CN111455314B

CN111455314B - Precise metal mask plate and mask plate assembly with same

Info

Publication number: CN111455314B
Application number: CN202010513249.8A
Authority: CN
Inventors: 毕娜
Original assignee: BOE Technology Group Co Ltd
Current assignee: BOE Technology Group Co Ltd
Priority date: 2020-06-08
Filing date: 2020-06-08
Publication date: 2022-06-28
Anticipated expiration: 2040-06-08
Also published as: CN111455314A

Abstract

The invention discloses a precise metal mask plate and a mask plate assembly with the same, comprising: an effective display area; the display device comprises two welding areas, wherein the two welding areas are respectively positioned on two sides of the effective display area in the length direction, at least one welding area is a set welding area, and a first through hole is formed in the set welding area. According to the precise metal mask plate, the first through holes are formed in the set welding area, so that the stress distribution of the precise metal mask plate in the process of stretching the expanded mesh is facilitated, the wrinkle risk of the welding area is reduced, the welding precision is guaranteed, the condition of insufficient welding is reduced, and the quality of evaporation is improved.

Description

Precise metal mask plate and mask plate assembly with same

Technical Field

The invention relates to the technical field of display, in particular to a precise metal mask plate and a mask plate assembly with the same.

Background

Generally, in the manufacturing process of the display panel, a precise metal mask plays an important role, and particularly, in the manufacturing process of the OLED display panel, it is directly determined whether the organic light emitting material can be accurately and unmistakably evaporated onto the corresponding OLED substrate.

However, in the related art, in the process of welding the precise metal mask plate to the metal frame, a cold joint condition often occurs, which is not firm in welding and affects the quality of evaporation.

Disclosure of Invention

The present invention is directed to solving at least one of the problems of the prior art. Therefore, the invention provides the precise metal mask plate, which is beneficial to the stress distribution of the precise metal mask plate in the process of stretching the expanded mesh evenly and reducing the wrinkle risk of the welding area by arranging the first through holes in the set welding area, thereby ensuring the welding precision, reducing the condition of insufficient welding and improving the quality of evaporation.

The invention also provides a mask plate assembly with the precise metal mask plate.

The precise metal mask plate according to the first aspect of the present invention comprises: an effective display area; the display device comprises two welding areas, wherein the two welding areas are respectively positioned on two sides of the effective display area in the length direction, at least one welding area is a set welding area, and a first through hole is formed in the set welding area.

According to the precise metal mask plate of the first aspect of the invention, the first through holes are arranged in the set welding area, so that the shrinkage rates of the set welding area and the effective display area are the same or substantially the same, which is beneficial to averaging the stress distribution of the precise metal mask plate in the stretching process of the expanded screen, and reducing the wrinkle risk of the welding area, thereby ensuring the welding precision, reducing the false welding condition and improving the quality of evaporation.

In some embodiments, the set welding area has a welded portion and a non-welded portion, the welded portion is a solid structure, and the first through hole is formed in the non-welded portion.

In some embodiments, the welding portions are multiple and arranged in staggered rows and staggered columns, so that two adjacent rows of the welding portions are arranged in staggered columns.

In some embodiments, the first through hole is a plurality of through holes arranged at regular intervals on the non-welding portion.

In some embodiments, the first through holes are all the same in size and shape.

In some embodiments, the area of the welding part is S1, the area of each first through hole is S2, S1/S2 satisfies 30 ≦ S1/S2 ≦ 100.

In some embodiments, the first through hole is formed in a circular shape, an elliptical shape, or a polygonal shape.

In some embodiments, the precision metal mask further comprises: the stress balance area is located on one side, far away from the effective display area, of the welding area, and a second through hole is formed in the stress balance area.

In some embodiments, the area S3 of the second via and the area S2 of the first via satisfy: 0.9 or more and S3/S2 or less and 1.1 or less, wherein the second through holes are multiple and are uniformly distributed on the stress balance area at intervals.

A reticle assembly according to a second aspect of the present invention comprises: the two welding areas are respectively connected with the frame in a welding mode.

According to the mask plate assembly, the precise metal mask plate in the first aspect is arranged, so that stress distribution of the precise metal mask plate in the stretching process of the expanded mesh is facilitated, and wrinkle risk of a welding area is reduced, so that welding precision can be guaranteed, the condition of insufficient welding is reduced, and evaporation quality is improved.

Additional aspects and advantages of the invention will be set forth in part in the description which follows and, in part, will be obvious from the description, or may be learned by practice of the invention.

Drawings

FIG. 1 is a schematic structural diagram of a reticle assembly according to one embodiment of the present invention;

FIG. 2 is a schematic structural diagram of a precise metal mask according to an embodiment of the present invention;

FIG. 3 is a partial schematic view of a weld region defined according to one embodiment of the present invention;

FIG. 4 is a partial schematic view of a defined weld region according to another embodiment of the present invention;

FIG. 5 is a weld diagram of a localized structure defining a weld region in accordance with one embodiment of the present invention;

FIG. 6 is a weld schematic of a partial structure defining a weld region according to yet another embodiment of the present invention;

fig. 7 is a weld diagram of a partial structure defining a weld region according to yet another embodiment of the present invention.

Reference numerals are as follows:

a mask plate assembly 100;

a precision metal mask 10;

an effective display area 1;

a welding area 2; setting a welding area a: a welded portion 21; a non-welded portion 22; a first through hole 221;

a stress balance region 3;

a cutting line 4;

a frame 20; a solder joint 30.

Detailed Description

Reference will now be made in detail to embodiments of the present invention, examples of which are illustrated in the accompanying drawings, wherein like or similar reference numerals refer to the same or similar elements or elements having the same or similar function throughout. The embodiments described below with reference to the drawings are illustrative and intended to be illustrative of the invention and are not to be construed as limiting the invention.

The following disclosure provides many different embodiments, or examples, for implementing different features of the invention. To simplify the disclosure of the present invention, the components and arrangements of specific examples are described below. Of course, they are merely examples and are not intended to limit the present invention. Furthermore, the present invention may repeat reference numerals and/or letters in the various examples. This repetition is for the purpose of simplicity and clarity and does not in itself dictate a relationship between the various embodiments and/or configurations discussed. In addition, the present invention provides examples of various specific processes and materials, but one of ordinary skill in the art may recognize the applicability of other processes and/or the use of other materials.

Referring to fig. 1 and 2, a precision metal mask 10 according to an embodiment of the first aspect of the present invention may include an effective display region 1 and two welding regions 2.

Referring to fig. 2 and 3, two welding regions 2 are respectively located on both sides of the effective display region 1 in the length direction, at least one welding region 2 is a set welding region a, a first through hole 221 is formed in the set welding region a, and the first through hole 221 penetrates through the welding region 2 in the thickness direction of the precision metal mask plate 10. Here, "at least one welding area 2 is a set welding area a" may be understood as one of the two welding areas 2 is the set welding area a, or, as shown in fig. 2, both the two welding areas 2 are the set welding area a.

As shown in fig. 1, a precision Metal Mask 10 (FMM, english short) is a Mask used in an evaporation process of an organic light emitting material, a plurality of third through holes (not shown) are formed in the effective display region 1, and the effective display region 1 is used for evaporating the organic light emitting material to form red R, green G, and blue B pixels of the OLED display panel in a process of manufacturing the OLED display panel. In order to completely attach the precise metal mask plate 10 to the OLED substrate and accurately deposit the organic light-emitting material at a corresponding position on the OLED substrate during the evaporation process of the organic light-emitting material, a screen-stretching process needs to be performed on the precise metal mask plate 10, so that the metal mask plate is stretched and then welded to a Frame 20 (english Frame) described below to assemble the mask plate assembly 100.

The inventor finds in practical research that, in the related art, the third through hole is formed in the effective display area, and the welding area is of a solid structure, and the design has the following problems: because the difference of the shrinkage rates of the effective display area (with a porous structure) and the welding area (with a solid structure) of the precise metal mask plate in the non-stretching direction (such as the width direction of the precise metal mask plate shown in fig. 1) is large, wrinkles are generated in the welding area due to stress concentration during net stretching, so that the welding is not firm due to insufficient welding when the precise metal mask plate is welded to a frame, and the phenomenon that evaporation shadow is increased even color mixing risk is caused when the wrinkles are transmitted to the effective display area; if the welding area of the precise metal mask plate is flattened by other means and then welded, the phenomenon of outward expansion of the precise metal mask plate in the non-stretching direction is generated, and the accuracy of the evaporation position of the effective display area is reduced.

In view of this, referring to fig. 2 and 3, according to the precise metal mask 10 of the first embodiment of the present invention, by providing the first through hole 221 in the set welding region a, the shrinkage rates of the set welding region a and the effective display region 1 can be the same or substantially the same, which is beneficial to the stress distribution of the precise metal mask 10 during the average stretching process, and reduces the wrinkle risk of the welding region 2, thereby ensuring the welding precision, reducing the false welding condition, and improving the quality of the evaporation plating.

In some examples, referring to fig. 2, the number of the first through holes 221 is multiple, and the shapes, sizes, and distribution densities of the multiple first through holes 221 and the multiple third through holes are the same or have small differences, so that the stress strain distribution of the precision metal mask plate 10 in the mesh stretching process is further averaged, the risk of wrinkles and cold joints in the welding region 2 is reduced, and the mesh stretching precision is improved.

Alternatively, as shown with reference to fig. 2, the ratio of the shrinkage rates of the welding area a and the effective display area 1 may be set to be between 0.99 and 1.01, for example, the ratio of the shrinkage rates of the welding area a and the effective display area 1 may be set to be 0.991, 0.995, 0.999, 0.9991, 0.9997, 0.9998, 0.9999, 1, 1.0001, 1.0002, 1.0003, 1.001, 1.004, 1.009, and the like. Therefore, the risks of wrinkles and insufficient welding of the set welding area a can be further reduced, and the mesh stretching precision is improved.

In some embodiments of the present invention, referring to fig. 3, it is set that the welding area a has a welding portion 21 and a non-welding portion 22, the welding portion 21 has a solid structure, and the first through hole 221 is formed on the non-welding portion 22. For example, as shown in fig. 3 and 5, the portion of the welding area 2 other than the welding portion 21 is a non-welding portion 22, and the welding point 30 between the welding portion 21 and the frame is located on the welding portion 21.

It can be understood that by making the welding area 2 have the non-welding portion 22 provided with the first through hole 221, stress strain distribution of the precision metal mask plate 10 in the mesh stretching process can be averaged, wrinkles and cold joint risk of the set welding area a are reduced, and the mesh stretching precision is improved, and at the same time, by making the set welding area a have the welding portion 21 formed as a solid structure, it is advantageous to prevent the welding portion 21 from being welded through, and to improve the reliability of welding at the welding spot 30.

For example, in some examples, as shown in fig. 3, both the two welding areas 2 are set as a welding area a having a welding portion 21 and a non-welding portion 22, the welding portion 21 is a solid structure, the first through hole 221 is formed on the non-welding portion 22, when welding the mask plate assembly 100 described below, the precision metal mask plate 10 may be first subjected to a screen process, and the welding area 2 is attached to the frame 20, then the emitting end of the laser device is aligned with the welding portion 21, and finally the welding area 2 is welded to the frame 20 by using laser light emitted from the emitting end of the laser device. Therefore, the wrinkle and the false welding risk of the welding area 2 can be reduced, and the welding quality is improved.

Of course, the present invention is not limited to this, and referring to fig. 4, the welding portion 21 may also be a non-solid structure, in other words, the welding portion 21 is also provided with the first through holes 221, for example, the plurality of first through holes 221 are uniformly distributed at intervals on the whole set welding area a, and it can be understood that, by providing the first through holes 221 on the welding portion 21, it is beneficial to further make the shrinkage rates of the effective display area 1 and the preset welding area 2 the same, and the risk of wrinkles of the set welding area a can be further reduced.

In some alternative embodiments of the present invention, as shown in fig. 5, the welding portions 21 are multiple and are arranged in staggered rows and staggered columns, so that two adjacent rows of welding portions 21 are arranged in staggered columns. Therefore, the welding effect is improved, and the quality of evaporation is improved. For example, as shown in fig. 5, the first row of welds 21 includes two welds 21, the second row of welds 21 includes one weld 21, and the second row of welds 21 is located between the two welds 21 in the first row in the column direction.

Further, referring to fig. 5, the first through holes 221 are plural, and the plural first through holes 221 are uniformly spaced on the non-welded portion 22. Alternatively, the opening standard of the first vias 221 is at a pixel level. This contributes to the stress-strain distribution of the non-welded portion 22 during the average stretching. For example, as shown in fig. 5 and 6, the plurality of first through holes 221 are arranged in a plurality of rows and a plurality of columns on the non-welded portion 22.

In some alternative embodiments of the present invention, as shown in fig. 5, the plurality of first through holes 221 are all the same in size and shape. Therefore, the stress-strain distribution of the non-welding portion 22 in the net tensioning process is further averaged, the structure is simple, and the production cost is reduced.

In some alternative embodiments of the present invention, referring to FIG. 3, the area of the welding part 21 is S1, the area of each first through hole 221 is S2, and S1/S2 satisfies 30 ≦ S1/S2 ≦ 100. In other words, S1/S2 may take any value from 30 to 100. For example, S1/S2 may be 35, 40, 45, 50, 55, 60, 65, 70, 75, 80, 85, 90, 99, etc.

Therefore, on one hand, the area S1 of the welding portion 21 is not too small, so that the connection strength between the welding portion 21 and the frame 20 is ensured, and on the other hand, the area S1 of the welding portion 21 is not too large, so that the set welding area a and the effective display area 1 have the same or almost the same shrinkage rate, and therefore, the risks of wrinkles and insufficient welding in the welding area 2 are reduced, and the welding quality is improved.

In some embodiments of the present invention, the first through hole 221 is formed in a circular shape, an elliptical shape, or a polygonal shape. Therefore, the structure is simple, and the processing and forming of the first through hole 221 are facilitated. For example, referring to fig. 5, the first through hole 221 is formed in a hexagonal shape; as another example, as shown in fig. 6 and 7, the first through hole 221 is formed in a quadrangular shape.

In some embodiments of the present invention, referring to fig. 2, the precision metal mask plate 10 further includes: and a stress balance area 3, wherein the stress balance area 3 is positioned on one side of the welding area 2 far away from the effective display area 1, and a second through hole (not shown) is arranged on the stress balance area 3. It will be appreciated that by providing a second through hole in the stress balancing area 3, a stress relief may be achieved, further dampening the effect of the wrinkles.

In some examples, the second through holes are multiple, and the shapes, sizes, and distribution densities of the plurality of first through holes 221 and the plurality of second through holes are the same or less different.

In some alternative embodiments of the present invention, the area S3 of the second through hole and the area S2 of the first through hole 221 satisfy: 0.9. ltoreq. S3/S2. ltoreq.1.1, in other words, S3/S2 may take any value of 0.9 to 1.1, for example, S3/S2 may take any value of 0.91, 0.92, 0.93, 0.94, 0.95, 0.96, 0.97, 0.98, 0.99, 1, 1.01, 1.02, 1.03, 1.04, 1.05, 1.06, 1.07, 1.08, 1.09, etc., and the second through holes are plural and arranged uniformly spaced apart on the stress balance region 3.

Therefore, the shrinkage rates of the set welding area a and the stress balance area 3 are the same or substantially the same, the stress distribution of the precise metal mask plate 10 in the stretching process of the expanded mesh is further averaged, the wrinkle risk of the set welding area a is reduced, the welding precision can be ensured, the false welding condition is reduced, and the evaporation quality is improved.

For example, as shown in fig. 2 and 3, in some examples, both the two welding areas 2 are set welding areas a, the set welding areas a have a welding portion 21 and a non-welding portion 22, the welding portion 21 is a solid structure, the non-welding portion 22 is provided with a plurality of first through holes 221, the stress balance area 3 is located on one side of the welding area 2 away from the effective display area 1, the stress balance area 3 is provided with a plurality of second through holes, the plurality of first through holes 221, the plurality of second through holes and the plurality of third through holes have the same or smaller density or different distribution, a cutting line 4 is further provided between the set welding area a and the adjacent stress balance area 3, and the cutting line 4 may be designed by half etching.

When the precision metal mask plate 10 is welded, the precision metal mask plate 10 can be subjected to a mesh stretching process, the welding area 2 is attached to the frame 20, the transmitting end of the laser device is aligned with the welding portion 21, the welding area 2 is welded to the frame 20 by laser emitted by the transmitting end of the laser device, and finally the stress balance area 3 is cut off along the cutting line 4. From this, can effectively average the stress-strain distribution of stretching accurate metal mask board 10 of in-process, reduce 2 folds in welding area and rosin joint risks, and can improve welding quality, convenient operation, welding efficiency is high.

Referring to fig. 1 and 2, a mask plate assembly 100 according to an embodiment of the second aspect of the present invention may include: the frame 20 and the precision metal mask plate 10 according to the embodiment of the first aspect of the present invention, the two welding regions 2 are respectively welded to the frame 20. For example, the frame 20 may be a metal frame, and the two welding regions 2 are respectively connected to the frame 20 by laser welding.

According to the mask plate assembly 100 of the embodiment of the invention, by arranging the precise metal mask plate 10 of the first aspect of the embodiment, the stress distribution of the precise metal mask plate 10 in the process of stretching the average expanded mesh is facilitated, and the wrinkle risk of the welding area 2 is reduced, so that the welding precision can be ensured, the false welding condition can be reduced, and the evaporation quality can be improved.

In the description of the present invention, it is to be understood that the terms "central," "longitudinal," "lateral," "length," "width," "thickness," "upper," "lower," "front," "rear," "left," "right," "vertical," "horizontal," "top," "bottom," "inner," "outer," "clockwise," "counterclockwise," "axial," "radial," "circumferential," and the like are used in the orientations and positional relationships indicated in the drawings for convenience in describing the invention and to simplify the description, and are not intended to indicate or imply that the referenced device or element must have a particular orientation, be constructed and operated in a particular orientation, and are not to be considered limiting of the invention.

Furthermore, the terms "first", "second" and "first" are used for descriptive purposes only and are not to be construed as indicating or implying relative importance or to implicitly indicate the number of technical features indicated. Thus, a feature defined as "first" or "second" may explicitly or implicitly include one or more of that feature. In the description of the present invention, "a plurality" means two or more unless specifically defined otherwise.

In the present invention, unless otherwise explicitly stated or limited, the terms "mounted," "connected," "fixed," and the like are to be construed broadly, e.g., as being permanently connected, detachably connected, or integral; the connection can be mechanical connection, electrical connection or communication; either directly or indirectly through intervening media, either internally or in any other relationship. The specific meanings of the above terms in the present invention can be understood according to specific situations by those of ordinary skill in the art.

In the present invention, unless otherwise expressly stated or limited, the first feature "on" or "under" the second feature may be directly contacting the first and second features or indirectly contacting the first and second features through an intermediate. Also, a first feature "on," "over," and "above" a second feature may be directly or diagonally above the second feature, or may simply indicate that the first feature is at a higher level than the second feature. A first feature being "under," "below," and "beneath" a second feature may be directly under or obliquely under the first feature, or may simply mean that the first feature is at a lesser elevation than the second feature.

In the description herein, references to the description of the term "one embodiment," "some embodiments," "an example," "a specific example," or "some examples," etc., mean that a particular feature, structure, material, or characteristic described in connection with the embodiment or example is included in at least one embodiment or example of the invention. In this specification, the schematic representations of the terms used above are not necessarily intended to refer to the same embodiment or example. Furthermore, the particular features, structures, materials, or characteristics described may be combined in any suitable manner in any one or more embodiments or examples. Furthermore, various embodiments or examples and features of different embodiments or examples described in this specification can be combined and combined by one skilled in the art without contradiction.

While embodiments of the invention have been shown and described, it will be understood by those of ordinary skill in the art that: various changes, modifications, substitutions and alterations can be made to the embodiments without departing from the principles and spirit of the invention, the scope of which is defined by the claims and their equivalents.

Claims

1. The utility model provides a precision metal mask plate which characterized in that includes:

An effective display area;

the two welding areas are respectively positioned on two sides of the effective display area in the length direction, at least one welding area is a set welding area, and a first through hole is formed in the set welding area;

stress balance area, stress balance area is located keep away from of welding area effective display area' S one side, be equipped with the second through-hole on the stress balance area, set for welding area and have welding part and non-welding portion, the welding part is solid construction, first through-hole forms on the non-welding portion, the welding part is a plurality of and is the staggered row and arranges to make two adjacent lines the welding part is crisscross the arranging in the row upwards, the area of welding part is S1, every the area of first through-hole is S2, and S1/S2 satisfies, and 30 is no less than S1/S2 and is no less than 100.

2. A precision metal mask according to claim 1, wherein the first through holes are plural, and the plural first through holes are arranged at regular intervals on the non-welding portion.

3. A precision metal mask according to claim 1, wherein the first through holes are all the same in size and shape.

4. A precision metal mask according to claim 1, wherein the first through-hole is formed in a circular, elliptical or polygonal shape.

5. The precision metal mask according to claim 1, wherein the area S3 of the second through hole and the area S2 of the first through hole satisfy: 0.9 or more and S3/S2 or less and 1.1 or less, wherein the second through holes are multiple and are uniformly distributed on the stress balance area at intervals.

6. A mask plate assembly, comprising:

a frame;

the precise metal mask plate according to any one of claims 1 to 5, wherein the two welding areas are respectively connected with the frame in a welding mode.