CN111678597A - Method and device for reducing stray light - Google Patents
Method and device for reducing stray light Download PDFInfo
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- CN111678597A CN111678597A CN202010651327.0A CN202010651327A CN111678597A CN 111678597 A CN111678597 A CN 111678597A CN 202010651327 A CN202010651327 A CN 202010651327A CN 111678597 A CN111678597 A CN 111678597A
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- 238000000034 method Methods 0.000 title claims abstract description 16
- 230000003287 optical effect Effects 0.000 claims abstract description 52
- 230000003595 spectral effect Effects 0.000 claims abstract description 25
- 238000002310 reflectometry Methods 0.000 claims abstract description 22
- 238000001914 filtration Methods 0.000 claims abstract description 13
- 230000011218 segmentation Effects 0.000 claims abstract description 9
- 238000001228 spectrum Methods 0.000 claims description 59
- 238000005259 measurement Methods 0.000 claims description 45
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- 229910052736 halogen Inorganic materials 0.000 description 3
- 150000002367 halogens Chemical class 0.000 description 3
- 230000001678 irradiating effect Effects 0.000 description 3
- 229910052724 xenon Inorganic materials 0.000 description 3
- FHNFHKCVQCLJFQ-UHFFFAOYSA-N xenon atom Chemical compound [Xe] FHNFHKCVQCLJFQ-UHFFFAOYSA-N 0.000 description 3
- 230000009286 beneficial effect Effects 0.000 description 2
- 230000000694 effects Effects 0.000 description 2
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- 238000004364 calculation method Methods 0.000 description 1
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- 238000007796 conventional method Methods 0.000 description 1
- 238000013524 data verification Methods 0.000 description 1
- 230000007547 defect Effects 0.000 description 1
- 238000000691 measurement method Methods 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 230000035515 penetration Effects 0.000 description 1
- 238000006467 substitution reaction Methods 0.000 description 1
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
- G01J3/00—Spectrometry; Spectrophotometry; Monochromators; Measuring colours
- G01J3/02—Details
- G01J3/0262—Constructional arrangements for removing stray light
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
- G01J3/00—Spectrometry; Spectrophotometry; Monochromators; Measuring colours
- G01J3/28—Investigating the spectrum
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
- G01J3/00—Spectrometry; Spectrophotometry; Monochromators; Measuring colours
- G01J3/46—Measurement of colour; Colour measuring devices, e.g. colorimeters
Abstract
The invention discloses a method and a device for reducing stray light, wherein the method comprises the following steps: s1, segmenting the measuring range; s2, selecting a group of optical filters in corresponding working ranges according to the segmentation of the measuring ranges, wherein the optical filters have cut-off ranges and are used for filtering the spectral energy in other measuring ranges; s3, transmitting light to the sensor through the filtering of each optical filter, sequentially measuring each section of measuring range by the sensor, and calculating to obtain the reflectivity of the measuring range; the device comprises a light source, an optical filter and a sensor, wherein a group of optical filters corresponding to working ranges are arranged in a matched mode according to the segmentation of the measuring ranges, the optical filters are provided with cut-off ranges and used for filtering spectral energy of other measuring ranges, and the optical filters are arranged between the light source and the sensor.
Description
Technical Field
The invention relates to the technical field of optical color measurement, in particular to a method and a device for reducing stray light.
Background
Stray light is generated in the optical measurement process, and the generation reasons of the stray light are mainly three: stray light generated by an imaging light path, stray light generated by a non-imaging light path and stray light generated by an instrument.
The stray light levels of different spectrum sensors are different, so that color data measured by each spectrum sensor are different, which is called as inter-station difference, and the stray light condition of each spectrum sensor needs to be measured and corrected.
The difference exists between the color value measured by the same spectrum sensor from the surface of the measured sample and the real color value of the surface of the measured sample, the difference is called indicating value error, the key factor influencing the indicating value error is stray light in a light splitting light path, and the stray light is embodied as that light with a specific wavelength is not focused at the position of the array sensor when the light with the specific wavelength is normally imaged, so that the detection precision of the energy with the specific wavelength is influenced, and the detection precision of the energy with other wavelengths is also influenced.
Disclosure of Invention
In order to solve the defects of the prior art and achieve the purposes of reducing stray light and improving detection precision, the invention adopts the following technical scheme:
a method of reducing stray light comprising the steps of:
s1, segmenting the measuring range;
s2, selecting a group of optical filters in corresponding working ranges according to the segmentation of the measuring ranges, wherein the optical filters have cut-off ranges and are used for filtering the spectral energy in other measuring ranges;
and S3, transmitting the light to the sensor through the filtering of each optical filter, sequentially measuring each section of measuring range by the sensor, and calculating to obtain the reflectivity of the measuring range.
Spectral energy of other measurement ranges is respectively filtered through optical filters in different working ranges, so that the formation of stray light in the unsegmented measurement process is reduced, and the indication error is reduced; meanwhile, segmented measurement can be completed without a plurality of sensors, so that the cost is saved, and the inter-station difference among different sensors is reduced.
According to the subsection of the measuring range, a group of subsection light sources corresponding to the working range are selected, optical filters matched with the working range of the subsection light sources are respectively arranged between the subsection light sources and the measured object, the subsection light sources are sequentially lightened, light rays of the subsection light sources pass through the optical filters corresponding to the working range and enter the sensor through the reflection of the measured object, the sensor sequentially measures reflection signals of each section of the measuring range, and the reflection signals are combined to calculate the reflectivity of the measuring range. The spectrum energy output by the segmented light source is the segmented spectrum energy, and the spectral energy is filtered by the corresponding segmented filter, so that the segmented filtering effect is improved.
The light source is a full spectrum light source in a measuring range, a group of optical filters is arranged between the full spectrum light source and the sensor, light rays of the full spectrum light source enter the sensor through the optical filters which are sequentially switched, the sensor sequentially measures, and the reflectivity of each section of measuring range is calculated and combined to obtain the reflectivity of the measuring range. Only one light source is needed, and segmented measurement can be completed through switching of the optical filter, so that cost is saved, and measurement efficiency is improved.
The edges of adjacent segmented measurement ranges overlap each other. Because the boundary value is easy to be interfered, a margin is left, which is beneficial to the accuracy of subsequent calculation.
A device for reducing stray light comprises a light source, a light filter and a sensor, wherein a group of light filters corresponding to working ranges are arranged in a matched mode according to the segmentation of a measuring range, the light filters are provided with cut-off ranges and used for filtering spectral energy of other measuring ranges, and the light filters are arranged between the light source and the sensor. Spectral energy of other measurement ranges is respectively filtered through optical filters in different working ranges, so that the formation of stray light in the unsegmented measurement process is reduced, and the indication error is reduced; meanwhile, segmented measurement can be completed without a plurality of sensors, so that the cost is saved, and the inter-station difference among different sensors is reduced.
According to the subsection of the measuring range, a group of subsection light sources corresponding to the working range are arranged in a matched mode, light filters matched with the working range of the subsection light sources are arranged between the subsection light sources and the measured object respectively, the subsection light sources are sequentially lightened, light rays of the subsection light sources enter the sensor through the light filters corresponding to the working range and reflected by the measured object, and the sensor sequentially measures each section of measuring range. The spectrum energy output by the segmented light source is the segmented spectrum energy, and the spectral energy is filtered by the corresponding segmented filter, so that the segmented filtering effect is improved.
The light source is a full-spectrum light source in a measuring range, a light filter switching device is arranged between the full-spectrum light source and the sensor in a matching mode, the light filter switching device comprises light filters and is used for switching the light filters in different working ranges in sequence, light of the full-spectrum light source enters the sensor through the light filters which are switched in sequence, and the sensor measures each section of measuring range in sequence. Only one full-spectrum light source is needed, segmented measurement can be completed through switching of the optical filter, cost is saved, and meanwhile measurement efficiency is improved.
The optical filter switching device is a group of shutters which are provided with light transmission openings and correspond to the optical filters, and the light transmission openings are switched by the shutters to form a full transmission state and a filtering state covering the optical filters.
Two optical filters with different working ranges are matched with the shutter, and the light-transmitting openings are covered by the switching of the shutter in turn. When the measuring range is divided into two sections, only one shutter is needed to switch the two sections of the optical filters, and when multiple sections are involved, the number of the shutters can be reduced, and the efficiency is improved.
The optical filter switching device is an optical filter rotating wheel, a plurality of optical filters are arranged on the optical filter rotating wheel in a matching mode, and the optical filters are sequentially switched between the full-spectrum light source and the sensor through rotation.
The invention has the advantages and beneficial effects that:
spectral energy of other measurement ranges is respectively filtered through optical filters in different working ranges, so that the formation of stray light in the unsegmented measurement process is reduced, and the indication error is reduced; meanwhile, segmented measurement can be completed without a plurality of sensors, so that the cost is saved, and the inter-station difference among different sensors is reduced.
Drawings
FIG. 1 is a top sectional view of an apparatus according to an embodiment of the present invention.
FIG. 2 is a graph of transmittance of three filters according to the present invention.
FIG. 3 is a graph comparing measured reflectance data with real reflectance data for segments with filters added in the present invention.
FIG. 4 is a cross-sectional view of a second embodiment of the apparatus of the present invention.
Fig. 5a is a schematic diagram of a shutter structure according to a second embodiment of the present invention.
Fig. 5b is a first state diagram of the shutter according to the second embodiment of the present invention.
FIG. 5c is a second state diagram of the shutter according to the second embodiment of the present invention.
Fig. 6a is a graph of the signals measured by five spectral sensors (C12666 MA) on the stray light detection device.
Fig. 6b is a graph of the signals (X-axis magnification) measured by five spectral sensors (C12666 MA) on the stray light detection device.
FIG. 7 is a graph comparing measured reflectance data to actual reflectance data.
In the figure: 1. the device comprises a filter 2, a segmented light source 3, an integrating sphere 4, a measuring port 5, a shutter 6, a sensor 7, a full-spectrum light source 8, a light transmitting port 9, a first filter 10 and a second filter.
Detailed Description
The following detailed description of embodiments of the invention refers to the accompanying drawings. It should be understood that the detailed description and specific examples, while indicating the present invention, are given by way of illustration and explanation only, not limitation.
The first embodiment is as follows:
the illumination light source is divided into a plurality of sections (more than or equal to 2 sections) in the measurement range for measurement, different optical filters 1 are added at the front end of the segmented light source 2, and the measurement is carried out in a segmented mode.
Taking three-segment measurement ranges as an example, as shown in fig. 1-3, 3 groups of illumination LED lamps are selected as the segmented light source 2 (the light source is a full-spectrum LED, a combined LED, a halogen lamp, or a xenon lamp), wherein the first group of the segmented light source 2 satisfies that the spectral range 360-.
Adding a short-wave pass filter 1 at the front end of the first group of segmented light sources 2, wherein the working range of the filter 1 is 360-510nm, and the cut-off range is 510-800 nm; after the segmented light source 2 emits light, the light firstly passes through the optical filter 1 and then irradiates the upper surface of the sample to be measured (or irradiates the sample to be measured through the measuring port 4 after being homogenized by the integrating sphere 3), so that the light irradiating the sample is light with the wavelength of 360 and 510nm, and no light source with the wavelength of 510nm is available.
Adding a band-pass filter 1 at the front end of the second group of segmented light sources 2, wherein the working range of the filter 1 is 490-610nm, the cut-off range is 360-490nm and 610-800 nm; after the segmented light source 2 emits light, the light firstly passes through the optical filter 1 and then irradiates the upper surface of the sample to be measured (or irradiates the sample to be measured through the measuring port 4 after being homogenized by the integrating sphere 3), so that the light irradiating the sample is the light with the wavelength of 610nm, and no light sources before 490nm and after 510nm exist.
Adding a long-wave pass filter 1 at the front end of the third group of segmented light sources 2, wherein the working range 590-800nm and the cut-off range 360-590nm of the filter 1; after the segmented light source 2 emits light, the light firstly passes through the optical filter 1 and then irradiates the upper surface of the sample to be measured (or irradiates the sample to be measured through the measuring port 4 after being homogenized by the integrating sphere 3), so that the light irradiating the sample is ensured to be light with 590-800nm without a light source before 590 nm.
In the measuring process, the three groups of segmented light sources 2 are sequentially lightened, and the spectral sensor 6 is used for measuring three times. Wherein when the 1 st component light source 2 is lightened, the spectral sensor 6 measures the reflection signal of the sample at 360-490 nm; when the 2 nd component section light source 2 is lightened, the spectral sensor 6 measures a reflection signal of a sample of 500-600 nm; when the 3 rd component section light source 2 is lightened, the spectral sensor 6 measures the reflection signal of the sample 610-780 nm; after the three groups of segmented light sources 2 are sequentially measured, the three groups of reflected signals are combined into the reflection signals of 360-780nm, and the reflectivity of 360-780nm is calculated.
Because the measurement is carried out by dividing into three sections, the reflectivity measured by each section of wavelength is not influenced by stray light of other wavelength spectrum energy, and the measured reflectivity is very close to the real reflectivity data.
Example two:
the illumination light source uses a full-spectrum light source 7 (a full-spectrum LED, a combined LED, a halogen lamp, a xenon lamp and the like) in a measurement range, the full-spectrum light source 7 irradiates a measured sample (or irradiates the measured sample through a measurement port 4 after being homogenized by an integrating sphere 3) and reflects the sample to the spectrum sensor 6, a plurality of optical filters 1 (more than or equal to 2 types) are added at the front end of the spectrum sensor 6, the optical filters 1 are installed on a shutter 5, and the optical filters 1 (the optical filters at the front end of the spectrum sensor 6 can also be switched by an optical filter rotating wheel) at the front end of the spectrum sensor 6 through the movement of the shutter 5.
Taking three filters as an example, as shown in FIG. 2-4, 1, the short wave pass filter 1, the working range 360-; 2. the band-pass filter 1 has a working range of 490-610nm, a cut-off range of 360-490nm and 610-800 nm; 3. the long-wave pass filter 1 has a working range of 590-800nm and a cut-off range of 360-590 nm.
The three filters 1 are arranged on three shutters 5, the shutters 5 have two states of full penetration (empty) and filters, the shutters 5 are overlapped front and back and are arranged at the front end of the spectrum sensor 6, and the center of a measured object (or the center of a measuring port 4 of the integrating sphere 3), the center of the shutters and the center of the spectrum sensor are concentric.
During the measurement, the spectral sensor 6 measures the same full-spectrum light source 7 three times:
for the first time: the first shutter 5 is switched out of the short-wave pass filter 1 and the remaining two shutters 5 are switched to a fully transmissive state. At the moment, the reflected light of the measured object passes through the short-wave-pass filter 1, the signal entering the spectrum sensor 6 is reflected light with the wavelength of 360-510nm, the light with the other wavelengths is cut off by the short-wave-pass filter 1, and the reflectivity of 360-490nm is calculated by the measurement at this time;
and (3) for the second time: the second shutter 5 is switched out of the band pass filter 1 and the remaining two shutters 5 are switched to a fully transmissive state. At this time, the reflected light of the measured object passes through the band pass filter 1, the signal entering the spectrum sensor 6 is the reflected light of 490-610nm, the light with the rest wavelengths is cut off by the band pass filter 1, and the reflectivity of 500-600nm is measured and calculated at this time;
and thirdly: the third shutter 5 is switched out of the long-wave pass filter 1, and the remaining two shutters 5 are switched to a full-transmission state. At the moment, the reflected light of the measured object passes through the long-wave pass filter 1, the signal entering the spectrum sensor 6 is 590-800nm reflected light, the rest wavelength light is cut off by the long-wave pass filter 1, and the reflectivity of 610-780nm is calculated by the measurement;
after the three measurements are completed, the three groups of reflectivity data are combined to obtain the reflectivity of the measured sample in the required measurement range (360-780 nm).
Switching between two filters can be realized through one shutter 5, as shown in fig. 5a, a light-transmitting opening 8 is arranged on the shutter 5, a filter set capable of sliding up and down is embedded in the light-transmitting opening 8, two filters are bound up and down in the filter set, when the shutter 5 is switched, as shown in fig. 5b, the filter set slides up, the first filter 9 slides up into the shutter 5, the light-transmitting opening 8 exposes the second filter 10, the shutter 5 is switched again, as shown in fig. 5c, the filter set slides down, the second filter 10 slides down into the shutter 5, and the light-transmitting opening 8 exposes the first filter 9. When the measuring range is divided into two sections, the switching of the optical filters corresponding to the measuring ranges at the two ends can be completed only by one shutter 5, and when the switching of the optical filters in the multi-section measuring range is involved, the number of the shutters 5 can be saved, and the efficiency is improved.
Data verification:
in the conventional method, an optical filter with a working range of 500nm-2000nm and a cut-off range of 300nm-490nm is added at the front end of a spectrum sensor, theoretically, the light energy entering the spectrum sensor through the optical filter at 300nm-490nm is 0, the converted signal should also be 0, but not actually, when light energy with a certain wavelength enters the spectrum sensor, due to the existence of stray light of the spectrum sensor, a signal is output at the wavelength where no signal is output, five spectrum sensors (C12666 MA) with different serial numbers are selected to be put on a stray light detection device to measure signals, wherein the signals detected at 300nm-490nm are different from 300-1000(AD count), and the difference of the signal sizes exists before different serial numbers, as shown in FIG. 6, a full spectrum lamp (full spectrum LED, combined LED) with a measurement range is lighted, Halogen lamp, xenon lamp, etc.), irradiate on the tested sample (can be directly irradiated according to a certain angle or irradiate through integrating sphere after light is homogenized, etc.), the tested sample absorbs partial optical signal and partial transmitted light, the residual light is reflected to enter the spectrum sensor, the spectrum sensor outputs the received signal, and the sample reflectivity data is calculated. Due to the existence of stray light in the spectrum sensor, the wavelength data converted by the spectrum sensor has some data of other wavelengths besides the data of the wavelength, so that the measured reflectivity has errors. As shown in FIG. 7, when a red sample is measured, the reflected light from the full spectrum light source in the measurement range on the red sample enters the spectrum sensor, the calculated reflectance after the conversion output of the spectrum sensor has an error with the true reflectance, and the short wave part (400 nm-580 nm) is affected by the stray light caused by the reflected light of 590-700nm, and the reflectance is significantly greater than the true reflectance, resulting in a large measurement error.
The traditional full-spectrum one-time illumination measurement method is compared with the method of adding the optical filter, and 12 colored color bricks are measured. Five spectral sensors were selected, respectively, and reflectance measurements were made and calculated as color data (CIE-LAB) using a scheme of full spectrum primary illumination measurement, and reflectance measurements were made and calculated as color data (CIE-LAB) using a scheme after the addition of filters. The difference between the stations (data consistency) and the indicating value error (error between standard data) of the five spectral sensors are compared, and the difference is described by using the CIE-1976 color difference formula.
The standard data of 12 colored tiles are as follows:
inter-station difference comparison (five spectral sensors compared to each other):
five spectrum sensors are assembled into five machines, the reflectivity of 12 color brick samples is measured respectively, the reflectivity data is calculated into CIE-LAB data, and the color difference value (difference between tables) of the same color brick measured by each machine is calculated by using a CIE1976 color difference formula.
By verification, the difference between machine stations is obviously improved by using the filter segmentation measurement scheme. The scheme eliminates the influence caused by the inconsistent stray light among the spectral sensors.
Inter-station difference of traditional full spectrum one-time measurement
Inter-station difference using segmented measurements
Indication error comparison (five spectral sensors compared to standard data):
five spectrum sensors were assembled into five machines, and the reflectance of 12 color tile samples was measured, respectively, and the reflectance data was calculated as CIE-LAB data, and the color difference value (indicating error) between the machine and the color tile standard data was calculated using the CIE1976 color difference formula.
By verification, the optical filter segmented measurement scheme is used, the machine indication value error is obviously improved, and the scheme improves the influence of stray light of the spectral sensor on the accuracy of measured data.
Indication error of traditional full spectrum one-time measurement
Indicating error using segmented measurements
The above examples are only intended to illustrate the technical solution of the present invention, but not to limit it; although the present invention has been described in detail with reference to the foregoing embodiments, it will be understood by those of ordinary skill in the art that: the technical solutions described in the foregoing embodiments may still be modified, or some or all of the technical features may be equivalently replaced; and the modifications or the substitutions do not make the essence of the corresponding technical solutions depart from the scope of the technical solutions of the embodiments of the present invention.
Claims (10)
1. A method of reducing stray light, comprising the steps of:
s1, segmenting the measuring range;
s2, selecting a group of optical filters (1) corresponding to the working range according to the segmentation of the measuring range, wherein the optical filters (1) have cut-off ranges and are used for filtering the spectral energy of other measuring ranges;
s3, the light is transmitted to the sensor (6) through the filtering of each optical filter (1), the sensor (6) sequentially measures each section of measuring range, and the reflectivity of the measuring range is calculated.
2. The method for reducing stray light according to claim 1, wherein a group of segmented light sources (2) with corresponding working ranges are selected according to the segmentation of the measuring ranges, optical filters (1) matched with the working ranges of the segmented light sources (2) are respectively arranged between the segmented light sources (2) and the object to be measured, the segmented light sources (2) are sequentially lighted, light rays of the segmented light sources (2) enter the sensor (6) through the optical filters (1) with the corresponding working ranges through the reflection of the object to be measured, the sensor (6) sequentially measures reflection signals of each segment of measuring ranges, combines the reflection signals and calculates the reflectivity of the measuring ranges.
3. A method as claimed in claim 1, wherein the light source is a full spectrum light source (7) in the measurement range, a set of said filters (1) is disposed between the full spectrum light source (7) and the sensor (6), the light from the full spectrum light source (7) enters the sensor (6) through the sequentially switched filters (1), the sensor (6) sequentially measures, calculates the reflectivity of each measurement range and combines to obtain the reflectivity of the measurement range.
4. A method of reducing stray light as claimed in claim 1, wherein edges of adjacent segmented measuring ranges overlap.
5. The device for reducing the stray light comprises a light source, a filter (1) and a sensor (6), and is characterized in that the filter (1) with a group of corresponding working ranges is arranged according to the segmentation of a measuring range in a matching manner, the filter (1) has a cut-off range and is used for filtering the spectral energy of other measuring ranges, and the filter (1) is arranged between the light source and the sensor (6).
6. The device for reducing stray light according to claim 5, wherein a set of segmented light sources (2) with corresponding working ranges are cooperatively arranged according to the segmentation of the measuring ranges, the light filters (1) matched with the working ranges of the segmented light sources (2) are respectively arranged between the segmented light sources (2) and the object to be measured, the segmented light sources (2) are sequentially lighted, light rays of the segmented light sources (2) enter the sensor (6) through the light filters (1) with the corresponding working ranges by reflection of the object to be measured, and the sensor (6) sequentially measures each segment of the measuring ranges.
7. The device for reducing stray light according to claim 5, wherein the light source is a full spectrum light source (7) in a measurement range, a filter switching device is disposed between the full spectrum light source (7) and the sensor (6), the filter switching device includes a filter (1) for sequentially switching the filters (1) in different working ranges, light from the full spectrum light source (7) enters the sensor (6) through the sequentially switched filters (1), and the sensor (6) sequentially measures each measurement range.
8. A device for reducing stray light according to claim 7, wherein said filter switching means is a set of shutters (5) having light transmission openings (8) corresponding to the filters (1), and the light transmission openings (8) are set to a full transmission state and a filtering state covering the filters (1) by switching of the shutters (5).
9. A device for reducing stray light according to claim 8, wherein a set of filters (1) with different working ranges are arranged to cooperate with said shutter (5), and said light-transmitting openings (8) are alternately covered by switching of said shutter (5).
10. The apparatus according to claim 7, wherein the filter switching device is a filter rotating wheel, the filter rotating wheel is cooperatively provided with a plurality of filters (1), and the filters (1) are sequentially switched between the full spectrum light source (7) and the sensor (6) by rotating.
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| CN202010651327.0A CN111678597A (en) | 2020-07-08 | 2020-07-08 | Method and device for reducing stray light |
| PCT/CN2020/104775 WO2022007033A1 (en) | 2020-07-08 | 2020-07-27 | Method and device for reducing stray light |
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| CN210346910U (en) * | 2019-05-28 | 2020-04-17 | 杭州远方光电信息股份有限公司 | Hyperspectral color measuring system |
| CN212340431U (en) * | 2020-07-08 | 2021-01-12 | 中国计量大学 | Device for reducing stray light |
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| JP5162006B2 (en) * | 2011-06-01 | 2013-03-13 | キヤノン株式会社 | Detection apparatus, exposure apparatus, and device manufacturing method |
| JP2016528496A (en) * | 2013-08-02 | 2016-09-15 | ベリフード， リミテッドＶｅｒｉｆｏｏｄ， Ｌｔｄ． | Spectrometer system and method, spectroscopic analysis device and method |
| WO2019094322A1 (en) * | 2017-11-07 | 2019-05-16 | EyeVerify Inc. | Capturing images under coded illumination patterns to reduce effects of ambient lighting conditions |
| CN110487756A (en) * | 2018-05-14 | 2019-11-22 | 杨佳苗 | It is divided the discrete fluorescence spectrum of pupil and fluorescence lifetime detection method and device |
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| CN210346910U (en) * | 2019-05-28 | 2020-04-17 | 杭州远方光电信息股份有限公司 | Hyperspectral color measuring system |
| CN212340431U (en) * | 2020-07-08 | 2021-01-12 | 中国计量大学 | Device for reducing stray light |
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