CN111474164A - Micro laser Raman spectrometer and working method thereof - Google Patents
Micro laser Raman spectrometer and working method thereof Download PDFInfo
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- CN111474164A CN111474164A CN202010485425.1A CN202010485425A CN111474164A CN 111474164 A CN111474164 A CN 111474164A CN 202010485425 A CN202010485425 A CN 202010485425A CN 111474164 A CN111474164 A CN 111474164A
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/62—Systems in which the material investigated is excited whereby it emits light or causes a change in wavelength of the incident light
- G01N21/63—Systems in which the material investigated is excited whereby it emits light or causes a change in wavelength of the incident light optically excited
- G01N21/65—Raman scattering
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/01—Arrangements or apparatus for facilitating the optical investigation
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/01—Arrangements or apparatus for facilitating the optical investigation
- G01N2021/0106—General arrangement of respective parts
- G01N2021/0112—Apparatus in one mechanical, optical or electronic block
Abstract
The invention discloses a micro laser Raman spectrometer and a working method thereof, wherein the micro laser Raman spectrometer comprises a visible light optical path structure, a laser optical path structure and a sample signal optical path structure; the visible light optical path structure comprises a visible light source, a first semi-reflecting and semi-transmitting lens, a second semi-reflecting and semi-transmitting lens, a first reflector, a microscope objective, a first focusing lens, an optical lens and an imaging camera, wherein the microscope objective is positioned below the first reflector; the laser light path structure comprises a laser and a Raman optical filter; the sample signal light path structure comprises a signal detector and a focusing lens group; the visible light optical path structure, the laser optical path structure and the sample signal optical path structure share the first semi-reflecting semi-transparent mirror. The micro laser Raman spectrometer adopts non-optical fiber coupling, can effectively reduce signal loss and is beneficial to improving sensitivity.
Description
Technical Field
The invention belongs to the technical field of Raman spectrometers, and particularly relates to a micro laser Raman spectrometer and a working method thereof.
Background
The micro laser Raman spectrometer is a comprehensive measurement system integrating laser spectroscopy, precise machinery and microelectronic systems. The final result is to obtain the spectrum of the scattered light intensity with frequency distribution of the scattering medium with a certain polarization state in a certain direction.
The analysis of the micro laser Raman spectrometer is a non-destructive micro-area analysis means, and liquid, powder and various solid samples can be used for the measurement of Raman spectrum without special treatment. Raman spectroscopy can be used alone or in combination with other techniques (e.g., X-ray diffraction spectroscopy, infrared absorption spectroscopy, neutron scattering, etc.) to facilitate the determination of ion, molecular species, and material structure. The application of the method is mainly to analyze the molecular composition, the structure, the relative content and the like of various solid, liquid and gaseous substances so as to realize the identification and the qualification of the substances.
At present, a micro laser Raman spectrometer based on a small optical fiber spectrometer in China usually adopts an optical fiber coupling mode to collect optical signals, a laser light source is led into a microscope objective lens through optical fibers, then Raman spectrum signals of a sample are collected through the microscope objective lens, and the Raman spectrum signals are coupled into the optical fiber spectrometer through Raman spectrum and optical fibers, and the process is characterized in that a commercialized low-cost optical fiber coupler (generally adopting SMA950) is adopted, and more than 50% of optical signals are lost when the optical signals enter and exit the optical fibers every time. And the Raman scattering signal is only equivalent to one millionth of a Rayleigh scattering signal, and the signal of a microscopic light path is weaker, so that the sensitivity of the Raman spectrometer is low.
Disclosure of Invention
The invention aims to provide a micro laser Raman spectrometer and a working method thereof, wherein the micro laser Raman spectrometer can effectively reduce signal loss and is beneficial to improving sensitivity.
The technical scheme is as follows:
the micro laser Raman spectrometer comprises a spectrometer main body, wherein a visible light optical path structure, a laser optical path structure and a sample signal optical path structure are arranged on the spectrometer main body;
the visible light optical path structure comprises a visible light source, a first semi-reflecting and semi-transmitting mirror, a second semi-reflecting and semi-transmitting mirror, a first reflector, a microscope objective, a first focusing lens, an optical lens and an imaging camera, a visible light output path is formed among the visible light source, the second semi-reflecting and semi-transmitting mirror, the first reflector and the microscope objective, a visible light signal input path is formed among the microscope objective, the first reflector, the first semi-reflecting and semi-transmitting mirror, the second semi-reflecting and semi-transmitting mirror, the first focusing lens, the optical lens and the imaging camera, and the microscope objective is positioned below the first reflector;
the laser light path structure comprises a laser and a Raman optical filter, and a laser output path is formed among the laser, the Raman optical filter, the first semi-reflecting semi-transparent mirror, the first reflecting mirror and the microscope objective;
the sample signal light path structure comprises a signal detector and a focusing lens group, and the microscope objective, the first reflector, the first semi-reflecting semi-transmitting mirror, the Raman optical filter, the focusing lens group and the signal detector form a sample signal input path;
the visible light optical path structure, the laser optical path structure and the sample signal optical path structure share the first semi-reflecting semi-transparent mirror.
The visible light source emits a visible light beam, the visible light beam is transmitted to the microscope objective along the visible light output path in sequence, and the microscope objective focuses the visible light beam on the sample; visible light signals are transmitted into an imaging camera through a microscope objective lens along a visible light signal input path in sequence to perform visible light signal imaging, so that the micro-area target position of a sample to be detected can be observed and determined conveniently; the laser beam emits a laser beam, and the laser beam is transmitted to the microscope objective along the laser output path in sequence, and the microscope objective focuses the laser beam on the sample; raman spectrum signals of the sample are transmitted into the signal detector along the sample signal input path in sequence through the microscope objective, light is split inside the signal detector, and Raman spectrum information of different wavelength positions is acquired. The visible light optical path structure, the laser optical path structure and the sample signal optical path structure are coupled without optical fibers, so that optical signal loss caused by optical fiber coupling is avoided, the sensitivity of equipment is improved, and the detection efficiency is improved; and the visible light optical path structure, the laser optical path structure and the sample signal optical path structure share the first semi-reflecting semi-transparent lens, so that the visible light observation of the sample and the collection of Raman spectrum signals can be realized simultaneously, the observation of the specific position of the sample irradiated by the laser beam can be implemented, the collection of the Raman spectrum signals of the sample is facilitated, and the sensitivity of the equipment is improved.
In one of them embodiment, visible light path structure still includes the second mirror, first semi-reflecting semi-transparent mirror, second semi-reflecting semi-transparent mirror and second mirror all are first preset angle setting with the visible light beam that the visible light source sent, interval setting between first semi-reflecting semi-transparent mirror, second semi-reflecting semi-transparent mirror and the second mirror, the second mirror is located visible light signal input path, just first focusing lens is located between second semi-reflecting semi-transparent mirror and the second mirror, visible light signal passes through second mirror reflection transmission to optical lens. After the visible light signal is focused by the first focusing lens, the transmission direction of the visible light signal is changed through the second reflecting mirror, the visible light signal is transmitted to the optical lens, the installation position of a visible light optical path structure in the equipment can be reasonably arranged, the equipment space is saved, and the cost is reduced.
In one embodiment, the laser light path structure further includes a third reflector and a fourth reflector, the third reflector and the fourth reflector are both arranged at a first preset angle with respect to a laser beam emitted by the laser, the third reflector and the fourth reflector are both located on the laser output path, and the laser beam is reflected and transmitted to the raman filter sequentially through the third reflector and the fourth reflector. The laser beam is transmitted to the Raman optical filter after the transmission direction is changed twice through the third reflector and the fourth reflector, the installation position of the laser light path structure in the equipment is reasonably arranged, the equipment space is saved, and the cost is reduced.
In one embodiment, the sample signal optical path structure further includes a fifth mirror disposed at a second predetermined angle with respect to the sample signal, the fifth mirror is located behind the focusing lens group on the sample signal input path, and the sample signal is reflected and transmitted to the signal detector through the fifth mirror. After the sample Raman spectrum signal is focused by the focusing lens group, the transmission direction is changed through the fifth reflecting mirror, the sample Raman spectrum signal is transmitted to the signal detector, the installation position of a sample signal light path structure in the equipment is reasonably arranged, the equipment space is saved, and the cost is reduced.
In one embodiment, the focusing lens group is located between the raman filter and the fifth reflector, the focusing lens group at least includes a second focusing lens and a third focusing lens, the second focusing lens and the third focusing lens are arranged in a flush manner, and the second focusing lens and the third focusing lens are arranged at intervals. And the sample signal is focused twice through the second focusing lens and the third focusing lens, so that the successful focusing and coupling of the sample signal are ensured.
In one embodiment, the spectrometer body is further provided with a carrying platform and a lifting mechanism, the carrying platform is connected with the lifting mechanism, and the carrying platform is located below the microscope objective. The sample is placed on the carrying platform, and the carrying platform is adjusted through the lifting mechanism to adjust the sample to the best focus position, the micro-area target position and the laser best focus point of the sample can be conveniently observed, the sensitivity can be favorably improved, and the detection efficiency can be improved.
In one embodiment, the object stage comprises a stage base and an object stage main body, wherein a first movable groove is arranged on the stage base, the first movable groove is arranged along the x-axis direction of the spectrometer main body, and the object stage main body is movably connected with the first movable groove. The spectrometer comprises a platform base and is characterized in that a second movable groove is formed in the platform base and is arranged along the y-axis direction of a spectrometer main body, a connecting rod is arranged between an object carrying platform and a lifting mechanism and is connected with the lifting mechanism through the connecting rod, one end of the connecting rod is fixedly connected with the lifting mechanism, and the other end of the connecting rod is movably connected with the second movable groove. Through the arrangement, the loading platform can be moved along the xy axis direction, and the sample is adjusted to the optimal focus position.
In one embodiment, a first light-shielding door and a second light-shielding door are arranged on the housing of the spectrometer main body, the first light-shielding door and the second light-shielding door are both arranged in a bent manner, when the first light-shielding door and the second light-shielding door are closed, a cavity is formed among the first light-shielding door, the second light-shielding door and the housing of the spectrometer main body, and the object stage, the lifting mechanism and the microscope objective are all located in the cavity. The setting of first window-shades and second window-shades can effectively shelter from external light, avoids external light to disturb, influences the normal clear of detection, improves the detection accuracy.
In one embodiment, the working method of the micro laser Raman spectrometer comprises the following steps:
starting a visible light source, wherein the visible light source emits a visible light beam;
the visible light beam irradiates the second semi-reflecting and semi-transmitting mirror, is reflected and transmitted to the first semi-reflecting and semi-transmitting mirror, and is reflected and transmitted to the first reflecting mirror through the first semi-reflecting and semi-transmitting mirror, the first reflecting mirror reflects and transmits the visible light beam to the microscope objective, and the microscope objective focuses the visible light beam on a sample;
visible light signals are transmitted to a first reflector through a microscope objective and transmitted to a first semi-reflecting and semi-transmitting lens through reflection of the first reflector, half of the visible light signals are transmitted to a second semi-reflecting and semi-transmitting lens through reflection of the first semi-reflecting and semi-transmitting lens and transmitted to an optical lens after being focused by a first focusing lens through the second semi-reflecting and semi-transmitting lens, and then the visible light signals enter an imaging camera for white light signal imaging;
starting a laser, and emitting a laser beam by the laser;
the laser beam is transmitted to the Raman optical filter, reflected to the first semi-reflecting semi-transmitting mirror through the Raman optical filter and transmitted to the first reflecting mirror through the first semi-reflecting semi-transmitting mirror, the laser beam is reflected and transmitted to the microscope objective by the first reflecting mirror, and the microscope objective focuses the laser beam on a sample;
a sample signal is transmitted to a first reflector through a microscope objective lens, is transmitted to a first semi-reflecting semi-transmitting lens through reflection of the first reflector, is transmitted to a Raman optical filter through the first semi-reflecting semi-transmitting lens, is transmitted to a signal detector through the Raman optical filter and is focused by a focusing lens group, the sample signal is split in the signal detector, and the signal detector acquires Raman spectrum information of different wavelength positions;
the visible light beam and the laser beam transmit signals through the same first semi-reflecting semi-transparent mirror.
According to the micro laser Raman spectrometer and the working method thereof, due to the fact that no optical fiber coupling is adopted, optical signal loss caused by optical fiber coupling is avoided, and therefore the sensitivity of equipment is improved, and meanwhile the detection efficiency is improved; the visible light beam and the laser beam transmit signals through the same first semi-reflecting semi-transparent mirror, so that visible light observation of a sample and collection of Raman spectrum signals can be simultaneously realized, the observation of the laser beam irradiating on the specific position of the sample can be implemented, the collection of the Raman spectrum signals of the sample is facilitated, and the sensitivity of equipment is improved.
Drawings
The accompanying drawings, which are incorporated in and constitute a part of this specification, illustrate embodiments of the invention and, together with the description, serve to explain the principles and effects of the invention.
Unless otherwise specified or defined, the same reference numerals in different figures refer to the same or similar features, and different reference numerals may be used for the same or similar features.
Fig. 1 is a schematic diagram of an optical path structure in a micro laser raman spectrometer according to an embodiment of the present invention.
Fig. 2 is a schematic view of the overall structure of the micro laser raman spectrometer according to the embodiment of the present invention.
Fig. 3 is a schematic diagram of the internal structure of the micro laser raman spectrometer according to the embodiment of the present invention.
Description of reference numerals:
10. a visible light source; 11. a second half-reflecting and half-transmitting mirror; 12. a first focusing lens; 13. a second reflector; 14. an optical lens; 15. an imaging camera; 20. a first semi-reflective semi-transparent mirror; 30. a first reflector; 40. a microscope objective; 50. a laser; 51. a third reflector; 52. a fourth mirror; 60. a Raman filter; 70. a signal detector; 71. a second focusing lens; 72. a third focusing lens; 73. a fifth mirror; 80. a carrier platform; 81. a platform base; 82. an objective table main body; 83. a lifting mechanism; 90. a first light-shielding door; 91. and a second light-shielding door.
Detailed Description
In order to facilitate an understanding of the invention, specific embodiments thereof will be described in more detail below with reference to the accompanying drawings.
Unless specifically stated or otherwise defined, all technical and scientific terms used herein have the same meaning as commonly understood by one of ordinary skill in the art to which this invention belongs. In the case of combining the technical solutions of the present invention in a realistic scenario, all technical and scientific terms used herein may also have meanings corresponding to the purpose of achieving the technical solutions of the present invention.
As used herein, unless otherwise specified or defined, "first" and "second" … are used merely for name differentiation and do not denote any particular quantity or order.
As used herein, the term "and/or" includes any and all combinations of one or more of the associated listed items, unless specified or otherwise defined.
It will be understood that when an element is referred to as being "secured to" another element, it can be directly secured to the other element or intervening elements may also be present; when an element is referred to as being "connected" to another element, it can be directly connected to the other element or intervening elements may also be present; when an element is referred to as being "mounted on" another element, it can be directly on the other element or intervening elements may also be present. When an element is referred to as being "on" another element, it can be directly on the other element or intervening elements may also be present.
As used herein, unless otherwise specified or defined, the terms "comprises," "comprising," and "comprising" are used interchangeably to refer to the term "comprising," and are used interchangeably herein.
It is needless to say that technical contents or technical features which are contrary to the object of the present invention or clearly contradicted by the object of the present invention should be excluded.
As shown in fig. 1, the micro laser raman spectrometer comprises a spectrometer main body, wherein a visible light optical path structure, a laser optical path structure and a sample signal optical path structure are arranged in the top of the spectrometer main body;
the visible light optical path structure comprises a visible light source 10, a first half-reflecting and half-transmitting mirror 20, a second half-reflecting and half-transmitting mirror 11, a first reflecting mirror 30, a microscope objective lens 40, a first focusing lens 12, a second reflecting mirror 13, an optical lens 14 and an imaging camera 15, wherein a visible light output path is formed among the visible light source 10, the second half-reflecting and half-transmitting mirror 11, the first reflecting mirror 20, the first reflecting mirror 30 and the microscope objective lens 40, a visible light signal input path is formed among the microscope objective lens 40, the first reflecting mirror 30, the first half-reflecting and half-transmitting mirror 20, the second half-reflecting and half-transmitting mirror 11, the first focusing lens 12, the second reflecting mirror 13, the optical lens 14 and the imaging camera 15, and the microscope objective lens 40 is positioned below the first reflecting mirror 30; the visible light source 10 emits a visible light beam, the visible light beam is sequentially transmitted to the microscope objective 40 along a visible light output path, and the microscope objective 40 focuses the visible light beam on the sample; visible light signals are transmitted into the imaging camera 15 through the microscope objective 40 along the visible light signal input path in sequence to perform visible light signal imaging, so that the micro-area target position of the sample to be detected can be observed and determined conveniently.
The laser optical path structure comprises a laser 50, a third reflector 51, a fourth reflector 52 and a raman filter 60, and a laser output path is formed among the laser 50, the third reflector 51, the fourth reflector 52, the raman filter 60, the first semi-reflective semi-transparent mirror 20, the first reflector 30 and the microscope objective 40; the laser beam emits a laser beam which is transmitted along a laser output path to the microscope objective 40 in turn, and the microscope objective 40 focuses the laser beam on the sample.
The sample signal optical path structure comprises a fifth reflector 73, a signal detector 70 and a focusing lens group, and the microscope objective 40, the first reflector 30, the first semi-reflecting semi-permeable mirror 20, the raman filter 60, the focusing lens group, the fifth reflector 73 and the signal detector 70 form a sample signal input path; the raman spectrum signal of the sample is transmitted into the signal detector 70 through the microscope objective 40 along the sample signal input path in sequence, and is split inside the signal detector 70 to obtain raman spectrum information at different wavelength positions.
In this embodiment, the visible light optical path structure, the laser optical path structure, and the sample signal optical path structure all share the first half-reflecting and half-transmitting mirror 20, and the visible light optical path structure, the laser optical path structure, and the sample signal optical path structure all adopt non-optical fiber coupling. The visible light optical path structure, the laser optical path structure and the sample signal optical path structure are coupled by adopting no optical fiber, so that optical signal loss caused by optical fiber coupling is avoided, the sensitivity of equipment is improved, and the detection efficiency is improved; and the visible light optical path structure, the laser optical path structure and the sample signal optical path structure all share the first semi-reflecting semi-transparent mirror 20, in this embodiment, the semi-reflecting semi-transparent mirror is not required to be switched by setting a pull rod to switch the visible light optical path and the laser optical path, the device can simultaneously realize visible light observation of the sample and acquisition of Raman spectrum signals, and can also realize observation of the specific position of the sample irradiated by the laser beam, thereby being beneficial to acquiring the Raman spectrum signals of the sample, improving the sensitivity of the device, having no movable part in the whole optical path structure and improving the stability.
In this embodiment, the fluorescent signal of most samples can be avoided by using a laser 50 emitting 785nm laser light. Fluorescence is the largest factor for interfering Raman spectrum signals, most of samples have fluorescence in the range of 600-700nm, and 785nm can effectively avoid most of fluorescence signal interference and improve detection sensitivity. The signal detector 70 is an array CCD detection spectrometer, it should be noted that the spectrometer main body refers to the whole micro laser raman spectrometer device, and the signal detector 70 is a component in the whole device for acquiring raman spectrum information. In other embodiments, because the sensitivity is high enough, a non-refrigeration spectrometer can be adopted, the cost is greatly reduced, the noise is low, no vibration exists, and the spectral stability is favorably improved.
First half reflection-semitransmission mirror 20, second half reflection-semitransmission mirror 11 and second mirror 13 all are the first angle setting of predetermineeing with the visible light beam that visible light source 10 sent, interval setting between first half reflection-semitransmission mirror 20, second half reflection-semitransmission mirror 11 and second mirror 13, first focusing lens 12 is located between second half reflection-semitransmission mirror 11 and the second mirror 13, visible light signal passes through second mirror 13 reflection transmission to optical lens 14. The third reflector 51 and the fourth reflector 52 are both arranged at a first preset angle with a laser beam emitted by the laser 50, and the laser beam is reflected and transmitted to the raman filter 60 through the third reflector 51 and the fourth reflector 52 in sequence. The fifth reflector 73 and the sample signal are arranged at a second preset angle, the fifth reflector 73 is located behind the focusing lens group on the sample signal input path, and the sample signal is reflected and transmitted to the signal detector 70 through the fifth reflector 73. In this embodiment, the first predetermined angle ranges from 30 ° to 35 °, and the second predetermined angle ranges from 45 ° to 50 °. The transmission direction of the light path is changed by utilizing the reflector and the semi-reflecting and semi-transmitting mirror, and the installation positions of the visible light path structure, the laser light path structure and the sample signal light path structure in the equipment are reasonably arranged, so that the equipment space is saved, and the signal transmission of the signal path can be prevented from being blocked while the cost is reduced.
The focusing lens group is located between the raman filter 60 and the fifth mirror 73, and in this embodiment, the focusing lens group includes a second focusing lens 71 and a third focusing lens 72, the second focusing lens 71 and the third focusing lens 72 are flush with each other, and the second focusing lens 71 and the third focusing lens 72 are spaced apart from each other. The Raman spectrum signal of the sample is focused twice through the second focusing lens 71 and the third focusing lens 72, so that the successful focusing and coupling of the Raman spectrum signal of the sample are ensured.
As shown in fig. 2 and 3, the spectrometer main body is further provided with a loading platform 80 and a lifting mechanism 83, the loading platform 80 is connected with the lifting mechanism 83, and the loading platform 80 is located below the microscope objective 40. The objective platform 80 comprises a platform base 81 and an objective table main body 82, a first movable groove is arranged on the platform base 81, the first movable groove is arranged along the x-axis direction of the spectrometer main body, and the objective table main body 82 is movably connected with the first movable groove. Be equipped with the second movable groove on platform base 81, the y axle direction setting of spectrum appearance main part is followed to the second movable groove, be equipped with the connecting rod between cargo platform 80 and the elevating system 83, just cargo platform 80 passes through the connecting rod and is connected with elevating system 83, wherein one end and the elevating system 83 fixed connection of connecting rod, the other end and second movable groove swing joint. The sample is placed on objective table main part 82 of objective platform 80, adjusts objective table 80's z axle position through elevating system 83, moves objective table main part 82 along xy axle direction to adjust sample to best focus position, the subregion target location and the best focus of laser of being convenient for observe the sample do benefit to and improve sensitivity, improve detection efficiency.
The both sides of the shell of spectrum appearance main part articulate respectively has first shading door 90 and second shading door 91, first shading door 90 and second shading door 91 are all crooked to be set up, when closing first shading door 90 and second shading door 91, form the cavity between the shell of first shading door 90, second shading door 91 and spectrum appearance main part, cargo platform 80, elevating system 83 and micro objective 40 all are located in the cavity. The setting of first shading door 90 and second shading door 91 can effectively shelter from external light, avoids external light to disturb, influences the normal clear of detection, improves the detection accuracy.
Handles are fixed on the first shading door 90 and the second shading door 91, and the two handles are symmetrically arranged in a flush manner. The setting of handle does benefit to and opens and close the sun visor door, flushes the setting with two handle symmetries and is favorable to two sun visor door atress even, improve equipment's aesthetic measure simultaneously.
The invention also provides a working method of the micro laser Raman spectrometer, which comprises the following steps:
turning on the visible light source 10, the visible light source 10 emitting a visible light beam;
the visible light beam irradiates on the second semi-reflecting and semi-transmitting mirror 11, is reflected and transmitted to the first semi-reflecting and semi-transmitting mirror 20, is reflected and transmitted to the first reflecting mirror 30 through the first semi-reflecting and semi-transmitting mirror 20, the visible light beam is reflected and transmitted to the microscope objective lens 40 by the first reflecting mirror 30, and the microscope objective lens 40 focuses the visible light beam on a sample placed on the objective platform 80;
visible light signals are transmitted to the first reflector 30 through the microscope objective 40, are transmitted to the first semi-reflecting and semi-transmitting lens 20 through reflection of the first reflector 30, and half of the visible light signals are transmitted to the second semi-reflecting and semi-transmitting lens 11 through reflection of the first semi-reflecting and semi-transmitting lens 20, are focused on the second reflector 13 through the first focusing lens 12 through the second semi-reflecting and semi-transmitting lens 11, are transmitted to the optical lens 14 through reflection of the second reflector 13, and enter the imaging camera 15 for white light signal imaging;
turning on the laser 50, the laser 50 emits a laser beam;
the laser beam is reflected and transmitted to the raman filter 60 twice through the third reflector 51 and the fourth reflector 52, reflected to the first semi-reflecting and semi-transmitting lens 20 through the raman filter 60, transmitted to the first reflector 30 through the first semi-reflecting and semi-transmitting lens, reflected and transmitted to the microscope objective 40 by the first reflector 30, and focused to the sample of the objective platform 80 by the microscope objective 40;
controlling the lifting mechanism 83, adjusting the height of the loading platform 80, and adjusting the loading platform 80 to the optimal laser focus position along the xy-axis direction;
the sample signal is transmitted to the first reflector 30 through the microscope objective lens 40, is reflected and transmitted to the first semi-reflecting and semi-transmitting mirror 20 through the first reflector 30, is transmitted to the raman filter 60 through the first semi-reflecting and semi-transmitting mirror 20, is focused to the fifth reflector 73 through the focusing lens group through the raman filter 60, is reflected and transmitted to the signal detector 70 through the fifth reflector 73, is split in the signal detector 70, and the signal detector 70 acquires raman spectrum information at different wavelength positions;
the visible light beam and the laser beam transmit signals through the same first transflective mirror 20.
The micro laser Raman spectrometer provided by the invention comprises a visible light optical path structure without optical fiber coupling, a laser optical path structure and a sample signal optical path structure, and avoids optical signal loss caused by optical fiber coupling, thereby realizing the improvement of the sensitivity of equipment and simultaneously improving the detection efficiency; and the visible light path structure, the laser light path structure and the sample signal light path structure all share the first semi-reflecting semi-transparent mirror 20, and the semi-reflecting semi-transparent mirror is not required to be switched by arranging a pull rod to switch the visible light path and the laser light path, so that the device can simultaneously realize visible light observation of the sample and collection of Raman spectrum signals, can also implement observation of laser beam irradiation at the specific position of the sample, is favorable for collecting the Raman spectrum signals of the sample, improves the sensitivity of the device, has no movable part in the whole light path structure, and improves the stability.
The above embodiments are provided to illustrate, reproduce and deduce the technical solutions of the present invention, and to fully describe the technical solutions, the objects and the effects of the present invention, so as to make the public more thoroughly and comprehensively understand the disclosure of the present invention, and not to limit the protection scope of the present invention.
The above examples are not intended to be exhaustive of the invention and there may be many other embodiments not listed. Any alterations and modifications without departing from the spirit of the invention are within the scope of the invention.
Claims (10)
1. The micro laser Raman spectrometer comprises a spectrometer main body and is characterized in that the spectrometer main body is provided with a visible light optical path structure, a laser optical path structure and a sample signal optical path structure;
the visible light optical path structure comprises a visible light source, a first semi-reflecting and semi-transmitting mirror, a second semi-reflecting and semi-transmitting mirror, a first reflector, a microscope objective, a first focusing lens, an optical lens and an imaging camera, a visible light output path is formed among the visible light source, the second semi-reflecting and semi-transmitting mirror, the first reflector and the microscope objective, a visible light signal input path is formed among the microscope objective, the first reflector, the first semi-reflecting and semi-transmitting mirror, the second semi-reflecting and semi-transmitting mirror, the first focusing lens, the optical lens and the imaging camera, and the microscope objective is positioned below the first reflector;
the laser light path structure comprises a laser and a Raman optical filter, and a laser output path is formed among the laser, the Raman optical filter, the first semi-reflecting semi-transparent mirror, the first reflecting mirror and the microscope objective;
the sample signal light path structure comprises a signal detector and a focusing lens group, and the microscope objective, the first reflector, the first semi-reflecting semi-transmitting mirror, the Raman optical filter, the focusing lens group and the signal detector form a sample signal input path;
the visible light optical path structure, the laser optical path structure and the sample signal optical path structure share the first semi-reflecting semi-transparent mirror.
2. The micro-laser raman spectrometer of claim 1, wherein the visible light optical path structure further includes a second reflecting mirror, the first semi-reflective semi-transparent mirror, the second semi-reflective semi-transparent mirror and the second reflecting mirror are all disposed at a first predetermined angle with respect to a visible light beam emitted from the visible light source, the first semi-reflective semi-transparent mirror, the second semi-reflective semi-transparent mirror and the second reflecting mirror are disposed at intervals, the second reflecting mirror is disposed on a visible light signal input path, the first focusing lens is disposed between the second semi-reflective semi-transparent mirror and the second reflecting mirror, and the visible light signal is reflected and transmitted to the optical lens through the second reflecting mirror.
3. The micro laser raman spectrometer of claim 1, wherein the laser optical path structure further comprises a third reflector and a fourth reflector, the third reflector and the fourth reflector are both disposed at a first predetermined angle with respect to a laser beam emitted by the laser, the third reflector and the fourth reflector are both disposed on the laser output path, and the laser beam is reflected and transmitted to the raman filter sequentially through the third reflector and the fourth reflector.
4. The micro laser raman spectrometer of claim 1, wherein the sample signal optical path structure further comprises a fifth mirror disposed at a second predetermined angle with respect to the sample signal, the fifth mirror being disposed on the sample signal input path behind the focusing lens assembly, the sample signal being reflected by the fifth mirror for transmission to the signal detector.
5. The micro laser raman spectrometer of claim 4, wherein the focusing lens group is located between the raman filter and the fifth mirror, the focusing lens group comprises at least a second focusing lens and a third focusing lens, the second focusing lens and the third focusing lens are arranged in a flush manner, and the second focusing lens and the third focusing lens are arranged at intervals.
6. The micro laser raman spectrometer of any one of claims 1 to 5, wherein a stage and a lifting mechanism are further provided on the spectrometer body, the stage is connected to the lifting mechanism, and the stage is located below the microscope objective.
7. The micro laser raman spectrometer of claim 6, wherein the stage comprises a stage base and a stage body, the stage base is provided with a first movable groove, the first movable groove is arranged along an x-axis direction of the spectrometer body, and the stage body is movably connected with the first movable groove.
8. The micro laser raman spectrometer of claim 7, wherein the platform base is provided with a second movable groove, the second movable groove is arranged along a y-axis direction of the spectrometer body, a connecting rod is arranged between the carrying platform and the lifting mechanism, the carrying platform is connected with the lifting mechanism through the connecting rod, one end of the connecting rod is fixedly connected with the lifting mechanism, and the other end of the connecting rod is movably connected with the second movable groove.
9. The micro-laser raman spectrometer of claim 6, wherein the housing of the spectrometer body is provided with a first light-shielding door and a second light-shielding door, the first light-shielding door and the second light-shielding door are both disposed in a curved manner, when the first light-shielding door and the second light-shielding door are closed, a cavity is formed between the first light-shielding door, the second light-shielding door and the housing of the spectrometer body, and the stage, the lifting mechanism and the microscope objective are all located in the cavity.
10. The working method of the micro laser Raman spectrometer is characterized by comprising the following steps of:
starting a visible light source, wherein the visible light source emits a visible light beam;
the visible light beam irradiates the second semi-reflecting and semi-transmitting mirror, is reflected and transmitted to the first semi-reflecting and semi-transmitting mirror, and is reflected and transmitted to the first reflecting mirror through the first semi-reflecting and semi-transmitting mirror, the first reflecting mirror reflects and transmits the visible light beam to the microscope objective, and the microscope objective focuses the visible light beam on a sample;
visible light signals are transmitted to a first reflector through a microscope objective and transmitted to a first semi-reflecting and semi-transmitting lens through reflection of the first reflector, half of the visible light signals are transmitted to a second semi-reflecting and semi-transmitting lens through reflection of the first semi-reflecting and semi-transmitting lens and transmitted to an optical lens after being focused by a first focusing lens through the second semi-reflecting and semi-transmitting lens, and then the visible light signals enter an imaging camera for white light signal imaging;
starting a laser, and emitting a laser beam by the laser;
the laser beam is transmitted to the Raman optical filter, reflected to the first semi-reflecting semi-transmitting mirror through the Raman optical filter and transmitted to the first reflecting mirror through the first semi-reflecting semi-transmitting mirror, the laser beam is reflected and transmitted to the microscope objective by the first reflecting mirror, and the microscope objective focuses the laser beam on a sample;
the sample signal is transmitted to the first reflector through the microscope objective lens and transmitted to the first semi-reflecting semi-transmitting lens through the first reflector, a half of the sample signal is transmitted to the Raman optical filter through the first semi-reflecting semi-transmitting lens and transmitted to the signal detector after being focused through the focusing lens group through the Raman optical filter, the sample signal is split in the signal detector, and the signal detector acquires Raman spectrum information at different wavelength positions
The visible light beam and the laser beam transmit signals through the same first semi-reflecting semi-transparent mirror.
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| CN112577931A (en) * | 2020-11-25 | 2021-03-30 | 江苏度微光学科技有限公司 | Sample rod suitable for microspectroscopic imaging test in low-temperature high-intensity magnetic field environment and test method thereof |
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| CN112577931A (en) * | 2020-11-25 | 2021-03-30 | 江苏度微光学科技有限公司 | Sample rod suitable for microspectroscopic imaging test in low-temperature high-intensity magnetic field environment and test method thereof |
| CN112577931B (en) * | 2020-11-25 | 2024-04-19 | 江苏度微光学科技有限公司 | Microscopic spectrum imaging test sample rod suitable for low-temperature strong magnetic field environment and test method thereof |
| CN113008862A (en) * | 2021-02-03 | 2021-06-22 | 中国海洋大学 | Underwater Raman probe and underwater detection system |
| CN113143207A (en) * | 2021-03-09 | 2021-07-23 | 复旦大学 | Ultra-wide waveband double-channel living body optical imaging system |
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| CN115389485B (en) * | 2022-10-26 | 2023-03-10 | 中国科学技术大学 | Raman microscopic equipment and Raman spectrum detection method |
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