CN220956044U - High-efficiency energy-saving screw vacuum pump - Google Patents
High-efficiency energy-saving screw vacuum pump Download PDFInfo
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- CN220956044U CN220956044U CN202322442614.2U CN202322442614U CN220956044U CN 220956044 U CN220956044 U CN 220956044U CN 202322442614 U CN202322442614 U CN 202322442614U CN 220956044 U CN220956044 U CN 220956044U
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- 230000001360 synchronised effect Effects 0.000 claims abstract description 11
- 239000011261 inert gas Substances 0.000 claims description 22
- 238000007906 compression Methods 0.000 claims description 17
- 230000006835 compression Effects 0.000 claims description 16
- 239000011295 pitch Substances 0.000 claims description 16
- 238000010926 purge Methods 0.000 claims description 15
- 239000000498 cooling water Substances 0.000 claims description 8
- 125000006850 spacer group Chemical group 0.000 claims description 8
- 238000001816 cooling Methods 0.000 claims description 5
- 230000008859 change Effects 0.000 claims description 4
- 238000005265 energy consumption Methods 0.000 abstract description 4
- 238000000605 extraction Methods 0.000 abstract description 3
- 239000003921 oil Substances 0.000 description 11
- 230000008901 benefit Effects 0.000 description 4
- 238000004519 manufacturing process Methods 0.000 description 4
- 238000012545 processing Methods 0.000 description 4
- 238000005086 pumping Methods 0.000 description 4
- 230000005540 biological transmission Effects 0.000 description 3
- 238000011161 development Methods 0.000 description 3
- 239000007789 gas Substances 0.000 description 3
- 239000010687 lubricating oil Substances 0.000 description 3
- 210000004907 gland Anatomy 0.000 description 2
- 230000006872 improvement Effects 0.000 description 2
- 238000012423 maintenance Methods 0.000 description 2
- 238000003801 milling Methods 0.000 description 2
- 230000007704 transition Effects 0.000 description 2
- WHXSMMKQMYFTQS-UHFFFAOYSA-N Lithium Chemical compound [Li] WHXSMMKQMYFTQS-UHFFFAOYSA-N 0.000 description 1
- 230000009286 beneficial effect Effects 0.000 description 1
- 230000007547 defect Effects 0.000 description 1
- 238000013461 design Methods 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 230000005284 excitation Effects 0.000 description 1
- 239000007788 liquid Substances 0.000 description 1
- 229910052744 lithium Inorganic materials 0.000 description 1
- 230000007774 longterm Effects 0.000 description 1
- 238000000034 method Methods 0.000 description 1
- 238000004377 microelectronic Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 238000005457 optimization Methods 0.000 description 1
- 230000008569 process Effects 0.000 description 1
- 230000002441 reversible effect Effects 0.000 description 1
- 238000007789 sealing Methods 0.000 description 1
- 239000004065 semiconductor Substances 0.000 description 1
- 239000002912 waste gas Substances 0.000 description 1
- 239000002699 waste material Substances 0.000 description 1
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 1
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Abstract
The utility model relates to a high-efficiency energy-saving screw vacuum pump, which comprises a pump body and a screw rotor arranged in the pump body, wherein the screw rotor comprises a driving screw and a driven screw which are meshed with each other, the front end of the pump body is connected with a front end cover, and the front ends of the driving screw and the driven screw respectively penetrate through the front end cover and are fixed on a front bearing seat; the rear end of the pump body is connected with a rear end cover, a gear box is arranged at the rear side of the rear end cover, the rear ends of a driving screw and a driven screw of the gear are meshed with a synchronous gear in the gear box, the rear end part of the driving screw is fixedly connected with a motor rotor of a permanent magnet variable frequency motor, and a motor stator of the permanent magnet variable frequency motor is arranged on an oil tank cover of the vacuum pump; the profile engagement profile of the screw rotor consists of an involute, a variation involute and an arc. The utility model relates to a high-efficiency energy-saving screw vacuum pump, which has smaller temperature rise, higher mechanical precision, higher air extraction efficiency and smaller energy consumption.
Description
Technical Field
The utility model relates to the technical field of vacuum pumps, in particular to a high-efficiency energy-saving screw vacuum pump.
Background
Screw vacuum pumps were first developed and produced by germany enterprises in the last eighty years of the last century, and were oil-free vacuum equipment developed along with the demands of high-precision products such as semiconductors, integrated circuits, nanoscale microprocessors and the like manufactured by the european and american enterprises for oil-free high vacuum equipment. The screw vacuum pump has the characteristics of high vacuum, stable air extraction performance, clean and oilless pump cavity, simple structure, no maintenance, no contact between air extraction elements, no friction, no waste gas, no waste liquid discharge and the like. Through thirty years of development, screw vacuum pumps are the most ideal vacuum pumping equipment in the field of mechanical vacuum pumps in the world at present.
With the rapid development of the domestic microelectronics industry, lithium batteries and solar energy industry in recent decades, the demand of the domestic market for screw vacuum pumps is very large, and imported screw vacuum pumps are very good development opportunities for domestic screw vacuum pumps because of the factors of high price, long delivery period, high maintenance cost and the like, however, the domestic common screw vacuum pumps have the problems of high temperature rise, low efficiency, poor reliability and the like.
The exhaust temperature of a common screw vacuum pump rises to more than 250 ℃, the high temperature is fatal to mechanical equipment, transmission parts such as lubricating oil, sealing parts, bearings and the like are difficult to bake at high temperature for a long time, and the high temperature has great influence on the precision of parts of the pump, so that the screw vacuum pump has frequent faults when in use. The key factor causing the rise of the exhaust temperature of the screw vacuum pump is the rotor molded line structure of the screw vacuum pump, the compression ratio between screw stages is unevenly distributed, and the too large compression ratio in the partial area of the screw is the main factor causing the rise of the exhaust temperature of the screw vacuum pump.
Therefore, a high-efficiency energy-saving screw vacuum pump with lower exhaust temperature rise, lower power consumption and higher reliability is needed at present.
Disclosure of Invention
The utility model aims to overcome the defects and provide the high-efficiency energy-saving screw vacuum pump with lower exhaust temperature rise, lower power consumption and higher reliability.
The purpose of the utility model is realized in the following way:
the utility model provides a high-efficient energy-saving screw vacuum pump, includes the pump body and sets up the screw rod rotor in the pump body inside, the screw rod rotor contains intermeshing's initiative screw rod and driven screw rod, and the front end of the pump body is connected with the front end housing, and the front end of initiative screw rod and driven screw rod respectively pass the front end housing is fixed in on the front bearing frame; the rear end of the pump body is connected with a rear end cover, a gear box is arranged at the rear side of the rear end cover, a synchronous gear is arranged in the gear box, the rear ends of a driving screw rod and a driven screw rod penetrate through the rear end cover and are meshed with the synchronous gear in the gear box, a permanent magnet variable frequency motor is arranged at the rear end of the gear box, the rear end part of the driving screw rod is fixedly connected with a motor rotor of the permanent magnet variable frequency motor, and a motor stator of the permanent magnet variable frequency motor is arranged on an oil tank cover of the vacuum pump; the driving screw and the driven screw are respectively composed of three sections of special-shaped spiral lines with different pitches, namely an air suction section, a compression section and an air discharge section, wherein the air suction section adopts two circles of larger pitches, the middle compression section adopts one circle of gradual change pitches, the air discharge section adopts a two-circle and half smaller pitch structure, one side of a spiral tooth angle is 90 degrees with the axis, and the other side of the spiral tooth angle is 75 degrees; the profile engagement profile of the screw rotor consists of an involute, a variation involute and an arc.
Preferably, a front bearing cover is arranged on the front bearing seat.
Preferably, a lip seal is arranged between the front end of the screw rotor and the pump body; and a mechanical seal is arranged between the rear end of the screw rotor and the pump body.
Preferably, the lip seal and the mechanical seal are both provided with inert gas purging ports, the inert gas purging ports of the lip seal are distributed in the front end cover, and the inert gas purging ports of the mechanical seal are distributed in the rear end cover.
Preferably, a shaft outlet end seal is arranged at the shaft outlet end of the driving screw connected with the motor rotor.
Preferably, a cooling water spacer is arranged between the front end cover and the rear end cover, and the cooling water spacer is positioned outside the pump body for one circle.
Preferably, a pair of synchronous gears in the gear box are respectively fixed at the shaft ends of the driving screw and the driven screw through a piston ring.
Preferably, the ratio of the inner diameter to the outer diameter of the driving screw to the ratio of the outer diameter of the driven screw are 1:2.5.
Preferably, the outer diameters of the driving screw and the driven screw are gradually reduced from the suction section to the exhaust section.
Preferably, the permanent magnet variable frequency motor is of a water-cooling structure; an exhaust port is formed in the bottom of the pump body, and an exhaust muffler is arranged on the exhaust port.
Compared with the prior art, the utility model has the beneficial effects that:
The profile of the profile engagement line of the screw rotor in the high-efficiency energy-saving screw vacuum pump is composed of an involute, a variation involute and an arc, the profile engagement line of the screw rotor from an air suction section to a compression section and then to an air discharge section is a smooth transition curved surface without dead angles and inflection points, the engagement gap between the two screw rotors is uniform, the processing is simple, the manufacturing cost is low, the processing of the high-precision screw rotor can be realized by a common vertical numerical control milling machine, and the manufacturing cost of the screw vacuum pump adopting the profile is lower than that of the traditional screw vacuum pump; by optimally designing the screw rotor molded lines, the interstage compression ratio of the screw vacuum pump can be uniformly distributed, and the phenomenon that the operation of the screw vacuum pump is over-compression of gas in a local area of the vacuum pump is avoided, so that the temperature rise of the screw vacuum pump can be reduced, and the power consumption of the screw vacuum pump can be reduced.
In the high-efficiency energy-saving screw vacuum pump, the rotor of the permanent magnet variable frequency motor is directly arranged at the shaft end of the driving screw of the pump, and the stator of the permanent magnet variable frequency motor is directly arranged on the oil tank cover of the screw vacuum pump, so that the parts such as a coupler and a motor connecting frame configured by the traditional screw vacuum pump are omitted, the volume of the vacuum pump can be greatly reduced, the transmission precision is improved, and the vibration of the vacuum pump during operation is reduced; the permanent magnet variable frequency motor adopts a water cooling mode, so that the volume of the motor is smaller than that of an air cooling structure, the motor efficiency is higher, the temperature rise is smaller, the reliability is better, the permanent magnet variable frequency motor is higher than that of a traditional excitation fixed frequency motor, the whole energy consumption of a screw vacuum pump integrally installed by adopting the permanent magnet variable frequency motor is reduced by about 30 percent compared with that of a traditional screw vacuum pump by adopting the improvement, the screw vacuum pump with the pumping capacity of 280 m/h is taken as an example, the power for matching the common motor is 7.5kw, and the power for matching the permanent magnet variable frequency motor is 5.5kw.
In the high-efficiency energy-saving screw vacuum pump, the driving screw and the driven screw are respectively composed of three sections of special-shaped spiral lines with different pitches, namely an air suction section, a compression section and an air discharge section, wherein the air suction section adopts two circles of larger pitches, the middle compression section adopts one circle of gradual change pitches, the air discharge section adopts a two-circle and half-circle smaller pitch structure, one side of a spiral tooth angle is 90 degrees with an axis, and the other side of the spiral tooth angle is 75 degrees.
4. In the high-efficiency energy-saving screw vacuum pump, the lip seal and the mechanical seal can prevent the mutual interference between the vacuum pump oil in the box body of the gear box and the pumped body in the vacuum pump, thereby reducing the loss of the vacuum pump oil and prolonging the service life of the screw vacuum pump; the lip seal and the mechanical seal are both provided with inert gas purging ports, the inert gas purging has the advantages of low cost, no pollution, good reliability and the like, the inert gas can not burn and explode under any condition, the inert gas can not pollute the atmosphere, lubricating oil in the gear box can be completely isolated from entering an air suction cavity of the vacuum pump by adopting the inert gas purging, the air-extracted body can be prevented from being polluted by the vacuum pump oil, and the air-extracted body can be prevented from polluting the vacuum pump oil; another benefit of inert gas purging is that the low temperature inert gas can be used to carry away the frictional heat generated by the seal member in the pump end cap, extending the life of the seal member.
Drawings
Fig. 1 is a schematic structural view of a high-efficiency energy-saving screw vacuum pump of the present utility model.
Fig. 2 is a front view of an efficient and energy-saving screw vacuum pump according to the present utility model.
Fig. 3 is a top view of an efficient and energy-saving screw vacuum pump of the present utility model.
Fig. 4 is a right side view of an efficient and energy-saving screw vacuum pump of the present utility model.
Fig. 5 is a schematic structural view of a screw rotor in a high-efficiency and energy-saving screw vacuum pump according to the present utility model.
Fig. 6 is a schematic diagram of the engagement of screw rotors in a high efficiency energy saving screw vacuum pump according to the present utility model.
Wherein: the pump body 1, the front end cover 2, the front bearing seat 3, the front bearing gland 4, the lip seal 5, the driven screw 6, the driving screw 7, the mechanical seal 8, the rear end cover 9, the gear box 10, the synchronous gear 11, the piston ring 12, the shaft outlet end seal 13, the motor rotor 14, the motor stator 15, the permanent magnet variable frequency motor 16, the exhaust muffler 17 and the cooling water spacer 18.
Detailed Description
Referring to fig. 1 to 6, the utility model relates to a high-efficiency energy-saving screw vacuum pump, which comprises a pump body 1 and a screw rotor arranged in the pump body 1, wherein the screw rotor comprises a driving screw 7 and a driven screw 6 which are meshed with each other, the front end of the pump body 1 is connected with a front end cover 2, and the front ends of the driving screw 7 and the driven screw 6 respectively penetrate through the front end cover 2 and are fixed on a front bearing seat 3; the rear end of the pump body 1 is connected with a rear end cover 9, a gear box 10 is arranged at the rear side of the rear end cover 9, a synchronous gear 11 is arranged in the gear box 10, the rear ends of a driving screw rod 7 and a driven screw rod 6 penetrate through the rear end cover 9 and are meshed with the synchronous gear 11 in the gear box 10, a permanent magnet variable frequency motor 16 is arranged at the rear end of the gear box 10, the rear end part of the driving screw rod 7 is fixedly connected with a motor rotor 14 of the permanent magnet variable frequency motor 16, and the motor rotor 14 is directly arranged at one end of the driving screw rod 7 of the screw rod vacuum pump, so that parts of the screw rod vacuum pump can be reduced, the mechanical precision of the pump is higher, the pumping efficiency of the pump is higher, and the energy consumption of the pump is smaller; the motor stator 15 of the permanent magnet variable frequency motor 16 is arranged on the oil tank cover of the vacuum pump, so that the volume of the vacuum pump can be greatly reduced, the transmission precision can be improved, and the vibration of the vacuum pump during operation can be reduced.
Further, a front bearing cover 4 is arranged on the front bearing seat 3; the front bearing gland 4 acts as a seal and anti-collision.
Further, a lip seal 5 is arranged between the front end of the screw rotor and the pump body 1; a mechanical seal 8 is arranged between the rear end of the screw rotor and the pump body 1; the lip seal 5 and the mechanical seal 8 can prevent the mutual interference between the vacuum pump oil in the box body of the gear box 10 and the pumped body in the vacuum pump, thereby reducing the loss of the vacuum pump oil and prolonging the service life of the screw vacuum pump.
Furthermore, inert gas purging ports are arranged on the lip seal 5 and the mechanical seal 8, the inert gas purging ports of the lip seal 5 are distributed in the front end cover 2, and the inert gas purging ports of the mechanical seal 8 are distributed in the rear end cover 9; the inert gas purging has the advantages of low cost, no pollution, good reliability and the like, the inert gas cannot burn or explode under any condition, and the inert gas cannot pollute the atmosphere. Therefore, the vacuum pump adopts inert gas to sweep, so that lubricating oil in the gear box 10 can be completely isolated from entering an air suction cavity of the vacuum pump, the air-extracted body can be prevented from being polluted by the vacuum pump oil, and meanwhile, the air-extracted body can be prevented from polluting the vacuum pump oil; another benefit of inert gas purging is that the low temperature inert gas can be used to carry away the frictional heat generated by the seal member in the pump end cap, extending the life of the seal member.
Further, a shaft outlet end seal 13 is arranged at the shaft outlet end of the driving screw 7 connected with the motor rotor 14.
Furthermore, a cooling water spacer 18 is arranged between the front end cover 2 and the rear end cover 9, the cooling water spacer 18 is positioned outside the pump body 1 for one circle, and the cooling water spacer 18 can cool the compression heat generated by the screw rotor due to compressed gas when the vacuum pump operates, so that the working temperature of the screw vacuum pump is greatly reduced, and the long-term reliable operation of the screw vacuum pump is ensured.
Further, a pair of synchronizing gears 11 in the gear case 10 are fixed to shaft ends of the driving screw 7 and the driven screw 6, respectively, through a piston ring 12.
Further, the ratio of the inner diameter to the outer diameter of the driving screw 7 to the ratio of the outer diameter of the driven screw 6 are 1:2.5.
Further, the driving screw 7 and the driven screw 6 are respectively composed of three sections of special-shaped spiral lines with different pitches, namely an air suction section, a compression section and an air discharge section, wherein the air suction section adopts two circles of larger pitches, the middle compression section adopts one circle of gradual change pitches, the air discharge section adopts a structure with two circles and a half smaller pitches, one side of a spiral tooth angle is 90 degrees with the axis, and the other side of the spiral tooth angle is 75 degrees; the design structure can reduce the maximum compression ratio between the screw vacuum pump stages, avoid the local overcompression of the screw vacuum pump, reduce the turbulent flow turbulence phenomenon of the gas between the screw vacuum pump stages, greatly reduce the temperature rise of the screw vacuum pump, further reduce the energy consumption of the screw vacuum pump, and effectively reduce the exhaust noise of the screw vacuum pump.
The outer diameters of the driving screw 7 and the driven screw 6 are gradually reduced from the suction section to the discharge section.
Further, as shown in fig. 5, the profile engagement profile of the screw rotor is composed of an involute, a variation involute and an arc, the profile engagement profile from the suction section to the compression section to the discharge section is a smooth transition curved surface without dead angle and inflection point, the engagement gap between the driving screw 7 and the driven screw 6 is uniform, the processing is simple, the manufacturing cost is low, the processing of the screw rotor with high precision can be realized by a common vertical numerical control milling machine, and the manufacturing cost of the screw vacuum pump adopting the profile is lower than that of the traditional screw vacuum pump.
Further, as shown in fig. 6, when the screw rotor rotates in the pump, a certain gap is kept between the meshing surfaces of the movable screw 7 and the driven screw 6, between the outer edge of the screw rotor and the inner cavity of the pump body, and between the exhaust end surface of the screw rotor and the plane of the rear end cover, and the screw rotor is not contacted with each other, so that the screw vacuum pump has small friction force and small friction power consumption during operation, can realize high-rotation-speed operation of the screw rotor, and is smoothly pressed to the exhaust port by the air pumping body and discharged outside the vacuum pump.
Further, the permanent magnet variable frequency motor 16 is of a water-cooling structure.
Further, an exhaust port is formed in the bottom of the pump body 1, and an exhaust muffler 17 is arranged on the exhaust port.
The utility model relates to a working principle of a high-efficiency energy-saving screw vacuum pump, which is as follows: the motor rotor 14 of the permanent magnet variable frequency motor 16 is arranged on the rear end shaft head of the driving screw 7, the motor rotor 14 directly transmits kinetic energy to the driven screw 6 through the synchronous gear 11, and the high vacuum is formed by the screw vacuum pump through the constant-speed reverse rotation of the driving screw 7 and the driven screw 6 in the pump cavity in the processes of air suction, compression and exhaust of the pump.
In addition: it should be noted that the above embodiment is only one of the optimization schemes of this patent, and any modification or improvement made by those skilled in the art according to the above concepts is within the scope of this patent.
Claims (10)
1. The utility model provides a high-efficient energy-conserving screw vacuum pump which characterized in that: the novel hydraulic pump comprises a pump body (1) and a screw rotor arranged in the pump body (1), wherein the screw rotor comprises a driving screw (7) and a driven screw (6) which are meshed with each other, the front end of the pump body (1) is connected with a front end cover (2), and the front ends of the driving screw (7) and the driven screw (6) respectively penetrate through the front end cover (2) to be fixed on a front bearing seat (3); the rear end of the pump body (1) is connected with a rear end cover (9), a gear box (10) is arranged at the rear side of the rear end cover (9), a synchronous gear (11) is arranged in the gear box (10), the rear ends of the driving screw (7) and the driven screw (6) penetrate through the rear end cover (9) and are meshed with the synchronous gear (11) in the gear box (10), a permanent magnet variable frequency motor (16) is arranged at the rear end of the gear box (10), the rear end part of the driving screw (7) is fixedly connected with a motor rotor (14) of the permanent magnet variable frequency motor (16), and a motor stator (15) of the permanent magnet variable frequency motor (16) is arranged on the oil tank cover of the vacuum pump; the driving screw (7) and the driven screw (6) are respectively composed of three sections of special-shaped spiral lines with different pitches, namely an air suction section, a compression section and an air discharge section, wherein the air suction section adopts two circles of larger pitches, the middle compression section adopts one circle of gradual change pitches, the air discharge section adopts a structure with two circles and a half smaller pitches, one side of a spiral tooth angle is 90 degrees with the axis, and the other side of the spiral tooth angle is 75 degrees; the profile engagement profile of the screw rotor consists of an involute, a variation involute and an arc.
2. The energy efficient screw vacuum pump of claim 1, wherein: a front bearing cover (4) is arranged on the front bearing seat (3).
3. The energy efficient screw vacuum pump of claim 1, wherein: a lip seal (5) is arranged between the front end of the screw rotor and the pump body (1); a mechanical seal (8) is arranged between the rear end of the screw rotor and the pump body (1).
4. A high efficiency energy saving screw vacuum pump as set forth in claim 3 wherein: the lip seal (5) and the mechanical seal (8) are both provided with inert gas purging ports, the inert gas purging ports of the lip seal (5) are distributed in the front end cover (2), and the inert gas purging ports of the mechanical seal (8) are distributed in the rear end cover (9).
5. The energy efficient screw vacuum pump of claim 1, wherein: the output shaft end of the driving screw (7) connected with the motor rotor (14) is provided with an output shaft end seal (13).
6. The energy efficient screw vacuum pump of claim 1, wherein: a cooling water spacer bush (18) is arranged between the front end cover (2) and the rear end cover (9), and the cooling water spacer bush (18) is positioned outside the pump body (1) for one circle.
7. The energy efficient screw vacuum pump of claim 1, wherein: a pair of synchronous gears (11) in the gear box (10) are respectively fixed at the shaft ends of the driving screw (7) and the driven screw (6) through a piston ring (12).
8. The energy efficient screw vacuum pump of claim 1, wherein: the ratio of the inner diameter to the outer diameter of the driving screw (7) to that of the driven screw (6) is 1:2.5.
9. The energy efficient screw vacuum pump of claim 1, wherein: the outer diameters of the driving screw rod (7) and the driven screw rod (6) are gradually reduced from the air suction section to the air discharge section.
10. The energy efficient screw vacuum pump of claim 1, wherein: the permanent magnet variable frequency motor (16) is of a water-cooling structure; an exhaust port is formed in the bottom of the pump body (1), and an exhaust muffler (17) is arranged on the exhaust port.
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
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CN202322442614.2U CN220956044U (en) | 2023-09-08 | 2023-09-08 | High-efficiency energy-saving screw vacuum pump |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
CN202322442614.2U CN220956044U (en) | 2023-09-08 | 2023-09-08 | High-efficiency energy-saving screw vacuum pump |
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Publication Number | Publication Date |
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CN220956044U true CN220956044U (en) | 2024-05-14 |
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ID=91004997
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Application Number | Title | Priority Date | Filing Date |
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CN202322442614.2U Active CN220956044U (en) | 2023-09-08 | 2023-09-08 | High-efficiency energy-saving screw vacuum pump |
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CN (1) | CN220956044U (en) |
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2023
- 2023-09-08 CN CN202322442614.2U patent/CN220956044U/en active Active
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