CN111486663A - 一种适用于电子气工厂的制氮机 - Google Patents

一种适用于电子气工厂的制氮机 Download PDF

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CN111486663A
CN111486663A CN202010268201.5A CN202010268201A CN111486663A CN 111486663 A CN111486663 A CN 111486663A CN 202010268201 A CN202010268201 A CN 202010268201A CN 111486663 A CN111486663 A CN 111486663A
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air
nitrogen
tower
oxygen
cooling
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CN111486663B (zh
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邓韬
王开兵
钟小禹
刘巍
王君
全诗林
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Guangzhou Guangzhou Steel Gas Energy Co ltd
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Guangzhou Guangzhou Steel Gas Energy Co ltd
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    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F25—REFRIGERATION OR COOLING; COMBINED HEATING AND REFRIGERATION SYSTEMS; HEAT PUMP SYSTEMS; MANUFACTURE OR STORAGE OF ICE; LIQUEFACTION SOLIDIFICATION OF GASES
    • F25J—LIQUEFACTION, SOLIDIFICATION OR SEPARATION OF GASES OR GASEOUS OR LIQUEFIED GASEOUS MIXTURES BY PRESSURE AND COLD TREATMENT OR BY BRINGING THEM INTO THE SUPERCRITICAL STATE
    • F25J3/00—Processes or apparatus for separating the constituents of gaseous or liquefied gaseous mixtures involving the use of liquefaction or solidification
    • F25J3/02—Processes or apparatus for separating the constituents of gaseous or liquefied gaseous mixtures involving the use of liquefaction or solidification by rectification, i.e. by continuous interchange of heat and material between a vapour stream and a liquid stream
    • F25J3/04—Processes or apparatus for separating the constituents of gaseous or liquefied gaseous mixtures involving the use of liquefaction or solidification by rectification, i.e. by continuous interchange of heat and material between a vapour stream and a liquid stream for air
    • F25J3/04248—Generation of cold for compensating heat leaks or liquid production, e.g. by Joule-Thompson expansion
    • F25J3/04375—Details relating to the work expansion, e.g. process parameter etc.
    • F25J3/04393—Details relating to the work expansion, e.g. process parameter etc. using multiple or multistage gas work expansion
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    • F25J—LIQUEFACTION, SOLIDIFICATION OR SEPARATION OF GASES OR GASEOUS OR LIQUEFIED GASEOUS MIXTURES BY PRESSURE AND COLD TREATMENT OR BY BRINGING THEM INTO THE SUPERCRITICAL STATE
    • F25J3/00—Processes or apparatus for separating the constituents of gaseous or liquefied gaseous mixtures involving the use of liquefaction or solidification
    • F25J3/02—Processes or apparatus for separating the constituents of gaseous or liquefied gaseous mixtures involving the use of liquefaction or solidification by rectification, i.e. by continuous interchange of heat and material between a vapour stream and a liquid stream
    • F25J3/04—Processes or apparatus for separating the constituents of gaseous or liquefied gaseous mixtures involving the use of liquefaction or solidification by rectification, i.e. by continuous interchange of heat and material between a vapour stream and a liquid stream for air
    • F25J3/04006—Providing pressurised feed air or process streams within or from the air fractionation unit
    • F25J3/04012—Providing pressurised feed air or process streams within or from the air fractionation unit by compression of warm gaseous streams; details of intake or interstage cooling
    • F25J3/04018—Providing pressurised feed air or process streams within or from the air fractionation unit by compression of warm gaseous streams; details of intake or interstage cooling of main feed air
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    • F25J3/04024—Providing pressurised feed air or process streams within or from the air fractionation unit by compression of warm gaseous streams; details of intake or interstage cooling of purified feed air, so-called boosted air
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    • F25J3/04157—Afterstage cooling and so-called "pre-cooling" of the feed air upstream the air purification unit and main heat exchange line
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    • F25J3/04284—Generation of cold for compensating heat leaks or liquid production, e.g. by Joule-Thompson expansion using internal refrigeration by open-loop gas work expansion, e.g. of intermediate or oxygen enriched (waste-)streams
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Abstract

本发明涉及电子气的技术领域，更具体地，涉及一种适用于电子气工厂的制氮机，包括空气过滤及压缩系统、空气预冷系统、空气纯化系统、换热器系统、氧氮精馏系统及后备系统：空气先进入空气过滤器去除杂质，后送往空气压缩机压缩，空气自下而上流出空气冷却塔进入空气纯化系统，纯化后的空气经换热器冷却到液化温度后进入第一塔参与精馏，精馏得到的氮气作为氮气产品送用户，少量液氮送入后备系统，精馏得到的富氧液空可回流至空气纯化系统和空气预冷系统。本发明具有宽泛的负荷调节范围，可节约能耗；氧氮精馏系统采用双塔设计，可提高氮气提取率；吸附器内设置多层填料层，可满足产品气高标准要求；关键设备一用一备，可避免设备宕机对制氮供气的影响。

Description

一种适用于电子气工厂的制氮机
技术领域
本发明涉及电子气的技术领域，更具体地，涉及一种适用于电子气工厂的制氮机。
背景技术
目前，随着电子气行业对氮气的性能要求越来越严苛，包括氮气供应连续性、氮气供应可靠性及氮气产品杂质含量等要求。现有的制氮机往往很难全方位满足电子气供气要求，具体而言：(1)现有制氮机在有设备宕机时，制氮机的运行都会受到不良影响，氮气供应连续性和可靠性难以保证；(2)现有制氮机无法去除氮气产品中的CO杂质，CO杂质的去除需要后续增加纯化器，设备复杂且难以保证氮气产品的纯度；(3)电子气客户用气往往具有独有的爬坡特性，用气量随机台和产线逐步增加而增加，且每一个用气量具有阶段性特征，爬坡持续时间往往需要1～2年，甚至更长，现有制氮机的负荷调节范围窄，导致大量能耗浪费。
发明内容
本发明的目的在于克服现有技术中的不足，提供一种适用于电子气工厂的制氮机，可保证氮气供应的连续性及可靠性，且无需增设纯化器即可保证氮气产品纯度。
为解决上述技术问题，本发明采用的技术方案是：
提供一种适用于电子气工厂的制氮机，包括空气过滤及压缩系统、空气预冷系统、空气纯化系统、换热器系统、氧氮精馏系统及后备系统：
所述空气过滤及压缩系统包括空气过滤器及空气压缩机，所述空气过滤器设有空气入口，所述空气过滤器与空气压缩机连接，所述空气压缩机的出口端与空气预冷系统的入口端连接，所述空气过滤器及空气压缩机均为至少两组；
所述空气预冷系统包括空气冷却塔、水冷塔、至少两台冷却水泵、至少两台冷冻水泵、及冷水机组，所述空气冷却塔设有与冷却水泵连接的冷却水进口以及与冷却机组连接的冷冻水进口，所述冷冻水进口位于冷却水进口上方，所述冷却水泵与空气冷却塔连接，所述水冷塔、冷冻水泵、冷水机组及冷冻水进口顺次连通，所述空气冷却塔顶部设有与空气纯化系统连接的出气口，所述入口端设于空气冷却塔的下部；
所述空气纯化系统包括与所述出气口连通的吸附器，所述吸附器内设有用于吸附杂质气体的填料层，所述吸附器的出口端与换热器系统连通；
所述换热器系统包括换热器及过冷器，吸附器出口端的纯化空气经换热器冷却到液化为温度后的液化空气进入氧氮精馏系统；
所述氧氮精馏系统包括自下而上设置的第一塔、第一冷凝蒸发器、第二塔及第二冷凝蒸发器，所述液化空气进入第一塔精馏在第一塔顶部得到纯氮气、在第一塔底部得到富氧液空，所述过冷器的一端与第一塔底部连通，过冷器的另一端与第一冷凝蒸发器、第二冷凝蒸发器连通，所述第一塔的顶部与换热器、第一冷凝蒸发器连通，所述第一冷凝蒸发器与后备系统连接；
所述后备系统包括顺次连接的自动调压切换系统、汽化器、真空压力储槽及液氮储槽。
本发明的适用于电子气工厂的制氮机，空气先由空气入口进入空气过滤器去除空气中的灰尘和机械杂质，后送往空气压缩机压缩至所需压力后进入空气冷却塔，空气自下而上先后经冷却水和冷冻水冷却后流出空气冷却塔，空气中剩余的杂质如H2O、CO2、CO、N2O以及有害的微量碳氢化合物在通过吸附器时被吸附去除，纯化后的空气经换热器冷却到液化温度后进入第一塔参与精馏，经第一塔精馏后在第一塔底部得到富氧液空，在第一塔顶部得到纯氮气，底部的富氧液空经过冷器过冷后可进入第一冷凝蒸发器、第二冷凝蒸发器中作为冷源，第一塔顶部的纯氮气一部分作为氮气产品经换热器复热后送用户，其余则进入第一冷凝蒸发器中被富氧液空冷凝为液氮，液氮一部分作为回流液参与第一塔精馏，一部分流至后备系统。本发明的空气过滤及压缩系统中设置至少两组空气压缩机，可根据用户的用气计划通过分配多台空气压缩机的空气压缩量以调整运行负荷；氧氮精馏系统采用双塔设计，可有效提高氮气的提取率；本发明制氮机的运行设备采用一用一备的设计形式，在其中一运行设备宕机时可启动备用设备，可增加制氮机运行的可靠性。
进一步地，所述空气过滤器及空气压缩机为两组，两组空气压缩机并联设置，制氮机的负荷调节范围为30％～105％。空气压缩机可采用大小不均衡的配置，可根据客户逐渐上升的用气计划，通过分配两台空气压缩机的空气压缩量实现30％-105％超宽运行调整负荷，既满足可靠性，又充分考虑到用气客户用气量爬坡阶段的最低开机负荷经济性，可节约大量能耗。
进一步地，所述冷却水泵为两台，所述冷冻水泵为两台，所述冷却水泵、水冷塔均与循环水池连通。冷却水泵、冷冻水泵为制氮机的关键设备，均设置为两台，一用一备，避免其中一台冷却水泵、冷冻水泵故障对氮气供应连续性和可靠性的影响，空气冷却塔产生的冷却水可从空气冷却塔的底部排出至循环水池，循环利用，节约能耗。
进一步地，所述水冷塔底部、空气冷却塔底部均设有液位控制系统，所述液位控制系统包括与控制器连接的液位计和自动液位控制阀。液位计和自动液位控制阀联合自动控制水冷塔和空气冷却塔内的液位，控制简便。
进一步地，所述冷却水进口处的冷却水进料温度不高于32℃，冷却水流经水冷塔的第一冷冻水出料温度不高于20℃，流经冷水机组的第二冷冻水出料温度不高于8.5℃。在调节工况时，冷却水流先后经水冷塔和冷水机组两次降温获得温度更低的冷冻水，如此，从空气冷却塔底部进入的压缩空气自下而上流动先后经冷却水、冷冻水两次降温，能够获得很好的空气预冷效果。
进一步地，所述吸附器至少为两组，所述吸附器连接有电加热器，电加热器加热得到的加热空气送入吸附器中再生吸附器内的分子筛。吸附器至少为两组，电加热器至少两组，一用一备，电加热器用于分子筛再生，至少两组吸附器中至少一组吸附器工作，其他吸附器再生，从而保证制氮过程的连续性。
进一步地，所述吸附器内填料层包括用于吸附脱除H2O的第一吸附层、用于吸附CO的第二吸附层以及用于吸附CO2的第三吸附层，所述第一吸附层内装填有活性氧化铝，所述第二吸附层内装填有锰铜催化剂，所述第三吸附层内装填有分子筛。空气中剩余的杂质如H2O、CO2、CO、N2O以及有害的微量碳氢化合物在通过吸附器时被吸附去除，可满足电子气行业对产品中杂质含量的高标准要求。
进一步地，所述第二塔的顶部设有接液槽，所述接液槽与第一塔、第二塔连通，所述接液槽与第一塔之间连接有液氮泵。
进一步地，所述氧氮精馏系统还包括膨胀机，所述第二冷凝蒸发器顶部产生的富氧空气经过冷器、换热器复热后流入至膨胀机膨胀制冷，膨胀后的富氧空气再次进入换热器复热后流出至空气预冷系统和空气纯化系统。第二冷凝蒸发器内的富氧液空受热蒸发为富氧空气，在第二冷凝蒸发器顶部抽取富氧空气进入换热器复热至一定温度后去膨胀机膨胀制冷，膨胀后的富氧空气再次经过换热器复热后流出；其中，部分富氧空气可作为空气纯化系统的再生气，其余的可送入空气预冷系统回收冷量。
进一步地，所述第一冷凝蒸发器、第二冷凝蒸发器均为板翅换热器。板翅换热器是为获得较大的换热面积所作出的优选，并不作为限制性规定。
进一步地，所述换热器为板翅换热器，所述换热器包括第一富氧空气通道、第二富氧空气通道、纯化空气通道以及产品氮气通道，所述纯化空气通道与空气纯化系统连接，所述产品氮气通道连接于第一塔的顶部，所述第一富氧空气通道连接于过冷器与膨胀机输入端之间，所述第二富氧空气通道与膨胀机输出端连接。
与现有技术相比，本发明的有益效果是：
本发明的适用于电子气工厂的制氮机，可根据客户逐渐上升的用气计划，通过分配两台空气压缩机的空气压缩量实现30％-105％超宽运行调整负荷，既满足可靠性，又充分考虑到用气客户用气量爬坡阶段的最低开机负荷经济性，可节约大量能耗和大量投资费用；
本发明的适用于电子气工厂的制氮机的氧氮精馏系统采用双塔设计，可提高氮气提取率，降低精馏耗能；
本发明的适用于电子气工厂的制氮机的吸附器内设置有多层填料层，空气中剩余的杂质如H2O、CO2、CO、N2O以及有害的微量碳氢化合物在通过吸附器时被吸附去除，可满足电子气行业对产品气中杂质含量的高标准要求；
本发明的适用于电子气工厂的制氮机的关键设备都至少设置两组，一用一备，可防止设备宕机对制氮供气的影响，可增加制氮机的运行可靠性和氮气供气的连续性。
附图说明
图1为本发明的适用于电子气工厂的制氮机的示意图；
图2为空气过滤及压缩系统的结构示意图；
图3为空气预冷系统的结构示意图；
图4为空气纯化系统的结构示意图；
图5为换热器系统及氧氮精馏系统的结构示意图；
图6为后备系统的结构示意图；
附图中：1-空气过滤及压缩系统；11-空气过滤器；12-空气压缩机；2-空气预冷系统；21-空气冷却塔；22-水冷塔；23-冷却水泵；24-冷冻水泵；25-冷水机组；26-液位控制系统；3-空气纯化系统；31-吸附器；32-电加热器；33-放空消音器；4-换热器系统；41-换热器；42-过冷器；5-氧氮精馏系统；51-第一塔；52-第一冷凝蒸发器；53-第二塔；54-第二冷凝蒸发器；55-膨胀机；56-接液槽；57-液氮泵；6-后备系统；61-汽化器；62-真空压力储槽；63-液氮储槽；64-远程自动控制调压阀；65-自力式调压阀；66-安全阀；67-转注泵。
具体实施方式
下面结合具体实施方式对本发明作进一步的说明。其中，附图仅用于示例性说明，表示的仅是示意图，而非实物图，不能理解为对本专利的限制；为了更好地说明本发明的实施例，附图某些部件会有省略、放大或缩小，并不代表实际产品的尺寸；对本领域技术人员来说，附图中某些公知结构及其说明可能省略是可以理解的。
本发明实施例的附图中相同或相似的标号对应相同或相似的部件；在本发明的描述中，需要理解的是，若有术语“上”、“下”、“左”、“右”等指示的方位或位置关系为基于附图所示的方位或位置关系，仅是为了便于描述本发明和简化描述，而不是指示或暗示所指的装置或元件必须具有特定的方位、以特定的方位构造和操作，因此附图中描述位置关系的用语仅用于示例性说明，不能理解为对本专利的限制，对于本领域的普通技术人员而言，可以根据具体情况理解上述术语的具体含义。
实施例
如图1至图6所示为本发明的适用于电子气工厂的制氮机的实施例，包括空气过滤及压缩系统1、空气预冷系统2、空气纯化系统3、换热器系统4、氧氮精馏系统5及后备系统6：
空气过滤及压缩系统1包括空气过滤器11及空气压缩机12，空气过滤器11设有空气入口，空气过滤器11与空气压缩机12连接，空气压缩机12的出口端与空气预冷系统2的入口端连接，空气过滤器11及空气压缩机12均为至少两组；
空气预冷系统2包括空气冷却塔21、水冷塔22、至少两台冷却水泵23、至少两台冷冻水泵24、及冷水机组25，空气冷却塔21设有与冷却水泵23连接的冷却水进口以及与冷却机组连接的冷冻水进口，冷冻水进口位于冷却水进口上方，冷却水泵23与空气冷却塔21连接，水冷塔22、冷冻水泵24、冷水机组25及冷冻水进口顺次连通，空气冷却塔21顶部设有与空气纯化系统3连接的出气口，入口端设于空气冷却塔21的下部；
空气纯化系统3包括与出气口连通的吸附器31，吸附器31内设有用于吸附杂质气体的填料层，吸附器31的出口端与换热器系统4连通；
换热器系统4包括换热器41及过冷器42，吸附器31出口端的纯化空气经换热器41冷却到液化为温度后的液化空气进入氧氮精馏系统5；
氧氮精馏系统5包括自下而上设置的第一塔51、第一冷凝蒸发器52、第二塔53及第二冷凝蒸发器54，液化空气进入第一塔51精馏在第一塔51顶部得到纯氮气、在第一塔51底部得到富氧液空，过冷器42的一端与第一塔51底部连通，过冷器42的另一端与第一冷凝蒸发器52、第二冷凝蒸发器54连通，第一塔51的顶部与换热器41、第一冷凝蒸发器52连通，第一冷凝蒸发器52与后备系统6连接；
后备系统6包括顺次连接的自动调压切换系统、汽化器61、真空压力储槽62及液氮储槽63。
本实施例实施时，空气先进入空气过滤器11去除空气中的灰尘和机械杂质，后送往空气压缩机12压缩至所需压力后进入空气冷却塔21，空气自下而上先后经冷却水和冷冻水冷却后流出空气冷却塔21，空气中剩余的杂质如H2O、CO2、CO、N2O以及有害的微量碳氢化合物在通过吸附器31时被吸附去除，纯化后的空气经换热器41冷却到液化温度后进入第一塔51参与精馏，经第一塔51精馏后在第一塔51底部得到富氧液空，在第一塔51顶部得到纯氮气，底部的富氧液空经过冷器42过冷后可进入第一冷凝蒸发器52、第二冷凝蒸发器54中作为冷源，第一塔51顶部的纯氮气一部分作为氮气产品经换热器41复热后送用户，其余则进入第一冷凝蒸发器52中被富氧液空冷凝为液氮，液氮一部分作为回流液参与第一塔51精馏，一部分流至后备系统6。
如图2所示，空气过滤器11及空气压缩机12为两组，两组空气压缩机12并联设置，制氮机的负荷调节范围为30％～105％。具体地，空气过滤器11与空气压缩机12连接后与出气管道连通，压缩后空气经出气管道与空气预冷系统2连接，空气压缩机12与出气管道之间可设置阀门以分配两台空气压缩机12的空气压缩量，且本实施例空气压缩机12采用大小不均衡的配置，如此，可根据客户逐渐上升的用气计划，通过分配两台空气压缩机12的空气压缩量实现30％-105％超宽运行调整负荷，既满足可靠性，又充分考虑到用气客户用气量爬坡阶段的最低开机负荷经济性，可节约大量能耗。本实施例的空气过滤器11可选用市售自洁式空气过滤器11。
如图3所示，本实施例的空气预冷系统2包括一台空气冷却塔21、一台水冷塔22、两台冷却水泵23、两台冷冻水泵24、一台冷水机组25，冷却水流先后经水冷塔22和冷水机组25两次降温获得温度更低的冷冻水，如此，从空气冷却塔21底部进入的压缩空气自下而上流动先后经冷却水、冷冻水两次降温，能够获得很好的空气预冷效果，空气冷却塔21产生的冷却水可从空气冷却塔21的底部排出至循环水池，循环利用。本实施例中，冷却水进口处的冷却水进料温度不高于32℃，冷却水流经水冷塔22的第一冷冻水出料温度不高于20℃，流经冷水机组25的第二冷冻水出料温度不高于8.5℃。冷却水泵23、冷冻水泵24均为制氮机的关键设备，均设置为两台，一用一备，避免其中一台冷却水泵23、冷冻水泵24故障对氮气供应连续性和可靠性的影响。
其中，在水冷塔22中，冷却水从水冷塔22顶部导入，经填料层被来自氧氮精馏系统5的富氧空气冷却，富氧空气从填料层的下方导入。由于富氧空气中不含水，冷却水在水冷塔22中与富氧空气接触过程中，除了直接被富氧空气冷却之外，由于水份蒸发入富氧空气中带走大量热量，导致冷却水温度进一步降低。
另外，水冷塔22底部、空气冷却塔21底部均设有液位控制系统26，液位控制系统包括与控制器连接的液位计和自动液位控制阀。由液位计和自动液位控制阀联合自动控制水冷塔22和空气冷却塔21内的液位，控制简便且可保证水冷塔22和空气冷却塔21的工作安全性。
如图4所示，本实施例的空气纯化系统3包括两台吸附器31及两台电加热器32，电加热器32加热得到的加热空气送入吸附器31中再生吸附器31内的分子筛，两台电加热器32一备一用，吸附器31的数量并不作为限制性规定，可根据应用需求进行增加，但需保证至少一台吸附器31处于工作状态。空气流出空气冷却塔21之后，其中剩余的杂质如H2O、CO2、CO、N2O以及有害的微量碳氢化合物，在通过吸附器31时被吸附去除。在再生阶段，来自氧氮精馏系统5的富氧空气可作为电加热器32的气体来源，富氧空气经电加热器32加热后送往吸附器31再生分子筛。再生阶段完成后，需放空富氧空气，本实施例在吸附器31连通有阀门系统用于放空富氧空气，且为了消除放空富氧空气产生的噪音，本实施例与阀门系统连接有放空消音器33。
需要说明的是，本实施例的吸附器31的填料层可设置为多层结构，包括用于吸附脱除H2O的第一吸附层、用于吸附CO的第二吸附层以及用于吸附CO2的第三吸附层，第一吸附层内装填有活性氧化铝，第二吸附层内装填有锰铜催化剂，第三吸附层内装填有分子筛。其中，活性氧化铝用于脱除空气中的水份，分子筛主要用于脱除空气中的CO2，锰铜催化剂主要用于脱除空气中的CO，以满足电子气行业对产品气中杂质含量的高标准要求。
如图5所示，本实施例采用双填料塔设计，换热器41为板翅换热器，换热器41包括第一富氧空气通道、第二富氧空气通道、纯化空气通道以及产品氮气通道，纯化空气通道与空气纯化系统3连接，产品氮气通道连接于第一塔51的顶部，第一富氧空气通道连接于过冷器42与膨胀机55输入端之间，第二富氧空气通道与膨胀机55输出端连接。第二塔53的顶部设有接液槽56，接液槽56与第一塔51、第二塔53连通，接液槽56与第一塔51之间连接有液氮泵57。为增加第一冷凝蒸发器52、第二冷凝蒸发器54的换热面积，本实施例的第一冷凝蒸发器52、第二冷凝蒸发器54均为板翅换热器，但并不作为本发明的限制性规定。
纯化后空气流经换热器41的纯化空气通道被液化为液化空气，液化空气进入第一塔51精馏在第一塔51顶部得到纯氮气、在第一塔51底部得到富氧液空：其中，富氧液空经过过冷器42过冷后进入第一冷凝蒸发器52中作为冷源，顶部纯氮气一部分作为氮气产品经换热器41的产品氮气通道复热后送至用户，其余纯氮气进入第一冷凝蒸发器52中冷凝为液氮，冷凝得到的液氮一部分作为产品液氮经过冷器42过冷后减压进入液氮计量罐，气液分离后送入后备系统6的常压储槽，其余液氮则作为第一塔51的回流液参与第一塔51精馏；同时，在第一冷凝蒸发器52中，富氧液空受热蒸发的气体作为第一塔51的上升气体，可从第一冷凝蒸发器52底部抽取富氧液空经过冷器42过冷后送入第二冷凝蒸发器54中作为冷源，第二塔53顶部的纯氮气进入第二冷凝蒸发器54中被富氧液空冷凝为液氮流入第二塔53的接液槽56内，第二冷凝蒸发器54内富氧液空受热蒸发为富氧空气，在第二冷凝蒸发器54顶部抽取富氧空气经过冷器42和换热器41的第一富氧空气通道复热至一定温度后流至膨胀机55膨胀制冷，膨胀后的富氧空气再次经过换热器41的第二富氧空气通道复热后流出，富氧空气一部分作为空气纯化系统3的再生气，一部分送入空气预冷系统2中回收冷量；接液槽56内液氮一部分流入第二塔53作为第二塔53的回流液，一部分液氮从接液槽56底部抽取液氮经液氮泵57加压后送入第一塔51顶部，作为第一塔51的回流液参与第一塔51精馏，提高第一塔51的提取率。其中，液氮泵57为并联设置的两台液氮泵57，一用一备，避免液氮泵57出现故障影响制氮机的工作稳定性。
如图6所示，后备系统6包括顺次连接的自动调压切换系统、汽化器61、真空压力储槽62及液氮储槽63，真空压力储槽62与液氮储槽63之间连接有转注泵67，液氮经汽化后进入真空压力储槽62，再经转注泵67转入液氮储槽63中储存；相反地，当制氮机宕机时，切换自动调压切换系统，在转注泵的作用下，液氮储槽63内液氮进入真空压力储槽62，经汽化后作为氮气产品使用。
其中，自动调压切换系统包括远程自动控制调压阀64、自力式调压阀65及安全阀66，其中，远程自动控制调压阀64和安全阀66串联设于主气路上，自力式调压阀65设于支气路上且与远程自动控制调压阀64、安全阀66并联，主气路、支气路可分别用于氮气进气、氮气出气管路。
显然，本发明的上述实施例仅仅是为清楚地说明本发明所作的举例，而并非是对本发明的实施方式的限定。对于所属领域的普通技术人员来说，在上述说明的基础上还可以做出其它不同形式的变化或变动。这里无需也无法对所有的实施方式予以穷举。凡在本发明的精神和原则之内所作的任何修改、等同替换和改进等，均应包含在本发明权利要求的保护范围之内。

Claims (10)

1.一种适用于电子气工厂的制氮机，其特征在于，包括空气过滤及压缩系统(1)、空气预冷系统(2)、空气纯化系统(3)、换热器系统(4)、氧氮精馏系统(5)及后备系统(6)：
所述空气过滤及压缩系统(1)包括空气过滤器(11)及空气压缩机(12)，所述空气过滤器(11)设有空气入口，所述空气过滤器(11)与空气压缩机(12)连接，所述空气压缩机(12)的出口端与空气预冷系统(2)的入口端连接，所述空气过滤器(11)及空气压缩机(12)均为至少两组；
所述空气预冷系统(2)包括空气冷却塔(21)、水冷塔(22)、至少两台冷却水泵(23)、至少两台冷冻水泵(24)、及冷水机组(25)，所述空气冷却塔(21)设有与冷却水泵(23)连接的冷却水进口以及与冷却机组连接的冷冻水进口，所述冷冻水进口位于冷却水进口上方，所述冷却水泵(23)与空气冷却塔(21)连接，所述水冷塔(22)、冷冻水泵(24)、冷水机组(25)及冷冻水进口顺次连通，所述空气冷却塔(21)顶部设有与空气纯化系统(3)连接的出气口，所述入口端设于空气冷却塔(21)的下部；
所述空气纯化系统(3)包括与所述出气口连通的吸附器(31)，所述吸附器(31)内设有用于吸附杂质气体的填料层，所述吸附器(31)的出口端与换热器系统(4)连通；
所述换热器系统(4)包括换热器(41)及过冷器(42)，吸附器(31)出口端的纯化空气经换热器(41)冷却到液化为温度后的液化空气进入氧氮精馏系统(5)；
所述氧氮精馏系统(5)包括自下而上设置的第一塔(51)、第一冷凝蒸发器(52)、第二塔(53)及第二冷凝蒸发器(54)，所述液化空气进入第一塔(51)精馏在第一塔(51)顶部得到纯氮气、在第一塔(51)底部得到富氧液空，所述过冷器(42)的一端与第一塔(51)底部连通，过冷器(42)的另一端与第一冷凝蒸发器(52)、第二冷凝蒸发器(54)连通，所述第一塔(51)的顶部与换热器(41)、第一冷凝蒸发器(52)连通，所述第一冷凝蒸发器(52)与后备系统(6)连接；
所述后备系统(6)包括顺次连接的自动调压切换系统、汽化器(61)、真空压力储槽(62)及液氮储槽(63)。
2.根据权利要求1所述的适用于电子气工厂的制氮机，其特征在于，所述空气过滤器(11)及空气压缩机(12)为两组，两组空气压缩机(12)并联设置，制氮机的负荷调节范围为30％～105％。
3.根据权利要求1所述的适用于电子气工厂的制氮机，其特征在于，所述冷却水泵(23)为两台，所述冷冻水泵(24)为两台，所述冷却水泵(23)、水冷塔(22)均与循环水池连通。
4.根据权利要求3所述的适用于电子气工厂的制氮机，其特征在于，所述水冷塔(22)底部、空气冷却塔(21)底部均设有液位控制系统(26)，所述液位控制系统包括与控制器连接的液位计和自动液位控制阀。
5.根据权利要求3所述的适用于电子气工厂的制氮机，其特征在于，所述冷却水进口处的冷却水进料温度不高于32℃，冷却水流经水冷塔(22)的第一冷冻水出料温度不高于20℃，流经冷水机组(25)的第二冷冻水出料温度不高于8.5℃。
6.根据权利要求1所述的适用于电子气工厂的制氮机，其特征在于，所述吸附器(31)至少为两组，所述吸附器(31)连接有电加热器(32)，电加热器(32)加热得到的加热空气送入吸附器(31)中再生吸附器(31)内的分子筛。
7.根据权利要求6所述的适用于电子气工厂的制氮机，其特征在于，所述吸附器(31)内填料层包括用于吸附脱除H2O的第一吸附层、用于吸附CO的第二吸附层以及用于吸附CO2的第三吸附层，所述第一吸附层内装填有活性氧化铝，所述第二吸附层内装填有锰铜催化剂，所述第三吸附层内装填有分子筛。
8.根据权利要求1所述的适用于电子气工厂的制氮机，其特征在于，所述第二塔(53)的顶部设有接液槽(56)，所述接液槽(56)与第一塔(51)、第二塔(53)连通，所述接液槽(56)与第一塔(51)之间连接有液氮泵(57)。
9.根据权利要求8所述的适用于电子气工厂的制氮机，其特征在于，所述氧氮精馏系统(5)还包括膨胀机(55)，所述第二冷凝蒸发器(54)顶部产生的富氧空气经过冷器(42)、换热器(41)复热后流入至膨胀机膨胀制冷，膨胀后的富氧空气再次进入换热器(41)复热后流出至空气预冷系统(2)和空气纯化系统(3)。
10.根据权利要求1所述的适用于电子气工厂的制氮机，其特征在于，所述换热器(41)为板翅换热器，所述换热器(41)包括第一富氧空气通道、第二富氧空气通道、纯化空气通道以及产品氮气通道，所述纯化空气通道与空气纯化系统(3)连接，所述产品氮气通道连接于第一塔(51)的顶部，所述第一富氧空气通道连接于过冷器(42)与膨胀机(55)输入端之间，所述第二富氧空气通道与膨胀机(55)输出端连接。
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