CN111735768B - Micro imaging method and device for Micro LED screen - Google Patents
Micro imaging method and device for Micro LED screen Download PDFInfo
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Abstract
A Micro imaging method and a device of a Micro LED screen relate to the field of Micro LED detection, and the method comprises the following steps: dividing the detection screen into a plurality of single intervals, and sequentially positioning a microscopic imaging device above each single interval; acquiring a Z-axis positioning set of a current detection screen according to surface type data of a sampling screen, wherein the surface type data is the integral height distribution of the screen; the microscopic imaging device automatically focuses and images each single interval according to the Z-axis positioning set until an image of the whole detection screen is obtained; the system can realize automatic focusing, ensure that high-quality imaging is obtained in Mciro LED AOI detection and Demura application, and reduce Tact Time and cost.
Description
Technical Field
The invention relates to the field of Micro LED detection, in particular to a Micro imaging method and a device of a Micro LED screen.
Background
The Micro LED (Micro Light Emitting Diode) Display technology is a next generation Display technology expected in the industry, and has the characteristics of high resolution, low power consumption, high brightness, high contrast, high color saturation, fast response speed, thin thickness, long service life and the like, and the power consumption can be as low as 10% of that of an LCD (Liquid Crystal Display) and 50% of that of an OLED (Organic Light-Emitting Diode). Compared with LEDs with small spacing such as LEDs and Mini LEDs, the Micro LED is a traditional inorganic LED array which is further miniaturized, and each LED pixel point with the size of 10 microns can be independently addressed and lightened, so that the light emitting brightness of each chip can be accurately controlled, and image display is further realized.
A large amount of resources are invested by large panel manufacturers and research and development organizations to research and develop new generation display technologies and products, and certain bottleneck technologies, especially mass transfer processes and light-emitting wavelength consistency, faced by Micro LED batch citation make certain breakthroughs. In order to ensure the production quality and quality of the display panel, a series of point, line, Mura, smudgy defect detection and judgment are required, and automatic optical compensation is required for the brightness inconsistency. Automatic Optical Inspection equipment (AOI) and Mura Optical compensation are key Optical-mechanical-electrical integrated equipment for responding to the requirements of customers, and in order to cope with Micro LED screen defect detection of different resolutions (2K, 4K and 8K) and the like, AOI detection and Demura detection are carried out by matching various high-precision cameras and Micro lenses. The resolution of a common industrial camera lens is generally about 3um, the detection characteristic dimension of Micro LED pixels is generally about 1um, and a microscopic imaging system with higher optical resolution needs to be applied, which provides higher challenges for the structure of an equipment system and a focusing technology.
Disclosure of Invention
Aiming at the defects in the prior art, the invention aims to provide a detection method and a detection device for a Micro LED screen, which can realize automatic focusing, ensure that high-quality imaging is obtained in Mciro LED AOI detection and Demura application, and reduce Tact Time and cost.
In order to achieve the above object, in one aspect, a Micro LED screen microscopic imaging method is adopted, including:
dividing the detection screen into a plurality of single intervals, and sequentially positioning a microscopic imaging device above each single interval;
acquiring a Z-axis positioning set of a current detection screen according to surface type data of a sampling screen, wherein the surface type data is the integral height distribution of the screen;
and the microscopic imaging device automatically focuses and images each single interval according to the Z-axis positioning set until an image of the whole detection screen is obtained.
Preferably, the acquiring the Z-axis positioning set of the current detection screen according to the profile data of the sampling screen includes:
and collecting the surface type data of a plurality of sampling screens, and if the flatness consistency is higher than a set value, calculating a Z-axis positioning set according to the surface type data of any one sampling screen.
Preferably, the acquiring the Z-axis positioning set of the current detection screen according to the profile data of the sampling screen includes:
acquiring surface type data of a plurality of sampling screens, if the flatness consistency is equal to or lower than a set value, obtaining an empirical surface type curve according to the surface type data of the plurality of sampling screens, and selecting a plurality of datum points according to the empirical surface type curve;
acquiring Z-axis height values of the plurality of reference points of the current detection screen;
and correcting the empirical surface type curve according to the Z-axis height value of the datum point to obtain a Z-axis positioning set of the current detection screen.
Preferably, the step of correcting the empirical surface type curve according to the Z-axis height value of the reference point to obtain a Z-axis positioning set of the current detection screen includes:
s101, acquiring Z-axis height values of the plurality of corresponding reference points according to the empirical surface type curve to serve as a first Z-axis height value set; acquiring Z-axis height values of the plurality of datum points of the current detection screen as a second Z-axis height value set;
s102, calculating difference values of corresponding points of the first Z-axis height value set and the second Z-axis height value set, and obtaining an average value of all the difference values; and correcting the empirical surface type curve by using the average value to obtain a Z-axis positioning set of the current detection screen.
Preferably, the reference point is a maximum value or a minimum value of the profile curve.
Preferably, obtaining the Z-axis positioning set of the current detection screen includes:
determining the step length of each relative movement between the microscopic imaging device and the sampling screen so as to determine the position of each single interval;
determining the average value of the profile data of each single region, and determining the adjustment quantity of the Z-axis height of the microscopic imaging device according to the average value; and obtaining the Z-axis positioning position of the microscopic imaging device as a Z-axis positioning set.
Preferably, if the average value of the single interval profile data exceeds the adjusting threshold value, the adjusting amount is equal to the difference value of the average value and the standard value of the sampling screen;
the sampling screen standard value adopts the average value of the heights between Q1 and Q3 in the quartile of the surface type data, or adopts the average value of the heights of the areas with the highest flatness in the sampling screen.
Preferably, the step size of each relative movement between the microscopic imaging device and the sampling screen is determined, and the method comprises the following steps:
setting a standard moving step length s = t × v, wherein t is an adjusting period, v is a moving speed of the sampling screen, and calculating a Z-axis height range in a single interval corresponding to t;
if the range of the depth of field of the microscopic imaging device is within the range of the depth of field of the microscopic imaging device, t is used as the single interval adjusting period;
if the range of the depth of field of the microscopic imaging device is exceeded by the range of the depth of field of the microscopic imaging device, reducing t until the range of the microscopic imaging device is within the range of the depth of field of the corresponding single range, and taking the reduced t as the adjustment period of the corresponding range.
On the other hand, a Micro imaging device of a Micro LED screen is further provided, which uses the Micro imaging method to realize automatic focusing and imaging of the screen, and the Micro imaging device includes:
the jig is used for bearing the detection screen and moving in the X/Y direction, and the detection screen is divided into a plurality of single intervals;
the microscopic optical module is used for imaging and acquiring the detection screen;
the distance measurement module is used for acquiring the distance between the microscopic imaging device and the single area;
the driving mechanism is used for driving the jig to move in the X/Y direction so that the micro-optical module is positioned above each single interval; the micro-optical module is also used for driving the micro-optical module to move in the Z-axis direction and automatically adjusting the focal length of the micro-optical module;
a controller for controlling the drive mechanism.
Preferably, the distance measuring module is a distance measuring instrument arranged beside a focusing axis of the micro-optical module and moves together with the micro-optical module;
or the distance measuring module comprises a beam splitter prism arranged on the focusing axis of the micro optical module and a laser distance meter coupled to the side part of the beam splitter prism.
The technical scheme has the following beneficial effects:
1. in the microscopic imaging device, the distance measuring module is a distance measuring instrument arranged beside a focusing axis of the microscopic optical module, can realize off-axis automatic focusing, and is suitable for focusing scenes with low requirements on automatic focusing precision and tracking frequency.
2. In the microscopic imaging device, the distance measuring module comprises a beam splitter prism arranged on a focusing axis of the microscopic optical module and a laser distance meter coupled to the side part of the beam splitter prism, so that coaxial automatic focusing can be realized, the compensation precision of the focusing distance is high, the response is fast, and the different complex surface conditions can be clearly focused and imaged in real time.
3. Automatically acquiring the distance between the microscopic imaging device and each single interval, and automatically adjusting the focal length according to the distance and imaging until acquiring the image of the whole detection screen; and the Z axis is adjusted in real Time relative to the off-axis or on-axis to realize automatic focusing, so that the focusing distance measurement frequency can be reduced or eliminated, and the Tact Time and the cost are saved.
4. Obtaining a Z-axis positioning set through surface type data of a sample screen, and directly adjusting a microscopic imaging device according to the Z-axis positioning set when the same batch of screens are detected to realize automatic focusing of the screens, so that the microscopic imaging device obtains clear imaging in Mciro LED AOI detection and Demura application; further saving Tact Time and cost.
5. The Z-axis positioning set is obtained by combining the empirical surface type curve and the reference point measurement, the consistency of the planeness of a plurality of sampling screens can be adapted to the poor condition, the corresponding Z-axis positioning set is obtained by correcting the empirical surface type curve, the accuracy of automatic focusing is improved, and the micro-imaging device obtains higher-quality imaging in Mciro LED AOI detection and Demura application.
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FIG. 1 is a diagram illustrating screen type data according to an embodiment of the present invention;
FIG. 2 is a diagram illustrating first reference data and second reference data according to an embodiment of the present invention;
FIG. 3 is a schematic view of an embodiment of an autofocus microscope arrangement of the present invention;
FIG. 4 is a schematic view of another embodiment of an autofocus microscope arrangement of the present invention;
reference numerals:
the device comprises a micro-optical module A, a range finder B, a driving mechanism C, a screen D, a jig E and a range finding module F;
the system comprises a camera 001, a tube lens 002, a microscope objective 003, a point light source 004, an annular light source 005 and an optical prism 006.
Detailed Description
In order to make the objects, technical solutions and advantages of the present invention more apparent, the present invention is described in further detail below with reference to the accompanying drawings and embodiments. It should be understood that the specific embodiments described herein are merely illustrative of the invention and are not intended to limit the invention. In addition, the technical features involved in the embodiments of the present invention described below may be combined with each other as long as they do not conflict with each other.
The invention provides an embodiment of a Micro imaging method of a Micro LED screen.
Dividing the detection screen into a plurality of single intervals, and sequentially positioning a microscopic imaging device above each single interval; and acquiring the distance between the microscopic imaging device and the single area, and automatically adjusting the focal length of the microscopic imaging device according to the distance and imaging until acquiring the image of the whole detection screen.
Specifically, automatically adjusting the focal length of the microscopic imaging device according to the distance and imaging comprises:
and calculating a Z-axis positioning set of the current detection screen according to the surface type data of one or more sampling screens, and realizing automatic focusing and imaging of each single region by the microscopic imaging device according to the Z-axis positioning set. Specifically, each point in the Z-axis positioning set is the Z-axis positioning of each single interval of the microscopic imaging device in the whole screen, and when the microscopic imaging device is located in one single interval, the rapid automatic focusing can be realized according to the corresponding point in the Z-axis positioning set.
As shown in fig. 1, the schematic diagram of the surface type data of the screen is shown, the surface type data is the height distribution of the whole screen, and the height curves in different X-axis directions or Y-axis directions are called as the linear distribution corresponding to the X or Y positions.
Firstly, acquiring surface type data of a plurality of sampling screens, judging the flatness consistency of the plurality of acquired sampling screens, wherein the flatness consistency is the consistency of height distribution of the same position points among different screens, and then judging the relationship between the flatness consistency and a set value, wherein the set value can be preset according to the detection standards of the different screens and can be set compared with the depth of field in a microscopic imaging device.
If the flatness consistency of the plurality of sampling screens is higher than a set value, the consistency of the surface type data of the sampling screens is better, and the method can be directly popularized to all screens of the batch. Calculating a Z-axis positioning set according to the surface type data of any sampling screen; during detection, the micro-imaging device is adjusted according to the Z-axis positioning set, and automatic focusing of the whole screen is achieved.
If the flatness consistency of the plurality of sampling screens is equal to or lower than a set value, the consistency of the surface type data of the sampling screens is not good enough, and an empirical surface type curve can be obtained according to the surface type data of the plurality of sampling screens; correcting the empirical surface type curve according to the Z-axis height value of the datum point of the current detection screen to obtain a Z-axis positioning set of the current detection screen; and adjusting the microscopic imaging device according to the Z-axis positioning set to realize automatic focusing of the current detection screen. When the next detection screen is detected, the process is repeated, and focusing can be achieved more accurately.
Specifically, the method for correcting the empirical surface type curve according to the Z-axis height value of the datum point to obtain the Z-axis positioning set of the current detection screen comprises the following steps:
s101, according to the surface type data of the batch measurement sampling screen in the early stage, acquiring Z-axis height values of a plurality of corresponding reference points according to an empirical surface type curve, and taking the Z-axis height values as a first Z-axis height value set; and measuring Z-axis height values corresponding to a plurality of reference points of the current detection screen as a second Z-axis height value set. The datum point is a maximum value or a minimum value of the surface-shaped curve.
As shown in fig. 2, specifically, a Z-axis empirical mode curve FZ (x, Z) is determined, where a reference point x = (x1, x2, … xn), a corresponding first Z-axis height value set Z = (Z1, Z2, …, Zn), and n is the number of reference points. And taking the corresponding position of the characteristic point (such as a maximum or minimum value) of the FZ curve as a measurement reference point x, x = (× 1, × 2, …, × xk), and taking k as a reference point number. And measuring a second Z-axis height value corresponding to the current screen reference point x as Z (Z1, Z2, …, zk). Here, "+" is used as a distinguishing symbol and does not have a special meaning.
S102, calculating difference values of corresponding points of the first Z-axis height value set and the second Z-axis height value set, and obtaining an average value of all the difference values; and after correcting the empirical surface type curve by using the average value, acquiring a Z-axis positioning set of the current detection screen.
Specifically, a Z-axis height value set = (× 1, × Z2, …, × Zk) corresponding to the reference point on the empirical surface type curve FZ is calculated, a difference between × Z and × Z is calculated, and then an average value λ is obtained. And (3) the original FZ is offset and compensated for lambda to form a new mapping relation curve FZ (x, Z + lambda), and accordingly, a Z-axis positioning set of the current detection screen is obtained.
Further, in consideration of the difference in the variation trend amplitude in the reference point interval, after the step S102, the following steps may be further included:
s103, obtaining a Z-axis height value (^ zj, and ^ zj +1) in a single interval by interpolation in a reference point interval (^ xj, and ^ xj +1), then obtaining a Z-axis height set of the current detection screen ^ Z = (^ Z1, Z2, …, and ^ zn), and obtaining a more accurate Z-axis positioning set of the current detection screen according to the determined curve fz2 (x, and ^ Z). Wherein, the 'A' represents the Z-axis height value in a single interval, the representative symbol of the set, and has no special meaning.
Preferably, during the analysis of the previous batch measurement data, due to different batches and characteristics of the screen, a plurality of empirical surface type curves FZ1, FZ2, … may be obtained, and the practical application selects corresponding curves according to the characteristics of the specific screen to calculate, if there are multiple choices, the selected empirical curve set is weighted and fused with FZ = P1 × FZ1+ P2 × FZ2+ …, (P1+ P2+ … =1), where P is a set weight.
In addition, determining the step length of each relative movement between the microscopic imaging device and the sampling screen so as to determine the position of each single interval; determining the average value of the profile data of each single region, and determining the adjustment quantity of the Z-axis height of the microscopic imaging device according to the average value; and obtaining the Z-axis positioning position of the microscopic imaging device as a Z-axis positioning set.
Specifically, the method for obtaining the Z-axis positioning set of the current detection screen comprises the following steps:
determining the step length of each relative movement between the microscopic imaging device and the sampling screen so as to determine the position of each single interval; and determining the average value of the single-section profile data, and determining the adjustment amount of the Z-axis height of the micro-imaging device according to the average value.
If the average value exceeds the regulation threshold value, the adjustment amount is equal to the difference value of the average value and the standard value of the sampling screen; if the average value exceeds the adjustment threshold, the adjustment amount is zero.
And obtaining the Z-axis positioning position of the microscopic imaging device according to the adjustment quantity of each single interval, and using the Z-axis positioning position as a Z-axis positioning set.
In order to avoid the influence of severe fluctuation of partial data, the standard value of the sampling screen adopts the average value of the heights between Q1 and Q3 in the quartile of the surface type data, or adopts the average value of the heights of the areas with the highest flatness in the sampling screen.
Before the step length of each relative movement of the microscopic imaging device and the sampling screen is determined, the response frequency f of a driving mechanism in the microscopic imaging device is considered, and the problem of positioning accuracy caused by the response amplitude and phase lag can not occur below the frequency, so that the minimum adjustment period T =1/f of the microscopic imaging device is determined.
And setting a standard moving step length s = T × v, wherein T is an adjusting period, T is more than or equal to T, and v is the XY-direction moving speed of the sampling screen, and performing single-interval subdivision on the surface type data. Calculating the Z-axis height value range Zp in the single interval corresponding to t, and if the range is in the field depth range FOV of the microscopic imaging device, taking t as the single interval adjusting period; if the range of the depth of field FOV of the microscopic imaging device is exceeded by the range of the depth of field, the range t is reduced, the single interval is further subdivided until the range of the depth of field of the microscopic imaging device is reached by the range of the corresponding single interval, and the reduced range t is taken as the adjusting period of the range.
On one hand, the invention also provides an embodiment of the Micro imaging device of the two Micro LED screens, and the Micro imaging method can be used for carrying out automatic focusing and imaging on the screens.
As shown in fig. 3, a first embodiment of a Micro LED screen microscopic imaging device. The microscopic imaging device comprises a microscopic optical module A, a distance meter B, a driving mechanism C and a jig E. The jig E is used for bearing the detection screen D and can move in the X/Y direction, and the detection screen D is divided into a plurality of single intervals. The microscopic optical module A is used for carrying out imaging acquisition on the detection screen D. The distance meter B is used to obtain the distance between the micro-optical module a and the single zone, i.e. to measure the distance from the focus center of the detection screen D to the micro-optical module a, so as to perform the calculations involved in the above method. The driving mechanism C is used for driving the jig E to move in the X/Y direction, so that the micro-optical module A is positioned above each single area; and the driving mechanism is also used for driving the micro-optical module A to move in the Z-axis direction and automatically adjusting the focal length of the micro-optical module A. And a controller (not shown) for controlling the moving direction and distance of the driving mechanism C according to the Z-axis positioning set.
Specifically, micro-optical module A includes camera 001, and camera 001 below sets up tube lens 002, and tube lens 002 is connected with pointolite 004, and micro objective 003 is still connected to tube lens 002 below, and micro objective 003 below still is equipped with annular light source 005. The camera 001, the tube lens 002, the microscope objective 003 and the annular light source 005 have the same focal axis.
The distance meter B is arranged beside a focusing shaft of the micro-optical module A and moves together with the micro-optical module A.
Preferably, the driving mechanism C adopts a five-phase stepping or servo linear module motor, and if the precision requirement is high or the response bandwidth is large, a micro linear motor, a Voice Coil Motor (VCM) or a piezoelectric driving system can be adopted.
In this embodiment, the controller controls the driving mechanism C to drive the micro-optical module a to clearly focus the screen D. The automatic focusing microscope device in the embodiment is also suitable for off-axis automatic focusing, and the distance meter B can measure the distance between the microscopic optical module A and the screen D in real time to compensate by adopting distance measuring modes such as laser, infrared and the like.
As shown in fig. 4, the second embodiment of the Micro LED screen microscopic imaging device is basically the same as the previous embodiment except that: in this embodiment, the microscope optical module a is provided with a beam splitter 006 on the focal axis, the distance measuring module F is coupled to the side of the beam splitter 006, and the beam splitter 006 is located above the microscope objective 003.
In the embodiment, a coaxial automatic focusing mode can be adopted to measure the distance of the image-taking focusing colleagues, and compared with the previous embodiment, the method has the characteristics of high compensation precision and quick response, and is suitable for occasions with higher requirements on focusing precision and tracking frequency. The distance measurement module F can adopt a laser distance meter, and can also calculate the focusing distance through the characteristic reflection light path imaging phase difference and the optical path difference.
The present invention is not limited to the above-described embodiments, and it will be apparent to those skilled in the art that various modifications and improvements can be made without departing from the principle of the present invention, and such modifications and improvements are also considered to be within the scope of the present invention. Those not described in detail in this specification are within the skill of the art.
Claims (9)
1. A Micro-imaging method of a Micro LED screen is characterized by comprising the following steps:
dividing the detection screen into a plurality of single intervals, and sequentially positioning a microscopic imaging device above each single interval;
acquiring a Z-axis positioning set of a current detection screen according to surface type data of a sampling screen, wherein the surface type data is the integral height distribution of the screen;
the microscopic imaging device automatically focuses and images each single interval according to the Z-axis positioning set until an image of the whole detection screen is obtained;
the acquiring of the Z-axis positioning set of the current detection screen according to the surface type data of the sampling screen comprises the following steps:
acquiring surface type data of a plurality of sampling screens, if the flatness consistency is equal to or lower than a set value, obtaining an empirical surface type curve according to the surface type data of the plurality of sampling screens, and selecting a plurality of datum points according to the empirical surface type curve;
acquiring Z-axis height values of the plurality of reference points of the current detection screen;
and correcting the empirical surface type curve according to the Z-axis height value of the datum point to obtain a Z-axis positioning set of the current detection screen.
2. A Micro LED screen microimaging method as recited in claim 1, wherein obtaining a Z-axis location set for a current inspection screen from profile data for a sample screen further comprises:
and collecting the surface type data of a plurality of sampling screens, and if the flatness consistency is higher than a set value, calculating a Z-axis positioning set according to the surface type data of any one sampling screen.
3. A Micro LED screen microscopic imaging method according to claim 1, wherein said empirical surface type curve is modified according to the Z-axis height value of said reference point to obtain a Z-axis positioning set of the current inspection screen, comprising the steps of:
s101, acquiring Z-axis height values of the plurality of corresponding reference points according to the empirical surface type curve to serve as a first Z-axis height value set; acquiring Z-axis height values of the plurality of datum points of the current detection screen as a second Z-axis height value set;
s102, calculating difference values of corresponding points of the first Z-axis height value set and the second Z-axis height value set, and obtaining an average value of all the difference values; and correcting the empirical surface type curve by using the average value to obtain a Z-axis positioning set of the current detection screen.
4. A method of microscopic imaging of a Micro LED screen according to claim 1 or 3, wherein said reference point is the maximum or minimum of a profile curve.
5. A Micro LED screen microimaging method as claimed in claim 3, wherein obtaining a set of Z-axis locations of a current inspection screen comprises:
determining the step length of each relative movement between the microscopic imaging device and the sampling screen so as to determine the position of each single interval;
determining the average value of the profile data of each single region, and determining the adjustment quantity of the Z-axis height of the microscopic imaging device according to the average value; and obtaining the Z-axis positioning position of the microscopic imaging device as a Z-axis positioning set.
6. A Micro LED screen microscopic imaging method according to claim 5, wherein if the average value of each single interval profile data exceeds a regulation threshold, the adjustment amount is equal to the difference between the average value and the standard value of the sampling screen;
the sampling screen standard value adopts the average value of the heights between Q1 and Q3 in the quartile of the surface type data, or adopts the average value of the heights of the areas with the highest flatness in the sampling screen.
7. A Micro LED screen microscopic imaging method according to claim 5, wherein the step size of each relative movement of the microscopic imaging device and the sampling screen is determined, comprising the steps of:
setting a standard moving step length s = t × v, wherein t is an adjusting period, v is a moving speed of the sampling screen, and calculating a Z-axis height range in a single interval corresponding to t;
if the range of the depth of field of the microscopic imaging device is within the range of the depth of field of the microscopic imaging device, t is used as the single interval adjusting period;
if the range of the depth of field of the microscopic imaging device is exceeded by the range of the depth of field of the microscopic imaging device, reducing t until the range of the microscopic imaging device is within the range of the depth of field of the corresponding single range, and taking the reduced t as the adjustment period of the corresponding range.
8. A Micro LED screen microscopic imaging device, which uses the microscopic imaging method as claimed in any one of claims 1 to 7 to realize screen auto-focusing and imaging, wherein the Micro LED screen microscopic imaging device comprises:
the jig is used for bearing the detection screen and moving in the X/Y direction, and the detection screen is divided into a plurality of single intervals;
the microscopic optical module is used for imaging and acquiring the detection screen;
the distance measurement module is used for acquiring the distance between the microscopic imaging device and the single area;
the driving mechanism is used for driving the jig to move in the X/Y direction so that the micro-optical module is positioned above each single interval; the micro-optical module is also used for driving the micro-optical module to move in the Z-axis direction and automatically adjusting the focal length of the micro-optical module;
a controller for controlling the drive mechanism.
9. Micro LED screen microscopic imaging apparatus according to claim 8,
the distance measuring module is a distance measuring instrument arranged beside a focusing axis of the micro-optical module and moves together with the micro-optical module;
or the distance measuring module comprises a beam splitter prism arranged on the focusing axis of the micro optical module and a laser distance meter coupled to the side part of the beam splitter prism.
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| PCT/CN2021/084398 WO2022021919A1 (en) | 2020-07-31 | 2021-03-31 | Microscopic imaging method and apparatus for micro led screen |
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| CN114495815B (en) * | 2022-04-13 | 2022-06-28 | 苏州威达智电子科技有限公司 | Demura method, computing device and storage medium of miniature display screen |
| CN115278072A (en) * | 2022-07-25 | 2022-11-01 | 武汉精立电子技术有限公司 | Automatic focusing method and system for Micro LED detection |
| CN116698753B (en) * | 2023-07-25 | 2024-03-26 | 广州纳动半导体设备有限公司 | Mini-LED panel defect detection equipment and method based on machine vision |
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