CN107462326A - It is a kind of based on linear array CMOS compose full scanning spectrometer to light method - Google Patents
It is a kind of based on linear array CMOS compose full scanning spectrometer to light method Download PDFInfo
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- CN107462326A CN107462326A CN201710623746.1A CN201710623746A CN107462326A CN 107462326 A CN107462326 A CN 107462326A CN 201710623746 A CN201710623746 A CN 201710623746A CN 107462326 A CN107462326 A CN 107462326A
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- light method
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- 238000000034 method Methods 0.000 title claims abstract description 37
- 230000003287 optical effect Effects 0.000 claims abstract description 25
- 238000001228 spectrum Methods 0.000 claims abstract description 25
- QSHDDOUJBYECFT-UHFFFAOYSA-N mercury Chemical compound [Hg] QSHDDOUJBYECFT-UHFFFAOYSA-N 0.000 claims abstract description 17
- 229910052753 mercury Inorganic materials 0.000 claims abstract description 17
- 230000005284 excitation Effects 0.000 claims abstract description 13
- 238000012545 processing Methods 0.000 claims abstract description 12
- 230000003595 spectral effect Effects 0.000 claims abstract description 12
- 238000013480 data collection Methods 0.000 claims description 3
- 230000000694 effects Effects 0.000 claims description 3
- 239000011521 glass Substances 0.000 claims description 3
- 229910001635 magnesium fluoride Inorganic materials 0.000 claims description 3
- 238000012360 testing method Methods 0.000 claims description 3
- 238000003384 imaging method Methods 0.000 claims description 2
- 239000000463 material Substances 0.000 abstract description 2
- 238000012795 verification Methods 0.000 abstract 1
- 238000004140 cleaning Methods 0.000 description 4
- 238000013461 design Methods 0.000 description 3
- 238000010586 diagram Methods 0.000 description 3
- 230000005611 electricity Effects 0.000 description 2
- 238000005516 engineering process Methods 0.000 description 2
- 238000012423 maintenance Methods 0.000 description 2
- 238000012986 modification Methods 0.000 description 2
- 230000004048 modification Effects 0.000 description 2
- 238000005286 illumination Methods 0.000 description 1
- 230000010354 integration Effects 0.000 description 1
- 238000005259 measurement Methods 0.000 description 1
- 229910044991 metal oxide Inorganic materials 0.000 description 1
- 150000004706 metal oxides Chemical class 0.000 description 1
- 239000004065 semiconductor Substances 0.000 description 1
- 238000010183 spectrum analysis Methods 0.000 description 1
- 230000003068 static effect Effects 0.000 description 1
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
- G01J3/00—Spectrometry; Spectrophotometry; Monochromators; Measuring colours
- G01J3/02—Details
- G01J3/0289—Field-of-view determination; Aiming or pointing of a spectrometer; Adjusting alignment; Encoding angular position; Size of measurement area; Position tracking
Abstract
The invention discloses it is a kind of based on linear array CMOS compose full scanning spectrometer to light method, wherein spectrometer includes, excitation source, window mirror, condenser, entrance slit, grating, optical backplane, mercury lamp, spectra collection processing system and computer control process system, its step include：A, excitation source position is adjusted, b, regulation stop position, c, is adjusted into seam position and d, verification spectral line.Thus according to the present invention, CMOS acquisition systems can realize full spectrum scanning, and technique is simple, is substantially reduced equipment instrument, reduce material cost, and light modulation step becomes simple, and efficiency uprises.
Description
Technical field
It is particularly a kind of that scanning spectrometer is composed based on linear array CMOS entirely the present invention relates to spectral analysis technique application field
To light method.
Background technology
In traditional spectrometer, in order to reach higher resolution ratio, all using the optical splitter of big focal length（750mm-
The grating of 1000mm focal lengths）, this just needs very big light-splitting chamber to can be only achieved the purpose of vacuum optical system so that Machine Design
And Master Cost greatly improves；And the detector that traditional spectrometer uses is PMT（Photomultiplier）, it is necessary to 20-50 μm
Exit slit can accurately just allow element illumination later stage increase passage then needs to crack as requested and to light on PMT, then
Corresponding PMT is loaded onto, can be only achieved testing goal so that process of measurement is cumbersome；Optical system is relative complex many, it is necessary to specialty
Light modulation personnel can just carry out.Therefore in view of the above-mentioned problems, composing scanning spectrometer entirely based on linear array CMOS we have proposed one kind
To light method.
The content of the invention
In view of this, it is necessary to overcome at least one in drawbacks described above of the prior art.The invention provides a kind of base
In linear array CMOS compose full scanning spectrometer to light method.
It is a kind of that including to light method, its step for scanning spectrometer is composed based on linear array CMOS entirely：
A, excitation source position is adjusted, the light from excitation source is passed through window mirror, reaches condenser, condenser is by light focusing
In focus, light reaches entrance slit after focal point, is reached by entrance slit on grating, grating is divided, and is made
Condenser, entrance slit and grating are placed in an input path；
B, adjust stop position, grating is rotated, makes grating line perpendicular to optical backplane, at the same make grating center and
Detector center it is highly consistent, make the imaging of grating to cover whole spectra collection system；
C, entrance slit position is adjusted, movable entrance slit makes the light of excitation source will be as into entrance slit by window mirror
On, entrance slit is adjusted, makes entrance slit vertical optical bottom plate；
D, spectral line is verified, is verified with mercury lamp, mercury lamp is opened, the spectrum of mercury is intended using computer control process system
It is total to calculate, determine that the center of mercury lamp characteristic spectral line matches in image planes position with theoretical value, computer control process system and
Spectra collection processing system is connected, and control data collection view data simultaneously carries out display analysis, is examined according to the display result of spectrum
Adjustment effect is tested, completes adjustment process.
In addition, according to it is disclosed by the invention it is a kind of based on linear array CMOS compose full scanning spectrometer to light method also have such as
Lower additional technical feature：
Further, it is different according to the photoimaging of different wave length point, the entrance slit is adjusted.
Further, calibration instrument is carried out according to the wavelength values of the five of mercury lamp spectral lines is different.
Further, the wavelength value of five spectral lines of the mercury lamp be respectively 404.7nm, 435.8nm, 546.1nm,
577.0nm and 579.0nm.
Further, the window mirror surfacing is smooth, transparent, can pass through the glass plate of specific wavelength, the window mirror
For isolated vacuum, and facilitate later stage cleaning and maintenance, when window mirror needs to safeguard, close ball valve, take out window mirror and cleared up,
Ball valve is loaded onto after the completion of the cleaning of window mirror, opening ball valve can be continuing with, and the method facilitates succinct.
Further, spectra collection processing system converts optical signals into the corresponding current signal of intensity therewith.
Further, described condenser uses JGS1 or MgF2,
Further, the light or the MgF that described JGS1 can be by 185-1000nm2Condenser can pass through
120-1000nm light.
Further, the optical focal length of the grating is 300mm-600mm.
Further, the spectra collection processing system includes CCD acquisition systems or CMOS acquisition systems.
Further, the CCD acquisition systems or CMOS acquisition systems are positioned on Rowland circle.
Further, the Rowland circle is on the inscribed circle of grating, using grating radius as on the circle of diameter.
Further, the CMOS acquisition systems include light collection plate and CMOS photo-detector two parts, tentatively by light
Collecting circuit board is fixed on mechanical module, and then mechanical module is fixed on optical backplane, fine tuning is carried out afterwards, until reaching
Purpose；Ensure CMOS photosensitive core on rowland circumference, photosensitive core can be converted light into as voltage.
Further, it is described enter stitch slit width be 20 μm -40 μm.
The additional aspect of the present invention and advantage will be set forth in part in the description, and will partly become from the following description
Obtain substantially, or recognized by the practice of the present invention.
Brief description of the drawings
The above-mentioned and/or additional aspect and advantage of the present invention will become from the following description of the accompanying drawings of embodiments
Substantially and it is readily appreciated that, wherein：
Fig. 1 is the schematic diagram of light path design theoretical diagram；
Fig. 2 is the schematic diagram of full spectrum scanning spectrometer according to an embodiment of the invention；
In figure, 1 is excitation source, and 2 be window mirror, and 3 be condenser, and 4 be slit, and 5 be grating and 6 be spectra collection processing system.
Embodiment
Embodiments of the invention are described below in detail, the example of the embodiment is shown in the drawings, wherein from beginning to end
Same or similar label represents same or similar element or the element with same or like function.Below with reference to attached
The embodiment of figure description is exemplary, is only used for explaining the present invention, and is not construed as limiting the claims.
In the description of the invention, it is to be understood that term " on ", " under ", " bottom ", " top ", "front", "rear",
The orientation or position relationship of the instruction such as " interior ", " outer ", " horizontal stroke ", " perpendicular " are based on orientation shown in the drawings or position relationship, are only
Described for the ease of description is of the invention with simplified, rather than the device or element of instruction or hint meaning must be with specifically sides
Position, with specific azimuth configuration and operation, therefore be not considered as limiting the invention.
In the description of the invention, it is necessary to which explanation, unless otherwise clearly defined and limited, term " connection ", " connects
It is logical ", " connected ", " connection ", " cooperation " should be interpreted broadly, for example, it may be fixedly connected, be integrally connected or
It is detachably connected；It can be the connection of two element internals；Can be joined directly together, the indirect phase of intermediary can also be passed through
Even；" cooperation " can be the cooperation in face and face or the cooperation in point and face or line and face, and the also cooperation including hole axle is right
For one of ordinary skill in the art, the concrete meaning of above-mentioned term in the present invention can be understood with concrete condition.
The inventive concept of the present invention is as follows, is converted into characteristic light by using the line array CCD acquisition system of seamless connection
The mode of voltage signal, circuit integration level is improved, by original PMT（Photomultiplier）, collection tube and counter letter
CCD acquisition systems and collection plate are turned to, reduces the multiplex circuit problem occurred due to circuit complexity, therefore with obvious excellent
Point.
The present invention described below with reference to accompanying drawings, wherein Fig. 1 is showing for full spectrum sweep type spark photo-electric direct reading spectrometer
It is intended to.
As shown in figure 1, according to an embodiment of the invention, it is a kind of based on linear array CMOS compose full scanning spectrometer to light side
Method, it is characterised in that wherein spectrometer includes, excitation source 1, window mirror 2, condenser 3, entrance slit 4, grating 5, optics bottom
Plate, Hg lamps, spectra collection processing system 6 and computer control process system, its step include：
A, excitation source 1 position is adjusted, the light from excitation source 1 is passed through window mirror 2, reaches condenser 3, condenser 3 is by light
For line focus in focus, light reaches entrance slit 4 after focal point, is reached by entrance slit 4 on grating 5, grating 5 enters
Row light splitting, makes condenser 3, entrance slit 4 and grating 5 be placed in an input path, wherein grating 5 is placed on optical backplane；
B, the position of grating 5 is adjusted, grating 5 is rotated, makes the groove of grating 5 perpendicular to optical backplane, while make in grating 5
The heart and detector center it is highly consistent, make the 5 of grating to be imaged to cover whole spectra collection processing system 6；
C, adjust entrance slit 4 position, move forward and backward the entrance slit 4 make the light of excitation source 1 by window mirror 2 will as into
On entrance slit 4, entrance slit 4 is adjusted, makes the vertical optical bottom plate of entrance slit 4；
D, spectral line is verified, is verified with mercury lamp, mercury lamp is opened, the spectrum of mercury is intended using computer control process system
It is total to calculate, determine that the center of the mercury lamp characteristic spectral line matches in image planes position with theoretical value, computer control process system
System is connected with spectra collection processing system 6, and control data collection view data simultaneously carries out display analysis, according to spectral resolution
Product test adjustment effect is shown, completes adjustment process.
According in this patent background technology to described in prior art, spectrometer disclosed in prior art, comparing to reach
Outstanding resolution ratio, all using the optical splitter of big focal length（The grating of 750mm-1000mm focal lengths）, this just needs very big light splitting
Room, it can be only achieved the purpose of vacuum optical system so that the volume of instrument is more huge, and Machine Design and Master Cost are significantly
Improve, be not easy to be moved；Other optical system is relative complex, it is necessary to which professional light modulation personnel can just carry out；And the present invention is public
The full spectrum sweep type spark photo-electric direct reading spectrometer of one kind opened, can realize that 100-600nm's is complete by using CCD acquisition systems
Spectrum receives, and carries out reception collection simultaneously equivalent to thousands of individual PMT, technique is simple, is substantially reduced equipment instrument, reduces material
Cost, light modulation technique is simplified, light modulation step becomes simple, therefore has clear advantage.
Preferably, it is different according to the photoimaging of different wave length point, the entrance slit 4 is adjusted.
Preferably, calibration instrument is carried out according to the wavelength values of the five of mercury lamp spectral lines is different.
Further, the wavelength value of five spectral lines of the mercury lamp be respectively 404.7nm, 435.8nm, 546.1nm,
577.0nm and 579.0nm.
Preferably, the surfacing of window mirror 2 is smooth, transparent, can pass through the glass plate of specific wavelength, the window mirror 2
For isolated vacuum, facilitate later stage cleaning and maintenance, when window mirror needs to safeguard, close ball valve, take out window mirror and cleared up, window mirror
Ball valve is loaded onto after the completion of cleaning, opening ball valve can be continuing with, and the method facilitates succinct.
Further, spectra collection processing system 6 converts optical signals into the corresponding current signal of intensity therewith.
Preferably, described condenser 3 uses JGS1 or MgF2。
Further, the light or the MgF that described JGS1 condenser 3 can be by 185-1000nm2Optically focused
Mirror 3 can pass through 120-1000nm light.
Preferably, the optical focal length of the grating 5 is 300mm-600mm.
Further, the optical focal length of the grating 5 is 300mm-450mm.
The optical focal length of the grating 5 is 300mm-450mm, the grating of this optical focal length, makes the face of the light-splitting chamber
Product is substantially reduced, while also reduces the volume of whole instrument.
Preferably, the spectra collection processing system 6 includes CCD acquisition systems or CMOS acquisition systems.
Further, the CCD acquisition systems or CMOS acquisition systems are positioned on Rowland circle.
Further, the Rowland circle is on the inscribed circle of grating, using grating radius as on the circle of diameter.
Further, the CMOS acquisition systems include light collection plate and CMOS photo-detector two parts, tentatively by light
Collecting circuit board is fixed on mechanical module, and then mechanical module is fixed on optical backplane, fine tuning is carried out afterwards, until reaching
Purpose；Ensure CMOS photosensitive core on rowland circumference, photosensitive core can be converted light into as voltage.
Preferably, it is described enter stitch slit 4 width be 20 μm -40 μm.
Further, it is described enter stitch slit 4 width be 20 μm.
It is described to enter to stitch this width of slit 4 and realize the compatibility of optimal resolution and maximum thang-kng amount.
Preferably, the optical focal length of the grating 5 is 300mm-600mm.
Using linear array CMOS acquisition systems, CMOS is Complimentary Metal-Oxide semiconductor, and CMOS is almost without static electricity
Consumption, only just has the consumption of electricity, therefore the power consumption of CMOS acquisition systems only has common CCD system when circuit is connected
1/3 or so, be advantageous to save the energy.
It is any to refer to that " one embodiment ", " embodiment ", " illustrative examples " etc. mean to combine embodiment description
Specific component, structure or feature are contained at least one embodiment of the present invention.This specification everywhere this is schematic
Statement is not necessarily referring to identical embodiment.Specific component, structure or feature are described with reference to any embodiment moreover, working as
When, advocated, component, structure or feature with reference to as being realized other embodiments all fall within those skilled in the art
Within the scope of.
Although detailed retouch is carried out to the embodiment of the present invention with reference to multiple illustrative examples of the present invention
State, it must be understood that those skilled in the art can be designed that various other improvement and embodiment, these improve and implemented
Example will fall within spirit and scope.Specifically, in the scope of foregoing disclosure, accompanying drawing and claim
Within, rational variations and modifications can be made in terms of the arrangement that parts and/or sub-combination are laid out, without departing from
The spirit of the present invention.Except the variations and modifications in terms of parts and/or layout, its scope is by appended claims and its is equal
Thing limits.
Claims (10)
1. a kind of compose including to light method, its step for scanning spectrometer entirely based on linear array CMOS：
A, excitation source position is adjusted, condenser, entrance slit and grating is placed in an input path；
B, stop position is adjusted, grating is rotated, makes the imaging of grating to cover whole spectra collection system；
C, entrance slit position is adjusted, movable entrance slit makes the light of excitation source will be as into entrance slit by window mirror
On；
D, spectral line is verified, is verified with mercury lamp, the center of mercury lamp characteristic spectral line is in image planes position, the mercury lamp characteristic spectrum
Line matches with theoretical value.
2. it is according to claim 1 it is a kind of based on linear array CMOS compose full scanning spectrometer to light method, it is characterised in that
The light of the excitation source passes through window mirror, reaches the condenser, the condenser is by light focusing in focus, and light is through overfocus
The entrance slit is reached after point focusing, is reached by the entrance slit on the grating, the grating is divided, and makes institute
Condenser, the entrance slit and the grating is stated to be placed in an input path.
3. it is according to claim 1 it is a kind of based on linear array CMOS compose full scanning spectrometer to light method, it is characterised in that
Grating line perpendicular to the optical backplane, while make the grating center and detector center it is highly consistent.
4. it is according to claim 1 it is a kind of based on linear array CMOS compose full scanning spectrometer to light method, it is characterised in that
The entrance slit is perpendicular to the optical backplane.
5. it is according to claim 1 it is a kind of based on linear array CMOS compose full scanning spectrometer to light method, it is characterised in that
Computer control process system is fitted calculating, computer control process system and spectra collection processing system to the spectrum of mercury
It is connected, control data collection view data simultaneously carries out display analysis, according to the display product test adjustment effect of spectrum, completes dress
Tune process.
6. it is according to claim 1 it is a kind of based on linear array CMOS compose full scanning spectrometer to light method, it is characterised in that
The window mirror surfacing is smooth, transparent, can pass through the glass plate of specific wavelength.
7. it is according to claim 1 it is a kind of based on linear array CMOS compose full scanning spectrometer to light method, it is characterised in that
Described condenser uses JGS1 or MgF2。
8. it is according to claim 1 it is a kind of based on linear array CMOS compose full scanning spectrometer to light method, it is characterised in that
The optical focal length of the grating is 300mm-600mm.
9. it is according to claim 1 it is a kind of based on linear array CMOS compose full scanning spectrometer to light method, it is characterised in that
The spectra collection processing system includes CCD acquisition systems or CMOS acquisition systems, the CCD acquisition systems or CMOS collections
System is positioned on Rowland circle.
A kind of existing to light method, its feature for scanning spectrometer is composed based on linear array CMOS entirely 10. according to claim 1
In, it is described enter stitch slit width be 20 μm -40 μm.
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Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN110411563A (en) * | 2018-04-27 | 2019-11-05 | 福州高意光学有限公司 | A kind of spectrometer architecture |
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2017
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