CN111595513A - Calibration device of ultra-high temperature pressure sensor - Google Patents
Calibration device of ultra-high temperature pressure sensor Download PDFInfo
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- CN111595513A CN111595513A CN202010451263.XA CN202010451263A CN111595513A CN 111595513 A CN111595513 A CN 111595513A CN 202010451263 A CN202010451263 A CN 202010451263A CN 111595513 A CN111595513 A CN 111595513A
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
- G01L27/00—Testing or calibrating of apparatus for measuring fluid pressure
- G01L27/002—Calibrating, i.e. establishing true relation between transducer output value and value to be measured, zeroing, linearising or span error determination
- G01L27/005—Apparatus for calibrating pressure sensors
Abstract
A calibration device of an ultra-high temperature pressure sensor comprises an ultra-high temperature control device, a high temperature resistant pressure-bearing pipe, a pressure controller, a mechanical pump, a nitrogen cylinder, a sensor tool, a heat dissipation tool, an acquisition system and a temperature measuring part; in the aspect of air pressure sealing control, the pressure sensor to be measured and the pressure controller are communicated, namely, the pressure value displayed by the pressure controller is the pressure value of the pressure sensor to be measured. In the aspect of temperature control, the high-temperature resistant pressure-bearing pipe penetrates through two ends of the ultrahigh-temperature control equipment with multiple temperature zones and sectional heating, and a stable high-temperature calibration environment is provided; in addition, a temperature measuring part is arranged to detect the temperature of the pressure sensor to be measured in real time, and the pressure measurement error caused by the temperature is reduced. The calibration method solves the calibration difficulty of the ultra-high temperature pressure sensor not lower than 1000 ℃, can directly calibrate the whole ultra-high temperature pressure sensor, and has simple device and easy realization.
Description
Technical Field
The invention relates to a calibration device of an ultrahigh-temperature pressure sensor, belonging to the field of calibration of pressure sensors.
Background
The ultra-high temperature pressure sensor is used for measuring pressure parameters in ultra-high temperature severe environments, belongs to a special pressure sensor, and plays an important role in ultra-high temperature extreme environments such as aerospace and industrial production.
Calibration of a pressure sensor is accomplished by some method to obtain a relationship between the output of the sensor and the pressure input. Since the output of the pressure sensor changes with the temperature change of the measured medium, namely zero temperature drift and sensitivity temperature drift, which are also main factors causing pressure measurement errors, the relationship between the output of the pressure sensor and the temperature change of the measured medium must be measured during pressure calibration. Similarly, calibration of the ultra-high temperature pressure sensor is to obtain the relationship between the output of the sensor and the pressure input and the ultra-high temperature input by a certain method.
The calibration device of the pressure sensor comprises three parts: temperature control, pressure control, sealing connection. The conventional pressure sensor calibration device includes: the high-low temperature box realizes temperature control; the pressure controller realizes pressure control; the rubber ring, the sealant and the like realize the sealing connection of the sensor and the metal pipe and the pressure controller. The calibration device of the conventional pressure sensor is not suitable for calibration of the ultra-high temperature pressure sensor, and on one hand, the high-low temperature box cannot provide constant ultra-high temperature up to 1000 ℃; on the other hand, the rubber ring and the sealant for sealing connection lose the sealing performance due to ultrahigh temperature, so that the test fails.
The Beijing university, Kun shan Lai Honghingzhicheng sensing technology, Inc. applied for a high temperature pressure sensor measuring device (application No. 201510023317.1) and a high temperature pressure sensor testing device and a preparation method thereof (application No. 201510481360.2) respectively in 2015. Both of these patents propose to place the test tube or the high temperature resistant pressure-bearing sleeve in the electric furnace or the high temperature box, place the sealed end in room temperature, adopt traditional rubber circle or metal cutting ferrule sealing material to realize the airtight of device, solved high temperature airtight problem. The calibration device of the Kunshantai Lai Honghingtechnology Limited company does not consider the temperature control problem which is critical during calibration; beijing university proposes that a thermal resistor is arranged near a pressure sensor to be measured to ensure the temperature stability of the sensor during calibration, however, the device adopts high-temperature signal lead for switching, so that the reliability is reduced on one hand, and the device is not suitable for the calibration of the whole sensor with a cable and a printed board on the other hand; and the sealing element at the room temperature can be caused to lose efficacy due to the temperature rise along with the high-temperature heat transfer in the electric furnace during calibration, so that the method is not suitable for calibrating the pressure at the ultrahigh temperature for a long time.
Disclosure of Invention
The invention aims to overcome the defects of the existing calibration device, and provides the calibration device of the ultra-high temperature pressure sensor, which can provide a constant-temperature, sealed and reliable calibration test environment of not less than 1000 ℃ for the high temperature pressure sensor.
The purpose of the invention is realized by the following technical scheme: a calibration device of an ultra-high temperature pressure sensor comprises an ultra-high temperature control device, a high temperature resistant pressure-bearing pipe, a pressure controller, a mechanical pump, a nitrogen cylinder, a sensor tool, a heat dissipation tool, an acquisition system and a temperature measuring part;
one end of the high-temperature-resistant pressure-bearing pipe penetrates out of the end part of the ultrahigh-temperature control equipment and is connected with the pressure controller; the other end of the high-temperature-resistant pressure-bearing pipe is connected with a sensor tool, and the sensor tool is positioned in the ultra-high temperature control equipment; the ultrahigh temperature control equipment controls the temperature of the high temperature resistant pressure-bearing pipe to realize heating of gas in the high temperature resistant pressure-bearing pipe and constant temperature control; the pressure sensor to be detected is fixed in the ultra-high temperature control equipment by the sensor tool and is communicated with the pressure controller through the high temperature resistant pressure-bearing pipe; one end of the pressure sensor to be measured is a sensitive element end and is positioned outside the heat dissipation tool, and the other end of the pressure sensor to be measured is a cable lead end and is inserted into the heat dissipation tool and connected with the acquisition system; the temperature measuring end of the temperature measuring part is flush with the position of a sensitive element of the pressure sensor to be measured, and the acquisition system acquires the temperature value output by the temperature measuring part and the output values of the pressure sensor to be measured at different temperatures; the pressure controller is respectively connected with the mechanical pump and the nitrogen cylinder, and the nitrogen cylinder provides nitrogen for the high-temperature-resistant pressure-bearing pipe.
The two ends of the ultra-high temperature control equipment are opened, the ultra-high temperature control equipment is provided with three temperature zones or more, the temperature can be provided by the equipment for sectional heating and sectional temperature control, the temperature is not lower than 1000 ℃, and the two ends of the ultra-high temperature control equipment are respectively insulated by asbestos.
One end of the high-temperature-resistant pressure-bearing pipe is connected with the pressure controller in a sealing mode through a metal clamping sleeve, and the other end of the high-temperature-resistant pressure-bearing pipe is connected with the sensor tool in a sealing mode through welding.
The pressure sensor to be measured is hermetically connected with the sensor tool through the ball head conical surface.
The wall thickness of the high-temperature-resistant pressure-bearing pipe is in direct proportion to the measuring range of the pressure sensor to be measured.
A thermal resistor or a thermocouple is integrated on the pressure sensor to be measured to form a temperature measuring part.
The heat dissipation tool is in a water-cooling heat dissipation mode, a circulating water pipeline is arranged inside the heat dissipation tool, circulating water enters the circulating water pipeline from a water inlet of the heat dissipation tool and is output from a water outlet in a circulating mode, and cooling of the shell of the pressure sensor to be measured and the cable lead end is achieved.
The high-temperature-resistant pressure-bearing pipe is made of high-temperature alloy.
Compared with the prior art, the invention has the following advantages:
(1) according to the calibration device, the temperature control equipment adopts ultrahigh temperature control equipment with sectional heating and sectional temperature control, so that the measurement error caused by inaccurate temperature control and uneven temperature of the traditional electric furnace is solved.
(2) According to the calibration device, the high-temperature-resistant pressure-bearing pipe penetrates through the ultrahigh-temperature control equipment, the external heat exchange can be reduced by the probing method, the gas in the high-temperature-resistant pressure-bearing pipe is heated and the temperature is constant, and a stable high-temperature calibration environment is provided for the pressure sensor to be tested.
(3) The calibration device is provided with a temperature measuring part of the pressure sensor to be measured, and the temperature measuring end is flush with a sensitive element of the pressure sensor to be measured, so that the temperature of the pressure sensor to be measured is detected in real time and used as temperature compensation, and pressure measurement errors caused by temperature are reduced.
(4) According to the calibration device, the heat dissipation tool is arranged on the shell of the pressure sensor to be measured, so that the sensitive element end of the pressure sensor to be measured is positioned in a high-temperature environment, and the shell of the sensor, the printed board, the cable and the like are positioned at a low-temperature end, so that the normal work of the sensor during calibration is ensured.
(5) The calibration device can directly calibrate the whole ultrahigh-temperature pressure sensor without adopting high-temperature-resistant wires and the like for signal switching, and is simple in calibration and easy to realize.
Drawings
FIG. 1 is a schematic view of the apparatus of the present invention;
fig. 2 is a schematic view of the assembly of the heat dissipation tool and the pressure sensor to be measured according to the present invention.
In the figure: 1-a pressure sensor to be measured; 2, a heat dissipation tool; 3, sensor tooling; 4-high temperature resistant pressure bearing pipe; 5-ultrahigh temperature control equipment; 6-asbestos; 7-metal ferrule; 8-a pressure controller; 9-a mechanical pump; 10-nitrogen gas cylinder; 11-an acquisition system; 12-a temperature measuring part; 21-a water inlet; 22-a water outlet; 23-a circulating water pipeline; 32-bulb conical surface sealing; 13-the sensing element end; 14-cable lead tail end
Detailed Description
The present invention is described in further detail below with reference to the attached drawing figures.
As shown in fig. 1, a calibration device for an ultra-high temperature pressure sensor includes an ultra-high temperature control device 5, a high temperature resistant pressure-bearing pipe 4, a pressure controller 8, a mechanical pump 9, a nitrogen cylinder 10, a sensor tool 3, a heat dissipation tool 2, an acquisition system 11, and a temperature measurement part 12;
the temperature control realization mode of the calibration device of the ultra-high temperature pressure sensor is as follows: the high temperature resistant pressure-bearing pipe 4 penetrates through the ultra-high temperature control equipment 5, namely, a pressure controller 8 connected with one end of the high temperature resistant pressure-bearing pipe 4 is arranged at one end of the ultra-high temperature control equipment 5 and is at room temperature; the sensor tool 3 connected with the other end of the high-temperature-resistant pressure-bearing pipe 4 is positioned inside the high temperature at the other end of the ultra-high temperature control equipment 5. The ultrahigh temperature control equipment 5 controls the temperature of the high temperature resistant pressure-bearing pipe 4, so that the gas in the high temperature resistant pressure-bearing pipe 4 is heated and the temperature is constant, and a stable high temperature calibration environment is provided for the pressure sensor 1 to be measured.
The heat dissipation realization mode of the calibration device of the ultra-high temperature pressure sensor is as follows: the tail end of the cable lead of the pressure sensor 1 to be measured penetrates through the heat dissipation tool 2 and is in close contact with the heat dissipation tool. As shown in fig. 2, the heat dissipation tool 2 is a water cooling heat dissipation manner, and a circulating water pipe 23 is designed in the heat dissipation tool 2, and circulating water enters the circulating water pipe 23 from a water inlet 21 of the heat dissipation tool 2 and circulates out from a water outlet 22, so that the casing and the cable lead of the pressure sensor 1 to be measured are cooled. Namely, the heat dissipation tool 2 is arranged on the shell of the pressure sensor 1 to be measured, so that the sensitive element end 13 of the pressure sensor 1 to be measured is in a high-temperature environment, and the printed board, the cable and the like of the sensor 1 are in a low-temperature end, thereby ensuring the normal work of the sensor 1 during calibration.
The data acquisition implementation mode of the calibration device of the ultra-high temperature pressure sensor is as follows: the tail end 14 of the cable lead of the pressure sensor 1 to be measured is connected with the acquisition system 11, and the pressure output and the real-time temperature of the pressure sensor 1 to be measured are acquired through the acquisition system 11.
The input end of the pressure controller 8 is respectively connected with the mechanical pump 9 and the nitrogen cylinder 10, the nitrogen cylinder 10 provides nitrogen for the inside of the high-temperature pressure bearing pipe 4, the mechanical pump 9 extracts the gas in the high-temperature pressure bearing pipe 4, and the precise control of the air pressure in the high-temperature pressure bearing pipe 4 is realized.
Further, the realization mode of actual temperature measurement during calibration of the ultra-high temperature pressure sensor is as follows: the temperature measuring end of the temperature measuring part 12 is flush with the position of the sensitive element of the pressure sensor 1 to be measured, and a thermal resistor or a thermocouple can be preferably integrated on the pressure sensor 1 to be measured, namely the working temperature of the pressure sensor 1 to be measured can be represented by the temperature measured by the thermal resistor or the thermocouple.
One end of the high-temperature-resistant pressure-bearing pipe 4 is hermetically connected with a pressure controller 8 through a metal ferrule 7; the other end is connected with the sensor tool 3 in a welding and sealing mode. The pressure sensor 1 to be measured is hermetically connected with the sensor tool 3 in a ball head conical surface 32 sealing mode.
The output end of the pressure controller 8 is hermetically connected with one end of the high-temperature-resistant pressure-bearing pipe 4; the pressure sensor 1 to be measured, the high-temperature-resistant pressure-bearing pipe 4 and the pressure controller 8 are communicated, namely, the pressure value displayed by the pressure controller 8 is the pressure value of the pressure sensor 1 to be measured.
Further, the length of the high-temperature-resistant pressure-bearing pipe 4 is required to be greater than that of the ultrahigh-temperature control equipment 5, so that a pressure controller 8 connected to one end of the high-temperature-resistant pressure-bearing pipe 4 is ensured to be at room temperature; the wall thickness of the high-temperature-resistant pressure-bearing pipe 4 is designed according to the measuring range of the pressure sensor 1 to be measured. The wall thickness of the high-temperature-resistant pressure-bearing pipe 4 is in direct proportion to the measuring range of the pressure sensor 1 to be measured. Finite element simulation software can be adopted to load full-scale load, and the maximum stress of the high-temperature-resistant pressure-bearing pipe is calculated and is required to be smaller than the yield strength of the high-temperature-resistant pressure-bearing pipe. The high-temperature-resistant pressure-bearing pipe 4 is made of high-temperature alloy, such as Ni-based high-temperature alloy and Ti-based high-temperature alloy.
The ultra-high temperature control equipment 5 is provided with openings at two ends, preferably selects a tubular furnace with three temperature areas or more, and can provide temperature not lower than 1000 ℃ for sectional heating and sectional temperature control, thereby ensuring the accurate control of the temperature. And the two ends of the ultra-high temperature control equipment 5 are respectively insulated by asbestos 6.
The calibration device can test the corresponding output value of the pressure sensor 1 to be tested under ultrahigh temperature and different pressures, thereby realizing calibration of the ultrahigh temperature pressure sensor.
The calibration method solves the calibration difficulty of the ultra-high temperature pressure sensor not lower than 1000 ℃, can directly calibrate the whole ultra-high temperature pressure sensor, and is simple and easy to realize. The calibration device is beneficial to promoting the research and development and the production of the ultra-high temperature pressure sensor, and has important practical value.
The above description is only for the best mode of the present invention, but the scope of the present invention is not limited thereto, and any changes or substitutions that can be easily conceived by those skilled in the art within the technical scope of the present invention are included in the scope of the present invention.
Those skilled in the art will appreciate that the invention may be practiced without these specific details.
Claims (8)
1. The utility model provides an ultra-high temperature pressure sensor's calibration device which characterized in that: the temperature measurement device comprises ultra-high temperature control equipment (5), a high temperature resistant pressure-bearing pipe (4), a pressure controller (8), a mechanical pump (9), a nitrogen cylinder (10), a sensor tool (3), a heat dissipation tool (2), an acquisition system (11) and a temperature measurement part (12);
one end of the high-temperature-resistant pressure-bearing pipe (4) penetrates out of the end part of the ultrahigh-temperature control equipment (5) and is connected with a pressure controller (8); the other end of the high-temperature-resistant pressure-bearing pipe (4) is connected with a sensor tool (3), and the sensor tool (3) is positioned in the ultrahigh-temperature control equipment (5); the ultrahigh-temperature control equipment (5) controls the temperature of the high-temperature-resistant pressure-bearing pipe (4) to realize heating of the gas in the high-temperature-resistant pressure-bearing pipe (4) and constant control of the temperature; the pressure sensor (1) to be detected is fixed in the ultra-high temperature control equipment (5) by the sensor tool (3), and the pressure sensor (1) to be detected is communicated with the pressure controller (8) through the high temperature resistant pressure-bearing pipe (4); one end of the pressure sensor (1) to be measured is a sensitive element, the other end of the pressure sensor is a cable lead, wherein the sensitive element end (13) is positioned outside the heat dissipation tool (2), and the cable lead end (14) is inserted into the heat dissipation tool (2) and is connected with the acquisition system (11); the temperature measuring end of the temperature measuring part (12) is flush with the position of a sensitive element of the pressure sensor (1) to be measured, and the acquisition system (11) acquires the temperature value output by the temperature measuring part (12) and the output value of the pressure sensor (1) to be measured at different temperatures; the pressure controller (8) is respectively connected with the mechanical pump (9) and the nitrogen cylinder (10), and the nitrogen cylinder (10) provides nitrogen for the high-temperature-resistant pressure-bearing pipe (4).
2. The calibration device for the ultra-high temperature pressure sensor according to claim 1, wherein: the two ends of the ultra-high temperature control equipment (5) are open, the ultra-high temperature control equipment is provided with three temperature zones or more, the equipment is used for heating in a sectional mode and controlling temperature in a sectional mode, the temperature capable of being provided is not lower than 1000 ℃, and the two ends of the ultra-high temperature control equipment (5) are respectively insulated by asbestos (6).
3. The calibration device for the UHT sensor according to claim 1 or 2, wherein: one end of the high-temperature-resistant pressure-bearing pipe (4) is hermetically connected with the pressure controller (8) through a metal clamping sleeve (7), and the other end of the high-temperature-resistant pressure-bearing pipe is hermetically connected with the sensor tool (3) through a welding mode.
4. The calibration device for the ultra-high temperature pressure sensor according to claim 3, wherein: the pressure sensor (1) to be measured is hermetically connected with the sensor tool (3) through the ball head conical surface (32).
5. The calibration device for the UHT pressure sensor as recited in claim 4, wherein: the wall thickness of the high-temperature-resistant pressure-bearing pipe (4) is in direct proportion to the measuring range of the pressure sensor (1) to be measured.
6. The calibration device for the UHT pressure sensor as recited in claim 5, wherein: a thermal resistor or a thermocouple is integrated on the pressure sensor (1) to be measured to form a temperature measuring part (12).
7. The calibration device for the ultra-high temperature pressure sensor according to claim 6, wherein: the heat dissipation tool (2) is in a water-cooling heat dissipation mode, a circulating water pipeline (23) is arranged inside the heat dissipation tool, circulating water enters the circulating water pipeline (23) from a water inlet (21) of the heat dissipation tool (2), and is circularly output from a water outlet (22), so that the shell of the pressure sensor (1) to be measured and the cable lead end are cooled.
8. The calibration device for the UHT pressure sensor as recited in claim 5, wherein: the high-temperature-resistant pressure-bearing pipe (4) is made of high-temperature alloy.
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| CN202010451263.XA CN111595513B (en) | 2020-05-25 | 2020-05-25 | Calibration device of ultra-high temperature pressure sensor |
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| CN202010451263.XA CN111595513B (en) | 2020-05-25 | 2020-05-25 | Calibration device of ultra-high temperature pressure sensor |
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Citations (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN202947831U (en) * | 2012-12-24 | 2013-05-22 | 西安臻卓测控设备有限公司 | Water cooling pressure transducer |
| CN106134489B (en) * | 2012-12-26 | 2014-10-22 | 北京遥测技术研究所 | A kind of high-temp pressure sensor encapsulating structure |
| CN104568310A (en) * | 2015-01-19 | 2015-04-29 | 北京大学 | Testing device for high-temperature pressure sensor |
| CN105136390A (en) * | 2015-08-08 | 2015-12-09 | 昆山泰莱宏成传感技术有限公司 | High-temperature pressure sensor testing device and preparation method therefor |
| CN107631833A (en) * | 2017-10-17 | 2018-01-26 | 北京中航兴盛测控技术有限公司 | Superhigh temperature pressure sensor and its manufacture method |
-
2020
- 2020-05-25 CN CN202010451263.XA patent/CN111595513B/en active Active
Patent Citations (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN202947831U (en) * | 2012-12-24 | 2013-05-22 | 西安臻卓测控设备有限公司 | Water cooling pressure transducer |
| CN106134489B (en) * | 2012-12-26 | 2014-10-22 | 北京遥测技术研究所 | A kind of high-temp pressure sensor encapsulating structure |
| CN104568310A (en) * | 2015-01-19 | 2015-04-29 | 北京大学 | Testing device for high-temperature pressure sensor |
| CN105136390A (en) * | 2015-08-08 | 2015-12-09 | 昆山泰莱宏成传感技术有限公司 | High-temperature pressure sensor testing device and preparation method therefor |
| CN107631833A (en) * | 2017-10-17 | 2018-01-26 | 北京中航兴盛测控技术有限公司 | Superhigh temperature pressure sensor and its manufacture method |
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