CN102278311A - Structure of rotor and shaft of multilevel dry type vacuum pump and application thereof - Google Patents

Structure of rotor and shaft of multilevel dry type vacuum pump and application thereof Download PDF

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Publication number
CN102278311A
CN102278311A CN2010101991319A CN201010199131A CN102278311A CN 102278311 A CN102278311 A CN 102278311A CN 2010101991319 A CN2010101991319 A CN 2010101991319A CN 201010199131 A CN201010199131 A CN 201010199131A CN 102278311 A CN102278311 A CN 102278311A
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China
Prior art keywords
rotor
rotors
type rotor
vacuum pump
special
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Pending
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CN2010101991319A
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Chinese (zh)
Inventor
张振厚
王光玉
孔祥玲
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Sky Technology Development Co Ltd
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Shenyang Scientific Instrument R&D Center of CAS
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Priority to CN2010101991319A priority Critical patent/CN102278311A/en
Publication of CN102278311A publication Critical patent/CN102278311A/en
Pending legal-status Critical Current

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Abstract

The invention discloses a structure of a rotor and a shaft of a multilevel dry type vacuum pump. The structure comprises a shaft, multi-leaf Roots rotors, and non-conventional type claw rotors. The structure which is formed by five-level rotors which are arranged in series is characterized in that: two multi-leaf Roots rotors are respectively thermal expansion assembled on a first level rotor and a fifth level rotor of the shaft, rotors from a second level to a fourth level on the shaft are non-conventional type claw rotors, and all the non-conventional type claw rotors have a same angle and a same position; and the structure which is used in pairs is arranged in the dry type vacuum pump, cases that a three-leaf Roots rotor is engaged with the three-leaf Roots rotor, and the non-conventional type claw rotor A is opposite to the non-conventional type claw rotor B are guaranteed, wherein one side of the non-conventional type claw rotor A is provided with an exhaust vent with a same level with the rotor A, and one side of the non-conventional type claw rotor B is provided with an air suction opening with a same level of the rotor B. The structure has the advantages that: the volume of the vacuum pump is reduced, the air passage design is simplified, and the air exhaust efficiency is improved because the three-leaf Roots rotors and the non-conventional type claw rotors are combined. The limit pressure of the multilevel dry type vacuum pump working in a mode of the combination of the rotors and the shaft is less than 3Pa.

Description

A kind of multi-stage dry vacuum pump rotor and axle construction and application
Technical field
The present invention relates to the vacuum equipment field, relate to a kind of multi-stage dry vacuum pump rotor and axle construction and application specifically.
Background technique
Dry vacuum pump is compared outstanding feature with common oil pump be to make not have oil in the swept volume, can reduce pollution like this as final products such as chip, medicine, foods, can reduce the consumption of oil, energy-conserving and environment-protective, and make the influence that is not subjected to water vapour or dust, particle in the vacuum chamber, strengthened the reliability of vacuum pump.Therefore dry vacuum pump has a extensive future.
Common multi-stage roots dry vacuum pump has used the multi-stage roots rotor inline, has obtained higher compression ratio, and power consumption is little relatively, but the gas circuit design is complicated, and the vacuum cavity volume is bigger.Common multistage claw shape dry type vacuum pump has used multistage claw-type rotor series connection, and the gas circuit simplicity of design can reduce the vacuum pump volume, but lower than Roots pump in rough vacuum lower pumping efficient.
A kind of multi-stage dry vacuum pump rotor and the axle construction and the application of the present invention's design combine three leaf roots rotors with special-shaped claw-type rotor, both reduced the volume of vacuum pump to a certain extent, simplify the gas circuit design, and improve pumping efficiency.Three leaf roots rotors can break up air-flow, reduce the gas percussion vibration, and improve rough vacuum lower pumping efficient.Special-shaped claw-type rotor makes and produces slide relative between rotor, drives gas flow.
Summary of the invention
The purpose of this invention is to provide a kind of multi-stage dry vacuum pump rotor and axle construction, comprise axle, leafy roots rotor, special-shaped claw-type rotor, described structure is 5 grades of rotor inlines, two leafy roots rotors heat expansion respectively are assemblied in spool last first order and a level V, and axle is that special-shaped claw-type rotor and each paralycus type rotor angular position are identical in the second level to fourth stage rotor.
Described leafy roots rotor is three leaf roots rotors.
Described special-shaped claw-type rotor is a monodactyle, is respectively the paralycus type rotor A and the scaled special-shaped claw-type rotor B of external frame of amplification, and is the alternately series connection of paralycus type rotor A, B, and the difference angle between every grade of special-shaped claw-type rotor is 0 degree.
The application process of structure of the present invention is: need to use in pairs, be installed in the dry vacuum pump, and guarantee that the rotor that is meshed is three leaf Roots and three leaf Roots, paralycus type rotor A is to special-shaped claw-type rotor B, wherein paralycus type rotor A side has the relief opening of this grade, and special-shaped claw-type rotor B side has the intakeport of this grade.
Advantage of the present invention is: three leaf roots rotors are combined with special-shaped claw-type rotor, reduced the volume of vacuum pump, simplify the gas circuit design, and improve pumping efficiency.Can make ultimate pressure with the multi-stage dry vacuum pump of this rotor and the work of axle stack mounting mode less than 3Pa.
Description of drawings
Fig. 1 is the structural drawing of multi-stage dry vacuum pump rotor and axle, and Fig. 2 is special-shaped claw-type rotor sectional view, and Fig. 3 is axle construction figure.
Wherein: 1, axle; 2, three leaf roots rotors; 3, paralycus type rotor A; 4, special-shaped claw-type rotor B; 5, bearing pin; 6, set screw; 7, rotor upper pin hole; 8, axle upper pin hole.
Embodiment
The present invention is the stack mounting mode of a kind of multi-stage dry vacuum pump rotor and axle, its structural drawing such as Fig. 1, Fig. 2, shown in Figure 3.Two three leaf roots rotors 3 heat expansion respectively are assemblied in the first order and level V on the axle 1, axle 1 has the identical threaded pin shaft hole 8 in position to fourth stage rotor installation place in the second level, special-shaped claw-type rotor also has pin shaft hole 7 in the side, and the blowing angle position of the pin shaft hole 7 of each special-shaped claw-type rotor is identical.By the connection of bearing pin 5, special-shaped claw-type rotor accurately is fixed on the axle 1, and locks with set screw.The sense of rotation that requires the adjacent paralycus type stage pawl on the same axis is oppositely, and is alternately series connection of paralycus type rotor A 3, special-shaped claw-type rotor B4.
Structure of the present invention needs to use in pairs, is installed in the dry vacuum pump, and guarantees that the rotor that is meshed is three leaf Roots and three leaf Roots, and paralycus type rotor A is to special-shaped claw-type rotor B.Wherein paralycus type rotor A side has the relief opening of this grade, and special-shaped claw-type rotor B side has the intakeport of this grade.

Claims (4)

1. the structure of a multi-stage dry vacuum pump rotor and axle, it is characterized in that: comprise axle, leafy roots rotor, special-shaped claw-type rotor, described structure is 5 grades of rotor inlines, two leafy roots rotors heat expansion respectively are assemblied in spool last first order and a level V, and axle is that special-shaped claw-type rotor and each paralycus type rotor angular position are identical in the second level to fourth stage rotor.
2. structure according to claim 1 is characterized in that: described leafy roots rotor is three leaf roots rotors.
3. structure according to claim 1 is characterized in that: described special-shaped claw-type rotor is a monodactyle, is respectively the special-shaped claw-type rotor B of paralycus type rotor A, and be alternately series connection of paralycus type rotor A, B, and the difference angle between every grade of special-shaped claw-type rotor is 0 to spend.
4. the application of the described structure of claim 1, it is characterized in that: needs use in pairs, be installed in the dry vacuum pump, and guarantee that the rotor that is meshed is three leaf Roots and three leaf Roots, paralycus type rotor A is to special-shaped claw-type rotor B, wherein paralycus type rotor A side has the relief opening of this grade, and special-shaped claw-type rotor B side has the intakeport of this grade.
CN2010101991319A 2010-06-12 2010-06-12 Structure of rotor and shaft of multilevel dry type vacuum pump and application thereof Pending CN102278311A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
CN2010101991319A CN102278311A (en) 2010-06-12 2010-06-12 Structure of rotor and shaft of multilevel dry type vacuum pump and application thereof

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
CN2010101991319A CN102278311A (en) 2010-06-12 2010-06-12 Structure of rotor and shaft of multilevel dry type vacuum pump and application thereof

Publications (1)

Publication Number Publication Date
CN102278311A true CN102278311A (en) 2011-12-14

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Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN111664091A (en) * 2020-06-18 2020-09-15 北京通嘉宏瑞科技有限公司 Integrated rotor and machining method thereof, pump body assembly and vacuum pump
CN111664092A (en) * 2020-06-18 2020-09-15 北京通嘉宏瑞科技有限公司 Machining method of stator main body, pump body assembly and assembling method thereof and vacuum pump
CN113417852A (en) * 2021-08-11 2021-09-21 四川莱斯特真空科技有限公司 Dry vacuum pump
CN116538089A (en) * 2023-06-08 2023-08-04 北京通嘉宏瑞科技有限公司 Rotor structure and vacuum pump

Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP0594461A1 (en) * 1992-10-22 1994-04-27 The BOC Group plc Vacuum pumps
JP2001082370A (en) * 1999-07-09 2001-03-27 Anlet Co Ltd Root type vacuum pump or root type blower
CN1862020A (en) * 2005-05-10 2006-11-15 北京朗禾科技有限公司 Paw type dry vacuum pump
CN201396281Y (en) * 2009-03-19 2010-02-03 孙成忠 Multistage three-blade Roots vacuum pump
CN201763609U (en) * 2010-06-12 2011-03-16 中国科学院沈阳科学仪器研制中心有限公司 Rotor and shaft structure of multi-stage dry vacuum pump

Patent Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP0594461A1 (en) * 1992-10-22 1994-04-27 The BOC Group plc Vacuum pumps
JP2001082370A (en) * 1999-07-09 2001-03-27 Anlet Co Ltd Root type vacuum pump or root type blower
CN1862020A (en) * 2005-05-10 2006-11-15 北京朗禾科技有限公司 Paw type dry vacuum pump
CN201396281Y (en) * 2009-03-19 2010-02-03 孙成忠 Multistage three-blade Roots vacuum pump
CN201763609U (en) * 2010-06-12 2011-03-16 中国科学院沈阳科学仪器研制中心有限公司 Rotor and shaft structure of multi-stage dry vacuum pump

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN111664091A (en) * 2020-06-18 2020-09-15 北京通嘉宏瑞科技有限公司 Integrated rotor and machining method thereof, pump body assembly and vacuum pump
CN111664092A (en) * 2020-06-18 2020-09-15 北京通嘉宏瑞科技有限公司 Machining method of stator main body, pump body assembly and assembling method thereof and vacuum pump
CN113417852A (en) * 2021-08-11 2021-09-21 四川莱斯特真空科技有限公司 Dry vacuum pump
CN116538089A (en) * 2023-06-08 2023-08-04 北京通嘉宏瑞科技有限公司 Rotor structure and vacuum pump

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Application publication date: 20111214