CN111735770A - Spectral imaging apparatus and method - Google Patents
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Abstract
The invention discloses a spectral imaging device and a spectral imaging method. The spectral imaging apparatus includes: a light emitting unit for generating excitation light; the two-dimensional vibration mirror group is used for enabling the exciting light to form linear exciting light in a first dimension, and enabling the exciting light to step in a second dimension so as to sequentially form the linear exciting light in the first dimension, so that a to-be-detected area of a to-be-detected sample is scanned; optical means for guiding at least a portion of the line excitation light sequentially formed in the first dimension to a region to be detected; the spectrum detection device is used for collecting optical signals excited by the sequentially formed line excitation light on the sample to be detected, and the excited optical signals are guided to the spectrum detection device through the optical component; and the moving device is used for being matched with the spectrum detection device so that the spectrum detection device can synchronously collect optical signals excited by the sequentially formed line excitation light on the region to be detected when the excitation light is stepped on the second dimension to form a spectrum image of the region to be detected.
Description
Technical Field
The present invention relates generally to optical inspection techniques and, more particularly, to methods and apparatus for obtaining a spectral image of a sample to be inspected.
Background
Spectral analysis is an analysis method for identifying a substance based on its spectrum and determining its chemical composition, relative content, and the like. In recent years, spectral analysis based on raman spectroscopy, fluorescence spectroscopy, dark field scattering spectroscopy, and the like have attracted increasing research interest. For example, when light is incident on a surface of a substance, a part of the incident light inelastically interacts with the substance, and energy is transferred between the light and the substance, so that the frequency of the outgoing light is shifted from the frequency of the incident light, which is called raman scattering. At present, the raman spectroscopy analysis technology has been widely applied in the multidisciplinary fields of physics, chemistry, materials, biomedicine, archaeology, geology, criminal investigation, drug enforcement, forensic science and the like.
The raman spectroscopy technique can be combined with a microscopic analysis technique to form a microscopic raman spectroscopy technique. And analyzing the spectral information obtained by performing micro-area detection on the sample to be detected to obtain the related information of the material composition and the structure of the sample to be detected. Since the spectral image can show the chemical component distribution which can not be observed under a common optical microscope, the micro-optical imaging technology plays an increasingly important role in the fields of chemistry, physics, biomedicine and the like.
Disclosure of Invention
According to an embodiment of the present disclosure, there is provided a spectral imaging apparatus including: a light emitting unit for generating excitation light; the two-dimensional vibration mirror group is used for enabling the exciting light to form line exciting light in a first dimension and enabling the exciting light to step in a second dimension so as to sequentially form the line exciting light in the first dimension, and therefore the area to be detected of the sample to be detected is scanned; optical means for guiding at least a portion of the line excitation light sequentially formed in the first dimension to the region to be detected; the spectrum detection device is used for collecting optical signals excited by the sequentially formed line excitation light on the sample to be detected, and the excited optical signals are guided to the spectrum detection device through the optical component; and the moving device is used for being matched with the spectrum detection device so that the spectrum detection device can synchronously collect optical signals excited by the sequentially formed line excitation light on the area to be detected when the excitation light is stepped on the second dimension to form a spectrum image of the area to be detected.
In some embodiments, the optical component comprises a dual band edge filter.
In some embodiments, the two-dimensional galvanometer group includes a piezo-driven galvanometer for scanning the excitation light in the first dimension and a motor-driven galvanometer for stepping the excitation light in the second dimension to sequentially form line excitation light in the first dimension.
In some embodiments, the spectral detection device comprises a spectrometer and an optical imaging device.
In some embodiments, said synchronously collecting the optical signals excited by the sequentially formed line excitation light on the region to be detected comprises: driving the spectral detection device according to the distance the sequentially formed line excitation light is step-scanned in the second dimension to keep the optical signal excited by the sequentially formed line excitation light directed to the slit of the spectrometer via the optical component.
In some embodiments, the spectrometer comprises a transmissive grating spectrometer.
In some embodiments, the optical imaging device is configured to employ one spectrum for each row of picture elements to simultaneously acquire the light signals excited by the line excitation light.
In some embodiments, the slit has an adjustable slit width for cooperating with the optical imaging device to achieve pinhole confocal.
In some embodiments, the moving means comprises a guide rail.
In some embodiments, the apparatus further comprises a control device, wherein the control device controls the two-dimensional galvanometer group, the spectral detection device and the moving device, so that the spectral detection device can synchronously collect optical signals excited by the sequentially formed line excitation light on the area to be detected when the excitation light is stepped in the second dimension, wherein the control device is used for controlling at least one of the driving frequency and the azimuth angle of the galvanometer.
In some embodiments, the optical signal excited by the line excitation light on the region to be detected comprises raman scattered light or fluorescence.
According to an embodiment of the present disclosure, there is provided a spectral imaging method including: forming excitation light into line excitation light in a first dimension, and stepping the excitation light in a second dimension to sequentially form line excitation light in the first dimension; guiding at least a part of the line excitation light sequentially formed in the first dimension to a region to be detected of a sample to be detected so as to scan the region to be detected; and synchronously collecting optical signals excited on the region to be detected by the sequentially formed line excitation light when the excitation light is stepped in the second dimension so as to form a spectral image of the region to be detected.
Drawings
The accompanying drawings, which are incorporated herein and form a part of the specification, illustrate embodiments of the present disclosure and, together with the description, further serve to explain the principles of the disclosure and to enable a person skilled in the pertinent art to make and use the disclosure.
Fig. 1 shows a schematic diagram of a spectral imaging apparatus.
FIG. 2 shows a schematic diagram of another spectral imaging apparatus.
Fig. 3 shows a schematic diagram of a raman spectroscopy imaging apparatus according to an embodiment of the present invention.
FIG. 4 shows a flow diagram of a spectral imaging method according to an embodiment of the invention.
Embodiments will be described with reference to the accompanying drawings.
Detailed Description
While specific configurations and arrangements are discussed, it should be understood that this is done for exemplary purposes only. One skilled in the relevant art will recognize that other configurations and arrangements can be used without departing from the spirit and scope of the present disclosure.
It is noted that references in the specification to "one embodiment," "an embodiment," "some embodiments," etc., indicate that the embodiment described may include a particular feature, structure, or characteristic, but every embodiment may not necessarily include the particular feature, structure, or characteristic. Moreover, such phrases are not necessarily referring to the same embodiment. Further, when a particular feature, structure, or characteristic is described in connection with an embodiment, it is submitted that it is within the knowledge of one skilled in the relevant art to effect such feature, structure, or characteristic in connection with other embodiments whether or not explicitly described.
Fig. 1 shows a schematic diagram of a spectral imaging apparatus 100 that employs a two-dimensional motorized displacement stage to achieve a single point scan of a sample to be examined. In one embodiment, the two-dimensional motorized displacement stage is movable in x-axis and y-axis directions perpendicular to each other in a horizontal plane. Since raman scattering is a very weak optical signal, it is necessary to excite a sample to be detected with incident light having a relatively strong power in order to obtain a raman spectrum. In the spectral imaging apparatus 100 shown in fig. 1, a laser is used to generate excitation light to perform single-point excitation on a sample, so as to obtain raman spectrum information of a single point in a micro-region to be detected of the sample. Laser light from a laser 101 is focused through a double-Edge filter 102 and a microscope objective 105 onto the surface of a sample 106. The optical signal generated by the sample 106 after single-point excitation is focused to the center of the slit 109 at the entrance of the spectrometer 110 through the microscope objective 105, the optical filter 102 and the coupling lens 108, and then is split by the spectrometer 110 and focused to the detector 111, so that single-point spectrum detection of the sample 106 is realized. The two-dimensional motorized displacement stage 107 can be moved in two different dimensions to achieve single-point scanning by changing the position of the sample 106 without changing the excitation light path, so that the spectral imaging apparatus 100 can obtain spectral information at different detection points of the sample 106 and obtain a spectral image reflecting the chemical composition and structural distribution of the sample 106 through data integration and processing. The spectral imaging apparatus 100 further includes a microscope illuminating section 103 and a microscope monitoring section 104.
Fig. 2 shows a schematic diagram of another spectral imaging apparatus 200 that uses a two-dimensional galvanometer set of two one-dimensional galvanometers to achieve single point scanning in two dimensions. In one embodiment, the two dimensions may be an x-axis direction and a y-axis direction perpendicular to each other in a horizontal plane. By controlling the driving frequency of the two one-dimensional galvanometers, the scanning speed of the two-dimensional galvanometer group in the x-axis direction and the y-axis direction can be controlled. In the spectral imaging apparatus 200, there is a two-dimensional group of vibrators 207 between the double Edge filter 202 and the microscope objective 205. The two-dimensional mirror group 207 can realize single-point scanning by changing the focus point of the excitation light on the sample 206 and ensuring that the light spot position of the light signal of single-point excitation is unchanged on the slit 209 while keeping the position of the sample 206 unchanged. Components 201, 202, 203, 204, 205, 208, 209, 210, and 211 in spectral imaging apparatus 200 may correspond to components 101, 102, 103, 104, 105, 108, 109, 110, and 111, respectively, in spectral imaging apparatus 100 in fig. 1.
By the single-point scanning mode, the speed of obtaining the spectral image of the sample micro-area to be detected is low. Especially, since raman scattering is a weak signal, a certain integration time, usually about 0.1-1 second, is required for acquiring a raman spectrum of each single-point excitation, so that it usually takes 0.5-5 hours to acquire a raman spectrum image with a resolution of, for example, 128 × 128, and the efficiency is low. The single-point scanning mode cannot meet the requirements of the current market on the spectral imaging device, and the application of the spectral imaging technology is greatly limited. Therefore, a new fast spectral imaging technique is needed.
Fig. 3 shows a schematic diagram of a raman spectroscopy imaging apparatus 300 in accordance with an embodiment of the present invention. In fig. 3, the raman spectroscopic imaging device 300 includes a light emitting unit 301, a double-edged filter 302, a microscope illuminating part 303, a microscope monitoring part 304, a microscope objective 305, a sample to be measured 306, a two-dimensional mirror group 307, a coupling lens 308, a slit 309, a transmission grating spectrometer 310, a detector 311, and a moving device 312.
In one embodiment, the light emitting unit 301 comprises one laser to generate excitation light. Excitation light emitted from the light emitting unit 301 is incident on the double band-edge filter 302 via the two-dimensional mirror group 307. The double band-edge filter 302 directs at least a portion of the excitation light incident thereon to the area to be detected of the sample to be detected 306 via the microscope objective 305.
The two-dimensional mirror group 307 may change a direction of the excitation light emitted by the light emitting unit 301, so that the excitation light forms line excitation light in a first dimension when irradiated onto the region to be detected of the sample to be detected 306, and the excitation light may be stepped in a second dimension, thereby sequentially forming line excitation light in the first dimension. As the excitation light is stepped in the second dimension, the excitation light may scan the region to be detected of the sample to be detected 306 in the form of line excitation light. In one embodiment, the first dimension and the second dimension may be an x-axis direction and a y-axis direction, respectively, in a horizontal plane, perpendicular to each other.
In some embodiments, the two-dimensional galvanometer group 307 may include two different one-dimensional galvanometers, a high frequency galvanometer and a low frequency galvanometer. The high-frequency galvanometer is driven by piezoelectricity, and the driving frequency is about kilohertz order, so that the exciting light emitted by the light-emitting unit 301 forms line exciting light on the area to be detected of the sample to be detected 306 in a first dimension; the low-frequency galvanometer is driven by a motor, and the driving frequency is about hundred hertz magnitude, so that the exciting light emitted by the light-emitting unit 301 is stepped on the to-be-detected region of the to-be-detected sample 306 in the second dimension to form additional line exciting light of the first dimension on the to-be-detected region, thereby realizing surface scanning of the to-be-detected sample 306 by the line exciting light.
In the embodiment shown in fig. 3, the light emitting unit 301, the two-dimensional oscillator group 307, the double-edged filter 302 and the microscope objective 305 form an excitation light path of the raman spectroscopic imaging device 300. In the excitation light path, an optical component consisting of a double band-edge filter 302 and a microscope objective 305 guides at least a part of the linear excitation light sequentially formed in the first dimension to a region to be detected of a sample to be detected 306. In another embodiment, the optical component may also include other components, such as: an optical lens to better focus the line excitation light sequentially formed in the first dimension to the region to be detected of the sample to be detected 306. As will be appreciated by those skilled in the art, the double band-edge filter 302 and/or the microscope objective 305, which constitute optical components in the embodiment shown in fig. 3, may also be replaced by other components to achieve the purpose of guiding at least a part of the line excitation light sequentially formed in the first dimension to the area to be detected of the sample to be detected 306.
The excitation light excites a raman optical signal on the sample 306 to be detected, and the location of the excited raman optical signal can be monitored by the microscopic illumination component 303 and the microscopic monitoring component 304. The excited raman optical signal is directed via a microscope objective 305, a double band edge filter 302 and a coupling lens 308 onto a slit 309 at the entrance of a transmission grating spectrometer 310, and then split and focused by the transmission grating spectrometer 310 onto a detector 311. The transmission grating spectrometer 310 can cooperate with the mobile device 312 to synchronously collect raman optical signals excited by the excitation light on the region to be detected, thereby forming a raman spectral image of the region to be detected.
As shown in fig. 3, the double band-edge filter 302, the microscope objective 305, and the coupling lens 308 constitute a collection optical path of the raman spectral imaging device 300. The raman optical signal excited on the sample to be detected is directed via a collection optical path to a slit 309 at the entrance of a transmission grating spectrometer 310. Since the two-dimensional galvanometer group 307 is not disposed in the collection optical path, when the position of the line excitation light formed in the first dimension by the excitation light caused by the high frequency galvanometer changes, the position of the signal spot collected via the collection optical path and focused on the slit 309 at the entrance of the transmission grating spectrometer 310 changes accordingly. In addition, the step of the excitation light caused by the low-frequency galvanometer in the second dimension of the region to be detected also needs the transmission type grating spectrometer 310 to move synchronously with the low-frequency galvanometer in the second dimension so as to collect the raman optical signal excited by the line excitation light during the surface scanning on the region to be detected.
For the corresponding change of the position of the signal light spot focused on the slit 309 at the entrance of the transmission-type grating spectrometer 310 due to the position change of the line excitation light, the collection of the line excitation light can be realized by setting the operation mode of the detector 311 at the exit position of the transmission-type grating spectrometer 310.
In one embodiment, when the two-dimensional mirror group 307 is in the static mode, the excitation light is focused by the microscope objective lens 305 and then irradiates the sample 306 to be detected as a laser spot, and then is focused by the collection optical path onto the slit 309 as a laser spot; when the high-frequency galvanometer is rotated to scan the excitation light on the to-be-detected area of the to-be-detected sample 306 in the first dimension, the excitation light irradiated to the to-be-detected sample 306 is a line, namely, a line excitation light, and a laser line parallel to the slit 309 is focused on the slit 309 through the collection light path. When the high frequency galvanometer scans and the low frequency galvanometer is rotated to step the line excitation light in the second dimension, the excitation light scans through a rectangular surface on the area to be detected of the sample to be detected 306, and the laser line focused on the slit 309 moves synchronously. The collection of the line excitation light can be achieved by setting the detector 311 in a multi-tracking (Multitrack) mode, with each row of pixels collecting one spectrum.
In some embodiments, the slit width of slit 309 is adjustable to limit the clear aperture into the spectrometer, thereby improving spectral resolution; in addition, the slit is combined with the Multitrack mode of the detector 311, so that the effect of pinhole confocal can be realized, and the spatial resolution of the system is improved. In some embodiments, detector 311 may be a CCD detector.
As shown in fig. 3, the two-dimensional mirror group 307 is not disposed in the collection optical path constituted by the double-edged filter 302, the microscope objective 305, and the coupling lens 308. The raman optical signal excited from the sample 306 to be detected is directly guided to the spectral detection device consisting of the slit 309, the transmission grating spectrometer 310 and the detector 311 via the collection optical path. Thus, the stepping of the excitation light by the low frequency galvanometer in the second dimension of the region to be detected requires that the transmissive grating spectrometer 310 be moved in synchronization with the low frequency galvanometer in the second dimension.
One mobile device 312 is shown in fig. 3. In some embodiments, the moving device 312 is a linear guide. The spectrum detection device consisting of the slit 309, the transmission grating spectrometer 310 and the detector 311 can move on the linear guide rail. In other embodiments, the moving device 312 may be assembled with the spectral detection device. The spectral detection means is further driven by driving the moving means 312. Through the cooperation between the moving device 312 and the spectrum detection device, the synchronous movement between the transmission-type grating spectrometer 310 and the low-frequency galvanometer is realized. Thus, when the excitation light is stepped in the second dimension, the spectral detection device can synchronously collect optical signals of the line excitation light sequentially formed in the first dimension on the region to be detected to form a spectral image of the region to be detected.
The synchronized movement between the transmission grating spectrometer 310 and the low frequency galvanometer may be accomplished by a control device (not shown in FIG. 3). In one embodiment, first, the light emitting unit 301 emits single-point laser light, so that the laser light collected by the micro objective 305, the double band edge filter 302 and the coupling lens 308 enters the transmission grating spectrometer 310 through the slit 309; expanding the laser point to a line excitation light in the first dimension by the high-frequency galvanometer of the two-dimensional galvanometer group 307, wherein the laser point at the position of the slit 309 also becomes a laser line, so that the collected laser line enters the transmission type grating spectrometer 310 through the slit 309, and recording the azimuth angle of the low-frequency galvanometer and the position of the transmission type grating spectrometer 310 on the mobile device 312 at the moment; in certain steps (e.g. 15)
) The excitation light is stepped in a second dimension to scan the detectable region, and the laser line at the slit 309 is moved in the second dimension, and the collected laser line enters the transmission grating spectrometer 310 through the slit 309 at any time by the cooperation of the moving device 312 and the transmission grating spectrometer 310. That is, the transmission grating spectrometer 310 is driven according to the distance of the step scan of the line excitation light in the second dimension to keep the light signal excited by the line excitation light being guided to the transmission grating spectrometer 310 via the microscope objective 305, the double band-edge filter 302, the coupling lens 308 and into the transmission grating spectrometer 310A slit 309 at the mouth. In one embodiment, the azimuth angle of the low frequency galvanometer can be controlled by the control device. In another embodiment, the control device may also control the driving frequencies of the high-frequency galvanometer and the low-frequency galvanometer of the two-dimensional galvanometer group 307 respectively.
After the scanning of the detectable region is completed, the mapping relationship between each stepping position of the line excitation light on the detectable region in the second dimension and the corresponding position of the transmission type grating spectrometer 310 and the mapping relationship between the azimuth angle of the low-frequency galvanometer and the corresponding position of the transmission type grating spectrometer 310 can be obtained. In one embodiment, the control device can achieve synchronous movement between the low frequency galvanometer and the transmissive grating spectrometer 310 in the spectral detection device by adjusting the position of the spectral detection device on the moving device 312 (e.g., linear guide) based on the mapping of the azimuth angle of the low frequency galvanometer to the corresponding position of the transmissive grating spectrometer 310. In another embodiment, the control device drives the moving device 312 assembled with the spectrum detection device to synchronously move the transmission grating spectrometer 310 and the low frequency galvanometer based on the mapping relationship between the azimuth angle of the low frequency galvanometer and the corresponding position of the transmission grating spectrometer 310. By controlling the two-dimensional galvanometer group 307 (azimuth and/or driving frequency of the galvanometer), the spectral detection device and the moving device 312, the spectral detection device can synchronously collect optical signals excited by the sequentially formed line excitation light on the area to be detected when the excitation light is stepped in the second dimension.
Those skilled in the art will appreciate that other means for achieving synchronized movement between the transmission grating spectrometer 310 and the low frequency galvanometer may be used. For example, the distance the mobile device 312 needs to move is determined in real time by detecting the strongest signal of the line excitation light excitation during the course of driving the spectral detection device to move.
In some embodiments, the aperture ratio of the transmission grating spectrometer 310 can be set to F/2.4 to have a higher light throughput suitable for the collection of weaker signals. In addition, in some embodiments, the transmissive grating spectrometer 310 may also be coupled to a servo-driven precision motor, which is coupled to the moving device 312 to move in a second dimension in synchronization with the low frequency galvanometer.
The control device may be implemented by computer software, or may also be implemented by computer hardware or firmware, or a combination thereof. In some embodiments, the computer software (e.g., instructions) may be stored in a computer readable medium of Raman spectral imaging apparatus 300 shown in FIG. 3. A processor, by executing instructions in the computer readable medium, may be configured to control the synchronous movement between the transmission grating spectrometer 310 and the low frequency galvanometer. In other embodiments, the computer software run by the processor may also be downloaded and updated via a network.
According to the embodiment shown in fig. 3, the scanning galvanometer is coupled into the excitation light path, and the traditional point excitation mode is replaced by linear excitation, so that the excitation efficiency is effectively improved; meanwhile, a transmission-type grating spectrometer and a mobile device are introduced into a collection light path, synchronous linkage of excitation light scanning and collection light convergence is realized through linear push scanning, so that signal light enters the spectrometer through the center of a slit at any moment, simultaneous detection of excitation sites of the whole line is realized, and the time for collecting Raman spectrum images is controlled to be in the order of minutes, such as 1-5 minutes; because the position of the sample to be detected is kept unchanged, in-situ measurement of other detection means can be realized.
The raman spectroscopy imaging device 300 shown in fig. 3 may also be used for imaging fluorescence spectra or other spectra, as known to those skilled in the art.
FIG. 4 shows a flow diagram of a spectral imaging method 400 according to an embodiment of the invention. Rapid imaging of raman, fluorescence or other spectra can be achieved using the spectral imaging method 400 shown in fig. 4. The spectral imaging method 400 shown in fig. 4 includes: forming excitation light into line excitation light in a first dimension, and stepping the excitation light in a second dimension to sequentially form line excitation light in the first dimension (in 410); directing at least a portion of the line excitation light sequentially formed in the first dimension to a region to be detected of a sample to be detected to scan the region to be detected (in 420); and synchronously collecting optical signals excited by the sequentially formed line excitation light on the region to be detected to form a spectral image of the region to be detected while the excitation light is stepped in the second dimension (in 430).
The previous description of the disclosure is provided to enable any person skilled in the art to make or use the disclosure. Various modifications to the disclosure will be readily apparent to those skilled in the art, and the generic principles defined herein may be applied to other variations without departing from the spirit or scope of the disclosure. Thus, the disclosure is not intended to be limited to the examples and designs described herein but is to be accorded the widest scope consistent with the principles and novel features disclosed herein.
Claims (12)
1. A spectral imaging apparatus, comprising:
a light emitting unit for generating excitation light;
the two-dimensional vibration mirror group is used for enabling the exciting light to form line exciting light in a first dimension and enabling the exciting light to step in a second dimension so as to sequentially form the line exciting light in the first dimension, and therefore the area to be detected of the sample to be detected is scanned;
optical means for guiding at least a portion of the line excitation light sequentially formed in the first dimension to the region to be detected;
the spectrum detection device is used for collecting optical signals excited by the sequentially formed line excitation light on the sample to be detected, and the excited optical signals are guided to the spectrum detection device through the optical component; and
a moving device for cooperating with the spectral detection device to enable the spectral detection device to synchronously collect optical signals of the sequentially formed line excitation light excited on the region to be detected when the excitation light is stepped in the second dimension to form a spectral image of the region to be detected.
2. The apparatus of claim 1, wherein the optical component comprises a dual band edge filter.
3. The apparatus of claim 1, wherein the two-dimensional galvanometer group comprises a piezo-electrically driven galvanometer for scanning the excitation light in the first dimension and a motor driven galvanometer for stepping the excitation light in the second dimension to sequentially form line excitation light in the first dimension.
4. The apparatus of claim 1, wherein the spectral detection device comprises a spectrometer and an optical imaging device.
5. The apparatus of claim 4, wherein said synchronously collecting optical signals excited by the sequentially formed line excitation light on the region to be detected comprises: driving the spectral detection device according to the distance the sequentially formed line excitation light is step-scanned in the second dimension to keep the optical signal excited by the sequentially formed line excitation light directed to the slit of the spectrometer via the optical component.
6. The apparatus of claim 4, wherein the spectrometer comprises a transmission grating spectrometer.
7. The device of claim 4, wherein the optical imaging device is configured to employ one spectrum for each row of picture elements to simultaneously acquire optical signals excited by the line excitation light.
8. The apparatus of claim 7, wherein the slit of the spectrometer has an adjustable slit width for cooperating with the optical imaging device to achieve pinhole confocal.
9. The device of claim 1, wherein the moving means comprises a rail.
10. The device according to claim 1, further comprising a control device controlling the two-dimensional galvanometer group, the spectral detection device and the moving device such that the spectral detection device is capable of synchronously collecting optical signals excited by the sequentially formed line excitation light on the area to be detected when the excitation light is stepped in the second dimension, wherein the control device is configured to control at least one of a driving frequency and an azimuth angle of the galvanometer.
11. The device according to any one of claims 1-10, wherein the optical signal excited by the line excitation light on the region to be detected comprises raman scattered light or fluorescence.
12. A spectral imaging method, comprising:
forming excitation light into line excitation light in a first dimension, and stepping the excitation light in a second dimension to sequentially form line excitation light in the first dimension;
guiding at least a part of the line excitation light sequentially formed in the first dimension to a region to be detected of a sample to be detected so as to scan the region to be detected; and
and synchronously collecting optical signals excited by the sequentially formed line excitation light on the region to be detected when the excitation light is stepped in the second dimension so as to form a spectral image of the region to be detected.
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