CN111664091A - Integrated rotor and machining method thereof, pump body assembly and vacuum pump - Google Patents
Integrated rotor and machining method thereof, pump body assembly and vacuum pump Download PDFInfo
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- CN111664091A CN111664091A CN202010560791.9A CN202010560791A CN111664091A CN 111664091 A CN111664091 A CN 111664091A CN 202010560791 A CN202010560791 A CN 202010560791A CN 111664091 A CN111664091 A CN 111664091A
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- 238000003754 machining Methods 0.000 title claims description 29
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- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
- F04C18/00—Rotary-piston pumps specially adapted for elastic fluids
- F04C18/08—Rotary-piston pumps specially adapted for elastic fluids of intermeshing-engagement type, i.e. with engagement of co-operating members similar to that of toothed gearing
- F04C18/12—Rotary-piston pumps specially adapted for elastic fluids of intermeshing-engagement type, i.e. with engagement of co-operating members similar to that of toothed gearing of other than internal-axis type
- F04C18/14—Rotary-piston pumps specially adapted for elastic fluids of intermeshing-engagement type, i.e. with engagement of co-operating members similar to that of toothed gearing of other than internal-axis type with toothed rotary pistons
- F04C18/16—Rotary-piston pumps specially adapted for elastic fluids of intermeshing-engagement type, i.e. with engagement of co-operating members similar to that of toothed gearing of other than internal-axis type with toothed rotary pistons with helical teeth, e.g. chevron-shaped, screw type
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B22—CASTING; POWDER METALLURGY
- B22C—FOUNDRY MOULDING
- B22C9/00—Moulds or cores; Moulding processes
- B22C9/02—Sand moulds or like moulds for shaped castings
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B22—CASTING; POWDER METALLURGY
- B22C—FOUNDRY MOULDING
- B22C9/00—Moulds or cores; Moulding processes
- B22C9/08—Features with respect to supply of molten metal, e.g. ingates, circular gates, skim gates
- B22C9/082—Sprues, pouring cups
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B22—CASTING; POWDER METALLURGY
- B22C—FOUNDRY MOULDING
- B22C9/00—Moulds or cores; Moulding processes
- B22C9/22—Moulds for peculiarly-shaped castings
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B22—CASTING; POWDER METALLURGY
- B22D—CASTING OF METALS; CASTING OF OTHER SUBSTANCES BY THE SAME PROCESSES OR DEVICES
- B22D27/00—Treating the metal in the mould while it is molten or ductile ; Pressure or vacuum casting
- B22D27/09—Treating the metal in the mould while it is molten or ductile ; Pressure or vacuum casting by using pressure
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B24—GRINDING; POLISHING
- B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
- B24B1/00—Processes of grinding or polishing; Use of auxiliary equipment in connection with such processes
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- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
- F04C25/00—Adaptations of pumps for special use of pumps for elastic fluids
- F04C25/02—Adaptations of pumps for special use of pumps for elastic fluids for producing high vacuum
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B21/00—Measuring arrangements or details thereof, where the measuring technique is not covered by the other groups of this subclass, unspecified or not relevant
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01M—TESTING STATIC OR DYNAMIC BALANCE OF MACHINES OR STRUCTURES; TESTING OF STRUCTURES OR APPARATUS, NOT OTHERWISE PROVIDED FOR
- G01M1/00—Testing static or dynamic balance of machines or structures
- G01M1/14—Determining imbalance
- G01M1/16—Determining imbalance by oscillating or rotating the body to be tested
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/84—Systems specially adapted for particular applications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N29/00—Investigating or analysing materials by the use of ultrasonic, sonic or infrasonic waves; Visualisation of the interior of objects by transmitting ultrasonic or sonic waves through the object
- G01N29/04—Analysing solids
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
- F04C2230/00—Manufacture
- F04C2230/20—Manufacture essentially without removing material
- F04C2230/21—Manufacture essentially without removing material by casting
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
- F04C2240/00—Components
- F04C2240/20—Rotors
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- Engineering & Computer Science (AREA)
- Mechanical Engineering (AREA)
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- General Health & Medical Sciences (AREA)
- Biochemistry (AREA)
- Analytical Chemistry (AREA)
- Chemical & Material Sciences (AREA)
- Immunology (AREA)
- Pathology (AREA)
- Life Sciences & Earth Sciences (AREA)
- Health & Medical Sciences (AREA)
- General Engineering & Computer Science (AREA)
- Acoustics & Sound (AREA)
- Structures Of Non-Positive Displacement Pumps (AREA)
Abstract
The invention provides an integrated rotor and a processing method thereof, a pump body assembly and a vacuum pump, wherein the processing method of the integrated rotor sequentially comprises the following steps: the integrated rotor blank is inspected by a three-coordinate measuring instrument, the integrated rotor blank is finely processed by a grinding mode, in the fine processing process, the circular runout of a rotating shaft of the integrated rotor blank is in the range of 0-0.012mm, the surface finish is in the range of 0-0.8 mu m, and the verticality of blades of the integrated rotor blank relative to the rotating shaft of the integrated rotor blank is in the range of 0-0.02 mm; and carrying out dynamic balance measurement on the integrated rotor blank, and screening out the integrated rotor blank meeting the dynamic balance standard to obtain the integrated rotor with six blades. The technical scheme of this application has solved effectively among the relevant art when fixing the blade to the pivot, can produce too big local stress and easily damage the problem of pivot in fixed position department.
Description
Technical Field
The invention relates to the field of vacuum sources, in particular to an integrated rotor and a machining method thereof, a pump body assembly and a vacuum pump.
Background
The precision vacuum pump is a vacuum source device necessary for the semiconductor industry. The vacuum pump includes an upper pump casing, a lower pump casing, and a multi-stage rotor. The multistage rotor includes a rotating shaft and a plurality of blades arranged on the rotating shaft, the blades are usually assembled on the rotating shaft in an interference fit manner or a key and key way manner, however, the above-mentioned assembling mode has the following disadvantages:
1) when the blade is fixed on the rotating shaft, overlarge local stress can be generated at the fixed position, so that the rotating shaft is easy to damage, the running stability of the vacuum pump is reduced, and the service life of the vacuum pump is prolonged;
2) the process of installing the blades on the rotating shaft requires high working experience and high-precision tool equipment, so that the blades can meet the assembly requirement of installing the blades on the rotating shaft;
3) when the blades rotate to work, the backflow cooling gas is easy to generate, so that the cooling gas returns to the inlet of the vacuum pump, and the working efficiency of the vacuum pump is influenced.
Disclosure of Invention
The invention mainly aims to provide an integrated rotor, a machining method thereof, a pump body assembly and a vacuum pump, and aims to solve the problem that when blades are fixed on a rotating shaft in the related art, overlarge local stress is generated at a fixed position to easily damage the rotating shaft.
In order to achieve the above object, according to one aspect of the present invention, there is provided a method of processing an integrated rotor, comprising the steps of: manufacturing a sand cavity and a sand core for accommodating the integrated rotor blank by using a sand mold, and selecting the position of a sprue gate; obtaining an integrated rotor blank through pressure casting, and reserving a machining allowance of 4-5 mm on the surface of the integrated rotor blank; quenching and destressing the integrated rotor blank, and checking whether the integrated rotor blank meets a first condition; roughly machining a first machining surface of the integrated rotor blank meeting the first condition, and reserving machining allowance of 2mm on the first machining surface; the integrated rotor blank is inspected through a three-coordinate measuring instrument, the interior of the integrated rotor blank is inspected through an endoscope, and whether the interior of the integrated rotor blank meets a second condition is inspected through ultrasonic flaw detection; performing semi-finishing on the second processing surface of the integrated rotor blank meeting the second condition to enable the second processing surface to leave a processing allowance of 0.2 mm; the integral rotor blank is finely processed by grinding, in the fine processing process, the circular runout of the rotating shaft of the integral rotor blank is within the range of 0-0.012mm, the surface finish is within the range of 0-0.8 mu m, and the verticality of the blades of the integral rotor blank relative to the rotating shaft of the integral rotor blank is within the range of 0-0.02 mm; and carrying out dynamic balance measurement on the integrated rotor blank, and screening out the integrated rotor blank meeting the dynamic balance standard to obtain the integrated rotor with six blades.
Furthermore, between the step of forming a sand cavity and a sand core for accommodating the integrated rotor blank by sand molding and determining the position of the sprue gate and the step of obtaining the integrated rotor blank by pressure casting, the processing method further comprises pouring molten iron into the sand cavity and the sand core, wherein the temperature of the poured molten iron is 1340The casting speed of the molten iron is 0.005m within the range of-1420 DEG C3/s-0.002m3In the range of/s.
According to another aspect of the invention, an integrated rotor is provided, the integrated rotor is obtained according to the processing method, the number of the integrated rotors is two, the two integrated rotors are in meshed transmission, the integrated rotor comprises a rotating shaft and a plurality of blades arranged on the rotating shaft, and the rotating shaft and the plurality of blades are in an integrated structure.
Further, a plurality of blades set up in the pivot at interval, a plurality of blades include the first order blade that arranges in proper order along the axis of pivot, the second level blade, the third level blade, the fourth level blade, fifth level blade and sixth level blade, the first order blade includes that first blade body and interval set up the three first bulge on first blade body, the second level blade, the third level blade, fourth level blade and fifth level blade structure are the same, the second level blade includes the second blade body and sets up the hook-like bulge on the second blade body, the sixth level blade includes that third blade body and interval set up five second bulges on the third blade body.
According to another aspect of the invention, a pump body assembly is provided, which comprises a stator and an integrated rotor, wherein the stator comprises a stator main body, a cover body and a bottom support, the cover body covers a first end surface of the stator main body, the bottom support is arranged on a second end surface of the stator main body, the integrated rotor is rotatably arranged in an inner cavity of the stator main body, a first end of the integrated rotor is rotatably connected with the cover body, a second end of the integrated rotor is rotatably connected with the bottom support, and the integrated rotor is the integrated rotor.
Further, the stator main body comprises a shell and a plurality of partition plates, and the partition plates are arranged in the inner cavity of the shell at intervals along the axis of the shell; a first avoidance hole and a second avoidance hole are formed in each partition plate at intervals, air inlets and air outlets are formed in the cavity wall of the shell at intervals, and the plurality of partition plates are located between the air inlets and the air outlets; the plurality of baffles comprise a first baffle, a plurality of second baffles and a third baffle which are sequentially arranged along the direction from the cover body to the collet, the first baffle comprises a first surface facing the cover body and a second surface facing the collet, a first air inlet groove communicated with the air inlet is formed in the first surface, a first air outlet groove communicated with the first air inlet groove is formed in the second surface, a first notch is formed in the hole wall of a first avoidance hole of one of any two adjacent second baffles, a second notch is formed in the hole wall of a second avoidance hole of the other one of the two adjacent second baffles, the first notch and the second notch are arranged in a staggered mode, and the first air outlet groove and the first notch or the second notch on the adjacent second baffle are arranged in a staggered mode and are communicated with each other; the third baffle is provided with the second air inlet duct including the third surface towards the lid and the fourth surface towards the collet on the third surface, the second air inlet duct and the first breach or the dislocation set of second breach on the adjacent second baffle and communicate each other, the fourth is provided with the second that communicates with the second air inlet duct on the surface and goes out the gas groove, and the second goes out the gas groove and is linked together with the gas outlet.
Furthermore, the first air inlet groove is communicated with the first air outlet groove through a first communicating channel, the first communicating channel is positioned in the first partition plate, the second air inlet groove is communicated with the second air outlet groove through a second communicating channel, and the second communicating channel is positioned in the third partition plate.
Further, the shell comprises a first body part and a second body part spliced with the first body part, each partition plate comprises a first plate section and a second plate section spliced with the first plate section, each first plate section and the first body part are of an integrally formed structure, each second plate section and the second body part are of an integrally formed structure, one part of the first avoiding hole is formed in the first plate section, the other part of the first avoiding hole is formed in the second plate section, and one part of the second avoiding hole is formed in the first plate section.
Further, be provided with first mosaic structure between first noumenon portion and the second noumenon portion, first mosaic structure includes first slot and first dowel, and first slot splices mutually with first dowel, is provided with second mosaic structure between first plate section and the second plate section, and second mosaic structure includes second slot and second dowel, and the second slot splices mutually with the second dowel.
According to another aspect of the present invention, there is provided a vacuum pump comprising a pump body assembly as described above.
By applying the technical scheme of the invention, the processing method of the integrated rotor sequentially comprises the following steps: manufacturing a sand cavity and a sand core for accommodating the integrated rotor blank by using a sand mold, and selecting the position of a sprue gate; obtaining an integrated rotor blank through pressure casting, and reserving a machining allowance of 4-5 mm on the surface of the integrated rotor blank; quenching and destressing the integrated rotor blank, and checking whether the integrated rotor blank meets a first condition; roughly machining a first machining surface of the integrated rotor blank meeting the first condition, and reserving machining allowance of 2mm on the first machining surface; the integrated rotor blank is inspected through a three-coordinate measuring instrument, the interior of the integrated rotor blank is inspected through an endoscope, and whether the interior of the integrated rotor blank meets a second condition is inspected through ultrasonic flaw detection; performing semi-finishing on the second processing surface of the integrated rotor blank meeting the second condition to enable the second processing surface to leave a processing allowance of 0.2 mm; the integral rotor blank is finely processed by grinding, in the fine processing process, the circular runout of the rotating shaft of the integral rotor blank is within the range of 0-0.012mm, the surface finish is within the range of 0-0.8 mu m, and the verticality of the blades of the integral rotor blank relative to the rotating shaft of the integral rotor blank is within the range of 0-0.02 mm; and carrying out dynamic balance measurement on the integrated rotor blank, and screening out the integrated rotor blank meeting the dynamic balance standard to obtain the integrated rotor with six blades. The integrated rotor obtained by the processing method of the integrated rotor enables the rotating shaft and the six blades to be of a complete structure, the blades in the related technology are not required to be fixed on the rotating shaft, the phenomenon that the rotating shaft is easily damaged due to overlarge local stress generated at a fixed position is avoided, meanwhile, the assembling requirement of the blades in the related technology can be met, the assembling step is simplified while the assembling requirement is reduced, and the assembling efficiency of the vacuum pump is further improved. Therefore, the technical scheme of the application effectively solves the problem that when the blade is fixed on the rotating shaft in the related art, overlarge local stress can be generated at the fixed position to easily damage the rotating shaft.
Drawings
The accompanying drawings, which are incorporated in and constitute a part of this application, illustrate embodiments of the invention and, together with the description, serve to explain the invention and not to limit the invention. In the drawings:
FIG. 1 shows a schematic flow diagram of an embodiment of a method of machining a one-piece rotor according to the present invention;
FIG. 2 illustrates a perspective view of an embodiment of an integrated rotor according to the present invention;
FIG. 3 shows an exploded schematic view of an embodiment of the pump body assembly according to the present invention;
FIG. 4 shows a perspective view of the first body portion and each first plate segment of the pump body assembly of FIG. 3 as an integrally formed structure;
FIG. 5 shows a partial schematic view of the pump body assembly of FIG. 4;
FIG. 6 shows a perspective view of the second body portion and each second plate segment of the pump body assembly of FIG. 3 as an integrally formed structure;
FIG. 7 shows a perspective view of the cover of the pump block assembly of FIG. 3;
FIG. 8 shows a perspective view of the bottom bracket of the pump body assembly of FIG. 3; and
fig. 9 shows a perspective view of the upper housing of the pump block assembly of fig. 3.
Wherein the figures include the following reference numerals:
10. an integral rotor; 11. a rotating shaft; 12. a blade; 121. a first stage blade; 122. a second stage blade; 123. a third stage blade; 124. a fourth stage blade; 125. a fifth stage blade; 126. a sixth stage blade; 241. a first avoidance hole; 242. a second avoidance hole; 243. a first notch; 244. a second notch; 50. a stator body; 51. an upper housing; 511. a first body portion; 512. a first plate section; 515. an air inlet; 52. a lower housing; 521. a second body portion; 522. a second plate section; 531. a first air inlet groove; 532. a first air outlet groove; 533. a second air inlet groove; 541. a first slot; 542. a first dowel; 543. a second slot; 544. a second dowel; 55. lightening holes; 60. a cover body; 70. and a bottom support.
Detailed Description
The technical solutions in the embodiments of the present invention will be clearly and completely described below with reference to the drawings in the embodiments of the present invention, and it is obvious that the described embodiments are only a part of the embodiments of the present invention, and not all of the embodiments. The following description of at least one exemplary embodiment is merely illustrative in nature and is in no way intended to limit the invention, its application, or uses. All other embodiments, which can be derived by a person skilled in the art from the embodiments given herein without making any creative effort, shall fall within the protection scope of the present invention.
It is noted that the terminology used herein is for the purpose of describing particular embodiments only and is not intended to be limiting of example embodiments according to the present application. As used herein, the singular forms "a", "an" and "the" are intended to include the plural forms as well, and it should be understood that when the terms "comprises" and/or "comprising" are used in this specification, they specify the presence of stated features, steps, operations, devices, components, and/or combinations thereof, unless the context clearly indicates otherwise.
The relative arrangement of the components and steps, the numerical expressions and numerical values set forth in these embodiments do not limit the scope of the present invention unless specifically stated otherwise. Meanwhile, it should be understood that the sizes of the respective portions shown in the drawings are not drawn in an actual proportional relationship for the convenience of description. Techniques, methods, and apparatus known to those of ordinary skill in the relevant art may not be discussed in detail but are intended to be part of the specification where appropriate. In all examples shown and discussed herein, any particular value should be construed as merely illustrative, and not limiting. Thus, other examples of the exemplary embodiments may have different values. It should be noted that: like reference numbers and letters refer to like items in the following figures, and thus, once an item is defined in one figure, further discussion thereof is not required in subsequent figures.
As shown in fig. 1 and 2, the present application provides a method of manufacturing an integrated rotor. The machining method of the integrated rotor of the embodiment sequentially comprises the following steps of: manufacturing a sand cavity and a sand core for accommodating the integrated rotor blank by using a sand mold, and selecting the position of a sprue gate; obtaining an integrated rotor blank through pressure casting, and reserving a machining allowance of 4-5 mm on the surface of the integrated rotor blank; quenching and destressing the integrated rotor blank, and checking whether the integrated rotor blank meets a first condition; roughly machining a first machining surface of the integrated rotor blank meeting the first condition, and reserving machining allowance of 2mm on the first machining surface; the integrated rotor blank is inspected through a three-coordinate measuring instrument, the interior of the integrated rotor blank is inspected through an endoscope, and whether the interior of the integrated rotor blank meets a second condition is inspected through ultrasonic flaw detection; performing semi-finishing on the second processing surface of the integrated rotor blank meeting the second condition to enable the second processing surface to leave a processing allowance of 0.2 mm; the integral rotor blank is finely processed by grinding, in the fine processing process, the circular runout of the rotating shaft of the integral rotor blank is within the range of 0-0.012mm, the surface finish is within the range of 0-0.8 mu m, and the verticality of the blades of the integral rotor blank relative to the rotating shaft of the integral rotor blank is within the range of 0-0.02 mm; and (4) carrying out dynamic balance measurement on the integrated rotor blank, and screening out the integrated rotor blank meeting the dynamic balance standard to obtain the integrated rotor 10 with six blades.
By applying the technical scheme of the embodiment, the integrated rotor is obtained by the processing method of the integrated rotor, so that the rotating shaft and the six blades can form a complete structure, the blades in the related technology are not required to be fixed on the rotating shaft, the phenomenon that the rotating shaft is easily damaged due to overlarge local stress generated at the fixed position is avoided, meanwhile, the assembling requirement of the blades in the related technology on the rotating shaft is not required to be considered, the assembling step is simplified while the assembling requirement is reduced, and the assembling efficiency of the vacuum pump is further improved. Therefore, the technical scheme of the embodiment effectively solves the problem that when the blade is fixed on the rotating shaft in the related art, excessive local stress is generated at the fixed position, so that the rotating shaft is easily damaged.
The compliance with the dynamic balance standard is defined as compliance with the dynamic balance standard ISO 1940-1. The first condition mentioned above refers to a minor wear or scratch or blister or pinhole or crack or defect deformation or hardness reduction or damage. The second condition mentioned above refers to no cracks or inclusions or folds or pores or voids.
As shown in fig. 1, between the step of molding a sand cavity and a sand core for accommodating the integrated rotor blank with sand, and determining the position of the gate and the step of obtaining the integrated rotor blank by pressure casting, the processing method further comprises pouring molten iron into the sand cavity and the sand core. In order to prevent the sand particles from being mixed, shrinkage cavities, sand holes, uneven pouring and other casting defects from occurring in the pressure casting process, the temperature of the pouring molten iron is in the range of 1340-1420 ℃, and the speed of the pouring molten iron is 0.005m3/s-0.002m3In the range of/s.
The application also provides an integrated rotor, as shown in fig. 2, the integrated rotor of the embodiment is obtained according to the above processing method, the number of the integrated rotors 10 is two, the two integrated rotors 10 are in meshing transmission, and the integrated rotor 10 comprises a rotating shaft 11 and a plurality of blades 12 arranged on the rotating shaft 11. The integrated rotor of the embodiment can solve the problem that when the blades are fixed on the rotating shaft in the related art, excessive local stress is generated at the fixed position, so that the rotating shaft is easily damaged. The material of the integrated rotor of the embodiment may be cast iron material or high nickel alloy material. Thus, the corrosion resistance of the integrated rotor can be improved.
In addition, the inventor finds that in the related art, high working experience and high-precision tooling equipment are required in the process of installing a plurality of blades on the rotating shaft, so that the plurality of blades can meet the assembly requirement of being installed on the rotating shaft. As shown in fig. 2, in the present embodiment, the rotating shaft 11 and the six blades 12 are integrally formed. Therefore, complicated procedures in manual installation can be eliminated without high working experience and high-precision tool equipment, the installation requirement is easily met, the installation precision is high, the consistency is good, and the maintenance is convenient. Of course, in other embodiments not shown in the figures, the number of blades may also be five, seven and more.
As shown in fig. 2, the plurality of blades 12 are disposed on the rotating shaft 11 at intervals, the plurality of blades 12 include a first-stage blade 121, a second-stage blade 122, a third-stage blade 123, a fourth-stage blade 124, a fifth-stage blade 125 and a sixth-stage blade 126 which are sequentially arranged along the axis of the rotating shaft 11, the first-stage blade 121 includes a first blade body and three first protrusions disposed on the first blade body at intervals, the second-stage blade 122, the third-stage blade 123, the fourth-stage blade 124 and the fifth-stage blade 125 are identical in structure, the second-stage blade 122 includes a second blade body and a hook-shaped protrusion structure disposed on the second blade body, and the sixth-stage blade 126 includes a third blade body and five second protrusions disposed on the third blade body at intervals. The first stage blades 121, the second stage blades 122, the third stage blades 123, the fourth stage blades 124, the fifth stage blades 125 and the sixth stage blades 126 are formed to be capable of compressing air six times, and compared with the related art in which only four-stage or five-stage air compression can be provided, the number of times of compressing air is increased, and thus the overall compression ratio of the pump body assembly with the integrated rotor is improved.
Of course, in this embodiment, the rotating shaft and the first, second, third, fourth and fifth blades are an integrally formed structure, and the sixth blade is detachably connected to the rotating shaft and located behind the fifth blade along the axis of the rotating shaft. When the pump body assembly is in an operating environment with corrosive gas or an environment which is easy to wear, the sixth-stage blade is most easy to corrode or wear, in the embodiment, the sixth-stage blade is detachably connected to the rotating shaft, so that the sixth-stage blade can be detached from the rotating shaft after being corroded or worn, and is replaced by a new one, and thus the first-stage blade, the second-stage blade, the third-stage blade, the fourth-stage blade, the fifth-stage blade, the sixth-stage blade and the rotating shaft can be prevented from being replaced together, the waste of the integrated rotor is caused, and the cost can be saved.
The present application further provides a pump assembly, as shown in fig. 3 to 9, the pump assembly of the present embodiment includes a stator and an integrated rotor 10, the stator includes a stator body 50, a cover 60 and a bottom bracket 70, the cover 60 covers a first end surface of the stator body 50, the bottom bracket 70 is located on a second end surface of the stator body 50, the integrated rotor 10 is rotatably located in an inner cavity of the stator body 50, the first end of the integrated rotor 10 is rotatably connected to the cover 60, the second end of the integrated rotor 10 is rotatably connected to the bottom bracket 70, and the integrated rotor is the integrated rotor described above. The pump body assembly of the embodiment can solve the problem that the rotating shaft is easily damaged due to excessive local stress generated at the fixing position when the blade is fixed on the rotating shaft in the related art.
As shown in fig. 4 to 6, the stator main body 50 includes a housing and a plurality of partitions disposed at intervals along an axis of the housing in an inner cavity of the housing. Each partition plate is provided with a first avoidance hole 241 and a second avoidance hole 242 at intervals, the wall of the housing is provided with an air inlet 515 and an air outlet at intervals, and the plurality of partition plates are located between the air inlet 515 and the air outlet. The plurality of baffles include the first baffle that sets gradually in the direction of following lid 60 to collet 70, a plurality of second baffles and third baffle, first baffle includes the first surface towards lid 60 and the second surface towards collet 70, be provided with the first air inlet duct 531 with air inlet 515 intercommunication on the first surface, be provided with the first air outlet groove 532 with first air inlet duct 531 intercommunication on the second surface, be provided with first breach 243 on the pore wall of the hole 241 of dodging of the first of two arbitrary adjacent second baffles, be provided with second breach 244 on the pore wall of the hole 242 is dodged to the second of another, first breach 243 and second breach 244 dislocation set, second breach 244 dislocation set and intercommunication each other on first air outlet groove 532 and the adjacent second baffle. The third baffle includes the third surface towards lid 60 and the fourth surface towards collet 70, is provided with second air inlet duct 533 on the third surface, and second air inlet duct 533 and the second breach 244 dislocation set on the adjacent second baffle communicate each other, is provided with the second of the second air inlet duct 533 intercommunication on the fourth surface and goes out the gas groove, and the second goes out the gas groove and is linked together with the gas outlet. Like this, when pivot 11 drives blade 12 and carries out high-speed rotation, get into gas from air inlet 515, through first inlet channel 531, first gas outlet groove 532, first breach 243, second breach 244, second inlet channel 533 and second gas outlet groove after, discharge from the gas outlet, the process that gas flows through forms a snakelike gas flow channel of bending form, can realize compressing step by step from the gas of air inlet 515 suction to the inner chamber of stator main part 50 through snakelike gas flow channel. The silicon chip residues in the serpentine gas flow channel can be disassembled or cleaned while air is compressed. The serpentine gas flow channel is a one-way flow channel for gas to enter from the gas inlet 515 and to exit from the gas outlet, so that the problem that the cooling gas which is easy to flow back in the related art returns to the gas inlet 515 is avoided, and the work efficiency of the pump body assembly is improved.
In this embodiment, the number of the second partitions is three, and the three second partitions are a first second partition, a second partition and a third second partition in sequence along the direction from the cover 60 to the bottom support 70. The first air outlet groove 532 is arranged in a staggered way with the second notch 244 on the first second clapboard and is communicated with the second notch; the second air inlet groove 533 and the second notch 244 on the third second partition are arranged in a staggered manner and are communicated with each other.
Of course, in other embodiments not shown in the drawings, the first air outlet groove and the first notch on the first second partition plate may be arranged in a staggered manner and communicated with each other; the second air inlet groove and the first notch on the third second partition plate can be arranged in a staggered mode and are communicated with each other.
As shown in fig. 4 to 6, the first inlet groove 531 communicates with the first outlet groove 532 via a first communication passage in the first partition, the second inlet groove 533 communicates with the second inlet groove 533 via a second communication passage in the third partition, and the second communication passage is in the third partition. The arrangement of the first communication channel enables gas to be introduced from the first gas inlet groove 531 and discharged from the first gas outlet groove 532 through the first communication channel, so that the gas between the first partition plate and the adjacent one of the second partition plates can be transmitted to the space between the adjacent two of the second partition plates, which is beneficial to gas transmission. The second communicating channel is arranged to enable gas to be introduced from the second gas inlet groove 533 and discharged from the second gas inlet groove 533 through the second communicating channel, so that the gas between the third partition plate and the adjacent second partition plate can be transmitted to the lower side of the third partition plate, which is beneficial to gas transmission.
As shown in fig. 3 to 6, in the present embodiment, the housing includes a first body portion 511 and a second body portion 521 spliced with the first body portion 511, each partition includes a first plate section 512 and a second plate section 522 spliced with the first plate section 512, each first plate section 512 is integrally formed with the first body portion 511, and each second plate section 522 is integrally formed with the second body portion 521. Therefore, the number of stator structures and installation procedures are reduced as much as possible, and the structural precision of the stator is improved.
As shown in fig. 4 to 6, in the present embodiment, a first splicing structure is disposed between the first body portion 511 and the second body portion 521, the first splicing structure includes a first slot 541 and a first rib 542, the first slot 541 is spliced with the first rib 542, a second splicing structure is disposed between the first plate section 512 and the second plate section 522, the second splicing structure includes a second slot 543 and a second rib 544, and the second slot 543 is spliced with the second rib 544. The first body portion 511 and the second body portion 521 are spliced together through the first slot 541 and the first dowel 542, and meanwhile, when the first plate section 512 and the second plate section 522 are spliced together through the second slot 543 and the second dowel 544, the housing can be spliced. In the process of splicing the shell by the structure, the shell does not need to be spliced by a pin shaft and a pin hole in the related technology, the complex procedures are reduced, and meanwhile, the positioning precision of the spliced shell can be improved by matching the slots with the dowel bars, so that the precision of the installed shell is higher.
As shown in fig. 3, the weight-reducing holes 55 are formed in both the side wall of the first body portion 511 and the side wall of the second body portion 521, and the weight of the first body portion 511 and the second body portion 521 can be reduced by the weight-reducing holes 55, and the material consumption and the cost can be reduced.
As shown in fig. 3 to 6 and 9, each first plate section 512 and the first body portion 511 are of an integral structure to obtain the upper shell 51, and each second plate section 522 and the second body portion 521 are of an integral structure to obtain the lower shell 52. A portion of the first relief hole 241 is formed on the first plate segment 512, and another portion is formed on the second plate segment 522. A portion of the second relief hole 242 is formed on the first plate segment 512, and another portion is formed on the second plate segment 522. Thus, the processing is convenient and the molding is easy.
As shown in fig. 4 to 8, the pump body assembly of the present embodiment is assembled as follows:
correspondingly placing a rotating shaft of one integrated rotor 10 into a first avoiding hole in the lower shell 52, and correspondingly placing a rotating shaft of the other integrated rotor 10 into a second avoiding hole in the lower shell 52; splicing the upper shell 51 with the lower shell 52, so that each first plate section 512 on the upper shell 51 is spliced with each second plate section 522 of the corresponding lower shell 52; inserting a cylindrical pin into the first body portion 511 of the upper case 51 and the second body portion 521 of the lower case 52; a first end of the integrated rotor 10 is rotatably penetrated into the cover 60 and a second end of the integrated rotor 10 is rotatably penetrated into the shoe 70 to form a pump body assembly.
The application also provides a vacuum pump, and the vacuum pump of this embodiment includes pump body subassembly, and pump body subassembly is foretell pump body subassembly. The vacuum pump of the embodiment can solve the problem that the rotating shaft is easily damaged due to excessive local stress generated at the fixing position when the blade is fixed on the rotating shaft in the related art.
In the description of the present invention, it is to be understood that the orientation or positional relationship indicated by the orientation words such as "front, rear, upper, lower, left, right", "lateral, vertical, horizontal" and "top, bottom", etc. are usually based on the orientation or positional relationship shown in the drawings, and are only for convenience of description and simplicity of description, and in the case of not making a reverse description, these orientation words do not indicate and imply that the device or element being referred to must have a specific orientation or be constructed and operated in a specific orientation, and therefore, should not be considered as limiting the scope of the present invention; the terms "inner and outer" refer to the inner and outer relative to the profile of the respective component itself.
Spatially relative terms, such as "above … …," "above … …," "above … …," "above," and the like, may be used herein for ease of description to describe one device or feature's spatial relationship to another device or feature as illustrated in the figures. It will be understood that the spatially relative terms are intended to encompass different orientations of the device in use or operation in addition to the orientation depicted in the figures. For example, if a device in the figures is turned over, devices described as "above" or "on" other devices or configurations would then be oriented "below" or "under" the other devices or configurations. Thus, the exemplary term "above … …" can include both an orientation of "above … …" and "below … …". The device may be otherwise variously oriented (rotated 90 degrees or at other orientations) and the spatially relative descriptors used herein interpreted accordingly.
It should be noted that the terms "first", "second", and the like are used to define the components, and are only used for convenience of distinguishing the corresponding components, and the terms have no special meanings unless otherwise stated, and therefore, the scope of the present invention should not be construed as being limited.
The above description is only a preferred embodiment of the present invention and is not intended to limit the present invention, and various modifications and changes may be made by those skilled in the art. Any modification, equivalent replacement, or improvement made within the spirit and principle of the present invention should be included in the protection scope of the present invention.
Claims (10)
1. The machining method of the integrated rotor is characterized by sequentially comprising the following steps of:
manufacturing a sand cavity and a sand core for accommodating the integrated rotor blank by using a sand mold, and selecting the position of a sprue gate;
obtaining the integrated rotor blank through pressure casting, and reserving a machining allowance of 4-5 mm on the surface of the integrated rotor blank;
quenching and destressing the integrated rotor blank, and checking whether the integrated rotor blank meets a first condition;
roughly machining a first machining surface of the integrated rotor blank meeting a first condition, and reserving machining allowance of 2mm on the first machining surface;
inspecting the integrated rotor blank through a three-coordinate measuring instrument, inspecting the interior of the integrated rotor blank through an endoscope, and inspecting whether the interior of the integrated rotor blank meets a second condition through ultrasonic flaw detection;
performing semi-finishing on a second processing surface of the integrated rotor blank meeting a second condition to enable the second processing surface to be reserved with a processing allowance of 0.2 mm;
the integral rotor blank is subjected to finish machining in a grinding mode, in the finish machining process, the circular runout of a rotating shaft of the integral rotor blank is in the range of 0-0.012mm, the surface finish is in the range of 0-0.8 mu m, and the verticality of blades of the integral rotor blank relative to the rotating shaft of the integral rotor blank is in the range of 0-0.02 mm;
and carrying out dynamic balance measurement on the integrated rotor blank, and screening out the integrated rotor blank meeting the dynamic balance standard to obtain the integrated rotor (10) with six blades.
2. The process of claim 1, wherein between the step of sand molding a sand cavity and a sand core for receiving the one-piece rotor blank, and the step of locating the sprue and the step of obtaining the one-piece rotor blank by press casting, the process further comprises pouring molten iron into the sand cavity and the sand core, the temperature of the poured molten iron being in the range of 1340 ℃ to 1420 ℃, the speed of the poured molten iron being 0.005m3/s-0.002m3In the range of/s.
3. An integrated rotor is characterized in that,
the integrated rotor is obtained according to the processing method of the integrated rotor as claimed in claim 1 or 2, the number of the integrated rotors (10) is two, the two integrated rotors (10) are in meshing transmission, the integrated rotor (10) comprises a rotating shaft (11) and a plurality of blades (12) arranged on the rotating shaft (11), and the rotating shaft (11) and the plurality of blades (12) are of an integrated structure.
4. The integrated rotor of claim 3,
the blades (12) are arranged on the rotating shaft (11) at intervals, the blades (12) comprise a first-stage blade (121), a second-stage blade (122), a third-stage blade (123), a fourth-stage blade (124), a fifth-stage blade (125) and a sixth-stage blade (126) which are sequentially arranged along the axis of the rotating shaft (11), the first-stage blade (121) comprises a first blade body and three first bulges which are arranged on the first blade body at intervals, the second stage blade (122), the third stage blade (123), the fourth stage blade (124) and the fifth stage blade (125) are identical in structure, the second stage blade (122) comprises a second blade body and a hook-like projection arrangement provided on the second blade body, the sixth stage blade (126) comprises a third blade body and five second bulges arranged on the third blade body at intervals.
5. A pump body assembly comprising a stator and an integral rotor (10), wherein the stator comprises a stator body (50), a cover (60) and a shoe (70), the cover (60) covers a first end surface of the stator body (50), the shoe (70) is located on a second end surface of the stator body (50), the integral rotor (10) is rotatably located in an inner cavity of the stator body (50), a first end of the integral rotor (10) is rotatably connected with the cover (60), a second end of the integral rotor (10) is rotatably connected with the shoe (70), and the integral rotor is the one-piece rotor of claim 3 or 4.
6. The pump body assembly of claim 5,
the stator body (50) comprises a housing and a plurality of partitions arranged at intervals along an axis of the housing within an inner cavity of the housing; a first avoidance hole (241) and a second avoidance hole (242) are formed in each partition plate at intervals, air inlets (515) and air outlets are formed in the cavity wall of the shell at intervals, and the partition plates are located between the air inlets (515) and the air outlets;
the plurality of clapboards comprise a first clapboard, a plurality of second clapboards and a third clapboard which are sequentially arranged along the direction from the cover body (60) to the bottom support (70), the first clapboard comprises a first surface facing the cover body (60) and a second surface facing the bottom support (70), the first surface is provided with a first air inlet groove (531) communicated with the air inlet (515), the second surface is provided with a first air outlet groove (532) communicated with the first air inlet groove (531),
a first notch (243) is formed in the hole wall of the first avoidance hole (241) of one of any two adjacent second partition plates, a second notch (244) is formed in the hole wall of the second avoidance hole (242) of the other one of the two adjacent second partition plates, the first notch (243) and the second notch (244) are arranged in a staggered mode, and the first air outlet groove (532) is arranged in a staggered mode with the first notch (243) or the second notch (244) of the adjacent second partition plate and communicated with each other;
the third partition plate comprises a third surface facing the cover body (60) and a fourth surface facing the bottom support (70), a second air inlet groove (533) is formed in the third surface, the second air inlet groove (533) and the first notch (243) or the second notch (244) on the adjacent second partition plate are arranged in a staggered mode and communicated with each other, a second air outlet groove communicated with the second air inlet groove (533) is formed in the fourth surface, and the second air outlet groove is communicated with the air outlet.
7. The pump body assembly according to claim 6, characterized in that said first inlet channel (531) is in communication with said first outlet channel (532) through a first communication channel, said first communication channel being located in said first partition, said second inlet channel (533) being in communication with said second outlet channel through a second communication channel, said second communication channel being located in said third partition.
8. The pump body assembly according to claim 6, wherein the housing includes a first body portion (511) and a second body portion (521) joined to the first body portion (511), each of the bulkheads includes a first plate section (512) and a second plate section (522) joined to the first plate section (512), each of the first plate sections (512) is of an integrally formed structure with the first body portion (511), each of the second plate sections (522) is of an integrally formed structure with the second body portion (521), a portion of the first relief hole (241) is formed in the first plate section (512), another portion is formed in the second plate section (522), a portion of the second relief hole (242) is formed in the first plate section (512), and another portion is formed in the second plate section (522).
9. The pump body assembly according to claim 8, wherein a first splicing structure is arranged between the first body portion (511) and the second body portion (521), the first splicing structure comprises a first insertion groove (541) and a first dowel (542), the first insertion groove (541) is spliced with the first dowel (542), a second splicing structure is arranged between the first plate section (512) and the second plate section (522), the second splicing structure comprises a second insertion groove (543) and a second dowel (544), and the second insertion groove (543) is spliced with the second dowel (544).
10. A vacuum pump comprising a pump body assembly, characterized in that it is a pump body assembly according to any one of claims 5 to 9.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
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| CN202010560791.9A CN111664091B (en) | 2020-06-18 | 2020-06-18 | Integrated rotor and machining method thereof, pump body assembly and vacuum pump |
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| Application Number | Priority Date | Filing Date | Title |
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| CN202010560791.9A CN111664091B (en) | 2020-06-18 | 2020-06-18 | Integrated rotor and machining method thereof, pump body assembly and vacuum pump |
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| CN111664091A true CN111664091A (en) | 2020-09-15 |
| CN111664091B CN111664091B (en) | 2022-05-10 |
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| CN116538089A (en) * | 2023-06-08 | 2023-08-04 | 北京通嘉宏瑞科技有限公司 | Rotor structure and vacuum pump |
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| CN111664091B (en) | 2022-05-10 |
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