CN111474385A - Surface acoustic wave acceleration sensor - Google Patents
Surface acoustic wave acceleration sensor Download PDFInfo
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- CN111474385A CN111474385A CN202010487834.5A CN202010487834A CN111474385A CN 111474385 A CN111474385 A CN 111474385A CN 202010487834 A CN202010487834 A CN 202010487834A CN 111474385 A CN111474385 A CN 111474385A
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- acoustic wave
- piezoelectric substrate
- surface acoustic
- elastic material
- mass block
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01P—MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
- G01P15/00—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration
- G01P15/02—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses
- G01P15/08—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values
- G01P15/097—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values by vibratory elements
- G01P15/0975—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values by vibratory elements by acoustic surface wave resonators or delay lines
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- General Physics & Mathematics (AREA)
- Measurement Of Mechanical Vibrations Or Ultrasonic Waves (AREA)
Abstract
The invention provides a surface acoustic wave acceleration sensor, wherein a first groove is arranged between an interdigital transducer and a first reflection grating, and a second groove is arranged between the interdigital transducer and a second reflection grating. A first elastic material and a first mass block are arranged in the first groove; a second elastic material and a second mass are arranged in the second groove. When measuring the acceleration, the first mass block extrudes the first elastic material and penetrates into the piezoelectric substrate more; the second mass block also extrudes the second elastic material and extends into the piezoelectric substrate more, the surface acoustic wave resonance frequency in the piezoelectric substrate is changed, and acceleration measurement is realized by detecting the surface acoustic wave resonance frequency. The surface acoustic wave is very sensitive to the shape and materials near the surface of the piezoelectric substrate, so the invention has the advantage of high acceleration detection sensitivity and has good application prospect in the field of acceleration sensing.
Description
Technical Field
The invention relates to the field of acceleration sensing, in particular to a surface acoustic wave acceleration sensor.
Background
An acceleration sensor is a sensing device that measures acceleration. During acceleration, acceleration is obtained by measurement of the inertial force received by the mass. The acceleration sensor is widely applied to the aspects of smart phones, digital equipment, mobile equipment and the like, and is important detection equipment. Common acceleration sensors include strain type acceleration sensors, piezoresistive acceleration sensors, piezoelectric acceleration sensors, capacitive acceleration sensors, and the like. The detection sensitivity of the traditional acceleration sensor is more and more difficult to meet the requirement of current precision measurement, and the exploration of the acceleration sensor based on different mechanisms is beneficial to improving the detection sensitivity of acceleration detection.
Disclosure of Invention
In order to solve the above problems, the present invention provides a surface acoustic wave acceleration sensor, which includes a piezoelectric substrate, a first reflection grating, a second reflection grating, an interdigital transducer, a first elastic material, a second elastic material, a first mass block, and a second mass block, wherein the first reflection grating, the second reflection grating, and the interdigital transducer are disposed on the piezoelectric substrate, the interdigital transducer is disposed between the first reflection grating and the second reflection grating, a first groove is disposed between the first reflection grating and the interdigital transducer and on the piezoelectric substrate, the first elastic material is disposed at the bottom of the first groove, the first mass block is disposed at the top of the first elastic material, a second groove is disposed between the second reflection grating and the interdigital transducer and on the piezoelectric substrate, the second elastic material is disposed at the bottom of the second groove, and the second mass block is disposed at the top of the second elastic material.
Furthermore, the height of the first mass block is larger than the depth of the first groove, and the height of the second mass block is larger than the depth of the second groove.
Furthermore, a third mass is arranged on top of the first and second masses.
Further, the material of the piezoelectric substrate is lithium tantalate, lithium niobate, or quartz.
Further, the material of the first mass block is the same as that of the piezoelectric substrate.
Further, the material of the second mass block is the same as that of the piezoelectric substrate.
Further, the material of the third mass is the same as that of the piezoelectric substrate.
The invention has the beneficial effects that: the invention provides a surface acoustic wave acceleration sensor, wherein a first groove is arranged between an interdigital transducer and a first reflection grating, and a second groove is arranged between the interdigital transducer and a second reflection grating. A first elastic material and a first mass block are arranged in the first groove; a second elastic material and a second mass are arranged in the second groove. When measuring the acceleration, the first mass block extrudes the first elastic material and penetrates into the piezoelectric substrate more; the second mass block also extrudes the second elastic material and extends into the piezoelectric substrate more, the surface acoustic wave resonance frequency in the piezoelectric substrate is changed, and acceleration measurement is realized by detecting the surface acoustic wave resonance frequency. The surface acoustic wave is very sensitive to the shape and materials near the surface of the piezoelectric substrate, so the invention has the advantage of high acceleration detection sensitivity and has good application prospect in the field of acceleration sensing.
The present invention will be described in further detail below with reference to the accompanying drawings.
Drawings
Fig. 1 is a schematic diagram of a surface acoustic wave acceleration sensor.
Fig. 2 is a schematic diagram of yet another surface acoustic wave acceleration sensor.
In the figure: 1. a piezoelectric substrate; 2. a first reflective grating; 3. a second reflective gate; 4. an interdigital transducer; 5. a first elastic material; 6. a second elastic material; 7. a first mass block; 8. a second mass block; 9. a third mass.
Detailed Description
To further explain the technical means and effects of the present invention adopted to achieve the intended purpose, the following detailed description of the embodiments, structural features and effects of the present invention will be made with reference to the accompanying drawings and examples.
Example 1
The invention provides a surface acoustic wave acceleration sensor, which comprises a piezoelectric substrate 1, a first reflection grating 2, a second reflection grating 3, an interdigital transducer 4, a first elastic material 5, a second elastic material 6, a first mass block 7 and a second mass block 8, as shown in figure 1. The first reflection grating 2, the second reflection grating 3 and the interdigital transducer 4 are arranged on the piezoelectric substrate 1. The material of the piezoelectric substrate 1 is lithium tantalate, lithium niobate or quartz. The interdigital transducer 4 is placed between the first reflection grating 2 and the second reflection grating 3. A first groove is formed in the piezoelectric substrate 1 between the first reflection grating 2 and the interdigital transducer 4, a first elastic material 5 is disposed at the bottom of the first groove, and a first mass 7 is disposed at the top of the first elastic material 5. A second groove is formed in the piezoelectric substrate 1 between the second reflective grating 3 and the interdigital transducer 4, a second elastic material 6 is disposed at the bottom of the second groove, and a second mass block 8 is disposed at the top of the second elastic material 6.
When the device is applied, a radio frequency signal is applied to the interdigital transducer 4, a surface acoustic wave which propagates along the horizontal direction of the figure 1 is excited on the piezoelectric substrate 1, the surface acoustic wave propagates to the first reflection grating 2 and the second reflection grating 3, the surface acoustic wave is reflected by the first reflection grating 2 and the second reflection grating 3, and a standing wave is formed between the first reflection grating 2 and the second reflection grating 3. The interdigital transducer 4 is in turn used to receive a surface acoustic wave, from which the resonance frequency of the surface acoustic wave in the piezoelectric substrate 1 is determined. When measuring the acceleration, the first mass 7 presses the first elastic material 5 and penetrates more into the piezoelectric substrate 1; the second mass block 8 also extrudes the second elastic material 6 and extends into the piezoelectric substrate 1 more, changes the surface acoustic wave resonance frequency in the piezoelectric substrate 1, and realizes acceleration measurement by detecting the surface acoustic wave resonance frequency. Because the energy of the surface acoustic wave is mainly concentrated within 1-2 wavelengths in the surface of the piezoelectric substrate 1, the surface acoustic wave is very sensitive to the appearance and materials near the surface of the piezoelectric substrate 1, so the invention has the advantage of high acceleration detection sensitivity and has good application prospect in the field of acceleration sensing.
Example 2
On the basis of embodiment 1, as shown in fig. 1, the height of the first mass 7 is greater than the depth of the first groove, and the height of the second mass 8 is greater than the depth of the second groove. Therefore, the first mass block 7 and the second mass block 8 can have larger mass, and can generate larger inertia force and generate larger pressure on the first elastic material 5 and the second elastic material 6 under the same acceleration, so that the first mass block 7 and the second mass block 8 can penetrate into the piezoelectric substrate 1 more, the resonance frequency of the surface acoustic wave is changed more, and the sensitivity of acceleration detection is improved.
Example 3
On the basis of embodiment 2, as shown in fig. 2, a third mass 9 is further provided on top of the first mass 7 and the second mass 8. That is, the first mass 7 and the second mass 8 together support the third mass 9. The third mass 9 not only increases the forces exerted on the first mass 7 and the second mass 8, but the third mass 9 covers the interdigital transducer 4 and also protects the interdigital transducer 4.
Example 4
On the basis of embodiment 3, the material of the first mass block 7 is the same as that of the piezoelectric substrate 1, and the material of the second mass block 8 is the same as that of the piezoelectric substrate 1. Since the surface acoustic wave propagates in the same medium, it has a smaller loss. When the materials of the first mass block 7 and the second mass block 8 are preferably the materials of the piezoelectric substrate 1, the surface acoustic wave has small loss between the piezoelectric substrate 1 and the first mass block 7 and the second mass block 8, and is not easy to form interface reflection and form more complex reciprocating reflection in a piezoelectric body, so that the energy loss is less, and the signal processing difficulty is reduced.
Further, the material of the third mass 9 is the same as that of the piezoelectric substrate 1. When the materials of the first mass 7, the second mass 8, and the third mass 9 are the same as the material of the piezoelectric substrate 1, the loss of propagation of the acoustic wave in them is small. Due to the small distance between the third mass 9 and the piezoelectric substrate 1, the surface acoustic wave also propagates along the third mass 9, forming another path. The surface acoustic wave propagating this path will seriously change the state of the surface acoustic wave propagating on the piezoelectric substrate 1. The surface acoustic wave path along the third mass 9 depends heavily on the height of the piezoelectric substrate to which the first and second masses 7, 8 are exposed. In other words, when the first and second masses 7, 8 have a fixed length, the surface acoustic wave path along the third mass 9 is heavily dependent on the depth of the first and second masses 7, 8 into the piezoelectric substrate 1. The sensitivity of acceleration detection is higher when the material of the third mass 9 is the same as the material of the piezoelectric substrate 1.
The foregoing is a more detailed description of the invention in connection with specific preferred embodiments and it is not intended that the invention be limited to these specific details. For those skilled in the art to which the invention pertains, several simple deductions or substitutions can be made without departing from the spirit of the invention, and all shall be considered as belonging to the protection scope of the invention.
Claims (7)
1. A surface acoustic wave acceleration sensor, characterized by comprising: piezoelectric substrate, first reflecting grating, second reflecting grating, interdigital transducer, first elastic material, second elastic material, first quality piece, second quality piece, first reflecting grating the second reflecting grating the interdigital transducer is arranged in on the piezoelectric substrate, the interdigital transducer arrange in first reflecting grating with between the second reflecting grating first reflecting grating with between the interdigital transducer set up first recess on the piezoelectric substrate, first elastic material arranges in the bottom of first recess, first quality piece is arranged in first elastic material's top the second reflecting grating with between the interdigital transducer set up the second recess on the piezoelectric substrate, second elastic material arranges in the bottom of second recess, the second quality piece is arranged in the top of second elastic material.
2. The surface acoustic wave acceleration sensor of claim 1, characterized in that: the height of the first mass block is larger than the depth of the first groove, and the height of the second mass block is larger than the depth of the second groove.
3. The surface acoustic wave acceleration sensor of claim 2, characterized in that: and a third mass block is arranged on the top of the first mass block and the second mass block.
4. A surface acoustic wave acceleration sensor as set forth in any one of claims 1-3, characterized in that: the piezoelectric substrate is made of lithium tantalate, lithium niobate or quartz.
5. The surface acoustic wave acceleration sensor of claim 4, characterized in that: the material of the first mass block is the same as that of the piezoelectric substrate.
6. The surface acoustic wave acceleration sensor of claim 5, characterized in that: the material of the second mass block is the same as that of the piezoelectric substrate.
7. The surface acoustic wave acceleration sensor of claim 6, characterized in that: the material of the third mass block is the same as that of the piezoelectric substrate.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202010487834.5A CN111474385A (en) | 2020-06-02 | 2020-06-02 | Surface acoustic wave acceleration sensor |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202010487834.5A CN111474385A (en) | 2020-06-02 | 2020-06-02 | Surface acoustic wave acceleration sensor |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN111474385A true CN111474385A (en) | 2020-07-31 |
Family
ID=71765485
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN202010487834.5A Withdrawn CN111474385A (en) | 2020-06-02 | 2020-06-02 | Surface acoustic wave acceleration sensor |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN111474385A (en) |
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2020
- 2020-06-02 CN CN202010487834.5A patent/CN111474385A/en not_active Withdrawn
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Application publication date: 20200731 |
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| WW01 | Invention patent application withdrawn after publication |