CN201763609U - Rotor and shaft structure of multi-stage dry vacuum pump - Google Patents

Rotor and shaft structure of multi-stage dry vacuum pump Download PDF

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Publication number
CN201763609U
CN201763609U CN2010202241955U CN201020224195U CN201763609U CN 201763609 U CN201763609 U CN 201763609U CN 2010202241955 U CN2010202241955 U CN 2010202241955U CN 201020224195 U CN201020224195 U CN 201020224195U CN 201763609 U CN201763609 U CN 201763609U
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CN
China
Prior art keywords
rotor
claw
stage
type
vacuum pump
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Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
CN2010202241955U
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Chinese (zh)
Inventor
张振厚
王光玉
孔祥玲
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Sky Technology Development Co Ltd
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Shenyang Scientific Instrument R&D Center of CAS
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Priority to CN2010202241955U priority Critical patent/CN201763609U/en
Application granted granted Critical
Publication of CN201763609U publication Critical patent/CN201763609U/en
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

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Abstract

The utility model discloses a rotor and shaft structure of a multi-stage dry vacuum pump, which comprises a shaft, multi-blade roots rotors and claw-type rotors. The structure is that 5 stages of rotors are connected in series, the two multi-blade roots rotors are respectively assembled at the first stage and the fifth stage on the shaft through thermal expansion, the second stage of rotor to the fourth stage of rotor of the shaft are the claw-type ones, and the angle positions of the claw-type rotors are the same; the structure needs to be used in pairs and is installed in the dry vacuum pump; and the following needs to be ensured: three-blade roots rotors are meshed with each other, and the claw-type rotor A is meshed with the claw-type rotor B, wherein an air exhaust port of the stage is arranged at the side of the claw-type rotor A, and an air suction port of the stage is arranged at the side of the claw-type rotor B. The rotor and shaft structure has the following advantages: the three-blade roots rotors and the claw-type rotors are combined to reduce the volume of the vacuum pump, simplify the design of an air circuit, and increase the air exhaust efficiency. Moreover, the ultimate pressure of the multi-stage dry vacuum pump which adopts the rotor and shaft combined installation method to work is lower than 3Pa.

Description

A kind of multi-stage dry vacuum pump rotor and axle construction
Technical field
The utility model relates to the vacuum equipment field, relates to a kind of multi-stage dry vacuum pump rotor and axle construction and application specifically.
Background technique
Dry vacuum pump is compared outstanding feature with common oil pump be to make not have oil in the swept volume, can reduce pollution like this as final products such as chip, medicine, foods, can reduce the consumption of oil, energy-conserving and environment-protective, and make the influence that is not subjected to water vapour or dust, particle in the vacuum chamber, strengthened the reliability of vacuum pump.Therefore dry vacuum pump has a extensive future.
Common multi-stage roots dry vacuum pump has used the multi-stage roots rotor inline, has obtained higher compression ratio, and power consumption is little relatively, but the gas circuit design is complicated, and the vacuum cavity volume is bigger.Common multistage claw shape dry type vacuum pump has used multistage claw-type rotor series connection, and the gas circuit simplicity of design can reduce the vacuum pump volume, but lower than Roots pump in rough vacuum lower pumping efficient.
A kind of multi-stage dry vacuum pump rotor and the axle construction and the application of the utility model design combine three leaf roots rotors with claw-type rotor, both reduced the volume of vacuum pump to a certain extent, simplify the gas circuit design, and improve pumping efficiency.Three leaf roots rotors can break up air-flow, reduce the gas percussion vibration, and improve rough vacuum lower pumping efficient.Claw-type rotor makes and produces slide relative between rotor, drives gas flow.
The model utility content
The purpose of this utility model provides a kind of multi-stage dry vacuum pump rotor and axle construction, comprise axle, leafy roots rotor, claw-type rotor, described structure is 5 grades of rotor inlines, two leafy roots rotors heat expansion respectively are assemblied in spool last first order and a level V, and axle is that claw-type rotor and each claw-type rotor angular orientation are identical in the second level to fourth stage rotor.
Described leafy roots rotor is three leaf roots rotors.
Described claw-type rotor is a monodactyle, is respectively the claw-type rotor A and the scaled claw-type rotor B of external frame of amplification, and is alternately series connection of claw-type rotor A, B, and the difference angle between every grade of claw-type rotor is 0 degree.
The application process of structure described in the utility model is: need to use in pairs, be installed in the dry vacuum pump, and guarantee that the rotor that is meshed is three leaf Roots and three leaf Roots, claw-type rotor A is to claw-type rotor B, wherein claw-type rotor A side has the relief opening of this grade, and claw-type rotor B side has the intakeport of this grade.
The utility model has the advantages that: three leaf roots rotors are combined with claw-type rotor, reduced the volume of vacuum pump, simplify the gas circuit design, and improve pumping efficiency.Can make ultimate pressure with the multi-stage dry vacuum pump of this rotor and the work of axle stack mounting mode less than 3Pa.
Description of drawings
Fig. 1 is the structural drawing of multi-stage dry vacuum pump rotor and axle, and Fig. 2 is the claw-type rotor sectional view, and Fig. 3 is axle construction figure.
Wherein: 1, axle; 2, three leaf roots rotors; 3, claw-type rotor A; 4, claw-type rotor B; 5, bearing pin; 6, set screw; 7, rotor upper pin hole; 8, axle upper pin hole.
Embodiment
The utility model is the stack mounting mode of a kind of multi-stage dry vacuum pump rotor and axle, its structural drawing such as Fig. 1, Fig. 2, shown in Figure 3.Two three leaf roots rotors 2 heat expansion respectively are assemblied in the first order and level V on the axle 1, axle 1 has threaded identical upper pin hole 8 of position to fourth stage rotor installation place in the second level, claw-type rotor also has rotor upper pin hole 7 in the side, and the blowing angle position in the rotor upper pin hole 7 of each claw-type rotor is identical.By the connection of bearing pin 5, claw-type rotor accurately is fixed on the axle 1, and locks with set screw.The sense of rotation that requires the adjacent claw-type rotor level pawl on the same axis is oppositely, and is alternately series connection of claw-type rotor A3, claw-type rotor B4.
Structure of the present utility model needs to use in pairs, is installed in the dry vacuum pump, and guarantees that the rotor that is meshed is three leaf Roots and three leaf Roots, and claw-type rotor A is to claw-type rotor B.Wherein claw-type rotor A side has the relief opening of this grade, and claw-type rotor B side has the intakeport of this grade.

Claims (3)

1. multi-stage dry vacuum pump rotor and axle construction, it is characterized in that: comprise axle, leafy roots rotor, claw-type rotor, described structure is 5 grades of rotor inlines, two leafy roots rotors heat expansion respectively are assemblied in spool last first order and a level V, and axle is that claw-type rotor and each claw-type rotor angular orientation are identical in the second level to fourth stage rotor.
2. structure according to claim 1 is characterized in that: described leafy roots rotor is three leaf roots rotors.
3. structure according to claim 1 is characterized in that: described claw-type rotor is a monodactyle, is respectively claw-type rotor A claw-type rotor B, and is alternately series connection of claw-type rotor A, B, and the difference angle between every grade of claw-type rotor is 0 degree.
CN2010202241955U 2010-06-12 2010-06-12 Rotor and shaft structure of multi-stage dry vacuum pump Expired - Fee Related CN201763609U (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
CN2010202241955U CN201763609U (en) 2010-06-12 2010-06-12 Rotor and shaft structure of multi-stage dry vacuum pump

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
CN2010202241955U CN201763609U (en) 2010-06-12 2010-06-12 Rotor and shaft structure of multi-stage dry vacuum pump

Publications (1)

Publication Number Publication Date
CN201763609U true CN201763609U (en) 2011-03-16

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Family Applications (1)

Application Number Title Priority Date Filing Date
CN2010202241955U Expired - Fee Related CN201763609U (en) 2010-06-12 2010-06-12 Rotor and shaft structure of multi-stage dry vacuum pump

Country Status (1)

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CN (1) CN201763609U (en)

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN102278311A (en) * 2010-06-12 2011-12-14 中国科学院沈阳科学仪器研制中心有限公司 Structure of rotor and shaft of multilevel dry type vacuum pump and application thereof
CN102913450A (en) * 2012-08-04 2013-02-06 无锡宜友机电制造有限公司 Novel two-end rotor of single-stage roots blower
CN103062056A (en) * 2012-12-29 2013-04-24 中国科学院沈阳科学仪器股份有限公司 Screw rod type dry vacuum pump with combined screw rod rotor
CN110199124A (en) * 2017-01-20 2019-09-03 爱德华兹有限公司 Multi-stage vacuum is pressurized pump rotor

Cited By (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN102278311A (en) * 2010-06-12 2011-12-14 中国科学院沈阳科学仪器研制中心有限公司 Structure of rotor and shaft of multilevel dry type vacuum pump and application thereof
CN102913450A (en) * 2012-08-04 2013-02-06 无锡宜友机电制造有限公司 Novel two-end rotor of single-stage roots blower
CN102913450B (en) * 2012-08-04 2016-04-06 无锡宜友机电制造有限公司 2 segmentation roots blower rotor structures
CN103062056A (en) * 2012-12-29 2013-04-24 中国科学院沈阳科学仪器股份有限公司 Screw rod type dry vacuum pump with combined screw rod rotor
WO2014101371A1 (en) * 2012-12-29 2014-07-03 中国科学院沈阳科学仪器股份有限公司 Screw-type dry vacuum pump with combined screw rotor
CN103062056B (en) * 2012-12-29 2015-03-18 中国科学院沈阳科学仪器股份有限公司 Screw rod type dry vacuum pump with combined screw rod rotor
CN110199124A (en) * 2017-01-20 2019-09-03 爱德华兹有限公司 Multi-stage vacuum is pressurized pump rotor
CN110199124B (en) * 2017-01-20 2021-11-19 爱德华兹有限公司 Rotor for a multistage roots-type vacuum pump
US11248607B2 (en) 2017-01-20 2022-02-15 Edwards Limited Multi-stage vacuum booster pump rotor

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C14 Grant of patent or utility model
GR01 Patent grant
CF01 Termination of patent right due to non-payment of annual fee

Granted publication date: 20110316

Termination date: 20150612

EXPY Termination of patent right or utility model