CN111734626B - Vacuum pump assembly, vacuum pump and production and use methods thereof - Google Patents

Vacuum pump assembly, vacuum pump and production and use methods thereof Download PDF

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Publication number
CN111734626B
CN111734626B CN202010649981.8A CN202010649981A CN111734626B CN 111734626 B CN111734626 B CN 111734626B CN 202010649981 A CN202010649981 A CN 202010649981A CN 111734626 B CN111734626 B CN 111734626B
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rotor
vacuum pump
area
stator
inner cavity
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CN111734626A (en
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刘建伟
雷晓宏
魏民
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Beijing Tongjia Dingyuan Technology Co ltd
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Beijing Tongjia Dingyuan Technology Co ltd
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    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C18/00—Rotary-piston pumps specially adapted for elastic fluids
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B22—CASTING; POWDER METALLURGY
    • B22C—FOUNDRY MOULDING
    • B22C9/00—Moulds or cores; Moulding processes
    • B22C9/02—Sand moulds or like moulds for shaped castings
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B22—CASTING; POWDER METALLURGY
    • B22C—FOUNDRY MOULDING
    • B22C9/00—Moulds or cores; Moulding processes
    • B22C9/22—Moulds for peculiarly-shaped castings
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23P—METAL-WORKING NOT OTHERWISE PROVIDED FOR; COMBINED OPERATIONS; UNIVERSAL MACHINE TOOLS
    • B23P15/00—Making specific metal objects by operations not covered by a single other subclass or a group in this subclass
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C25/00—Adaptations of pumps for special use of pumps for elastic fluids
    • F04C25/02—Adaptations of pumps for special use of pumps for elastic fluids for producing high vacuum
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C27/00—Sealing arrangements in rotary-piston pumps specially adapted for elastic fluids
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C29/00—Component parts, details or accessories of pumps or pumping installations, not provided for in groups F04C18/00 - F04C28/00
    • F04C29/0042—Driving elements, brakes, couplings, transmissions specially adapted for pumps
    • F04C29/005—Means for transmitting movement from the prime mover to driven parts of the pump, e.g. clutches, couplings, transmissions
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C29/00—Component parts, details or accessories of pumps or pumping installations, not provided for in groups F04C18/00 - F04C28/00
    • F04C29/12—Arrangements for admission or discharge of the working fluid, e.g. constructional features of the inlet or outlet
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C2230/00—Manufacture
    • F04C2230/10—Manufacture by removing material
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C2230/00—Manufacture
    • F04C2230/20—Manufacture essentially without removing material
    • F04C2230/21—Manufacture essentially without removing material by casting

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  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Applications Or Details Of Rotary Compressors (AREA)

Abstract

A vacuum pump assembly, a vacuum pump and methods of making and using the same. The vacuum pump assembly comprises a shaft (3), a rotor (2) and a stator (1), wherein the inner teeth of the rotor (2) are meshed with the outer gear of the shaft (3), a first air inlet (11), a first air outlet (12), a second air inlet (13) and a second air outlet (14) are formed in the bottom of the inner cavity of the stator (1), and the rotor (2) is not in contact with the side wall of the inner cavity of the stator (3). The vacuum pump assembly has the advantages of simple structure, convenience in installation, high working efficiency, stability in operation, capability of providing a higher pumping speed within a wider range of pressure intensity, high starting speed and capability of realizing an oil-free cleaning pumping process.

Description

Vacuum pump assembly, vacuum pump and production and use methods thereof
Technical Field
The present invention relates to a vacuum pump assembly, a vacuum pump and methods of manufacture and use thereof, and more particularly to a vacuum pump assembly having an inner shaft geared rotor, a vacuum pump and methods of manufacture and use thereof.
Background
The precision vacuum pump is a necessary vacuum source device in the semi-conductor industry, and is also an indispensable basic product which directly influences the performance and quality of vacuum complete equipment, the precision vacuum pump mainly drives the rapid development of the semi-conductor industry, the chemical industry and the thin film industry, particularly, the semi-conductor industry completely uses a dry vacuum pump to replace an oil-sealed mechanical pump, and the dry pump manufacture becomes a new economic growth point in the vacuum manufacturing field.
Dry vacuum pumps generally include roots, nus, screw and scroll types. Roots or nots pumps are commonly used in multi-stage vacuum pumps and comprise a plurality of stators, each stator being associated with a pair of rotors inside it, typically multi-stage positive displacement pumps, the directions of rotation of each pair of rotors being opposite to each other. Prior art 1: CN209604238U discloses a dry vacuum pump in each pumping chamber of which a shaft supports a respective rotor component, the rotor having a roots-type profile within each pumping chamber. The dry vacuum pump is generally manufactured by ductile cast iron in the prior art due to the requirements of structural strength and machinability, but the high-temperature corrosive gas used in the semiconductor industry causes the corrosion of the ductile cast iron, which affects the service life of the dry vacuum pump. This prior art 1 enhances the corrosion resistance of the dry vacuum pump by coating the shaft, the rotor, or the stator with a coating layer including high phosphorus nickel and nickel phosphorus and a fluoropolymer, but increases the production difficulty and the structural complexity of the dry vacuum pump because each pumping chamber thereof needs to be provided with two shafts and rotors having opposite rotation directions, and there is still a possibility of tile burning due to friction between the rotors and the stator, and in practical use thereof, there may still be a need for an additional lubricating liquid providing device for providing lubrication.
Currently, there is also a pump structure with a triangular rotor, prior art 2: CN109595152A discloses a triangular rotor pump, in which a rotor rotates in a cylinder and the cylinder is divided into 3 different working chambers by the rotor, each of which completes a different working cycle. Although each pumping chamber only needs to be provided with a shaft and a device, the complexity of the structure is reduced, the cylinder body is contacted with 3 vertexes of the rotor, friction still exists in the working chamber, and the outlet and the inlet of the working cycle are positioned on the side surface of the pumping chamber, so that the size of a pump body is large, and the installation of a vacuum pump is not facilitated.
Therefore, how to make the vacuum pump have a simpler structure, thereby improving the convenience of production, installation and maintenance, and improving the working efficiency and the operation stability of the vacuum pump is a problem to be solved in the field.
Disclosure of Invention
In order to solve the problems in the prior art, the invention discloses a vacuum pump assembly, which adopts the following technical scheme:
a vacuum pump assembly comprising a shaft, a rotor, a stator, the shaft having an external gear rotating about an axial axis of the shaft; said rotor having an approximately triangular outer profile and having a hollowed out portion with internal teeth therein, said internal teeth of said rotor intermesh with said external gear of said shaft, said shaft rotationally driving said rotor; the stator is provided with a side wall and a bottom, the side wall encloses and synthesizes an inner cavity with an approximately 8-shaped outline, the upper half part of the 8-shaped outline is a first area of the inner cavity, and the lower half part of the 8-shaped outline is a second area of the inner cavity; the rotor is arranged in the inner cavity and is attached to the bottom of the stator to rotate; the upper half part of the inner cavity is provided with a first air inlet and a first air outlet, the lower half part of the inner cavity is provided with a second air inlet and a second air outlet, and the first air inlet, the first air outlet, the second air inlet and the second air outlet are all arranged at the bottom of the stator; the rotor is not in contact with the side wall of the inner cavity of the stator, and the distance between the top point of the rotor and the side wall of the inner cavity is 0.1-1 mm. The invention also discloses a vacuum pump which comprises the vacuum pump assembly.
The invention also discloses a production method of the vacuum pump assembly, which is used for producing the vacuum pump assembly.
The invention also discloses a using method of the vacuum pump assembly.
The vacuum pump assembly and the vacuum pump have the advantages of simple structure, convenience in installation, high working efficiency, stability in operation, convenience in maintenance when problems occur, and saving a large amount of time for assembling and disassembling the pump during maintenance. The internal-meshing gear-driven pumping unit has simple and stable operation, can drive the shaft and the rotor to operate in an internal-meshing gear transmission mode, can provide a higher pumping speed within a range of pressure intensity, has a high starting speed, and can work immediately; the rotor and the inner cavity of the pump stator are not in contact, a gap of 0.1-1mm exists between the rotor and the inner cavity of the pump stator, the pump cavity is sealed by the gap, and the rotor can run at high speed without using lubricating oil because no friction exists in the cavity, so that the oil-free and clean air suction process can be realized.
Drawings
FIG. 1 is a schematic view of a vacuum pump assembly and vacuum pump of the present invention.
FIG. 2 is a schematic view of the shaft and rotor engagement of the present invention.
Fig. 3 is a schematic diagram of the operation of the first air inlet for air suction.
Fig. 4 is a schematic diagram of the operation of exhausting air from the first air outlet.
Fig. 5 is a schematic diagram of the operation of the second air inlet for air suction.
FIG. 6 is a schematic diagram of the second air outlet for exhausting air.
Detailed Description
Fig. 1 shows a vacuum pump assembly comprising a shaft 3, a rotor 2, a stator 1, said shaft 3 having an external gear, said rotor having an approximately triangular outer profile and having a hollow-out portion with internal teeth therein, as shown in fig. 2, the internal teeth of the rotor 2 and the external gear of the shaft 3 are intermeshed at position a in the figure. The stator 1 has a side wall and a bottom which together enclose an inner cavity, the inner surface of the side wall having an approximately 8-shaped contour.
The upper half part of the 8-shaped contour is a first area of the inner cavity, and the lower half part of the 8-shaped contour is a second area of the inner cavity.
The outline geometric molded line design process of the rotor 2 and the stator 1 is as follows:
1. establishing a plane coordinate system of the molded lines of the rotor 2 and the stator 1;
2. determining the rotor 2 line type;
3. solving a conjugate section (stator) mathematical model by using coordinate transformation;
4. the mathematical model of the rotor 2 and the stator 1 can be obtained by the equation of the simultaneous conjugate section mathematical model.
The specific method comprises the following steps:
the design relation of the rotor and the stator meets the coordinate transformation principle which is as follows
Rg＝xgig+ygjg+zgkg；Rf＝xfif+yfjf+zfkf；
Wherein, R isgExpression for any vector in a moving coordinate system Sg, i.e. Rg＝(xg，yg，jg)，RfThe expression in the system of static coordinates Sf representing this vector, i.e. Rf＝(xf，yf，jf) Wherein x isg，yg，zg，xf，yf，zfAre respectively a vector RgAnd RfVector parameter of ig，jg，kg，if，jf，kfRespectively, are expressions of coordinate systems Sg and Sf. No matter which coordinate system is used for description, the vector will not change, so: rg＝Rf，
xgig+ygjg+zgkg＝xfif+yfjf+zfkf
Performing inner product operation on the left side and the right side of the above formula respectively at the vectors if, jf and kf to obtain:
xg(igif)+yg(jgif)+zg(kgif)＝xf(ifif)+yf(jfif)+zf(kfif)
xg(igjf)+yg(jgjf)+zg(kgjf)＝xf(ifjf)+yf(jfjf)+zf(kfjf) (1)
xg(igkf)+yg(jgkf)+zg(kgkf)＝xf(ifkf)+yf(jfkf)+zf(kfkf)
where if, jf, kf are three unit vectors perpendicular to each other, so
igif＝jfjf＝kfkf＝1
Ifjf＝ifkf＝kfif＝0
Substituting the above formula into formula (1) to obtain
xf＝xg(igif)+yg(jgif)+zg(kgif)
yf＝xg(igjf)+yg(jgjf)+zg(kgjf)
Zf＝xg(igkf)+yg(jgkf)+zg(kgkf)
The above formula is expressed as a matrix
Figure BDA0002574588280000051
The above formula can be written as:
Rf＝LfgRg
wherein
Figure BDA0002574588280000052
The elements of this matrix must satisfy the following six conditions:
three unit vector length condition
a11 2+a12 2+a13 2＝1
a21 2+a22 2+a23 2＝1
a31 2+a32 2+a33 2＝1
And three unit vector orthogonality condition
a11a21+a11a22+a13a23＝0
a11a31+a12a32+a13a33＝0
a21a31+a22a32+a23a33＝0
By changing the above formula into a homogeneous coordinate system, a 4x4 order matrix Mf can be obtainedgAs follows
Figure BDA0002574588280000053
If the two coordinate systems are not coincident in situ, the vector Rg in the moving coordinate system can be represented as Rf in the static coordinate system, and the relationship is:
Rf＝Rg+R0
wherein R is0The position vector of the origin of the static coordinate system is expressed as: [ x ] of0,y0,z0,1]By the same procedure, the formula can be changed to Rf＝MfgRgWherein M isfgComprises the following steps:
Figure BDA0002574588280000061
the above formula includes two actions of translation and rotation, and the sequence is translation first and then rotation.
According to the coordinate transformation principle, the relationship between the rotor and the stator can be determined.
The rotor 2 is arranged in the inner cavity and is attached to the bottom of the stator 1 to rotate under the driving of a shaft 3. As shown in fig. 3 and 4, a first air inlet 11 and a first air outlet 12 are disposed in the upper half of the inner cavity, i.e., the first region. As shown in fig. 5 and 6, a second air inlet 13 and a second air outlet 14 are disposed in a second half portion, i.e., a second area, of the inner cavity. The first air inlet 11, the first air outlet 12, the second air inlet 13 and the second air outlet 14 are all arranged at the bottom of the inner cavity of the stator 1. Because the air inlet and the air outlet are both arranged at the bottom of the inner cavity, the space occupied by the vacuum pump assembly in the radial direction of the shaft can be reduced, and the vacuum pump assembly can adapt to more working occasions.
The rotor 2 is not in contact with the side wall of the inner cavity of the stator 1, and the distance between the top point of the rotor 2 and the side wall of the inner cavity is 0.1-1 mm. The pump cavity is sealed by a gap, and the rotor can run at high speed without using lubricating oil due to no friction in the cavity, so that an oil-free and clean air suction process can be realized, an additional lubricating oil supply mechanism is not required, and the pumping medium is not polluted.
In the vacuum pump assembly, the shaft 3, the rotor 2 and the stator 1 are made of high-nickel alloy materials.
Referring to fig. 3 and 5, the opening shape of the first air inlet 11/the second air inlet 13 of the vacuum pump assembly is approximately triangular, and two adjacent sides of the triangle are parallel to the side of the rotor facing the first area/the second area and the side wall of the first area/the second area at the end of the first air suction stroke and the second air suction stroke respectively.
Referring to fig. 4 and 6, the opening shape of the first air outlet 12/the second air outlet 14 of the vacuum pump assembly is approximately triangular, and two adjacent sides of the triangle are parallel to the side of the rotor facing the first area/the second area and the side wall of the first area/the second area at the beginning of the first exhaust stroke and the second exhaust stroke respectively.
The shape of the air inlet and the air outlet can increase the air suction/exhaust volume and improve the working efficiency of air suction and exhaust strokes.
The specific working process of the vacuum pump assembly comprises the following steps:
the shaft rotates clockwise to drive the rotor to rotate clockwise correspondingly, as shown in fig. 3, the upper half part of the inner cavity forms negative pressure through the rotation of the rotor, so that the vacuum pump assembly performs air suction on a working environment connected with the vacuum pump assembly through the first air inlet 11 of the first area of the upper half part.
When the rotor is operated to close the first air inlet 11 in the first area of the upper half by using its own structural features, air is stopped to enter the next working state, i.e. the air exhaust state, and the first air exhaust port 12 is connected to the atmosphere to exhaust air out of the pump body, as shown in fig. 4.
The rotor continues to run and its structural features cause it to enter the second inlet position in the second region of the lower half of the cavity, opening the second inlet 13 and drawing gas into the cavity from the working environment to which it is connected, as shown in figure 5.
The rotor operates to close the second inlet port in the second region of the lower half of the internal chamber and then opens the second outlet port 14 in the second region of the lower half of the internal chamber and the compressed gas exits the pump body, as shown in figure 6.
Thus, the rotor 2 is driven by the rotation of the shaft 3 to continuously perform air suction and exhaust work, and the air suction and exhaust work is performed twice every time the rotor rotates one circle.
The specific production method of the vacuum pump assembly comprises the following steps:
1. casting: obtaining blanks of the shaft 3, the rotor 2 and the stator 1 by casting, firstly making a sand cavity and a sand core by using a sand mould, selecting the position of a sprue gate, controlling the temperature and the casting speed of cast molten iron, and keeping the machining allowance of a cast blank machining surface to be 4-5 mm; performing aging stress relief treatment after the blank is formed, performing defect inspection on the casting, such as shrinkage porosity, air holes, sand holes, slag inclusion, cracks and corrosion repair, and performing the next step after the inspection is qualified;
2. rough machining: machining the machined surface of the component by rough machining until the machining allowance is 2 mm;
3. and (3) a checking step: carrying out 3D coordinate inspection on the rough machined part after finishing roughing, carrying out internal inspection by using an endoscope, and carrying out internal sand eye and casting defect inspection by using ultrasonic flaw detection;
4. semi-processing: semi-finishing the machined surface of the casting until the machining allowance is 0.2 mm;
5. and (3) finishing: the method comprises the following steps of performing finish machining on a part in a grinding mode, controlling circular runout of a main shaft to be 0.012mm in the machining process, controlling surface finish to reach 0.8, ensuring verticality of a plurality of units on the main shaft and the main shaft to be 0.02, after finishing machining, performing precision detection on the main shaft by adopting three coordinates, wherein the size, form and position tolerance and roughness meet requirements, a runout detection value needs to be kept within 0.012mm, and the surface finish reaches 1.6 Ra;
6. the shaft 3 is fixedly connected with the external gear by a key and a key groove;
7. the rotor 2 is fixedly connected with the inner gear, and can be in a key-key groove connection mode;
8. the stator 1 is fixed on an operation table, and the installed rotor and the shaft are respectively installed in corresponding positions in a stator cavity in a hoisting mode.
The above-mentioned embodiments are merely exemplary embodiments of the present invention, and it should be understood that any modification, equivalent replacement, or improvement made within the scope of the present invention is also included in the present invention.

Claims (6)

1. A vacuum pump assembly comprising a shaft (3), a rotor (2), a stator (1), characterized in that:
said shaft (3) having an external gear, rotating about the axial axis of said shaft (3);
the rotor (2) has an approximately triangular outer contour and has a cutout with internal teeth inside, the internal teeth of the rotor (2) intermesh with the external teeth of the shaft (3), the shaft (3) rotationally drives the rotor (2);
the stator (1) is provided with a side wall and a bottom, the side wall encloses an inner cavity with an approximately 8-shaped outline, the upper half part of the approximately 8-shaped outline is a first area of the inner cavity, and the lower half part of the approximately 8-shaped outline is a second area of the inner cavity;
the rotor (2) is arranged in the inner cavity and is attached to the bottom of the stator (1) to rotate;
the upper half part of the inner cavity is provided with a first air inlet (11) and a first air outlet (12), the lower half part of the inner cavity is provided with a second air inlet (13) and a second air outlet (14), and the first air inlet (11), the first air outlet (12), the second air inlet (13) and the second air outlet (14) are all arranged at the bottom of the stator (1);
the rotor (2) is not in contact with the side wall of the inner cavity of the stator (1), and the distance between the top point of the rotor (2) and the side wall of the inner cavity is 0.1-1 mm;
the opening shape of the first air inlet (11) is approximately triangular, and two adjacent sides of the triangle are parallel to the side edge of the rotor (2) facing the first area and the side wall of the first area at the end moment of the first air suction stroke;
the opening shape of the second air inlet (13) is approximately triangular, and two adjacent sides of the triangle are parallel to the side edge of the rotor (2) facing the second area and the side wall of the second area at the end moment of the second air suction stroke;
the opening shape of the first air outlet (12) is approximately triangular, and two adjacent sides of the triangle are parallel to the side edge of the rotor facing the first area and the side wall of the first area at the beginning moment of the first exhaust stroke;
the opening shape of the second air outlet (14) is approximately triangular, and two adjacent sides of the triangle are parallel to the side edge of the rotor facing the second area and the side wall of the second area at the start moment of the second exhaust stroke.
2. A vacuum pump assembly as claimed in claim 1, wherein: the shaft (3), the rotor (2) and the stator (1) are made of high-nickel alloy materials.
3. A vacuum pump, characterized by: the vacuum pump assembly comprises the vacuum pump assembly as claimed in claim 1 or 2, the vacuum pump assembly is installed inside a casing (4) of the vacuum pump, one end of the side wall of the stator (1), which is far away from the bottom of the stator (1), is located on a first top surface of the casing (4), the casing (4) is an open opening on the first top surface, a sealing groove (5) for accommodating a sealing ring is formed at the end of the opening, and a sealing flange (6) is fixedly installed on the first top surface and is matched with the sealing groove (5) for sealing the opening.
4. A vacuum pump according to claim 3, wherein: the sealing flange is characterized in that a plurality of first convex arms (7) with through holes are arranged on the outer wall of the first top surface of the shell (4), a plurality of second convex arms (8) with through holes are correspondingly arranged on the side surface of the sealing flange (6), and bolts are used for penetrating through the corresponding through holes in the first convex arms (7) and the second convex arms, so that the sealing flange (6) is fixed on the shell (4).
5. A method of producing a vacuum pump assembly for producing a vacuum pump assembly according to claim 1 or 2, characterized by comprising the steps of:
s01, casting: obtaining blanks of the shaft (3), the rotor (2) and the stator (1) by casting, firstly making a sand cavity and a sand core by using a sand mould, selecting the position of a sprue gate, controlling the temperature and the casting speed of cast molten iron, and keeping the machining allowance of a cast blank machining surface to be 4-5 mm; performing aging stress relief treatment after the blank is formed, performing defect inspection on the casting, such as shrinkage porosity, air holes, sand holes, slag inclusion, cracks and corrosion repair, and performing the next step after the inspection is qualified;
s02, rough machining: machining the machined surface of the component by rough machining until the machining allowance is 2 mm;
s03, checking: carrying out 3D coordinate inspection on the rough machined part after finishing roughing, carrying out internal inspection by using an endoscope, and carrying out internal sand eye and casting defect inspection by using ultrasonic flaw detection;
s04, semi-finishing: semi-finishing the machined surface of the casting until the machining allowance is 0.2 mm;
s05, finishing: the method comprises the following steps of performing finish machining on a part in a grinding mode, controlling circular runout of a main shaft to be 0.012mm in the machining process, controlling surface finish to reach 0.8, ensuring verticality of a plurality of units on the main shaft and the main shaft to be 0.02, after finishing machining, performing precision detection on the main shaft by adopting three coordinates, wherein the size, form and position tolerance and roughness meet requirements, a runout detection value needs to be kept within 0.012mm, and the surface finish reaches 1.6 Ra;
s06, fixedly connecting the shaft (3) with the external gear by adopting a key and key groove connection mode;
s07, fixedly connecting the rotor (2) with the inner gear by adopting a key and key groove connection mode;
s08, fixing the stator (1) on an operation table, and respectively installing the installed rotor (2) and the shaft (3) into corresponding positions in the cavity of the stator (1) in a hoisting mode.
6. A method of using a vacuum pump assembly to which a vacuum pump assembly according to claim 1 or 2 is applied, the method comprising: the rotation through axle (3) drives rotor (2) and does not stop and bleed and exhaust work, and every rotation a week carries out twice and bleeds and exhaust work, specifically includes the following step:
s11, a first gas absorption step: the shaft (3) rotates clockwise to drive the rotor (2) to rotate clockwise, and the upper half part, namely the first area of the inner cavity forms negative pressure through the rotation of the rotor (2), so that the vacuum pump assembly performs air extraction on a working environment connected with the first air inlet (11) through the first air inlet (11) in the first area;
s12, a first exhaust step: when the rotor (2) runs to a state that the first air inlet (11) in the first area is closed by utilizing the structural characteristics of the rotor, air inlet is stopped, and at the moment, the first air outlet (12) in the first area is connected with the atmosphere, so that air is discharged out of the pump body;
s13, the rotor (2) continues to operate, the structure characteristic is that a second air inlet (13) in the lower half part of the inner cavity, namely the second area is opened, and air is pumped into the cavity from the working environment connected with the second air inlet (13);
and S14, the rotor (2) operates to close the second air inlet (13) in the lower half part of the inner cavity, namely the second area, and then opens the second air outlet (14) in the lower half part of the inner cavity, namely the second area, and the compressed air is discharged out of the pump body.
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TWI773486B (en) * 2021-08-17 2022-08-01 黃宏志 Mechanism for utilizing exhaust gas of pistonless rotary compressor

Citations (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3656875A (en) * 1970-01-19 1972-04-18 Borsig Gmbh Rotary piston compressor
US3899272A (en) * 1974-05-13 1975-08-12 Curtiss Wright Corp Rotary mechanism having apex seals with low contact pressure
US4477240A (en) * 1982-11-12 1984-10-16 Deere & Company Rotor bearing lubricating system
CN1296395A (en) * 1998-02-09 2001-05-23 声学设计股份有限公司 Quiet vacuum cleaner using vacuum pump with lobed chamber
CN1936297A (en) * 2005-09-19 2007-03-28 龚樱 Circular-arc wheel rotor machine
CN201696142U (en) * 2009-11-27 2011-01-05 奇瑞汽车股份有限公司 Rotor engine system
CN110282108A (en) * 2019-07-02 2019-09-27 哈尔滨工程大学 A kind of hydraulic jet propulsion system of three-apexed rotor
CN110358982A (en) * 2019-08-08 2019-10-22 淄博通普真空设备有限公司 A kind of preparation method of screw vacuum pump rotor
CN209724666U (en) * 2018-12-27 2019-12-03 宁波圣龙汽车动力系统股份有限公司 A kind of rotor assembly and electronic vacuum pump

Patent Citations (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3656875A (en) * 1970-01-19 1972-04-18 Borsig Gmbh Rotary piston compressor
US3899272A (en) * 1974-05-13 1975-08-12 Curtiss Wright Corp Rotary mechanism having apex seals with low contact pressure
US4477240A (en) * 1982-11-12 1984-10-16 Deere & Company Rotor bearing lubricating system
CN1296395A (en) * 1998-02-09 2001-05-23 声学设计股份有限公司 Quiet vacuum cleaner using vacuum pump with lobed chamber
CN1936297A (en) * 2005-09-19 2007-03-28 龚樱 Circular-arc wheel rotor machine
CN201696142U (en) * 2009-11-27 2011-01-05 奇瑞汽车股份有限公司 Rotor engine system
CN209724666U (en) * 2018-12-27 2019-12-03 宁波圣龙汽车动力系统股份有限公司 A kind of rotor assembly and electronic vacuum pump
CN110282108A (en) * 2019-07-02 2019-09-27 哈尔滨工程大学 A kind of hydraulic jet propulsion system of three-apexed rotor
CN110358982A (en) * 2019-08-08 2019-10-22 淄博通普真空设备有限公司 A kind of preparation method of screw vacuum pump rotor

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