introduced into the tail gas treatment system for the Nth time is greater than that of the oxidizing gas introduced into the tail gas treatment system for the N-1 st time; wherein X is a positive integer greater than or equal to 1, and N is a positive integer greater than or equal to 1 and less than or equal to X.
Preferably, the second gas is introduced into the tail gas treatment system for 1-10 times, and the pressure difference between the pressure of the oxidizing gas introduced into the tail gas treatment system for the Nth time and the pressure of the oxidizing gas introduced into the tail gas treatment system for the N-1 st time is 3-8 psi.
Preferably, the second gas is introduced into the tail gas treatment system for 6 times, and the pressure of the oxidizing gas introduced for the first time is 5 psi; the pressure of the second time of introducing the oxidizing gas is 10 psi; the pressure of the oxidizing gas introduced for the third time is 15 psi; the pressure of the oxidizing gas introduced for the fourth time is 20 psi; the pressure of the oxidizing gas introduced for the fifth time is 25 psi; the pressure of the oxidizing gas introduced for the sixth time was 30 psi.
Preferably, the process of introducing the second gas into the tail gas treatment system further comprises:
monitoring whether a temperature in the exhaust treatment system is greater than or equal to an alarm threshold;
if so, stopping introducing the oxidizing gas into the tail gas treatment system, and continuing introducing the oxidizing gas into the tail gas treatment system when the temperature in the tail gas treatment system is less than the alarm threshold value.
Preferably, the first gas is an inert gas; the oxidizing gas is compressed air or compressed oxygen.
Preferably, the time period of each time of introducing the second gas into the tail gas treatment system is one hour or more.
Preferably, the inflammable and explosive substances comprise arsenic and phosphorus, and the tail gas treatment system comprises an arsenic filter, an air suction pump, a phosphorus filter and a tail gas engine which are connected in sequence;
the alarm threshold of the arsenic filter is 70 ℃; the alarm threshold of the air pump is 120 ℃; the alarm threshold of the phosphorous filter is 70 ℃; the alarm threshold of the tail gas engine is 90 ℃.
Preferably, before the introducing the first gas into the tail gas treatment system, the method further comprises: and introducing a reducing gas into the tail gas treatment system, and reducing the inflammable and explosive substances in the tail gas treatment system to change the substances from a solid state to a gaseous state.
Preferably, the step of introducing a reducing gas into the tail gas treatment system to reduce the flammable and combustible substances in the tail gas treatment system from a solid state to a gaseous state comprises:
introducing hydrogen with the flow rate of more than 50% of the full range of the flow meter into the reaction chamber, raising the temperature in the reaction chamber to 600-800 ℃, and maintaining the temperature for 60 minutes;
and hydrogen flows into the tail gas treatment system from the reaction chamber to reduce the flammable and combustible substances in the tail gas treatment system.
Preferably, after the second gas is introduced into the tail gas treatment system for X times, the method further comprises: and carrying out leakage detection on the tail gas treatment system.
The invention has the beneficial effects that: according to the cleaning method of the tail gas treatment system, the inflammable and explosive substances in the tail gas treatment system are oxidized, so that the inflammable and explosive substances can form substances which are not easy to combust or explode when meeting air after chemical change, the situation that residual substances in the tail gas treatment system are combusted or explode can be avoided when the tail gas treatment system is disassembled and cleaned, and the cleaning safety of the tail gas treatment system is further ensured.
Drawings
FIG. 1 is a schematic structural diagram of an exhaust gas treatment system according to an embodiment of the present invention;
FIG. 2 is a flow chart of a method for cleaning an exhaust treatment system according to an embodiment of the present invention;
FIG. 3 is a flowchart illustrating a method for cleaning an exhaust gas treatment system according to an embodiment of the present invention;
fig. 4 is a flowchart of step S11 of the method for cleaning the exhaust gas treatment system according to the embodiment of the present invention.
Wherein the reference numbers indicate:
1. a reaction chamber; 2. an arsenic filter; 3. a pump; 4. a phosphorus filter; 5. a tail gas engine; 6. an oxidizing gas inlet.
Detailed Description
In order to make the technical solutions of the present invention better understood by those skilled in the art, the following describes a method for cleaning an exhaust gas treatment system according to the present invention in further detail with reference to the accompanying drawings and the detailed description.
In the invention, the tail gas treatment system is shown in fig. 1, gas containing toxic substances such as arsenic, phosphorus and the like can be generated in the growth process of a process film layer (such as a gallium arsenide film layer) in a reaction chamber 1, and the gas containing the toxic substances such as arsenic, phosphorus and the like is treated and discharged through the tail gas treatment system in the process. For example, the gas containing toxic substances discharged in the process in the reaction chamber 1 is firstly filtered by the arsenic filter 2, then is sucked to the phosphorus filter 4 by the suction pump 3, the filtered gas finally enters the tail gas machine 5, combustion or toxic substance adsorption is carried out in the tail gas machine 5, and the waste gas treated by the tail gas machine 5 is discharged to the atmosphere. Wherein, arsenic filter 2 and phosphorus filter 4 will filter arsenic, phosphorus, most of which will be filtered. In the tail gas engine 5, part of toxic substances are converted into nontoxic gas through combustion and toxic substance adsorption. After the tail gas treatment system filters the gas containing toxic substances and is subjected to combustion adsorption treatment, residual toxic substances (such as arsenic and phosphorus) can be inevitably generated in the tail gas treatment system, and a large amount of arsenic and phosphorus toxic substances can be accumulated in the tail gas treatment system after long-time accumulation, so that the performance of the tail gas treatment system is reduced, the tail gas treatment system cannot be continuously used, and the cleaning of the tail gas treatment system is more dangerous.
In order to solve the technical problem that residual substances are inevitably combusted or exploded when the conventional tail gas treatment system is disassembled and cleaned, an embodiment of the present invention provides a method for treating a tail gas treatment system, as shown in fig. 2 and 3, flammable and explosive substances are remained in the tail gas treatment system, and the method includes:
step S10: the first gas is introduced to the exhaust gas treatment system during a first time period that is at least the time the exhaust gas treatment system is replaced with the first gas environment.
Wherein the first gas is a displacement gas. And introducing replacement gas into the tail gas treatment system in the first time period to maintain the environment of the replacement gas in the tail gas treatment system.
Wherein the displacement gas is an inert gas, such as nitrogen. The replacement gas can replace the original gas (such as original reaction gas, gas containing flammable and combustible substances and the like) in the tail gas treatment system, the replacement gas environment can avoid the flammable and combustible substances in the tail gas treatment system cleaning process from being burnt or exploded, the subsequent oxidation reaction degree in a tail gas pipeline can be controlled, the phenomenon that the leakage danger is caused due to overhigh temperature caused by the reaction is avoided, and the stable processing of the tail gas treatment system is ensured.
Step S11: introducing a second gas into the tail gas treatment system for X times, wherein the second gas comprises an oxidizing gas and an inert gas, and the pressure of the oxidizing gas introduced into the tail gas treatment system for the Nth time is greater than that of the oxidizing gas introduced into the tail gas treatment system for the N-1 st time; wherein X is a positive integer greater than or equal to 1, and N is a positive integer greater than or equal to 1 and less than or equal to X.
Wherein, the flammable and combustible substances remained in the tail gas treatment system comprise toxic substances such as arsenic, phosphorus and the like. The oxidizing gas is compressed air or compressed oxygen. The oxidizing gas can oxidize inflammable and explosive substances in the tail gas treatment system, so that the inflammable and explosive substances can not be combusted or exploded when meeting air. Because the quantity of the inflammable and explosive substances in the tail gas treatment system is less when the inflammable and explosive substances in the tail gas treatment system are oxidized for the Nth time than the N-1 th time, the tail gas treatment system can be gradually oxidized for a plurality of times by enabling the pressure of the oxidizing gas to be introduced for the Nth time to be greater than that of the oxidizing gas introduced for the N-1 th time, so that the inflammable and explosive substances remained in the tail gas treatment system are gradually and completely cleaned, and meanwhile, the stability and the safety of the whole cleaning process can be ensured.
The combustible and explosive substances in the tail gas treatment system are oxidized, so that the combustible and explosive substances are formed into substances which are difficult to combust or explode when meeting air after chemical change, and therefore the situation that residual substances in the tail gas treatment system are combusted or explode when the tail gas treatment system is disassembled and cleaned is avoided, and the cleaning safety of the tail gas treatment system is further ensured.
In the step, preferably, the second gas is introduced into the tail gas treatment system for 1-10 times, and the pressure difference between the pressure of the oxidizing gas introduced into the tail gas treatment system for the Nth time and the pressure of the oxidizing gas introduced into the tail gas treatment system for the N-1 st time is 3-8 psi. For example, under the condition that the residual quantity of flammable and combustible substances in the tail gas treatment system is not very large, the second gas can be introduced into the tail gas treatment system for 1-5 times to thoroughly clean the tail gas treatment system; under the condition that the residual quantity of flammable and combustible substances in the tail gas treatment system is large, the second gas can be introduced into the tail gas treatment system 6-10 times to thoroughly clean the tail gas treatment system. The specific number of times of thorough cleaning of the tail gas treatment system is specifically determined according to the residual quantity of flammable and combustible substances in the tail gas treatment system, so long as the flammable and combustible residues in the tail gas treatment system can be thoroughly cleaned finally, and the tail gas treatment system is prevented from being disassembled and cleaned to cause combustion or explosion danger.
In this embodiment, it is further preferable that the second gas is introduced into the tail gas treatment system for 6 times, that is, step S11 specifically includes: as shown in figure 4 of the drawings,
step S111: the first time, the oxidizing gas with the pressure of 5psi is introduced into the tail gas treatment system.
Wherein the time for introducing the second gas is one hour or more. The length of the introduction period can ensure the best effect of the secondary oxidation treatment.
Step S112: the second time an oxidizing gas was introduced into the tail gas treatment system at a pressure of 10 psi.
Wherein the time for introducing the second gas is one hour or more. The length of the introduction period can ensure the best effect of the secondary oxidation treatment.
Step S113: and thirdly, introducing oxidizing gas with the pressure of 15psi into the tail gas treatment system.
Wherein the time for introducing the second gas is one hour or more. The length of the introduction period can ensure the best effect of the secondary oxidation treatment.
Step S114: fourth, oxidizing gas was introduced into the tail gas treatment system at a pressure of 20 psi.
Wherein the time for introducing the second gas is one hour or more. The length of the introduction period can ensure the best effect of the secondary oxidation treatment.
Step S115: fifth, oxidizing gas was introduced into the tail gas treatment system at a pressure of 25 psi.
Wherein the time for introducing the second gas is one hour or more.
Step S116: and a sixth time, introducing oxidizing gas with the pressure of 30psi into the tail gas treatment system.
Wherein the time for introducing the second gas is one hour or more.
Through steps S111 to S116, the oxidizing gas can more thoroughly oxidize the flammable and combustible and toxic arsenic, phosphorus and other substances remaining in the exhaust gas treatment system into substances which are not easily combustible or explosive when meeting air, thereby ensuring the safety of disassembling and cleaning the exhaust gas treatment system.
Preferably, in this embodiment, any one of step S111 to step S116 further includes: monitoring whether a temperature in the exhaust treatment system is greater than or equal to an alarm threshold.
If so, stopping introducing the oxidizing gas into the tail gas treatment system, and continuing introducing the oxidizing gas into the tail gas treatment system when the temperature in the tail gas treatment system is smaller than the alarm threshold value.
In the process of stopping the supply of the oxidizing gas to the off-gas treatment system, the inert gas is always supplied to the off-gas treatment system. In this step, if the inert gas is nitrogen, the oxidizing gas is compressed air. The inert gas can dilute the compressed air in the tail gas treatment system, so that the temperature rise caused by oxidation reaction in the tail gas treatment system is reduced, and the oxidation reaction process in the tail gas treatment system is more stable.
The temperature in the tail gas treatment system is monitored in the cleaning process of the tail gas treatment system, and the tail gas treatment system exceeding the alarm threshold value is stopped from inputting oxidizing gas in time, so that the safety and the stability of the oxidation treatment of the tail gas treatment system can be ensured.
In this embodiment, the tail gas treatment system includes an arsenic filter, an air pump, a phosphorous filter, and a tail gas engine; preferably, the alarm threshold of the arsenic filter is 70 ℃; the alarm threshold value of the air pump is 120 ℃; the alarm threshold of the phosphorus filter is 70 ℃; the alarm threshold of the tail gas engine is 90 ℃. The arsenic filter is used for filtering arsenic in the tail gas; the phosphorus filter is used for filtering phosphorus in the tail gas; the air extracting pump is used for extracting the tail gas in the tail gas treatment system; the tail gas machine is used for burning and adsorbing tail gas.
In the above, the oxidation treatment in steps S111 to S116 is performed on the inflammable and explosive substances in the arsenic filter, the air pump, the phosphorus filter, and the tail gas engine at the same time, or the oxidation treatment in steps S111 to S116 may be performed on the inflammable and explosive substances in the arsenic filter, the air pump, the phosphorus filter, and the tail gas engine respectively.
In the embodiment of the present invention, as shown in fig. 1, the exhaust gas treatment system further includes an oxidizing gas inlet 6 communicated with the arsenic filter; preferably, the first gas is introduced into the tail gas treatment system from the gas inlet of the reaction chamber 1; the oxidizing gas in the second gas is introduced into the tail gas treatment system from the oxidizing gas inlet 6, and the inert gas in the second gas is introduced into the tail gas treatment system from the gas inlet of the reaction chamber 1; this prevents the oxidizing gas from flowing into the reaction chamber 1, thereby preventing the oxidation reaction from occurring in the reaction chamber 1. Of course, the inert gas in the second gas may be introduced into the off-gas treatment system from a pipeline separately provided outside the reaction chamber 1 and the off-gas treatment system.
In the embodiment of the invention, in the process of cleaning the residual toxic substances in the tail gas treatment system, the oxidizing gas is introduced into the tail gas treatment system through the oxidizing gas inlet 6, and meanwhile, the inert gas (such as nitrogen) is continuously introduced into the tail gas treatment system and the reaction chamber 1 in the cleaning process, so that the stability of the compressed air in treating the residual toxic substances in the tail gas treatment system is ensured, namely the inert gas ensures that the tail gas treatment system cannot be burnt or exploded in the cleaning process.
Further preferably, in this embodiment, as shown in fig. 3, before introducing the displacement gas into the tail gas treatment system, the method further includes: step S09: and introducing reducing gas into the tail gas treatment system to reduce the inflammable and explosive substances in the tail gas treatment system so as to change the substances from a solid state to a gaseous state. Through the step, at least one part of the inflammable and explosive substances remained in the tail gas treatment system is changed into a gaseous state from a solid state, so that the inflammable and explosive substances can be blown and removed in the process of replacing original gas in the tail gas treatment system by subsequent replacement gas, and the residual quantity of the inflammable and explosive substances in the tail gas treatment system is reduced to a certain extent.
Wherein, the reducing gas is hydrogen, and step S09 specifically includes:
step S091: introducing hydrogen with the flow rate of more than 50% of the full scale of the flowmeter into the reaction chamber, raising the temperature in the reaction chamber to 600-800 ℃, and maintaining the temperature for 60 minutes.
This step enables the heated hydrogen gas to flow into the off-gas treatment system, thereby enabling the reduction performance of the reducing gas to be enhanced.
Step S092: hydrogen flows into the tail gas treatment system from the reaction chamber to reduce inflammable and explosive substances in the tail gas treatment system.
Helium may be used as the reducing gas. The reducing gas may be supplied directly to the off-gas treatment system from an external device without being introduced into the off-gas treatment system through the reaction chamber.
In this embodiment, as shown in fig. 3, after step S11, the method further includes: step S12: and carrying out leakage detection on the tail gas treatment system.
Since leakage of the exhaust gas treatment system is easily caused during the process of treating flammable and combustible materials in the exhaust gas treatment system by oxidation, so that leakage of toxic gases in the exhaust gas treatment system causes adverse effects, after the exhaust gas treatment system is subjected to oxidation treatment, step S12 needs to be performed.
Step S12 specifically includes: closing a valve of the tail gas treatment system, and resetting the reading of the valve; introducing normal-temperature hydrogen into the tail gas treatment system, and performing normal-temperature hydrogen leakage detection; the introduction amount of hydrogen is respectively 30%, 60% and 100% of the full range of the flowmeter, and the leakage detection of the whole tail gas treatment system is carried out by holding a handheld detector;
then, introducing high-temperature hydrogen into the tail gas treatment system, and performing high-temperature hydrogen leakage detection; if the temperature of the hydrogen is 200-300 ℃, the introduction amount of the hydrogen is 30%, 60% and 100% of the full range of the flowmeter, and the leakage detection of the whole tail gas treatment system is carried out by holding a handheld detector.
The invention has the beneficial effects that: according to the method for treating the tail gas treatment system, the inflammable and explosive substances in the tail gas treatment system are oxidized, so that the inflammable and explosive substances can form substances which are not easy to combust or explode when meeting air after chemical change, the situation that residual substances in the tail gas treatment system are combusted or explode can be avoided when the tail gas treatment system is disassembled and cleaned, and the cleaning safety of the tail gas treatment system is further ensured.
It will be understood that the above embodiments are merely exemplary embodiments taken to illustrate the principles of the present invention, which is not limited thereto. It will be apparent to those skilled in the art that various modifications and improvements can be made without departing from the spirit and substance of the invention, and these modifications and improvements are also considered to be within the scope of the invention.
Claims (10)
1. A method for cleaning an exhaust gas treatment system having flammable and combustible materials remaining therein, the method comprising:
introducing a first gas into the exhaust treatment system for a first period of time, the first period of time being at least the time that the exhaust treatment system is replaced with a first gas environment;
introducing a second gas into the tail gas treatment system for X times, wherein the second gas comprises an oxidizing gas and an inert gas, and the pressure of the oxidizing gas introduced into the tail gas treatment system for the Nth time is greater than that of the oxidizing gas introduced into the tail gas treatment system for the N-1 st time; wherein X is a positive integer greater than or equal to 1, and N is a positive integer greater than or equal to 1 and less than or equal to X.
2. The method for cleaning the tail gas treatment system according to claim 1, wherein the second gas is introduced into the tail gas treatment system 1-10 times, and the pressure difference between the pressure of the oxidizing gas introduced into the tail gas treatment system at the Nth time and the pressure of the oxidizing gas introduced into the tail gas treatment system at the N-1 st time is 3-8 psi.
3. The method of claim 2, wherein the second gas is introduced into the exhaust gas treatment system 6 times, and the pressure of the oxidizing gas introduced for the first time is 5 psi; the pressure of the second time of introducing the oxidizing gas is 10 psi; the pressure of the oxidizing gas introduced for the third time is 15 psi; the pressure of the oxidizing gas introduced for the fourth time is 20 psi; the pressure of the oxidizing gas introduced for the fifth time is 25 psi; the pressure of the oxidizing gas introduced for the sixth time was 30 psi.
4. The method for cleaning up an exhaust gas treatment system according to claim 3, further comprising the step of, during the step of introducing the second gas into the exhaust gas treatment system:
monitoring whether a temperature in the exhaust treatment system is greater than or equal to an alarm threshold;
if so, stopping introducing the oxidizing gas into the tail gas treatment system, and continuing introducing the oxidizing gas into the tail gas treatment system when the temperature in the tail gas treatment system is less than the alarm threshold value.
5. The method of cleaning an exhaust gas treatment system according to claim 4, wherein the first gas is an inert gas; the oxidizing gas is compressed air or compressed oxygen.
6. The method for cleaning up an exhaust gas treatment system according to claim 5, wherein the time period for feeding the second gas to the exhaust gas treatment system each time is one hour or more.
7. The method for cleaning the tail gas treatment system according to claim 4, wherein the inflammable and explosive substances comprise arsenic and phosphorus, and the tail gas treatment system comprises an arsenic filter, an air suction pump, a phosphorus filter and a tail gas engine which are connected in sequence;
the alarm threshold of the arsenic filter is 70 ℃; the alarm threshold of the air pump is 120 ℃; the alarm threshold of the phosphorous filter is 70 ℃; the alarm threshold of the tail gas engine is 90 ℃.
8. The method for cleaning an exhaust gas treatment system according to claim 1, further comprising, before introducing the first gas into the exhaust gas treatment system: and introducing a reducing gas into the tail gas treatment system, and reducing the inflammable and explosive substances in the tail gas treatment system to change the substances from a solid state to a gaseous state.
9. The method for cleaning an exhaust gas treatment system according to claim 8, wherein the step of introducing a reducing gas into the exhaust gas treatment system to reduce the flammable and combustible substances in the exhaust gas treatment system from a solid state to a gaseous state comprises:
introducing hydrogen with the flow rate of more than 50% of the full range of the flow meter into the reaction chamber, raising the temperature in the reaction chamber to 600-800 ℃, and maintaining the temperature for 60 minutes;
and hydrogen flows into the tail gas treatment system from the reaction chamber to reduce the flammable and combustible substances in the tail gas treatment system.
10. The method for cleaning up an exhaust gas treatment system according to claim 1, further comprising, after introducing the second gas into the exhaust gas treatment system X times: and carrying out leakage detection on the tail gas treatment system.
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| CN116889785A (en) * | 2023-07-13 | 2023-10-17 | 江苏宜兴德融科技有限公司 | Semiconductor manufacturing equipment tail gas treatment system and tail gas treatment method |
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| CN116889785A (en) * | 2023-07-13 | 2023-10-17 | 江苏宜兴德融科技有限公司 | Semiconductor manufacturing equipment tail gas treatment system and tail gas treatment method |
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