CN111505342B - A plasmonic probe combining tapered optical fibers with nanowires and its working method - Google Patents
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- 239000000523 sample Substances 0.000 title claims abstract description 78
- 239000002070 nanowire Substances 0.000 title claims abstract description 62
- 239000013307 optical fiber Substances 0.000 title claims abstract description 29
- 238000000034 method Methods 0.000 title claims abstract description 13
- 229910052751 metal Inorganic materials 0.000 claims abstract description 33
- 239000002184 metal Substances 0.000 claims abstract description 33
- 239000000835 fiber Substances 0.000 claims abstract description 19
- 239000010408 film Substances 0.000 claims description 22
- 239000010931 gold Substances 0.000 claims description 8
- PCHJSUWPFVWCPO-UHFFFAOYSA-N gold Chemical compound [Au] PCHJSUWPFVWCPO-UHFFFAOYSA-N 0.000 claims description 7
- 229910052737 gold Inorganic materials 0.000 claims description 7
- 239000010409 thin film Substances 0.000 claims description 7
- 229910052709 silver Inorganic materials 0.000 claims description 6
- 239000004332 silver Substances 0.000 claims description 6
- BQCADISMDOOEFD-UHFFFAOYSA-N Silver Chemical compound [Ag] BQCADISMDOOEFD-UHFFFAOYSA-N 0.000 claims description 5
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 claims description 4
- 239000002041 carbon nanotube Substances 0.000 claims description 4
- 229910021393 carbon nanotube Inorganic materials 0.000 claims description 4
- 238000010168 coupling process Methods 0.000 claims description 4
- 239000000463 material Substances 0.000 claims description 4
- 229910052782 aluminium Inorganic materials 0.000 claims description 3
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 claims description 3
- 230000003287 optical effect Effects 0.000 abstract description 23
- 238000005259 measurement Methods 0.000 abstract description 9
- 238000001514 detection method Methods 0.000 abstract description 5
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- 238000010183 spectrum analysis Methods 0.000 abstract description 4
- 230000035945 sensitivity Effects 0.000 abstract 1
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01Q—SCANNING-PROBE TECHNIQUES OR APPARATUS; APPLICATIONS OF SCANNING-PROBE TECHNIQUES, e.g. SCANNING PROBE MICROSCOPY [SPM]
- G01Q60/00—Particular types of SPM [Scanning Probe Microscopy] or microscopes; Essential components thereof
- G01Q60/18—SNOM [Scanning Near-Field Optical Microscopy] or apparatus therefor, e.g. SNOM probes
- G01Q60/22—Probes, their manufacture, or their related instrumentation, e.g. holders
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Abstract
本发明公开了一种锥形光纤结合纳米线的等离激元探针及其工作方法，该探针包括锥形探针纤芯、金属薄膜覆盖层、环形狭缝等离激元增强结构和纳米线，金属薄膜覆盖层均匀分布在锥形探针纤芯的外表面，环形狭缝等离激元增强结构刻蚀在金属薄膜覆盖层上，纳米线生长或组装在金属薄膜覆盖层针尖位置。本发明利用等离激元增强结构，能够在针尖实现更大局域场增强，具有更高的分辨率和信号探测灵敏度，同时结合大长径比纳米线结构，能够实现表面和高深宽比复杂三维结构形貌和光学信息测量。在纳米极限加工、光谱分析和超分辨成像等领域具有广阔的应用前景。
The invention discloses a plasmon probe with a tapered optical fiber combined with nanowires and a working method thereof. The probe comprises a tapered probe fiber core, a metal film covering layer, an annular slit plasmon enhancement structure and a working method. Nanowires, the metal film cover layer is uniformly distributed on the outer surface of the tapered probe core, the annular slit plasmon enhancement structure is etched on the metal film cover layer, and the nanowires are grown or assembled at the tip of the metal film cover layer. . The invention utilizes the plasmon enhancement structure, can achieve greater local field enhancement at the needle tip, has higher resolution and signal detection sensitivity, and at the same time combines the nanowire structure with a large aspect ratio, can realize the complex three-dimensional surface and high aspect ratio. Structural topography and optical information measurements. It has broad application prospects in the fields of nano-limit processing, spectral analysis and super-resolution imaging.
Description
Technical Field
The invention belongs to the fields of nano limit processing, spectral analysis, super-resolution imaging and the like, and particularly relates to a plasmon probe with a tapered optical fiber combined with a nanowire and a working method thereof.
Background
The scanning near-field optical microscope can realize optical imaging and chemical composition detection, break through the optical diffraction limit, realize nanometer resolution processing and measurement, and is widely applied to the fields of near-field Raman detection, near-field super-resolution imaging, near-field optical processing and the like. The resolution of scanning near-field optical microscopes depends on the near-field probe technology, with the most common being aperture probes and non-aperture probes. The aperture type probe has small light transmittance, weak detection signal and limited resolving power, and is generally 50 nm-100 nm due to small cone angle and aperture size. The resolution of the non-hole probe is determined by the diameter of the tip of the non-hole probe and can reach 10 nm. However, holeless near-field probes are typically externally directly illuminated, which introduces significant background signals and requires the use of complex interference and phase-locking techniques. In order to eliminate background signals and retain nanoscale resolving power, plasmon probes have been developed in recent years, in which a specific structure is etched on a conventional probe to excite surface plasmon propagation, thereby achieving nano-focusing at the tip of the probe. However, the existing plasmon probe has a weak local optical field at the tip, so that the existing plasmon probe is limited in the aspects of super-resolution measurement and super-diffraction processing; and only the optical and morphological information of the surface of the sample can be measured, and the method is limited in the aspect of measuring the complex three-dimensional nano structure with small disturbance and high aspect ratio.
Disclosure of Invention
The invention provides a conical optical fiber and nanowire combined plasmon probe and a working method thereof, aiming at solving the problems in the prior art.
In order to achieve the purpose, the scheme provided by the invention is as follows:
a plasmon probe combining a tapered optical fiber and a nanowire comprises a tapered probe fiber core, a metal film covering layer and the nanowire, wherein the metal film covering layer is uniformly distributed on the outer surface of the tapered probe fiber core, and the nanowire is arranged at the tip position of the metal film covering layer; the surface of the metal film covering layer is provided with a plurality of annular slit plasmon enhancement structures, and the plurality of annular slit plasmon enhancement structures can form resonance interference enhancement.
Preferably, the shape of the conical probe fiber core is a cone, the cone angle is 20-40 degrees, and the diameter of the cone tip is 25-100 nm.
Preferably, the metal film covering layer is made of gold, silver or aluminum, and the thickness is 40 nm-100 nm.
Preferably, the annular slit plasmon enhancement structure is a groove structure, the groove structure extends from the surface of the metal film covering layer to the surface of the tapered probe fiber core, and the groove structure extends along the axial direction of the tapered probe fiber core.
Preferably, the width of the annular slit plasmon enhancement structure is 50nm to 150 nm.
Preferably, the nanowire material is gold or silver or a carbon nanotube.
Preferably, the diameter of the nanowire is 2nm to 50nm, and the length of the nanowire is 20nm to 500 nm.
Preferably, the nanowire is grown or assembled at the position of the needle tip of the metal thin film covering layer.
The working method of the plasmon probe combining the tapered optical fiber and the nanowire comprises the following steps:
when the plasmon probe of the tapered optical fiber combined nanowire is in a working state, the optical fiber radial waveguide mode is propagated in the fiber core of the tapered probe, the wave vector is matched with and excites the surface plasmon to propagate on the outer surface of the metal film covering layer, meanwhile, the annular slit plasmon enhancement structure forms resonance interference to enhance the surface plasmon local optical field, then the nanowire surface plasmon propagation is excited in a butt coupling mode, and the locally enhanced nanoscale optical field is formed at the lower end of the nanowire.
Compared with the prior art, the invention has the following beneficial effects:
the plasmon probe combining the tapered optical fiber and the nanowire has the following advantages: (1) the optical field intensity of the needle tip local field is as follows: the radial waveguide mode excites the surface plasmon through the wave vector matching condition, and meanwhile, the annular slit plasmon enhancement structure forms resonance interference, so that the density of an electromagnetic field can be improved, and a large local optical field is generated at the position of a needle tip. (2) The resolution is high: the measurement of the shape and optical information is carried out through the nano wire with the extremely small diameter, the resolution of the optical field and the shape depends on the diameter of the nano wire, and the resolution of 10nm can be realized. (3) The measurement of a complex three-dimensional structure with a high depth-to-width ratio can be realized: the high length-diameter ratio nanowire structure is grown or assembled at the needle point of the tapered optical fiber structure, the surface and high length-diameter ratio complex three-dimensional measurement can be carried out, meanwhile, the influence of the extremely-small diameter nanowire on the measurement environment is small, and the method is suitable for small-disturbance measurement.
Drawings
FIG. 1 is a schematic diagram of a planar surface of a tapered optical fiber coupled nanowire plasmon probe XZ of the present invention;
FIG. 2 is a schematic XY plane view of a plasmon probe incorporating a nanowire with a tapered optical fiber according to the present invention;
in the figure: the probe comprises a tapered probe fiber core 1, a metal film covering layer 2, an annular slit plasmon enhancement structure 3, a nanowire 4 and an optical fiber radial waveguide mode 5.
Detailed Description
The invention will be described in detail and clearly with reference to the accompanying drawings and specific implementation methods.
Referring to fig. 1 and 2, the tapered optical fiber nanowire-coupled plasmon probe of the present invention includes a tapered probe core 1, a metal thin film coating layer 2, a ring-shaped slit plasmon enhancement structure 3, and a nanowire 4. The metal film covering layer 2 is uniformly distributed on the outer surface of the conical probe fiber core 1, the plurality of annular slit plasmon enhancement structures 3 are arranged on the metal film covering layer 2 (can be arranged by adopting an etching means), the nanowires 4 grow or are assembled at the needle point position of the metal film covering layer 2, and the plurality of annular slit plasmon enhancement structures 3 can form a resonance interference enhancement effect. Referring to fig. 1 and 2, in the present invention, the annular slit plasmon enhancement structure 3 is a groove structure extending from the surface of the metal thin film cladding layer 2 to the surface of the tapered probe core 1, the groove structure extending in the axial direction of the tapered probe core 1, and as exemplified by the orientation shown in fig. 1, the annular slit plasmon enhancement structure 3 is disposed in the up-down direction.
When the plasmon probe of the tapered optical fiber combined nanowire is in a working state, the optical fiber radial waveguide mode 5 is coupled to the fiber core 1 of the tapered probe and propagates in the fiber core, the surface plasmon is excited to propagate on the outer surface of the metal film covering layer 2 under the wave vector matching condition, meanwhile, resonance interference is formed between the specially designed annular slit plasmon enhancement structures 3, the surface plasmon local optical field is further enhanced, the surface plasmon is gathered at the tip position of the tapered probe and generates extremely high electric field density along with the reduction of the radius of the tapered probe, then the surface plasmon of the nanowire 4 is excited to propagate in a butt coupling mode, and the locally enhanced nanoscale optical field can be formed at the lower end of the nanowire 4. The nano local enhanced optical field can be used for super-resolution imaging, spectral analysis and super-diffraction processing, and the nano wire with high length-diameter ratio can be suitable for small disturbance and measurement of a complex three-dimensional nano structure with high depth-width ratio.
Referring to fig. 1, a tapered probe core 1 is formed by etching a bare optical fiber, and has a tapered shape with a taper angle of 20 to 40 ° and a taper tip diameter of 25 to 100 nm. .
Referring to fig. 1, the material of the metal thin film covering layer 2 is gold, silver or aluminum, and uniformly covers the outer surface of the tapered probe core to form a non-porous probe, and the thickness of the covering layer is 40nm to 100 nm.
Referring to fig. 1 and 2, as a preferred embodiment of the present invention, an annular slit plasmon enhancement structure 3 is etched on a metal thin film cladding layer 2, the etching direction is parallel to the axial direction of a tapered probe fiber core 1, the etching depth is 20nm to 100nm, the etching width is 50nm to 150nm, and the annular slit plasmon enhancement structure 3 is coaxial with the tapered probe fiber core 1.
Referring to fig. 1 and 2, the nanowire 4 is made of gold or silver or carbon nanotube, and is grown or assembled on the tip of the metal thin film cover layer 2.
As a preferred embodiment of the present invention, the nanowires 4 have a diameter of 2nm to 50nm and a length of 20nm to 500 nm.
Examples
The structure of the novel plasmon probe combining the tapered optical fiber and the nanowire is shown in fig. 1 and fig. 2, wherein a fiber core of the tapered probe is formed by chemical wet etching, a cone angle is 32 degrees, and the diameter of a cone tip is 30 nm; the metal film covering layer 2 is made of gold (Au) and has the thickness of 80 nm; the annular slit plasmon enhancement structure 3 is completely etched, the etching depth is 80nm, and the etching width is 100 nm; the nano-wire 4 is made of carbon nano-tubes with the diameter of 10nm and the length of 100nm and is assembled at the needle tip of the metal film covering layer 2.
The radial light with the wavelength of 632.8nm is coupled to the fiber core 1 of the conical probe and is propagated in the intrinsic radial waveguide mode 5 of the fiber core, the surface plasmon is excited to propagate on the outer surface of the metal film covering layer 2 under the wave vector matching condition, meanwhile, the resonance interference enhancement effect is formed between the specially designed annular slit plasmon enhancement structures 3, the local optical field of the surface plasmon is further enhanced, along with the reduction of the radius of the conical probe, the surface plasmon is gathered at the tip position of the conical probe and generates extremely high electric field density, then the surface plasmon of the nanowire 4 is excited to propagate in a butt coupling mode, and the locally enhanced nano-scale optical field can be formed at the lower end of the nanowire 4.
When super-resolution imaging and spectral analysis are carried out, the nanowire 4 is extended into a small-disturbance measuring environment or a complex three-dimensional structure with a high depth-to-width ratio, the locally enhanced optical field of the tip of the nanowire 4 is coupled with a sample by controlling the height of the tip in the Z direction, and then a signal with sample near-field optical or component information can be collected to a photoelectric detector by an external lens; the signal can also be reversely coupled into the optical fiber by the nanowire 4, the metal film covering layer 2 and the tapered probe fiber core 1 for collection. Meanwhile, the morphological information of the sample can be recovered by extracting the mechanical signal of the detection nanowire 4.
When the super-diffraction processing is carried out, the interaction between the sample and the needle point optical field can be enhanced by the nanowire 4 needle point local enhanced optical field, the processing of the material by the needle point local optical field can be realized by controlling the height of the needle point in the Z direction, the position of the probe in the Z direction is monitored, the probe is scanned, and the nano-scale processing of the complex pattern of the sample can be realized.
Claims (9)
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| Application Number | Priority Date | Filing Date | Title |
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| CN202010340370.5A CN111505342B (en) | 2020-04-26 | 2020-04-26 | A plasmonic probe combining tapered optical fibers with nanowires and its working method |
| PCT/CN2020/138715 WO2021218200A1 (en) | 2020-04-26 | 2020-12-23 | Conical optical fiber and nanowire combined plasmon probe and working method thereof |
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| CN202010340370.5A CN111505342B (en) | 2020-04-26 | 2020-04-26 | A plasmonic probe combining tapered optical fibers with nanowires and its working method |
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| CN111505342A CN111505342A (en) | 2020-08-07 |
| CN111505342B true CN111505342B (en) | 2021-07-13 |
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| CN111505342B (en) * | 2020-04-26 | 2021-07-13 | 西安交通大学 | A plasmonic probe combining tapered optical fibers with nanowires and its working method |
| CN112858729A (en) * | 2021-02-04 | 2021-05-28 | 西安交通大学 | Plasmon probe with conical optical fiber combined with semi-ring asymmetric nano slit and working method thereof |
| CN112964908B (en) * | 2021-02-04 | 2022-05-20 | 西安交通大学 | Scattering type tapered tip optical fiber probe for exciting and collecting near-field optical signals and working method thereof |
| CN113390790A (en) * | 2021-05-24 | 2021-09-14 | 西安交通大学 | Optical fiber nano probe with large length-diameter ratio and preparation method and application thereof |
| CN113376405A (en) * | 2021-06-04 | 2021-09-10 | 西安交通大学 | Optical fiber probe and assembling method thereof |
| CN114624483B (en) * | 2022-05-13 | 2022-08-02 | 苏州联讯仪器有限公司 | Telescopic chip probe and chip test system |
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- 2020-12-23 WO PCT/CN2020/138715 patent/WO2021218200A1/en active Application Filing
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