KR101497208B1 - Raman Spectroscopy System and Scanning Probe Microscopy System With Noble Metal Particle and Polarization Dependence Meaasurement in Nano-Scale - Google Patents

Abstract

The present invention provides a probe-enhanced Raman spectroscopy system using metal nanoparticles, a microscope using the same, and a measurement method thereof. The microscope is disposed proximate to the object to be measured and comprises a probe with a metal tip; A light source for irradiating light with the probe; Metal nanoparticles dispersed on an upper surface or a lower surface of the object to be measured to enhance an electromagnetic field caused by the light between the probe and the probe or an auxiliary probe disposed adjacent to the probe and enhancing an electromagnetic field with the probe; A light collecting part for collecting signals emitted from the object to be measured; And a detector for detecting a Raman spectrum of the collected signal, thereby enhancing the Raman spectroscopic signal by focusing the electromagnetic field between the probe and the nanoparticle, and realizing the nanometer scale spatial resolution.

Description

Technical Field [0001] The present invention relates to a Raman spectroscopy system using metal nanoparticles, a scanning probe microscope, and a method for measuring polarization dependence at a nanoscale. [0002]

The present invention relates to the realization of polarization dependence of Raman spectroscopy at nanoscale through efficient coupling of Raman spectroscopy system, scanning probe microscope and metal nanoparticles.

Raman spectroscopy is a spectroscopic technique used to observe vibration, rotation, and other low-frequency modes in a system. This is usually due to Raman scattering of monochromatic light such as lasers in the visible, near-infrared, or near-ultraviolet region.

When the light passes through the medium, part of the light is scattered and deviates from the traveling direction and travels in the other direction. The light scattered while maintaining the original energy is called Rayleigh scattering, The inelastic process that loses or gains is called Raman Scattering or inelastic scattering. When a molecule is illuminated, the molecule is excited and excited. The molecules in this excited state go down to the ground again in three ways. First, when all the energy of the incident light source is released to the ground state, energy of the same energy as that of the incident light is scattered and emitted, which is the Rayleigh scattering. On the other hand, the case of absorbing or releasing as much as the vibrational energy of molecules and returning to the ground state is called Raman scattering. At this time, transition of vibration state occurs. When a molecule absorbs vibrational energy and returns to the ground state, it is called a Stokes effect. Since the energy of the radiation is absorbed by the molecules, a lower energy, that is, a longer wavelength of light is scattered. On the other hand, when the molecule emits the vibration energy and returns to the ground state, it is called anti-stokes effect. Since the radiation has energy from the molecule, energy higher than the incident light, that is, This comes out in spawning. Through this Raman scattering process, energy exchange occurs between the incident light source and the material. The energy absorbed or released by a substance is closely related to the molecular structure that constitutes each material. Since the scattered light due to Raman scattering is inherent in each substance, the molecular structure of the substance can be inferred by analyzing the scattered light. In general, this change can be measured by observing how much light has lost or gained energy before and after spawning. The change in the spectrum before and after the scattering is referred to as Raman shift. The Raman shift corresponds to the vibration frequency of the molecule.

This Raman spectroscopy is a method of qualitative and quantitative analysis of each material by measuring the inherent vibration spectrum of the material and finding the unique spectrum of the material. In other words, Raman scattering is the inelastic scattering of photons that can provide vibrational fingerprints of molecules.

When the Raman spectroscopic method is combined with the AFM, the amplified Raman signal is generated only in a region in contact with the probe of the AFM, and high resolution Raman spectroscopy analysis is possible. Such a method is called TERS (Tip-Enhanced Raman Spectroscopy). Probe enhancement Raman spectroscopy is a spectroscopic technique that uses a very strongly increasing electric field at the tip of a noble-metal tip to capture the Raman spectrum of a few tens of nm around the tip.

The maximum spatial resolution obtained with the conventional TERS is about 10 to 20 nm. However, in order to measure the characteristics of the excitation process in a new aggregate nanostructure such as graphene nanoribbons, development of an innovative Raman measurement method that exceeds the spatial resolution of the conventional TERS is required.

FIG. 1 is a diagram showing a near-field line of a probe according to the prior art. As the electromagnetic field moves in the radial direction from the tip of the probe, the polarization direction of the enhanced electromagnetic field changes in the polarization direction It is impossible to discuss the symmetry of the Raman scattered light. For this reason, it is difficult to analyze Raman selectivity according to symmetry, which is the greatest advantage of Raman scattering. In addition, there is a limit to realizing a spatial resolution of 10 nm or less. The reason is that the reproducibility stability of the probe causing the electric field surface enhancement is poor, but more fundamentally, the distribution of the enhanced electromagnetic field in the probe is not localized. Therefore, existing TERS equipment lacks information on symmetry, but also has limited spatial resolution due to its light receiving structure.

Patent Document 1: Korean Patent Laid-Open Publication No. 10-2011-0064227 Patent Document 2: Korean Patent Laid-Open Publication No. 10-2011-7023287 Patent Document 3: PCT Patent Publication Disclosure WO 2006/089000

Carsten Georgi, Miriam Bohmler, Huihong Qian, Lukas Novotny, Achim Hartschuh, "Tip-Enhanced Near-Field Optical Microscopy of Carbon Nanotubes", Raman Imaging, Springer Series in Optical Sciences 168, 301 (2012)

A problem to be solved by the present invention is to provide a Raman spectroscopy system exhibiting nanometer resolution with both nanometer-scale spatial resolution and Raman selectivity.

According to an aspect of the present invention, there is provided a probe comprising: a probe having a metal tip; And metal nanoparticles dispersed on the upper or lower surface of the object to be measured.

According to another aspect of the present invention, there is provided a probe comprising: a probe disposed close to a workpiece and having a metal tip; And an auxiliary probe disposed at a position having a metal tip and showing an electromagnetic field enhancing effect with the probe.

According to another aspect of the present invention, there is provided a probe comprising: a probe having a metal tip and scanning a workpiece; A light source for emitting light to the object to be measured; Metal nanoparticles dispersed on an upper surface or a lower surface of the object to be measured to enhance an electromagnetic field caused by the light with the probe; A light collecting part for collecting signals emitted from the object to be measured; And a detector for detecting a Raman spectrum of the collected signal. The microscope uses a probe-enhanced Raman spectroscope.

According to another aspect of the present invention, there is provided a probe comprising: a probe having a metal tip and scanning a workpiece; A light source for emitting light to the object to be measured; An auxiliary probe having a metal tip and enhancing an electromagnetic field caused by the light with the probe; A light collecting part for collecting signals emitted from the object to be measured; And a detector for detecting a Raman spectrum of the collected signal. The microscope uses a probe-enhanced Raman spectroscope.

According to another aspect of the present invention, there is provided a method of measuring a microscope using the probe-enhanced Raman spectroscopy.

The method of measuring a microscope comprises the steps of: a) concentrating an electromagnetic field between the probe and the metal nanoparticle by irradiating light to the probe; b) scanning the measured object with the electromagnetic field concentrated in step a); c) collecting signals emitted from the object by the electromagnetic field in step b); d) detecting a Raman spectrum of the signal collected in step c); And e) analyzing the Raman spectrum.

The measurement method of the microscope can calculate the Raman selectivity by changing the relative positions of the probe and the metal nanoparticles and performing the steps a) to e).

According to still another aspect of the present invention, there is provided a method of measuring a microscope using probe-enhanced Raman spectroscopy, comprising the steps of: a) adjusting a distance, a position, or a relative position of the sub- b) concentrating the electromagnetic field between the probe and the auxiliary probe by irradiating the probe with light; c) scanning the measured object with the electromagnetic field concentrated in the step b); d) collecting signals emitted from the object by the electromagnetic field in step c); e) detecting a Raman spectrum of the signal collected in step d); And f) analyzing the Raman spectrum to provide a method of measuring a microscope using a probe-enhanced Raman spectroscope.

On the other hand, the metal nanoparticles are composed of metal particles exhibiting a surface strengthening effect, and particularly include noble metals such as gold, silver and palladium, and have a cubic shape, an octahedron, a dodecahedron, And the metal tip of the probe or the auxiliary probe may be formed of a noble metal such as gold, silver, or palladium having a large surface enhancement effect.

In addition, the light irradiated to the probe is preferably used for improving the spatial resolution and reducing unnecessary noise by using an evanescent field.

By concentrating the electromagnetic field between the probe and the noble metal nanoparticle or the auxiliary probe, the Raman spectroscopic signal can be enhanced, the nanometer spatial resolution can be realized, and the Raman selectivity can be calculated.

1 is a schematic diagram showing a conventional probe-enhanced Raman spectroscopy,
FIG. 2 is a schematic view showing a microscope using probe-enhanced Raman spectroscopy according to an embodiment of the present invention;
FIGS. 3 and 4 are schematic views showing probe-enhanced Raman spectroscopy using metal nanoparticles according to the present invention;
FIG. 5 is a schematic view showing an embodiment of measuring graphene nanoribbons using Raman spectroscopy of FIG. 4,
6 is a schematic diagram illustrating probe-enhanced Raman spectroscopy using a noble metal assist probe in accordance with an embodiment of the present invention;
Figures 7 and 8 are schematic diagrams illustrating probe enhancement Raman spectroscopy using a Noble metal assist probe in accordance with the present invention; And
9 and 10 are flowcharts illustrating a method of measuring a microscope using the Raman spectroscopy system according to the present invention.

BRIEF DESCRIPTION OF THE DRAWINGS The advantages and features of the present invention, and how to accomplish them, will become apparent by reference to the embodiments described in detail below with reference to the accompanying drawings. The present invention may, however, be embodied in many different forms and should not be construed as being limited to the embodiments set forth herein. Rather, these embodiments are provided so that this disclosure will be thorough and complete, and will fully convey the concept of the invention to those skilled in the art. Is provided to fully convey the scope of the invention to those skilled in the art, and the invention is only defined by the scope of the claims. Like reference numerals refer to like elements throughout the specification.

Although the terms first, second, third, etc. have been used in various embodiments of the present disclosure to describe a particular step or the like, it has only been used to distinguish certain steps, etc. from other steps, And the like.

The terminology used herein is for the purpose of illustrating embodiments and is not intended to be limiting of the present invention. In the present specification, the singular form includes plural forms unless otherwise specified in the specification. As used herein, the terms 'comprises' and / or 'comprising' do not exclude the presence or addition of one or more other elements, steps, operations and / or components, elements, steps, operations and / .

Further, the embodiments described herein will be described with reference to the drawings, which are ideal illustrations of the present invention. In the drawings, the thicknesses of the films and regions are exaggerated for an effective description of the technical content. Thus, the shape of the illustrations may be modified by manufacturing techniques and / or tolerances. Accordingly, the embodiments of the present invention are not limited to the specific forms shown, but also include changes in the shapes that are generated according to the manufacturing process. The regions illustrated in the figures have schematic attributes, and the shapes of the regions illustrated in the drawings are intended to illustrate specific types of regions of the elements and are not intended to limit the scope of the invention.

2 to 5 are schematic views for explaining a Raman spectroscopy system according to an embodiment of the present invention. FIG. 2 is a view showing an embodiment of a Raman spectroscopic microscope using nano-metal particles, FIGS. 3 and 4 schematically showing the arrangement of nano metal particles, the object to be measured and the probe, 5 is a view schematically showing an embodiment in which a graphene nanoribbons is used as an object to be measured.

The configuration of a microscope according to an embodiment of the present invention will be described with reference to FIG. The microscope of Fig. 2 is an embodiment of a Raman spectroscopic microscope using nano-metal particles, in which nanoparticles are disposed with a measured object interposed therebetween.

The probe enhancement Raman spectroscopy using metal nanoparticles according to the present invention can be applied to various types of nanoparticles such as a Scanning Tunneling Microscope, an Automotive Force Microscopy, a Near Field Optics Microscopy, a Scaning Probe Microscope, And the like, and is not limited to the kind of microscope.

The microscope according to the present invention makes it possible to measure the physical properties of nanostructures, and thus can be used for various nanostructures such as graphene nanoribbons, non-uniform magnetic materials on nanometer scale, ceramic superconductors, giant magnetoresistance materials, Nano Rod), an ultrathin film, a molecule forming a living body, and the like are examples of the object 200 to be measured, and the kind of the object to be measured is not limited.

As shown, the microscope using probe-enhanced Raman spectroscopy according to the present invention includes a cantilever 140 having a probe 141 for scanning the object 200, a light source 110 for irradiating light to the probe 141 ), A metal nano particle 120 dispersed on a scanning substrate, a light collecting part 151 for collecting a signal radiated from the measurement object 200, and detection parts 152 and 153 for detecting a Raman spectrum of the collected signal .

The probe 141 is attached to the end of the cantilever 140 of the microscope and scans the measurement object 200. The cantilever 140 is driven by the probe control unit 142 to adjust its height and position. The tip of the probe 141 is preferably formed of a noble metal such as gold, silver, or palladium as described above. Further, the tip portion can be formed into a geometric structure capable of maximizing the surface reinforcement effect.

The object to be measured 200 is disposed on the scanning substrate 130. When the light source 110 irradiates the light after the object 200 is placed on the scanning substrate 130, an electromagnetic field is radiated to the object 200 to grasp the material structure of the object 200 have. The scanning substrate 130 can be adjusted by the substrate control unit 132. [

And an optical path adjustment unit 131 for adjusting the optical path of the incident light 111 and the reflected light 112 from the light source 110. [ The light path adjustment unit 131 may be formed of a special prism.

2 or 3, the metal nanoparticles 120 may be dispersed on the substrate 130, and then the measured object 200 may be disposed thereon. Alternatively, as shown in FIG. 4 or 5, The metal nanoparticles 120 may be dispersed on the substrate 200 after the measurement object 200 is disposed on the substrate 200 as shown in FIG. The metal nanoparticles 120 concentrate the electromagnetic field radiated from the probe 141 to enhance the electromagnetic field. 3 shows that the metal nanoparticles 120 are positioned on the bottom surface of the object to be measured 200 so that a vertical field is formed between the attachment of the metal nanoparticles 120 and the tip of the probe 141, FIG. 4 is a schematic view showing that the measurement object 200 is located in a vertical position. FIG. 4 is a view showing a horizontal field formed between the tip of the metal nanoparticle 120 and the tip of the probe 141, The metal nanoparticles 120 and the probe 141 are positioned such that the measured object 200 is positioned in an electromagnetic field concentrated between the metal nanoparticles 120 and the probe 141. [ It is preferable to adjust the positions of the probe 141 and the object 200 to be measured.

The metal nanoparticles 120 are made of a noble metal exhibiting a surface strengthening effect such as gold, silver, and palladium. More preferably, the metal nanoparticles 120 have a size of 5 nm or more and 10 nm or less, a hexagonal shape, It is preferable that it is formed as a sieve. The shape of the metal nanoparticles 120 is not limited to the shape of the polyhedrons listed above, and a shape capable of maximizing the surface reinforcement effect can be selected.

The light source 110 irradiates light toward the measurement object 200, and it is preferable that the laser light can be used to generate a destructive wave. Evanescent Wave and Evanescent Field are phenomena that occur in the opposite direction of propagation when total reflection occurs at the interface between two media. The generation of Raman spectroscopy using extermination waves can greatly improve spatial resolution. It is not limited to the type of light.

The light collecting part 151 is an optical device for collecting scattered light generated between the measurement object 200 and incident light, and the collected scattered light is transmitted to the detection part 152 and 153. The detection unit is composed of a spectrometer (152), a CCD (153), and the like, and detects the Raman spectrum.

(CPU) 160 that is configured to control the operation of the associated parts of the microscope and process the detected data, and one or more displays (not shown) that provide immediate feedback of the data being read to the user have.

The microscope according to the present invention is formed such that the space between the metal nanoparticles 120 and the probe 141 is separated from the Raman scattering light collecting part 151. Thus, the position of the probe-particle can be freely controlled, and the polarization direction can be freely controlled.

2, the nanoparticles 120 are dispersed on the substrate 130 as shown in FIG. 3 so that the measured object 200 is positioned between the probe 141 and the nanoparticles 120. In FIGS. 4 and 5 The nanoparticles 120 may be dispersed on the object 200 to concentrate the electromagnetic field from the probe 141 to the object 200 in the radial direction.

The probe 141 and the metal nanoparticles 120 are preferably made of a noble metal exhibiting surface strengthening effect. Noble metals include gold, silver, and palladium. The metal nanoparticles 120 preferably have a size of 5 nm to 10 nm and are formed in a shape including an acute angle attachment such as a cube, an octahedron, a dodecahedron, or a regular dodecahedron.

Between two metal nanoparticles with a small radius of curvature, the electromagnetic wave enhancement effect is about 100 times stronger than that of a single nanoparticle. Therefore, as shown in the figure, between the probe 141 having a small radius of curvature and the metal nanoparticles 120, there is an electromagnetic wave enhancing effect, and the electromagnetic wave enhancing effect is about 100 (ninety degrees) compared with the case of the TERS (Tip Enahanced Raman Spectroscopy) There is a reinforcement effect to the ship. With such a locally strong electromagnetic field, Raman scattering can have a very high spatial resolution of 10 nm or less.

Also, the direction of the electromagnetic field does not go radially in the probe 141 as in the conventional Raman spectroscopy system shown in FIG. 1, but rather between the metal nanoparticles 120 and the probe 141 as shown in FIGS. In the direction of the connecting line.

Since the direction of the electromagnetic field of the conventional TERS is radial, the polarization direction of the electromagnetic field enhanced by the probe can not take into account the symmetry of the Raman scattered light irrespective of the polarization direction of the light incident from the outside. However, Since the electromagnetic field moves in the direction of the connecting line connecting the metal nanoparticles 120 and the probe, the selectivity according to the symmetry of the Raman scattered light can be analyzed. In addition, there is an advantage that the spatial resolution can be increased because the distribution of the electromagnetic field becomes more localized between the probe and the particle.

5, the silver nanoparticles 120 'are dispersed on the graphene nanoribbons 200' as shown in FIG. 5, and the SPM probe 200 ' (141 ') are measured close to each other. As the Raman selectivity can be used, it is possible to have the momentum spatial information (symmetry) impossible with the conventional SPM, so that the nanostructures exhibiting very different electronic characteristics such as graphene nanoribbles in shape and position and the nonuniformity of the nanoscale It becomes possible to measure strong phase-related substances that greatly affect the properties of the material.

FIG. 9 is a flow chart schematically illustrating a measurement method of a microscope using the probe-enhanced Raman spectroscopy of FIG. 2; As shown, the method includes positioning the object to be measured 200 on a scanning substrate on which the nano metal particles 120 are dispersed (S100), positioning the probe 141 close to the object to be measured 200 (S200) of concentrating the electromagnetic field between the probe 141 and the metal nanoparticles 120 by irradiating the probe 141 with the light 110 from the light source 110. In step S200, (S400) of collecting a signal emitted from the object 200 by interaction between the electromagnetic field and the object in step S300, and detecting a Raman spectrum of the signal collected in step S400 Step S500, and processing the detected Raman spectrum data (S600).

In step S100, the nanometer-sized metal particles 120 and 120 'may be dispersed after the measurement object 200 or 200' is disposed on the substrate 130 as shown in FIG. 4 or 5. The position of the metal nanoparticles 120 can be selected according to the characteristics of the object 200 to be measured.

The method of measuring a microscope using the probe-enhanced Raman spectroscope according to the present invention may further include the steps of changing the relative positions of the probe 141 and the metal nanoparticles 120 and performing the steps S200 to S500 in order to calculate Raman selectivity .

The relative position between the metal nanoparticles 120 and the noble metal probe 141 is changed to change the relative position of the metal particle 120 and the probe 141 to change the polarized light of the incident light. .

FIG. 6 is a view showing the structure of a microscope according to another embodiment of the present invention. As shown in FIG. 6, the TERS microscope uses an auxiliary probe having noble metal tip instead of using the metal nanoparticles described above. The microscope of FIG. 6 is an embodiment in which the probe 141 and the auxiliary probe 170 are disposed with the measured object 200 therebetween. Since the configuration of the TERS microscope is similar to that of the TERS microscope except that the auxiliary probe 170 is used in place of the metal nanoparticles 120, the description of the similar configuration is redundant and will be omitted.

The TERS using the auxiliary probe of FIG. 6 includes an auxiliary probe 170 and an auxiliary probe control 171. The auxiliary probes 170 may be arranged in the same direction with respect to the object 200 "as shown in Figure 8. The auxiliary probe 170 may be formed of a material such as noble metal nanoparticles, When an object having a nonuniform surface structure such as the object to be measured 200 "shown in Fig. 8 is measured, an auxiliary probe is provided at a position where the intensity of the electromagnetic field can be greatly increased. (170) can be freely adjusted and arranged

The auxiliary probe control unit 171 adjusts the position of the auxiliary probe 170 with respect to the probe 141 and the relative position with respect to the measured object 200 or 200 in accordance with the control signal of the CPU to increase the electromagnetic field The auxiliary probe control unit 171 can adjust the auxiliary probe 170 to move in accordance with the movement of the probe when the object 200 is scanned.

FIG. 10 is a flow chart schematically showing a method of measuring a microscope using the probe-enhanced Raman spectroscopy of FIG. As shown, the method includes the steps of placing the object 200 on the scanning substrate 130 (S110), adjusting the position of the probe 141 and the auxiliary probe 170, (S310) of focusing the electromagnetic field between the probe 141 and the auxiliary probe 170 by irradiating the light 110 from the light source 110 to the probe 141 (S310) (S510) of collecting signals emitted from the object (200) by interaction between the electromagnetic field and the object in operation S410 (S510), scanning the object Detecting a Raman spectrum of the signal (S610), and processing the detected Raman spectrum data (S710).

The method of measuring the microscope using the probe-enhanced Raman spectroscope according to the present invention may calculate the Raman selectivity by changing the relative positions of the probe 141 and the noble metal assist probe 170 and performing the steps S310 to S710 .

When the Raman spectroscopy system according to the embodiment of FIG. 6 is applied, the enhancement effect of the electromagnetic wave is shown to be about 100 times higher than that of the conventional TERS between the tip of the probe 141 having a small radius of curvature and the tip of the auxiliary probe 170 , A locally strong electromagnetic field allows Raman scattering to have very high spatial resolution of less than 10 nm. In addition, the position of the auxiliary probe 170 can be freely adjusted to a position where the electromagnetic field enhancing effect is maximized, so that the spatial resolution can be further increased.

TERS according to an embodiment of the present invention allows study of graphene nanoribbons, strong phase relationships and nanoscale non-uniformity of oxide superconductors. Unlike SPM, it has symmetry, so it can study nanostructures with very different electronic properties such as graphene nanoribbons, and strong phase-related materials that have a large influence on the quality of the material.

In addition, the Raman spectroscopic system according to the present invention enhances the electromagnetic field radiated from the probe by using noble metal particles or a noble metal assisted probe to enable the nanoscale spatial resolution, and thus can provide a non-uniform magnetic substance, a ceramic superconductor, , Semiconductors, nano-rods, thin films, and other materials with nanoscale spatial resolution.

Also, the Raman selectivity can be used to determine the symmetry of the measured low energy excitation process. Allowing the nanostructures to be individually Raman spectroscopically. The polarization direction of the incident light scattered light can be selected on the nanometer scale and the symmetry of the low energy excitation process can be determined using the Raman selectivity. Therefore, the electrical characteristics of the nanostructure can be studied using the Raman spectroscopic system according to the present invention .

110: light source 111: incident light
112: reflected light 120: metal nanoparticles
130: scanning substrate 131: optical device
132: substrate controller 140: cantilever
141: Probe 142: Probe control
151: concentrator 152: spectroscope
153: CCD 160: CPU
170: Auxiliary probe 171: Auxiliary probe control
200: Measured object

Claims (20)

In a probe-enhanced Raman spectroscopy system,
A scanning substrate on which an object to be measured is disposed;
A light source and a light path adjusting unit for generating a demodulating wave in the object to be measured;
A probe disposed close to the object to be measured and having a metal tip; And
And one or more metal nanoparticles dispersed and arranged on an upper surface of the object to be measured or an upper surface of the scanning substrate. The method according to claim 1,
Wherein the metal nanoparticles are metal particles that concentrate the electromagnetic field radiated from the probe. 3. The method of claim 2,
Wherein the metal nanoparticles or the metal tip comprises one selected from the group consisting of gold, silver, and palladium. The method according to claim 1,
Wherein the metal nanoparticles have a size of 5 nm or more and 10 nm or less. The method according to claim 1,
Wherein the metal nanoparticles are any one selected from the group consisting of a cube, an octahedron, a dodecahedron, and a regular dodecahedron. delete In a probe-enhanced Raman spectroscopy system,
A probe disposed proximate to the object and having a metal tip;
A light source and a light path adjusting unit for generating an extinction field in the object to be measured; And
And an auxiliary probe disposed at a position on the measured object that enhances an electromagnetic field radiated from the probe, the auxiliary probe having a metal tip. 8. The method of claim 7,
Wherein the metal tip of the probe and the metal tip of the auxiliary probe comprise any one of gold, silver, and palladium. In a microscope using probe-enhanced Raman spectroscopy,
A scanning substrate on which an object to be measured is disposed;
A light source and a light path adjusting unit for generating an extinction field in the object to be measured;
A probe having a metal tip and scanning the workpiece;
Metal nanoparticles dispersed on an upper surface of the object to be measured or on an upper surface of the scanning substrate to enhance an electromagnetic field radiated from the probe;
A light collecting part for collecting a signal scattered from the object to be measured; And
And a detector for detecting a Raman spectrum of the collected signal. delete delete In a microscope using probe-enhanced Raman spectroscopy,
A probe having a metal tip and scanning a workpiece;
A light source and a light path adjusting unit for generating an extinction field in the object to be measured;
An auxiliary probe disposed at a position on the measured object for enhancing an electromagnetic field radiated from the probe, the probe having a metal tip;
A light collecting part for collecting signals emitted from the object to be measured; And
And a detector for detecting a Raman spectrum of the collected signal. 13. The method of claim 12,
Further comprising an auxiliary probe control unit for adjusting a distance, a position, or a relative position of the auxiliary probe with respect to the object to be measured with respect to the object to be measured. delete delete delete A microscope measuring method using the probe-enhanced Raman spectroscope of claim 9,
a) driving the light source to generate an extinction field in the object to be measured;
b) concentrating the electromagnetic field between the probe and the metal nanoparticle by bringing the probe into proximity with the object to be measured in which the extinction field is formed in the step a);
c) scanning the measured object with the electromagnetic field concentrated in the step b);
d) collecting signals emitted from the object by the electromagnetic field in step c);
e) detecting a Raman spectrum of the signal collected in step d); And
f) analyzing the Raman spectrum to determine the intensity of the Raman spectrum. 18. The method of claim 17,
Further comprising the step of changing the relative positions of the probe and the metal nanoparticles and performing the steps a) to f) to calculate the Raman selectivity. A microscope measuring method using the probe-enhanced Raman spectroscope of claim 12,
a) driving the light source to generate an extinction field in the object to be measured;
b) concentrating the electromagnetic field by bringing the probe into proximity with the object to be measured in which the extinction field has been generated in step a), adjusting the distance between the probe and the probe, and the relative position with respect to the object;
c) scanning the measured object with the electromagnetic field concentrated in the step b);
d) collecting signals emitted from the object by the electromagnetic field in step c);
e) detecting a Raman spectrum of the signal collected in step d); And
f) analyzing the Raman spectrum to determine the intensity of the Raman spectrum. 20. The method of claim 19,
The method of measuring a microscope using a probe-enhanced Raman spectroscope that changes the relative positions of the probe and the auxiliary probe and performs the steps a) through f) to calculate a Raman selectivity.

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