CN111678591A - Device and method for testing multispectral laser power - Google Patents

Device and method for testing multispectral laser power Download PDF

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CN111678591A
CN111678591A CN202010507718.5A CN202010507718A CN111678591A CN 111678591 A CN111678591 A CN 111678591A CN 202010507718 A CN202010507718 A CN 202010507718A CN 111678591 A CN111678591 A CN 111678591A
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laser power
laser
testing
spectral
multispectral
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CN111678591B (en
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王涛
张玉莹
麻云凤
满在刚
王哲
高和平
王帅
娄玮
樊仲维
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Aerospace Information Research Institute of CAS
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    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J1/00—Photometry, e.g. photographic exposure meter
    • G01J1/02—Details
    • G01J1/04—Optical or mechanical part supplementary adjustable parts
    • G01J1/0488—Optical or mechanical part supplementary adjustable parts with spectral filtering
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J1/00—Photometry, e.g. photographic exposure meter
    • G01J1/42—Photometry, e.g. photographic exposure meter using electric radiation detectors
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J1/00—Photometry, e.g. photographic exposure meter
    • G01J1/42—Photometry, e.g. photographic exposure meter using electric radiation detectors
    • G01J1/4257—Photometry, e.g. photographic exposure meter using electric radiation detectors applied to monitoring the characteristics of a beam, e.g. laser beam, headlamp beam
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J3/00—Spectrometry; Spectrophotometry; Monochromators; Measuring colours
    • G01J3/02—Details
    • G01J3/0205—Optical elements not provided otherwise, e.g. optical manifolds, diffusers, windows
    • G01J3/0254—Spectrometers, other than colorimeters, making use of an integrating sphere
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J3/00—Spectrometry; Spectrophotometry; Monochromators; Measuring colours
    • G01J3/28—Investigating the spectrum
    • G01J3/2803—Investigating the spectrum using photoelectric array detector
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J3/00—Spectrometry; Spectrophotometry; Monochromators; Measuring colours
    • G01J3/28—Investigating the spectrum
    • G01J3/30—Measuring the intensity of spectral lines directly on the spectrum itself

Abstract

The invention discloses a multispectral laser power testing device and a multispectral laser power testing method, wherein the device comprises an integrating sphere, a spectrum testing module and a laser power testing module, wherein the spectrum testing module and the laser power testing module are installed on the integrating sphere, one side of the integrating sphere is provided with a light inlet, multispectral laser to be tested enters the integrating sphere through the light inlet, and uniform light distribution is formed in the whole integrating sphere; the spectrum testing module is used for testing the spectral characteristics of the laser incident into the integrating sphere; the laser power testing module is used for testing the laser power, and the laser power testing module converts an optical signal into an electric signal to be output through the opening on the integrating sphere and realizes the test of the multispectral laser power. The method and the device can overcome the problem that the photoelectric detector cannot accurately test the power of the multispectral laser due to the fact that the responsivity changes with the wavelength, and realize the rapid test of the power of the multispectral laser.

Description

Device and method for testing multispectral laser power
Technical Field
The invention relates to the technical field of laser power testing, in particular to a device and a method for testing multispectral laser power.
Background
The laser has the advantages of high brightness, high coherence and high directivity which cannot be compared with a common light source, and can obtain very high laser power density through convergence of an optical system to realize local melting of materials such as metal.
The laser power is an important parameter for measuring the laser performance, and particularly for the laser processing field depending on the high-power characteristic of the laser, the size of the laser power directly determines the processing capacity of laser processing equipment, so that accurate testing is required. The laser power testing method can be divided into a light-electricity type and a light-heat-electricity type from a testing principle, the light-electricity type laser testing method is to directly convert laser to be tested into an electric signal which can be a current signal, a voltage signal or a charge signal, the power of the laser to be tested is obtained by measuring the electric signal and carrying out reverse extrapolation, and a PIN photodiode is commonly used and has higher responsivity and a larger linear region; the optical-thermal-electrical laser power testing method comprises the steps of firstly converting laser to be tested into a thermal signal, then converting the thermal signal into an electrical signal, processing the electrical signal, and reversely deducing to obtain the power of the laser to be tested.
In the method, the optical-thermal-electrical laser power test mode needs to be converted into heat before converting incident laser into an electrical signal, so that the processing of a thermal signal is increased, the response time can be greatly prolonged, the response time can be generally in the second order or even longer, the thermal signal is inevitably influenced by the ambient temperature in the measurement, the test precision of the laser power can be influenced by the change of the ambient temperature, in addition, in order to protect components in the test device from performance reduction and even damage caused by the rise of the working temperature, a heat dissipation structure needs to be designed, effective heat dissipation measures are taken, the higher the laser power to be tested is, the higher the requirements on the heat dissipation structure and the heat dissipation measures are, and the complexity of the laser power test system can be increased.
The photoelectric laser power test is to directly convert an optical signal into an electrical signal without the conversion of a thermal signal, so that the photoelectric laser power test has shorter response time and can quickly measure the power of laser to be measured, but the photoelectric laser power test mode is based on a photoelectric sensor, and the photoelectric sensor has high sensitivity and low saturation threshold, cannot directly test the laser with higher power and needs to attenuate incident laser; meanwhile, because the spectral response of the photoelectric sensor is uneven, and lights with different wavelengths correspond to different responsivities, the laser power can be accurately measured only by giving the wavelength of the laser to be measured in the photoelectric laser power testing mode, and if the incident laser wavelength is not the single wavelength, the power of the incident laser to be measured cannot be given.
Disclosure of Invention
The invention aims to provide a device and a method for testing multispectral laser power, which can solve the problem that the multispectral laser cannot be accurately tested due to the fact that the responsivity of a photoelectric detector changes along with the wavelength, and realize the rapid test of the multispectral laser power.
The purpose of the invention is realized by the following technical scheme:
a multispectral laser power testing device, the device comprising an integrating sphere, a spectral testing module and a laser power testing module, the spectral testing module and the laser power testing module being mounted on the integrating sphere, wherein:
a light inlet hole is formed in one side of the integrating sphere, multispectral laser to be measured enters the integrating sphere through the light inlet hole, is subjected to diffuse reflection through a diffuse reflection medium on the inner surface of the integrating sphere, and forms uniform light distribution in the whole integrating sphere after multiple diffuse reflections;
the spectrum testing module is used for testing the spectral characteristics of the laser incident into the integrating sphere and testing the spectral distribution of the multispectral laser to be tested;
the laser power testing module is used for testing laser power, light in the integrating sphere enters the laser power testing module through an opening on the integrating sphere, the laser power testing module converts an optical signal into an electric signal to be output, and testing of multispectral laser power is realized, and the specific testing process is as follows:
firstly, enabling multispectral laser to be tested to enter an integrating sphere, and obtaining a spectral distribution curve of the multispectral laser to be tested by a spectral testing module; recording the response value of the laser power testing module, and calculating to obtain an integral laser power coefficient according to the spectral response curves of the spectral testing module and the laser power testing module and the spectral distribution curve of the multispectral laser to be tested; and then dividing the spectral distribution curve of the multispectral laser to be tested by the spectral response curve of the spectral test module, integrating the wavelength in the multispectral laser coverage range, and multiplying by the integral laser power coefficient to obtain the incident laser power of the multispectral laser to be tested.
According to the technical scheme provided by the invention, the method and the device can solve the problem that the photoelectric detector cannot accurately test the power of the multispectral laser due to the fact that the responsivity changes along with the wavelength, and realize the rapid test of the power of the multispectral laser.
Drawings
In order to more clearly illustrate the technical solutions of the embodiments of the present invention, the drawings needed to be used in the description of the embodiments are briefly introduced below, and it is obvious that the drawings in the following description are only some embodiments of the present invention, and it is obvious for those skilled in the art to obtain other drawings based on the drawings without creative efforts.
Fig. 1 is a schematic structural diagram of a device for testing multispectral laser power according to an embodiment of the present invention;
FIG. 2 is a spectral band diagram of 5 center wavelengths according to an embodiment of the present invention;
FIG. 3 is a schematic structural diagram of a spectrum testing module according to an embodiment of the present invention;
FIG. 4 is a schematic structural diagram of a laser power test module according to an embodiment of the present invention;
fig. 5 is a schematic flow chart of a testing method according to an embodiment of the present invention.
Detailed Description
The technical solutions in the embodiments of the present invention are clearly and completely described below with reference to the drawings in the embodiments of the present invention, and it is obvious that the described embodiments are only a part of the embodiments of the present invention, and not all embodiments. All other embodiments, which can be derived by a person skilled in the art from the embodiments of the present invention without making any creative effort, shall fall within the protection scope of the present invention.
The following will describe an embodiment of the present invention in further detail with reference to the accompanying drawings, and as shown in fig. 1, a schematic structural diagram of a multispectral laser power testing apparatus provided by the embodiment of the present invention is shown, where the apparatus mainly includes an integrating sphere 1, a spectrum testing module 2, and a laser power testing module 3, where the spectrum testing module 2 and the laser power testing module 3 are installed on the integrating sphere 1, where:
a light inlet 4 is arranged on one side of the integrating sphere 1, multispectral laser 5 to be measured enters the integrating sphere 1 through the light inlet 4, is subjected to diffuse reflection by a diffuse reflection medium on the inner surface of the integrating sphere 1, and forms uniform light distribution in the whole integrating sphere after multiple diffuse reflections;
the spectrum testing module 2 is used for testing the spectral characteristics of the laser incident into the integrating sphere 1 and testing the spectral distribution of the multispectral laser 5 to be tested;
the laser power testing module 3 is used for testing laser power, light in the integrating sphere 1 enters the laser power testing module 3 through an opening on the integrating sphere 1, the laser power testing module 3 converts an optical signal into an electric signal to be output, and testing of multispectral laser power is realized, and the specific testing process is as follows:
firstly, enabling multispectral laser to be tested to enter an integrating sphere, and obtaining a spectral distribution curve of the multispectral laser to be tested by a spectral testing module; recording the response value of the laser power testing module, and calculating to obtain an integral laser power coefficient according to the spectral response curves of the spectral testing module and the laser power testing module and the spectral distribution curve of the multispectral laser to be tested; and then dividing the spectral distribution curve of the multispectral laser to be tested by the spectral response curve of the spectral test module, integrating the wavelength in the multispectral laser coverage range, and multiplying by the integral laser power coefficient to obtain the incident laser power of the multispectral laser to be tested.
In a specific implementation, the multispectral laser 5 to be measured includes a plurality of spectral bands, and the spectral width and the laser power distribution of each spectral band may be the same or different, for example, as shown in fig. 2, a spectral band diagram of 5 central wavelengths provided in an embodiment of the present invention, where the spectral width and the peak power of the 5 spectral bands are different. In fact, if the spectral bands of the incident laser are very narrow, for example, the spectral bands of the light emitted by the solid-state laser and the optical fiber laser are very narrow, and the responsivity of the photodetector changes very little within the spectral width, the spectral bands can be directly represented by the wavelengths, and the incident multispectral laser becomes the multi-wavelength laser, so the multi-wavelength laser can be regarded as a special case of the multispectral laser, and the example is also suitable for the test of the power of the multi-wavelength laser.
Moreover, the spectral bands of the multispectral laser 5 to be tested can be independent from each other or overlapped with each other, and the testing device provided by the embodiment is suitable for the independent spectral bands and the spectral bands with overlapped regions.
Fig. 3 is a schematic structural diagram of the spectrum testing module according to the embodiment of the present invention, where the spectrum testing module 2 includes a transmission light path portion 21, a light splitting portion 22, and a spectrum detecting portion 23, where:
the transmission light path part 21 adopts an optical fiber and is connected with the integrating sphere 1 through an optical fiber connector, and the spectral transmission range of the optical fiber covers the spectral distribution range of the multispectral laser 5 to be detected; an optical fiber connecting seat is arranged on the integrating sphere 1, an optical fiber connector is arranged at one end of the optical fiber of the transmission light path part 21, which is connected with the integrating sphere 1, and the integrating sphere 1 and the spectrum testing module 2 can be conveniently connected and disconnected through the optical fiber connecting seat and the optical fiber connector;
the light splitting part 22 is used for splitting incident light according to a spectrum, the adopted light splitting element is a grating, the diffraction effect of the grating is utilized to obtain the spectrum distribution, and the multispectral laser 5 to be detected reaches the spectrum detection part 23 after being split;
the spectrum detection part 23 adopts a common single-point photoelectric detector or a linear array CCD to realize spectrum test. In a specific implementation, if a common single-point photodetector is adopted, the light splitting portion 22 is required to have a mechanical rotation function, and light with different wavelengths sequentially passes through the single-point photodetector through rotation to realize spectrum testing; and if the linear array CCD is adopted, because a plurality of detection points are distributed on the CCD, multi-point detection can be realized, and through reasonable layout of light paths, the spectrum separated by the light splitting part 22 can completely fall on a CCD photosensitive area without using a mechanical rotating mechanism, so that spectrum testing is realized.
Fig. 4 is a schematic structural diagram of a laser power testing module according to an embodiment of the present invention, where the laser power testing module includes a light attenuating portion 31 and a light power detecting portion 32, where:
the light attenuation part 31 is arranged in front of the optical power detection part 32 and is used for attenuating the laser light entering the optical power detection part 32; the light attenuation part 31 and the light power detection part 32 form a whole, the light attenuation part 31 is connected with the integrating sphere 1, and the whole laser power test module is arranged on the integrating sphere 1; the homogenized light in the integrating sphere 1 passes through the opening corresponding to the laser power testing module, passes through the light attenuating part 31, and then enters the light power detecting part 32.
In a specific implementation, the attenuation amount of the optical attenuation portion 31 depends on the power range of the laser to be measured, the size of the integrating sphere, and the linear region of the optical power detection portion 32, and it is required to ensure that the optical power reaching the optical power detection portion 32 is in the linear response region.
The optical power detecting part 32 may be implemented by a photocell, a photodiode, or a phototransistor.
Based on the above-mentioned testing apparatus, the present application further provides a method for testing multispectral laser power, and as shown in fig. 5, the method provided by the embodiment of the present invention includes:
step 1, enabling multispectral laser to be tested to enter an integrating sphere, and obtaining a spectral distribution curve of the multispectral laser to be tested by a spectral testing module arranged on the integrating sphere;
step 2, recording a response value of a laser power test module arranged on the integrating sphere, and calculating to obtain an integral laser power coefficient according to the spectrum response curves of the spectrum test module and the laser power test module and the spectrum distribution curve of the multispectral laser to be tested;
in this step, the spectral response curves of the spectral test module and the laser power test module are obtained as follows:
making light with wavelength of lambda incident on the spectrum test module, regulating incident light power to make it in linear response range, and recording incident light power P01(lambda) and a response Q corresponding to the spectral test module01(lambda), finding η the response coefficient of the spectrum test module to wavelength lambda01(λ)：
Figure BDA0002527138200000051
Changing the wavelength lambda of the light to obtain a spectral response curve of the spectral test module, i.e. η01(λ) a curve which varies with λ;
the light with the wavelength of lambda is incident to the laser power test module, the incident light power is adjusted to be within the linear response range, and the incident light power P is recorded02(lambda) and a response value Q corresponding to the laser power test module02(lambda), finding η response coefficient of laser power test module corresponding to wavelength lambda02(λ)：
Figure BDA0002527138200000061
Changing the wavelength lambda of the light to obtain the spectral response curve of the laser power test module, namely η02(λ) curve with λ.
In addition, the calculation process of the integral laser power coefficient specifically includes:
recording the response value Q of the laser power test modulezThe meter of the integral laser power coefficientThe calculation formula is as follows:
Figure BDA0002527138200000062
wherein Q is0x(lambda) is the response value of the spectrum test module corresponding to the wavelength lambda, η01(lambda) is the response coefficient of the spectrum test module to wavelength lambda, η02(lambda) is the response coefficient of the laser power test module corresponding to the wavelength lambda; the integral range of the above formula is the coverage range of the multispectral laser spectrum.
And 3, dividing the spectral distribution curve of the multispectral laser to be tested by the spectral response curve of the spectral test module, integrating the wavelength in the coverage range of the multispectral laser, and multiplying the integrated laser power coefficient obtained in the step 2 to obtain the incident laser power of the multispectral laser to be tested.
In this step, the calculation formula of the incident laser power of the multispectral laser to be measured is:
Figure BDA0002527138200000063
the above integral range is also the multispectral laser spectral coverage.
In a specific implementation, the spectral distribution curve of the multispectral laser to be tested and the spectral response curve of the laser power testing module adopt lasers with limited wavelengths during testing, and response data between the testing wavelengths are obtained by an interpolation method.
In summary, the method and the device described in the embodiment of the present application use the integrating sphere to perform the optical power test, which has low requirement on the collimation of the incident light, and use the integrating sphere with a suitable size can increase the photosensitive surface, so as to be suitable for the laser power test with a larger spot size, thereby overcoming the problem that the accurate power test cannot be performed on the multispectral laser due to the change of the responsivity along with the wavelength of the photodetector, and realizing the rapid test on the multispectral laser power.
It is noted that those skilled in the art will recognize that embodiments of the present invention are not described in detail herein.
The above description is only for the preferred embodiment of the present invention, but the scope of the present invention is not limited thereto, and any changes or substitutions that can be easily conceived by those skilled in the art within the technical scope of the present invention are included in the scope of the present invention. Therefore, the protection scope of the present invention shall be subject to the protection scope of the claims.

Claims (8)

1. A multispectral laser power testing device is characterized by comprising an integrating sphere, a spectrum testing module and a laser power testing module, wherein the spectrum testing module and the laser power testing module are installed on the integrating sphere, and the multispectral laser power testing device comprises:
a light inlet hole is formed in one side of the integrating sphere, multispectral laser to be measured enters the integrating sphere through the light inlet hole, is subjected to diffuse reflection through a diffuse reflection medium on the inner surface of the integrating sphere, and forms uniform light distribution in the whole integrating sphere after multiple diffuse reflections;
the spectrum testing module is used for testing the spectral characteristics of the laser incident into the integrating sphere and testing the spectral distribution of the multispectral laser to be tested;
the laser power testing module is used for testing laser power, light in the integrating sphere enters the laser power testing module through an opening on the integrating sphere, the laser power testing module converts an optical signal into an electric signal to be output, and testing of multispectral laser power is realized, and the specific testing process is as follows:
firstly, enabling multispectral laser to be tested to enter an integrating sphere, and obtaining a spectral distribution curve of the multispectral laser to be tested by a spectral testing module; recording the response value of the laser power testing module, and calculating to obtain an integral laser power coefficient according to the spectral response curves of the spectral testing module and the laser power testing module and the spectral distribution curve of the multispectral laser to be tested; and then dividing the spectral distribution curve of the multispectral laser to be tested by the spectral response curve of the spectral test module, integrating the wavelength in the multispectral laser coverage range, and multiplying by the integral laser power coefficient to obtain the incident laser power of the multispectral laser to be tested.
2. The device for testing multispectral laser power according to claim 1,
the multispectral laser to be detected comprises a plurality of spectral bands, and the spectral width and the laser power distribution of each spectral band are the same or different;
and the spectral bands of the multispectral laser to be detected are independent from each other or overlapped.
3. The apparatus for testing multispectral laser power as recited in claim 1, wherein the spectral testing module comprises a transmission optical path portion, a light splitting portion, and a spectral detection portion, wherein:
the transmission light path part adopts optical fibers and is connected with the integrating sphere through an optical fiber connector, and the spectral transmission range of the optical fibers covers the spectral distribution range of the multispectral laser to be detected; an optical fiber connecting seat is arranged on the integrating sphere, an optical fiber connector is arranged at one end of the optical fiber of the transmission light path part, which is connected with the integrating sphere, and the integrating sphere and the spectrum testing module are conveniently connected and disconnected through the optical fiber connecting seat and the optical fiber connector;
the light splitting part is used for splitting incident light according to a spectrum, the adopted light splitting element is a grating, the diffraction effect of the grating is utilized to obtain the spectral distribution, and the multispectral laser to be detected reaches the spectrum detection part after being split;
the spectrum detection part adopts a common single-point photoelectric detector or a linear array CCD to realize spectrum test.
4. The apparatus for testing multispectral laser power as claimed in claim 1, wherein the laser power testing module comprises an optical attenuation portion and an optical power detection portion, wherein:
the light attenuation part is arranged in front of the optical power detection part and is used for attenuating laser incident to the optical power detection part;
the light attenuation part and the light power detection part form a whole, the light attenuation part is connected with the integrating sphere, and the whole laser power test module is arranged on the integrating sphere; the homogenized light in the integrating sphere passes through the opening corresponding to the laser power testing module and enters the light power detection part after passing through the light attenuation part.
5. The device for testing multispectral laser power according to claim 4,
the optical power detection part adopts a photocell, a photodiode or a phototriode.
6. A method for testing multispectral laser power, the method comprising:
step 1, enabling multispectral laser to be tested to enter an integrating sphere, and obtaining a spectral distribution curve of the multispectral laser to be tested by a spectral testing module arranged on the integrating sphere;
step 2, recording a response value of a laser power test module arranged on the integrating sphere, and calculating to obtain an integral laser power coefficient according to the spectrum response curves of the spectrum test module and the laser power test module and the spectrum distribution curve of the multispectral laser to be tested;
and 3, dividing the spectral distribution curve of the multispectral laser to be tested by the spectral response curve of the spectral test module, integrating the wavelength in the coverage range of the multispectral laser, and multiplying the integrated laser power coefficient obtained in the step 2 to obtain the incident laser power of the multispectral laser to be tested.
7. The method for testing multispectral laser power according to claim 6, wherein in step 2, the spectral response curves of the spectral test module and the laser power test module are obtained by:
wave of vibrationThe light incidence spectrum test module with the length of lambda adjusts the incident light power to be in a linear response range, and records the incident light power P01(lambda) and a response Q corresponding to the spectral test module01(lambda), finding η the response coefficient of the spectrum test module to wavelength lambda01(λ)：
Figure FDA0002527138190000021
Changing the wavelength lambda of the light to obtain a spectral response curve of the spectral test module, i.e. η01(λ) a curve which varies with λ;
the light with the wavelength of lambda is incident to the laser power test module, the incident light power is adjusted to be within the linear response range, and the incident light power P is recorded02(lambda) and a response value Q corresponding to the laser power test module02(lambda), finding η response coefficient of laser power test module corresponding to wavelength lambda02(λ)：
Figure FDA0002527138190000031
Changing the wavelength lambda of the light to obtain the spectral response curve of the laser power test module, namely η02(λ) curve with λ.
8. The method for testing multispectral laser power as claimed in claim 6, wherein in step 2, the calculation process of the integrated laser power coefficient is specifically as follows:
recording the response value Q of the laser power test modulezThe calculation formula of the integral laser power coefficient is as follows:
Figure FDA0002527138190000032
wherein Q is0x(lambda) is the response value of the spectrum test module corresponding to the wavelength lambda, η01(lambda) is the response coefficient of the spectral test module corresponding to the wavelength lambda;η02(lambda) is the response coefficient of the laser power test module corresponding to the wavelength lambda; the integral range of the above formula is the coverage range of the multispectral laser spectrum.
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Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN114252239A (en) * 2020-09-25 2022-03-29 北京振兴计量测试研究所 Optical axis calibration device for multispectral composite photoelectric detection equipment
CN116858503A (en) * 2023-09-01 2023-10-10 武汉普赛斯仪表有限公司 Narrow pulse optical power measurement system and method

Citations (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN2665682Y (en) * 2003-12-01 2004-12-22 中国科学院安徽光学精密机械研究所 Device for measuring diffuse reflection integral laser power energy
JP2011145274A (en) * 2009-12-16 2011-07-28 Hioki Ee Corp Photometric device
CN103162822A (en) * 2013-02-28 2013-06-19 中国人民解放军国防科学技术大学 Online monitoring system of optical fiber laser output power based on integrating sphere
CN105737995A (en) * 2016-03-25 2016-07-06 中国科学院上海光学精密机械研究所 High-power laser multi-parameter measurement device based on integrating sphere
CN107748006A (en) * 2017-10-19 2018-03-02 陆耀东 A kind of no pulse broadening integrating sphere detector
CN210513418U (en) * 2019-09-20 2020-05-12 杭州远方光电信息股份有限公司 Laser measuring device

Patent Citations (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN2665682Y (en) * 2003-12-01 2004-12-22 中国科学院安徽光学精密机械研究所 Device for measuring diffuse reflection integral laser power energy
JP2011145274A (en) * 2009-12-16 2011-07-28 Hioki Ee Corp Photometric device
CN103162822A (en) * 2013-02-28 2013-06-19 中国人民解放军国防科学技术大学 Online monitoring system of optical fiber laser output power based on integrating sphere
CN105737995A (en) * 2016-03-25 2016-07-06 中国科学院上海光学精密机械研究所 High-power laser multi-parameter measurement device based on integrating sphere
CN107748006A (en) * 2017-10-19 2018-03-02 陆耀东 A kind of no pulse broadening integrating sphere detector
CN210513418U (en) * 2019-09-20 2020-05-12 杭州远方光电信息股份有限公司 Laser measuring device

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN114252239A (en) * 2020-09-25 2022-03-29 北京振兴计量测试研究所 Optical axis calibration device for multispectral composite photoelectric detection equipment
CN116858503A (en) * 2023-09-01 2023-10-10 武汉普赛斯仪表有限公司 Narrow pulse optical power measurement system and method
CN116858503B (en) * 2023-09-01 2023-12-12 武汉普赛斯仪表有限公司 Narrow pulse optical power measurement system and method

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