CN111677925A - Vacuum electric control proportional valve - Google Patents

Vacuum electric control proportional valve Download PDF

Info

Publication number
CN111677925A
CN111677925A CN201910202448.4A CN201910202448A CN111677925A CN 111677925 A CN111677925 A CN 111677925A CN 201910202448 A CN201910202448 A CN 201910202448A CN 111677925 A CN111677925 A CN 111677925A
Authority
CN
China
Prior art keywords
vacuum
valve
pressure
channel
main
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
CN201910202448.4A
Other languages
Chinese (zh)
Other versions
CN111677925B (en
Inventor
游平政
郑志圣
陈郁澧
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Taiwan Chelic Corp ltd
Original Assignee
Taiwan Chelic Corp ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Taiwan Chelic Corp ltd filed Critical Taiwan Chelic Corp ltd
Priority to CN201910202448.4A priority Critical patent/CN111677925B/en
Publication of CN111677925A publication Critical patent/CN111677925A/en
Application granted granted Critical
Publication of CN111677925B publication Critical patent/CN111677925B/en
Active legal-status Critical Current
Anticipated expiration legal-status Critical

Links

Images

Classifications

    • FMECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16KVALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
    • F16K31/00Actuating devices; Operating means; Releasing devices
    • F16K31/02Actuating devices; Operating means; Releasing devices electric; magnetic
    • F16K31/06Actuating devices; Operating means; Releasing devices electric; magnetic using a magnet, e.g. diaphragm valves, cutting off by means of a liquid
    • F16K31/0675Electromagnet aspects, e.g. electric supply therefor
    • FMECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16KVALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
    • F16K17/00Safety valves; Equalising valves, e.g. pressure relief valves
    • F16K17/20Excess-flow valves
    • FMECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16KVALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
    • F16K37/00Special means in or on valves or other cut-off apparatus for indicating or recording operation thereof, or for enabling an alarm to be given
    • F16K37/0025Electrical or magnetic means
    • F16K37/005Electrical or magnetic means for measuring fluid parameters
    • FMECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16KVALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
    • F16K7/00Diaphragm valves or cut-off apparatus, e.g. with a member deformed, but not moved bodily, to close the passage ; Pinch valves
    • F16K7/12Diaphragm valves or cut-off apparatus, e.g. with a member deformed, but not moved bodily, to close the passage ; Pinch valves with flat, dished, or bowl-shaped diaphragm

Abstract

The invention discloses a vacuum electric control proportional valve, which is composed of a valve seat combined with a guide seat, wherein a vacuum solenoid valve, an atmosphere solenoid valve and a sensor are connected above the guide seat, a main diaphragm is clamped between the guide seat and the valve seat to form a vacuum pressure cavity, a pilot exhaust straight rod provided with a vacuum valve set is embedded in the center of the main diaphragm, a main channel for communicating a primary pressure and a secondary pressure is arranged between the valve seat and the guide seat, the main channel is also provided with a guide channel and a feedback channel, an adjusting channel for controlling a switch by the vacuum solenoid valve and the atmosphere solenoid valve is additionally arranged above the vacuum pressure cavity, a pilot atmosphere channel for communicating atmospheric pressure is arranged in the valve seat and communicated to the space below the main diaphragm, and a first vacuum breaking valve is arranged above the valve seat, and a second vacuum breaking valve is arranged above the vacuum valve group and on the guide exhaust straight rod.

Description

Vacuum electric control proportional valve
Technical Field
The invention relates to a vacuum electric control proportional valve, which is characterized in that a pilot exhaust straight rod and a vacuum valve set are arranged in the vacuum electric control proportional valve, and the pilot exhaust straight rod is further matched with a pilot atmosphere channel to introduce atmospheric pressure, so that the pilot exhaust straight rod can be matched with and adjust the vacuum strength in two stages, and the purposes of energy conservation and precise adjustment can be achieved.
Background
Referring to fig. 11, a vacuum electrically controlled proportional valve widely used in the field of automation equipment generally includes a regular set hole (91) having an absorption object, a regular vacuum hole (92) connected to a vacuum pump, and a regular atmospheric hole (93) for adjusting a vacuum pressure, and when the vacuum pump is operated, a pressure of the regular set hole (91) and a fluid flow direction of the fluid to the regular vacuum hole (92) are sucked through an internal passage of the vacuum electrically controlled proportional valve to form a vacuum, as indicated by arrows in the drawing.
In the testing process of the vacuum electric control proportional valve, an operator needs to accumulate experience for a long time and repeatedly test to manufacture a good vacuum electric control proportional valve, but a loop in the structure of the vacuum electric control proportional valve is relatively complex, so that a vacuum air pressure pipeline for testing and equipment need to be connected in a 90-degree corner mode, and for the testing operator, when the vacuum air pressure pipeline cannot be connected with the equipment in a straight-in and straight-out assembling mode for testing, more time and energy are consumed.
At present, if a loop in the conventional vacuum electronic control proportional valve needs to be modified aiming at an internal air pressure loop, much time and money are needed for improvement, although the connection mode of an external vacuum air pressure pipeline can be changed, the matching of various parts also needs to be tested one by one, wherein if the original fine level of vacuum regulation and control needs to be maintained, related vacuum regulation and control parts need to be redesigned; thus, there are many improvements that can be made.
Disclosure of Invention
The invention aims to provide a vacuum electric control proportional valve, which solves the technical problems in the prior art, can utilize a first vacuum breaking valve arranged in a valve seat by a guide exhaust straight rod and a second vacuum breaking valve arranged by matching with a vacuum valve group, thereby reducing the complex loop of the internal structure of the vacuum electric control proportional valve, and can precisely adjust the intensity of vacuum pressure and shorten the reaction time of the vacuum electric control proportional valve by opening and closing the first vacuum breaking valve and the second vacuum breaking valve.
The invention provides a vacuum electric control proportional valve, which comprises: a main diaphragm is arranged above the valve seat, the main diaphragm is clamped by the combination guide seat to form a vacuum pressure cavity, an elastic component is arranged above the main diaphragm, a guide exhaust straight rod is embedded in the center of the main diaphragm, the guide exhaust straight rod is also provided with a vacuum valve group, a vacuum solenoid valve, an atmospheric solenoid valve and a sensor are also arranged above the guide seat, and an adjusting channel is connected to the upper part of the vacuum pressure cavity and is controlled by a vacuum pressure electromagnetic valve and an atmosphere pressure electromagnetic valve, a pilot atmospheric channel arranged in the valve seat and communicated with the space below the main diaphragm for common use of atmospheric pressure flow, and a main channel arranged between the valve seat and the pilot seat and capable of common use of primary side pressure and secondary side pressure flow, and a guide channel controlled by the vacuum piezoelectric valve and a feedback channel connected with the sensor are arranged in the main channel.
When the primary side pressure is matched with the vacuum solenoid valve through the guide channel to operate, a vacuum pressure is generated in a vacuum pressure cavity through the adjusting channel, the main diaphragm is upwards linked with the pilot exhaust straight rod, and then the main valve of the vacuum valve group below is driven to open, so that the primary side pressure forms secondary side pressure through the main valve, the vacuum adsorption purpose is achieved, and the pilot exhaust straight rod is linked to enable the main valve to be in a stable pressure state after the main valve is closed until the main diaphragm moves downwards to return to the horizontal position.
When the atmospheric pressure is continuously input, the second vacuum breaking valve is opened, so that the atmospheric pressure passes through more parts, the reaction time for reducing the vacuum adsorption can be shortened, and the purposes of energy saving and precise adjustment can be achieved.
Drawings
Fig. 1 is a perspective view of the present invention.
Fig. 2 is a perspective view from another perspective of the present invention.
FIG. 3 is a schematic diagram of the circuit of the present invention.
FIG. 4 is a schematic diagram of the present invention in a ready state.
FIG. 5 is a schematic structural diagram of the present invention in a working state.
Fig. 6 is a schematic structural diagram of the present invention in a voltage stabilizing state.
FIG. 7 is a schematic structural view of the present invention in a first stage vacuum breaking state.
FIG. 8 is an enlarged view of a portion of FIG. 7 according to the present invention.
FIG. 9 is a schematic structural view of the second stage of the vacuum breaking state of the present invention.
FIG. 10 is an enlarged view of a portion of FIG. 9 according to the present invention.
Fig. 11 is a schematic view of a conventional structure.
Description of reference numerals:
(10) .. valve seat
(101) .. guide channel
(102) .. feedback channel
(11) .. Main diaphragm
(111) .. elastic component
(12) .. vacuum pressure chamber
(121) .. adjusting passage
(122) .. Pilot atmospheric air passage
(123) .. atmosphere channel
(20) .. guiding exhaust straight rod
(201) .. first vacuum break valve
(202) .. second vacuum break valve
(203) .. Main valve
(204) .. Limit convex hook
(21) .. vacuum valve set
(22) .. convex part
(23) .. spring
(30) .. guiding seat
(31) .. vacuum piezoelectric solenoid valve
(32) .. atmospheric pressure solenoid valve
(321) .. atmosphere port
(33) .. sensor
(40) .. Main channel
(P.) control circuit
(PR.) power supply
(PI.) force signal
Pressure representation
(PO.) output signal
Atmospheric pressure
Vacuum pressure
(P1.) the primary side pressure
(P2.) secondary side pressure
(A) .. atmosphere hole
Setting a hole
(V.) vacuum hole
(91) .. conventional setting hole
(92) .. conventional vacuum hole
(93) .. conventional atmospheric vent.
Detailed Description
The embodiments described below with reference to the drawings are illustrative only and should not be construed as limiting the invention.
The invention discloses a vacuum electric control proportional valve, the structure of which comprises: a valve seat 10, a guide seat 30 is combined above the valve seat 10, a main diaphragm 11 is sandwiched between the guide seat 30 and the valve seat 10 to form a vacuum pressure chamber 12, an elastic component 111 is disposed above the main diaphragm 11, the elastic component 111 is a spring, and a pilot exhaust straight rod 20 is further embedded in the center of the main diaphragm 11, the pilot exhaust straight rod 20 is further provided with a vacuum valve set 21, the vacuum valve set 21 is composed of: the two convex parts 22 are formed by matching a spring 23 with convex surfaces oppositely, the inner part of the convex part 22 is designed to be through, the pilot straight exhaust rod 20 can be arranged in the convex part, and the upper part and the lower part of the side edge of the pilot straight exhaust rod 20 are respectively provided with a limiting convex hook 204, so that the stroke of the pilot straight exhaust rod 20 in the up-and-down displacement can be limited.
A vacuum solenoid valve 31, an atmospheric solenoid valve 32, and a sensor 33 are further connected to the upper portion of the guiding seat 30, and an adjusting channel 121 is connected to the upper portion of the vacuum pressure chamber 12, and is controlled to open and close by the vacuum solenoid valve 31 and the atmospheric solenoid valve 32.
A pilot atmospheric channel 122, which is disposed in the valve seat 10 and connected to the space below the main diaphragm 11, so as to allow an atmospheric pressure PP to flow therethrough; and a main channel 40 disposed between the valve seat 10 and the guide seat 30, wherein the main channel 40 is used for communicating the primary pressure P1 and the secondary pressure P2, and the main channel 40 is further provided with a guide channel 101 controlled by the vacuum solenoid valve 31 and a feedback channel 102 connected to the sensor 33.
The pilot straight exhaust rod 20 is provided with a first vacuum breaking valve 201 above the valve seat 10, and a second vacuum breaking valve 202 is further provided above the vacuum valve set 21 and above the pilot straight exhaust rod 20, when the primary pressure P1 cooperates with the vacuum solenoid valve 31 through the guide channel 101, a vacuum pressure PT is generated in the vacuum pressure chamber 12 through the adjustment channel 121, so that the main diaphragm 11 is moved upward and links with the pilot straight exhaust rod 20, and further a main valve 203 below the vacuum valve set 21 is driven to open, and the primary pressure P1 forms a secondary pressure P2 through the main valve 203, so as to achieve the purpose of vacuum adsorption, until the main diaphragm 203 moves downward and returns to the horizontal position, and the pilot straight exhaust rod 20 is linked to make the main valve 203 in a stable pressure state after being closed.
When the atmospheric pressure solenoid valve 32 opens and applies pressure to the main diaphragm 11 via the adjusting channel 121 to move downward, the atmospheric pressure PP opens through the pilot atmospheric channel 122 to the first vacuum breaking valve 201, and the atmospheric pressure PP partially passes through the first vacuum breaking valve to reduce the vacuum absorption strength, and when the atmospheric pressure PP is continuously input, the second vacuum breaking valve 202 is opened to allow the atmospheric pressure PP to pass through more, so that the reaction time for reducing the vacuum absorption can be shortened.
Referring to fig. 1-2, it can be seen that the connecting ends of the valve seat 10 are respectively used for a set hole O for absorbing an object, a vacuum hole V for connecting a vacuum pump, and an atmospheric hole a for adjusting atmospheric pressure, and by the design of the internal structure, after the pipelines for testing are connected, the pipelines are moved from the set hole O to the vacuum hole V and then moved out, and the special way of 90 degrees rotation of the conventional structure is not needed for testing, so that the inconvenience of complicated and repeated testing work can be improved.
Referring to fig. 3-4, it can be seen that the vacuum solenoid valve 31, the atmospheric solenoid valve 32, and the sensor 33 are driven by a control circuit P via a power supply PR, and then an input force signal PI and an output force signal PO are set, and then the vacuum solenoid valve 31 and the atmospheric solenoid valve 32 are driven by the display related pressure representation PS of the control circuit P, and the sensor 33 is mainly used for detecting the pressure of the secondary pressure P2, and when the pressure exceeds or is lower than the set value of the secondary pressure P2, the sensor is used for feeding back information to the control circuit P to perform the determination between the vacuum solenoid valve 31 and the atmospheric solenoid valve 32, and driving the subsequent related control actions via the control circuit P, which is a common control means, and therefore, the detailed description thereof is omitted.
Fig. 4 is a preparation state of the present invention, it can be seen that the vacuum solenoid valve 31 and the atmospheric solenoid valve 32 are both in an inactive state, the main valve 203 in the main channel 40 is closed, and a part of the atmospheric pressure PP flows to the lower side of the main diaphragm 11 in the pilot atmospheric channel 122, but the main diaphragm 11 is elastically pre-compressed by the upper elastic component 111, so that the main diaphragm 11 is kept below the horizontal level, and the atmospheric pressure PP flows to the secondary pressure P2 through the first vacuum break valve 201, at this time, the secondary pressure P2 is equal to the atmospheric pressure PP, and the level is described herein with reference to two ends of the main diaphragm 11, and then the center of the main diaphragm 11 is compared with the reference of two ends.
Referring to fig. 5, in an operating state, it is first seen that the vacuum solenoid valve 31 is opened, a vacuum pressure PT is generated through the regulating passage 121, so that the main diaphragm 11 moves upward to be above the horizontal level, the elastic component 111 is pressed by the main diaphragm 11, and an atmospheric pressure PP originally flowing from the pilot atmospheric passage 122 enters a position below the main diaphragm 11 to maintain a position above the current horizontal level of the main diaphragm 11, and a primary pressure P1 flows into the vacuum solenoid valve 31 through the guiding passage 101, when a vacuum pressure PT is generated in the vacuum pressure chamber 12 above the main diaphragm 11, the main diaphragm 11 moves upward, so as to drive the pilot exhaust straight rod 20 and the main valve 203 below the vacuum valve group 21 to open, and the primary pressure P1 passes through the main valve 203 to form a secondary pressure P2, so as to achieve the purpose of vacuum absorption.
Referring to fig. 6, in order to achieve a stable pressure state, when the vacuum adsorption is achieved, the sensor 33 transmits related information to the control circuit P, and then the vacuum solenoid valve 31 is closed, and the vacuum pressure PT in the vacuum pressure chamber 12 and the adjusting passage 121 maintains a stable vacuum pressure, at this time, the elastic component 111 and the atmospheric pressure PP entering from the pilot atmospheric passage 122 mutually press the main diaphragm 11, so that the main diaphragm 11 returns to the horizontal state, and the related main valve 203 is also closed by the displacement of the pilot straight exhaust rod 20 driving the vacuum valve set 21 to maintain the whole internal vacuum.
Referring to fig. 7-8, in the first stage of vacuum breaking state, it can be seen that the atmospheric solenoid valve 32 is first opened, external atmospheric pressure PP is introduced from an atmospheric port 231 and enters the vacuum chamber 12 through the adjusting channel 121, the main diaphragm 11, which originally remains horizontal, is displaced downward, the first vacuum breaking valve 201 is gradually opened, and the atmospheric pressure PP in the pilot atmospheric channel 122 is allowed to pass through the first vacuum breaking valve 201 downward along the pilot straight exhaust rod 20 to perform fine adjustment of the internal vacuum.
Referring to fig. 9-10, in a second stage of vacuum breaking state, following the first stage of vacuum breaking state, after the atmospheric solenoid valve 32 is opened, atmospheric pressure PP is continuously introduced from the atmospheric port 321, so that when the main diaphragm 11 continuously moves downward, the limit latch 204 of the pilot straight exhaust rod 20 will push the second vacuum breaking valve 202 to open, and at this time, the atmospheric channel 123 located below the second vacuum breaking valve 202 will provide more atmospheric pressure PP to enter, so that the adjustment range of the internal vacuum is more rapid, when the main diaphragm 11 moves downward to the bottom of the vacuum pressure chamber 12, the flow of the atmospheric pressure PP entering the pilot atmospheric channel 122 will be reduced to the minimum, and the flow of the atmospheric pressure PP entering the atmospheric channel 123 will be increased to the maximum.
In summary, the vacuum electrically controlled proportional valve of the present invention, by matching the designed pilot atmospheric channel 122 with the pilot straight exhaust rod 20, allows the external air to flow into the secondary side pressure P2 through the first vacuum breaking valve 201 and the second vacuum breaking valve 202, and performs strength adjustment by matching with vacuum, so as to improve the response speed of adjustment, and further simplify the problem of inconvenient testing caused by the conventional complicated ventilation loop.
The construction, features and functions of the present invention are described in detail in the embodiments illustrated in the drawings, which are only preferred embodiments of the present invention, but the present invention is not limited by the drawings, and all equivalent embodiments modified or changed according to the idea of the present invention should fall within the protection scope of the present invention without departing from the spirit of the present invention covered by the description and the drawings.

Claims (3)

1. A vacuum electrically controlled proportional valve, comprising:
the air conditioner comprises a valve seat (10), a guide seat (30) is combined above the valve seat (10), a main diaphragm (11) is clamped between the guide seat (30) and the valve seat (10) to form a vacuum pressure cavity (12), an elastic component (111) is arranged above the main diaphragm (11), a pilot exhaust straight rod (20) is embedded in the center of the main diaphragm (11), the pilot exhaust straight rod (20) is further provided with a vacuum valve set (21), a vacuum piezoelectric solenoid valve (31), an atmospheric pressure solenoid valve (32) and a sensor (33) are further connected above the guide seat (30), and an adjusting channel (121) is communicated to the upper part of the vacuum pressure cavity (12) and is controlled by the vacuum piezoelectric solenoid valve (31) and the atmospheric pressure solenoid valve (32);
a pilot atmospheric channel (122) arranged in the valve seat (10) and communicated to the space below the main diaphragm (11) so as to supply atmospheric pressure (PP) for circulation;
a main channel (40) arranged between the valve seat (10) and the guide seat (30), wherein the main channel (40) can be used for the flow of a primary pressure (P1) and a secondary pressure (P2), and a guide channel (101) controlled by the vacuum solenoid valve (31) and a feedback channel (102) connected with the sensor (33) are additionally arranged in the main channel (40);
the method is characterized in that: a first vacuum breaking valve (201) is arranged above the valve seat (10) of the pilot exhaust straight rod (20), a second vacuum breaking valve (202) is arranged between the upper part of the vacuum valve group (21) and the pilot exhaust straight rod (20), when the primary pressure (P1) cooperates with the vacuum solenoid valve (31) through the guide channel (101) to operate, a vacuum Pressure (PT) is generated in the vacuum pressure chamber (12) through the adjusting channel (121), the main diaphragm (11) is upwards linked with the pilot exhaust straight rod (20), and then a main valve (203) below the vacuum valve group (21) is driven to open, the primary pressure (P1) forms the secondary pressure (P2) through the main valve (203), so as to form vacuum adsorption until the main diaphragm (203) returns to the horizontal position, the pilot exhaust straight rod (20) is driven to enable the main valve (203) to be in a stable pressure state after being closed; when the atmospheric pressure solenoid valve (32) is opened and the main diaphragm (11) is pressed by the adjusting channel (121) to move downwards, the atmospheric pressure (PP) passes through the pilot atmospheric channel (122) to the first vacuum destruction valve (201) to be in an open state, the atmospheric pressure (PP) can partially pass through to reduce the strength of vacuum adsorption, and when the atmospheric pressure (PP) is continuously input, the second vacuum destruction valve (202) is opened to enable the atmospheric pressure (PP) to pass through more.
2. The vacuum electrically controlled proportioning valve of claim 1 wherein: the elastic component (111) is a spring.
3. The vacuum electrically controlled proportioning valve of claim 1 wherein: the vacuum valve group (21) is composed of: the two convex parts (22) are formed by matching a spring (23) with convex surfaces oppositely, the inner parts of the convex parts (22) are in a through design and can be provided with the pilot exhaust straight rod (20), and the upper part and the lower part of the side edge of the pilot exhaust straight rod (20) are respectively provided with a limiting convex stopper (204) which can limit the stroke of the pilot exhaust straight rod (20) in the up-and-down displacement.
CN201910202448.4A 2019-03-11 2019-03-11 Vacuum electric control proportional valve Active CN111677925B (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
CN201910202448.4A CN111677925B (en) 2019-03-11 2019-03-11 Vacuum electric control proportional valve

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
CN201910202448.4A CN111677925B (en) 2019-03-11 2019-03-11 Vacuum electric control proportional valve

Publications (2)

Publication Number Publication Date
CN111677925A true CN111677925A (en) 2020-09-18
CN111677925B CN111677925B (en) 2022-09-09

Family

ID=72433180

Family Applications (1)

Application Number Title Priority Date Filing Date
CN201910202448.4A Active CN111677925B (en) 2019-03-11 2019-03-11 Vacuum electric control proportional valve

Country Status (1)

Country Link
CN (1) CN111677925B (en)

Citations (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6508268B1 (en) * 1998-11-13 2003-01-21 Ckd Corporation Vacuum pressure control apparatus
JP2010072990A (en) * 2008-09-19 2010-04-02 Sekisui Chem Co Ltd Vacuum valve controller
CN205401910U (en) * 2016-03-07 2016-07-27 上海气立可气动设备有限公司 Energy -saving accurate air -vent valve
CN207539400U (en) * 2017-11-07 2018-06-26 上海气立可气动设备有限公司 Energy-saving large capacity precise pressure regulating valve structure-improved
CN207961658U (en) * 2018-02-27 2018-10-12 上海气立可气动设备有限公司 Vacuum energy-saving type large capacity precise pressure regulating valve
CN209977364U (en) * 2019-03-11 2020-01-21 台湾气立股份有限公司 Vacuum electric control proportional valve

Patent Citations (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6508268B1 (en) * 1998-11-13 2003-01-21 Ckd Corporation Vacuum pressure control apparatus
JP2010072990A (en) * 2008-09-19 2010-04-02 Sekisui Chem Co Ltd Vacuum valve controller
CN205401910U (en) * 2016-03-07 2016-07-27 上海气立可气动设备有限公司 Energy -saving accurate air -vent valve
CN207539400U (en) * 2017-11-07 2018-06-26 上海气立可气动设备有限公司 Energy-saving large capacity precise pressure regulating valve structure-improved
CN207961658U (en) * 2018-02-27 2018-10-12 上海气立可气动设备有限公司 Vacuum energy-saving type large capacity precise pressure regulating valve
CN209977364U (en) * 2019-03-11 2020-01-21 台湾气立股份有限公司 Vacuum electric control proportional valve

Also Published As

Publication number Publication date
CN111677925B (en) 2022-09-09

Similar Documents

Publication Publication Date Title
TWI689678B (en) Vacuum electronic control proportional valve
US7389968B2 (en) Proportional solenoid valve control device
JP2002099331A (en) Fluid pressure regulator
JPS5847338Y2 (en) Solenoid fluid pressure control valve
TWI689676B (en) Electronically controlled large capacity proportional valve
CN209977364U (en) Vacuum electric control proportional valve
CN111677925B (en) Vacuum electric control proportional valve
TWI662213B (en) Two-stage intake and two-stage exhaust structure of electronically controlled proportional valve
CN111692403B (en) Vacuum large-capacity electric control proportional valve
CN210123039U (en) Electric control large-capacity proportional valve
CN210423900U (en) Vacuum large-capacity electric control proportional valve
TWI689679B (en) Vacuum large capacity electric control proportional valve
TWM580152U (en) Electrically controlled vacuum proportional valve
CN111140667A (en) Two-section type air inlet and two-section type exhaust structure of electric control proportional valve
TWM581173U (en) Vacuum large-capacity electric control proportional valve
KR100812560B1 (en) Flow control valve
JP2004319413A (en) Gas pressure reducing device of fuel cell system
CN203421225U (en) Gas proportional valve used for kitchen range
US20160153475A1 (en) Discrete Pilot Stage Valve Arrangement With Fail Freeze Mode
CN111022405A (en) Three-way plug-in type proportional throttle valve and load control method thereof
CN210510465U (en) Based on pneumatic intelligent valve locator of nozzle baffle wireless transmission type
TWM580151U (en) Electrically controlled high-capacity proportional valve
CN213451993U (en) Pilot-operated type electromagnetic valve
CN116164132B (en) Proportional valve and gas proportional control system
CN116241697A (en) Electric vacuum proportional valve

Legal Events

Date Code Title Description
PB01 Publication
PB01 Publication
SE01 Entry into force of request for substantive examination
SE01 Entry into force of request for substantive examination
GR01 Patent grant
GR01 Patent grant