CN111463102B - Microchannel plate - Google Patents
Microchannel plate Download PDFInfo
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- CN111463102B CN111463102B CN202010425320.7A CN202010425320A CN111463102B CN 111463102 B CN111463102 B CN 111463102B CN 202010425320 A CN202010425320 A CN 202010425320A CN 111463102 B CN111463102 B CN 111463102B
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- electrode
- microchannel plate
- surface electrode
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J43/00—Secondary-emission tubes; Electron-multiplier tubes
- H01J43/04—Electron multipliers
- H01J43/06—Electrode arrangements
- H01J43/18—Electrode arrangements using essentially more than one dynode
- H01J43/24—Dynodes having potential gradient along their surfaces
- H01J43/246—Microchannel plates [MCP]
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Abstract
The invention provides a microchannel plate, which comprises millions of solid glass tubes positioned at the periphery and hollow glass tubes positioned in a middle effective area, wherein the diameters of the solid glass tubes and the hollow glass tubes are in micron order, the solid glass tubes and the hollow glass tubes are respectively and tightly distributed to form a microchannel plate body, a first surface and a second surface which are opposite to each other are limited, and metal electrodes are respectively plated to be used as an input surface electrode and an output surface electrode. The input surface electrode and the output surface electrode are respectively provided with a plated metal layer, the metal layer is positioned at the junction position of the peripheral solid glass tube and the middle effective area hollow glass tube to form a partial gap, and the shielding parts corresponding to the two metal electrodes are butted to form a complete junction layout; and the boundaries on the first surface and the second surface are alternately covered by the input surface and the output surface shielding parts respectively. The microchannel plate of the invention solves the problem of edge discharge by preparing the microchannel plate with a special electrode shape on the electrode surface of the microchannel plate.
Description
Technical Field
The invention relates to the technical field of microchannel plates, in particular to a microchannel plate for improving edge discharge.
Background
Microchannel plates are devices for electron multiplication amplification consisting of millions of hollow glass tubes with micron-sized diameters and surrounding solid glass tubes. The electrons can pass through the hollow glass tube wall in the middle area under the action of the electric field and collide with the tube wall to excite secondary electrons, so that multiplication and amplification of the electrons are realized. The peripheral solid glass tube mainly realizes the function of a strengthening structure.
The input and output surfaces of the microchannel plate need to be plated with metal electrodes for conducting electricity when the microchannel plate works, and the conventional metal electrodes cover the upper surface and the lower surface of the whole microchannel plate. Because the hollow glass tube in the middle effective area and the solid glass tube at the periphery have different electric conductivities, a partial discharge breakdown phenomenon can be formed under the high voltage when the microchannel plate works, and the normal use of the microchannel plate is influenced. In particular, the microchannel plate for three-generation image intensifier has higher requirement for operating voltage, so that the problem of edge discharge of the microchannel plate is urgently solved.
Disclosure of Invention
The invention aims to provide a microchannel plate for improving edge discharge, which comprises millions of solid glass tubes positioned on the periphery and hollow glass tubes positioned in a middle effective area, wherein the diameters of the solid glass tubes and the hollow glass tubes are micron-sized, the solid glass tubes and the hollow glass tubes are respectively and tightly distributed to form a microchannel plate body and limit a first surface and a second surface which are opposite, and the first surface and the second surface are respectively plated with metal electrodes as an input surface electrode and an output surface electrode, wherein:
the input surface electrode and the output surface electrode are respectively provided with a plated metal layer, the metal layer is positioned at the junction position of the peripheral solid glass tube and the middle effective area hollow glass tube to form a partial gap as a shielding part, and the shielding parts corresponding to the two metal electrodes are butted to form a complete junction layout; and the interfaces of the peripheral solid glass tubes and the middle effective area hollow glass tubes on the first surface and the second surface are respectively covered by the shielding parts of the input surface and the output surface in an alternating way.
Preferably, the microchannel plate body has a circular cross section, and the boundary is circular.
Preferably, the shielding parts formed on the metal layers of the input surface electrode and the output surface electrode are semicircular notches.
Preferably, a handle part extending towards the edge of the microchannel plate body is formed at the center of the semicircular notch.
Preferably, the material of the input and output face electrodes is a Ni-Cr alloy.
Preferably, the width of the shielding part is 1.5mm, and the ring angle of the semicircular notch is 210 °
Preferably, the edges of the input and output face electrodes are left with a width of connecting electrodes for electrical connection when assembling the image intensifier.
Preferably, the width of the electrode is 1.2mm.
Preferably, the resistivity of the hollow glass tube of the middle effective area is 6 x 10 13 Omega cm, resistivity of the peripheral solid glass tube is 3 x 10 16 Ω·cm。
Preferably, the input surface electrode has a circular metal layer, and the metal layer of the input surface electrode is not plated in a semicircular area located at the boundary and avoiding a semicircular area along the boundary, so that a semicircular shielding part is formed on the metal layer of the input surface electrode, and the shielding part covers more than 1/2 of the boundary on the first surface.
Preferably, the output surface electrode has a circular metal layer, the metal layer of the output surface electrode is not plated at the position of the boundary and avoids a semicircular area along the boundary, so that a semicircular shielding part is formed on the metal layer of the output surface electrode, the shielding part of the output surface electrode covers the boundary which is more than 1/2 of the second surface, and the shielding part of the output surface electrode is butted and partially overlapped with the shielding part of the input surface electrode at two surfaces.
Preferably, the input face electrode is distinguished from the output face electrode by an electrode gap.
Compared with the prior art, the technical scheme of the invention has the following remarkable beneficial effects:
the microchannel plate with the special electrode shape is prepared on the electrode surface of the microchannel plate, so that the problem of edge discharge of the microchannel plate is solved, wherein the middle effective area of the microchannel plate is formed by orderly arranging micron-sized hollow glass tubes, the hollow glass tubes are tightly wrapped by peripheral solid glass tubes, and the microchannel plate is fixed and molded by a hot melting and pressing technology. The input surface and the output surface of the microchannel plate are plated with metal electrodes by a vacuum coating technology and are used for conducting electricity when the microchannel plate works. The overlapped parts of the plated input surface and the plated output surface metal electrodes are circular or in other required shapes.
The overlapping parts of the prepared metal electrodes on the input surface and the output surface completely avoid the junction area of the hollow glass material and the solid glass material, are positioned in the hollow glass material area, alternately cover the junction area of the hollow glass material and the solid glass material, and increase the conductivity of the single-surface electrode by alternately covering the junction area of the hollow glass material and the solid glass material. Wherein the material of the electrode is Ni-Cr alloy. Meanwhile, the requirements of the microchannel plates with different shapes can be met by changing the shape of the electrode at the overlapped part of the input surface and the output surface, and the cost for developing and designing the microchannel plate with the new shape is greatly saved.
It should be understood that all combinations of the foregoing concepts and additional concepts described in greater detail below can be considered as part of the inventive subject matter of this disclosure unless such concepts are mutually inconsistent. Additionally, all combinations of claimed subject matter are considered a part of the presently disclosed subject matter.
The foregoing and other aspects, embodiments and features of the present teachings can be more fully understood from the following description taken in conjunction with the accompanying drawings. Additional aspects of the present invention, such as features and/or advantages of exemplary embodiments, will be apparent from the description which follows, or may be learned by practice of specific embodiments in accordance with the teachings of the present invention.
Drawings
The drawings are not intended to be drawn to scale. In the drawings, each identical or nearly identical component that is illustrated in various figures may be represented by a like numeral. For purposes of clarity, not every component may be labeled in every drawing. Embodiments of various aspects of the present invention will now be described, by way of example, with reference to the accompanying drawings, in which:
FIG. 1 is a schematic structural diagram of a microchannel plate to address edge discharge of the microchannel plate in accordance with an exemplary embodiment of the present invention.
FIG. 2 is a schematic half-sectional view of a microchannel plate structure according to the present invention.
FIG. 3 is a schematic diagram of the shape of the input surface electrode of the microchannel plate according to the present invention.
FIG. 4 is a schematic diagram of the shape of the electrode at the output surface of the microchannel plate according to the present invention.
Detailed Description
In order to better understand the technical content of the present invention, specific embodiments are described below with reference to the accompanying drawings.
In this disclosure, aspects of the present invention are described with reference to the accompanying drawings, in which a number of illustrative embodiments are shown. Embodiments of the present disclosure are not necessarily intended to encompass all aspects of the invention. It should be appreciated that the various concepts and embodiments described above, as well as those described in greater detail below, may be implemented in any of numerous ways, as the disclosed concepts and embodiments are not limited to any one implementation. In addition, some aspects of the present disclosure may be used alone, or in any suitable combination with other aspects of the present disclosure.
According to the microchannel plate provided by the exemplary embodiment of the invention, the microchannel plate metal electrode with a special shape is plated, the overlapped part of the input surface and the output surface of the plated microchannel plate is in a circular shape or other required shapes, and the shielding part of the electrode alternately covers the boundary position of the hollow glass tube on the two surfaces of the microchannel plate and the peripheral glass tube, so that the alternate enclosure on 2 surfaces is formed, the electric field distribution of the microchannel plate is uniform, the conductivity of a single-surface electrode is increased, and the edge discharge is improved.
The microchannel plate of the example shown in fig. 1-4 includes millions of solid glass tubes 1 located at the periphery and hollow glass tubes 2 located in the middle effective area, the diameters of the solid glass tubes and the hollow glass tubes are in the micron order, the solid glass tubes and the hollow glass tubes are respectively and tightly distributed to form the microchannel plate body and define a first surface and a second surface which are opposite, and the first surface and the second surface are respectively plated with metal electrodes as an input surface electrode 3 and an output surface electrode 4. In fig. 1 and 2, the number of closely arranged solid glass tubes and hollow glass tubes is exemplified.
In conjunction with the illustration, the input face electrode 3 and the output face electrode 4 can be distinguished by electrode gaps. For example, in fig. 3 and 4, the electrodes are distinguished by semicircular electrode gaps 5.
Referring to fig. 1, the middle effective area of the microchannel plate is formed by orderly arranging micron-sized hollow glass tubes, and the hollow glass tubes are tightly wrapped by peripheral solid glass tubes and are fixed and formed by a hot-melt pressing technology.
Preferably, the metal electrode is prepared by plating a metal layer by a vacuum plating technique. Preferably, the material of the electrode is Ni-Cr alloy, so that the phenomenon of discharge breakdown under high voltage caused by different conductivity of the material can be effectively avoided.
The input surface electrode and the output surface electrode are respectively provided with a plated metal layer, the metal layer is positioned at the junction of the peripheral solid glass tube and the middle effective area hollow glass tube to form a partial gap 7 as a shielding part, the shielding parts corresponding to the two metal electrodes are butted to form a complete junction layout, as shown in figures 3 and 4, and the junctions of the peripheral solid glass tube and the middle effective area hollow glass tube on the first surface and the second surface are respectively and alternately covered by the input surface shielding part and the output surface shielding part.
Referring to fig. 1, 3 and 4, the cross section of the microchannel plate body is circular, and the boundary is circular. The shielding parts formed on the metal layers of the input surface electrode 3 and the output surface electrode 4 are semicircular gaps.
Preferably, a handle part 8 extending toward the edge of the microchannel plate body is formed at the center of the semicircular notch, and in order to connect the shielding part 7 and the edge of the coating jig, the width of the handle part 8 is preferably 2mm
Preferably, the width of the shielding part on each metal electrode is 1.5mm, and the annular angle of the semicircular notch is 210 °
As shown in fig. 3 and 4, the edges of the input surface electrode and the output surface electrode are provided with connecting electrodes 6 with certain widths for electrical connection when assembling the image intensifier. Preferably, the width of the connection electrode 6 is 1.2mm.
Preferably, the resistivity of the hollow glass tube of the middle effective area is 6 x 10 13 Omega cm, resistivity of the peripheral solid glass tube is 3 x 10 16 Ω·cm。
In the embodiment shown in fig. 3 and 4, the input surface electrode 3 has a circular metal layer, and the metal layer of the input surface electrode is not plated at the position of the boundary and avoids a semicircular area along the boundary, so that a semicircular shielding part is formed on the metal layer of the input surface electrode, and the shielding part covers more than 1/2 of the boundary on the first surface.
Correspondingly, the output surface electrode 4 is provided with a circular metal layer, the metal layer of the output surface electrode is not plated in a semicircular area which is positioned at the position of the boundary and avoids a section of the semicircular area along the boundary, so that a semicircular shielding part is formed on the metal layer of the output surface electrode, the shielding part of the output surface electrode covers the boundary which is more than 1/2 of the second surface, and the shielding part of the output surface electrode is butted and partially overlapped with the shielding part of the input surface electrode on the two surfaces. In this way, the two metal layers respectively cover the boundary through the shielding parts arranged on the corresponding surfaces, and both exceed 1/2 of the boundary to form at least partial overlapping. For example, the design value of the ring angle is 210 degrees, which allows for rotational misalignment during film coating.
Therefore, the microchannel plate formed by the method can ensure that the electric field of the microchannel plate is uniformly distributed, and particularly has more obvious advantages under high voltage. After the microchannel plate is subjected to hydrogen reduction, the resistivity of the hollow glass tube in the middle effective area is 6 multiplied by 10 13 Omega cm, resistivity of the peripheral solid glass tube is 3 x 10 16 Omega cm, the hollow glass tube in the middle effective area has better conductivity.
Because the junction between the traditional hollow glass tube in the middle effective area and the peripheral solid glass tube (such as the cross arrangement of the glass fiber yarns with hexagonal cross sections and the glass fiber yarns with circular cross sections) is irregular, the electric field is more easily distributed unevenly, and a large number of electrons are gathered at the hollow glass tube to cause the discharge breakdown phenomenon. Under the condition of 800V, the discharge ratio of the edge of the microchannel plate prepared by the conventional method is 1.2%, and the discharge ratio of the edge of the microchannel plate of the special-shaped electrode prepared by the method is 0.01%. Under the condition of 1000V high voltage, the proportion of edge discharge even reaches 0.004-0.005%, and the improvement effect is better.
Although the present invention has been described with reference to the preferred embodiments, it is not intended to be limited thereto. Those skilled in the art can make various changes and modifications without departing from the spirit and scope of the invention. Therefore, the protection scope of the present invention should be defined by the appended claims.
Claims (7)
1. A microchannel plate, comprising millions of solid glass tubes located at the periphery and hollow glass tubes located in the middle active area, wherein the diameters of the solid glass tubes and the hollow glass tubes are in the micron order, the solid glass tubes and the hollow glass tubes are respectively and tightly distributed to form a microchannel plate body and define a first surface and a second surface which are opposite, and the first surface and the second surface are respectively plated with metal electrodes as an input surface electrode and an output surface electrode, wherein:
the input surface electrode and the output surface electrode are respectively provided with a plated metal layer, the metal layer is positioned at the junction position of the peripheral solid glass tube and the middle effective area hollow glass tube to form a partial gap as a shielding part, and the shielding parts corresponding to the two metal electrodes are butted to form a complete junction layout; and the borders of the peripheral solid glass tubes and the hollow glass tubes in the middle effective area on the first surface and the second surface are alternately covered by an input surface shielding part and an output surface shielding part respectively;
the input surface electrode is provided with a circular metal layer, the metal layer of the input surface electrode is not plated in a semicircular area which is positioned at the position of the boundary and avoids a section of semicircular area along the boundary, so that a semicircular shielding part is formed on the metal layer of the input surface electrode, and the first surface of the shielding part is covered with the boundary which exceeds 1/2;
the output surface electrode is provided with a circular metal layer, the metal layer of the output surface electrode is positioned at the position of the boundary and avoids a section of semicircular area along the boundary without plating, so that a semicircular shielding part is formed on the metal layer of the output surface electrode, the shielding part of the output surface electrode covers the other boundary which exceeds 1/2 on the second surface, and the shielding part of the output surface electrode and the shielding part of the input surface electrode form butt joint and partial overlapping on the two surfaces;
the section of the microchannel plate body is circular, and the boundary is circular;
the shielding parts formed on the metal layers of the input surface electrode and the output surface electrode are semicircular annular gaps;
the width of the shielding part is 1.5mm, and the circular angle of the semicircular annular gap is 210 degrees.
2. The microchannel plate of claim 1, wherein the semi-circular indentation has a central location formed with a handle portion of the indentation extending toward an edge of the microchannel plate body.
3. The microchannel plate of claim 1, wherein the input face electrode and output face electrode are made of a Ni-Cr alloy.
4. The microchannel plate of claim 1, wherein the edges of the input and output face electrodes each leave a 1.2mm wide connecting electrode for electrical connection when assembling the image intensifier.
5. The microchannel plate of claim 1, wherein the middle active area hollow glass tube has a resistivity of 6 x 10 13 Omega cm, resistivity of the peripheral solid glass tube is 3 x 10 16 Ω·cm。
6. The microchannel plate of claim 1, wherein the input face electrode is distinguished from the output face electrode by an electrode gap.
7. The microchannel plate of claim 1, wherein the input face electrode and the output face electrode are coated with a metal electrode by a vacuum coating technique.
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| CN202010388785X | 2020-05-09 | ||
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| CN111463102B true CN111463102B (en) | 2023-03-31 |
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| Publication number | Priority date | Publication date | Assignee | Title |
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| CN113155688A (en) * | 2021-05-18 | 2021-07-23 | 南京智能高端装备产业研究院有限公司 | Multifunctional electrical detection chip for detecting cell parameters |
| CN113445010B (en) * | 2021-06-29 | 2022-09-13 | 北方夜视技术股份有限公司 | Process for reducing specific loss of opening area in process of preparing composite metal film layer by using microchannel plate channel array and microchannel plate |
| CN114988692B (en) * | 2022-05-17 | 2024-01-23 | 北方夜视科技(南京)研究院有限公司 | Method for improving multifilament vertex angle dislocation in microchannel plate preparation process |
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| US3979621A (en) * | 1969-06-04 | 1976-09-07 | American Optical Corporation | Microchannel plates |
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