CN111713178B

CN111713178B - Heater and insulator assembly for vacuum evaporation source

Info

Publication number: CN111713178B
Application number: CN201880089175.0A
Authority: CN
Inventors: 朴星东; 权映夏; 文一权; 车守荣
Original assignee: Alpha Plus Co ltd
Current assignee: Alpha Plus Co ltd
Priority date: 2018-02-14
Filing date: 2018-12-12
Publication date: 2022-08-23
Anticipated expiration: 2038-12-12
Also published as: WO2019160228A1; CN111713178A; KR20190098536A; KR102157476B1; JP7049466B2; JP2021512217A

Abstract

The main technical subject of the invention is to provide a heater and an insulator assembly for a vacuum evaporation source, which are easy to assemble, can shorten the assembly time and can prevent a short circuit (short circuit). To this end, the heater and insulator assembly for a vacuum evaporation source of the present invention includes: a hot wire including a plurality of linear portions and a plurality of bent portions, two of the plurality of linear portions being connected to both ends of each of the bent portions, respectively; one or more first insulators each having a slot into which the bent portions and the two linear portions are inserted, the slots being arranged so that the two linear portions face each other; and one or more second insulators for isolating the two linear portions from each other.

Description

Heater and insulator assembly for vacuum evaporation source

Technical Field

The invention discloses a vacuum evaporation source used for forming a thin film on a wafer or a substrate.

Background

A vacuum evaporation source is generally used for forming a thin film of a specific material on a wafer surface in a semiconductor manufacturing process or forming a thin film of a desired material on a surface of a glass substrate or the like in a manufacturing process of a large flat panel display device by heating and evaporating a material for forming a thin film on a substrate in a high vacuum chamber.

Fig. 1 is a partial sectional view schematically showing a conventional vacuum evaporation source, and fig. 2 is a perspective view showing a heater insulating module used in the vacuum evaporation source shown in fig. 1, separated therefrom.

As shown in fig. 1, a conventional vacuum evaporation source 10 includes: a housing 11; a crucible 12 provided in the inner space of the housing and containing a substance for forming a thin film; a heater and insulator assembly 13 disposed in a manner of wrapping the crucible, heating the crucible to evaporate a substance for forming the thin film; a heat reflection plate 14 supporting the heater and insulator assembly and reflecting heat of the heater and insulator assembly to the crucible. As shown in fig. 2 in particular, the heater and insulator assembly 13 includes a hot wire 13a, an insulator 13b provided with a plurality of insertion holes H formed in a size of a diameter of the hot wire, and the hot wire 13a is bent after being inserted into a first insertion hole H1 of the insulator 13b, and then bent after being inserted into a second insertion hole H2 of the insulator 13b, so as to be assembled in such a manner that the process is repeated.

However, the conventional heater and insulator assembly 13 for the vacuum evaporation source 10 requires repeated processes of inserting the hot wire 13a into the insertion hole H of the insulator 13b and bending for assembly, which increases the difficulty of assembly and requires a long assembly time.

Further, when the diameter of the hot wire 13a is 1mm or more, it is very difficult to insert it into each insertion hole H of the insulator 13b and bend it.

Disclosure of Invention

Problems to be solved by the invention

The technical subject of the invention is to provide a heater and an insulator assembly for a vacuum evaporation source, which are easy to assemble, can shorten the assembly time and prevent a short circuit (short circuit).

Another technical object of the present invention is to provide a heater and an insulator assembly for a vacuum evaporation source that can be applied to a heat wire having a relatively large diameter or thickness.

Means for solving the problems

In order to achieve the object, a heater and insulator assembly for a vacuum evaporation source according to an embodiment of the present invention includes: a hot wire including a plurality of linear portions and a plurality of bent portions, two of the plurality of linear portions being connected to both ends of each of the bent portions, respectively; one or more first insulators each having a slot into which the bent portions and the two linear portions are inserted, the slots being arranged so that the two linear portions face each other; and one or more second insulators for isolating the two linear portions from each other.

The plurality of bent portions may include: a plurality of upper bending portions constituting an upper portion of the hot wire; and a plurality of lower bent portions constituting a lower portion of the hot wire; the one or more first insulators may include: a ring-shaped first upper insulator having upper slots into which the upper bent portions are inserted; and a ring-shaped first lower insulator having lower slots into which the lower bent portions are inserted.

The upper bent portions and the lower bent portions may be alternately arranged, and the upper insertion grooves and the lower insertion grooves may be arranged to be offset from each other and the upper bent portions and the lower bent portions may be accommodated to be offset from each other.

The plurality of upper bent portions may include first and second upper bent portions, the plurality of lower bent portions may include first and second lower bent portions, the first lower bent portion may be disposed between the first and second upper bent portions, and the second upper bent portion may be disposed between the first and second lower bent portions.

The two linear portions may be composed of first and second linear portions, the first linear portion may connect one end of the first upper curved portion and one end of the first lower curved portion, the second linear portion may connect the other end of the first upper curved portion and one end of the second lower curved portion, and the first linear portion may be supported on a right side of one of the plurality of upper slots and a left side of one of the plurality of lower slots.

As an example, each of the second insulators may include: an annular insulator body; and a plurality of insulating spacers protruding from an inner circumferential surface of the insulating body with a space therebetween.

As another example, each of the second insulators may include: an annular insulator body; and a plurality of insulating spacers protruding from the outer peripheral surface of the insulating body with a gap therebetween.

The one or more second insulators may include: a second upper insulator for isolating the two linear portions inserted into the upper slots among the plurality of linear portions; and a second lower insulator for isolating the two linear portions inserted into the lower slots among the plurality of linear portions.

As an example, the hot wire may have a steel wire shape whose cross section is circular.

As another example, the hot wire may have a strip shape having a quadrangular cross section.

The heater and insulator assembly for a vacuum evaporation source of the aforementioned embodiments of the present invention may further include an insulating support that supports the plurality of lower bent portions below the plurality of lower bent portions.

ADVANTAGEOUS EFFECTS OF INVENTION

According to an embodiment of the present invention, since the bent portion of the heat wire and the two straight portions connected to both ends thereof are inserted into the respective slots of the first insulator together, the two straight portions are disposed to face each other in the slots, and the two straight portions disposed to face each other are isolated from each other by the second insulator, the bent portion can be inserted into the respective slots at once even in a state where the heat wire is bent a plurality of times, thereby facilitating assembly and reducing assembly time, and the bent portion and the two straight portions inserted into the slots together and opposed to each other can be isolated from each other by the first insulator, thereby effectively preventing a short circuit (short circuit) phenomenon of the heat wire due to contact with each other due to a factor such as deformation.

Drawings

Fig. 1 is a partial sectional view schematically showing a conventional vacuum evaporation source.

Fig. 2 is a perspective view illustrating a heater and insulator assembly for the vacuum evaporation source shown in fig. 1.

Fig. 3 is a perspective view schematically showing a heater and an insulator assembly for a vacuum evaporation source according to an embodiment of the present invention.

Fig. 4 is an exploded perspective view illustrating an assembly process of the heater and insulator assembly for the vacuum evaporation source shown in fig. 3.

Fig. 5 is a plan view schematically showing a heater for a vacuum evaporation source and a second insulator in the insulator assembly shown in fig. 3.

Fig. 6 is a plan view schematically showing a modification of the second insulator.

Fig. 7 is a perspective view schematically showing a heater and an insulator assembly for a vacuum evaporation source according to another embodiment of the present invention.

Detailed Description

The present invention will be described in detail below with reference to the accompanying drawings so that those skilled in the art can easily practice embodiments of the invention. However, the present invention can be realized in various forms, and therefore, the present invention should not be limited to the embodiments described herein.

Fig. 3 is a perspective view schematically showing a heater and insulator assembly for a vacuum evaporation source according to an embodiment of the present invention, fig. 4 is an exploded perspective view schematically showing an assembly process of the heater and insulator assembly for a vacuum evaporation source shown in fig. 3, and fig. 5 is a plan view schematically showing a second insulator in the heater and insulator assembly for a vacuum evaporation source shown in fig. 3. Fig. 6 is a plan view schematically showing a modification of the second insulator.

As shown in fig. 3 to 5, a heater and insulator assembly 100 for a vacuum evaporation source according to an embodiment of the present invention includes a hot wire 110, one or more first insulators 120, and one or more second insulators 130. The following describes each component in detail with reference to fig. 3 to 5.

As shown in fig. 3 and 4, the hot wire 110 is provided with a plurality of

curved portions

111 and 112 and a plurality of

linear portions

113 and 114. For example, as shown in fig. 3 and 4, the plurality of

bent portions

111 and 112 may include a plurality of upper bent portions 111 constituting an upper portion of the hot wire 110 and a plurality of lower bent portions 112 constituting a lower portion of the hot wire 110. The plurality of

linear portions

113 and 114 may be arranged in a pattern respectively connected to both ends of each

bent portion

111 or 112 so as to constitute a single hot wire together with the plurality of

bent portions

111 or 112. That is, as shown in fig. 3, one hot wire 110 may be repeatedly configured in a manner that two

straight portions

113 and 114 arranged in parallel to each other are connected to both ends of one bent portion 112.

In particular, the respective upper bent portions 111 and the respective lower bent portions 112 may be alternately arranged with each other. For example, as shown in fig. 3, when the plurality of upper bent portions 111 includes first and second

upper bent portions

111a and 111b and the plurality of lower bent portions 112 includes first and second

lower bent portions

112a and 112b, the first lower bent portion 112a may be interposed between the first and second

upper bent portions

111a and 111b and the second upper bent portion 111b may be interposed between the first and second

lower bent portions

112a and 112 b.

Further, the hot wire 110 may have a wire shape (wire shape) whose section is circular.

The one or more first insulators 120 are made of a material such as ceramic, and support the heat wire 110 in an insulated manner, and as shown in fig. 3 and 4, each of the

bent portions

111 or 112 and two straight portions (see 113 or 114) connected to both ends thereof are inserted into each of the slots S. Therefore, the

respective bent portions

111 or 112 of the hot wire 110 are inserted into the respective slots S of the first insulator 120 together with the two linear portions (see 113 or 114), so that the

respective bent portions

111 or 112 and the two linear portions can be inserted into the respective slots S at once even if the hot wire 110 has a state of being bent a plurality of times, as shown in fig. 4.

For example, as shown in fig. 3 and 4, the one or more first insulators 120 may include a first upper insulator 121 and a first lower insulator 122. The first upper insulator 121 may be provided with respective upper slots S1 into which the respective upper bent portions 111 are inserted, and the first lower insulator 122 may be provided with respective lower slots S2 into which the respective lower bent portions 112 are inserted.

In particular, as shown in fig. 3 and 4, when the upper bent portions 111 and the lower bent portions 112 are alternately arranged, the upper insertion grooves S1 and the lower insertion grooves S2 are arranged so as to be shifted from each other, and the upper bent portions 111 and the lower bent portions 112 are accommodated so as to be shifted from each other. Therefore, as shown in fig. 3, the first straight line portion 113 connecting one end of one of the upper bent portions (see 111a) and one end of one of the lower bent portions 112a may be supported on the right side of the upper socket (see S1) and the left side of the lower socket (see S2) which are formed to be offset from each other.

More specifically, as shown in fig. 3 and 4, when the plurality of upper bent portions 111 include first and second

upper bent portions

111a and 111b and the plurality of lower bent portions 112 include first and second

lower bent portions

112a and 112b, the first lower bent portion 112a is interposed between the first and second

upper bent portions

111a and 111b and the second upper bent portion 111b is interposed between the first and second

lower bent portions

112a and 112b, one end of the first upper bent portion 111a may be connected to one end of the first lower bent portion 112a by a first straight portion 113. Therefore, the first straight line portion 113 is inserted into one of the upper slots S1 (see S1) and one of the lower slots S2 (see S2), so that the first straight line portion 113 can be supported from the left and right on the right side of the upper slot (see S1) and the left side of the lower slot (see S2).

Further, in the case where the heat wire 110 is in the shape of a steel wire having a circular cross section, as shown in fig. 4, the width W1 of each slot S is larger than the cross-sectional diameter D of the heat wire 110, and the length L1 of each slot S is made larger than the width G1 of each

bent portion

111 or 112 and the difference corresponds to a dimension in consideration of the thermal expansion coefficient of the heat wire 110.

Therefore, the width W1 of each slot S is larger than the diameter D of the heat wire 110, so that the portion of the first insulator 120 where the slot S is formed is not damaged even if the heat wire 110 thermally expands, and at the same time, the length L1 of each slot S is made larger than the width G1 of each

bent portion

111 or 112 by a dimension corresponding to the thermal expansion coefficient of the heat wire 110, and the heat wire 110 is restrained and fixed in the longitudinal direction of the slot S after expansion.

The one or more second insulators 130 are made of a material such as ceramic, and support the heat wire 110 in an insulated manner together with the first insulator 120, and at the same time, they do not contact each other even when two straight portions (see 113 or 114 of fig. 3) of the heat wire 110, which are disposed opposite to each other in the respective slots S, are deformed by a factor such as heat.

As shown in fig. 3 to 5, the second insulator 130 may include an annular insulating body 130a and a plurality of insulating spacers 130b protruding at intervals on an inner circumferential surface of the insulating body 130 a. Therefore, the respective straight portions (see reference 113 or 114) of the hot wire 110 are in an isolated state while being insulated by the respective insulating spacers 130b, and thus, even when the respective straight portions (see reference 113 or 114) are deformed by heat or the like, they do not contact each other, thereby preventing a short circuit (short circuit) phenomenon of the hot wire 110. In particular, in the method of assembling the hot wire 110 to the second insulator 130, the straight portions (see 113 and 114) of the hot wire 110 are pressed toward the center of the insulating body 130a, the insulating body 130a is wrapped around the straight portions (see 113 and 114) of the hot wire 110, and then the straight portions (see 113 and 114) of the hot wire 110 are moved in the radial direction of the insulating body 130a, so that the straight portions (see 113 and 114) can be inserted into the spaces between the insulating spacers 130 b. The straight portions (please refer to 113 and 114) of the hot wire 110 have elasticity to easily return to the original position again after being pressed inward.

As another example, as shown in fig. 6, the second insulator 230 may include an annular insulating body 230a and a plurality of insulating spacers 230b protruding at intervals on an outer circumferential surface of the insulating body 230 a. Therefore, the respective straight portions (see 113 or 114) of the heat wire 110 are in an isolated state while being insulated by the respective insulating spacers 230b, and thus do not contact each other even when the respective straight portions (see 113 or 114) are deformed by heat or the like, thereby preventing a short-circuit phenomenon of the heat wire 110. In particular, in the method of assembling the second insulator 230 to the hot wire 110, the straight portions (see 113 and 114) of the hot wire 110 are pulled in a radial direction toward the outside of the insulating body 230a, the straight portions (see 113 and 114) of the hot wire 110 are wrapped around the insulating body 230a, and then the straight portions (see 113 and 114) of the hot wire 110 are moved in the center direction of the insulating body 230a, so that the straight portions (see 113 and 114) can be inserted into spaces between the insulating spacers 230 b. The straight portions (please refer to 113 and 114) of the hot wire 110 are elastic and can easily return to the original position again after being pulled outward.

As shown in fig. 3, the one or more second insulators 130 may include a second upper insulator 131 and a second lower insulator 132. The second upper insulator 131 may abut the first upper insulator 121 and isolate between two straight portions (see 113 or 114) inserted into the respective upper slots S1. The second lower insulator 132 may abut the first lower insulator 122 and isolate between two straight portions (see 113 or 114) inserted into the respective lower slots S2.

In particular, as shown in fig. 3 and 4, the second insulator 130 is supported on the first insulator 120 in order to prevent the second insulator 130 from slipping along the

straight portions

113 and 114 of the hot wire 110, and the like.

Meanwhile, as shown in fig. 3 and 4, the heater and insulator assembly 100 for a vacuum evaporation source according to an embodiment of the present invention may further include an insulating support 140 supporting the plurality of lower bent portions 112 below the plurality of lower bent portions 112. For example, the insulating support 140 may be made of ceramic or the like.

A heater and insulator assembly 300 for a vacuum evaporation source according to another embodiment of the present invention will be described with reference to fig. 7.

As shown in fig. 7, a heater and insulator assembly 300 for a vacuum evaporation source according to another embodiment of the present invention is the same as the aforementioned one embodiment of the present invention except for the shape of the hot wire 310, and thus the shape of the hot wire 310 will be mainly explained below. Further, although the state in which the first insulator 120 is disposed over the second insulator 130 is illustrated for convenience of showing the width W2 and the length L1 of the lower slot S, the thickness T of the hot wire 310, and the width G2 of the bent portion in detail, it is preferable that the second insulator 130 is disposed on and supported by the first insulator 120 in order to prevent the second insulator 130 from slipping off, as mentioned in the aforementioned embodiment of the present invention.

The hot wire 310 may have a band shape (also referred to as a stripe) whose section is a quadrangle.

In this case, the width W2 of each slot S is greater than the thickness T of the heat wire 310, the length L1 of each slot S may be greater than the width G2 of each bent portion and the difference thereof corresponds to a dimension that takes into account the thermal expansion coefficient of the heat wire 210.

Therefore, the width W2 of each slot S is larger than the thickness T of the heat wire 210, so that the portion of the first insulator 120 where the slot S is formed is not damaged even if the band-shaped heat wire 310 is thermally expanded, and at the same time, the length L2 of each slot S is made larger than the width G2 of each

bent portion

311 or 312 by a dimension considering the thermal expansion coefficient of the heat wire 310, so that the heat wire 310 can be restrained and fixed in the longitudinal direction of the slot S after being expanded.

Claims

1. A heater and insulator assembly for a vacuum evaporation source, comprising:

a hot wire including a plurality of linear portions and a plurality of bent portions, two of the plurality of linear portions being connected to both ends of each of the bent portions, respectively;

one or more first insulators each having a slot into which the bent portions and the two linear portions are inserted, the slots being arranged so that the two linear portions face each other; and

one or more second insulators for isolating the two linear portions facing each other,

the plurality of bent portions include:

a plurality of upper bending portions constituting an upper portion of the hot wire; and

a plurality of lower bent portions constituting a lower portion of the hot wire;

the one or more first insulators include:

a ring-shaped first upper insulator having upper slots into which the upper bent portions are inserted; and

a ring-shaped first lower insulator having lower slots into which the lower bent portions are inserted,

the one or more second insulators include:

a second upper insulator for isolating the two linear portions inserted into the upper slots from each other; and

and a second lower insulator for isolating the two linear portions inserted into the lower slots.

2. The heater and insulator assembly according to claim 1,

the respective upper bent portions and the respective lower bent portions are alternately arranged with each other,

the upper slots and the lower slots are arranged in a staggered manner, and the upper bent portions and the lower bent portions are accommodated in a staggered manner.

3. The heater and insulator assembly for a vacuum evaporation source according to claim 2,

the plurality of upper bent portions include first and second upper bent portions,

the plurality of lower bent portions include first and second lower bent portions,

the first lower curved portion is disposed between the first and second upper curved portions,

the second upper curved portion is disposed between the first and second lower curved portions.

4. The heater and insulator assembly according to claim 3,

the two linear portions are composed of a first linear portion and a second linear portion,

the first straight line portion connects one end of the first upper bent portion and one end of the first lower bent portion,

the second straight portion connects the other end of the first upper curved portion and one end of the second lower curved portion,

the first straight portion is supported at a right side of one of the plurality of upper slots and a left side of one of the plurality of lower slots.

5. The heater and insulator assembly for a vacuum evaporation source according to claim 1,

each of the second insulators includes:

an annular insulator body; and

and a plurality of insulating spacers protruding from an inner circumferential surface of the insulating body with a gap therebetween.

6. The heater and insulator assembly for a vacuum evaporation source according to claim 1,

each of the second insulators includes:

an annular insulator body; and

and a plurality of insulating spacers protruding from the outer peripheral surface of the insulating body with a gap therebetween.

7. The heater and insulator assembly for a vacuum evaporation source according to claim 1,

the hot wire has a steel wire shape whose section is circular.

8. The heater and insulator assembly for a vacuum evaporation source according to claim 1,

the hot wire has a strip shape whose cross section is quadrangular.

9. The heater and insulator assembly according to claim 1,

the heater and insulator assembly for a vacuum evaporation source further includes an insulating support supporting the plurality of lower bent portions below the plurality of lower bent portions.