CN111610584A - Modified layer based on aluminum alloy matrix reflector and processing method thereof - Google Patents

Modified layer based on aluminum alloy matrix reflector and processing method thereof Download PDF

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Publication number
CN111610584A
CN111610584A CN202010447716.1A CN202010447716A CN111610584A CN 111610584 A CN111610584 A CN 111610584A CN 202010447716 A CN202010447716 A CN 202010447716A CN 111610584 A CN111610584 A CN 111610584A
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China
Prior art keywords
modified layer
layer
aluminum alloy
substrate
reflecting surface
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CN202010447716.1A
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Inventor
谭淞年
许永森
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Changchun Institute of Optics Fine Mechanics and Physics of CAS
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Changchun Institute of Optics Fine Mechanics and Physics of CAS
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Priority to CN202010447716.1A priority Critical patent/CN111610584A/en
Publication of CN111610584A publication Critical patent/CN111610584A/en
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    • GPHYSICS
    • G02OPTICS
    • G02BOPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B5/00Optical elements other than lenses
    • G02B5/08Mirrors
    • G02B5/0808Mirrors having a single reflecting layer
    • GPHYSICS
    • G02OPTICS
    • G02BOPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B1/00Optical elements characterised by the material of which they are made; Optical coatings for optical elements
    • G02B1/10Optical coatings produced by application to, or surface treatment of, optical elements

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  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Physical Vapour Deposition (AREA)
  • Optical Elements Other Than Lenses (AREA)

Abstract

The invention discloses a modified layer based on an aluminum alloy matrix reflector, which comprises a modified layer arranged on a reflecting surface of an aluminum alloy matrix, wherein the modified layer comprises a surface modified layer made of pure aluminum. The modifying layer further comprises a transition layer for increasing the viscosity between the substrate and the surface modifying layer. The defects of the surface of the metal reflector substrate manufactured by the additive manufacturing process due to the laser forming process can be compensated by arranging the modified layer. High surface shape accuracy and high roughness can be obtained by performing optical secondary processing on the surface of the modified layer. The aluminum alloy matrix is matched with the pure aluminum modified layer, so that the thermal expansion coefficient matching of the modified layer and the matrix can be realized, and the high-temperature and low-temperature environment adaptability is good. The surface modification layer of pure aluminum resists high and low temperature, so that the metal reflector taking the aluminum alloy material as the matrix has wider application range.

Description

Modified layer based on aluminum alloy matrix reflector and processing method thereof
Technical Field
The invention relates to the field of reflectors, in particular to a modified layer of an aluminum alloy reflector.
Background
The reflecting mirror is an optical element commonly used in the optical field, but the reflecting mirror is required to meet the requirement of rigidity and simultaneously meet a lightweight structure in many scenes, and the metal reflecting mirror is difficult to achieve. However, the aluminum alloy reflector is unique in the metal reflector, and the aluminum alloy can satisfy the requirements of light weight and high rigidity at the same time, but as the reflector, the aluminum alloy reflector has insufficient density due to the preparation process, and generally needs to be plated with a modified layer on the surface to enhance the surface density and the reflection capability.
In the prior art, only nickel phosphorus or single crystal Si and other similar materials can be used as the modified layer material, but in the occasions with severe environment temperature changes such as aviation and the like, because the thermal expansion coefficients of the modified layer and the reflector substrate are not matched, when the environment temperature changes, the reflector surface shape changes, the forming quality of an optical system is reduced, and even if the reflector is applied in a laboratory environment, the temperature setting is required, so that the metal reflector made of an aluminum alloy material cannot be widely used.
Disclosure of Invention
The invention aims to solve at least one technical problem in the prior art, and provides a modified layer based on an aluminum alloy matrix reflector, which realizes wide application of the aluminum alloy reflector by plating a surface modified layer made of pure aluminum on an aluminum alloy matrix.
The invention is realized by the following technical scheme:
the utility model provides a modified layer based on aluminum alloy base body speculum, is including setting up the modified layer on aluminum alloy base body plane of reflection, the modified layer includes the surface modification layer of pure aluminium material.
Preferably, the modifying layer further comprises a transition layer for increasing the bonding strength between the substrate and the surface modifying layer.
Preferably, the substrate is prepared by an additive manufacturing process.
Preferably, the base material is AlSi10Mg。
Preferably, the reflecting surface is a plane, and the thickness of the surface modification layer is 30 μm to 40 μm.
Preferably, the reflecting surface is a curved surface, and the thickness of the surface modification layer is 30 μm to 100 μm.
Preferably, the thickness of the transition layer is 5 nm-30 nm, and the material of the transition layer is Al2O3
Preferably, the transition layer is made of nickel.
The processing method of the modified layer is characterized by comprising the following steps:
firstly, carrying out surface roughness treatment on the surface of the reflecting surface to enable the roughness of the reflecting surface to be better than 10 nm;
cleaning the reflecting surface before film coating;
step three, coating strippable protective glue for protecting the non-modified area on the non-modified area of the reflecting surface;
fixing the substrate on a workpiece clamp of a vacuum coating machine, placing pure aluminum particles in a boron nitride crucible, and starting baking equipment after the vacuum coating machine extracts certain vacuum;
fifthly, evaporating pure aluminum through electron beams and performing ion source Ar-filled auxiliary deposition to realize surface modification layer coating on the reflecting surface of the substrate;
putting the substrate in a treatment furnace for heat treatment to eliminate the internal stress of the surface modification layer and improve the binding force between the surface modification layer and the reflecting surface of the substrate;
and seventhly, carrying out optical processing on the reflecting surface to reduce the roughness.
Preferably, the surface roughness treatment of the reflecting surface is diamond single-point turning; cleaning the reflecting surface before coating the film comprises cleaning the surface of the matrix, ultrasonically cleaning by alcohol, cleaning by pure water and drying by a drying oven.
Preferably, the stripping protective glue is chemical milling strippable glue, and the vacuum coating machine is vacuumized to 4 × 10-4Pa; the evaporation temperature of the electron beam to pure aluminum is adjusted to 1000-1800 ℃; the time of the auxiliary deposition is set to be 10 hours; the temperature of the heat treatment is 120-150 ℃, and the constant temperature is kept for 2-8 hours.
Has the advantages that: the defects of the surface of the metal reflector substrate manufactured by the additive manufacturing process due to the laser forming process can be compensated by arranging the modified layer. High surface shape accuracy and high roughness can be obtained by performing optical secondary processing on the surface of the modified layer. The aluminum alloy matrix is matched with the pure aluminum modified layer, so that the thermal expansion coefficient matching of the modified layer and the matrix can be realized, and the high-temperature and low-temperature environment adaptability is good. The surface modification layer of pure aluminum resists high and low temperature, so that the metal reflector taking the aluminum alloy material as the matrix has wider application range.
Detailed Description
The described embodiments are only some embodiments of the invention, not all embodiments. All other embodiments, which can be derived by a person skilled in the art from the embodiments given herein without making any creative effort, shall fall within the protection scope of the present invention.
The utility model provides a modified layer based on aluminum alloy base body speculum, is including setting up the modified layer on aluminum alloy base body plane of reflection, the modified layer includes the surface modification layer of pure aluminium material. The pure aluminum material is aluminum with the purity of 99.99 percent. The modifying layer further comprises a transition layer for increasing the viscosity between the substrate and the surface modifying layer. If the adhesion between the surface modification layer and the substrate is insufficient, a transition layer can be plated between the surface modification layer and the substrate, namely, the transition layer is plated on the substrate firstly, and the transition layer is plated in the same way as the method of the modification layer by the ion beam deposition method, and then the surface modification layer is plated on the transition layer. The processing of base member wherein is through the mode of vibration material disk, vibration material disk be 3D printing technology, through 3D print the base member, can set up lightweight structure in the base member inside, this structure can be triangle-shaped honeycomb cavity structures, through setting up the cavity of triangular prism form and with its intensive distribution to the base member inside, set up the through-hole on the facade of cavity, the through-hole is put through with the row's powder hole on the base member side through the cavity, after establishing the three-dimensional model of base member, the powder in the accessible cavity, through-hole and row's powder hole is discharged. So that the substrate satisfies both lightweight and high rigidity.
The aluminum alloy substrate is AlSi10Mg, but AlSi may be used12And the like. The difference between the thermal expansion coefficient of the metal material of the aluminum alloy and the thermal expansion coefficient of pure aluminum is not large.
When the reflecting surface of the substrate is a plane, the thickness of the surface modification layer is 30-40 μm. When the reflecting surface of the substrate is a curved surface, the thickness of the surface modification layer is 30-100 μm.
In the design of the transition layer, the thickness of the transition layer is 5 nm-30 nm, and the material of the transition layer is Al2O3
A processing method for the modified layer comprises the following steps:
firstly, carrying out surface roughness treatment on the surface of the reflecting surface to enable the roughness of the reflecting surface to be better than 10 nm;
cleaning the reflecting surface before film coating; the surface of the substrate is cleaned to remove oil stains on the surface, residual processing residues in the previous process, and the like, so that the clean substrate is exposed. Ultrasonic cleaning with alcohol, cleaning with pure water, and drying with drying oven.
Coating a strippable protective adhesive on the non-modified area of the reflecting surface to protect the non-modified area of the reflecting surface; the strippable protective glue can be strippable protective glue such as chemical milling strippable glue.
Fixing the substrate on a workpiece fixture of a vacuum coating machine, placing pure aluminum particles in a boron nitride crucible, and vacuumizing the vacuum chamber of the vacuum coating machine to 4 × 10-4Pa, and opening the baking device.
Evaporating pure aluminum by electron beams, adjusting the evaporation temperature to 1000-1800 ℃, and then coating a surface modification layer on a reflecting surface of a substrate by ion source Ar-filled auxiliary deposition; the deposition time was 10 hours and the deposition thickness was 40 microns thick.
And sixthly, placing the substrate in a treatment furnace for heat treatment, wherein the temperature of the heat treatment is controlled to be 120-150 ℃, and keeping the temperature for 2-8 hours, so as to eliminate the internal stress of the pure Al modified layer and improve the binding force between the pure Al modified layer and the mirror blank.
And seventhly, carrying out optical processing on the reflecting surface to reduce the roughness. The obtained modified layer has dense film and strong adhesion with the substrate, for example, 7.244nm before modification is reduced to 1.632 nm.
The above embodiments are not limited to the technical solutions of the embodiments themselves, and the embodiments may be combined with each other into a new embodiment. The above embodiments are only for illustrating the technical solutions of the present invention and are not limited thereto, and any modification or equivalent replacement without departing from the spirit and scope of the present invention should be covered within the technical solutions of the present invention.

Claims (10)

1. The modified layer based on the aluminum alloy matrix reflector is characterized by comprising a modified layer arranged on the reflecting surface of an aluminum alloy matrix, wherein the modified layer comprises a surface modified layer made of pure aluminum.
2. The aluminum alloy substrate mirror-based modification layer as claimed in claim 1, wherein the substrate is processed by additive manufacturing.
3. The aluminum alloy substrate mirror-based modification layer as claimed in claim 1, further comprising a transition layer for increasing the bonding strength between the substrate and the surface modification layer.
4. The modified layer based on aluminum alloy substrate reflector according to claim 1, wherein the substrate material is AlSi10Mg。
5. The modified layer based on an aluminum alloy substrate reflector according to claim 1, wherein the reflection surface is a plane, and the thickness of the surface modified layer is 30 μm to 40 μm.
6. The modified layer based on an aluminum alloy substrate reflector according to claim 1, wherein the reflecting surface is a curved surface, and the thickness of the surface modified layer is 30 μm to 100 μm.
7. The modified layer based on aluminum alloy matrix reflector according to claim 3, wherein the thickness of the transition layer is 5nm to 30nm, and the material of the transition layer is Al2O3
8. A method of processing a modified layer according to claims 1-7, comprising the steps of:
firstly, carrying out surface roughness treatment on the surface of the reflecting surface to enable the roughness of the reflecting surface to be better than 10 nm;
cleaning the reflecting surface before film coating;
step three, coating strippable protective glue for protecting the non-modified area on the non-modified area of the reflecting surface;
fixing the substrate on a workpiece clamp of a vacuum coating machine, placing pure aluminum particles in a boron nitride crucible, and starting baking equipment after the vacuum coating machine extracts certain vacuum;
fifthly, evaporating pure aluminum through electron beams and performing ion source Ar-filled auxiliary deposition to realize surface modification layer coating on the reflecting surface of the substrate;
putting the substrate in a treatment furnace for heat treatment to eliminate the internal stress of the surface modification layer and improve the binding force between the surface modification layer and the reflecting surface of the substrate;
and seventhly, carrying out optical processing on the reflecting surface to reduce the roughness.
9. The method of processing a modified layer according to claim 8, wherein the surface roughness treatment of the reflecting surface is diamond single point turning; cleaning the reflecting surface before coating the film comprises cleaning the surface of the matrix, ultrasonically cleaning by alcohol, cleaning by pure water and drying by a drying oven.
10. The method of claim 8, wherein the release-protecting paste is a chemically strippable paste, and the vacuum coater is vacuumized to 4 × 10%-4Pa; the evaporation temperature of the electron beam to pure aluminum is adjusted to 1000-1800 ℃; the time of the auxiliary deposition is set to be 10 hours; the temperature of the heat treatment is 120-150 ℃, and the constant temperature is kept for 2-8 hours.
CN202010447716.1A 2020-05-25 2020-05-25 Modified layer based on aluminum alloy matrix reflector and processing method thereof Pending CN111610584A (en)

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Citations (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5525199A (en) * 1991-11-13 1996-06-11 Optical Corporation Of America Low pressure reactive magnetron sputtering apparatus and method
CN1580833A (en) * 2004-05-20 2005-02-16 中国科学院上海技术物理研究所 Light heavy-caliber metal mirror
CN103713340A (en) * 2012-10-09 2014-04-09 森钜科技材料股份有限公司 Weather-resistant high reflection plate and manufacturing method thereof
CN105143930A (en) * 2013-02-28 2015-12-09 康宁股份有限公司 Enhanced, durable silver coating stacks for highly reflective mirrors
US20160097885A1 (en) * 2014-10-03 2016-04-07 Corning Incorporated Mirror substrates with highly finishable corrosion-resistant coating
CN106405785A (en) * 2016-09-30 2017-02-15 北京空间机电研究所 Thermal deformation-designable load-carrying structure for large-aperture reflector assembly
CN106460146A (en) * 2014-04-14 2017-02-22 康宁股份有限公司 Enhanced performance metallic based optical mirror substrates
CN110777370A (en) * 2019-10-23 2020-02-11 长春奥普光电技术股份有限公司 Modification treatment method for surface of space material reflector blank

Patent Citations (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5525199A (en) * 1991-11-13 1996-06-11 Optical Corporation Of America Low pressure reactive magnetron sputtering apparatus and method
CN1580833A (en) * 2004-05-20 2005-02-16 中国科学院上海技术物理研究所 Light heavy-caliber metal mirror
CN103713340A (en) * 2012-10-09 2014-04-09 森钜科技材料股份有限公司 Weather-resistant high reflection plate and manufacturing method thereof
CN105143930A (en) * 2013-02-28 2015-12-09 康宁股份有限公司 Enhanced, durable silver coating stacks for highly reflective mirrors
CN106460146A (en) * 2014-04-14 2017-02-22 康宁股份有限公司 Enhanced performance metallic based optical mirror substrates
US20160097885A1 (en) * 2014-10-03 2016-04-07 Corning Incorporated Mirror substrates with highly finishable corrosion-resistant coating
CN106405785A (en) * 2016-09-30 2017-02-15 北京空间机电研究所 Thermal deformation-designable load-carrying structure for large-aperture reflector assembly
CN110777370A (en) * 2019-10-23 2020-02-11 长春奥普光电技术股份有限公司 Modification treatment method for surface of space material reflector blank

Non-Patent Citations (1)

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Title
谭淞年 等: ""增材制造金属反射镜的发展综述"", 《中国光学》 *

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