CN111707423A - Vacuum system leak detection method and leak detection device for vacuum system - Google Patents
Vacuum system leak detection method and leak detection device for vacuum system Download PDFInfo
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- CN111707423A CN111707423A CN202010557336.3A CN202010557336A CN111707423A CN 111707423 A CN111707423 A CN 111707423A CN 202010557336 A CN202010557336 A CN 202010557336A CN 111707423 A CN111707423 A CN 111707423A
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Abstract
The invention discloses a vacuum system leak detection method and a leak detection device for the vacuum system, wherein the method comprises the steps of S1, connecting the vacuum system with a leak detector through a leak detection pipeline comprising two branches; s2, opening at least one valve body of a branch, starting leak detection, observing whether the pressure value of the leak detector meets the pressure requirement of a port, and if so, detecting different measuring points of the vacuum system; if not, the valve body is closed, the flow of the flow adjusting device is adjusted to a pressure value fed back by the leak detector to meet the flow value required by the port pressure of the leak detector, and then leak detection is carried out. This scheme is through setting up two branch roads, and when the branch road that the valve body place leaded to the great leak rate of vacuum system leak hunting to lead to leak hunting appearance front end pressure to be greater than the port pressure that molecular pump and mass spectrograph start the leak hunting, can be through shutting off the valve body branch road and with the flow control of another branch road to the port pressure that starts the leak hunting of molecular pump and mass spectrograph to make the leak hunting appearance carry out the leak source detection through helium or hydrogen.
Description
Technical Field
The invention relates to the field of vacuum leak detection, in particular to a vacuum system leak detection method and a leak detection device for a vacuum system.
Background
The leak detector is a device leak rate and leak point testing device and is mainly used in the leak detection testing process of semiconductor vacuum equipment. Helium leak detectors are frequently used in the market, helium is used as leak testing gas, the helium enters a vacuum pipeline through a leak point of vacuum equipment, and a helium mass spectrometer in the leak detector detects and receives the helium, so that the leak point is confirmed.
The leak rate test in-process of leak detector has certain requirement to test port pressure, has great when revealing in equipment, can lead to leak detector port pressure too high, and in the protection to the mass spectrometer, the unable normal work of leak detector, can't carry out the leak source and confirm this moment promptly.
It should also be noted that the leak detector normally operates in a standby state of the apparatus, and the leak detector cannot be used for leak detection confirmation when the apparatus is started.
Further, this test method can only find specific leak points, but cannot directly measure the leak rate of the whole vacuum equipment, and if the leak rate of the whole equipment is to be measured, all the leak points must be found, because the cost of helium is very high, and each test has no definite position, and needs to be comprehensively checked, thereby consuming a lot of manpower, material resources and time, causing more resource waste, and such a test method is obviously uneconomical. In addition, the measured result may have omission, which causes error in the final result.
Disclosure of Invention
The invention aims to solve the problems in the prior art and provide an easy-to-implement vacuum system leak detection method and a leak detection device for a vacuum system.
The purpose of the invention is realized by the following technical scheme:
the vacuum system leakage detection method comprises the following steps:
s1, connecting the vacuum system with a leak detector through a leak detection pipeline, wherein the leak detection pipeline comprises two parallel branches, a valve body for controlling the on-off of the leak detection pipeline is arranged on the first branch, a flow regulating device is arranged on the second branch, and the leak detector is connected with a controller;
s2, at least opening the valve body, starting the leak detection function of the leak detector, observing whether the pressure value fed back by the leak detector meets the pressure requirement of a test port of the leak detector, and executing S3 if the pressure value meets the requirement; if not, executing S4;
s3, detecting different measuring points of the vacuum system by a positive pressure leak detection method or a negative pressure leak detection method, and when the leak rate measured by the leak detector at one measuring point rises by 4 × 10 seconds-9When mBar.L/s, confirming the measuring point as a leakage point;
and S4, closing the valve body, adjusting the flow of the flow adjusting device to a pressure value fed back by the leak detector to meet the flow value required by the port pressure of the leak detector, and then carrying out leak detection according to the step S3.
Preferably, in the method for detecting leakage of vacuum system, the vacuum system is a vacuum equipment which is stopped or a vacuum equipment which is in standby state or a vacuum equipment which is in operation
Preferably, in the method for detecting leakage of a vacuum system, the valve body is an automatic valve and is connected with the controller.
Preferably, in the vacuum system leak detection method, the flow rate adjusting device is a gas mass flow controller, which is connected to the controller, and the minimum adjustment precision of the flow rate adjusting device is 0.01 sccm.
Preferably, in the leak detection method for the vacuum system, the flow regulation range of the flow regulation device is between 0 and 100 slm.
Preferably, in the vacuum system leak detection method, in S4, the flow rate of the flow rate adjustment device is adjusted to not more than 0.1sccm, but the flow rate adjustment device is not turned off.
Preferably, the method for detecting leakage of a vacuum system further includes S10 before S1 and S2, the method tests the background leakage rate of the vacuum system through the leakage detection pipeline and the leak detector, and when the detected background leakage rate of the vacuum system does not meet the use requirement, the steps S1-S4 are executed.
Preferably, in the vacuum system leak detection method, S10 includes
S101, after preheating a controller and a leak detector, opening a valve body, adjusting the flow of a flow adjusting device to the maximum value, starting a leak detection function of the leak detector, and vacuumizing a vacuum system and a leak detection pipeline;
s102, when the background leakage rate of the vacuum system enables the pressure value measured by the leak detector to be stable and to be larger than the port pressure required by the leak detector, the valve body is turned off, the flow of the flow adjusting device is gradually reduced, and when the pressure value P fed back by the leak detector is reduced at a target speed, the flow F of the flow adjusting device at the moment is recorded;
s03, the background leak rate of the vacuum system is obtained according to the formula Q of 0.06 × (1013-P) × F.
Preferably, in the vacuum system leak detection method, in S102, the flow rate of the flow rate adjustment device is controlled to decrease with an adjustment accuracy of 0.01 seem to 1slm each time.
Preferably, in the vacuum system leak detection method, in S102, when the pressure value fed back by the leak detector decreases by 1% to 5% within 1 second, the flow F of the flow adjustment device at that time is recorded.
Preferably, the vacuum system leak detection method further comprises
S5, repairing the detected leakage points;
s6, determining whether the background leakage rate of the vacuum system meets the use requirement, if so, executing S7; if not, executing S8;
s7, putting the vacuum system into use;
s8, repeating the steps S4-S6.
A device that leaks hunting for vacuum system, including the pipeline that leaks hunting, leak hunting pipe connection leak detector, the pipeline that leaks hunting includes two parallel branches, is provided with the valve body of its break-make of control on the first branch road, is provided with flow control device on the second branch road, leak detector connection director.
The technical scheme of the invention has the advantages that:
this scheme is through setting up two branch roads, and when the great leak rate of vacuum system leads to leak detector front end pressure to be greater than the port pressure that molecular pump and mass spectrograph start the leak hunting, can be through turning off a branch road and with the flow control of another branch road to the port pressure that molecular pump and mass spectrograph start the leak hunting to make the leak detector can carry out the leak source through helium or hydrogen and detect.
The method can calculate the leakage rate of the system through the pressure change and a formula only by on-off control of one branch and flow regulation of the other branch, has low direct material cost, can realize testing through automatic control of the system, does not need manual operation, has high automation degree and efficiency, is not easy to be interfered in the testing process, and has the finally-measured leakage rate with the precision not lower than E-10 and high testing precision.
The scheme can be used for measuring when the vacuum system is in different states, particularly can be used for measuring when the vacuum system works, and is wide in application range and easy to realize.
The flow range of the flow regulating device can effectively ensure a large application range, fine regulating precision can ensure the testing precision, and the precision influence caused by overlarge regulating precision is avoided.
According to the scheme, the measurement of the background leakage rate and the determination of the leakage point of the vacuum system are realized through one set of leakage detection device, so that the determination and the repair of the background leakage rate and the leakage point are carried out in a circulating manner, effective data support is provided for the use or non-use of the vacuum system, the feasibility is strong, and the comprehensive benefit is good.
Drawings
FIG. 1 is a schematic view of a leak detection device of the present invention (with dashed lines indicating electrical connection and/or communication between components);
FIG. 2 is a schematic view of a leak detection device for detecting leaks using positive pressure leak detection of the present invention (the dotted lines indicate the electrical connections and/or communication between the components)
FIG. 3 is a process schematic of the leak detection method of the present invention;
FIG. 4 is a schematic diagram of the process of measuring background leak rate of a vacuum system according to the present invention.
Detailed Description
Objects, advantages and features of the present invention will be illustrated and explained by the following non-limiting description of preferred embodiments. The embodiments are merely exemplary for applying the technical solutions of the present invention, and any technical solution formed by replacing or converting the equivalent thereof falls within the scope of the present invention claimed.
In the description of the schemes, it should be noted that the terms "center", "upper", "lower", "left", "right", "front", "rear", "vertical", "horizontal", "inner", "outer", etc., indicate orientations or positional relationships based on the orientations or positional relationships shown in the drawings, and are only for convenience of description and simplicity of description, but do not indicate or imply that the devices or elements referred to must have a particular orientation, be constructed and operated in a particular orientation, and thus, should not be construed as limiting the present invention. Furthermore, the terms "first," "second," and "third" are used for descriptive purposes only and are not to be construed as indicating or implying relative importance. In the description of the embodiment, the operator is used as a reference, and the direction close to the operator is a proximal end, and the direction away from the operator is a distal end.
The leak detection apparatus for vacuum system disclosed in the present invention is described below with reference to the accompanying drawings, as shown in fig. 1, and is used for leak detection of various vacuum systems or leak rate test of sealed devices, and includes a leak detection pipeline 200, where the leak detection pipeline 200 is used for connecting a vacuum system 100 to be tested and a leak detector 300, and the vacuum system 100 may be a vacuum furnace of various PVD and CVD deposition apparatuses.
As shown in fig. 1, the leakage detection pipeline 200 includes two parallel branches, a valve body 211 for controlling on/off of the first branch 210 is disposed on the first branch, and the valve body 211 may be a standard switch valve, specifically, a manual valve, such as a manual gate valve, or an automatic valve, such as an electromagnetic valve. The second branch 220 is provided with a flow regulator 221, the flow regulator 221 is used for switching on and off and adjusting the flow of the second branch 220, and may be various devices with flow regulation, such as a flow valve, a flow controller, and the like, and the leak detection pipeline 200 is used for introducing gas in a vacuum system into the leak detector 300 to realize leak detection by the leak detector.
Further, the valve body 211 is preferably an automatic valve, the flow regulator 221 is a gas mass flow controller, the flow regulation range of the gas mass flow controller is between 0 and 100slm, more preferably between 0 and 50slm, and even more preferably between 0 and 15.6slm, and the minimum regulation precision of the gas mass flow controller is 0.01 sccm; since both of them are connected to the controller 400, the controller 400 can control the opening and closing of the valve body 211 and adjust the flow rate adjusting device 221 in actual use. Therefore, during actual testing, the leak rate testing process of the vacuum system can be fully automatically controlled by setting a corresponding leak detection program in the controller 400.
The leak detector 300 may be any known leak detection device, such as a helium mass spectrometer leak detector or a hydrogen leak detector, which is generally equipped with a vacuum pump, a molecular pump, a mass spectrometer, a pressure detection device, etc., and its specific structure is known in the art and will not be described herein. The leak detector 300 is connected to a controller 400, the controller 400 is used for controlling the operation of the leak detector 300, and a pressure value measured by the leak detector 300 can be fed back to the controller 400.
When a helium mass spectrometer leak detector is used, a negative pressure or positive pressure leak detection method can be adopted, and when a hydrogen leak detector is used, a positive pressure leak detection method is generally adopted. When a negative pressure leak detection method is adopted, helium is sprayed from the outer surface of a vacuum system through a spray gun to carry out detection; when the positive pressure leak detection method is adopted, helium gas or hydrogen gas and other leak detection gases are filled into a vacuum system, and the leak detection is realized by sucking on the surface of the vacuum system through a suction gun connected with a leak detection pipeline, wherein the suction gun can be a suction head or a pipeline directly.
During positive pressure leak hunting, as shown in fig. 2, the suction gun 500 can be connected to the front ends of the valve body 211 and the flow regulating device 221 of the leak hunting pipeline through the suction pipe 600, specifically on the pipeline in front of the front end connection point a of the first branch and the second branch, and the suction pipe 600 is provided with the valve body 700, during measurement, the valve body 700 is opened, the valve body 211 is closed, and the flow of the flow regulating device 221 is regulated to be less than 0.1sccm, so that leak point detection is realized. Of course, in other embodiments, the suction gun 500 is not necessary, but the suction is directly performed through the suction pipe 600, and a valve body (not shown) may be further disposed before the connection point B of the suction pipe 600 and the leakage detection pipeline 200, and the valve body may be disposed on the pipeline of the leakage detection pipeline 200, or may be disposed at the connection point of the vacuum system and the leakage detection pipeline.
In another positive pressure leak detection method, the end of the leak detection pipeline 200 connected to the vacuum system can be directly disconnected, and then connected to one end of the suction pipe 600, and then the valve body 211 is closed, the flow of the flow regulator 221 is regulated to be less than 0.1sccm, and the connection port of the vacuum system and the leak detection pipeline 200 is closed, so that leak detection is realized through the suction pipe or the suction gun at the front end of the suction pipe.
When the positive pressure leak detection is carried out, the vacuum system can be a running device, such as a coating device which works and takes hydrogen or helium as carrier gas, and in this case, the leak detection can be directly carried out during coating.
The method for performing vacuum system leak detection by using the leak detection device for a vacuum system as described above, as shown in fig. 3, includes the following steps, the following description will be given by taking the leak detector 300 as a helium mass spectrometer leak detector and taking the controller 400 as an example for automatic test,
s0, providing the above leak detection device for a vacuum system and the vacuum system 100 to be tested, where the vacuum system 100 to be tested may be a vacuum device in operation, or a vacuum device in a standby or shutdown state, and the vacuum device in a shutdown state is taken as an example for description below.
And S1, connecting the air port of the vacuum system 100 with the air inlet end of the leakage detection pipeline 200 to realize the connection of the vacuum system and the helium mass spectrometer leak detector, and completing the test preparation.
S2, after the leak detector is preheated, opening the valve body 211, closing the flow regulating device 221, starting the leak detection function of the leak detector, observing whether the pressure value fed back by the leak detector meets the pressure requirement of a test port of the leak detector, and if so, executing S3; if not, go to S4.
S3, keeping the valve body 211 open and the flow regulator 221 closed, detecting different measuring points of the vacuum system by positive pressure leak detection method or negative pressure leak detection method, and increasing the leak rate measured by the leak detector at one measuring point by 4 × 10 seconds within 5 seconds-9When mBar.L/s, the measured point is confirmed as a missing point.
When a negative pressure leak detection method is adopted, detection gas (helium gas) is respectively sprayed to different measuring points on the outer surface of the vacuum system, and the change condition of the leak rate measured by the leak detector is observed, specifically, by using the existing spray gun, helium gas of 0.1-2ml, preferably 1 +/-0.2 ml, is sprayed to the position of the vacuum system 100 where the leak possibly exists, such as the joint position of a pipeline, the joint position of a door body, a window body and a furnace body, and the like, and when the leak rate measured by the leak detector reaches the standard, the leakage point is determined.
When the leak hunting is carried out in the positive pressure, different measuring points on the surface of the vacuum equipment are sucked through a suction gun or a pipe, and the change of the reading of the leak detector is observed, the specific process is the same as the above process, and the description is omitted here.
S4, when the pressure measured by the leak detector is larger than the port pressure required by the leak detector, the molecular pump and the mass spectrometer of the helium mass spectrometer leak detector cannot be started for testing, so that the leak detection cannot be carried out through the conventional positive pressure, then the valve body 211 is closed, the flow of the flow adjusting device 221 is adjusted to the pressure value fed back by the leak detector to meet the flow value required by the port pressure of the leak detector, and then the leak detection is carried out according to the step S3.
During actual work, the controller 400 judges that the pressure value measured by the leak detector is greater than the port pressure required by the leak detector, closes the valve body 211, adjusts the flow of the flow adjusting device 221 to be not more than 0.1sccm, preferably 0.01sccm, and waits for 5-10 minutes until the molecular pump, the mass spectrometer and the like of the leak detector operate stably. At this time, although the leak rate at the front end of the flow rate adjusting device 221 is large, since the flow rate of the flow rate adjusting device 221 is small, the amount of gas flowing from the front end into the rear end of the flow rate adjusting device 221 is limited to a small value, and therefore, the pressure in the pipe at the rear end of the flow rate adjusting device 221 is very small, and the port pressure requirement for starting leak detection by the leak detector can be satisfied, and at this time, leak detection can be performed by the positive pressure leak detection method or the negative pressure leak detection method in step S3.
Further, before the specific leak point is confirmed, as shown in fig. 3, it is required to determine whether the background leak rate (i.e., the overall leak rate of the vacuum system) of the vacuum system meets the use requirement, and if the use requirement is met, the leak point is not required to be detected and repaired.
Therefore, the leak detection method further includes a process of measuring a background leak rate of the vacuum system at S10 between the S1 and S2, and, in particular, as shown in fig. 4,
s101, starting the controller 400 and the helium mass spectrometer leak detector, and preheating the helium mass spectrometer leak detector until the operation of the helium mass spectrometer leak detector is stable, wherein the preheating time is about 10 minutes. After the operation of the apparatus is stable, the controller 400 opens the valve body 211, and adjusts the flow rate of the flow rate adjusting device 221 to the maximum value, that is, the flow rate of the flow rate adjusting device 221 is adjusted to 200 slm. Of course, the valve body can be directly opened and the flow of the flow regulating device can be well regulated by the opening controller and the helium gas intrinsic safety leak detector.
And then the controller 400 starts the leakage detection function of the helium mass spectrometer leak detector, a vacuum pump in the helium mass spectrometer leak detector is started to gradually discharge the gas in the vacuum system 100 and the leakage detection pipeline 200 to realize vacuum pumping, and meanwhile, the pressure value measured by the helium mass spectrometer leak detector is fed back to the controller 400.
And S102, when the leak rate of the vacuum system 100 is large, after the vacuum pump of the leak detector 300 pumps vacuum for about 1 minute, the front-end pressure of the helium mass spectrometer leak detector is too large and is kept unchanged, and the front-end pressure is greater than the port pressure requirement required by the helium mass spectrometer leak detector during working. At this time, the valve body 211 is turned off by the controller 400, then, the controller 400 gradually reduces the flow of the flow regulating device 221 according to a certain precision, and at the same time, confirms the pressure value fed back by the helium mass spectrometer leak detector, and when it is determined that the pressure value fed back to the controller 400 by the helium mass spectrometer leak detector decreases at a target rate, specifically when the pressure value fed back by the leak detector 300 decreases by 1% to 5% within 1 second, the flow F of the flow regulating device at that time is recorded.
And when the flow rate is adjusted downward, because the maximum flow rate of the flow rate adjusting device 221 is large, the flow rate can be adjusted downward by a large value at each time, for example, the flow rate is adjusted downward by 1slm at each time, that is, 1slm is adjusted downward at each time, when the pressure value is found to have the above-mentioned target rate decrease, the flow rate of the flow rate adjusting device 221 is adjusted back once according to the 1slm accuracy, and then the flow rate is adjusted downward according to a smaller accuracy, for example, the accuracy of 0.01sccm, until the pressure value has the above-mentioned target rate decrease again. Of course, the down-regulation can also be performed with an accuracy of 0.01sccm from the beginning.
In step S103, the background leak rate of the vacuum system is obtained according to the formula Q of 0.06 × (1013-P) × F.
The principle of testing the background leakage rate here is: since the flow rate of the flow rate adjusting device 221 is a leak rate, when the flow rate of the flow rate adjusting device 221 is adjusted to a maximum flow rate, the flow rate of the second branch 220 is larger, at this time, the leak rate of the flow rate adjusting device 221 is not smaller than the leak rate of the vacuum system, and the flow rate of the flow rate adjusting device 221 is matched with the pumping speed of the vacuum pump at the rear end thereof, that is, the volume of gas allowed to pass through the flow rate adjusting device 221 per unit time is not smaller than the amount of gas pumped by the vacuum pump in the same time, so that the pressure value measured by the helium mass spectrometer leak detector is substantially constant and larger than the required port pressure of the.
As the flow rate of the flow rate adjustment device 221 is gradually decreased, when the flow rate of the flow rate adjustment device 221 is adjusted to a certain value, the flow rate of the flow rate adjusting device 221 is changed from not less than the leakage rate of the vacuum system to less than the leakage rate of the vacuum system, at this time, the gas entering the vacuum system is more than the flow rate that can flow through the flow rate adjusting device, and at the same time, since the pumping speed of the vacuum pump at the rear end of the flow rate adjustment device 221 is not changed, the flow rate of the flow rate adjustment device 221 is not matched with the pumping speed of the vacuum pump, that is, the volume of gas discharged by the vacuum pump per unit time is larger than the volume of gas allowed to enter the rear end pipeline of the flow rate adjusting device, the gas entering the rear end pipeline of the flow rate adjusting device is less, and the amount of gas flowing out is large, so that the pressure of the pipeline at the rear end of the flow regulating device 221 measured by the helium mass spectrometer leak detector is obviously reduced, and at the moment, the flow value of the flow regulating device can be used as the background leak rate of the vacuum system.
According to a formula Q ═ delta PVt, wherein Q is background leakage rate and has a unit of mBar.L/s, delta P is air pressure difference between the inside and the outside of a vacuum system, and (1013-P) mBar is taken, and P is an air pressure value fed back by a leakage detector and has a unit of mBar; v is the volume, t is the time, 1S is taken, and Vt in unit time is the flow F, and the unit is sccm. Therefore, the unit conversion yields Q ═ Δ PVt ═ (1013-P) × F60/1000 ═ 0.06 ═ 1013-P) × F.
After the leak is detected in S4, the leak needs to be repaired so as to reduce the leak rate of the vacuum system, and the background leak rate detection and leak detection and repair work of the vacuum system need to be performed cyclically so as to make the leak rate of the vacuum system meet the usage requirement, so as shown in fig. 3, the method further includes the step of repairing the leak rate of the vacuum system
And S5, repairing the leakage point detected in S4, wherein the specific repairing method is a known technology and is not an innovative point of the scheme, and the detailed description is omitted here.
S6, determining whether the background leakage rate of the vacuum system meets the use requirement, if so, executing S7; if not, executing S8; the overall concept of the judgment process here is the same as that of the above-mentioned process of S10, except that: the valve body 211 does not need to be opened any more, but the flow rate of the flow rate adjusting device 221 is directly adjusted to a certain flow rate which is larger than the leakage rate of the vacuum system calculated before the current background leakage rate, for example, the flow rate of the flow rate adjusting device 221 is adjusted to 1.5 times or 2 times or other times of the background leakage rate value measured before, so that the adjusting time can be greatly shortened.
S7, putting the vacuum system into use;
s8, repeating the steps S4-S6. Of course, in other embodiments, steps S2-S6 may be repeated
The invention has various embodiments, and all technical solutions formed by adopting equivalent transformation or equivalent transformation are within the protection scope of the invention.
Claims (10)
1. The vacuum system leak detection method is characterized in that: the method comprises the following steps:
s1, connecting a vacuum system (100) with a leak detector (300) through a leak detection pipeline (200), wherein the leak detection pipeline (200) comprises two parallel branches, a valve body (211) for controlling the on-off of the first branch (210) is arranged on the first branch, a flow regulating device (221) is arranged on the second branch (220), and the leak detector (300) is connected with a controller (400);
s2, at least opening the valve body (211), starting the leakage detection function of the leakage detector, observing whether the pressure value fed back by the leakage detector meets the pressure requirement of a test port of the leakage detector, and if so, executing S3; if not, executing S4;
s3, detecting different measuring points of the vacuum system by a positive pressure leak detection method or a negative pressure leak detection method, and when the leak rate measured by the leak detector at one measuring point rises by 4 × 10 seconds-9When mBar.L/s, confirming the measuring point as a leakage point;
s4, closing the valve body (211), adjusting the flow of the flow adjusting device (221) until the pressure value fed back by the leak detector meets the flow value required by the port pressure of the leak detector, and then carrying out leak detection according to the step S3.
2. The vacuum system leak detection method according to claim 1, wherein: the vacuum system is a vacuum apparatus that is shut down or a vacuum apparatus that is on standby or a vacuum apparatus that is in operation.
3. The vacuum system leak detection method according to claim 1, wherein: the valve body (211) is an automatic valve, and the flow regulating device (221) is a gas mass flow controller which is connected with the controller (400).
4. The vacuum system leak detection method according to claim 1, wherein: the flow regulating range of the flow regulating device (221) is 0-100slm, and the minimum regulating precision of the flow regulating device (221) is 0.01 sccm.
5. The vacuum system leak detection method according to claim 1, wherein: in S4, the flow rate of the flow rate adjusting means (221) is adjusted to not more than 0.1 sccm.
6. The vacuum system leak detection method according to claims 1 to 5, wherein: and S10 between S1 and S2, testing the background leakage rate of the vacuum system through the leakage detection pipeline and the leakage detector, and executing the steps S1-S4 when the tested background leakage rate of the vacuum system does not meet the use requirement.
7. The vacuum system leak detection method according to claim 6, wherein: said S10 includes
S101, opening a valve body (211), adjusting the flow of a flow adjusting device (221) to the maximum value, starting a leakage detection function of a leakage detector, and vacuumizing a vacuum system and a leakage detection pipeline (200);
s102, when the background leakage rate of the vacuum system (100) enables the pressure value measured by the leak detector to be stable and to be larger than the port pressure required by the leak detector, the valve body (211) is closed, the flow of the flow adjusting device is gradually reduced, and when the pressure value P fed back by the leak detector (300) is reduced at a target speed, the flow F of the flow adjusting device at the moment is recorded;
in step S103, the background leak rate of the vacuum system is obtained according to the formula Q of 0.06 × (1013-P) × F.
8. The vacuum system leak detection method according to claim 7, wherein: in S102, controlling the flow rate of the flow rate adjusting device (221) to decrease according to the adjusting precision of 0.01sccm-1slm each time; and when the air pressure value fed back by the leak detector (300) is reduced by 1% -5% within 1 second, recording the flow F of the flow regulating device at the moment.
9. The vacuum system leak detection method according to claim 1, wherein: also comprises
S5, repairing the leakage point detected in the step S4;
s6, determining whether the background leakage rate of the vacuum system meets the use requirement, if so, executing S7; if not, executing S8;
s7, putting the vacuum system into use;
s8, repeating the steps S4-S6.
10. A leak hunting device for vacuum system which characterized in that: the leakage detection device comprises a leakage detection pipeline (200), wherein the leakage detection pipeline (200) is connected with a leakage detector (300), the leakage detection pipeline (200) comprises two parallel branches, a valve body (211) for controlling the on-off of the first branch (210) is arranged on the first branch, a flow regulating device (221) is arranged on the second branch (220), and the leakage detector (300) is connected with a controller (400).
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| CN113233421A (en) * | 2021-05-11 | 2021-08-10 | 华融化学股份有限公司 | Automatic ignition control system and method for HCL synthesis furnace |
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| CN117091772A (en) * | 2023-10-17 | 2023-11-21 | 宁德时代新能源科技股份有限公司 | Air tightness detection method and air tightness detection system |
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