CN111693791A - 一体式碳纳米管薄膜电磁场传感器及三维电磁场传感器 - Google Patents
一体式碳纳米管薄膜电磁场传感器及三维电磁场传感器 Download PDFInfo
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- CN111693791A CN111693791A CN202010581342.2A CN202010581342A CN111693791A CN 111693791 A CN111693791 A CN 111693791A CN 202010581342 A CN202010581342 A CN 202010581342A CN 111693791 A CN111693791 A CN 111693791A
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
- G01R29/00—Arrangements for measuring or indicating electric quantities not covered by groups G01R19/00 - G01R27/00
- G01R29/12—Measuring electrostatic fields or voltage-potential
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
- G01R33/00—Arrangements or instruments for measuring magnetic variables
- G01R33/0011—Arrangements or instruments for measuring magnetic variables comprising means, e.g. flux concentrators, flux guides, for guiding or concentrating the magnetic flux, e.g. to the magnetic sensor
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
- G01R33/00—Arrangements or instruments for measuring magnetic variables
- G01R33/0047—Housings or packaging of magnetic sensors ; Holders
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
- G01R33/00—Arrangements or instruments for measuring magnetic variables
- G01R33/02—Measuring direction or magnitude of magnetic fields or magnetic flux
- G01R33/04—Measuring direction or magnitude of magnetic fields or magnetic flux using the flux-gate principle
- G01R33/05—Measuring direction or magnitude of magnetic fields or magnetic flux using the flux-gate principle in thin-film element
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- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
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Abstract
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CN202010581342.2A CN111693791B (zh) | 2020-06-23 | 2020-06-23 | 一体式碳纳米管薄膜电磁场传感器及三维电磁场传感器 |
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CN202010581342.2A CN111693791B (zh) | 2020-06-23 | 2020-06-23 | 一体式碳纳米管薄膜电磁场传感器及三维电磁场传感器 |
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CN111693791A true CN111693791A (zh) | 2020-09-22 |
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Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN112684262A (zh) * | 2020-11-19 | 2021-04-20 | 西安交通大学 | 硅微米柱阵列三电极电离式mems电场传感器及制备方法 |
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CN102175757A (zh) * | 2011-02-16 | 2011-09-07 | 西安交通大学 | 一种微纳米碳纳米管薄膜三电极传感器及其制备方法 |
CN103645242A (zh) * | 2013-12-04 | 2014-03-19 | 上海交通大学 | 一种基于微间隙极化结构构造放电电场的电离式传感器 |
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CN108061870A (zh) * | 2018-02-11 | 2018-05-22 | 中国科学院电子学研究所 | 电场传感器标定系统 |
CN109061324A (zh) * | 2018-09-27 | 2018-12-21 | 云南电网有限责任公司电力科学研究院 | 一种静电场电场强度测量装置及方法 |
CN208506142U (zh) * | 2018-06-04 | 2019-02-15 | 深圳供电局有限公司 | 一种薄膜材料表面电位的测量设备 |
CN109752445A (zh) * | 2019-03-21 | 2019-05-14 | 浙江工商大学 | 耦合式气体传感器及其对对硝基甲苯的检测方法 |
CN110456171A (zh) * | 2019-08-05 | 2019-11-15 | 清华大学 | 电晕放电导体表面电场强度的测量方法及装置 |
-
2020
- 2020-06-23 CN CN202010581342.2A patent/CN111693791B/zh active Active
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GB1149414A (en) * | 1967-03-09 | 1969-04-23 | Evgeny Borisovich Isserlin | Noncontact current-sensor |
GB1361070A (en) * | 1970-09-08 | 1974-07-24 | Stasutani T | Measurement of the ion content and electric field of the atmosphere |
US4716371A (en) * | 1985-07-22 | 1987-12-29 | The Simco Company, Inc. | Non-contact autoranging electrostatic fieldmeter with automatic distance indicator |
US20030038245A1 (en) * | 2001-06-25 | 2003-02-27 | Ionfinity Llc | Field ionizing elements and applications thereof |
US20050122118A1 (en) * | 2001-12-10 | 2005-06-09 | Zank Paul A. | Electric field sensor |
US20060251543A1 (en) * | 2002-12-20 | 2006-11-09 | Rensselaer Polytechnic Institute | Miniaturized gas sensors featuring electrical breakdown in the vicinity of carbon nanotube tips |
CN1828318A (zh) * | 2005-03-03 | 2006-09-06 | 中国科学院电子学研究所 | 磁驱动或热磁混合驱动微型电场传感器 |
CN2879416Y (zh) * | 2006-03-17 | 2007-03-14 | 上海市七宝中学 | 一种扫描式离子枪 |
WO2009036815A1 (en) * | 2007-09-21 | 2009-03-26 | Inphynix | Sensor for non-contact electric and magnetic field measurements |
WO2009083720A1 (en) * | 2007-12-31 | 2009-07-09 | Cambridge Enterprise Limited | Ionization sensing |
CN102081073A (zh) * | 2011-02-16 | 2011-06-01 | 西安交通大学 | 一种微纳米碳纳米管薄膜三电极传感器 |
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CN203858303U (zh) * | 2014-04-08 | 2014-10-01 | 沈阳工业大学 | 一种电场传感器 |
CN206096275U (zh) * | 2016-07-27 | 2017-04-12 | 清华大学 | 一种用于含离子流直流电场测量的传感器装置 |
CN106198678A (zh) * | 2016-08-03 | 2016-12-07 | 西安交通大学 | 一种金纳米孔薄膜三电极电离式二氧化硫传感器 |
CN107907749A (zh) * | 2017-11-24 | 2018-04-13 | 中国科学院电子学研究所 | 一种低轴间耦合的三维电场传感器 |
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CN109752445A (zh) * | 2019-03-21 | 2019-05-14 | 浙江工商大学 | 耦合式气体传感器及其对对硝基甲苯的检测方法 |
CN110456171A (zh) * | 2019-08-05 | 2019-11-15 | 清华大学 | 电晕放电导体表面电场强度的测量方法及装置 |
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Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN112684262A (zh) * | 2020-11-19 | 2021-04-20 | 西安交通大学 | 硅微米柱阵列三电极电离式mems电场传感器及制备方法 |
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