CN111474633A - Electromagnetic double-reflector MEMS optical switch - Google Patents
Electromagnetic double-reflector MEMS optical switch Download PDFInfo
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- CN111474633A CN111474633A CN202010453801.9A CN202010453801A CN111474633A CN 111474633 A CN111474633 A CN 111474633A CN 202010453801 A CN202010453801 A CN 202010453801A CN 111474633 A CN111474633 A CN 111474633A
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- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
- G02B6/24—Coupling light guides
- G02B6/26—Optical coupling means
- G02B6/35—Optical coupling means having switching means
- G02B6/351—Optical coupling means having switching means involving stationary waveguides with moving interposed optical elements
- G02B6/3512—Optical coupling means having switching means involving stationary waveguides with moving interposed optical elements the optical element being reflective, e.g. mirror
- G02B6/3518—Optical coupling means having switching means involving stationary waveguides with moving interposed optical elements the optical element being reflective, e.g. mirror the reflective optical element being an intrinsic part of a MEMS device, i.e. fabricated together with the MEMS device
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- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
- G02B6/24—Coupling light guides
- G02B6/26—Optical coupling means
- G02B6/35—Optical coupling means having switching means
- G02B6/3564—Mechanical details of the actuation mechanism associated with the moving element or mounting mechanism details
- G02B6/3568—Mechanical details of the actuation mechanism associated with the moving element or mounting mechanism details characterised by the actuating force
- G02B6/3572—Magnetic force
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- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
- G02B6/24—Coupling light guides
- G02B6/26—Optical coupling means
- G02B6/35—Optical coupling means having switching means
- G02B6/3564—Mechanical details of the actuation mechanism associated with the moving element or mounting mechanism details
- G02B6/3584—Mechanical details of the actuation mechanism associated with the moving element or mounting mechanism details constructional details of an associated actuator having a MEMS construction, i.e. constructed using semiconductor technology such as etching
Abstract
The invention discloses an electromagnetic double-reflector MEMS optical switch, which comprises a supporting frame, wherein the top and the bottom of the supporting frame are respectively provided with a top plane driving coil and a bottom plane driving coil, the central parts of the top plane driving coil and the bottom plane driving coil are respectively provided with a top permalloy iron core and a bottom permalloy iron core, the inner wall of the middle part of the supporting frame is connected with a left double-cantilever beam and a right double-cantilever beam, a magnetic elastic platform is connected between the left double-cantilever beam and the right double-cantilever beam, the central parts of the top and the bottom of the elastic platform are respectively provided with an upper light reflecting micromirror and a lower light reflecting micromirror, and a central through hole is horizontally penetrated on the elastic. The electromagnetic type double-reflector MEMS optical switch provided by the invention has the characteristics of quick and stable response and good integration capability, and the electromagnetic force generated by the bottom planar driving coil and the top planar driving coil attracts the elastic platform to displace up and down, so that the switching of three optical paths is completed.
Description
Technical Field
The invention relates to an electromagnetic double-reflector MEMS optical switch, belonging to the technical field of optical switches.
Background
Fiber optic communication has evolved from the last 80 s and has played a very important role in the digital information age. With the development of daily applications such as virtual reality, internet of things, high-definition live video and the like and the network upgrade of national key departments such as electric power, traffic, aerospace and the like, the requirement of the current communication technology on bandwidth is higher and higher, and a large-capacity network is sought to become a main research object. Optical fiber networks have become the mainstream communication networks of the current era due to their huge capacity, excellent transparency, wide compatibility and good expansibility.
Optical signals need to be exchanged continuously in the transmission process, and the exchange and the router are used to complete the work in daily life. However, the signal processing of such devices cannot directly process optical signals, and optical-to-electrical conversion is required, so that the resulting delay severely limits the network transmission speed. All-optical communication, which refers to a communication mode using only optical signals as transport carriers, has been proposed to solve this problem.
The optical switch is a key device for realizing all-optical communication and completing optical cross connection (OXC). The main function of the optical switching device is to switch the optical signal of the input port to the output port, thereby completing the optical signal switching. The performance evaluation is based on insertion loss, crosstalk resistance, switch response speed, size of the size and power consumption. The traditional optical switch has the defects of large volume, large energy loss and slow response speed. The MEMS (micro electro mechanical system) optical switch, due to its mature MEMS processing technology, can be mass-produced, is convenient for industrialization, and has great advantages in performance evaluation, especially in response speed, size scale and integration capability.
The conventional MEMS optical switch mostly adopts a dual optical path mode as shown in patent CN102928977A and patent CN208079039U, and although the power consumption is small and the response is fast, there is still a space for further improving the integration capability.
Thus, there is a need for a new MEMS optical switch that addresses the above issues, thereby meeting the deep market needs.
Disclosure of Invention
In view of the above problems of the prior art, it is an object of the present invention to provide an electromagnetic dual-mirror MEMS optical switch.
In order to achieve the purpose, the technical scheme adopted by the invention is as follows:
an electromagnetic double-reflector MEMS optical switch comprises a vertically arranged support frame, wherein the top and the bottom of the support frame are respectively and horizontally provided with a top plane drive coil and a bottom plane drive coil which can be introduced with forward current or reverse current, the winding directions of the top plane drive coil and the bottom plane drive coil are the same, and electromagnetic fields with the same direction are generated when the support frame is electrified, the central parts of the top plane drive coil and the bottom plane drive coil are respectively and correspondingly provided with a top permalloy iron core and a bottom permalloy iron core, the inner wall of the middle part of the support frame is connected with a left double cantilever beam and a right double cantilever beam which are distributed in bilateral symmetry and are elastic, a magnetic elastic platform is connected between the left double cantilever beam and the right double cantilever beam, and the central parts of the top and the bottom of the elastic platform are respectively and vertically provided with an upper light micromirror reflection and a lower light reflection, and a central through hole is horizontally arranged on the elastic platform in a penetrating manner.
In one embodiment, the top and bottom of the support frame are horizontally provided with a top base and a bottom base, respectively, the top planar drive coil is provided at the bottom of the top base, and the bottom planar drive coil is provided at the top of the bottom base.
In one embodiment, the top substrate and the bottom substrate are both glass substrates.
In one embodiment, the top planar drive coil and the bottom planar drive coil are connected in series.
In one embodiment, two top permalloy cores and two bottom permalloy cores are respectively arranged at the central parts of the top planar driving coil and the bottom planar driving coil correspondingly.
In one embodiment, the elastic platform is provided with magnetic media therein, wherein the magnetic media includes but is not limited to soft magnet, hard magnet and permanent magnet.
In a preferred embodiment, the magnetic medium is a permanent magnet, and the permanent magnet is preferably a ferrite permanent magnet.
In one embodiment, the left double cantilever beam and the right double cantilever beam are made of nickel.
In one embodiment, the upper and lower light-reflecting micromirrors are a metal reflective film sputtered onto the vertical microstructures above and below the center position of the resilient platform, respectively.
In one embodiment, the upper and lower light-reflecting micromirrors have horizontal angles perpendicular to each other.
In one embodiment, the electromagnetic double-reflector MEMS optical switches can be uniformly distributed to form an optical switch array.
Compared with the prior art, the invention has the beneficial technical effects that:
the electromagnetic type double-reflector MEMS optical switch provided by the invention takes electromagnetic driving as a driving mode, and the electromagnetic force generated by the bottom plane driving coil and the top plane driving coil attracts the elastic platform to move up and down, so that three optical paths are switched, more optical paths can be selected after an array is formed, even if a certain optical switch fails, the normal work can be realized by changing the optical paths, and the electromagnetic type double-reflector MEMS optical switch has the characteristics of quick and stable response and good integration capability, is simple in structure, convenient to use and low in cost, and has good practical value.
Drawings
FIG. 1 is a schematic cross-sectional view of an electromagnetic two-mirror MEMS optical switch provided in an embodiment of the present invention;
FIG. 2 is a diagram illustrating the positional relationship between the bottom planar drive coil and the resilient stage in an embodiment of the present invention;
FIG. 3 is a diagram illustrating the position of the top planar drive coil and the lead posts in accordance with an embodiment of the present invention;
FIG. 4 is a diagram of an array of 5x5 electromagnetic two-mirror MEMS optical switches in accordance with an embodiment of the present invention;
FIG. 5 is a schematic diagram of a 5x5 electromagnetic two-mirror MEMS optical switch array according to an embodiment of the present invention;
the numbers in the figures are as follows: 1. a support frame; 2. a top planar drive coil; 3. a bottom planar drive coil; 4. a top permalloy core; 5. a bottom permalloy core; 6. a left double cantilever beam; 7. a right double cantilever beam; 8. an elastic platform; 81. a central through hole; 9. an upper light reflecting micromirror; 10. a lower light reflecting micromirror; 11. a top substrate; 12. a bottom substrate; 13. a first lead post; 14. a second lead post;
15/16/17/18/19/20/21/22/23/24/25/26/27/28/29/30/31/32/33/34/35/36/37/38/39/, a two-mirror optical switch; 40/41/42/43/44/, fiber optic signal launch site; 45/46/47/48/49/50/51/52/53/54/55/56/57/58/59/, fiber optic signal receiving point.
Detailed Description
The technical solution of the present invention is further described in detail below with reference to the accompanying drawings and examples.
Examples
As shown in fig. 1 to 5, the electromagnetic double-mirror MEMS optical switch provided by the present invention includes a supporting frame 1 vertically disposed, a top planar driving coil 2 and a bottom planar driving coil 3, which can be fed with a forward current or a reverse current, are respectively horizontally disposed at the top and the bottom of the supporting frame 1, the top planar driving coil 2 and the bottom planar driving coil 3 have the same winding direction and generate an electromagnetic field with the same direction when powered on, a top permalloy core 4 and a bottom permalloy core 5 are respectively disposed at the central parts of the top planar driving coil 2 and the bottom planar driving coil 3, a left double cantilever 6 and a right double cantilever 7 which are symmetrically disposed at the left and right sides and are elastic are connected to the inner wall of the middle part of the supporting frame 1, a magnetic elastic platform 8 is connected between the left double cantilever 6 and the right double cantilever 7, the central parts of the top and the bottom of the elastic platform 8 are respectively and vertically provided with an upper light reflection micro mirror 9 and a lower light reflection micro mirror 10, and the elastic platform 8 is horizontally provided with a central through hole 81 in a penetrating way.
The working principle of the electromagnetic double-reflector MEMS optical switch is as follows:
since the top planar driving coil 2 is located at the top position of the supporting frame 1, the bottom planar driving coil 3 is located at the bottom position of the supporting frame 1, the elastic platform 8 is located at the middle position of the supporting frame 1, i.e. the resilient platform 8 is located in the middle of the top planar drive coil 2 and the bottom planar drive coil 3, a certain distance is left between the top planar driving coil 2 and the bottom planar driving coil 3, the elastic platform 8 has magnetism, the top planar driving coil 2 and the bottom planar driving coil 3 are electrified to generate electromagnetic force, the top planar driving coil 2 and the bottom planar driving coil 3 and the elastic platform 8 have magnetic interaction, therefore, the top planar driving coil 2 and the bottom planar driving coil 3 can generate electromagnetic force which is mutually attracted or mutually repelled with the elastic platform 8 by introducing forward current or reverse current into the top planar driving coil 2 and the bottom planar driving coil 3; the left double-cantilever beam 6 and the right double-cantilever beam 7 have elasticity and can provide elastic force for the elastic platform 8; the arranged top permalloy iron core 4 and the bottom permalloy iron core 5 can be used for enhancing the magnetic conductivity and can be used as a limiting structure;
furthermore, since the winding directions of the top planar driving coil 2 and the bottom planar driving coil 3 are the same, and electromagnetic fields with the same direction are generated when the power is applied, the electromagnetic fields generated by the top planar driving coil 2 and the bottom planar driving coil 3 are mutually attracted after the power is applied, that is, when the top planar driving coil 2 and the elastic platform 8 are mutually attracted, the bottom planar driving coil 3 and the elastic platform 8 are mutually repelled, and vice versa, for example: in this embodiment, it is set that when a forward current is applied, the top planar driving coil 2 and the elastic platform 8 repel each other, and the bottom planar driving coil 3 and the elastic platform 8 repel each other and attract each other, and when a reverse current is applied, the directions are opposite;
according to the above setting, the method of using the electromagnetic double-mirror MEMS optical switch is described in detail as follows:
when the device is used, when no current is introduced into the top planar driving coil 2 and the bottom planar driving coil 3, the elastic platform 8 is balanced with the elastic force between the left double-cantilever beam 6 and the right double-cantilever beam 7 under the action of self gravity to form an initial stable state of the elastic platform 8;
when the top plane driving coil 2 and the bottom plane driving coil 3 are introduced with positive current, the top plane driving coil 2 generates electromagnetic force which is mutually repulsive with the elastic platform 8, the bottom plane driving coil 3 generates electromagnetic force which is mutually attractive with the elastic platform 8, the elastic platform 8 is pulled under the action of the electromagnetic force to overcome the elastic force of the left double cantilever beam 6 and the right double cantilever beam 7, the elastic platform 8 is displaced downwards and is attracted with the bottom permalloy iron core 5 at the central part of the bottom plane driving coil 3 after moving downwards, at the moment, the electromagnetic force, the elastic force of the left double cantilever beam 6 and the right double cantilever beam 7 and the supporting force of the bottom permalloy iron core 5 are balanced to achieve a new stable state, the elastic platform 8 is in a downward attraction state, and the elastic platform 8 has magnetism, so that the magnetic attraction force between the bottom permalloy iron core 5 and the elastic platform 8 is always generated due to the magnetic attraction force, the elastic platform 8 can still maintain the attraction state until reverse current is introduced into the bottom planar driving coil 3 and the top planar driving coil 2, so that the bottom planar driving coil 3 generates electromagnetic force which is mutually repelled with the elastic platform 8, and the top planar driving coil 2 generates electromagnetic force which is mutually attracted with the elastic platform 8, so that the elastic platform 8 is restored to the initial disconnection state; in the process, when the elastic platform 8 is in the off state, the optical fiber signal enters the corresponding receiving point from the signal emitting point along the central through hole 81 on the elastic platform 8, and when the elastic platform 8 is in the suction state, the optical fiber signal is reflected by the upper light reflection micro mirror 9 and enters the other receiving point;
when reverse current is introduced into the top plane driving coil 2 and the bottom plane driving coil 3, the top plane driving coil 2 generates electromagnetic force which is mutually attracted with the elastic platform 8, meanwhile, the bottom plane driving coil 3 generates electromagnetic force which is mutually repelled with the elastic platform 8, the elastic platform 8 is pulled under the action of the electromagnetic force to overcome the elastic force of the left double cantilever beam 6 and the right double cantilever beam 7, the elastic platform 8 moves upwards and is attracted with the top permalloy iron core 4 at the central part of the top plane driving coil 2 after moving upwards, at the moment, the electromagnetic force, the elastic force of the left double cantilever beam 6 and the right double cantilever beam 7 and the supporting force of the top permalloy iron core 4 are balanced to achieve a new stable state, the elastic platform 8 is in an upwards attracting state, and the elastic platform 8 has magnetism all the time, so that even after the driving current is cut off, because of the magnetic attraction between the top permalloy iron core 4, the elastic platform 8 can still maintain the attraction state until positive current is introduced into the bottom planar driving coil 3 and the top planar driving coil 2, so that the bottom planar driving coil 3 generates electromagnetic force mutually attracted with the elastic platform 8, and the top planar driving coil 2 generates electromagnetic force mutually repelled with the elastic platform 8, so that the elastic platform 8 is restored to the initial disconnection state; in the process, when the elastic platform 8 is in the off state, the optical fiber signal enters the corresponding receiving point from the signal emitting point along the central through hole 81 on the elastic platform 8, and when the elastic platform 8 is in the attraction state, the optical fiber signal is reflected by the lower light reflection micro mirror 10 and enters the other receiving point.
It can be seen from the above that, in the present invention, electromagnetic driving is adopted as a driving mode, and the elastic platform 8 is guided to displace by electromagnetic force generated by the bottom planar driving coil 3 and the top planar driving coil 2, so as to complete optical path switching, and optical path switching can be realized only by a small current, so that the MEMS optical switch has the characteristics of quick and stable response, and can complete actuation within 1 millisecond, and because the elastic platform 8 itself has magnetism all the time, actuation can be maintained even if power is off, and the actuation state cannot be released until reverse current is applied to the bottom planar driving coil 3 and the top planar driving coil 2, so that the MEMS optical switch does not need to maintain current all the time.
Referring to fig. 1 to 3, a top substrate 11 and a bottom substrate 12 are respectively and horizontally disposed on the top and the bottom of the supporting frame 1, the top planar driving coil 2 is disposed on the bottom of the top substrate 11, and the bottom planar driving coil 3 is disposed on the top of the bottom substrate 12. The top planar drive coil 2 and the bottom planar drive coil 3 are respectively disposed at the top and bottom of the support frame 1 through the top substrate 11 and the bottom substrate 12, and the top planar drive coil 2 and the bottom planar drive coil 3 respectively face the elastic platform 8.
In this embodiment, the top substrate 11 and the bottom substrate 12 are both glass substrates. Specifically, photoresist is coated on a cleaned glass substrate, then silicon dioxide is used as a mask, a coil pattern is corroded by potassium hydroxide solution after exposure is completed, and then the bottom planar driving coil 3 and the top planar driving coil 2 are electroformed.
The top planar driving coil 2 and the bottom planar driving coil 3 may be individually and respectively connected to a power supply, or may share a power supply, the top planar driving coil 2 and the bottom planar driving coil 3 may be connected in series or in parallel, and from the viewpoint of the synchronization and convenience of operation, in this embodiment, the top planar driving coil 2 and the bottom planar driving coil 3 are connected in series. Specifically, as shown in fig. 1 to 3, two ends of the bottom planar driving coil 3 are electrically connected to a first lead post 13 and a second lead post 14, respectively, one end of the second lead post 14 is connected to the bottom planar driving coil 3, the other end of the second lead post is connected to the top planar driving coil 2, and the remaining end of the top planar driving coil 2 is electrically connected to a third lead post (not shown in the drawings), and when the top planar driving coil is used, the first lead post 13 and the third lead post (not shown in the drawings) are connected to external electrodes, respectively, so that a forward current or a reverse current can be applied to the bottom planar driving coil 3 and the top planar driving coil 2.
In this embodiment, the top planar driving coil 2 and the bottom planar driving coil 3 are respectively and correspondingly provided with two top permalloy cores 4 and two bottom permalloy cores 5 at the central positions thereof, so as to ensure that the elastic platform 8 is uniformly stressed when in contact therewith.
In the present invention, a magnetic medium (not shown) is disposed in the elastic platform 8, and the elastic platform 8 has magnetism through the magnetic medium, where the magnetic medium includes, but is not limited to, a soft magnet, a hard magnet, and a permanent magnet.
In this embodiment, the left double cantilever 6 and the right double cantilever 7 are made of nickel, have good ductility and high magnetic conductivity, can be highly polished, have excellent acid and alkali corrosion resistance, and have a long service life. The left double-cantilever beam 6 and the right double-cantilever beam 7 have elasticity and function similar to a spring, one end of the left double-cantilever beam 6 and one end of the right double-cantilever beam 7 are respectively connected with the supporting frame 1, and the other ends are respectively connected with the elastic platform 8.
In this embodiment, the upper light-reflecting micromirror 9 and the lower light-reflecting micromirror 10 are formed by sputtering a metal reflective film on the vertical microstructure at the center of the elastic platform 8. The upper light-reflecting micromirror 9 and the lower light-reflecting micromirror 10 are perpendicular to each other in angle in the horizontal direction.
The electromagnetic double-reflector MEMS optical switch has the advantages of simple structure, low process difficulty and capability of batch production. In the present embodiment, as shown in fig. 4 and 5, a 5 × 5 electromagnetic two-mirror MEMS optical switch array may be formed, each square block in fig. 4 represents an optical switch, in fig. 5, the dotted line represents an optical fiber signal, 15, 16, 17, 18, 19, 20, 21, 22, 23, 24, 25, 26, 27, 28, 29, 30, 31, 32, 33, 34, 35, 36, 37, 38, 39 represents a two-mirror optical switch, 40, 41, 42, 43, 44 represents an optical fiber signal transmitting point, 45, 46, 47, 48, 49, 50, 51, 52, 53, 54, 55, 56, 57, 58, 59 represents an optical fiber signal receiving point, the principle of the optical switch array is exemplified by the optical fiber signal transmitting point 40, in a state where the two-mirror optical switches 15, 16, 17, 18, 19 are off, the signal will travel in a straight line into the optical fiber signal reception point 54, changing the state of the two-mirror optical switch 15 while the other two-mirror optical switches remain off, and the optical fiber signal emitted from the optical fiber signal emission point 40 can enter the optical fiber signal reception point 45 or 59 by reflection by the two-mirror optical switch 15 to realize optical cross connection (OXC).
The electromagnetic double-reflector MEMS optical switch has the innovation points that the switch of three optical paths is realized while the optical fiber signals can be transmitted on the same horizontal plane, and the integration capability is good. In this embodiment, as shown in fig. 4 and 5, in a 5 × 5 electromagnetic double mirror array, since a single optical switch can perform three-path switching, the number of optical path alternatives as a whole increases exponentially with the number of arrays. Taking the fiber signal transmitting point 40 and the fiber signal receiving point 53 as an example, in the case of considering the shortest route, there are 15, 20, 21, 22, 23, 24 optical switch routes, 15, 16, 17, 18, 19, 24 optical switch routes and 15, 16, 17, 18, 19, 20 optical switch routes, which total 5 routes, and there can be more choices in the case of not considering the shortest route, compared with the conventional optical switch which has only one route scheme. Therefore, in the electromagnetic double-reflector MEMS optical switch array, even if a few optical switches are failed, the whole operation of the array is not affected, the normal operation can be realized by switching the alternative optical paths, and compared with the conventional optical switch, the traditional optical switch can only realize the re-operation by replacing a new optical switch.
It is finally necessary to point out here: the above description is only for the preferred embodiment of the present invention, but the scope of the present invention is not limited thereto, and any changes or substitutions that can be easily conceived by those skilled in the art within the technical scope of the present invention are included in the scope of the present invention.
Claims (10)
1. An electromagnetic double-reflector MEMS optical switch, characterized in that: the device comprises a vertically arranged support frame, wherein a top plane drive coil and a bottom plane drive coil which can be introduced with forward current or reverse current are respectively and horizontally arranged at the top and the bottom of the support frame correspondingly, the winding directions of the top plane drive coil and the bottom plane drive coil are the same, and electromagnetic fields with the same direction are generated when the top plane drive coil and the bottom plane drive coil are electrified, the central parts of the top plane drive coil and the bottom plane drive coil are respectively and correspondingly provided with a top permalloy iron core and a bottom permalloy iron core, the inner wall of the middle part of the support frame is connected with a left double cantilever beam and a right double cantilever beam which are symmetrically distributed in the left-right direction and are elastic, a magnetic elastic platform is connected between the left double cantilever beam and the right double cantilever beam, and the central parts of the top and the bottom of the elastic platform, and a central through hole is horizontally arranged on the elastic platform in a penetrating manner.
2. An electromagnetic two-mirror MEMS optical switch as defined by claim 1 wherein: the top and the bottom of the supporting frame are respectively and horizontally provided with a top substrate and a bottom substrate, the top planar driving coil is arranged at the bottom of the top substrate, and the bottom planar driving coil is arranged at the top of the bottom substrate.
3. An electromagnetic two-mirror MEMS optical switch as defined by claim 1 wherein: the top planar drive coil and the bottom planar drive coil are connected in series.
4. An electromagnetic two-mirror MEMS optical switch as defined by claim 1 wherein: and the center parts of the top plane driving coil and the bottom plane driving coil are respectively and correspondingly provided with two top permalloy iron cores and two bottom permalloy iron cores.
5. An electromagnetic two-mirror MEMS optical switch as defined by claim 1 wherein: and a magnetic medium is arranged in the elastic platform, and the magnetic medium comprises but is not limited to a soft magnet, a hard magnet and a permanent magnet.
6. An electromagnetic two-mirror MEMS optical switch as defined by claim 5 wherein: the magnetic medium is a permanent magnet.
7. An electromagnetic two-mirror MEMS optical switch as defined by claim 1 wherein: the left double cantilever beam and the right double cantilever beam are made of nickel.
8. An electromagnetic two-mirror MEMS optical switch as defined by claim 1 wherein: the upper light reflection micro mirror and the lower light reflection micro mirror are metal reflection films respectively sputtered on the vertical microstructures above and below the center position of the elastic platform.
9. An electromagnetic two-mirror MEMS optical switch as defined by claim 1 wherein: the angles of the upper light reflection micromirror and the lower light reflection micromirror in the horizontal direction are perpendicular to each other.
10. An electromagnetic two-mirror MEMS optical switch as defined by claim 1 wherein: the electromagnetic double-reflector MEMS optical switches can be uniformly distributed to form an optical switch array.
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| CN113376377A (en) * | 2021-04-21 | 2021-09-10 | 上海工程技术大学 | MEMS sensor capable of continuously detecting glucose concentration |
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| CN113376377A (en) * | 2021-04-21 | 2021-09-10 | 上海工程技术大学 | MEMS sensor capable of continuously detecting glucose concentration |
| CN113376377B (en) * | 2021-04-21 | 2023-11-24 | 上海工程技术大学 | MEMS sensor for sustainable detection of glucose concentration |
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| CN111474633B (en) | 2022-06-03 |
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