CN111809146A

CN111809146A - Mask sheet and mask plate

Info

Publication number: CN111809146A
Application number: CN202010614323.5A
Authority: CN
Inventors: 张丁成; 王水俊; 李伟丽; 范波涛; 孙飞
Original assignee: Kunshan Govisionox Optoelectronics Co Ltd
Current assignee: Kunshan Govisionox Optoelectronics Co Ltd
Priority date: 2020-06-30
Filing date: 2020-06-30
Publication date: 2020-10-23

Abstract

The invention provides a mask sheet, which comprises an evaporation coating area and a non-evaporation coating area, wherein the evaporation coating area is provided with a plurality of evaporation coating openings; the non-evaporation area is adjacent to the evaporation area, the non-evaporation area is divided into a blocking area and a welding area, the blocking area is provided with a plurality of blocking openings, and the blocking openings are located between the welding area and the evaporation area. According to the embodiment of the invention, the separation area is arranged between the evaporation coating area and the welding area, and the separation area is further provided with the plurality of separation openings, so that when a welding point breaks up a large fold into a plurality of small folds in the welding process, the small folds are prevented from extending to the evaporation coating area, the influence of the extension of the small folds to the evaporation coating area in the welding process on the alignment precision is relieved to a certain extent, and the evaporation coating effect is improved.

Description

Mask sheet and mask plate

Technical Field

The application relates to the technical field of display, in particular to a mask and a mask plate.

Background

Organic Light Emitting Diode (OLED) display has excellent characteristics of self-luminescence, no need of a backlight source, high contrast, thin thickness, wide viewing angle, fast reaction speed, applicability to flexible panels, wide application temperature range and the like, and is considered as a new application technology of a next-generation flat panel display.

The full-color display of the OLED generally includes independent light emission of R (red), G (green), and B (blue) sub-pixels, or a combination of a white OLED and a color filter. The RGB sub-pixel independent light emission is currently the most adopted color mode, and uses the organic light emitting material in the sub-pixel unit to independently emit light.

At present, the organic light emitting material layer is generally formed by vacuum evaporation coating of an organic material. For the OLED with independent RGB sub-pixels, each RGB sub-pixel unit uses different organic light emitting materials, so the organic light emitting layers of the RGB sub-pixel units need to be separately evaporated.

At present, a display substrate generally uses a mask device to evaporate an organic light emitting layer in a pixel display area. The mask device comprises a mask frame and a mask sheet welded on the mask frame. In the process of welding the mask sheet, the mask sheet is thin, and patterns for evaporation are arranged on the mask sheet, so that the display effect is influenced by folds of an evaporation area.

Disclosure of Invention

The invention provides a mask sheet and a mask plate.

In a first aspect, an embodiment of the present invention provides a mask, including:

an evaporation region having a plurality of evaporation openings;

the non-evaporation area is arranged adjacent to the evaporation area, the non-evaporation area is divided into a blocking area and a welding area, the blocking area is provided with a plurality of blocking openings, and the blocking openings are located between the welding area and the evaporation area.

Furthermore, the evaporation coating zone comprises an effective evaporation coating zone and a virtual evaporation coating zone, and the blocking zone is located between the virtual evaporation coating zone and the welding zone.

Furthermore, the evaporation plating zone is rectangular, and the non-evaporation plating zone is adjacent to the short side of the evaporation plating zone and is symmetrically arranged relative to the evaporation plating zone.

Further, the long side direction of the evaporation area is a first direction, the short side direction of the evaporation area is a second direction, the plurality of evaporation openings extend along the first direction, and the blocking area extends along the second direction.

Furthermore, a plurality of columns of the blocking openings are arranged in the blocking area along the first direction, and the centers of any two adjacent columns of the blocking openings are arranged in a staggered mode.

Furthermore, a plurality of rows of the blocking openings are arranged in the blocking area along the second direction, and the row spacing of the blocking openings gradually increases from the center of the blocking area to two ends of the blocking area.

Furthermore, a plurality of rows of the blocking openings are arranged in the blocking area along the second direction, and the width of each row of the blocking openings is gradually reduced from the center of the blocking area to two ends of the blocking area.

Further, the length of the barrier zone and the length of the evaporation zone along the second direction are equal.

Further, the shape of the plurality of blocking openings comprises at least one of a long strip shape, an oval shape and a diamond shape;

furthermore, the shape of the blocking opening is a long strip, and the length-width ratio of the long strip ranges from 5:1 to 4: 1.

In a second aspect, an embodiment of the present invention further provides a mask, which includes a mask frame and the mask sheet as described above, where the mask frame and the mask sheet are fixed by the welding area.

The embodiment of the invention provides a mask sheet, which comprises an evaporation coating area and a non-evaporation coating area, wherein the evaporation coating area is provided with a plurality of evaporation coating openings; the non-evaporation area is adjacent to the evaporation area, the non-evaporation area is divided into a blocking area and a welding area, the blocking area is provided with a plurality of blocking openings, and the blocking openings are located between the welding area and the evaporation area. According to the embodiment of the invention, the blocking area is arranged between the evaporation coating area and the welding area, and the blocking area is further provided with the plurality of blocking openings, so that when a welding point breaks up a large fold into a plurality of small folds in the welding process, the small folds are prevented from extending to the evaporation coating area, the influence of the small folds on the evaporation coating precision in the welding process is relieved to a certain extent, and the display effect is improved.

Drawings

In order to more clearly illustrate the technical solutions of the embodiments of the present application, the drawings that are required to be used in the embodiments will be briefly described below, it should be understood that the following drawings only illustrate some embodiments of the present application and therefore should not be considered as limiting the scope, and for those skilled in the art, other related drawings can be obtained from the drawings without inventive effort.

Fig. 1 is a schematic structural diagram of a mask sheet according to an embodiment.

Fig. 2 is a schematic structural diagram of a mask sheet according to an embodiment.

Fig. 3 is a schematic structural diagram of a mask sheet according to an embodiment.

Fig. 4 is a schematic structural diagram of a mask sheet according to an embodiment.

Fig. 5 is a schematic structural diagram of a mask sheet according to an embodiment.

Description of reference numerals: 10-evaporation zone; 11-an effective evaporation area; 12-a virtual evaporation zone; 20-non-evaporation area; 21-a barrier region; 22-a welding zone; 101-vapor deposition opening; 201-obstruct the opening.

Detailed Description

In order to make the objects, technical solutions and advantages of the embodiments of the present application clearer, the technical solutions in the embodiments of the present application will be clearly and completely described below with reference to the drawings in the embodiments of the present application, and it is obvious that the described embodiments are some embodiments of the present application, but not all embodiments. The components of the embodiments of the present application, generally described and illustrated in the figures herein, can be arranged and designed in a wide variety of different configurations.

The following disclosure provides many different embodiments or examples for implementing different features of the application. In order to simplify the disclosure of the present application, specific example components and arrangements are described below. Of course, they are merely examples and are not intended to limit the present application. Moreover, the present application may repeat reference numerals and/or letters in the various examples, such repetition is for the purpose of simplicity and clarity and does not in itself dictate a relationship between the various embodiments and/or configurations discussed. In addition, examples of various specific processes and materials are provided herein, but one of ordinary skill in the art may recognize applications of other processes and/or use of other materials.

It should be noted that: like reference numbers and letters refer to like items in the following figures, and thus, once an item is defined in one figure, it need not be further defined and explained in subsequent figures.

It should be noted that the features of the embodiments of the present application may be combined with each other without conflict.

As mentioned in the background art, the inventor found in the research process that, because the thickness of the mask strip is thin and the mask strip is provided with an opening pattern for vapor deposition, the mask strip is easy to deform and generate some large wrinkles during the process of pulling and fixing the mask strip. In following welding process, usually through a plurality of scattered welding points with mask strip and frame welded fastening, but scattered welding point can be broken up big fold into a plurality of little folds, and little fold can extend to the display area, influences the laminating effect of mask piece and the base plate of treating the coating by vaporization, probably further makes the open position of coating by vaporization take place the skew, is unfavorable for the coating by vaporization of base plate. Therefore, the inventor invents a mask sheet and a mask plate through research, which can prevent the extension of small folds to the evaporation area and avoid the influence on the evaporation display area to a certain extent.

In a first aspect, an embodiment of the present application provides a mask sheet, including an evaporation region and a non-evaporation region, where the evaporation region has a plurality of evaporation openings; the non-evaporation area is adjacent to the evaporation area, the non-evaporation area is divided into a blocking area and a welding area, the blocking area is provided with a plurality of blocking openings, and the blocking openings are located between the welding area and the evaporation area. According to the embodiment of the invention, the blocking area is arranged between the evaporation coating area and the welding area, and the blocking area is further provided with the plurality of blocking openings, so that when a welding point breaks up a large fold into a plurality of small folds in the welding process, the small folds are prevented from extending to the evaporation coating area, the influence of the small folds on the evaporation coating precision in the welding process is relieved to a certain extent, and the display effect is improved.

Specifically, referring to fig. 1 and 2, the mask sheet includes an evaporation region 10 and a non-evaporation region 20, the non-evaporation region 20 is disposed adjacent to the evaporation region 10, and the evaporation region 10 has a plurality of evaporation openings 101. The non-evaporation region 20 is divided into a blocking region 21 and a welding region 22, the blocking region 21 has a plurality of blocking openings 201, and the plurality of blocking openings 201 are located between the welding region 22 and the evaporation region 10. According to the embodiment of the invention, the blocking area 21 is arranged between the evaporation coating area 10 and the welding area 22, and the blocking area 21 is further provided with the plurality of blocking openings 201, so that when a welding point breaks up a large fold into a plurality of small folds in the welding process, the small folds are prevented from extending to the evaporation coating area 10, the influence of the small folds on the evaporation coating precision in the welding process is relieved to a certain extent, and the display effect is improved.

Referring to fig. 1 and fig. 2, the evaporation region 10 includes an effective evaporation region 11 and a dummy evaporation region 12, and the blocking region is located between the dummy evaporation region 12 and the bonding pad 22. It should be noted that the effective evaporation region 11 refers to a region where light-emitting sub-pixels are evaporated, and in the conventional process, not only the sub-pixels are evaporated in the light-emitting region, but also some sub-pixels with the same film layer are evaporated around the light-emitting sub-pixels, but these peripheral sub-pixels do not emit light, and the region where the peripheral non-light-emitting sub-pixels are located is a virtual evaporation region. The dummy evaporation region 12 and the effective evaporation region 11 evaporate the same sub-pixel film layer under the same process conditions. After the light-emitting sub-pixels are evaporated in the effective evaporation region, the performance of the light-emitting sub-pixels is usually tested, and since the same film layer is prepared in the virtual evaporation region 12 and the effective evaporation region 11 under the same process conditions, the performance of the sub-pixels evaporated in the effective evaporation region 11 can be judged by testing the performance of the sub-pixels evaporated in the virtual evaporation region 12.

If in the welding process, little fold extends to virtual evaporation coating zone 12, can influence the counterpoint precision of the evaporation coating opening in virtual evaporation coating zone 12, and then influences the test result of follow-up sub-pixel performance to virtual evaporation coating zone 12 evaporation coating, also can cause the influence to the performance judgement of the luminous sub-pixel of effective evaporation coating zone 11 evaporation coating. Therefore, the blocking area 21 is disposed between the welding area 22 and the virtual evaporation area 12, and the small wrinkles can be blocked from extending to the virtual evaporation area 12 through the plurality of blocking openings 201 of the blocking area, so that the influence of the small wrinkles on the evaporation precision is avoided to a certain extent.

In an embodiment of the present invention, the evaporation region 10 is rectangular, and referring to fig. 1 to 3, the non-evaporation region 20 is adjacent to a short side of the evaporation region 10 and is symmetrically disposed with respect to the evaporation region 10. The non-evaporation region 20 is divided into a blocking region 21 and a welding region 22, the blocking region 21 is adjacent to the left and right short sides of the evaporation region 10 and is symmetrically arranged with respect to the evaporation region 10, and the welding region 22 is adjacent to the blocking region 21 and is also symmetrically arranged with respect to the evaporation region 10. In this embodiment, the shape of the evaporation region 10 is rectangular, and the evaporation region may have other shapes, which is not limited in the present invention. The both sides in coating by vaporization district all are provided with the weld zone, set up the separation district between weld zone and coating by vaporization district, and the separation opening in separation district can block the little fold that produces among the welding process and extend to the coating by vaporization district, promotes the coating by vaporization counterpoint precision to a certain extent.

In an embodiment of the present invention, referring to fig. 1 to 3, a long side direction of the evaporation region is a first direction, a short side direction of the evaporation region is a second direction, a left-right direction in the drawings is the first direction, and an up-down direction is the second direction. The mask sheet is stretched along a first direction, and a large wrinkle is generated along the first direction during the stretching process. The vapor deposition openings 101 extend in the first direction, and the barrier openings 201 extend in the first direction. Set up the open-ended extending direction of separation into with the direction unanimous in the directional coating by vaporization district of welding zone, in welding process, when the welding point breaks up into little fold with big fold, can play better separation effect to the extension of little fold. In the drawings, the vapor deposition region and the vapor deposition opening are schematically illustrated as being rectangular in shape, and may be in any other shape.

In an embodiment of the present invention, referring to fig. 1, a plurality of rows of barrier openings 201 are arranged in the barrier region 21 along a first direction, and centers of any two adjacent rows of barrier openings are arranged in a staggered manner. Because the mask sheet and the mask frame can be fixed by a plurality of scattered welding points in a welding mode, by the arrangement mode of the blocking openings, when a plurality of small wrinkles are generated in the welding process, the blocking openings in each column can achieve a good blocking effect on the extension of the small wrinkles in the first direction.

In an embodiment of the invention, referring to fig. 2, a plurality of rows of barrier openings 201 are arranged in the barrier region 21 along the second direction, and centers of any two adjacent rows of barrier openings are arranged in a staggered manner. By means of the arrangement mode of the blocking openings, when a plurality of small folds are generated in the welding process, the blocking openings in each row can achieve a good blocking effect on extension of the small folds in the second direction. Further, referring to fig. 3, the line spacing of the blocking openings gradually increases from the center of the blocking area to the two ends. Before the mask sheet is welded to the mask frame, the mask sheet is usually stretched by a clamping jig and then welded. When centre gripping tool centre gripping masking film, be the left and right sides both ends of centre gripping masking film usually, and only centre gripping a plurality of fixed point position, not to carry out the centre gripping to the whole terminal surface at both ends about, so the fold of tensile production can be more on the horizontal center line of symmetry of masking film, and the fold size can diminish in the direction of both ends from the center, and fold quantity also can reduce. Therefore, the line pitch of the barrier openings gradually increases from the center of the barrier region to both ends. At the center of the blocking area, the line spacing of the blocking openings is smaller, the blocking openings are more concentrated, the capacity of blocking the extension of small folds is stronger, and the blocking effect is better.

It should be noted that, in the embodiment of the present invention, only the staggered arrangement of the multiple rows or multiple columns of barrier openings is mentioned, the multiple rows or multiple columns of barrier openings may also be arranged in an array, when multiple rows or multiple columns of barrier openings are arranged in the barrier region, the transverse spacing of the barrier openings is 0.03-0.1mm, the longitudinal spacing is 0.05-0.1mm, and when the transverse spacing and the longitudinal spacing are 1:2-1:1, the barrier effect of the barrier region is the best. In addition, the transverse spacing of the blocking openings refers to the spacing of the centers of the blocking openings in the first direction, and the longitudinal spacing of the blocking openings refers to the spacing of the centers of the blocking openings in the second direction.

In an embodiment of the invention, referring to fig. 4, a plurality of rows of barrier openings 201 are arranged in the barrier region 21 along the second direction, and widths of the barrier openings along the second direction gradually decrease from the center to both ends of the barrier region. As described above, in the process of stretching the mask sheet, wrinkles generated by the stretching are relatively large on the center line of symmetry in the lateral direction of the mask sheet, and the size of the wrinkles becomes small in the direction away from the center line, and the number of wrinkles also decreases. Therefore, the width in the second direction by providing the barrier opening 201 is gradually reduced from the center of the barrier region to both ends. In the center of the blocking area, the width of the blocking opening along the second direction is larger, so that a large number of small folds can be blocked to extend to the evaporation area; at the both ends of separation district, the width of separation opening along the second direction is less, also can separate little fold and extend to the coating by vaporization district.

In an embodiment of the present invention, referring to fig. 1 to 5, the lengths of the barrier region 21 and the evaporation region 10 along the second direction are equal, that is, how long the evaporation region has along the second direction, and correspondingly, barrier openings are disposed in the corresponding regions of the barrier region to block small wrinkles from extending to the evaporation region, so as to avoid affecting the evaporation precision and further affecting the display effect.

In an embodiment of the invention, referring to fig. 1 to 5, the shape of the blocking opening includes at least one of a long strip shape, an oval shape, and a diamond shape, and may be other irregular shapes (not shown), which is not limited in the invention. Taking the shape of the blocking opening as an example, the inventors found in the research process that the effect of blocking the small wrinkles from extending by the blocking opening is best when the length-width ratio of the strip is in the range of 5:1 to 4: 1. It should be noted that, during the research process, the inventors also found that the effect of blocking the small fold extension by the elongated blocking opening is the best when the length dimension is 0.15-0.2mm and the width dimension is in the range of 0.03-0.05 mm.

In another aspect, an embodiment of the present invention provides a mask plate, which includes a mask frame (not shown) and a mask sheet as described above, wherein the mask frame and the mask sheet are fixed by a welding region 22. The inventor finds that the effect of blocking the small fold extension by the blocking opening is best when the distance range of the blocking area from the inner edge of the mask frame is 0.5-1mm, and the distance range of the blocking area from the virtual evaporation area is 0.5-2 mm. Set up the separation district through setting up between the weld zone and the coating by vaporization district to the mask piece, set up a plurality of separation openings in the separation district, can alleviate to a certain extent when welding mask piece to the mask frame on, the little fold that the welding produced extends to the coating by vaporization district for the coating by vaporization opening position in coating by vaporization district takes place the skew, leads to the fact the condition of influence to the coating by vaporization counterpoint precision, promotes the coating by vaporization precision to a certain extent, and then promotes display effect.

In the foregoing embodiments, the descriptions of the respective embodiments have respective emphasis, and for parts that are not described in detail in a certain embodiment, reference may be made to related descriptions of other embodiments.

The above embodiments of the present application are described in detail, and specific examples are applied in the present application to explain the principles and implementations of the present application, and the description of the above embodiments is only used to help understand the technical solutions and core ideas of the present application; those of ordinary skill in the art will understand that: the technical solutions described in the foregoing embodiments may still be modified, or some technical features may be equivalently replaced; such modifications or substitutions do not depart from the spirit and scope of the present disclosure as defined by the appended claims.

Claims

1. A mask sheet, comprising:

an evaporation region having a plurality of evaporation openings;

2. The mask sheet of claim 1, wherein the evaporation zone comprises an active evaporation zone and a virtual evaporation zone, the barrier zone being located between the virtual evaporation zone and the bonding zone.

3. The mask sheet according to claim 1, wherein the evaporation region is rectangular, and the non-evaporation region is adjacent to a short side of the evaporation region and is symmetrically disposed with respect to the evaporation region.

4. The mask sheet according to claim 3, wherein the long side direction of the evaporation region is a first direction, the short side direction of the evaporation region is a second direction, the evaporation openings extend in the first direction, and the barrier openings extend in the first direction.

5. The mask sheet according to claim 4, wherein a plurality of rows of said blocking openings are arranged along said first direction in said blocking area, and the centers of said blocking openings of any two adjacent rows are arranged in a staggered manner.

6. The mask sheet according to claim 4, wherein a plurality of rows of said barrier openings are arranged in said second direction in said barrier region, and a pitch of said rows of said barrier openings gradually increases from a center to both ends of said barrier region.

7. The mask sheet according to claim 4, wherein a plurality of rows of said barrier openings are arranged in said second direction in said barrier region, each row of said barrier openings having a width gradually decreasing from a center to both ends of said barrier region.

8. The mask sheet of claim 4, wherein the barrier region and the evaporation region have equal lengths along the second direction.

9. The mask sheet of claim 1, wherein the plurality of blocking openings have a shape comprising at least one of a bar, an oval, and a diamond;

preferably, the shape of the blocking opening is a long strip, and the length-width ratio of the long strip ranges from 5:1 to 4: 1.

10. A reticle comprising a mask frame and a mask sheet according to any one of claims 1 to 9, said mask frame and said mask sheet being fixed by said lands.