CN111531452A - High-precision polishing equipment for graphite slices - Google Patents
High-precision polishing equipment for graphite slices Download PDFInfo
- Publication number
- CN111531452A CN111531452A CN202010326033.0A CN202010326033A CN111531452A CN 111531452 A CN111531452 A CN 111531452A CN 202010326033 A CN202010326033 A CN 202010326033A CN 111531452 A CN111531452 A CN 111531452A
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- China
- Prior art keywords
- polishing
- graphite
- workbench
- precision
- layer
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000005498 polishing Methods 0.000 title claims abstract description 106
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 title claims abstract description 53
- 229910002804 graphite Inorganic materials 0.000 title claims abstract description 53
- 239000010439 graphite Substances 0.000 title claims abstract description 53
- 239000002184 metal Substances 0.000 claims abstract description 12
- 230000006698 induction Effects 0.000 claims description 15
- 230000000994 depressogenic effect Effects 0.000 claims description 6
- 238000001179 sorption measurement Methods 0.000 abstract description 5
- 230000000694 effects Effects 0.000 abstract description 4
- 238000007517 polishing process Methods 0.000 abstract description 4
- 238000013519 translation Methods 0.000 description 8
- 230000014616 translation Effects 0.000 description 8
- 230000005540 biological transmission Effects 0.000 description 3
- 239000007770 graphite material Substances 0.000 description 3
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 2
- 238000000034 method Methods 0.000 description 2
- 238000000623 plasma-assisted chemical vapour deposition Methods 0.000 description 2
- 229910052710 silicon Inorganic materials 0.000 description 2
- 239000010703 silicon Substances 0.000 description 2
- 238000010521 absorption reaction Methods 0.000 description 1
- 238000000429 assembly Methods 0.000 description 1
- 230000000712 assembly Effects 0.000 description 1
- 230000009286 beneficial effect Effects 0.000 description 1
- 230000033228 biological regulation Effects 0.000 description 1
- 238000000576 coating method Methods 0.000 description 1
- 238000013016 damping Methods 0.000 description 1
- 238000006073 displacement reaction Methods 0.000 description 1
- 239000007888 film coating Substances 0.000 description 1
- 238000009501 film coating Methods 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
Images
Classifications
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B24—GRINDING; POLISHING
- B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
- B24B29/00—Machines or devices for polishing surfaces on work by means of tools made of soft or flexible material with or without the application of solid or liquid polishing agents
- B24B29/02—Machines or devices for polishing surfaces on work by means of tools made of soft or flexible material with or without the application of solid or liquid polishing agents designed for particular workpieces
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B24—GRINDING; POLISHING
- B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
- B24B41/00—Component parts such as frames, beds, carriages, headstocks
- B24B41/02—Frames; Beds; Carriages
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B24—GRINDING; POLISHING
- B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
- B24B41/00—Component parts such as frames, beds, carriages, headstocks
- B24B41/06—Work supports, e.g. adjustable steadies
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B24—GRINDING; POLISHING
- B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
- B24B47/00—Drives or gearings; Equipment therefor
- B24B47/10—Drives or gearings; Equipment therefor for rotating or reciprocating working-spindles carrying grinding wheels or workpieces
- B24B47/12—Drives or gearings; Equipment therefor for rotating or reciprocating working-spindles carrying grinding wheels or workpieces by mechanical gearing or electric power
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B24—GRINDING; POLISHING
- B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
- B24B47/00—Drives or gearings; Equipment therefor
- B24B47/22—Equipment for exact control of the position of the grinding tool or work at the start of the grinding operation
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B24—GRINDING; POLISHING
- B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
- B24B49/00—Measuring or gauging equipment for controlling the feed movement of the grinding tool or work; Arrangements of indicating or measuring equipment, e.g. for indicating the start of the grinding operation
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B24—GRINDING; POLISHING
- B24D—TOOLS FOR GRINDING, BUFFING OR SHARPENING
- B24D13/00—Wheels having flexibly-acting working parts, e.g. buffing wheels; Mountings therefor
- B24D13/14—Wheels having flexibly-acting working parts, e.g. buffing wheels; Mountings therefor acting by the front face
Landscapes
- Engineering & Computer Science (AREA)
- Mechanical Engineering (AREA)
- Grinding Of Cylindrical And Plane Surfaces (AREA)
- Grinding And Polishing Of Tertiary Curved Surfaces And Surfaces With Complex Shapes (AREA)
- Finish Polishing, Edge Sharpening, And Grinding By Specific Grinding Devices (AREA)
Abstract
The invention belongs to the technical field of graphite product processing equipment, and particularly discloses high-precision polishing equipment for graphite slices. The surface of the workbench is provided with small holes for vacuumizing, adsorbing and fixing graphite slices, and the rack is provided with double slide rails and a grinding assembly for adjusting the polishing position, so that higher polishing precision is obtained preliminarily; the annular channel communicated with the small hole is arranged around the small hole to enhance the vacuum adsorption effect, and the arrangement of the concave area of the workbench is combined, so that the graphite slice is ensured not to have position deviation in the polishing process, and the polishing precision is improved; through the three-layer structure design of the polishing disc metal layer, the rubber layer and the polishing layer, the stability of the polishing assembly is improved, and the polishing precision is further improved. In addition, the invention has the characteristics of simple operation, high safety, easy replacement of the polishing layer and high polishing efficiency.
Description
Technical Field
The invention relates to the technical field of graphite product processing equipment, in particular to high-precision polishing equipment for graphite slices.
Background
The graphite boat is used as a carrier of a silicon wafer, is an important tool in a PECVD (plasma enhanced chemical vapor deposition) film coating process and is formed by assembling a plurality of graphite boat sheets. The processing of the graphite boat piece firstly needs to cut a graphite block to obtain a graphite slice, and the cut graphite slice has a rough surface and needs to be polished to reduce the influence of the graphite slice on the subsequent silicon wafer coating process. To the polishing of graphite section, the manual operation is adopted to traditional mode, and not only wastes time and energy, and dynamics, position are all difficult to control moreover, can't reach the polishing requirement. At present, some automatic polishing devices are available for graphite materials, but most of the devices only automate the operation of the polishing part, and still need to manually adjust the position of the graphite material, so that the polishing precision and efficiency are very low.
The utility model discloses a chinese utility model patent that publication number is CN204976288U discloses a graphite cake burnishing machine, comprises frame, workstation, burnishing device, driving motor device and transmission five parts, carries out the absorption of evacuation realization graphite cake through setting up the aperture all around at the workstation fixed, makes burnishing device can remove about the workstation top through transmission, realizes the reciprocal polishing to the graphite cake. Although the polishing device effectively reduces the labor and greatly improves the production efficiency, the polishing device always performs polishing operation on the same horizontal plane, and cannot adapt to the individual difference of graphite materials, and the transmission device has rough adjustment on the position of the polishing device, so that the polishing device cannot achieve the polishing precision required by graphite chips.
Disclosure of Invention
In order to solve the problems, the invention provides high-precision polishing equipment for graphite slices, which can ensure the high-precision polishing of the graphite slices, is simple to operate and high in safety, and greatly improves the polishing efficiency.
In order to achieve the purpose, the invention adopts the following specific technical scheme:
a high-precision polishing device for graphite slices comprises:
-a frame, on which two parallel slide rails are arranged;
-a table mounted to the frame by the slide; the upper surface of the workbench is provided with a plurality of small holes communicated with a vacuum pipeline, and the vacuum pipeline is connected with a vacuum generator;
-a sanding assembly comprising a lifting seat; the surface of one side of the lifting seat is fixedly connected with a vertically arranged motor, and the output end of the motor is connected with a horizontal polishing disc through a rotating shaft; the other side surface of the lifting seat is in sliding connection with a mounting seat, and the mounting seat is located on the outer side of the workbench and arranged on the rack.
Preferably, a lead screw which is parallel to the slide rail and is arranged on the rack is arranged below the workbench, and a supporting seat sleeved on the lead screw is fixedly connected with the workbench.
Preferably, the mounting seat is slidably connected with the frame.
Preferably, the lifting base is lifted by a rotating part on the upper surface of the lifting base, and scales are marked on the periphery of the rotating part.
Preferably, one or two end parts of the slide rail are provided with induction parts fixed on the rack.
Preferably, the surface of the workbench is provided with a depressed area for placing and limiting the graphite slices, and the small holes are formed in the depressed area.
Preferably, the surface of the workbench is provided with an annular channel which is arranged around the small hole and communicated with the small hole.
Preferably, the polishing disk comprises a metal layer, a rubber layer and a polishing layer from top to bottom; the metal layer and the rotating shaft are integrally formed, and the polishing layer and the rubber layer are detachably connected.
Preferably, the polishing layer and the rubber layer are connected in a plug-in connection mode, a sliding connection mode or a magic tape connection mode.
Preferably, the polishing machine further comprises a controller, and the workbench, the vacuum generator and a start-stop switch of the polishing assembly.
The invention has the following beneficial effects:
1. according to the invention, the graphite slices are fixed through vacuum adsorption, and the polishing position is adjusted through the double slide rails and the polishing assembly, so that higher polishing precision is obtained preliminarily. Specifically, small holes are formed in the surface of the workbench for vacuumizing so as to adsorb and fix the graphite slices; the two parallel slide rails are arranged on the rack, so that the workbench can stably move under the driving of the screw rod, and the horizontal adjustment of the polishing position is realized; the subassembly of polishing drives the polishing dish through the seat that goes up and down and goes up and down, and then realizes the upper and lower regulation of polishing position to the rotating part periphery of seat that goes up and down is marked with the scale, can realize the position fine setting, avoids the polishing excessive. In addition, the mounting seat in the grinding assembly is connected with the rack in a sliding mode, so that the graphite slice polishing device can adjust the polishing position of the graphite slice through translation of the workbench, can also be realized through translation of the mounting seat, and is high in flexibility and simple to operate.
2. Through the aperture and the cooperation of annular channel strengthen the vacuum adsorption effect, combine the setting of depressed area, ensure that graphite section can not take place offset at the polishing process, improve polishing precision. A sunken area is arranged on the surface of the workbench and used for placing and limiting the graphite slices; the annular channel communicated with the small hole is arranged around the small hole, and compared with the prior art that a plurality of small holes are arranged around the workbench, the vacuum adsorption effect of the design is obviously improved. In addition, the aperture and the annular channel can be established to the multiunit, and the aperture diameter is at 0.5 ~ 2.0cm, and the area that sets up of annular channel is also changeable, consequently can satisfy the demand of the graphite section polishing of unidimensional not to increase the quantity of once polishing graphite section, improve polishing efficiency.
3. Through the structural design that polishing dish metal level, rubber layer and polishing layer are combined, improve the stationarity of the subassembly of polishing, further improve the polishing precision. The polishing disk is of a three-layer design, wherein the metal layer plays a good supporting role, and the rubber layer plays a role in damping and maintaining stability, so that the vibration of the polishing layer is effectively reduced, and the stability of the polishing motion is improved; the setting on metal level and rubber layer has improved the stability of polishing layer greatly, and then improves the stability of the subassembly of polishing, makes the seat that goes up and down can go up and down steadily polishing the in-process, improves the accuracy of polishing upper and lower position control, also makes the translation of mount pad can be steady, improves the accuracy of polishing horizontal position control. In addition, the polishing layer and the rubber layer are detachably connected, so that the polishing layer is convenient to replace after being used, and the use cost is reduced.
4. The induction pieces are arranged at the two ends of the sliding rail, the workbench is automatically closed through the contact between the induction pieces and the edge of the workbench, the workbench is prevented from sliding out of the rack area, and the safety is greatly improved.
5. The slide rail that sets up in the frame provides sufficient displacement for the workstation for the sliced getting of graphite is got and is put very conveniently.
Drawings
FIG. 1: perspective view of the present invention.
FIG. 2: side view of the present invention.
FIG. 3: schematic table as described in example 2.
FIG. 4: a schematic of the polishing disk described in example 2.
FIG. 5: the sensor of example 2 is illustrated schematically.
In the figure: 1-a frame, 2-a workbench, 3-a polishing assembly, 4-a slide rail, 5-a screw rod, 6-a vacuum pipeline and 7-an induction part; 21-small hole, 22-annular channel, 23-depressed area, 31-lifting seat, 32-motor, 33-rotating shaft, 34-polishing disk and 35-mounting seat; 311-rotating part, 341-metal layer, 342-rubber layer, 343-polishing layer.
Detailed Description
The invention is further described below with reference to the accompanying drawings and specific embodiments.
Example 1
A high-precision polishing apparatus for graphite chips, as shown in fig. 1 and 2, comprising:
-a frame 1, said frame 1 being provided with two parallel slide rails 4;
-a table 2 mounted to the frame 1 by means of the slide 4; the upper surface of the workbench 2 is provided with a plurality of small holes 21 communicated with the vacuum pipeline 6, and the diameter of each small hole is 1.0 cm; the vacuum pipeline 6 is connected with a vacuum generator; a screw 5 which is parallel to the slide rail 4 and is arranged on the rack 1 is arranged below the workbench 2, a supporting seat sleeved on the screw 5 is fixedly connected with the workbench 2, and the screw 5 is driven to rotate by a motor;
a sanding assembly 3 comprising an elevation base 31, the elevation base 31 being adjustable in elevation by a rotary part 311 on the upper surface thereof, the rotary part 311 being peripherally graduated; the surface of one side of the lifting seat 31 is fixedly connected with a vertically arranged motor 32, and the output end of the motor 32 is connected with a horizontal polishing disk 34 through a rotating shaft 33; the other side surface of the lifting seat 31 is slidably connected with a mounting seat 35, and the mounting seat 35 is located outside the workbench 2 and arranged on the rack 1;
a controller provided with the start and stop switches of the table 2, the vacuum generator and the grinding assembly 3.
During operation, the graphite slices are placed in the area above the small hole 21 of the workbench 2, a vacuum generator switch is turned on, and the graphite slices are adsorbed on the surface of the workbench 2; open 2 switches of workstation, lead screw 5 drives 2 moves along slide rail 4 of workstation, the 3 switches of polishing subassembly are opened before arriving polishing dish 34 below to workstation 2, motor 32 drive polishing dish 34 is rotatory, when workstation 2 reachs polishing dish 34 below, the rotation through rotating part 311 is adjusted the lift seat 31 down, drive polishing dish 34 position and adjust down, the scale control through rotating part 311 periphery adjusts down the distance, it is excessive to avoid the polishing, surpass polishing dish 34 when the graphite section position polishes regional back, through 5 reverse rotations of controller control lead screw, 2 reverse translations of workstation, realize polishing 34's the repeated polishing.
Example 2
The present embodiment is a high-precision polishing apparatus for graphite sliced sheets, which has the same basic structure as embodiment 1, and further has the following structural features on the basis of embodiment 1:
the mounting seat 35 is slidably connected to the frame 1. Specifically, the mounting seat 35 is provided with a sliding block, the sliding block is matched with an electric guide rail arranged on the rack to realize that the mounting seat 35 moves along the translation direction of the workbench 2, and further realize the translation of the polishing disc 34 in the direction, so that the equipment can realize the adjustment of the polishing position of the graphite slice through the translation of the workbench 2 and can also realize the translation through the mounting seat 35, and the flexibility is higher; the structure of the table top of the workbench 2 is shown in fig. 3, the surface of the workbench 2 is provided with two recessed areas 23 for placing and limiting graphite slices (two groups of grinding assemblies 3 are arranged on two sides of the workbench 2 and correspond to the two recessed areas 23), the small holes 21 are arranged in the recessed areas 23 and connected with the vacuum pipeline 6, annular channels 22 communicated with the small holes 21 are arranged around the small holes 21, and the annular channels 22 are also arranged in the recessed areas 23; the small holes 21 and the annular channel 22 are matched to enhance the vacuum adsorption effect, and the arrangement of the depressed regions 23 is combined to ensure that the graphite slices cannot deviate in position in the polishing process;
the structure of the polishing disc is shown in fig. 4, the polishing disc 34 includes a metal layer 341 integrally formed with the rotating shaft 33, a rubber layer 342 disposed below the metal layer 341 and fixedly connected to the metal layer 341, and a polishing layer 343 disposed below the rubber layer 342 and connected to the rubber layer 342 by a hook and loop fastener; the three-layer design of the polishing disc 34 improves the stability of the polishing component 3 in the polishing process, and the polishing layer 343 can be detached and is convenient to replace after being used;
the high-precision polishing equipment for the graphite slices further comprises induction pieces 7, the induction pieces 7 are mounted on the structure of the rack 1, the induction pieces 7 can be mounted at two end parts of any slide rail 4, and also can be mounted at two end parts of each slide rail 4, the induction pieces 7 are arranged on the structure of the rack 1 as shown in fig. 5, the bottom of the induction pieces 7 is fixed on the rack 1, induction heads on the upper part are located or partially located in the thickness range of the workbench 2, the induction pieces 7 are connected with a controller, when the workbench 2 is translated to the side of the end part of each slide rail 4, the end parts of the induction pieces are in contact with the induction heads of the induction pieces 7, the controller receives the signal, the startup switch of the workbench 2 is immediately closed, the workbench 2 stops automatically, and the safety.
This detailed description is to be construed as illustrative only and is not to be taken as limiting the invention, as any changes that may be made by a person skilled in the art after reading the present specification will be protected by the patent laws within the scope of the appended claims.
Claims (10)
1. The utility model provides a sliced high accuracy polishing equipment of graphite which characterized in that: comprises that
-a frame (1), said frame (1) being provided with two parallel sliding rails (4);
-a table (2) mounted to the frame (1) by means of the slide (4); the upper surface of the workbench (2) is provided with a plurality of small holes (21) communicated with a vacuum pipeline (6), and the vacuum pipeline (6) is connected with a vacuum generator;
-a sanding assembly (3) comprising a lifting seat (31); the surface of one side of the lifting seat (31) is fixedly connected with a vertically arranged motor (32), and the output end of the motor (32) is connected with a horizontal polishing disc (34) through a rotating shaft (33); the other side surface of the lifting seat (31) is connected with a mounting seat (35) in a sliding mode, and the mounting seat (35) is located on the outer side of the workbench (2) and arranged on the rack (1).
2. The high-precision polishing apparatus for graphite chips as claimed in claim 1, wherein: the lower part of the workbench (2) is provided with a lead screw (5) which is parallel to the slide rail (4) and is arranged on the rack (1), and the lead screw (5) is sleeved with a supporting seat which is fixedly connected with the workbench (2).
3. The high-precision polishing apparatus for graphite chips as claimed in claim 1, wherein: the mounting seat (35) is connected with the rack (1) in a sliding mode.
4. The high-precision polishing apparatus for graphite chips as claimed in claim 1, wherein: the lifting seat (31) is adjusted to lift through a rotating part (311) on the upper surface of the lifting seat, and scales are marked on the periphery of the rotating part (311).
5. The high-precision polishing apparatus for graphite chips as claimed in claim 1, wherein: and induction pieces (7) fixed on the rack (1) are arranged at one or two end parts of the slide rail (4).
6. The high-precision polishing apparatus for graphite chips as claimed in claim 1, wherein: the surface of the workbench (2) is provided with a depressed area (23) for placing and limiting graphite slices, and the small holes (21) are formed in the depressed area (23).
7. The high-precision polishing apparatus for graphite chips as claimed in claim 1 or 6, wherein: and an annular channel (22) communicated with the small hole (21) is arranged on the surface of the workbench (2) and around the small hole (21).
8. The high-precision polishing apparatus for graphite chips as claimed in claim 1, wherein: the polishing disc (34) comprises a metal layer (341), a rubber layer (342) and a polishing layer (343) from top to bottom; the metal layer (341) and the rotating shaft (33) are integrally formed, and the connection between the polishing layer (343) and the rubber layer (342) is detachable.
9. The high-precision polishing apparatus for graphite chips as claimed in claim 8, wherein: the polishing layer (343) and the rubber layer (342) are connected in a plug-in connection, a sliding connection or a magic tape connection.
10. The high-precision polishing apparatus for graphite chips as claimed in claim 1, wherein: the polishing machine is characterized by further comprising a controller, wherein the controller is provided with a start-stop switch of the workbench (1), the vacuum generator and the polishing assembly (3).
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202010326033.0A CN111531452A (en) | 2020-04-23 | 2020-04-23 | High-precision polishing equipment for graphite slices |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202010326033.0A CN111531452A (en) | 2020-04-23 | 2020-04-23 | High-precision polishing equipment for graphite slices |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN111531452A true CN111531452A (en) | 2020-08-14 |
Family
ID=71975246
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN202010326033.0A Pending CN111531452A (en) | 2020-04-23 | 2020-04-23 | High-precision polishing equipment for graphite slices |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN111531452A (en) |
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN113681728A (en) * | 2021-07-26 | 2021-11-23 | 浙江华熔科技有限公司 | Dustless graphite boat board deburring equipment |
| CN113696035A (en) * | 2021-07-26 | 2021-11-26 | 浙江华熔科技有限公司 | Graphite polishing and transferring equipment |
| CN114274034A (en) * | 2021-11-24 | 2022-04-05 | 宁波华辰机械有限公司 | Automatic polishing machine |
Citations (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US4194324A (en) * | 1978-01-16 | 1980-03-25 | Siltec Corporation | Semiconductor wafer polishing machine and wafer carrier therefor |
| CN2215387Y (en) * | 1994-09-30 | 1995-12-20 | 哈尔滨工业大学 | Combined multi-cavity vacuum sucktion platform |
| CN203680006U (en) * | 2013-12-27 | 2014-07-02 | 湖南宇晶机器股份有限公司 | Cambered polishing machine |
| KR101621333B1 (en) * | 2015-02-06 | 2016-05-16 | 나노텍 주식회사 | Curved tempered glass surface polishing machine |
| CN108381364A (en) * | 2018-03-07 | 2018-08-10 | 湘潭大学 | A kind of polishing method and device based on hot rheo-material |
| CN109605234A (en) * | 2019-03-06 | 2019-04-12 | 郑州中研高科实业有限公司 | A kind of polishing disk for ceramic mobile phone backboard |
| CN212471016U (en) * | 2020-04-23 | 2021-02-05 | 浙江华熔科技有限公司 | High-precision polishing equipment for graphite slices |
-
2020
- 2020-04-23 CN CN202010326033.0A patent/CN111531452A/en active Pending
Patent Citations (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US4194324A (en) * | 1978-01-16 | 1980-03-25 | Siltec Corporation | Semiconductor wafer polishing machine and wafer carrier therefor |
| CN2215387Y (en) * | 1994-09-30 | 1995-12-20 | 哈尔滨工业大学 | Combined multi-cavity vacuum sucktion platform |
| CN203680006U (en) * | 2013-12-27 | 2014-07-02 | 湖南宇晶机器股份有限公司 | Cambered polishing machine |
| KR101621333B1 (en) * | 2015-02-06 | 2016-05-16 | 나노텍 주식회사 | Curved tempered glass surface polishing machine |
| CN108381364A (en) * | 2018-03-07 | 2018-08-10 | 湘潭大学 | A kind of polishing method and device based on hot rheo-material |
| CN109605234A (en) * | 2019-03-06 | 2019-04-12 | 郑州中研高科实业有限公司 | A kind of polishing disk for ceramic mobile phone backboard |
| CN212471016U (en) * | 2020-04-23 | 2021-02-05 | 浙江华熔科技有限公司 | High-precision polishing equipment for graphite slices |
Cited By (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN113681728A (en) * | 2021-07-26 | 2021-11-23 | 浙江华熔科技有限公司 | Dustless graphite boat board deburring equipment |
| CN113696035A (en) * | 2021-07-26 | 2021-11-26 | 浙江华熔科技有限公司 | Graphite polishing and transferring equipment |
| CN113696035B (en) * | 2021-07-26 | 2022-10-18 | 浙江华熔科技有限公司 | Graphite polishing transfer equipment |
| CN113681728B (en) * | 2021-07-26 | 2023-05-16 | 浙江华熔科技有限公司 | Dustless graphite boat board deburring equipment |
| CN114274034A (en) * | 2021-11-24 | 2022-04-05 | 宁波华辰机械有限公司 | Automatic polishing machine |
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