CN111677925B - Vacuum electric control proportional valve - Google Patents

Vacuum electric control proportional valve Download PDF

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Publication number
CN111677925B
CN111677925B CN201910202448.4A CN201910202448A CN111677925B CN 111677925 B CN111677925 B CN 111677925B CN 201910202448 A CN201910202448 A CN 201910202448A CN 111677925 B CN111677925 B CN 111677925B
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China
Prior art keywords
vacuum
valve
pressure
channel
main
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CN111677925A (en
Inventor
游平政
郑志圣
陈郁澧
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TAIWAN CHELIC CORP
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TAIWAN CHELIC CORP
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    • FMECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16KVALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
    • F16K31/00Actuating devices; Operating means; Releasing devices
    • F16K31/02Actuating devices; Operating means; Releasing devices electric; magnetic
    • F16K31/06Actuating devices; Operating means; Releasing devices electric; magnetic using a magnet, e.g. diaphragm valves, cutting off by means of a liquid
    • F16K31/0675Electromagnet aspects, e.g. electric supply therefor
    • FMECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16KVALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
    • F16K17/00Safety valves; Equalising valves, e.g. pressure relief valves
    • F16K17/20Excess-flow valves
    • FMECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16KVALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
    • F16K37/00Special means in or on valves or other cut-off apparatus for indicating or recording operation thereof, or for enabling an alarm to be given
    • F16K37/0025Electrical or magnetic means
    • F16K37/005Electrical or magnetic means for measuring fluid parameters
    • FMECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16KVALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
    • F16K7/00Diaphragm valves or cut-off apparatus, e.g. with a member deformed, but not moved bodily, to close the passage ; Pinch valves
    • F16K7/12Diaphragm valves or cut-off apparatus, e.g. with a member deformed, but not moved bodily, to close the passage ; Pinch valves with flat, dished, or bowl-shaped diaphragm

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  • Engineering & Computer Science (AREA)
  • General Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Physics & Mathematics (AREA)
  • Electromagnetism (AREA)
  • Control Of Fluid Pressure (AREA)
  • Fluid-Driven Valves (AREA)

Abstract

The invention discloses a vacuum electric control proportional valve, which is composed of a valve seat combined with a guide seat, wherein a vacuum solenoid valve, an atmosphere solenoid valve and a sensor are connected above the guide seat, a main diaphragm is clamped between the guide seat and the valve seat to form a vacuum pressure cavity, a pilot exhaust straight rod provided with a vacuum valve set is embedded in the center of the main diaphragm, a main channel for communicating a primary pressure and a secondary pressure is arranged between the valve seat and the guide seat, the main channel is also provided with a guide channel and a feedback channel, an adjusting channel for controlling a switch by the vacuum solenoid valve and the atmosphere solenoid valve is additionally arranged above the vacuum pressure cavity, a pilot atmosphere channel for communicating atmospheric pressure is arranged in the valve seat and communicated to the space below the main diaphragm, and a first vacuum breaking valve is arranged above the valve seat, and a second vacuum breaking valve is arranged above the vacuum valve group and on the guide exhaust straight rod.

Description

Vacuum electric control proportional valve
Technical Field
The invention relates to a vacuum electric control proportional valve, which is characterized in that a pilot exhaust straight rod and a vacuum valve set arranged in the vacuum electric control proportional valve are further matched with a pilot atmosphere channel to introduce atmospheric pressure, so that the pilot exhaust straight rod can be matched with and adjust the vacuum strength in two stages, and the purposes of energy saving and precise adjustment can be achieved.
Background
Referring to fig. 11, a vacuum electrically controlled proportional valve widely used in the field of automation equipment generally includes a regular set hole (91) having an absorption object, a regular vacuum hole (92) connected to a vacuum pump, and a regular atmospheric hole (93) for adjusting a vacuum pressure, and when the vacuum pump is operated, a pressure of the regular set hole (91) and a fluid flow direction of the fluid to the regular vacuum hole (92) are sucked through an internal passage of the vacuum electrically controlled proportional valve to form a vacuum, as indicated by arrows in the drawing.
In the testing process of the vacuum electric control proportional valve, an operator needs to accumulate experience for a long time and repeatedly test to manufacture a good vacuum electric control proportional valve, but a loop in the structure of the vacuum electric control proportional valve is relatively complex, so that a vacuum air pressure pipeline for testing and equipment need to be connected in a 90-degree corner mode, and for the testing operator, when the vacuum air pressure pipeline cannot be connected with the equipment in a straight-in and straight-out assembling mode for testing, more time and energy are consumed.
At present, if a loop in the conventional vacuum electronic control proportional valve needs to be modified aiming at an internal air pressure loop, much time and money are needed for improvement, although the connection mode of an external vacuum air pressure pipeline can be changed, the matching of various parts also needs to be tested one by one, wherein if the original fine level of vacuum regulation and control needs to be maintained, related vacuum regulation and control parts need to be redesigned; thus, there are many improvements that can be made.
Disclosure of Invention
The invention aims to provide a vacuum electric control proportional valve, which solves the technical problems in the prior art, can utilize a first vacuum breaking valve arranged in a valve seat by a guide exhaust straight rod and a second vacuum breaking valve arranged by matching with a vacuum valve group, thereby reducing the complex loop of the internal structure of the vacuum electric control proportional valve, and can precisely adjust the intensity of vacuum pressure and shorten the reaction time of the vacuum electric control proportional valve by opening and closing the first vacuum breaking valve and the second vacuum breaking valve.
The invention provides a vacuum electric control proportional valve, which comprises: a main diaphragm is arranged above the valve seat, the main diaphragm is clamped by the combination guide seat to form a vacuum pressure cavity, an elastic component is arranged above the main diaphragm, a guide exhaust straight rod is embedded in the center of the main diaphragm, the guide exhaust straight rod is also provided with a vacuum valve group, a vacuum solenoid valve, an atmospheric solenoid valve and a sensor are also arranged above the guide seat, and an adjusting channel is connected to the upper part of the vacuum pressure cavity and is controlled by a vacuum pressure electromagnetic valve and an atmosphere pressure electromagnetic valve, a pilot atmospheric channel arranged in the valve seat and communicated with the space below the main diaphragm for general use of atmospheric pressure flow, and a main channel arranged between the valve seat and the pilot seat and capable of general use of primary side pressure and secondary side pressure flow, and a guide channel controlled by a vacuum piezoelectric valve and a feedback channel connected with the sensor are arranged in the main channel.
When the primary side pressure is matched with the vacuum piezoelectric solenoid valve through a guide channel to operate, a vacuum pressure is generated in a vacuum pressure cavity through an adjusting channel, so that the main diaphragm is upwards linked with the pilot exhaust straight rod, the main valve below the vacuum valve group is driven to open, the primary side pressure forms a secondary side pressure through the main valve, the purpose of vacuum adsorption is achieved, and the pilot exhaust straight rod is linked to enable the main valve to be in a stable pressure state after the main valve is closed until the main diaphragm moves downwards to return to the horizontal position.
When the atmospheric pressure electromagnetic valve is led in the atmospheric pressure continuously, the second vacuum breaking valve is opened, so that the atmospheric pressure passes through more parts, the reaction time for reducing the vacuum adsorption can be shortened, and the purposes of energy saving and precise adjustment can be achieved.
Drawings
Fig. 1 is a perspective view of the present invention.
Fig. 2 is a perspective view from another perspective of the present invention.
FIG. 3 is a schematic diagram of the circuit of the present invention.
FIG. 4 is a schematic diagram of the present invention in a ready state.
FIG. 5 is a schematic structural diagram of the present invention in a working state.
FIG. 6 is a schematic diagram of a structure in a voltage stabilizing state according to the present invention.
FIG. 7 is a schematic structural view of the present invention in a first stage vacuum breaking state.
FIG. 8 is an enlarged view of a portion of FIG. 7 according to the present invention.
FIG. 9 is a schematic structural view of the second stage of the vacuum breaking state of the present invention.
FIG. 10 is an enlarged view of a portion of FIG. 9 according to the present invention.
Fig. 11 is a schematic diagram of a conventional structure.
Description of reference numerals:
(10) .. valve seat
(101) .. guide channel
(102) .. feedback channel
(11) .. Main diaphragm
(111) .. elastic component
(12) .. vacuum pressure chamber
(121) .. adjusting passage
(122) .. Pilot atmospheric air passage
(123) .. atmosphere channel
(20) .. guiding exhaust straight rod
(201) .. first vacuum break valve
(202) .. second vacuum break valve
(203) .. Main valve
(204) .. Limit convex hook
(21) .. vacuum valve set
(22) .. convex part
(23) .. spring
(30) .. guiding seat
(31) .. vacuum piezoelectric solenoid valve
(32) .. atmospheric pressure solenoid valve
(321) .. atmosphere port
(33) .. sensor
(40) .. Main channel
(P.) control circuit
(PR.) power supply
(PI.) force signal
Pressure representation
(PO.) output signal
Atmospheric pressure
Vacuum pressure
(P1.) the primary side pressure
(P2.) secondary side pressure
(A) .. atmosphere hole
Setting a hole
(V.) vacuum hole
(91) .. conventional setting hole
(92) .. conventional vacuum hole
(93) .. conventional atmospheric vent.
Detailed Description
The embodiments described below with reference to the drawings are illustrative only and should not be construed as limiting the invention.
The invention discloses a vacuum electric control proportional valve, the structure of which comprises: a valve seat 10, a guide seat 30 is combined above the valve seat 10, a main diaphragm 11 is sandwiched between the guide seat 30 and the valve seat 10 to form a vacuum pressure chamber 12, an elastic component 111 is disposed above the main diaphragm 11, the elastic component 111 is a spring, and a pilot exhaust straight rod 20 is further embedded in the center of the main diaphragm 11, the pilot exhaust straight rod 20 is further provided with a vacuum valve set 21, the vacuum valve set 21 is composed of: the two convex parts 22 are formed by matching a spring 23 with the convex surfaces opposite to each other, the convex part 22 is designed to be through inside, and the pilot straight exhaust rod 20 can be arranged therein, and the upper and lower parts of the lateral edge of the pilot straight exhaust rod 20 are respectively provided with a limiting convex stopper 204, so that the stroke of the pilot straight exhaust rod 20 in the up-and-down displacement can be limited.
A vacuum solenoid valve 31, an atmospheric solenoid valve 32, and a sensor 33 are further connected to the upper portion of the guiding seat 30, and an adjusting channel 121 is connected to the upper portion of the vacuum pressure chamber 12, and is controlled to open and close by the vacuum solenoid valve 31 and the atmospheric solenoid valve 32.
A pilot atmospheric channel 122, which is disposed in the valve seat 10 and connected to the space below the main diaphragm 11, so as to allow an atmospheric pressure PP to flow therethrough; and a main channel 40 disposed between the valve seat 10 and the guide seat 30, wherein the main channel 40 is used for communicating the primary pressure P1 and the secondary pressure P2, and a guide channel 101 controlled by the vacuum solenoid valve 31 and a feedback channel 102 connected to the sensor 33 are further disposed in the main channel 40.
The pilot straight exhaust rod 20 is provided with a first vacuum breaking valve 201 above the valve seat 10, and a second vacuum breaking valve 202 is further provided above the vacuum valve set 21 and the pilot straight exhaust rod 20, when the primary pressure P1 cooperates with the vacuum solenoid valve 31 through the guide channel 101, a vacuum pressure PT is generated in the vacuum pressure chamber 12 through the adjustment channel 121, so that the main diaphragm 11 is moved upward and links with the pilot straight exhaust rod 20, and further a main valve 203 below the vacuum valve set 21 is driven to open, and the primary pressure P1 forms a secondary pressure P2 through the main valve 203, so as to achieve the purpose of vacuum adsorption until the main diaphragm 11 moves downward to return to a horizontal position, and the pilot straight exhaust rod 20 is linked to make the main valve 203 in a stable pressure state after being closed.
When the atmospheric pressure solenoid valve 32 opens and presses the main diaphragm 11 to move downward through the adjustment channel 121, the atmospheric pressure PP opens through the pilot atmospheric channel 122 to the first vacuum break valve 201, allowing the atmospheric pressure PP to partially pass through, so as to reduce the vacuum adsorption strength, and when the atmospheric pressure PP is continuously input, the second vacuum break valve 202 is opened, so that the atmospheric pressure PP passes through more, so as to shorten the reaction time for reducing the vacuum adsorption.
Referring to fig. 1-2, it can be seen that the connecting ends of the valve seat 10 are respectively used for a set hole O for absorbing an object, a vacuum hole V for connecting a vacuum pump, and an atmospheric hole a for adjusting atmospheric pressure, and by the design of the internal structure, after the pipelines for testing are connected, the pipelines are moved from the set hole O to the vacuum hole V and then moved out, and the special way of 90 degrees rotation of the conventional structure is not needed for testing, so that the inconvenience of complicated and repeated testing work can be improved.
Referring to fig. 3-4, it can be seen that the vacuum solenoid valve 31, the atmospheric solenoid valve 32, and the sensor 33 are driven by a control circuit P via a power supply PR, and then a force input signal P I and a force output signal PO are set, and then the vacuum solenoid valve 31 and the atmospheric solenoid valve 32 are driven by a display related pressure representation PS of the control circuit P, and the sensor 33 is mainly used for detecting the pressure of the secondary pressure P2, and when the pressure exceeds or is lower than a set value of the secondary pressure P2, the sensor is used for feeding back information to the control circuit P to distinguish between the vacuum solenoid valve 31 and the atmospheric solenoid valve 32, and driving subsequent related control actions via the control circuit P, which is a common measure and will not be described again.
Fig. 4 is a preparation state of the present invention, it can be seen that the vacuum solenoid valve 31 and the atmospheric solenoid valve 32 are both in an inactive state, the main valve 203 in the main channel 40 is closed, and a part of the atmospheric pressure PP flows to the lower side of the main diaphragm 11 in the pilot atmospheric channel 122, but the main diaphragm 11 is elastically pre-compressed by the upper elastic component 111, so that the main diaphragm 11 is kept below the horizontal level, and the atmospheric pressure PP flows to the secondary pressure P2 through the first vacuum break valve 201, at this time, the secondary pressure P2 is equal to the atmospheric pressure PP, and the level is described herein with reference to two ends of the main diaphragm 11, and then the center of the main diaphragm 11 is compared with the reference of two ends.
Referring to fig. 5, in an operating state, it is first seen that the vacuum solenoid valve 31 is opened, a vacuum pressure PT is generated through the regulating passage 121, so that the main diaphragm 11 moves upward to be above the horizontal level, the elastic component 111 is pressed by the main diaphragm 11, and an atmospheric pressure PP originally flowing from the pilot atmospheric passage 122 enters a position below the main diaphragm 11 to maintain a position above the current horizontal level of the main diaphragm 11, and a primary pressure P1 flows into the vacuum solenoid valve 31 through the guiding passage 101, when a vacuum pressure PT is generated in the vacuum pressure chamber 12 above the main diaphragm 11, the main diaphragm 11 moves upward, so as to drive the pilot exhaust straight rod 20 and the main valve 203 below the vacuum valve group 21 to open, and the primary pressure P1 passes through the main valve 203 to form a secondary pressure P2, so as to achieve the purpose of vacuum absorption.
Referring to fig. 6, in order to achieve a stable pressure state, when the vacuum adsorption is achieved, the sensor 33 transmits related information to the control circuit P, and then the vacuum solenoid valve 31 is closed, and the vacuum pressure PT in the vacuum pressure chamber 12 and the adjusting passage 121 maintains a stable vacuum pressure, at this time, the elastic component 111 and the atmospheric pressure PP entering from the pilot atmospheric passage 122 mutually press the main diaphragm 11, so that the main diaphragm 11 returns to the horizontal state, and the related main valve 203 is also closed by the displacement of the pilot straight exhaust rod 20 driving the vacuum valve set 21 to maintain the whole internal vacuum.
Referring to fig. 7-8, in the first stage of vacuum breaking state, it can be seen that the atmospheric solenoid valve 32 is first opened, external atmospheric pressure PP is introduced from an atmospheric port 231 and enters the vacuum chamber 12 through the adjusting channel 121, the main diaphragm 11, which originally remains horizontal, is displaced downward, the first vacuum breaking valve 201 is gradually opened, and the atmospheric pressure PP in the pilot atmospheric channel 122 is allowed to pass through the first vacuum breaking valve 201 downward along the pilot straight exhaust rod 20 to perform fine adjustment of the internal vacuum.
Referring to fig. 9-10, in a second stage of vacuum breaking state, following the first stage of vacuum breaking state, after the atmospheric solenoid valve 32 is opened, atmospheric pressure PP is continuously introduced from the atmospheric port 321, so that when the main diaphragm 11 continuously moves downward, the limit latch 204 of the pilot straight exhaust rod 20 will push the second vacuum breaking valve 202 to open, and at this time, the atmospheric channel 123 located below the second vacuum breaking valve 202 will provide more atmospheric pressure PP to enter, so that the adjustment range of the internal vacuum is more rapid, when the main diaphragm 11 moves downward to the bottom of the vacuum pressure chamber 12, the flow of the atmospheric pressure PP entering the pilot atmospheric channel 122 will be reduced to the minimum, and the flow of the atmospheric pressure PP entering the atmospheric channel 123 will be increased to the maximum.
In summary, the vacuum electrically controlled proportional valve of the present invention, by matching the designed pilot atmospheric channel 122 with the pilot straight exhaust rod 20, allows the external air to flow into the secondary side pressure P2 through the first vacuum breaking valve 201 and the second vacuum breaking valve 202, and performs strength adjustment by matching with vacuum, so as to improve the response speed of adjustment, and further simplify the problem of inconvenient testing caused by the conventional complicated ventilation loop.
The construction, features and functions of the present invention are described in detail in the embodiments illustrated in the drawings, which are only preferred embodiments of the present invention, but the present invention is not limited by the drawings, and all equivalent embodiments modified or changed according to the idea of the present invention should fall within the protection scope of the present invention without departing from the spirit of the present invention covered by the description and the drawings.

Claims (3)

1. A vacuum electrically controlled proportional valve, comprising:
the air conditioner comprises a valve seat (10), a guide seat (30) is combined above the valve seat (10), a main diaphragm (11) is clamped between the guide seat (30) and the valve seat (10) to form a vacuum pressure cavity (12), an elastic component (111) is arranged above the main diaphragm (11), a pilot exhaust straight rod (20) is embedded in the center of the main diaphragm (11), the pilot exhaust straight rod (20) is further provided with a vacuum valve set (21), a vacuum piezoelectric solenoid valve (31), an atmospheric pressure solenoid valve (32) and a sensor (33) are further connected above the guide seat (30), and an adjusting channel (121) is communicated to the upper part of the vacuum pressure cavity (12) and is controlled by the vacuum piezoelectric solenoid valve (31) and the atmospheric pressure solenoid valve (32);
a pilot atmospheric channel (122) arranged in the valve seat (10) and communicated to the space below the main diaphragm (11) so as to supply atmospheric pressure (PP) for circulation;
a main channel (40) arranged between the valve seat (10) and the guide seat (30), wherein the main channel (40) can be used for the flow of a primary pressure (P1) and a secondary pressure (P2), and a guide channel (101) controlled by the vacuum solenoid valve (31) and a feedback channel (102) connected with the sensor (33) are additionally arranged in the main channel (40);
the method is characterized in that: a first vacuum breaking valve (201) is arranged above the valve seat (10) of the pilot exhaust straight rod (20), a second vacuum breaking valve (202) is arranged between the upper part of the vacuum valve group (21) and the pilot exhaust straight rod (20), when the primary pressure (P1) cooperates with the vacuum solenoid valve (31) through the guide channel (101) to operate, a vacuum Pressure (PT) is generated in the vacuum pressure chamber (12) through the adjusting channel (121), the main diaphragm (11) is upwards linked with the pilot exhaust straight rod (20), and then a main valve (203) below the vacuum valve group (21) is driven to open, the primary pressure (P1) forms the secondary pressure (P2) through the main valve (203), so as to form vacuum adsorption until the main diaphragm (11) returns to the horizontal position, the pilot exhaust straight rod (20) is driven to enable the main valve (203) to be in a stable pressure state after being closed; when the atmospheric pressure solenoid valve (32) is opened and the main diaphragm (11) is pressed by the adjusting channel (121) to move downwards, the atmospheric pressure (PP) passes through the pilot atmospheric channel (122) to the first vacuum destruction valve (201) to be in an open state, the atmospheric pressure (PP) can partially pass through to reduce the strength of vacuum adsorption, and when the atmospheric pressure (PP) is continuously input, the second vacuum destruction valve (202) is opened to enable the atmospheric pressure (PP) to pass through more.
2. The vacuum electrically controlled proportioning valve of claim 1 wherein: the elastic component (111) is a spring.
3. The vacuum electrically controlled proportioning valve of claim 1 wherein: the vacuum valve group (21) is composed of: the two convex parts (22) are formed by matching a spring (23) with convex surfaces oppositely, the inner parts of the convex parts (22) are in a through design and can be provided with the pilot exhaust straight rod (20), and the upper part and the lower part of the side edge of the pilot exhaust straight rod (20) are respectively provided with a limiting convex stopper (204) which can limit the stroke of the pilot exhaust straight rod (20) in the up-and-down displacement.
CN201910202448.4A 2019-03-11 2019-03-11 Vacuum electric control proportional valve Active CN111677925B (en)

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CN111677925A CN111677925A (en) 2020-09-18
CN111677925B true CN111677925B (en) 2022-09-09

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Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6508268B1 (en) * 1998-11-13 2003-01-21 Ckd Corporation Vacuum pressure control apparatus
CN205401910U (en) * 2016-03-07 2016-07-27 上海气立可气动设备有限公司 Energy -saving accurate air -vent valve
CN207539400U (en) * 2017-11-07 2018-06-26 上海气立可气动设备有限公司 Energy-saving large capacity precise pressure regulating valve structure-improved
CN207961658U (en) * 2018-02-27 2018-10-12 上海气立可气动设备有限公司 Vacuum energy-saving type large capacity precise pressure regulating valve
CN209977364U (en) * 2019-03-11 2020-01-21 台湾气立股份有限公司 Vacuum electric control proportional valve

Family Cites Families (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP5123803B2 (en) * 2008-09-19 2013-01-23 積水化学工業株式会社 Vacuum valve control device

Patent Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6508268B1 (en) * 1998-11-13 2003-01-21 Ckd Corporation Vacuum pressure control apparatus
CN205401910U (en) * 2016-03-07 2016-07-27 上海气立可气动设备有限公司 Energy -saving accurate air -vent valve
CN207539400U (en) * 2017-11-07 2018-06-26 上海气立可气动设备有限公司 Energy-saving large capacity precise pressure regulating valve structure-improved
CN207961658U (en) * 2018-02-27 2018-10-12 上海气立可气动设备有限公司 Vacuum energy-saving type large capacity precise pressure regulating valve
CN209977364U (en) * 2019-03-11 2020-01-21 台湾气立股份有限公司 Vacuum electric control proportional valve

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